Adjustable aperture position device and semiconductor testing equipment

Abstract

This application belongs to the field of semiconductor testing equipment, and particularly relates to an adjustable aperture position device and semiconductor testing equipment. The adjustable aperture position device includes a first adjustment mechanism, a second adjustment mechanism, a movable mechanism, and an aperture assembly. The movable mechanism includes a second cylinder assembly and a guide rod assembly. The guide rod assembly is movably connected to the second cylinder assembly and passes through the second cylinder assembly along a first direction. The aperture assembly is connected to the guide rod assembly and located outside the second cylinder assembly. The first adjustment mechanism is connected to the guide rod assembly and can drive the guide rod assembly to move the aperture assembly in the first direction. The second adjustment mechanism is connected to the second cylinder assembly and can drive the first adjustment mechanism to swing the guide rod assembly and the aperture assembly. According to imaging process requirements, the aperture assembly is driven by the combination of the first and second adjustment mechanisms, thereby selecting an aperture with a suitable diameter and achieving alignment with the electron beam center.

Description

Technical Field

[0001] This application belongs to the field of semiconductor testing equipment, and in particular relates to an adjustable aperture position device and semiconductor testing equipment. Background Technology

[0002] In recent years, with the rapid development of the semiconductor industry, the demand for defect detection equipment in wafer manufacturing processes has become increasingly widespread. Since the features to be inspected on wafers are all microscopic, commonly used optical inspection equipment can no longer meet the requirements. All existing wafer inspection equipment uses electron beam inspection. To ensure clear imaging in electron beam inspection, an aperture needs to be installed between the electron beam pump source and the workpiece being inspected, ensuring that the center of the electron beam passes through while the remaining electrons are intercepted.

[0003] The aperture has multiple aperture holes to accommodate electron beams of different specifications. It is generally equipped with a mechanical structure to adjust the position of the aperture so as to match the aperture hole with the electron beam. However, the mechanical structure used to adjust the position of the aperture is generally manually adjusted, which is inefficient and has poor precision. Summary of the Invention

[0004] This application provides an adjustable aperture position device and a semiconductor testing equipment to solve the technical problems of low debugging efficiency and poor accuracy provided by the prior art.

[0005] According to one aspect of this application, an adjustable aperture position device is provided, the adjustable aperture position device including a first adjustment mechanism, a second adjustment mechanism, a movable mechanism, and an aperture assembly; the movable mechanism includes a second cylinder assembly and a guide rod assembly, the guide rod assembly being movably connected to the second cylinder assembly and passing through the second cylinder assembly in a first direction; the aperture assembly being connected to the guide rod assembly and located outside the second cylinder assembly; the first adjustment mechanism being connected to the guide rod assembly and capable of driving the guide rod assembly to move the aperture assembly in the first direction, and the second adjustment mechanism being connected to the second cylinder assembly and capable of driving the first adjustment mechanism to swing the guide rod assembly and the aperture assembly.

[0006] In an optional embodiment of this application, the first adjustment mechanism includes a first power component, a first cylinder assembly, and a first elastic element; at least a portion of the first cylinder assembly and the first elastic element are disposed within the second cylinder assembly, and the guide rod assembly passes through the first cylinder assembly; the first elastic element extends along a first direction and is sandwiched between the first cylinder assembly and the second cylinder assembly, so that the end of the first cylinder assembly near the aperture assembly abuts against the second cylinder assembly to form a sway fulcrum; the first power component is connected to the guide rod assembly and the first cylinder assembly and is located away from the aperture assembly in the first direction, and the first power component is used to drive the guide rod assembly to move along the first direction.

[0007] In an optional embodiment of this application, the second cylinder assembly includes a second cylinder body and a second limiting ring, the second limiting ring being disposed within and connected to the second cylinder body; the first cylinder assembly includes a first cylinder body and a first limiting ring, at least a portion of the first cylinder body being disposed within the second cylinder body and passing through the second limiting ring, the first limiting ring being disposed within the second cylinder body and connected to the first cylinder body; the first limiting ring and the second limiting ring are spaced apart along a first direction, and a first elastic member is clamped between the first limiting ring and the second limiting ring.

[0008] In an optional embodiment of this application, the guide rod assembly includes a guide rod and a slide rod. The guide rod passes through the first cylinder in a first direction, and the slide rod extends radially along the guide rod and is connected to the guide rod. The first cylinder is provided with a guide hole that extends in the first direction. The slide rod extends into the guide hole and can move along the guide hole.

[0009] In an optional embodiment of this application, the second cylinder assembly further includes a deformation sleeve, which is disposed outside the second cylinder and connected between the guide rod assembly and the second cylinder. The deformation sleeve extends along a first direction and is sleeved on the guide rod assembly.

[0010] In an optional embodiment of this application, the first adjustment mechanism further includes a transfer assembly and a second elastic element; the transfer assembly is threadedly connected to the guide rod assembly and the first power component respectively, and the second elastic element is disposed in the first cylinder and sandwiched between the first cylinder and the transfer assembly.

[0011] In an optional embodiment of this application, the second adjustment mechanism includes a second power component and a pin assembly. The second power component and the pin assembly are both connected to the second cylinder assembly and are arranged opposite to each other in a second direction. The second power component and the pin assembly abut against the first cylinder assembly and drive the first cylinder assembly in the second direction so that the guide rod assembly and the aperture assembly swing based on the oscillation fulcrum. The second direction is perpendicular to the first direction.

[0012] In an optional embodiment of this application, the ejector assembly includes a pressure cap, a third elastic element, and an ejector pin; one end of the ejector pin abuts against the first cylinder assembly, and the other end of the ejector pin extends into the pressure cap; the pressure cap is connected to the second cylinder assembly, and the third elastic element is disposed within the pressure cap and sandwiched between the ejector pin and the pressure cap.

[0013] In an optional embodiment of this application, the aperture assembly includes a bracket, a pressure plate, and an aperture; the bracket is connected to the guide rod assembly, and the pressure plate is connected to the bracket and clamps the aperture between the pressure plate and the bracket.

[0014] According to another aspect of this application, a semiconductor testing device is provided, including the aforementioned adjustable aperture position device.

[0015] In summary, the adjustable aperture position device and semiconductor testing equipment provided in this application have at least the following beneficial effects:

[0016] In this application, the guide rod assembly is driven by a first adjustment mechanism and a second adjustment mechanism, giving the guide rod assembly a first degree of freedom of movement and a swinging degree of freedom. This allows the guide rod assembly to move the aperture assembly, thereby changing the position of each aperture hole on the aperture assembly to adapt to different specifications of electron beam currents and ensure electron beam imaging quality. Furthermore, both the first and second adjustment mechanisms are automatic control mechanisms, enabling automatic adjustment of the aperture assembly position, which is convenient, fast, efficient, and precise. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application; those skilled in the art can obtain other drawings based on these drawings without any creative effort.

[0018] Figure 1 This is a schematic diagram of an adjustable aperture position device according to one embodiment;

[0019] Figure 2 for Figure 1 A partial cross-sectional view of the adjustable aperture position device in the image;

[0020] Figure 3 for Figure 1 Exploded view of the second regulating mechanism and the active mechanism in the diagram;

[0021] Figure 4 for Figure 1 Exploded view of the first regulating mechanism in the middle;

[0022] Figure 5 for Figure 1 Exploded view of the aperture assembly in the image;

[0023] Figure 6 for Figure 2 A magnified view of point S in the middle.

[0024] The attached figures are labeled as follows:

[0025] 10. First adjusting mechanism; 11. First power component; 12. First cylinder assembly; 121. First cylinder body; 122. First limiting retaining ring; 123. First adapter plate; 13. First elastic element; 14. Adapter assembly; 141. Adapter block; 142. Screw connector; 15. Second elastic element;

[0026] 20. Second adjusting mechanism; 21. Second power component; 22. Ejector pin assembly; 221. Pressure cap; 2211. Cover; 2212. Sleeve; 222. Third elastic element; 223. Ejector pin;

[0027] 30. Movable mechanism; 31. Second cylinder assembly; 311. Second cylinder body; 312. Second limiting retaining ring; 313. Deformation sleeve; 314. Second adapter plate; 32. Guide rod assembly; 321. Guide rod; 322. Slide rod; 301. Set screw; 302. Sealing ring;

[0028] 40. Aperture assembly; 41. Bracket; 42. Pressure plate; 43. Aperture;

[0029] A. Long groove; H1. Guide hole; H2. First strip hole; H3. Second strip hole. Detailed Implementation

[0030] In the description of this application, it should be understood that the use of terms such as "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" to indicate orientation or positional relationship, unless otherwise specified, is understood to be based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0031] Furthermore, features specified with "first" or "second" for descriptive purposes only should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Features specified with "first" or "second" may explicitly or implicitly include at least one of the specified features. The description of "multiple" generally means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0032] In this application, unless otherwise explicitly specified and limited, terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can be a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0033] In the description of this specification, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that the specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0034] Figure 1 This is a schematic diagram of an adjustable aperture position device according to one embodiment. Please refer to... Figure 1 The adjustable aperture position device can be used in semiconductor testing equipment and includes a first adjustment mechanism 10, a second adjustment mechanism 20, an active mechanism 30, and an aperture assembly 40.

[0035] It should be noted that the aperture assembly 40 is provided with multiple aperture holes and can extend into the vacuum chamber of the semiconductor detection equipment. Different aperture holes need to be matched with electron beam currents of different specifications to ensure the imaging quality of electron beam detection.

[0036] Figure 2 for Figure 1 A partial cross-sectional view of the adjustable aperture position device. See also... Figure 2 The movable mechanism 30 includes a second cylinder assembly 31 and a guide rod assembly 32. The guide rod assembly 32 is movably connected to the second cylinder assembly 31 and passes through the second cylinder assembly 31 along a first direction. An aperture assembly 40 is connected to the guide rod assembly 32 and is located outside the second cylinder assembly 31. Specifically, the second cylinder assembly 31 can be mounted on the side wall of the vacuum chamber, and the aperture assembly 40, located outside the second cylinder assembly 31, extends into the vacuum chamber. The guide rod assembly 32 is movable relative to the second cylinder assembly 31 and can drive the aperture assembly 40 to move. It should be noted that, in this embodiment, the first direction is the axial direction of the guide rod assembly 32.

[0037] The first adjustment mechanism 10 is connected to the guide rod assembly 32 and can drive the guide rod assembly 32 to move the aperture assembly 40 in the first direction. The second adjustment mechanism 20 is connected to the second cylinder assembly 31 and can drive the first adjustment mechanism 10 to swing the guide rod assembly 32 and the aperture assembly 40.

[0038] Specifically, the first adjustment mechanism 10 directly drives the guide rod assembly 32 to move, and the second adjustment mechanism 20 drives the first adjustment mechanism 10 to move, thereby driving the guide rod assembly 32. Thus, in this embodiment, the guide rod assembly 32 is driven by the cooperation of the first adjustment mechanism 10 and the second adjustment mechanism 20, giving the guide rod assembly 32 a first directional degree of freedom and a swinging degree of freedom. This allows the guide rod assembly 32 to move the aperture assembly 40, thereby changing the position of each aperture hole on the aperture assembly 40 to adapt to different specifications of electron beam currents and ensure electron beam imaging quality.

[0039] It should be noted that in this embodiment, both the first adjustment mechanism 10 and the second adjustment mechanism 20 are automatic control mechanisms, which realize the automatic adjustment of the position of the aperture assembly 40, which is convenient, fast, efficient and accurate.

[0040] In some alternative embodiments, the first adjustment mechanism 10 includes a first power member 11, a first cylinder assembly 12, and a first elastic element 13. At least a portion of the first cylinder assembly 12 and the first elastic element 13 are disposed within the second cylinder assembly 31, and the guide rod assembly 32 passes through the first cylinder assembly 12.

[0041] Specifically, both the first cylindrical assembly 12 and the second cylindrical assembly 31 are arranged along a first direction. At least a portion of the first cylindrical assembly 12 is embedded in the second cylindrical assembly 31, that is, the second cylindrical assembly 31 is sleeved on the first cylindrical assembly 12. The guide rod assembly 32 extends along the first direction and passes through the first cylindrical assembly 12, that is, the first cylindrical assembly 12 is sleeved on the guide rod assembly 32. It can be seen that the guide rod assembly 32, the first cylindrical assembly 12, and the second cylindrical assembly 31 are arranged sequentially from the inside to the outside along the radial direction of the guide rod assembly 32.

[0042] The first elastic member 13 extends along the first direction and is sandwiched between the first cylinder assembly 12 and the second cylinder assembly 31, so that the end of the first cylinder assembly 12 near the aperture assembly 40 abuts against the second cylinder assembly 31 to form a swing fulcrum.

[0043] Specifically, the first elastic element 13 is in a compressed state, thus generating pressure in the first direction to act on the first cylinder assembly 12, so that one end of the first cylinder assembly 12 remains in contact with the second cylinder assembly 31, thereby forming a swing fulcrum at the end of the first cylinder assembly 12 near the aperture assembly 40 where it contacts the inner wall of the second cylinder assembly 31, ensuring that the second adjustment mechanism 20 can drive the first adjustment mechanism 10 to make the first cylinder assembly 12 swing the guide rod assembly 32 and the aperture assembly 40.

[0044] The first power component 11 is connected to the guide rod assembly 32 and the first cylinder assembly 12 and is located away from the aperture assembly 40 in the first direction. The first power component 11 is used to drive the guide rod assembly 32 to move in the first direction.

[0045] Specifically, the first power component 11 is installed at the end of the first cylinder assembly 12 away from the aperture assembly 40 and is driven to be connected to one end of the guide rod assembly 32. The first power component 11 serves as the power source in the first adjustment mechanism 10, so as to drive the guide rod assembly 32 to move along the first direction, thereby changing the position of the aperture assembly 40 in the first direction.

[0046] In some optional embodiments, the second adjustment mechanism 20 includes a second power component 21 and a pin assembly 22, both of which are connected to the second cylinder assembly 31 and are disposed opposite to each other in a second direction. The second power component 21 and the pin assembly 22 abut against the first cylinder assembly 12 and drive the first cylinder assembly 12 in the second direction to cause the guide rod assembly 32 and the aperture assembly 40 to swing based on the yaw pivot.

[0047] Specifically, the second power component 21 and the ejector pin assembly 22 cooperate to clamp the first cylinder assembly 12 in the second direction. By changing the driving force provided by the second power component 21, the first cylinder assembly 12 can swing based on the yaw fulcrum, thereby driving the guide rod assembly 32 located therein to swing. The guide rod assembly 32 drives the aperture assembly 40 to swing, thereby changing the position of the aperture hole on the aperture assembly 40.

[0048] In this embodiment, both the first power component 11 and the second power component 21 are direct-drive motors. However, this is not a limitation; for example, they could also be electric cylinders. Furthermore, the second direction is perpendicular to the first direction. As mentioned above, the first direction is the axial direction of the guide rod assembly 32, and the second direction can be the radial direction of the guide rod assembly 32.

[0049] In some optional embodiments, the second cylinder assembly 31 includes a second cylinder body 311 and a second limiting ring 312, the second limiting ring 312 being disposed inside the second cylinder body 311 and connected to the second cylinder body 311.

[0050] It should be understood that a cavity is formed inside the second cylinder 311, and the second limiting ring 312 is fixedly installed in the second cylinder 311 and located inside its cavity. Figure 3 for Figure 1 The exploded view of the second adjustment mechanism 20 and the moving mechanism 30 in the illustrated embodiment shows that the second cylinder 311 includes a cylindrical section and a square section connected along a first direction. The radial section of the square section is projected axially to at least cover the radial section of the cylindrical section. The cylindrical section is close to the aperture assembly 40, and the square section is close to the first power member 11.

[0051] Additionally, the second cylinder assembly 31 also includes a second adapter plate 314, which is connected to the square section of the second cylinder body 311. The second power component 21 is connected to the second adapter plate 314 and partially extends into the square section of the second cylinder body 311 to abut against the first cylinder assembly 12. The ejector pin assembly 22 is connected to the square section of the second cylinder body 311 and partially extends into the square section of the second cylinder body 311 to abut against the first cylinder assembly 12, thereby achieving clamping of the first cylinder assembly 12 in the second direction.

[0052] The second limiting ring 312 is disposed within the square section of the second cylinder 311 and is fixed by multiple set screws 301. Of course, the second limiting ring 312 is not limited to being fixed by set screws 301; it can also be fixed by processes such as adhesive bonding or welding.

[0053] Figure 4 for Figure 1 An exploded view of the first regulating mechanism 10. (See also...) Figure 4 Furthermore, the first cylinder assembly 12 includes a first cylinder body 121 and a first limiting ring 122. At least a portion of the first cylinder body 121 is disposed within the second cylinder body 311 and passes through the second limiting ring 312. The first limiting ring 122 is disposed within the second cylinder body 311 and connected to the first cylinder body 121.

[0054] Specifically, one end of the first cylinder 121 extends into the second cylinder 311 and abuts against the end of the second cylinder 311 near the aperture assembly 40, while the other end extends out of the second cylinder 311 and is connected to the first power component 11. The first limiting ring 122 is sleeved on the first cylinder 121 and inside the second cylinder 311, and the second limiting ring 312 is configured to allow the first cylinder 121 to pass through.

[0055] In practical applications, the first limiting retaining ring 122 can be interference-fitted with the first cylinder 121 to securely fasten the outer sleeve onto the peripheral wall of the first cylinder 121. However, this is not the only option; welding, gluing, or other processes can also be used. It should be noted that to ensure the first cylinder assembly 12 has a degree of freedom of movement, the first limiting retaining ring 122 is clearance-fitted with the second cylinder 311 to ensure that the first cylinder assembly 12 has a margin for movement.

[0056] Please combine Figure 2 Furthermore, the first limiting ring 122 and the second limiting ring 312 are spaced apart along the first direction, and the first elastic member 13 is sandwiched between the first limiting ring 122 and the second limiting ring 312.

[0057] In this embodiment, the first elastic member 13 is sandwiched between the first limiting ring 122 in the first cylinder assembly 12 and the second limiting ring 312 in the second cylinder assembly 31. The first limiting ring 122 is fixed on the outer peripheral wall of the first cylinder 121 but has a clearance fit with the second cylinder 311. The position of the second limiting ring 312 is fixed. The first elastic member 13 is in a compressed state and thus always provides force to the first limiting ring 122, so that one end of the first cylinder 121 always abuts against the inner wall of the second cylinder 311 and forms a swing fulcrum.

[0058] Preferably, the first elastic element 13 is sleeved on the first cylinder 121, which can better fix the first elastic element 13 and ensure the reliability of the first adjustment mechanism 10.

[0059] Figure 6 for Figure 2 A magnified view of point S in the middle. Please refer to [link / reference]. Figure 6 In a further optional embodiment, the end of the first cylinder 121 near the aperture assembly 40 is a rounded end and abuts against the second cylinder 311 to form a swing fulcrum.

[0060] In this embodiment, in order to ensure a tight fit, the inner wall of the second cylinder 311 is provided with an arc groove at a corresponding position to fit the round end of the first cylinder 121, thereby forming a mating arc surface, and the pivot point is the center of the mating arc surface.

[0061] In this embodiment, the guide rod assembly 32 passes through the first cylinder 121. The first power component 11 is installed at one end of the first cylinder 121 and connected to one end of the guide rod assembly 32 to drive the guide rod assembly 32 to move in a first direction. The second power component 21 and the ejector pin assembly 22 both abut against the first cylinder 121 to drive the guide rod assembly 32 located therein to swing by driving the first cylinder 121.

[0062] Please see Figure 4 In the illustrated embodiment, the first cylindrical body 121 includes a small-diameter cylindrical section and a large-diameter cylindrical section. Two elongated grooves A are provided on the outer peripheral wall of the large-diameter cylindrical section of the first cylindrical body 121, which are arranged opposite each other in the second direction. Both elongated grooves A extend along the first direction. One end of the ejector assembly 22 and one end of the second power member 21 respectively abut against the corresponding elongated grooves A, thereby limiting the range of motion of the first cylindrical body 121 in the first direction.

[0063] In addition, the first cylinder assembly 12 also includes a first adapter plate 123, which is connected to the first cylinder body 121, and the first power component 11 is connected to the first adapter plate 123. Specifically, one end of the large-diameter cylindrical section of the first cylinder body 121 is formed with a square flange structure to cooperate with the first adapter plate 123.

[0064] Please see Figure 2 In this embodiment, the square flange structure of the first cylinder 121 is arranged at a distance from the end of the second cylinder 311. Therefore, the first power component 11 connected to the square flange mechanism of the first cylinder 121 is in a suspended state. When the second adjustment mechanism 20 drives the first cylinder 121 to swing, the first power component 11 will also swing with the first cylinder 121.

[0065] In some optional embodiments, the guide rod assembly 32 includes a guide rod 321 and a slide rod 322. The guide rod 321 passes through the first cylinder 121 along a first direction, and the slide rod 322 extends radially along the guide rod 321 and is connected to the guide rod 321. The first cylinder 121 is provided with a guide hole H1, which extends along the first direction. The slide rod 322 extends into the guide hole H1 and is movable along the guide hole H1.

[0066] In this embodiment, the first power component 11 and the aperture assembly 40 are respectively connected to the two ends of the guide rod 321. The first power component 11 drives the guide rod 321 to move along the first direction, and the second power component 21 drives the first cylinder 121 to swing so as to drive the guide rod 321 and the aperture assembly 40 to swing.

[0067] Furthermore, through the cooperation between the slide rod 322 and the guide hole H1, the guide rod 321 is limited to moving only in the first direction under the drive of the first power component 11, thus preventing the guide rod 321 from twisting with the first cylinder 121.

[0068] In the illustrated embodiment, there are two guide holes H1, which are arranged radially opposite to each other on the small-diameter cylindrical section of the first cylinder 121. The two ends of the slide rod 322 extend into the guide holes H1 on both radial sides.

[0069] In some optional embodiments, the second cylinder assembly 31 further includes a deformable sleeve 313, which is disposed outside the second cylinder body 311 and connected between the guide rod assembly 32 and the second cylinder body 311. The deformable sleeve 313 extends along a first direction and is sleeved on the guide rod assembly 32.

[0070] In this embodiment, the deformable sleeve 313 is capable of deformation under applied force. The two ends of the deformable sleeve 313 are respectively connected to the second cylinder 311 and the end of the guide rod 321 near the aperture assembly 40. During the movement or oscillation of the guide rod 321 along the first direction, the deformable sleeve 313 can generate corresponding deformation to adapt to the movement of the guide rod 321.

[0071] As described above, the second cylinder assembly 31 is connected to the side wall of the vacuum chamber. In the illustrated embodiment, one end of the second cylinder 311 is a circular flange structure. The circular flange structure is connected to the side wall of the vacuum chamber by fastening fasteners (such as bolts, screws, etc.), and part of the guide rod 321, the deformation sleeve 313 and the aperture assembly 40 are inserted into the vacuum chamber. In this way, the aperture position adjustable device can be installed on the side wall of the vacuum chamber.

[0072] The deformable sleeve 313 is sleeved on the part of the guide rod 321 that extends out of the second cylinder 311 and is connected to the circular flange structure of the second cylinder 311. The deformable sleeve 313 can separate the cylinder cavity of the second cylinder 311 from the vacuum chamber, so as to prevent the cylinder cavity of the second cylinder 311 and the cylinder cavity of the first cylinder 121 located therein from contaminating the vacuum chamber.

[0073] Please see Figure 3 In this embodiment, a sealing ring 302 is also provided at the central flange structure of the second cylinder 311 to ensure the airtightness of the vacuum chamber. In specific applications, the deformable sleeve 313 is a bellows, but it is not limited to this; for example, an elastic rubber sleeve can also be used.

[0074] Please see Figure 2 In some optional embodiments, the first adjusting mechanism 10 further includes a transition assembly 14 and a second elastic member 15. The transition assembly 14 is threadedly connected to the guide rod assembly 32 and the first power member 11, respectively, and the second elastic member 15 is disposed inside the first cylinder 121 and sandwiched between the first cylinder 121 and the transition assembly 14.

[0075] In this embodiment, the first power component 11 is screwed to the guide rod 321 via the adapter assembly 14, and the second elastic element 15 is in a compressed state, thus providing preload to the adapter assembly 14 and eliminating screw gaps, ensuring repeatability in the first direction.

[0076] Please see Figure 4 In the illustrated embodiment, the output shaft end of the first power component 11 is provided with an external thread. Thus, after being connected to the guide rod 321 through the adapter component 14, the output shaft of the first power component 11 can drive the guide rod 321 to move when it extends or retracts in the first direction.

[0077] Preferably, the second elastic element 15 is sleeved on the guide rod 321, which can better fix the second elastic element 15 and ensure the reliability of the first adjustment mechanism 10.

[0078] Please see Figure 4In a further optional embodiment, the adapter assembly 14 includes an adapter block 141 and a screw connector 142, the screw connector 142 fixing the adapter block 141 to the guide rod assembly 32, and the adapter block 141 being screwed to the first power member 11.

[0079] Specifically, the screw connector 142 fixes the adapter block 141 to the end of the guide rod 321, and the output shaft of the first power component 11 is connected to the adapter block 141. In practical applications, both the end of the guide rod 321 and the adapter block 141 are provided with threaded holes. The screw connector 142 can pass through the threaded holes on the adapter block 141 and connect to the end of the guide rod 321, thereby fixing the adapter block 141 to the end of the guide rod 321. The output end of the first power component 11 is connected to the threaded hole in the adapter block 141. Of course, the two ends of the second elastic member 15 abut against the inner walls of the adapter block 141 and the first cylinder 121, respectively. In practical applications, the screw connector 142 includes, for example, screws, bolts, etc.

[0080] Please see Figure 3 In some optional embodiments, the ejector pin assembly 22 includes a pressure cap 221, a third elastic element 222, and an ejector pin 223. One end of the ejector pin 223 abuts against the first cylinder assembly 12, and the other end of the ejector pin 223 extends into the pressure cap 221. The pressure cap 221 is connected to the second cylinder assembly 31, and the third elastic element 222 is disposed within the pressure cap 221 and sandwiched between the ejector pin 223 and the pressure cap 221.

[0081] In this embodiment, the pressure cap 221 is connected to the second cylinder assembly 31 to cover the portion of the third elastic member 222 and the ejector pin 223 that protrude from the second cylinder assembly 31, thereby protecting the third elastic member 222 and the ejector pin 223. The third elastic member 222 is in a compressed state, and the third elastic member 222 provides a preload force so that the ejector pin 223 always abuts against the first cylinder 121, thereby ensuring that the first cylinder 121 always abuts against the output shaft of the second power member 21.

[0082] Thus, when the output shaft of the second power component 21 extends, the third elastic element 222 retracts; when the output shaft of the second power component 21 retracts, the third elastic element 222 rebounds. Correspondingly, the first cylinder 121 swings accordingly. Since the third elastic element 222 and the output shaft of the second power component 21 always remain in contact, the repeatability and positioning accuracy of the swing are ensured.

[0083] Because the output shaft of the second power component 21 pushes the first cylinder 121 when it extends, and pushes the first cylinder 121 by the ejector pin 223 when the second power component 21 retracts. In other words, the second power component 21 only needs to provide a downward thrust in the second direction, while the ejector pin 223 provides an upward driving force in the second direction. Thus, in Figure 3In the embodiment shown, the output end of the second power component 21 is a cylindrical head, which can drive the first cylinder 121 in conjunction with the ejector pin assembly 22 without the need for a threaded head.

[0084] exist Figure 3 In the illustrated embodiment, the pressure cap 221 includes a cap 2211 and a sleeve 2212. The sleeve 2212 is located outside the second cylinder 311 and one end is connected to the second cylinder 311, while the other end of the sleeve 2212 is connected to the cap 2211. The ejector pin 223 passes through the second cylinder 311, with one end extending into the second cylinder 311 and the other end extending into the sleeve 2212. A third elastic element 222 is located inside the sleeve 2212 and is sandwiched between the cap 2211 and the ejector pin 223.

[0085] It should be noted that in this embodiment, the first elastic element 13, the second elastic element 15, and the third elastic element 222 are all helical springs, but they are not limited to this. For example, rubber springs can also be used.

[0086] Figure 5 for Figure 1 An exploded view of the aperture assembly 40. See also... Figure 5 In some alternative embodiments, the aperture assembly 40 includes a bracket 41, a pressure plate 42, and an aperture 43. The bracket 41 is connected to the guide rod assembly 32, and the pressure plate 42 is connected to the bracket 41 and clamps the aperture 43 between the pressure plate 42 and the bracket 41.

[0087] In this embodiment, the aperture 43 is provided with multiple aperture holes (not shown in the figure), the bracket 41 is connected to one end of the guide rod 321, and the end of the bracket 41 away from the guide rod 321 is provided with a first strip hole H2. The pressure plate 42 is connected to the bracket 41 through fastening connectors (such as screws, pins, etc.) to press down the aperture 43 so that the aperture 43 covers the first strip hole H2.

[0088] A second strip hole H3 is provided on the pressure plate 42. The second strip hole H3 can be connected to the first strip hole H2 through the aperture hole on the aperture 43.

[0089] It should be noted that the apertures of the apertures on the aperture 43 can be the same or different. When the apertures are the same, the service life of the aperture can be increased; when the apertures are different, different diameter apertures can be selected according to the requirements.

[0090] In practical applications, the first power component 11 can drive the guide rod 321 to move along a first direction, thereby moving the aperture assembly 40 to match a suitable aperture and coarsely adjust the position of the aperture. Then, the second power component 21 can drive the first cylinder 121 to swing the guide rod 321, thereby moving the aperture assembly 40 to finely adjust the position of the aperture, so that the aperture is concentric with the electron beam center.

[0091] This adjustable aperture position device, as a key component of the electron beam detection imaging functional module in semiconductor testing equipment, drives the guide rod 321 to move the aperture 43 according to the imaging process requirements via a combination of the first power component 11 and the second power component 21. This allows for the selection of an aperture with a suitable diameter and alignment with the electron beam center. It should be understood that the aperture 43 changes position in both the first and second directions during its swinging motion, making it more suitable for fine-tuning the aperture position, which is convenient and quick. With both the first power component 11 and the second power component 21 being high-precision motors, the fine-tuning accuracy is even higher.

[0092] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. An adjustable aperture position device, characterized in that, Includes a first adjustment mechanism, a second adjustment mechanism, a moving mechanism, and an aperture assembly; The movable mechanism includes a second cylinder assembly and a guide rod assembly. The guide rod assembly is movably connected to the second cylinder assembly and passes through the second cylinder assembly in a first direction. The guide rod assembly is oscillating relative to the second cylinder assembly and moving in the first direction. The first adjustment mechanism includes a first power component and a first cylinder assembly. At least a portion of the first cylinder assembly is disposed within the second cylinder assembly. The guide rod assembly passes through the first cylinder assembly. The first power component is connected to the guide rod assembly and the first cylinder assembly and is located away from the aperture assembly in the first direction. The aperture assembly is connected to the guide rod assembly and is located outside the second cylinder assembly; The first power component can drive the guide rod assembly to move the aperture assembly in the first direction, and the second adjustment mechanism is connected to the second cylinder assembly and can drive the first cylinder assembly in the first adjustment mechanism to swing the guide rod assembly and the aperture assembly.

2. The adjustable aperture position device according to claim 1, characterized in that, The first adjustment mechanism further includes a first elastic element; the first elastic element is disposed inside the second cylinder assembly, the first elastic element extends along the first direction and is sandwiched between the first cylinder assembly and the second cylinder assembly, so that one end of the first cylinder assembly near the aperture assembly abuts against the second cylinder assembly to form a swing fulcrum.

3. The adjustable aperture position device according to claim 2, characterized in that, The second cylinder assembly includes a second cylinder body and a second limiting ring, wherein the second limiting ring is disposed inside the second cylinder body and connected to the second cylinder body; The first cylinder assembly includes a first cylinder body and a first limiting ring. At least a portion of the first cylinder body is disposed inside the second cylinder body and passes through the second limiting ring. The first limiting ring is disposed inside the second cylinder body and connected to the first cylinder body. The first limiting ring and the second limiting ring are spaced apart along the first direction, and the first elastic member is clamped between the first limiting ring and the second limiting ring.

4. The adjustable aperture position device according to claim 3, characterized in that, The guide rod assembly includes a guide rod and a slide rod. The guide rod passes through the first cylinder along the first direction, and the slide rod extends radially along the guide rod and is connected to the guide rod. The first cylinder is provided with a guide hole, which extends along the first direction, and the slide rod extends into the guide hole and can move along the guide hole.

5. The adjustable aperture position device according to claim 3, characterized in that, The second cylinder assembly further includes a deformation sleeve, which is disposed outside the second cylinder and connected between the guide rod assembly and the second cylinder. The deformation sleeve extends along the first direction and is sleeved on the guide rod assembly.

6. The adjustable aperture position device according to claim 3, characterized in that, The first adjustment mechanism also includes a transfer component and a second elastic element; The adapter assembly is threadedly connected to the guide rod assembly and the first power component, respectively, and the second elastic element is disposed in the first cylinder and sandwiched between the first cylinder and the adapter assembly.

7. The adjustable aperture position device according to claim 2, characterized in that, The second adjustment mechanism includes a second power component and a pin assembly, both of which are connected to the second cylinder assembly and are arranged opposite to each other in a second direction; The second power component and the ejector pin assembly both abut against the first cylinder assembly and drive the first cylinder assembly in the second direction, so that the guide rod assembly and the aperture assembly swing based on the oscillation fulcrum; The second direction is perpendicular to the first direction.

8. The adjustable aperture position device according to claim 7, characterized in that, The ejector pin assembly includes a pressure cap, a third elastic element, and an ejector pin; One end of the ejector pin abuts against the first cylinder assembly, and the other end of the ejector pin extends into the pressure cap; The pressure cap is connected to the second cylinder assembly, and the third elastic element is disposed inside the pressure cap and sandwiched between the ejector pin and the pressure cap.

9. The adjustable aperture position device according to claim 1, characterized in that, The aperture assembly includes a bracket, a pressure plate, and an aperture; The bracket is connected to the guide rod assembly, and the pressure plate is connected to the bracket and clamps the aperture between the pressure plate and the bracket.

10. A semiconductor testing device, characterized in that, Includes an adjustable aperture position device according to any one of claims 1 to 9.

Images