Setting up regions of interest for testing samples

By configuring the imaging subsystem and computer subsystem, the area of ​​interest for the inspection samples is automatically identified and set, and the problem of cumbersome and high cost in the prior art is solved, and the rapid and automated CA settings are achieved, and the inspection efficiency and noise suppression ability are improved.

CN117425819BActive Publication Date: 2025-04-04KLA CORP
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Patent Information

Application Number
CN202280039913.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Priority Date
2021-11-04
Filing Date
2022-07-05
Publication Date
2025-04-04
Estimated Expiration
2042-07-05

AI Technical Summary

Technical Problem

The prior art uses the area of ​​interest (CA) for the inspection sample to set up the test sample to have expensive calculations, intellectual property rights and cumbersome manual drawing methods, resulting in difficulty in time consumption and noise suppression.

Method used

By configuring the imaging subsystem and computer subsystem, the number of defects in the repeated patterned areas on the sample is automatically identified and compared with a predetermined threshold, and the area with the number of defects above the threshold is automatically specified as CA, and CA information is stored for inspection.

Benefits of technology

It realizes fast and automated CA settings, reduces calculation costs, does not require intellectual property rights, and improves noise suppression capabilities and inspection efficiency.

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Abstract

The present invention provides a method and system for setting a region of interest (CA) for inspecting a sample. A system includes an imaging subsystem configured to generate an image of the sample and a computer subsystem configured to determine the number of defects detected in predefined cells within one or more of the images generated in a repeating patterned area formed on the sample. The computer subsystem is also configured to compare the number of defects detected in each of two or more of the predefined cells with a predetermined threshold, and designate any one or more of the two or more of the predefined cells in which the number of defects is greater than the predetermined threshold as one or more CAs. In addition, the computer subsystem is configured to store information of the one or more CAs for use in inspecting the sample.
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Citation Information

Patent Citations

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  • Electron-optical system for high-speed and high-sensitivity inspections

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  • Apparatus and methods for electron beam detection

    US8692204B2