A vibration isolation system for a semiconductor test apparatus

Abstract

The application provides a vibration isolation system of a semiconductor test device, wherein a placement table of the vibration isolation system is connected with a swing rod mechanism perpendicularly, the swing rod mechanism is embedded in an air bag, the vibration isolation system comprises a data acquisition unit and a control unit, the data acquisition unit comprises a displacement sensor and a speed sensor, the displacement sensor is used for detecting position data of the placement table relative to the vibration isolation system, the speed sensor is used for detecting speed data of a load placed on the placement table, the control unit comprises four groups of position control sub-units and a controller, each group of position control sub-units is arranged at four target positions respectively, and the controller controls the four groups of position control sub-units to act according to the position change of the placement table relative to the vibration isolation system and the moving speed of the load placed on the placement table, so that the placement table and the load placed on the placement table are kept stable. The placement table of the vibration isolation system and the load placed on the placement table are kept stable quickly and stably.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and more specifically, to a vibration isolation system for semiconductor testing equipment. Background Technology

[0002] Currently, vibration isolation systems are becoming increasingly essential in large, complex, and high-precision wafer processing equipment. Functionally, vibration isolation systems are divided into passive and active vibration isolation. Air springs, with their fixed frequency and damping, provide active vibration isolation. Airbags can bear the weight of the load and possess a certain degree of stiffness.

[0003] However, the slow change in pneumatic pressure of the airbag results in a low control bandwidth, meaning it can only isolate mid-to-high frequency vibrations of the load and is powerless against interference caused by load changes. Air springs also suffer from drawbacks such as high manufacturing difficulty and slow response. Summary of the Invention

[0004] In view of this, the purpose of this application is to provide a vibration isolation system for semiconductor testing equipment. This system can alleviate low-frequency vibrations of the load through the embedded connection between the pendulum mechanism and the airbag, and further maintain load stability by controlling the position and movement of the sub-unit through a controller in the control unit. This addresses the shortcomings of existing technologies, such as the slow change in pneumatic pressure of the airbag resulting in low control bandwidth, the inability of the airbag to isolate only mid-to-high frequency vibrations of the load, and the difficulty in manufacturing and slow response of air springs. The system achieves the effect of quickly and stably maintaining the stability of the vibration isolation system's platform and the load placed on it.

[0005] In a first aspect, embodiments of this application provide a method for testing semiconductor equipment. The vibration isolation system includes a platform vertically connected to a swing arm mechanism, which is embedded within an airbag. The vibration isolation system comprises a data acquisition unit and a control unit. The data acquisition unit includes a displacement sensor and a velocity sensor. The displacement sensor detects the position data of the platform relative to the vibration isolation system, and the velocity sensor detects the velocity data of the load placed on the platform. The control unit includes four sets of position control subunits and a controller. Each set of position control subunits is positioned at four target locations. The controller controls the four sets of position control subunits to operate based on the position change of the platform relative to the vibration isolation system and the moving speed of the load placed on the platform, thereby maintaining the stability of the platform and the load placed on it.

[0006] Optionally, the controller controls the operation of four sets of position control subunits based on the position data of the platform relative to the vibration isolation system through the following steps: acquiring the position data and velocity data of the vibration isolation system at predetermined intervals; determining the first reference data and the second reference data of the vibration isolation system based on the position data and velocity data of the vibration isolation system; and controlling the operation of the four sets of position control subunits based on the first reference data and the second reference data.

[0007] Optionally, the step of controlling the actions of the four sets of position control subunits according to the first reference data and the second reference data includes: performing position feedback closed-loop processing on the first reference data to obtain position control data; performing speed feedback closed-loop processing on the second reference data to obtain speed control data; and controlling the actions of the four sets of position control subunits according to the position control data and the speed control data to keep the platform and the load placed on the platform stable.

[0008] Optionally, the controller performs position feedback closed-loop processing on the first reference data through the following steps to obtain position control data: calculates the first reference data based on the PID algorithm to obtain first intermediate data; inputs the first intermediate data into a notch filter to perform noise reduction processing on the first intermediate data to obtain second intermediate data; inputs the second intermediate data into a lead-lag compensator to correct the second intermediate data to obtain position control data.

[0009] Optionally, the controller performs speed feedback closed-loop processing on the second reference data through the following steps to obtain speed control data: inputting the second reference data into a high-pass filter to perform high-pass filtering on the second reference data to obtain third intermediate data; inputting the third intermediate data into a hump filter to increase the resonant frequency of the third intermediate data to obtain fourth intermediate data; calculating the fourth intermediate data based on the PI algorithm to obtain fifth intermediate data; inputting the fifth intermediate data into a low-pass filter to perform low-pass filtering on the fifth intermediate data to obtain sixth intermediate data; inputting the sixth intermediate data into a lead-lag compensator to correct the sixth intermediate data to obtain speed control data.

[0010] Optionally, the high-pass filter, low-pass filter, and camel-hump filter are all second-order filters.

[0011] Optionally, the controller includes multiple noise input points, and the controller further performs the following steps: injecting diagnostic noise at any noise injection point to determine the frequency domain of the vibration isolation system, the diagnostic noise including sinusoidal signals, white noise, and gain parameters.

[0012] Optionally, the diagnostic noise includes a first diagnostic noise, wherein the controller determines the frequency domain of the vibration isolation system by: inputting a pre-set first diagnostic noise; determining first diagnostic data and second diagnostic data based on the diagnostic noise; testing the transfer function of the vibration isolation system based on the first diagnostic data and the second diagnostic data to determine the resonance point of the load; and setting the parameters of the high-pass filter, low-pass filter, and hump filter based on the resonance point of the load.

[0013] Optionally, the diagnostic noise further includes a second diagnostic noise, wherein the controller further performs the following steps: inputting a pre-set second diagnostic noise; determining third and fourth diagnostic data based on the second diagnostic noise; and testing the proportional relationship between the action of each group of position control units and the command current based on the third and fourth diagnostic data, so that the controller controls the action of each group of position control subunits according to the proportional relationship.

[0014] Optionally, each set of position control subunits includes a first voice coil motor and a second voice coil motor. The first voice coil motor is used to control the horizontal stability of the platform, and the second voice coil motor is used to control the horizontal movement of the platform. The four target positions include a first target position, a second target position, a third target position, and a fourth target position. The connecting line between the first target position and the third target position is perpendicular to the connecting line between the second target position and the fourth target position.

[0015] Secondly, embodiments of this application also provide a computer-readable storage medium storing a computer program, which, when executed by a processor, performs the steps of the controller in the vibration isolation system described above.

[0016] The vibration isolation system for semiconductor testing equipment provided in this application can alleviate low-frequency vibrations of the load through the embedded connection between the pendulum mechanism and the airbag. Furthermore, the controller in the control unit controls the position and movement of the sub-units, further maintaining load stability. This addresses the shortcomings of existing technologies, such as the slow change in airbag pneumatic pressure leading to low control bandwidth, the inability of the airbag to isolate only mid-to-high frequency vibrations of the load, and the difficulty in manufacturing and slow response of air springs. It achieves the effect of quickly and stably maintaining the stability of the vibration isolation system's platform and the load placed on it.

[0017] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the structure of a vibration isolation system provided in an embodiment of this application;

[0020] Figure 2 A flowchart of a controller provided in an embodiment of this application;

[0021] Figure 3 A schematic diagram of a controller provided in an embodiment of this application;

[0022] Figure 4 This application provides a schematic diagram of the structure of an electronic device. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. Based on the embodiments of this application, every other embodiment obtained by those skilled in the art without inventive effort falls within the scope of protection of this application.

[0024] First, the applicable scenarios for this application will be introduced. This application can be applied to the field of semiconductor testing technology.

[0025] Research has shown that vibration isolation systems are becoming increasingly essential in large, complex, and high-precision wafer processing equipment. Functionally, vibration isolation systems are divided into passive and active vibration isolation. Air springs, with their fixed frequency and damping, provide active vibration isolation. Airbags can bear the weight of the load and possess a certain degree of stiffness.

[0026] However, the slow change in pneumatic pressure of the airbag results in a low control bandwidth, meaning it can only isolate mid-to-high frequency vibrations of the load and is powerless against interference caused by load changes. Air springs also suffer from drawbacks such as high manufacturing difficulty and slow response.

[0027] Based on this, this application provides a vibration isolation system for semiconductor testing equipment. It can alleviate low-frequency vibrations of the load through the embedded connection between the swing arm mechanism and the airbag, and further maintain load stability by controlling the position and movement of the sub-unit through a controller in the control unit. This solves the problems of existing technologies where the airbag's slow pneumatic pressure changes result in low control bandwidth, only isolating mid-to-high frequency vibrations of the load, and being powerless against interference caused by load changes. It also addresses the disadvantages of air springs, such as high manufacturing difficulty and slow response. The system achieves the effect of quickly and stably maintaining the stability of the vibration isolation system's platform and the load placed on it.

[0028] Please see Figure 1 , Figure 1 This is a structural schematic diagram of a vibration isolation system provided in an embodiment of this application. Figure 1 As shown in the figure, the structure of the vibration isolation system provided in this application embodiment includes: a platform 101, a speed sensor 102, a displacement sensor 103, a position control subunit 104, a swing arm mechanism 105, an airbag 106, and an elastic membrane 107.

[0029] The vibration isolation system's platform is vertically connected to the swing arm mechanism, which is embedded within the airbag.

[0030] The vibration isolation system includes a data acquisition unit and a control unit. The data acquisition unit includes a displacement sensor and a velocity sensor. The displacement sensor is used to detect the position data of the platform relative to the vibration isolation system, and the velocity sensor is used to detect the velocity data of the load placed on the platform.

[0031] like Figure 1 As shown, each position control subunit includes a first voice coil motor and a second voice coil motor.

[0032] The first voice coil motor is used to control the horizontal stability of the platform, the second voice coil motor is used to control the horizontal movement of the platform, and the four target positions include a first target position, a second target position, a third target position, and a fourth target position. The connecting line between the first target position and the third target position is perpendicular to the connecting line between the second target position and the fourth target position.

[0033] This application uses the relative displacement motion of the mover and stator of a first voice coil motor and a second voice coil motor to drive the load.

[0034] The velocity sensor can be a detector, and the displacement sensor can be a linear displacement sensor. Both measurement signals serve as feedback inputs to the control unit.

[0035] Here, a capacitive sensor is used for linear displacement measurement, which is easy to install, highly reliable, and has a resolution on the order of 0.5 micrometers.

[0036] The velocity detector uses a detection element with a resolution of not less than 0.03V / um / s.

[0037] Here, the airbag isolates high-frequency signals and bears the weight of the vertical isolation system load.

[0038] The vibration isolation system includes a data acquisition unit and a control unit. The data acquisition unit includes a displacement sensor and a velocity sensor. The displacement sensor is used to detect the position data of the platform relative to the vibration isolation system, and the velocity sensor is used to detect the velocity data of the load placed on the platform.

[0039] The controller controls the four sets of position control subunits to operate according to the position change of the platform relative to the vibration isolation system and the moving speed of the load placed on the platform, so as to keep the platform and the load placed on the platform stable.

[0040] Specifically, the controller controls the operation of four sets of position control sub-units based on the position data of the platform relative to the vibration isolation system through the following steps: acquiring the position data and velocity data of the vibration isolation system at predetermined intervals; determining the first reference data and the second reference data of the vibration isolation system based on the position data and velocity data of the vibration isolation system; and controlling the operation of the four sets of position control sub-units based on the first reference data and the second reference data.

[0041] The steps of controlling the four sets of position control subunits according to the first reference data and the second reference data include: performing position feedback closed-loop processing on the first reference data to obtain position control data; performing speed feedback closed-loop processing on the second reference data to obtain speed control data; and controlling the four sets of position control subunits according to the position control data and speed control data to keep the platform and the load placed on the platform stable.

[0042] For example, the controller performs position feedback closed-loop processing on the first reference data through the following steps to obtain position control data: calculates the first reference data based on the PID algorithm to obtain first intermediate data; inputs the first intermediate data into a notch filter to perform noise reduction processing on the first intermediate data to obtain second intermediate data; inputs the second intermediate data into a lead-lag compensator to correct the second intermediate data to obtain position control data.

[0043] For example, the controller performs speed feedback closed-loop processing on the second reference data through the following steps to obtain speed control data: inputting the second reference data into a high-pass filter to perform high-pass filtering on the second reference data to obtain third intermediate data; inputting the third intermediate data into a hump filter to increase the resonant frequency of the third intermediate data to obtain fourth intermediate data; calculating the fourth intermediate data based on the PI algorithm to obtain fifth intermediate data; inputting the fifth intermediate data into a low-pass filter to perform low-pass filtering on the fifth intermediate data to obtain sixth intermediate data; inputting the sixth intermediate data into a lead-lag compensator to correct the sixth intermediate data to obtain speed control data.

[0044] The high-pass filter, low-pass filter, and camel-hump filter are all second-order filters.

[0045] For details, please refer to Figure 2 , Figure 2 A flowchart of a controller provided in an embodiment of this application.

[0046] like Figure 2 The flowchart of the controller provided in this application embodiment, as shown, includes:

[0047] S201. Obtain the position and velocity data of the vibration isolation system.

[0048] Here, the position and velocity data of the vibration isolation system can be acquired at predetermined intervals.

[0049] This application performs the following steps regarding location data:

[0050] S202. Calculate the first reference data based on the PID algorithm to obtain the first intermediate data.

[0051] S203, PID saturation limiting.

[0052] This ensures the stability and continuity of the first intermediate data.

[0053] S204. Input the first intermediate data into the notch filter to perform noise reduction processing on the first intermediate data to obtain the second intermediate data.

[0054] Here, the notch filter adds one or more resonant frequencies based on the wave peaks identified by the system.

[0055] S205. Input the second intermediate data into the lead-lag compensator to correct the second intermediate data and obtain the position control data.

[0056] In this way, the horizontal stability of the platform can be controlled based on the position data, and the load can be kept at a specific set point. The position data can be converted into logic axes to control the four sets of position control subunits.

[0057] This application performs the following steps regarding speed data:

[0058] S206. Input the second reference data into a high-pass filter to perform high-pass filtering on the second reference data to obtain the third intermediate data.

[0059] S207. Input the third intermediate data into the camel hump filter to increase the resonant frequency of the third intermediate data, and obtain the fourth intermediate data.

[0060] S208. Calculate the fourth intermediate data based on the PI algorithm to obtain the fifth intermediate data.

[0061] S209, PI saturation limit.

[0062] S210. Input the fifth intermediate data into a low-pass filter to perform low-pass filtering on the fifth intermediate data to obtain the sixth intermediate data.

[0063] S211. Input the sixth intermediate data into the lead-lag compensator to correct the sixth intermediate data and obtain the speed control data.

[0064] The high-pass filter, low-pass filter, and camel-hump filter are all second-order filters.

[0065] Thus, based on steps S206-S211, absolute damping can be added to the load, and speed data can be converted to logic axes to control the four sets of position control subunits.

[0066] After obtaining the speed control data and position control data, step S213 is executed to add and combine the two data. Then, step S214 is executed to input the combined data into the AC interface. The command current of the driver is determined through the AC interface to control the voice coil motor of each position control subunit, and step S215 is executed.

[0067] For example, please refer to Figure 3 , Figure 3 This is a schematic diagram of a controller provided in an embodiment of this application. Figure 3 As shown in the schematic diagram of the controller provided in this application embodiment, it includes: a position loop, a speed feedback loop, and a noise injection loop.

[0068] Position Loop: The position loop maintains the load at the desired position based on the single-input single-output principle. The load position is measured by a displacement sensor. This loop has three stages, with only the first stage using a PID controller. The horizontal direction of this loop is to control the load at a specific setpoint. The measured displacement is converted to the logic axis via a transformation matrix T2.

[0069] Speed ​​feedback loop: The purpose of this loop is to add absolute damping to the load. The measured speed is converted to the logic axis through the transformation matrix T1.

[0070] Noise injection: To meet the diagnostic requirements of the vibration isolation system, noise must be injected into the system. The noise injection loop in the control block diagram provides multiple points, and each Notch can be an injection point. All possible noise injection types include: sinusoidal signals, white noise, and gain parameters.

[0071] Figure 3 The description of each module can be found in S201 to S215, and the same technical effect can be achieved, so it will not be elaborated further.

[0072] The controller includes multiple noise input points and further performs the following steps: injecting diagnostic noise at any noise injection point to determine the frequency domain of the vibration isolation system; the diagnostic noise includes sinusoidal signals, white noise, and gain parameters.

[0073] The diagnostic noise includes a first diagnostic noise. The controller determines the frequency domain of the vibration isolation system by: inputting a pre-set first diagnostic noise; determining first diagnostic data and second diagnostic data based on the diagnostic noise; testing the transfer function of the vibration isolation system based on the first diagnostic data and the second diagnostic data to determine the resonance point of the load; and setting the parameters of the high-pass filter, low-pass filter, and hump filter based on the resonance point of the load.

[0074] The diagnostic noise further includes a second diagnostic noise, and the controller further performs the following steps: inputting a pre-set second diagnostic noise; determining third and fourth diagnostic data based on the second diagnostic noise; and testing the proportional relationship between the action of each group of position control units and the command current based on the third and fourth diagnostic data, so that the controller controls the action of each group of position control subunits according to the proportional relationship.

[0075] Optionally, the above steps can first involve building a model in MATLAB and performing Simulink simulation analysis with a fixed step size; then, if possible, converting it into a C language project and porting it into the control algorithm card to create the corresponding project and conduct actual testing.

[0076] Here, debugging can be performed using a dual closed-loop system of displacement and velocity feedback. First, determine the resolution of the displacement and velocity sensors. Without using filters, debug the displacement closed-loop PID controller, assuming the trajectory input is a sinusoidal signal of a certain frequency. Then, debug the velocity closed-loop PI controller and observe the stability of the controlled object. If stable, reset the parameters of the hump filter and high-pass and low-pass filters based on the injected signal, and analyze the control bandwidth based on the open-loop transfer function added to the controller. Finally, apply a certain excitation to the load, such as a step or sinusoidal motion, and determine whether the time domain is stable and meets the speed requirements based on the output displacement and velocity error curves.

[0077] The vibration isolation system for semiconductor testing equipment provided in this application can alleviate low-frequency vibrations of the load through the embedded connection between the pendulum mechanism and the airbag. Furthermore, the controller in the control unit controls the position and movement of the sub-units, further maintaining load stability. This addresses the shortcomings of existing technologies, such as the slow change in airbag pneumatic pressure leading to low control bandwidth, the inability of the airbag to isolate only mid-to-high frequency vibrations of the load, and the difficulty in manufacturing and slow response of air springs. It achieves the effect of quickly and stably maintaining the stability of the vibration isolation system's platform and the load placed on it.

[0078] Please see Figure 4 , Figure 4 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Figure 4 As shown, the electronic device 400 includes a processor 410, a memory 420, and a bus 430.

[0079] The memory 420 stores machine-readable instructions executable by the processor 410. When the electronic device 400 is running, the processor 410 communicates with the memory 420 via the bus 430. When the machine-readable instructions are executed by the processor 410, they can perform the operations described above. Figure 2 The steps of the controller in the system embodiment shown are described in detail in the system embodiment, and will not be repeated here.

[0080] This application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, can perform the above-described actions. Figure 2 The steps of the controller in the system embodiment shown are described in detail in the controller embodiment, and will not be repeated here.

[0081] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the methods, devices, and units described above can be referred to the corresponding processes in the foregoing system embodiments, and will not be repeated here.

[0082] In the several embodiments provided in this application, it should be understood that the disclosed methods, apparatuses, and systems can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the displayed or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0083] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0084] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0085] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the system described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0086] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The scope of protection of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the scope of the technology disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A vibration isolation system for a semiconductor testing device, characterized in that, Applied to semiconductor equipment testing, the vibration isolation system's platform is vertically connected to a swing arm mechanism, which is embedded within an airbag. The vibration isolation system includes a data acquisition unit and a control unit. The data acquisition unit includes a displacement sensor and a velocity sensor. The displacement sensor is used to detect the position data of the platform relative to the vibration isolation system, and the velocity sensor is used to detect the velocity data of the load placed on the platform. The control unit includes four sets of position control subunits and a controller, with each set of position control subunits located at one of the four target positions. The controller controls the four sets of position control subunits to operate according to the position change of the platform relative to the vibration isolation system and the moving speed of the load placed on the platform, so as to keep the platform and the load placed on the platform stable. The controller controls the actions of four sets of position control subunits based on the position data of the platform relative to the vibration isolation system through the following steps: The position and velocity data of the vibration isolation system are acquired at predetermined intervals. Based on the position and velocity data of the vibration isolation system, determine the first reference data and the second reference data of the vibration isolation system; The first reference data is processed by position feedback closed-loop processing to obtain position control data; the second reference data is processed by speed feedback closed-loop processing to obtain speed control data; based on the position control data and speed control data, the four sets of position control sub-units are controlled to keep the platform and the load placed on the platform stable. The controller includes multiple noise input points, and the controller also performs the following steps: Diagnostic noise is injected at any noise injection point to determine the frequency domain of the vibration isolation system. The diagnostic noise includes sinusoidal signals, white noise, and gain parameters. The diagnostic noise includes a first diagnostic noise. The controller determines the frequency domain of the vibration isolation system in the following manner: Input the pre-set first diagnostic noise; Based on the diagnostic noise, determine the first diagnostic data and the second diagnostic data; The transfer function of the vibration isolation system is tested based on the first and second diagnostic data to determine the resonance point of the load; Based on the resonance point of the load, set the parameters of the high-pass filter, low-pass filter, and hump filter.

2. The system according to claim 1, characterized in that, The controller performs position feedback closed-loop processing on the first reference data through the following steps to obtain position control data: The first intermediate data is obtained by calculating the first reference data based on the PID algorithm; The first intermediate data is input into a notch filter to perform noise reduction processing on the first intermediate data, and the second intermediate data is obtained. The second intermediate data is input into the lead-lag compensator to correct the second intermediate data, thus obtaining the position control data.

3. The system according to claim 1, characterized in that, The controller performs speed feedback closed-loop processing on the second reference data through the following steps to obtain speed control data: The second reference data is input into a high-pass filter to perform high-pass filtering on the second reference data, and the third intermediate data is obtained. The third intermediate data is input into the camel hump filter to increase the resonant frequency of the third intermediate data, thus obtaining the fourth intermediate data; The fifth intermediate data is obtained by calculating the fourth intermediate data based on the PI algorithm; The fifth intermediate data is input into a low-pass filter to perform low-pass filtering, resulting in the sixth intermediate data; The sixth intermediate data is input into the lead-lag compensator to correct the sixth intermediate data, thus obtaining the speed control data.

4. The system according to claim 3, characterized in that, The high-pass filter, low-pass filter, and camel-hump filter are all second-order filters.

5. The system according to claim 1, characterized in that, The diagnostic noise also includes a second diagnostic noise. The controller further performs the following steps: Input the pre-set second diagnostic noise; Based on the second diagnostic noise, determine the third and fourth diagnostic data; The third and fourth diagnostic data are used to test the proportional relationship between the action of each position control unit and the command current, so that the controller controls the action of each position control subunit according to the proportional relationship.

6. The system according to claim 1, characterized in that, Each position control subunit includes a first voice coil motor and a second voice coil motor. The first voice coil motor is used to control the horizontal stability of the platform, and the second voice coil motor is used to control the horizontal movement of the platform. The four target positions include a first target position, a second target position, a third target position, and a fourth target position. The connecting line between the first target position and the third target position is perpendicular to the connecting line between the second target position and the fourth target position.

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