Air conditioning system and control method and controller therefor, computer readable storage medium

Abstract

The present disclosure relates to an air conditioning system and a control method and controller thereof, and a computer readable storage medium. The air conditioning system comprises: a plurality of air conditioning water terminals connected in series, wherein the plurality is at least two; and a multi-head water chiller configured to provide chilled water to the plurality of air conditioning water terminals connected in series and receive the chilled water returned after heat exchange through the plurality of air conditioning water terminals connected in series, wherein the multi-head is at least two heads. The present disclosure uses a multi-head water chiller to replace the original medium-temperature chiller and low-temperature chiller, reduces the number of water chillers and their supporting equipment, reduces the floor area of the machine room, and reduces the initial investment of the air conditioning system.

Description

Technical Field

[0001] This disclosure relates to the field of air conditioning technology, and in particular to an air conditioning system and its control method and controller, as well as a computer-readable storage medium. Background Technology

[0002] Semiconductor cleanroom air conditioning is characterized by high load, numerous parameters, and long operating times, placing high demands on HVAC design. The construction of high-level semiconductor facilities is extremely expensive and consumes enormous amounts of energy; therefore, energy conservation and reducing HVAC system costs are urgent needs in HVAC design.

[0003] In related technologies, to maintain the required temperature and relative humidity in cleanrooms, it is necessary to perform necessary heat and humidity treatment (cooling, dehumidification, heating, humidification, etc.) on the air supplied to the cleanroom. To meet these requirements simultaneously, it is necessary to set up circulating water at different temperatures for air treatment, including low-temperature water, medium-temperature water, and hot water (36°C). Therefore, traditional cleanroom air conditioning systems generally set up three independent circulating water systems to meet the requirements. This not only increases the number of air conditioning chiller units and their supporting equipment, increases the floor space of the air conditioning room, and increases the initial investment of the system, but also increases the space occupied by the circulating water pipeline and the design difficulty. Most importantly, it increases the energy consumption of the air conditioning system. Industrial cleanrooms often have cooling load requirements throughout the year. The energy consumption of existing air conditioning systems in electronic industrial cleanrooms is very high, accounting for about 40% to 60% of the building's energy consumption. Summary of the Invention

[0004] In view of at least one of the above technical problems, this disclosure provides an air conditioning system and its control method and controller, as well as a computer-readable storage medium, which uses a multi-head chiller unit to replace the original medium-temperature chiller and low-temperature chiller, thereby reducing the number of chiller units and their supporting equipment.

[0005] According to one aspect of this disclosure, an air conditioning system is provided, comprising:

[0006] Multiple air conditioning water terminals connected in series, wherein "multiple" refers to at least two; and

[0007] A multi-head chiller unit is configured to supply chilled water to multiple air conditioning water terminals connected in series, and to receive chilled water returned after heat exchange through the multiple air conditioning water terminals connected in series, wherein the multi-head unit consists of at least two chillers.

[0008] In some embodiments of this disclosure, the chilled water provided by the multi-head chiller unit enters multiple air conditioning water terminals in a series connection order for heat exchange.

[0009] In some embodiments of this disclosure, the multi-head chiller unit is a dual-head chiller unit.

[0010] In some embodiments of this disclosure, the air conditioning water terminal includes a first air conditioning water terminal and a second air conditioning water terminal connected in series, wherein:

[0011] The dual-head chiller unit is configured to supply chilled water at a first temperature to the first air conditioning water terminal;

[0012] The first air conditioning water terminal is configured to generate chilled water at a second temperature after heat exchange using chilled water at a first temperature, and to supply the chilled water at the second temperature to the second air conditioning water terminal, wherein the second temperature is higher than the first temperature;

[0013] The second air conditioning water terminal is configured to generate chilled water at a third temperature after heat exchange using chilled water at a second temperature, and then return the chilled water at the third temperature to the dual-head chiller unit, wherein the third temperature is higher than the second temperature.

[0014] In some embodiments of this disclosure, the air conditioning system further includes:

[0015] A first temperature sensor is configured to acquire the water temperature at the inlet of a first air conditioning water terminal; and

[0016] The controller is configured to adjust the operating frequency of the dual-head chiller unit according to the water temperature at the inlet of the first air conditioning water terminal, so that the water temperature at the inlet of the first air conditioning water terminal reaches a first temperature threshold.

[0017] In some embodiments of this disclosure, the controller is configured to reduce the operating frequency of the dual-head chiller unit when the water temperature at the inlet of the first air conditioning water terminal is lower than a first temperature threshold, and to increase the operating frequency of the dual-head chiller unit when the water temperature at the inlet of the first air conditioning water terminal is higher than the first temperature threshold.

[0018] In some embodiments of this disclosure, the air conditioning system further includes:

[0019] The second temperature sensor is configured to acquire the water temperature at the outlet of the first air conditioning water terminal.

[0020] The controller is also configured to adjust the flow rate of chilled water through the first air conditioning water terminal according to the water temperature at the outlet of the first air conditioning water terminal, so that the water temperature at the outlet of the first air conditioning water terminal reaches the second temperature threshold.

[0021] In some embodiments of this disclosure, the air conditioning system further includes:

[0022] A first bypass pipe is installed between the inlet of the first air conditioning water terminal and the return outlet of the dual-head chiller unit; and

[0023] The first regulating valve is installed in the first bypass pipeline;

[0024] The controller is configured to increase the opening of the first regulating valve when the water temperature at the outlet of the first air conditioner water terminal is lower than the second temperature threshold, and to decrease the opening of the first regulating valve when the water temperature at the outlet of the first air conditioner water terminal is higher than the second temperature threshold.

[0025] In some embodiments of this disclosure, the controller is configured to increase the opening of the first regulating valve by a predetermined adjustment when the water temperature at the outlet of the first air conditioning water terminal is less than a second temperature threshold, and to decrease the opening of the first regulating valve by a predetermined adjustment when the water temperature at the outlet of the first air conditioning water terminal is greater than the second temperature threshold.

[0026] In some embodiments of this disclosure, the air conditioning system further includes:

[0027] The third temperature sensor is configured to acquire the water temperature at the outlet of the second air conditioning water terminal.

[0028] The controller is also configured to adjust the flow rate of chilled water through the second air conditioning water terminal according to the water temperature at the outlet of the second air conditioning water terminal, so that the water temperature at the outlet of the second air conditioning water terminal reaches the third temperature threshold.

[0029] In some embodiments of this disclosure, the air conditioning system further includes:

[0030] A second bypass pipe is installed between the outlet of the first air conditioning water terminal and the return outlet of the dual-head chiller unit; and

[0031] The second regulating valve is installed in the second bypass pipeline;

[0032] The controller is configured to increase the opening of the second regulating valve when the water temperature at the outlet of the second air conditioning water terminal is less than the third temperature threshold, and to decrease the opening of the second regulating valve when the water temperature at the outlet of the second air conditioning water terminal is greater than the third temperature threshold.

[0033] According to another aspect of this disclosure, an air conditioning system control method is provided, comprising:

[0034] A multi-unit chiller unit controls an air conditioning system to supply chilled water to multiple air conditioning water terminals connected in series. The air conditioning system includes the multi-unit chiller unit and multiple air conditioning water terminals connected in series.

[0035] The system controls the multiple air conditioning water terminals to exchange heat using the chilled water provided by the multi-head chiller unit, and then returns the heat-exchanged chilled water to the multi-head chiller unit.

[0036] In some embodiments of this disclosure, controlling the plurality of air conditioning water terminals to exchange heat using the provided chilled water includes:

[0037] The chilled water supplied by the multi-head chiller unit is controlled to enter multiple air conditioning water terminals in a series connection order for heat exchange.

[0038] In some embodiments of this disclosure, the multi-head chiller unit is a dual-head chiller unit; the air conditioning water terminal includes a first air conditioning water terminal and a second air conditioning water terminal connected in series.

[0039] In some embodiments of this disclosure, controlling the multi-head chiller unit of the air conditioning system to provide chilled water to multiple air conditioning water terminals connected in series includes: controlling a dual-head chiller unit to provide chilled water at a first temperature to a first air conditioning water terminal.

[0040] In some embodiments of this disclosure, controlling the plurality of air conditioning water terminals to exchange heat using chilled water provided by the multi-head chiller unit and returning the heat-exchanged chilled water to the multi-head chiller unit includes: controlling the first air conditioning water terminal to exchange heat using chilled water at a first temperature to generate chilled water at a second temperature, and providing the chilled water at the second temperature to the second air conditioning water terminal, wherein the second temperature is higher than the first temperature; controlling the second air conditioning water terminal to exchange heat using the chilled water at the second temperature to generate chilled water at a third temperature, and returning the chilled water at the third temperature to the dual-head chiller unit, wherein the third temperature is higher than the second temperature.

[0041] In some embodiments of this disclosure, the air conditioning system control method further includes:

[0042] Receive the water temperature at the inlet of the first air conditioning water terminal, collected by the first temperature sensor; and

[0043] Based on the water temperature at the inlet of the first air conditioning water terminal, the operating frequency of the dual-head chiller unit is adjusted so that the water temperature at the inlet of the first air conditioning water terminal reaches the first temperature threshold.

[0044] In some embodiments of this disclosure, adjusting the operating frequency of the dual-head chiller unit based on the water temperature at the inlet of the first air conditioning water terminal includes:

[0045] When the water temperature at the inlet of the first air conditioning water terminal is lower than the first temperature threshold, reduce the operating frequency of the dual-head chiller unit; and

[0046] When the water temperature at the inlet of the first air conditioning water terminal is greater than the first temperature threshold, increase the operating frequency of the dual-head chiller unit.

[0047] In some embodiments of this disclosure, the air conditioning system control method further includes:

[0048] Receive the water temperature at the outlet of the first air conditioning water terminal, collected by the second temperature sensor; and

[0049] Based on the water temperature at the outlet of the first air conditioning water terminal, the flow rate of chilled water passing through the first air conditioning water terminal is adjusted so that the water temperature at the outlet of the first air conditioning water terminal reaches the second temperature threshold.

[0050] In some embodiments of this disclosure, adjusting the chilled water flow rate through the first air conditioning water terminal based on the water temperature at the outlet of the first air conditioning water terminal includes:

[0051] When the water temperature at the outlet of the first air conditioning water terminal is lower than the second temperature threshold, the opening of the first regulating valve is increased. The first regulating valve is located in the first bypass pipe, which is situated between the inlet of the first air conditioning water terminal and the return outlet of the dual-head chiller unit.

[0052] If the water temperature at the outlet of the first air conditioning water terminal is greater than the second temperature threshold, reduce the opening of the first regulating valve.

[0053] In some embodiments of this disclosure, increasing the opening of the first regulating valve includes: increasing the opening of the first regulating valve by a predetermined adjustment degree.

[0054] In some embodiments of this disclosure, reducing the opening of the first regulating valve includes: reducing the opening of the first regulating valve by a predetermined adjustment.

[0055] In some embodiments of this disclosure, the air conditioning system control method further includes:

[0056] Receives the water temperature at the outlet of the second air conditioning water terminal, collected by the third temperature sensor; and

[0057] Based on the water temperature at the outlet of the second air conditioning water terminal, adjust the flow rate of chilled water through the second air conditioning water terminal so that the water temperature at the outlet of the second air conditioning water terminal reaches the third temperature threshold.

[0058] In some embodiments of this disclosure, adjusting the chilled water flow rate through the second air conditioning water terminal based on the water temperature at the outlet of the second air conditioning water terminal includes:

[0059] When the water temperature at the outlet of the second air conditioning water terminal is lower than the third temperature threshold, the opening of the second regulating valve is increased. The second regulating valve is located in the second bypass pipeline, which is situated between the outlet of the first air conditioning water terminal and the return outlet of the dual-head chiller unit.

[0060] If the water temperature at the outlet of the second air conditioning water terminal is greater than the third temperature threshold, reduce the opening of the second regulating valve.

[0061] According to another aspect of this disclosure, a controller is provided, comprising:

[0062] The first control module is configured to control the multi-head chiller unit of the air conditioning system to supply chilled water to multiple air conditioning water terminals connected in series, wherein the air conditioning system includes the multi-head chiller unit and multiple air conditioning water terminals connected in series; and

[0063] The second control module is configured to control the multiple air conditioning water terminals to exchange heat using the chilled water provided by the multi-head chiller unit, and to return the heat-exchanged chilled water to the multi-head chiller unit.

[0064] According to another aspect of this disclosure, a controller is provided, comprising:

[0065] Memory, used to store instructions; and

[0066] A processor is configured to execute the instructions, causing the controller to implement the air conditioning system control method as described in any of the above embodiments.

[0067] According to another aspect of this disclosure, a computer-readable storage medium is provided, wherein the computer-readable storage medium stores computer instructions that, when executed by a processor, implement the air conditioning system control method as described in any of the above embodiments.

[0068] This disclosure uses multi-head chiller units to replace the original medium-temperature and low-temperature chillers, reducing the number of chiller units and their supporting equipment, reducing the floor space occupied by the machine room, and lowering the initial investment in the air conditioning system. Attached Figure Description

[0069] To more clearly illustrate the technical solutions in the embodiments of this disclosure or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0070] Figure 1 This is a schematic diagram of some embodiments of the air conditioning system disclosed herein.

[0071] Figure 2 This is a schematic diagram of some other embodiments of the air conditioning system disclosed herein.

[0072] Figure 3 This is a schematic diagram of some other embodiments of the air conditioning system disclosed herein.

[0073] Figure 4 This is a schematic diagram of some embodiments of the air conditioning system control method disclosed herein.

[0074] Figure 5 This is a schematic diagram of some other embodiments of the air conditioning system control method disclosed herein.

[0075] Figure 6 This is a schematic diagram of some embodiments of the air conditioning system control method disclosed herein.

[0076] Figure 7 This is a schematic diagram of some embodiments of the controller disclosed herein.

[0077] Figure 8 This is a schematic diagram of the structure of some other embodiments of the controller disclosed herein. Detailed Implementation

[0078] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit this disclosure or its application or use. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0079] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of this disclosure.

[0080] At the same time, it should be understood that, for ease of description, the dimensions of the various parts shown in the accompanying drawings are not drawn according to actual scale.

[0081] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0082] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0083] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0084] The inventors also discovered through research that the MAU in the cleanroom air conditioning system is a unit specifically designed to handle fresh air. Its function is to dehumidify the fresh air, control the humidity to a strict level, and then send it into the room for use. At the same time, the fresh air is also used to maintain the pressure balance in the room. Therefore, the cleanroom MAU handles a very large volume of fresh air and a very high humidity level, resulting in huge energy consumption.

[0085] Related technologies: High energy consumption in the pretreatment section of the MAU fresh air handling unit; Redundant structure and high air resistance in the pretreatment section of the MAU in cleanrooms; Waste heat in cleanrooms cannot be recovered and utilized.

[0086] For electronic cleanrooms using related technologies, the MAU system is equipped with independent pre-cooling and pre-heating sections, which are used for pre-cooling and pre-heating according to summer and winter respectively. However, this design increases the size of the MAU equipment and raises the system's air resistance, leaving room for optimization.

[0087] In view of at least one of the above-mentioned technical problems, this disclosure provides an air conditioning system and its control method and controller, as well as a computer-readable storage medium. The disclosure is described below through specific embodiments.

[0088] Figure 1 These are schematic diagrams illustrating some embodiments of the air conditioning system disclosed herein. Figure 1 As shown, the air conditioning system may include a multi-head chiller unit 10 and multiple air conditioning water terminals 20, wherein:

[0089] Multiple air conditioning water terminals 20 are connected in series, wherein multiple are at least two.

[0090] The multi-head chiller unit 10 is configured to supply chilled water to a plurality of air conditioning water terminals 20 connected in series; and to receive chilled water returned after heat exchange through the plurality of air conditioning water terminals 20 connected in series, wherein the multi-head chiller unit has at least two chillers.

[0091] In some embodiments of this disclosure, the chilled water provided by the multi-head chiller unit 10 enters multiple air conditioning water terminals 20 in a series connection order for heat exchange.

[0092] In some embodiments of this disclosure, the multi-head chiller unit 10 may be a dual-head chiller unit.

[0093] The embodiments disclosed herein replace the original medium-temperature and low-temperature chillers with multi-head chiller units, thereby reducing the number of chiller units and their supporting equipment, reducing the floor space occupied by the machine room, and lowering the initial investment in the air conditioning system.

[0094] The system described in the above embodiments of this disclosure adopts a large temperature difference series system, which reduces pipeline design redundancy and the number of transmission and distribution equipment, and effectively reduces the energy consumption of the pipeline transmission and distribution system.

[0095] Figure 2 This is a schematic diagram of some other embodiments of the air conditioning system disclosed herein. For example... Figure 2 As shown, the air conditioning system may include a dual-head chiller unit 11 and multiple air conditioning water terminals, wherein the air conditioning water terminals 20 include a first air conditioning water terminal 21 and a second air conditioning water terminal 22 connected in series, wherein:

[0096] The dual-head chiller unit 11 is configured to provide chilled water at a first temperature to the first air conditioning water terminal 21.

[0097] In some embodiments of this disclosure, a dual-head chiller unit 11 refers to a chiller unit comprising two compressors. The dual-head unit has two compressors, two evaporators, and one condenser. For example... Figure 2 As shown, two evaporators are connected in series. The chilled water return first passes through evaporator No. 2 for a first cooling, and then passes through evaporator No. 1 for a second cooling, finally reducing the temperature from 18°C ​​to 6°C. Two compressors are responsible for the high-temperature compression of the two refrigeration cycles respectively, and the two refrigeration cycles share a condenser for cooling and heat exchange.

[0098] In some embodiments of this disclosure, the first air conditioning water terminal 21 may be a low-temperature air conditioning water terminal.

[0099] In some embodiments of this disclosure, the first temperature T1 can be 6 degrees Celsius.

[0100] In some embodiments of this disclosure, the first temperature T1 can be the inlet water temperature of the low-temperature water air conditioning terminal.

[0101] In some embodiments of this disclosure, such as Figure 2 As shown, the chilled water return temperature of the dual-head chiller unit 11 can be 18 degrees Celsius; the chilled water outlet temperature of the dual-head chiller unit 11 can be 6 degrees Celsius.

[0102] The first air conditioning water terminal 21 is configured to generate second-temperature chilled water after heat exchange using first-temperature chilled water, and to supply the second-temperature chilled water to the second air conditioning water terminal 22, wherein the second temperature T2 is higher than the first temperature T1.

[0103] In some embodiments of this disclosure, the second air conditioning water terminal 22 may be a medium-temperature air conditioning water terminal.

[0104] In some embodiments of this disclosure, the second temperature T2 can be 12 degrees Celsius.

[0105] In some embodiments of this disclosure, the second temperature T2 can be the outlet water temperature of the low-temperature water air conditioner terminal.

[0106] In some embodiments of this disclosure, such as Figure 2 As shown, the chilled water inlet temperature of the first air conditioning water terminal 21 can be 6 degrees Celsius; the chilled water outlet temperature of the first air conditioning water terminal 21 can be 12 degrees Celsius.

[0107] The second air conditioning water terminal 22 is configured to generate chilled water at a third temperature after heat exchange using chilled water at a second temperature, and return the chilled water at the third temperature to the dual-head chiller unit 11, wherein the third temperature T3 is higher than the second temperature T2.

[0108] In some embodiments of this disclosure, the second air conditioning water terminal 22 can be a medium-temperature air conditioning water terminal.

[0109] In some embodiments of this disclosure, the third temperature T3 can be 18 degrees Celsius.

[0110] In some embodiments of this disclosure, the third temperature T3 can be the outlet water temperature of a medium-temperature water air conditioner terminal.

[0111] In some embodiments of this disclosure, such as Figure 2 As shown, the chilled water inlet temperature of the second air conditioning water terminal 22 can be 12 degrees Celsius; the chilled water outlet temperature of the second air conditioning water terminal 22 can be 18 degrees Celsius.

[0112] In some embodiments of this disclosure, such as Figure 2 As shown, the air conditioning system may include a water pump Q, wherein the water pump Q is installed on the pipeline between the outlet of the dual-head chiller unit 11 and the inlet of the first air conditioning water terminal 21.

[0113] The embodiments disclosed above employ a dual-head, dual-condition chiller unit. By replacing the original medium-temperature and low-temperature chillers with a dual-head, dual-condition chiller unit, the number of chiller units and their auxiliary equipment is reduced, the floor space occupied by the chiller room is reduced, and the initial investment in the air conditioning system is lowered.

[0114] Figure 3 This is a schematic diagram of some further embodiments of the air conditioning system disclosed herein. For example... Figure 2 and Figure 3 As shown, the air conditioning system may include a dual-head chiller unit 11, a first air conditioning water terminal 21 and a second air conditioning water terminal 22 connected in series, a first temperature sensor 31 and a controller 30, wherein:

[0115] The first temperature sensor 31 is configured to acquire the water temperature T1 at the inlet of the first air conditioning water terminal 21.

[0116] In some embodiments of this disclosure, the water temperature T1 at the inlet of the first air conditioning water terminal 21 can be the inlet water temperature of the low-temperature water air conditioning terminal.

[0117] The controller 30 is configured to adjust the operating frequency of the dual-head chiller unit 11 according to the water temperature T1 at the inlet of the first air conditioning water terminal 21, so that the water temperature T1 at the inlet of the first air conditioning water terminal 21 reaches the first temperature threshold t1.

[0118] In some embodiments of this disclosure, the first temperature threshold t1 can be 6 degrees Celsius.

[0119] The embodiments disclosed above ensure the stability of the water temperature at the inlet of the first air conditioning water terminal by adjusting the operating frequency of the dual-head chiller unit, thereby ensuring the stability of the temperature of the chilled water supply and return, thus improving the utilization rate of the circulating chilled water and enhancing the system economy.

[0120] In some embodiments of this disclosure, the controller 30 can be configured to reduce the operating frequency of the dual-head chiller unit 11 when the water temperature T1 at the inlet of the first air conditioning water terminal 21 is less than the first temperature threshold t1; and to increase the operating frequency of the dual-head chiller unit 11 when the water temperature T1 at the inlet of the first air conditioning water terminal 21 is greater than the first temperature threshold t1.

[0121] In the embodiments of this disclosure, if T1 < 6℃, the dual-head chiller unit lowers the water temperature too much, therefore the frequency of the dual-head chiller unit is reduced. Similarly, if T1 > 6℃, the water temperature is not lowered sufficiently, therefore the frequency of the dual-head chiller unit is increased. Thus, the embodiments of this disclosure can ensure a stable chilled water temperature output by the dual-head chiller unit, thereby ensuring a stable water temperature at the first air conditioning water terminal.

[0122] In some embodiments of this disclosure, such as Figure 2 and Figure 3 As shown, the air conditioning system may further include a second temperature sensor 32, wherein:

[0123] The second temperature sensor 32 is configured to acquire the water temperature T2 at the outlet of the first air conditioning water terminal 21.

[0124] In some embodiments of this disclosure, the water temperature T2 at the outlet of the first air conditioning water terminal 21 can be the outlet water temperature of the low-temperature water air conditioning terminal.

[0125] The controller 30 can also be configured to adjust the flow rate of chilled water through the first air conditioning water terminal 21 according to the water temperature T2 at the outlet of the first air conditioning water terminal 21, so that the water temperature T2 at the outlet of the first air conditioning water terminal 21 reaches the second temperature threshold t2.

[0126] In some embodiments of this disclosure, the second temperature threshold t2 can be 12 degrees Celsius.

[0127] In the above embodiments of this disclosure, under the premise that the terminal inlet water temperature is maintained at 6°C by the aforementioned logic, the terminal outlet water temperature T2 is mainly regulated by the water flow rate. When T2 is less than 12°C, it indicates that the terminal load is reduced, so the opening of V1 is increased to reduce the water flow rate into the terminal, so that the terminal outlet water is maintained at 12°C. Similarly, when T2 is greater than 12°C, the terminal load increases, so the opening of V1 is decreased to increase the terminal water flow rate, enhance heat exchange, and maintain a constant temperature.

[0128] Therefore, the above-described embodiments of this disclosure can ensure the stability of the outlet water temperature of the first air conditioning water terminal, thereby ensuring the stability of the water temperature of the second air conditioning water terminal.

[0129] In some embodiments of this disclosure, such as Figure 2 and Figure 3 As shown, the air conditioning system may further include a first bypass pipe 41 and a first regulating valve V1, wherein:

[0130] The first bypass pipe 41 is located between the inlet of the first air conditioning water terminal 21 and the return port of the dual-head chiller unit 11.

[0131] The first regulating valve V1 is installed in the first bypass pipeline 41.

[0132] In some embodiments of this disclosure, the first regulating valve V1 may be an electrically bypass regulating valve (proportional regulating valve).

[0133] The controller 30 is configured to increase the opening of the first regulating valve V1 when the water temperature T2 at the outlet of the first air conditioning water terminal 21 is less than the second temperature threshold t2; and to decrease the opening of the first regulating valve V1 when the water temperature T2 at the outlet of the first air conditioning water terminal 21 is greater than the second temperature threshold t2.

[0134] The embodiments of this disclosure connect the low-temperature terminal inlet pipe to the medium-temperature terminal outlet pipe. When the terminal load demand changes, this embodiment can adjust the water flow rate of the terminal system using this valve. While ensuring stable inlet and outlet water temperatures, excess low-temperature water is bypassed to the medium-temperature terminal return water, thereby reducing the chilled water return temperature and allowing it to flow back to the chiller unit, thus reducing the unit's operating load.

[0135] In some embodiments of this disclosure, the controller 30 is configured to increase the opening of the first regulating valve V1 by a predetermined adjustment when the water temperature T2 at the outlet of the first air conditioning water terminal 21 is less than the second temperature threshold t2; and to decrease the opening of the first regulating valve V1 by a predetermined adjustment when the water temperature T2 at the outlet of the first air conditioning water terminal 21 is greater than the second temperature threshold t2.

[0136] In some embodiments of this disclosure, the predetermined adjustment degree can be 5% of the valve's full opening degree.

[0137] In some embodiments of this disclosure, the default opening of the first regulating valve V1 is 30%, and this default opening is adjustable.

[0138] The embodiments of this disclosure use a predetermined adjustment degree for steady adjustment, which can achieve more stable and accurate regulation. The embodiments of this disclosure also monitor the temperature changes of the inlet and outlet water at the low-temperature terminal, while simultaneously adjusting the unit's operating frequency and the valve opening between the low-temperature inlet water and the medium-temperature return water to ensure temperature stability.

[0139] In some embodiments of this disclosure, the controller 30 is configured to, when the water temperature T2 at the outlet of the first air conditioning water terminal 21 is less than a second temperature threshold t2, increase the opening of the first regulating valve V1 by a predetermined adjustment; after a predetermined time interval, compare the water temperature T2 at the outlet of the first air conditioning water terminal 21 with the second temperature threshold t2 again. When the water temperature T2 at the outlet of the first air conditioning water terminal 21 is greater than the second temperature threshold t2, decrease the opening of the first regulating valve V1 by a predetermined adjustment; after a predetermined time interval, compare the water temperature T2 at the outlet of the first air conditioning water terminal 21 with the second temperature threshold t2 again.

[0140] In some embodiments of this disclosure, the predetermined time may be 5 minutes.

[0141] In the embodiments of this disclosure, after adjusting the opening of the first regulating valve V1, after a predetermined time interval, the water temperature T2 at the outlet of the first air conditioning water terminal 21 and the second temperature threshold t2 are compared again. This ensures that after adjusting the regulating valve, the water temperature T2 at the outlet of the first air conditioning water terminal 21 is judged again in a stable system state. This allows for faster and more reasonable control of the water temperature at the outlet of the first air conditioning water terminal 21, avoiding frequent valve control.

[0142] In some embodiments of this disclosure, such as Figure 2 and Figure 3 As shown, the air conditioning system may further include a third temperature sensor 33, wherein:

[0143] The third temperature sensor 33 is configured to acquire the water temperature T3 at the outlet of the second air conditioning water terminal 22.

[0144] In some embodiments of this disclosure, the water temperature T3 at the outlet of the second air conditioning water terminal 22 can be the outlet water temperature of the medium-temperature water air conditioning terminal.

[0145] The controller 30 can also be configured to adjust the flow rate of chilled water through the second air conditioning water terminal 22 according to the water temperature T3 at the outlet of the second air conditioning water terminal 22, so that the water temperature T3 at the outlet of the second air conditioning water terminal 22 reaches the third temperature threshold t3.

[0146] In some embodiments of this disclosure, the third temperature threshold t3 can be 18 degrees Celsius.

[0147] Therefore, the above-described embodiments of this disclosure can ensure the stability of the return water temperature of the dual-head chiller unit.

[0148] In some embodiments of this disclosure, such as Figure 2 and Figure 3 As shown, the air conditioning system may further include a second bypass pipe 41 and a second regulating valve V2, wherein:

[0149] The second bypass pipe 41 is a second bypass pipe installed between the outlet of the first air conditioning water terminal 21 and the return water inlet of the dual-head chiller unit 11.

[0150] The second regulating valve V2 is installed in the second bypass pipeline.

[0151] In some embodiments of this disclosure, the second regulating valve V2 may be an electrically bypass regulating valve (proportional regulating valve).

[0152] The controller 30 is configured to increase the opening of the second regulating valve V2 when the water temperature T3 at the outlet of the second air conditioning water terminal 22 is less than the third temperature threshold t3; and to decrease the opening of the second regulating valve V2 when the water temperature T3 at the outlet of the second air conditioning water terminal 22 is greater than the third temperature threshold t3.

[0153] In some embodiments of this disclosure, if T3 is less than 18°C, it indicates that the load on the medium-temperature terminal is reduced and the cooling capacity required is reduced. In order to ensure a constant outlet water temperature, it is necessary to reduce the water flow rate into the terminal. Therefore, the opening of the bypass valve V2 is increased so that more water flows out through the bypass pipe. Similarly, when T3 is greater than 18°C, the load demand on the medium-temperature terminal increases and the cooling capacity required increases. It is necessary to increase the water flow rate into the terminal. Therefore, the opening of V2 is reduced to reduce the bypass water flow rate.

[0154] In some embodiments of this disclosure, the controller 30 is configured to increase the opening of the second regulating valve V2 by a predetermined adjustment when the water temperature T3 at the outlet of the second air conditioning water terminal 22 is less than the third temperature threshold t3; and to decrease the opening of the second regulating valve V2 by a predetermined adjustment when the water temperature T3 at the outlet of the second air conditioning water terminal 22 is greater than the third temperature threshold t3.

[0155] In some embodiments of this disclosure, the predetermined adjustment degree can be 5% of the valve's full opening degree.

[0156] In some embodiments of this disclosure, the default opening of the second regulating valve V2 is 30%, which is adjustable.

[0157] The embodiments disclosed above employ a predetermined adjustment degree for steady adjustment, which can achieve more stable and accurate adjustment of the opening degree of the second regulating valve V2, thereby stabilizing the return water temperature of the dual-head chiller unit.

[0158] In some embodiments of this disclosure, the controller 30 is configured to, when the water temperature T3 at the outlet of the second air conditioning water terminal 22 is less than a third temperature threshold t3, increase the opening of the second regulating valve V2 by a predetermined adjustment; after a predetermined time interval, compare the water temperature T3 at the outlet of the second air conditioning water terminal 22 with the third temperature threshold t3 again. When the water temperature T3 at the outlet of the second air conditioning water terminal 22 is greater than the third temperature threshold t3, decrease the opening of the second regulating valve V2 by a predetermined adjustment; after a predetermined time interval, compare the water temperature T3 at the outlet of the second air conditioning water terminal 22 with the third temperature threshold t3 again.

[0159] In some embodiments of this disclosure, the predetermined time may be 5 minutes.

[0160] In the embodiments disclosed above, after adjusting the opening of the second regulating valve V2, after a predetermined time interval, the water temperature T3 at the outlet of the second air conditioning water terminal 22 and the third temperature threshold t3 are compared again. This ensures that after adjusting the regulating valve, the water temperature T3 at the outlet of the second air conditioning water terminal 22 is judged again in a stable system state. This allows for faster and more reasonable control of the return water temperature of the dual-head chiller unit, avoiding frequent valve control.

[0161] The air conditioning system disclosed herein is a large temperature difference series air conditioning system, which can effectively control the supply and return water temperatures of the large temperature difference series air conditioning system.

[0162] The embodiments disclosed above aim to reduce the initial investment in cleanroom air conditioning systems, lower energy consumption, and improve system economy. Therefore, a large temperature difference series air conditioning water system design (connecting the low-temperature and medium-temperature terminals of the cleanroom air conditioning system) is proposed for cleanrooms with low-temperature and medium-temperature cold sources, and a control method is provided to ensure a stable supply of water to the air conditioning terminals.

[0163] The embodiments disclosed above use a dual-head chiller unit to replace the original separate low-temperature and medium-temperature water chiller units. First, the dual-head unit supplies 6°C water to the low-temperature air conditioning water terminal. After sufficient heat exchange, 12°C medium-temperature water is generated and supplied to the medium-temperature air conditioning water terminal. Similarly, after heat exchange, the water returns to the chiller unit, completing the chilled water circulation. For example... Figure 2The air conditioning system diagram shown has the low-temperature water air conditioning terminal and the medium-temperature water air conditioning terminal connected in series. A bypass pipe and bypass valve V1 are added between the inlet pipe of the low-temperature air conditioning terminal and the outlet pipe of the medium-temperature air conditioning terminal. A bypass pipe and bypass valve V2 are added between the outlet pipe of the low-temperature air conditioning terminal and the outlet of the medium-temperature air conditioning terminal. Temperature sensors (31-33) are installed at the inlet and outlet of the low-temperature and medium-temperature air conditioning terminals. By monitoring temperature changes, the opening degree of each bypass valve and regulating valve and the operating frequency of the unit are adjusted to ensure that the temperature of the chilled water supply and return is stable and meets the requirements of the air conditioning terminals.

[0164] The dual-head large temperature difference inverter unit of the above embodiments of this disclosure is also an important component of the air conditioning system of this disclosure. This dual-head large temperature difference unit is closely related to the control of the terminal units. Compared with related technology systems, the dual-head unit of the above embodiments of this disclosure, with the same cooling capacity, achieves higher energy efficiency while slightly reducing power. Furthermore, the above embodiments of this disclosure incorporate control of the cooling source, allowing for timely adjustment of the unit's operating status according to changes in terminal demand, significantly improving system energy efficiency. The above embodiments of this disclosure monitor changes in the inlet and outlet water temperatures at the low-temperature terminals, while simultaneously adjusting the unit's operating frequency and the valve opening between the low-temperature inlet water and the medium-temperature return water to ensure temperature stability. Compared with related technologies, the system energy-saving effect of controlling the cooling source in the above embodiments of this disclosure is far greater than that of adjusting the water pump.

[0165] Figure 4 This is a schematic diagram of some embodiments of the air conditioning system control method disclosed herein. Figure 4 The embodiments can be implemented by the air conditioning system or controller of this disclosure. For example... Figure 4 As shown, Figure 4 The method of the embodiment may include at least one of steps 100 and 200, wherein:

[0166] Step 100: Control the multi-head chiller unit 10 of the air conditioning system to provide chilled water to a plurality of air conditioning water terminals 20 connected in series, wherein the air conditioning system includes the multi-head chiller unit 10 and a plurality of air conditioning water terminals 20 connected in series.

[0167] In some embodiments of this disclosure, the multi-head chiller unit 10 is a dual-head chiller unit 11; the air conditioning water terminal 20 includes a first air conditioning water terminal 21 and a second air conditioning water terminal 22 connected in series.

[0168] In some embodiments of this disclosure, step 100 may include: controlling the dual-head chiller unit 11 to provide chilled water at a first temperature to the first air conditioning water terminal 21.

[0169] Step 200: Control the multiple air conditioning water terminals 20 to exchange heat using the chilled water provided by the multi-head chiller unit 10, and return the heat-exchanged chilled water to the multi-head chiller unit 10.

[0170] In some embodiments of this disclosure, step 200 may include: controlling the chilled water provided by the multi-head chiller unit 10 to enter multiple air conditioning water terminals 20 in a series connection order for heat exchange.

[0171] In some embodiments of this disclosure, step 200 may include at least one of steps 100 and 200, wherein:

[0172] Step 210: After the first air conditioning water terminal 21 uses chilled water at the first temperature for heat exchange, it generates chilled water at the second temperature and supplies the chilled water at the second temperature to the second air conditioning water terminal 22, wherein the second temperature is higher than the first temperature.

[0173] Step 220: After the second air conditioning water terminal 22 uses the second temperature chilled water for heat exchange, it generates the third temperature chilled water and returns the third temperature chilled water to the dual-head chiller unit 11, wherein the third temperature is higher than the second temperature.

[0174] Figure 5 This is a schematic diagram of some other embodiments of the air conditioning system control method disclosed herein. Figure 5 The embodiments can be implemented by the air conditioning system or controller of this disclosure. For example... Figure 5 As shown, the air conditioning system control method disclosed herein may include, in addition to, Figure 4 In addition to at least one of steps 100 and 200 in the embodiment, it may also include Figure 5 At least one of steps 300 to 800 in the embodiment, wherein:

[0175] Step 300: Receive the water temperature T1 at the inlet of the first air conditioning water terminal 21 collected by the first temperature sensor 31.

[0176] Step 400: Based on the water temperature T1 at the inlet of the first air conditioning water terminal 21, adjust the operating frequency of the dual-head chiller unit 11 so that the water temperature T1 at the inlet of the first air conditioning water terminal 21 reaches the first temperature threshold t1.

[0177] In some embodiments of this disclosure, step 400 may include: reducing the operating frequency of the dual-head chiller unit 11 when the water temperature T1 at the inlet of the first air conditioning water terminal 21 is less than the first temperature threshold t1; and increasing the operating frequency of the dual-head chiller unit 11 when the water temperature T1 at the inlet of the first air conditioning water terminal 21 is greater than the first temperature threshold t1.

[0178] Step 500: Receive the water temperature T2 at the outlet of the first air conditioning water terminal 21 collected by the second temperature sensor 32.

[0179] Step 600: Based on the water temperature T2 at the outlet of the first air conditioning water terminal 21, adjust the flow rate of chilled water through the first air conditioning water terminal 21 so that the water temperature T2 at the outlet of the first air conditioning water terminal 21 reaches the second temperature threshold t2.

[0180] In some embodiments of this disclosure, step 600 may include: increasing the opening of the first regulating valve V1 when the water temperature T2 at the outlet of the first air conditioning water terminal 21 is less than the second temperature threshold t2, wherein the first regulating valve V1 is disposed in the first bypass pipe 41, and the first bypass pipe 41 is disposed between the inlet of the first air conditioning water terminal 21 and the return port of the dual-head chiller unit 11; and decreasing the opening of the first regulating valve V1 when the water temperature T2 at the outlet of the first air conditioning water terminal 21 is greater than the second temperature threshold t2.

[0181] In some embodiments of this disclosure, the step of increasing the opening of the first regulating valve V1 may include: increasing the opening of the first regulating valve V1 by a predetermined adjustment degree.

[0182] In some embodiments of this disclosure, the step of reducing the opening of the first regulating valve V1 may include: reducing the opening of the first regulating valve V1 by a predetermined adjustment.

[0183] Step 700: Receive the water temperature T3 at the outlet of the second air conditioning water terminal 22 collected by the third temperature sensor 33.

[0184] Step 800: Based on the water temperature T3 at the outlet of the second air conditioning water terminal 22, adjust the flow rate of chilled water through the second air conditioning water terminal 22 so that the water temperature T3 at the outlet of the second air conditioning water terminal 22 reaches the third temperature threshold t3.

[0185] In some embodiments of this disclosure, step 800 may include: increasing the opening of the second regulating valve V2 when the water temperature T3 at the outlet of the second air conditioning water terminal 22 is less than the third temperature threshold t3, wherein the second regulating valve V2 is disposed in the second bypass pipeline, and the second bypass pipeline is disposed between the outlet of the first air conditioning water terminal 21 and the return water port of the dual-head chiller unit 11; and decreasing the opening of the second regulating valve V2 when the water temperature T3 at the outlet of the second air conditioning water terminal 22 is greater than the third temperature threshold t3.

[0186] Figure 6 This is a schematic diagram of some embodiments of the air conditioning system control method disclosed herein. Figure 4 The embodiments can be implemented by the air conditioning system or controller of this disclosure. For example... Figure 4 As shown, Figure 4 The method of the embodiment may include at least one of steps ① to ⑥, wherein the following logic control is performed after the device has been turned on and running normally for 10 minutes.

[0187] Step 1: First, proceed to Step 1 (Decision 1), where the first temperature sensor 31 detects whether the inlet water temperature of the low-temperature air conditioning terminal is equal to 6℃. If yes, proceed to Step 2 (Decision 2); otherwise, proceed to Step 3 (Decision 3).

[0188] Step ③: After entering Step ③, when T1 < 6℃, reduce the operating frequency of the chiller unit; when T1 > 6℃, increase the operating frequency of the chiller unit. Wait for 5 minutes (the time length can be set) and then return to Step ①. Repeat this cycle until the condition ① is met and then proceed to Step ②.

[0189] Step ②: After entering Step ②, check whether the outlet water temperature of the low-temperature air conditioning terminal is equal to 12℃ using T2. If yes, proceed to Step ④ (Judgment ④); otherwise, proceed to Step ⑤ (Judgment ⑤).

[0190] Step 5: After entering step 5, when T2 < 12℃, the opening of electric valve V1 increases by 5% (the default opening of V1 is 30%, which is adjustable); when T2 > 12℃, the opening of electric valve V1 decreases by 5%, waits for 5 minutes (the time length can be set), and then returns to step 2. This cycle continues until the conditions of judgment 2 are met, and then step 4 is entered.

[0191] Step 4: After entering step 4, check whether the outlet water temperature of the medium-temperature air conditioning terminal is equal to 18℃ using T3. If yes, the cycle ends; otherwise, proceed to step 6.

[0192] Step 6: After entering step 6, when T3 < 18℃, the opening of electric valve V2 increases by 5% (the default opening of V2 is 30%, which is adjustable). When T3 > 18℃, the opening of electric valve V2 decreases by 5%. Wait for 5 minutes (the time length can be set) and return to step 4. Repeat this cycle until step 4 is met to end the entire cycle.

[0193] The present disclosure provides a large temperature difference air conditioning system and control method for cleanrooms according to the above embodiments.

[0194] The embodiments disclosed above are based on cleanrooms as the application scenario. By adding bypass pipelines, electric regulating valves, and control methods, the system is more efficient and energy-saving, improving the system's economy and energy utilization rate.

[0195] The above embodiments of this disclosure solve the problems of high initial investment in cleanroom air conditioning systems; high energy consumption in the transmission and distribution system of cleanroom air conditioning systems; and complex, redundant, and space-consuming piping design in cleanroom air conditioning systems.

[0196] The embodiments disclosed herein replace the original medium-temperature chiller and low-temperature chiller with a dual-head, dual-condition chiller unit, thereby reducing the number of chiller units and their supporting equipment, reducing the floor space occupied by the machine room, and lowering the initial investment in the air conditioning system.

[0197] Because the system in the above embodiments of this disclosure adopts a large temperature difference series system, the redundancy of pipeline design and the number of transmission and distribution equipment are reduced, effectively reducing the energy consumption of the pipeline transmission and distribution system.

[0198] The embodiments disclosed above integrate low-temperature water and medium-temperature water systems, and add bypass pipelines and electric regulating valves. Through certain control logic, the temperature of chilled water supply and return is kept stable, thereby improving the utilization rate of circulating chilled water and enhancing the system's economy.

[0199] Figure 7 This is a schematic diagram of some embodiments of the controller disclosed herein. For example... Figure 7 As shown, the controller disclosed herein (e.g.) Figure 3 The controller 30) in the embodiment may include a first control module 71 and a second control module 72, wherein:

[0200] The first control module 71 is configured to control the multi-head chiller unit 10 of the air conditioning system to provide chilled water to a plurality of air conditioning water terminals 20 connected in series, wherein the air conditioning system includes the multi-head chiller unit 10 and a plurality of air conditioning water terminals 20 connected in series.

[0201] In some embodiments of this disclosure, the multi-head chiller unit is a dual-head chiller unit; the air conditioning water terminal includes a first air conditioning water terminal and a second air conditioning water terminal connected in series.

[0202] In some embodiments of this disclosure, the first control module 71 can be configured to control the dual-head chiller unit to provide chilled water at a first temperature to the first air conditioning water terminal.

[0203] The second control module 72 is configured to control the plurality of air conditioning water terminals 20 to exchange heat using the chilled water provided by the multi-head chiller unit 10, and to return the chilled water after heat exchange to the multi-head chiller unit 10.

[0204] In some embodiments of this disclosure, the second control module 72 can be configured to control the chilled water provided by the multi-head chiller unit to enter multiple air conditioning water terminals in a series connection order for heat exchange.

[0205] In some embodiments of this disclosure, the second control module 72 can be configured to control the first air conditioning water terminal to generate chilled water at a second temperature after heat exchange with chilled water at a first temperature, and to supply the chilled water at the second temperature to the second air conditioning water terminal, wherein the second temperature is higher than the first temperature; and to control the second air conditioning water terminal to generate chilled water at a third temperature after heat exchange with chilled water at the second temperature, and to return the chilled water at the third temperature to the dual-head chiller unit, wherein the third temperature is higher than the second temperature.

[0206] In some embodiments of this disclosure, the controller may also be configured to receive the water temperature at the inlet of the first air conditioning water terminal collected by the first temperature sensor; and adjust the operating frequency of the dual-head chiller unit according to the water temperature at the inlet of the first air conditioning water terminal, so that the water temperature at the inlet of the first air conditioning water terminal reaches a first temperature threshold.

[0207] In some embodiments of this disclosure, the controller of this disclosure, when adjusting the operating frequency of the dual-head chiller unit according to the water temperature at the first air conditioning water inlet, can be configured to reduce the operating frequency of the dual-head chiller unit when the water temperature at the first air conditioning water inlet is less than a first temperature threshold; and to increase the operating frequency of the dual-head chiller unit when the water temperature at the first air conditioning water inlet is greater than the first temperature threshold.

[0208] In some embodiments of this disclosure, the controller may also be configured to receive the water temperature at the outlet of the first air conditioning water terminal collected by the second temperature sensor; and adjust the flow rate of chilled water through the first air conditioning water terminal according to the water temperature at the outlet of the first air conditioning water terminal, so that the water temperature at the outlet of the first air conditioning water terminal reaches a second temperature threshold.

[0209] In some embodiments of this disclosure, the controller, when adjusting the chilled water flow rate through the first air conditioning water terminal based on the water temperature at the outlet of the first air conditioning water terminal, can be configured to: increase the opening of the first regulating valve when the water temperature at the outlet of the first air conditioning water terminal is less than a second temperature threshold, wherein the first regulating valve is disposed in a first bypass pipe, the first bypass pipe being disposed between the inlet of the first air conditioning water terminal and the return outlet of the dual-head chiller unit; and decrease the opening of the first regulating valve when the water temperature at the outlet of the first air conditioning water terminal is greater than the second temperature threshold.

[0210] In some embodiments of this disclosure, the controller of this disclosure can be configured to increase the opening of the first regulating valve by a predetermined adjustment degree when the opening degree of the first regulating valve is increased.

[0211] In some embodiments of this disclosure, the controller of this disclosure, when reducing the opening of the first regulating valve, can be configured to reduce the opening of the first regulating valve by a predetermined adjustment degree.

[0212] In some embodiments of this disclosure, the controller may also be configured to receive the water temperature at the outlet of the second air conditioning water terminal collected by the third temperature sensor; and adjust the flow rate of chilled water through the second air conditioning water terminal according to the water temperature at the outlet of the second air conditioning water terminal, so that the water temperature at the outlet of the second air conditioning water terminal reaches the third temperature threshold.

[0213] In some embodiments of this disclosure, the controller, when adjusting the chilled water flow rate through the second air conditioning water terminal based on the water temperature at the outlet of the second air conditioning water terminal, can be configured to increase the opening of the second regulating valve when the water temperature at the outlet of the second air conditioning water terminal is less than a third temperature threshold, wherein the second regulating valve is disposed in a second bypass pipeline, the second bypass pipeline being disposed between the outlet of the first air conditioning water terminal and the return water inlet of the dual-head chiller unit; and to decrease the opening of the second regulating valve when the water temperature at the outlet of the second air conditioning water terminal is greater than the third temperature threshold.

[0214] In some embodiments of this disclosure, the controller of this disclosure can be configured to implement the above embodiments (e.g. Figures 4 to 6 The air conditioning system control method (at least one embodiment) relates to.

[0215] Figure 8 This is a schematic diagram illustrating the structure of other embodiments of the controller disclosed herein. For example... Figure 8 As shown, the controller disclosed herein may include a memory 81 and a processor 82.

[0216] Memory 81 is used to store instructions, and processor 82 is coupled to memory 81. Processor 82 is configured to execute instructions stored in memory to implement the above embodiments (e.g., Figures 4 to 6 The air conditioning system control method (at least one embodiment) relates to.

[0217] like Figure 8 As shown, the controller 304 also includes a communication interface 83 for exchanging information with other devices. Additionally, the controller 304 includes a bus 84, through which the processor 82, communication interface 83, and memory 81 communicate with each other.

[0218] The memory 81 may include high-speed RAM, and may also include non-volatile memory, such as at least one disk drive. The memory 81 may also be a memory array. The memory 81 may also be divided into blocks, and these blocks may be combined into virtual volumes according to certain rules.

[0219] Furthermore, processor 82 may be a central processing unit (CPU), an application-specific integrated circuit (ASIC), or one or more integrated circuits configured to implement embodiments of the present disclosure.

[0220] According to another aspect of this disclosure, a computer-readable storage medium is provided, wherein the computer-readable storage medium stores computer instructions that, when executed by a processor, implement any of the embodiments described above (e.g., Figures 4 to 6 The air conditioning system control method described in at least one embodiment.

[0221] The computer-readable storage medium disclosed herein can be implemented as a non-transitory computer-readable storage medium.

[0222] The above-described embodiments of this disclosure provide a novel large temperature difference air conditioning system suitable for cleanrooms. The system of the above-described embodiments of this disclosure makes full use of dual-head dual-condition (6℃ / 12℃, 12℃ / 18℃) units to replace low-temperature chillers and medium-temperature chillers. In order to meet the different water temperature requirements of clean areas and comfort air-conditioned areas in cleanrooms, the pipelines of the two are connected in series and a control system is set up for intelligent regulation, realizing the recycling of chilled water and achieving maximum economy and energy saving.

[0223] Those skilled in the art will understand that embodiments of this disclosure can be provided as methods, apparatus, or computer program products. Therefore, this disclosure can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this disclosure can take the form of a computer program product embodied on one or more computer-usable non-transitory storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0224] This disclosure is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this disclosure. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create a machine for implementing the flowchart illustrations. Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0225] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0226] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0227] The controller, first control module, and second control module described above can be implemented as a general-purpose processor, programmable logic controller, digital signal processor (DSP), application-specific integrated circuit (ASIC), field-programmable gate array (FPGA), or other programmable logic device, discrete gate or transistor logic device, discrete hardware component, or any suitable combination thereof for performing the functions described in this disclosure.

[0228] Those skilled in the art will understand that all or part of the steps of the methods in the above embodiments of this disclosure can be implemented in hardware. The hardware can be implemented as a general-purpose processor, programmable logic controller, digital signal processor, application-specific integrated circuit, field-programmable gate array or other programmable logic device, discrete gate or transistor logic device, discrete hardware component or any suitable combination thereof for executing the methods of this disclosure.

[0229] This concludes the detailed description of the present disclosure. To avoid obscuring the concept of the disclosure, some details known in the art have not been described. Those skilled in the art will fully understand how to implement the technical solutions disclosed herein based on the above description.

[0230] Those skilled in the art will understand that all or part of the steps of the above embodiments can be implemented by hardware, or by a program instructing the relevant hardware to implement them. The program can be stored in a non-transitory computer-readable storage medium, such as a read-only memory, a disk, or an optical disk.

[0231] The description in this disclosure is provided for illustrative and descriptive purposes only and is not intended to be exhaustive or to limit the disclosure to its forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described in order to better illustrate the principles and practical application of this disclosure and to enable those skilled in the art to understand this disclosure and to design various embodiments with various modifications suitable for a particular purpose.

Claims

1. An air conditioning system for use in semiconductor cleanrooms, comprising: Multiple air conditioning water terminals connected in series, wherein "multiple" refers to at least two; and The dual-head chiller unit is configured to supply chilled water to multiple air conditioning water terminals connected in series, and to receive chilled water returned after heat exchange through the multiple air conditioning water terminals connected in series. The air conditioning water terminal includes a first air conditioning water terminal and a second air conditioning water terminal connected in series, wherein: A dual-head chiller unit is configured to provide chilled water at a first temperature to a first air conditioning water terminal. The dual-head chiller unit includes two compressors, two evaporators and one condenser, with the two evaporators connected in series. The first air conditioning water terminal is configured to generate chilled water at a second temperature after heat exchange using chilled water at a first temperature, and to supply the chilled water at the second temperature to the second air conditioning water terminal, wherein the second temperature is higher than the first temperature; The second air conditioning water terminal is configured to generate chilled water at a third temperature after heat exchange using chilled water at a second temperature, and return the chilled water at the third temperature to the dual-head chiller unit, wherein the third temperature is higher than the second temperature; The air conditioning system also includes: The second temperature sensor is configured to acquire the water temperature at the outlet of the first air conditioning water terminal. The first bypass pipe is installed between the inlet of the first air conditioning water terminal and the return water inlet of the dual-head chiller unit; The first regulating valve is installed in the first bypass pipeline; The second bypass pipe is installed between the outlet of the first air conditioning water terminal and the return water inlet of the dual-head chiller unit; The second regulating valve is installed in the second bypass pipeline; The controller is configured as follows: Based on the water temperature at the inlet of the first air conditioning water terminal, adjust the operating frequency of the dual-head chiller unit so that the water temperature at the inlet of the first air conditioning water terminal reaches the first temperature threshold. If the water temperature at the outlet of the first air conditioner water terminal is lower than the second temperature threshold, increase the opening of the first regulating valve; if the water temperature at the outlet of the first air conditioner water terminal is higher than the second temperature threshold, decrease the opening of the first regulating valve. If the water temperature at the outlet of the second air conditioning water terminal is lower than the third temperature threshold, increase the opening of the second regulating valve; if the water temperature at the outlet of the second air conditioning water terminal is higher than the third temperature threshold, decrease the opening of the second regulating valve.

2. The air conditioning system according to claim 1, further comprising: The first temperature sensor is configured to acquire the water temperature at the inlet of the first air conditioning water terminal.

3. The air conditioning system according to claim 2, wherein: The controller is configured to reduce the operating frequency of the dual-head chiller unit when the water temperature at the inlet of the first air conditioning water terminal is lower than a first temperature threshold, and to increase the operating frequency of the dual-head chiller unit when the water temperature at the inlet of the first air conditioning water terminal is higher than the first temperature threshold.

4. The air conditioning system according to any one of claims 1 to 3, wherein: The controller is configured to increase the opening of the first regulating valve by a predetermined adjustment when the water temperature at the outlet of the first air conditioner water terminal is less than a second temperature threshold, and to decrease the opening of the first regulating valve by a predetermined adjustment when the water temperature at the outlet of the first air conditioner water terminal is greater than the second temperature threshold.

5. The air conditioning system according to any one of claims 1 to 3, further comprising: The third temperature sensor is configured to acquire the water temperature at the outlet of the second air conditioning water terminal.

6. A method for controlling an air conditioning system applied in a semiconductor cleanroom, comprising: A dual-head chiller unit of an air conditioning system supplies chilled water to multiple air conditioning water terminals connected in series. The air conditioning system includes a dual-head chiller unit and multiple air conditioning water terminals connected in series. The dual-head chiller unit includes two compressors, two evaporators, and one condenser. The two evaporators are connected in series. The air conditioning water terminals include a first air conditioning water terminal and a second air conditioning water terminal connected in series. Controlling the dual-head chiller unit to supply chilled water to the multiple air conditioning water terminals includes: controlling the dual-head chiller unit to supply chilled water at a first temperature to the first air conditioning water terminal; and... Controlling the plurality of air conditioning water terminals to exchange heat with chilled water provided by the dual-head chiller unit, and returning the heat-exchanged chilled water to the dual-head chiller unit, wherein controlling the plurality of air conditioning water terminals to exchange heat with chilled water provided by the dual-head chiller unit and returning the heat-exchanged chilled water to the dual-head chiller unit includes: controlling the first air conditioning water terminal to exchange heat with chilled water at a first temperature to generate chilled water at a second temperature, and providing the chilled water at the second temperature to the second air conditioning water terminal, wherein the second temperature is higher than the first temperature; and controlling the second air conditioning water terminal to exchange heat with chilled water at the second temperature to generate chilled water at a third temperature, and returning the chilled water at the third temperature to the dual-head chiller unit, wherein the third temperature is higher than the second temperature; The air conditioning system control method further includes: Based on the water temperature at the inlet of the first air conditioning water terminal, adjust the operating frequency of the dual-head chiller unit so that the water temperature at the inlet of the first air conditioning water terminal reaches the first temperature threshold. Receives the water temperature at the outlet of the first air conditioning water terminal, collected by the second temperature sensor; When the water temperature at the outlet of the first air conditioning water terminal is lower than the second temperature threshold, the opening of the first regulating valve is increased. The first regulating valve is located in the first bypass pipe, which is situated between the inlet of the first air conditioning water terminal and the return outlet of the dual-head chiller unit. If the water temperature at the outlet of the first air conditioning water terminal is greater than the second temperature threshold, reduce the opening of the first regulating valve; When the water temperature at the outlet of the second air conditioning water terminal is lower than the third temperature threshold, the opening of the second regulating valve is increased. The second regulating valve is located in the second bypass pipeline, which is situated between the outlet of the first air conditioning water terminal and the return outlet of the dual-head chiller unit. If the water temperature at the outlet of the second air conditioning water terminal is greater than the third temperature threshold, reduce the opening of the second regulating valve.

7. The air conditioning system control method according to claim 6 further includes: The water temperature at the inlet of the first air conditioning water terminal is received by the first temperature sensor.

8. The air conditioning system control method according to claim 7, wherein, The adjustment of the operating frequency of the dual-head chiller unit based on the water temperature at the inlet of the first air conditioning water terminal includes: When the water temperature at the inlet of the first air conditioning water terminal is lower than the first temperature threshold, reduce the operating frequency of the dual-head chiller unit; and When the water temperature at the inlet of the first air conditioning water terminal is greater than the first temperature threshold, increase the operating frequency of the dual-head chiller unit.

9. The air conditioning system control method according to any one of claims 6 to 8, wherein: Increasing the opening of the first regulating valve includes: increasing the opening of the first regulating valve by a predetermined adjustment degree; The reduction of the opening of the first regulating valve includes: reducing the opening of the first regulating valve by a predetermined adjustment degree.

10. The air conditioning system control method according to any one of claims 6 to 8, further comprising: The water temperature at the outlet of the second air conditioning water terminal is collected by the third temperature sensor.

11. A controller for use in semiconductor cleanrooms, comprising: A first control module is configured to control a dual-head chiller unit of an air conditioning system to provide chilled water to multiple air conditioning water terminals connected in series. The air conditioning system includes a dual-head chiller unit and multiple air conditioning water terminals connected in series. Each air conditioning water terminal includes a first air conditioning water terminal and a second air conditioning water terminal connected in series. Controlling the dual-head chiller unit to provide chilled water to the multiple air conditioning water terminals includes: controlling the dual-head chiller unit to provide chilled water at a first temperature to the first air conditioning water terminal; and... The second control module is configured to control the plurality of air conditioning water terminals to exchange heat using the chilled water provided by the dual-head chiller unit, and to return the heat-exchanged chilled water to the dual-head chiller unit. The control of the plurality of air conditioning water terminals to exchange heat using the chilled water provided by the dual-head chiller unit and to return the heat-exchanged chilled water to the dual-head chiller unit includes: controlling the first air conditioning water terminal to exchange heat using chilled water at a first temperature to generate chilled water at a second temperature, and providing the second-temperature chilled water to the second air conditioning water terminal, wherein the second temperature is higher than the first temperature; and controlling the second air conditioning water terminal to exchange heat using the second-temperature chilled water to generate chilled water at a third temperature, and returning the third-temperature chilled water to the dual-head chiller unit, wherein the third temperature is higher than the second temperature. The controller can also be configured to adjust the operating frequency of the dual-head chiller unit according to the water temperature at the inlet of the first air conditioning water terminal, so that the water temperature at the inlet of the first air conditioning water terminal reaches a first temperature threshold. The system receives the water temperature at the outlet of the first air conditioning water terminal from the second temperature sensor; if the water temperature at the outlet of the first air conditioning water terminal is lower than the second temperature threshold, the system increases the opening of the first regulating valve, wherein the first regulating valve is located in the first bypass pipe, which is located between the inlet of the first air conditioning water terminal and the return port of the dual-head chiller unit; and if the water temperature at the outlet of the first air conditioning water terminal is higher than the second temperature threshold, the system decreases the opening of the first regulating valve. When the water temperature at the outlet of the second air conditioning water terminal is less than the third temperature threshold, the opening of the second regulating valve is increased, wherein the second regulating valve is located in the second bypass pipeline, and the second bypass pipeline is located between the outlet of the first air conditioning water terminal and the return water port of the dual-head chiller unit; and when the water temperature at the outlet of the second air conditioning water terminal is greater than the third temperature threshold, the opening of the second regulating valve is decreased.

12. A controller, comprising: Memory, used to store instructions; and A processor is configured to execute the instructions, causing the controller to implement the air conditioning system control method as described in any one of claims 6-10.

13. A computer-readable storage medium, wherein, The computer-readable storage medium stores computer instructions that, when executed by a processor, implement the air conditioning system control method as described in any one of claims 6-10.

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