Motor overload protection device and motor system

Abstract

The application discloses a motor overload protection device, which comprises a follow-up plate, a fixed plate, a moving plate, an elastic component and a detection switch. One end of the follow-up plate is fastened to a mounting plate of a motor, one end of the fixed plate is fastened to a vacuum magnetic fluid, the moving plate is slidingly installed at the other end of the fixed plate, and the other end of the moving plate is fastened to the other end of the follow-up plate. The elastic component is located between the fixed plate and the moving plate, and is used for generating a torque for limiting the sliding of the moving plate. The detection switch is fastened to the fixed plate, and a detection end is located at a movement track side of the other end of the follow-up plate. The application further discloses a motor system, which comprises a motor, a vacuum magnetic fluid and the motor overload protection device. The motor is fixed to the mounting plate, and a rotating shaft of the motor is connected with a shaft of the vacuum magnetic fluid. The motor overload protection device can realize the pre-warning overload protection of the motor when a fault occurs at any moment of the movement of a moving component of equipment, so as to prevent the motor from being damaged and improve the operation reliability of the equipment.

Description

Technical Field

[0001] This invention relates to the field of motor technology, specifically to a motor overload protection device and motor system. Background Technology

[0002] With the rapid development of the semiconductor industry, the demand for semiconductor equipment is increasing. Moving parts are an indispensable part of vacuum equipment, and moving parts inevitably require drive motors. The forms of motion of motor-driven parts include rotational motion, linear motion, and oscillating motion. Vacuum is generally introduced into the vacuum by motor drive using vacuum magnetohydrodynamics.

[0003] The conventional design of moving parts involves setting a rotation origin for position detection and initialization during rotary motion. Linear motion, scanning motion, and oscillating motion often have detection switches at the limit positions of the motion to prevent the motion from exceeding the travel range and causing motor overload. Before the motor overload alarm is triggered, an alarm signal is triggered to stop the motor rotation, thus protecting the motor.

[0004] There are often no detection switches during the movement of moving parts. Therefore, if an unexpected situation occurs during actual operation, such as the moving part getting stuck, causing the movement to stop, the alarm signal of the detection switch will not be triggered. The motor will not stop rotating, thus causing an overload alarm and easily damaging the motor. Summary of the Invention

[0005] The technical problem to be solved by the present invention is: in view of the technical problems existing in the prior art, the present invention provides a motor overload protection device and motor system that can provide early warning overload protection for the motor when a fault occurs at any time during the movement of the moving parts of the equipment, prevent motor damage, and improve the operational reliability of the equipment.

[0006] To solve the above-mentioned technical problems, the technical solution proposed by this invention is as follows:

[0007] An overload protection device for a motor includes a follower plate, a fixed plate, a movable plate, an elastic component, and a detection switch. One end of the follower plate is fixed to a mounting plate of the motor, one end of the fixed plate is fixed to a vacuum magnetohydrodynamic fluid, and the movable plate is slidably mounted on the other end of the fixed plate, and the movable plate is fixedly connected to the other end of the follower plate. The elastic component is located between the fixed plate and the movable plate and is used to generate a torque that restricts the sliding of the movable plate. The detection switch is fixed to the fixed plate and the detection end is located on the motion trajectory side of the other end of the follower plate.

[0008] As a further improvement to the above technical solution:

[0009] The elastic component includes two sets of spring assemblies located on both sides of the movable plate. Each set of spring assemblies includes a first mounting post, a first waist-shaped hole, a second mounting post, and a spring. The first mounting post is located on the side of the movable plate, the first waist-shaped hole is located in the middle of the movable plate, the second mounting post is located on the fixed plate, and the second mounting post passes through the first waist-shaped hole. The two ends of the spring are respectively connected to the first mounting post and the second mounting post.

[0010] The movable plate is slidably mounted on the fixed plate via a sliding assembly.

[0011] The sliding assembly includes multiple sets of sliding members, which are located on the upper and lower sides of the movable plate respectively. Each set of sliding members includes a roller and a second oblong hole. The second oblong hole is located on the movable plate, and the roller is fastened to the fixed plate and located inside the second oblong hole.

[0012] The detection switch includes two limit switches, located on both sides of the other end of the follower plate.

[0013] The movable plate is provided with a screw, and the follower plate is provided with a mounting hole. The screw passes through the mounting hole and is locked by a nut to achieve a tight connection between the movable plate and the follower plate.

[0014] The present invention also discloses a motor system, including a motor, a vacuum magnetofluid, and a motor overload protection device as described above, wherein the motor is fixed on a mounting plate and the motor shaft is connected to the vacuum magnetofluid shaft.

[0015] Compared with the prior art, the advantages of the present invention are as follows:

[0016] In normal operation, the movable plate is mounted to the fixed plate via an elastic component. As long as the torque generated by the elastic component relative to the motor shaft is greater than the normal operating torque of the motor, the motor can drive the magnetic fluid shaft to rotate normally, while the follower plate remains stationary. However, when the moving part malfunctions and gets stuck, the vacuum magnetic fluid shaft (motor shaft) cannot continue to rotate and remains in a fixed state. But the motor drive does not stop at this time. Therefore, the non-shaft part of the motor, the mounting plate, and the follower plate rotate together against the torque generated by the elastic component. The follower plate touches the detection switch, triggering the detection switch alarm signal. This allows the motor to be controlled to stop rotating before it is overloaded, preventing damage to the motor.

[0017] This invention enables the motor to be protected against overload when a fault occurs at any moment during the movement of the moving parts of the equipment, thus preventing motor damage and improving the operational reliability of the equipment. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the motor system of the present invention in an embodiment.

[0019] Figure 2 This is a three-dimensional structural diagram of the motor system of the present invention in an embodiment (with the follower plate removed).

[0020] Figure 3 This is a cross-sectional view of the motor system of the present invention in an embodiment.

[0021] Figure 4 This is a structural schematic diagram of the fixing plate of the present invention in an embodiment.

[0022] Figure 5 This is a schematic diagram of the structure of the mobile board of the present invention in an embodiment.

[0023] Legend: 1. Motor; 101. Mounting plate; 102. Motor shaft; 2. Magnetofluid; 201. Magnetofluid shaft; 3. Follower plate; 301. Mounting hole; 4. Fixing plate; 5. Moving plate; 501. Screw; 502. Nut; 6. Detection switch; 601. Limit switch; 7. Sliding assembly; 701. Sliding element; 7011. Roller; 7012. Screw; 7013. Second oblong hole; 8. Elastic assembly; 801. Spring assembly; 8011. First mounting post; 8012. First oblong hole; 8013. Second mounting post; 8014. Spring. Detailed Implementation

[0024] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0025] like Figure 1 and Figure 2 As shown, the motor overload protection device of this embodiment includes a follower plate 3, a fixed plate 4, a movable plate 5, an elastic component 8, and a detection switch 6. One end of the follower plate 3 is fastened to the mounting plate 101 of the motor 1, and one end of the fixed plate 4 is fastened to the vacuum magnetic fluid 2. The vacuum magnetic fluid 2 is installed on the chamber flange (not shown in the figure), with one side atmospheric and the other side vacuum. The movable plate 5 is slidably installed on the other end of the fixed plate 4, and the movable plate 5 is fastened to the other end of the follower plate 3. The elastic component 8 is located between the fixed plate 4 and the movable plate 5 and is used to generate a torque that restricts the sliding of the movable plate 5. The detection switch 6 is fastened to the fixed plate 4 and the detection end is located on the motion trajectory side of the other end of the follower plate 3.

[0026] In normal operation, the motor overload protection device of the present invention, since the moving plate 5 is installed on the fixed plate 4 through the elastic component 8, only needs the torque generated by the elastic component 8 relative to the motor 1 shaft to be greater than the normal operating torque of the motor 1, so that the motor 1 can drive the magnetic fluid shaft 201 to rotate normally, and the follower plate 3 is in a stationary state. However, when the moving part fails and is stuck, the vacuum magnetic fluid shaft 201 (motor shaft 102) cannot continue to rotate and is in a fixed state. But at this time, the drive of the motor 1 has not stopped. Therefore, the non-shaft part of the motor 1, the mounting plate 101 and the follower plate 3 rotate together against the torque generated by the elastic component 8. The follower plate 3 touches the detection switch 6 and triggers the alarm signal of the detection switch 6, so that the motor 1 can be controlled to stop rotating before the motor 1 is overloaded, thus preventing damage to the motor 1.

[0027] In one specific embodiment, the elastic component 8 includes two sets of spring assemblies 801, located on both sides of the movable plate 5. Each set of spring assemblies 801 includes a first mounting post 8011, a first oblong hole 8012, a second mounting post 8013, and a tension spring 8014. The first mounting post 8011 is located on the side of the movable plate 5, the first oblong hole 8012 is located in the middle of the movable plate 5, the second mounting post 8013 is located on the fixed plate 4, and the second mounting post 8013 passes through the first oblong hole 8012. The two ends of the tension spring 8014 are respectively connected to the first mounting post 8011 and the second mounting post 8013. The two sets of spring assemblies 801 can generate a torque that restricts the left and right sliding of the movable plate 5. The overall structure of the elastic component 8 is simple and easy to operate.

[0028] In one specific embodiment, the movable plate 5 is slidably mounted on the fixed plate 4 via a sliding assembly 7. Specifically, the sliding assembly 7 includes multiple sets of sliding members 701, which are located on the upper and lower sides of the movable plate 5, respectively. Each set of sliding members 701 includes a roller 7011 and a second oblong hole 7013. The second oblong hole 7013 is located on the movable plate 5, and the roller 7011 is fastened to the fixed plate 4 and located within the second oblong hole 7013. The movable plate 5 then slides left and right on the roller 7011. The sliding assembly 7 described above has a simple structure, is easy to operate, and is low in cost.

[0029] In one specific embodiment, the detection switch 6 includes two limit switches 601, which are located on both sides of the other end of the follower plate 3, so as to monitor the movement of the motor 1 in any direction and ensure the reliability of overload monitoring.

[0030] In one specific embodiment, the movable plate 5 is provided with a screw 501, and the follower plate 3 is provided with a mounting hole 301. The screw 501 passes through the mounting hole 301 and is locked by a nut 502 to achieve a tight connection between the movable plate 5 and the follower plate 3.

[0031] In actual operation, the vacuum magnetofluid 2, the fixed plate 4, and the detection switch 6 are all fixed in place, while the moving plate 5 is in contact with the follower plate 3 via the screw 501. During normal rotation of the motor 1, the motor shaft 102 drives the magnetofluid shaft 201 to rotate; the non-shaft part of the motor 1, the mounting plate 101, and the follower plate 3 can be regarded as a whole, which can push the moving plate 5 to slide; since the moving plate 5 is installed on the fixed plate 4 via the spring 8014, as long as the torque generated by the spring 8014 relative to the motor 1 shaft is greater than the normal operating torque of the motor 1, the motor 1 can drive the magnetofluid shaft 201 to rotate normally, while the follower plate 3 remains stationary.

[0032] When a moving part malfunctions and gets stuck, the vacuum magnetofluid shaft 201 (motor shaft 102) cannot continue to rotate and is in a fixed state. However, the drive of the motor 1 does not stop at this time. Therefore, the non-shaft part of the motor 1, the mounting plate 101 and the follower plate 3 rotate together against the torque generated by the spring 8014. The follower plate 3 touches the detection switch 6 and triggers the alarm signal of the detection switch 6. Thus, the motor 1 can be controlled to stop rotating before it is overloaded, preventing damage to the motor 1.

[0033] This invention can provide early warning and overload protection for motor 1 when a fault occurs at any time during the movement of the moving parts of the equipment, thereby preventing damage to motor 1 and improving the operational reliability of the equipment.

[0034] This invention also provides a motor system, including a motor 1, a vacuum magnetofluid 2, and a motor overload protection device as described above. The motor 1 is fixed to a mounting plate 101, and the motor shaft 102 is connected to the vacuum magnetofluid shaft 201 and fixed with a set screw 7012. The motor 1 drives the vacuum magnetofluid shaft 201 to rotate, introducing motion into the vacuum. The motor system of this invention, including the overload protection device as described above, also has the advantages of the aforementioned overload protection device.

[0035] The above are merely preferred embodiments of the present invention. The scope of protection of the present invention is not limited to the above embodiments. All technical solutions falling within the scope of the present invention's concept are within the scope of protection of the present invention. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of the present invention should be considered within the scope of protection of the present invention.

Claims

1. A motor overload protection device, characterized in that, The system includes a follower plate (3), a fixed plate (4), a movable plate (5), an elastic component (8), and a detection switch (6). One end of the follower plate (3) is fastened to the mounting plate (101) of the motor (1), one end of the fixed plate (4) is fastened to the vacuum magnetohydrodynamic fluid (2), and the movable plate (5) is slidably mounted on the other end of the fixed plate (4), and the movable plate (5) is fastened to the other end of the follower plate (3). The elastic component (8) is located between the fixed plate (4) and the movable plate (5) and is used to generate a torque that restricts the sliding of the movable plate (5). The detection switch (6) is fastened to the fixed plate (4) and the detection end is located on the motion trajectory side of the other end of the follower plate (3). The elastic component (8) includes two sets of spring assemblies (801), which are located on both sides of the movable plate (5). Each set of spring assemblies (801) includes a first mounting post (8011), a first waist-shaped hole (8012), a second mounting post (8013), and a spring (8014). The first mounting post (8011) is located on the side of the movable plate (5), the first waist-shaped hole (8012) is located in the middle of the movable plate (5), the second mounting post (8013) is located on the fixed plate (4), and the second mounting post (8013) passes through the first waist-shaped hole (8012). The two ends of the spring (8014) are respectively connected to the first mounting post (8011) and the second mounting post (8013).

2. The motor overload protection device according to claim 1, characterized in that, The movable plate (5) is slidably mounted on the fixed plate (4) via the sliding component (7).

3. The motor overload protection device according to claim 2, characterized in that, The sliding assembly (7) includes multiple sets of sliding members (701), which are located on the upper and lower sides of the movable plate (5). Each set of sliding members (701) includes a roller (7011) and a second waist-shaped hole (7013). The second waist-shaped hole (7013) is located on the movable plate (5), and the roller (7011) is fastened to the fixed plate (4) and located in the second waist-shaped hole (7013).

4. The motor overload protection device according to claim 1 or 2, characterized in that, The detection switch (6) includes two limit switches (601), which are located on both sides of the other end of the follower plate (3).

5. The motor overload protection device according to claim 1 or 2, characterized in that, The movable plate (5) is provided with a screw (501), and the follower plate (3) is provided with a mounting hole (301). The screw (501) passes through the mounting hole (301) and is locked by a nut (502) to achieve a tight connection between the movable plate (5) and the follower plate (3).

6. A motor system comprising a motor (1) and a vacuum magnetofluid (2), wherein the motor (1) is fixed on a mounting plate (101), and the motor shaft (102) is connected to the shaft of the vacuum magnetofluid (2), characterized in that, It also includes the motor overload protection device as described in any one of claims 1-5.

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