A device for controlling the lifting of an ultrasonic indium-coated probe with a rotating target.

CN117464162BActive Publication Date: 2026-08-14PIONEER FILM MATERIALS (ANHUI) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-10-31
Publication Date
2026-08-14

AI Technical Summary

Technical Problem

但现有的镀铟设备由于会产生高频振动,且镀铟探头由于需要伸入管状靶材内,因此需要较长的探杆,这种较长的探杆无疑也会放大这种震动从而令探头容易磕碰靶材内壁,造成良品率降低的问题

Benefits of technology

[0016](1)通过支撑座上设置的连杆槽与涂布连杆相配合,从而对涂布连杆起到支撑的作用,以降低涂布时涂布连杆和涂布探头自重对圆筒产生的压力,避免圆筒产生裂纹;可以更好的控制实现隔空涂布,即涂布探头与圆筒保持一定间隙,不接触,避免涂布过程外力介入,使圆筒产生裂纹。

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Abstract

This invention discloses a lifting device for controlling a rotating target ultrasonic indium coating probe, comprising an operating platform, an insulated box fixedly mounted on the upper part of the operating platform, a box cover assembly mounted on the upper part of the insulated box, two sets of drive rollers rotatably mounted on the lower part of the inner side of the insulated box, and a first motor for driving the drive rollers to rotate fixedly mounted on the outer wall of the insulated box; a vertically upward lifting cylinder fixedly mounted on the lower part of the operating platform, the output end of the lifting cylinder fixedly connected to a lifting platform, a drive assembly and a support assembly fixedly mounted on the lifting platform, a coating connecting rod mounted on the drive assembly, the drive assembly for driving the coating connecting rod to move horizontally, and the support assembly for supporting the coating connecting rod, with a coating probe fixedly connected to the side of the coating connecting rod away from the drive assembly; this invention uses a connecting rod groove on the support base to cooperate with the coating connecting rod, thereby supporting the coating connecting rod, reducing the pressure exerted on the cylinder by the weight of the coating connecting rod and the coating probe during coating, and preventing the cylinder from cracking.
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Description

Technical Field

[0001] This invention relates to the field of target preparation technology, and specifically to a device for controlling the lifting and lowering of an ultrasonic indium-coated probe for rotating target materials. Background Technology

[0002] ITO targets are blackish-gray ceramic semiconductors formed by molding and sintering indium oxide powder and tin oxide powder, and are an important raw material for the production of ITO thin films. In the production of tubular ITO, indium plating is often required to improve its surface properties. The most common method in existing technology is ultrasonic indium plating. Ultrasonic inner-circle indium plating machines, also known as elbow-type ultrasonic indium plating machines, are suitable for indium plating on the inner wall of the target cylinder. Ultrasonic waves generate high-frequency vibrations of tens of thousands of times per second. These high-frequency vibrations, reaching a certain amplitude, transmit ultrasonic energy to the soldering area through an amplitude transformer. The high-frequency vibrations expel microbubbles from the soldering area, while the target enters the microcavities occupied by these microbubbles, firmly bonding the target to the substrate and achieving soldering without flux. However, existing indium plating equipment generates high-frequency vibrations, and the indium plating probe needs to extend into the tubular target, requiring a long probe rod. This longer probe rod undoubtedly amplifies the vibrations, making the probe prone to bumping against the inner wall of the target, resulting in a reduced yield. Summary of the Invention

[0003] The purpose of this invention is to provide a lifting device for controlling the ultrasonic indium-coated probe of a rotating target. In order to reduce the problem of probe collision, the probe rod is connected to the probe through a telescopic device. The purpose of this is to effectively control the distance between the probe and the inner wall of the target, thereby reducing the probability of collision caused by vibration.

[0004] The objective of this invention can be achieved through the following technical solutions:

[0005] A lifting device for controlling a rotating target ultrasonic indium-coated probe includes an operating platform. An insulated box is fixedly mounted on the upper part of the operating platform, and a box cover assembly is mounted on the upper part of the insulated box. Two sets of drive rollers are rotatably mounted on the lower inner side of the insulated box. A first motor for driving the drive rollers to rotate is fixedly installed on the outer wall of the insulated box. A vertically upward lifting cylinder is fixedly mounted on the lower end of the operating platform. A lifting platform is fixedly connected to the output end of the lifting cylinder. A drive assembly and a support assembly are fixedly mounted on the lifting platform. A coating connecting rod is mounted on the drive assembly and is used to drive the coating connecting rod to move horizontally. The support assembly is used to support the coating connecting rod. A coating probe is fixedly connected to the side of the coating connecting rod away from the drive assembly.

[0006] As a further aspect of the present invention: the box cover assembly includes a cover plate that cooperates with the insulated box and a plurality of lifting cylinders fixedly installed on the operating table. The output end of the lifting cylinder is fixedly connected to a lifting connecting plate, and the lifting connecting plate is fixedly connected to the cover plate.

[0007] As a further embodiment of the present invention: a drive cylinder is fixedly installed on the upper end of the cover plate, and an upper pressure frame is fixedly connected to the output end of the drive cylinder. Multiple sets of upper pressure rollers are rotatably installed on the upper pressure frame.

[0008] As a further embodiment of the present invention: the driving assembly includes a driving seat fixedly mounted on the lifting platform, a driving guide rail fixedly mounted on the upper end of the driving seat, a driving slider slidably mounted on the driving guide rail, a coating seat fixedly mounted on the driving slider, and a coating connecting rod mounted on the coating seat.

[0009] As a further embodiment of the present invention: a guide rack is fixedly provided on the side wall of the drive seat, a motor connecting plate is fixedly provided on the drive slider, a second motor is fixedly installed on the motor connecting plate, and a drive gear that meshes with the guide rack is fixedly installed on the output shaft of the second motor.

[0010] As a further aspect of the present invention: the coating link is rotatably mounted on the coating seat, and a third motor for driving the coating link to rotate is fixedly mounted on the coating seat.

[0011] As a further aspect of the present invention: the support assembly includes a support base, and the upper end of the support base is provided with a connecting rod groove that cooperates with the coating connecting rod.

[0012] As a further embodiment of the present invention: a vertical plate is fixedly provided on the support base, a connecting shaft is fixedly provided on the vertical plate, and an upper cover seat is rotatably mounted on the connecting shaft, the upper cover seat being used to press and cover the coating connecting rod.

[0013] As a further aspect of the present invention: an L-shaped seat is fixedly provided on the side of the operating table away from the driving component, and a pressing component for pressing and supporting the coating connecting rod is installed on the L-shaped seat.

[0014] As a further aspect of the present invention: the top-pressing assembly includes a top-pressing guide rail fixedly mounted on an L-shaped base, a top-pressing slider slidably mounted on the top-pressing guide rail, a top-pressing slide rod connected to the top-pressing slider, and a top-pressing head rotatably connected to the top-pressing slide rod.

[0015] The beneficial effects of this invention are:

[0016] (1) The connecting rod groove on the support seat cooperates with the coating connecting rod to support the coating connecting rod, thereby reducing the pressure on the cylinder caused by the weight of the coating connecting rod and the coating probe during coating, and avoiding cracks in the cylinder; it can better control the coating process to achieve air coating, that is, the coating probe and the cylinder maintain a certain gap and do not contact each other, thus avoiding external force intervention during the coating process and causing cracks in the cylinder.

[0017] (2) The support base moves up and down with the lifting platform, so the relative height between the support base and the drive component will not change, preventing the coating link from deforming due to the height difference. At the same time, the upper cover is set to limit the coating link in the up and down direction, ensuring that the coating link will not shake due to the backlash during coating, further ensuring the stability of the coating process.

[0018] (3) The end of the coating link is pressed by the top pressure head to prevent the coating link from shaking. At the same time, the top pressure head is rotatably mounted on the top pressure slide, so it will not affect the rotation of the coating link.

[0019] (4) The coating process inside the cylinder is achieved by using a dual-drive method of rotating the coating linkage or rotating the cylinder, thereby ensuring that the coating process can be carried out stably on cylinders of different specifications.

[0020] (5) The cylinder is pressed by the rotating upper pressure roller on the upper pressure frame to ensure that the cylinder does not shake when indium is applied inside the cylinder, thus making the indium application uniform. Attached Figure Description

[0021] The invention will now be further described with reference to the accompanying drawings.

[0022] Figure 1 This is a three-dimensional structural diagram of the entire invention;

[0023] Figure 2 This is an isometric structural schematic diagram of the entire invention;

[0024] Figure 3 This is a schematic diagram of the rear isometric structure of the present invention;

[0025] Figure 4 This is a cross-sectional structural schematic diagram of the insulated box of the present invention;

[0026] Figure 5 This is the present invention. Figure 1 Enlarged structural diagram at point A;

[0027] Figure 6 This is a schematic diagram of the top pressure assembly of the present invention.

[0028] In the diagram: 1. Operating platform; 2. Insulation box; 3. Box cover assembly; 31. Cover plate; 32. Lifting cylinder; 33. Lifting connecting plate; 34. Drive cylinder; 35. Guide connecting rod; 36. Upper pressure frame; 37. Upper pressure roller; 4. L-shaped seat; 5. Top pressure assembly; 51. Top pressure guide rail; 52. Top pressure slider; 53. Drive screw; 54. Top pressure cover plate; 55. Guide sleeve; 56. Top pressure cylinder; 57. Top pressure connecting plate; 58. Top pressure slide bar; 59. Top pressure head; 6. Lifting platform; 7. Drive assembly; 71. Drive seat; 72. Drive guide rail; 73. Drive slider; 74. Coating seat; 75. Motor connecting plate; 76. Second motor; 77. Drive gear; 78. Guide rack; 79. Third motor; 8. Support assembly; 81. Support seat; 811. Connecting rod groove; 82. Vertical plate; 83. Connecting shaft; 84. Top cover seat; 85. Lock seat; 86. Locking rod; 9. Coating connecting rod; 10. Coating probe; 11. Lifting cylinder; 12. Lifting guide rod; 13. First motor; 14. Drive roller. Detailed Implementation

[0029] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0030] Please see Figures 1-5 As shown, a first aspect embodiment of the present invention provides a lifting device for controlling a rotating target ultrasonic indium-coated probe, including an operating table 1. A heat preservation box 2 is fixedly installed on the upper end of the operating table 1. A box cover assembly 3 is installed on the upper end of the heat preservation box 2. Two sets of drive rollers 14 are rotatably installed on the lower inner side of the heat preservation box 2. A first motor 13 for driving the drive rollers 14 to rotate is fixedly installed on the outer wall of the heat preservation box 2. A vertically upward lifting cylinder 11 is fixedly installed on the lower end of the operating table 1. A lifting platform 6 is fixedly connected to the output end of the lifting cylinder 11. A plurality of lifting guide rods 12 are fixedly installed on the lower end of the lifting platform 6. The lifting guide rods 12 are slidably connected to the operating table 1. A drive assembly 7 and a support assembly 8 are fixedly installed on the lifting platform 6. A coating connecting rod 9 is installed on the drive assembly 7. The drive assembly 7 is used to drive the coating connecting rod 9 to move horizontally. The support assembly 8 is used to support the coating connecting rod 9. A coating probe 10 is fixedly connected to the side of the coating connecting rod 9 away from the drive assembly 7.

[0031] The box cover assembly 3 includes a cover plate 31 that cooperates with the insulated box 2 and multiple lifting cylinders 32 that are fixedly installed on the operating table 1. The output end of the lifting cylinder 32 is fixedly connected to a lifting connecting plate 33, and the lifting connecting plate 33 is fixedly connected to the cover plate 31.

[0032] A drive cylinder 34 is fixedly installed on the upper end of the cover plate 31. The output end of the drive cylinder 34 is fixedly connected to an upper pressure frame 36. Multiple sets of upper pressure rollers 37 are rotatably installed on the upper pressure frame 36. Multiple guide rods 35 are slidably arranged through the cover plate 31. The lower end of the guide rods 35 is fixedly connected to the upper pressure frame 36. The guide rods 35 guide the lifting and lowering of the upper pressure frame 36.

[0033] When the cylinder needs to be placed, the lifting cylinder 32 drives the cover plate 31 to move upward, so that the insulation box 2 opens and the cylinder is placed on the drive roller 14 inside the insulation box 2. Then the lifting cylinder 32 drives the cover plate 31 to move downward, and the cover plate 31 blocks the inlet and outlet of the insulation box 2. Then the drive cylinder 34 drives the upper pressure frame 36 to move downward, and the upper pressure roller 37 rotatably set on the upper pressure frame 36 presses the cylinder to ensure that the cylinder will not shake when indium is coated inside the cylinder, so that the indium coating is uniform.

[0034] The drive assembly 7 includes a drive base 71 fixedly mounted on the lifting platform 6. A drive guide rail 72 is fixedly mounted on the upper end of the drive base 71. A drive slider 73 is slidably mounted on the drive guide rail 72. A coating seat 74 is fixedly mounted on the drive slider 73. A coating connecting rod 9 is mounted on the coating seat 74. A guide rack 78 is fixedly mounted on the side wall of the drive base 71. A motor connecting plate 75 is fixedly mounted on the drive slider 73. A second motor 76 is fixedly mounted on the motor connecting plate 75. A drive gear 77 that meshes with the guide rack 78 is fixedly mounted on the output shaft of the second motor 76.

[0035] The coating rod 9 and coating probe 10 are moved horizontally by the drive assembly 7, so that the coating probe 10 extends into the cylinder and performs indium coating on the inner circumference of the cylinder. Specifically, the second motor 76 drives the drive gear 77 to rotate. The drive gear 77 drives the drive slider 73 to slide along the drive guide rail 72 through meshing with the guide rack 78, thereby driving the coating rod 9 and coating probe 10 to move horizontally. The lifting cylinder 11 drives the entire lifting platform 6 to move up and down, thereby adjusting the height of the coating rod 9 and ensuring uniform indium coating on cylinders of different diameters.

[0036] The support assembly 8 includes a support base 81, the upper end of which is provided with a connecting rod groove 811 that mates with the coating connecting rod 9. A vertical plate 82 is fixedly mounted on the support base 81, and a connecting shaft 83 is fixedly mounted on the vertical plate 82. An upper cover 84 is rotatably mounted on the connecting shaft 83. The upper cover 84 is used to press and cover the coating connecting rod 9. The lower end of the upper cover 84 is provided with a connecting rod groove 811 that mates with the coating connecting rod 9, and the diameter of the connecting rod groove 811 is slightly larger than the diameter of the coating connecting rod 9, ensuring that the coating connecting rod 9 is limited while allowing it to rotate freely.

[0037] The connecting rod groove 811 on the support base 81 cooperates with the coating connecting rod 9, thereby supporting the coating connecting rod 9 and reducing the pressure on the cylinder caused by the weight of the coating connecting rod 9 and the coating probe 10 during coating, thus preventing the cylinder from cracking. It can better control the coating process, that is, the coating probe 10 and the cylinder maintain a certain gap and do not contact each other, avoiding the intervention of external forces during the coating process and preventing the cylinder from cracking. At the same time, the support base 81 moves up and down with the lifting platform 6, so the relative height between the support base 81 and the drive component 7 will not change, preventing the coating connecting rod 9 from deforming due to the height difference. In addition, the upper cover 84 is set to limit the vertical movement of the coating connecting rod 9, ensuring that the coating connecting rod 9 will not shake due to the backlash during coating, further ensuring the stability of the coating process.

[0038] Meanwhile, a lock seat 85 is fixedly installed on the support base 81, and a lock rod 86 that cooperates with the lock seat 85 is fixedly installed on the upper cover 84. The cooperation between the lock seat 85 and the lock rod 86 ensures the stability of the upper cover 84 during use, and when not in use, the coating connecting rod 9 can be easily removed by rotating the connecting shaft 83.

[0039] Please see Figure 1 and Figure 6 As shown, the second aspect of the present invention provides a lifting device for controlling the ultrasonic indium coating probe of a rotating target. Unlike the above embodiments, the first aspect embodiment uses a first motor 13 to drive the drive roller 14 to rotate, thereby driving the cylinder to rotate. This allows ultrasonic indium coating to be applied to the inner circumference of the cylinder via the coating link 9 and the coating probe 10. When the cylinder cannot rotate, ultrasonic indium coating can also be applied to the inner circumference of the cylinder by rotating the coating link 9.

[0040] The coating link 9 is rotatably mounted on the coating base 74. A third motor 79 for driving the coating link 9 to rotate is fixedly mounted on the coating base 74. By driving the coating link 9 to rotate through the third motor 79, the direction of the coating probe 10 can be adjusted to perform ultrasonic indium coating on different positions on the inner circumference of the cylinder.

[0041] An L-shaped base 4 is fixedly installed on the side of the operating table 1 away from the drive component 7, and a pressing component 5 for pressing and supporting the coating connecting rod 9 is installed on the L-shaped base 4.

[0042] The top-pressing assembly 5 includes a top-pressing guide rail 51 fixedly mounted on an L-shaped base 4. A top-pressing slider 52 is slidably mounted on the top-pressing guide rail 51. A through hole for pressing the coating connecting rod 9 is provided on the side wall of the insulation box 2. A top-pressing cover plate 54 that mates with the through hole is fixedly mounted on the top-pressing slider 52. A guide sleeve 55 is fixedly mounted on the top-pressing cover plate 54. A top-pressing slide rod 58 is slidably mounted inside the guide sleeve 55. A top-pressing head 59 is rotatably connected to the top-pressing slide rod 58. At the same time, a drive screw 53 is threaded through the vertical plate of the L-shaped base 4. One end of the drive screw 53 is rotatably connected to the top-pressing slide rod 59. On block 52, a drive handle is fixedly installed at the other end of the drive screw 53. A top pressure cylinder 56 is also fixedly installed on the vertical plate of the L-shaped seat 4. The output end of the top pressure cylinder 56 is fixedly connected to a top pressure connecting plate 57. The top pressure connecting plate 57 is fixedly connected to the top pressure slide rod 58. The top pressure cylinder 56 drives the top pressure slide rod 58 to slide in the guide sleeve 55, thereby driving the top pressure head 59 to move toward the end of the coating connecting rod 9. The top pressure head 59 presses the end of the coating connecting rod 9 to prevent the coating connecting rod 9 from shaking. At the same time, the top pressure head 59 is rotatably installed on the top pressure slide rod 58, so it will not affect the rotation of the coating connecting rod 9.

[0043] The foregoing has provided a detailed description of one embodiment of the present invention, but this description is merely a preferred embodiment and should not be construed as limiting the scope of the invention. All equivalent variations and modifications made within the scope of the claims of this invention should still fall within the patent coverage of this invention.

Claims

1. A device for controlling the lifting of an ultrasonic indium-coated probe for rotating target material, comprising an operating table (1), an insulated box (2) fixedly mounted on the upper end of the operating table (1), a box cover assembly (3) mounted on the upper end of the insulated box (2), two sets of drive rollers (14) rotatably mounted on the lower inner side of the insulated box (2), and a first motor (13) fixedly mounted on the outer wall of the insulated box (2) for driving the drive rollers (14) to rotate; characterized in that, A vertically upward lifting cylinder (11) is fixedly installed at the lower end of the operating table (1). A lifting platform (6) is fixedly connected to the output end of the lifting cylinder (11). A driving component (7) and a support component (8) are fixedly installed on the lifting platform (6). A coating connecting rod (9) is installed on the driving component (7). The driving component (7) is used to drive the coating connecting rod (9) to move horizontally. The support component (8) is used to support the coating connecting rod (9). A coating probe (10) is fixedly connected to the side of the coating connecting rod (9) away from the driving component (7). An L-shaped seat (4) is fixedly provided on the side of the operating table (1) away from the drive assembly (7), and a pressing assembly (5) for pressing and supporting the coating connecting rod (9) is installed on the L-shaped seat (4). The top pressure assembly (5) includes a top pressure guide rail (51) fixedly mounted on an L-shaped seat (4), a top pressure slider (52) slidably mounted on the top pressure guide rail (51), a top pressure slide rod (58) connected to the top pressure slider (52), and a top pressure head (59) rotatably connected to the top pressure slide rod (58).

2. The device for controlling the lifting and lowering of an ultrasonic indium-coated probe with a rotating target according to claim 1, characterized in that, The box cover assembly (3) includes a cover plate (31) that cooperates with the insulated box (2) and multiple lifting cylinders (32) fixedly installed on the operating table (1). The output end of the lifting cylinder (32) is fixedly connected to a lifting connecting plate (33), which is fixedly connected to the cover plate (31).

3. The device for controlling the lifting and lowering of an ultrasonic indium-coated probe with a rotating target according to claim 2, characterized in that, A drive cylinder (34) is fixedly installed on the upper end of the cover plate (31), and an upper pressure frame (36) is fixedly connected to the output end of the drive cylinder (34). Multiple sets of upper pressure rollers (37) are rotatably installed on the upper pressure frame (36).

4. The device for controlling the lifting of an ultrasonic indium-coated probe with a rotating target according to claim 1, characterized in that, The drive assembly (7) includes a drive seat (71) fixedly mounted on the lifting platform (6), a drive guide rail (72) fixedly mounted on the upper end of the drive seat (71), a drive slider (73) slidably mounted on the drive guide rail (72), a coating seat (74) fixedly mounted on the drive slider (73), and a coating connecting rod (9) mounted on the coating seat (74).

5. The device for controlling the lifting and lowering of an ultrasonic indium-coated probe with a rotating target according to claim 4, characterized in that, A guide rack (78) is fixedly provided on the side wall of the drive seat (71), a motor connecting plate (75) is fixedly provided on the drive slider (73), a second motor (76) is fixedly installed on the motor connecting plate (75), and a drive gear (77) that meshes with the guide rack (78) is fixedly installed on the output shaft of the second motor (76).

6. The device for controlling the lifting and lowering of an ultrasonic indium-coated probe with a rotating target according to claim 4, characterized in that, The coating link (9) is rotatably mounted on the coating seat (74), and a third motor (79) for driving the coating link (9) to rotate is fixedly mounted on the coating seat (74).

7. The device for controlling the lifting of an ultrasonic indium-coated probe rotating a target according to claim 1, characterized in that, The support assembly (8) includes a support base (81), and the upper end of the support base (81) is provided with a connecting rod groove (811) that cooperates with the coating connecting rod (9).

8. The device for controlling the lifting of an ultrasonic indium-coated probe with a rotating target according to claim 7, characterized in that, A vertical plate (82) is fixedly installed on the support base (81), a connecting shaft (83) is fixedly installed on the vertical plate (82), and an upper cover (84) is rotatably installed on the connecting shaft (83). The upper cover (84) is used to press and cover the coating connecting rod (9).

Citation Information

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