Glass microporous laser high-speed processing system and method

Abstract

The application discloses a kind of glass micropore laser high-speed processing system and method, wherein system includes rack, pedestal, fixed jig, laser processing mechanism and visual mechanism;Fixed jig is installed on pedestal by double-shaft translation mechanism;Laser processing mechanism includes light source part and output part, and output part can be driven by vertical lifting mechanism to be lifted relative to pedestal;Pedestal is made of marble, and pedestal is installed on rack by multiple shock-absorbing mechanisms;Pedestal is also installed with gantry made of marble, and mechanism seat body of vertical lifting mechanism and light source part are fixed on beam of gantry;Wave tube is connected between output part and light source part.In the application, through a series of measures, system deformation or vibration caused by various factors is reduced or eliminated from the source, so that the processing system has stable processing precision and high-speed running ability, can carry out fine micropore processing and has very high processing efficiency.

Description

Technical Field

[0001] This invention relates to the field of glass processing technology, and in particular to a high-speed laser processing system and method for glass micropores. Background Technology

[0002] The processing system of this invention is used for micro-hole processing of glass. Since a large number of micro-holes need to be densely punched on a piece of glass, and due to the large number of micro-holes, the equipment needs to operate at high speed to ensure processing efficiency. The current mainstream technology is to use lasers for micro-hole processing. However, the structure of existing laser processing equipment is relatively simple. For example, patent CN112122261A provides a typical laser processing setup. This equipment has a three-axis motion system, which drives the laser equipment to perform three-axis motion. In this method, the laser equipment is raised and its high-speed movement is controlled, which will cause the equipment to vibrate significantly. It is difficult to ensure the positional accuracy of the micro-holes. Moreover, the equipment is also affected by external vibrations and structural deformation during operation, resulting in low processing stability and difficulty in ensuring processing accuracy. Summary of the Invention

[0003] Purpose of the invention: In order to overcome the shortcomings of the existing technology, the present invention provides a high-speed laser processing system and method for glass micro-holes with high stability and high-speed processing capability.

[0004] Technical solution: To achieve the above objectives, the glass micro-hole laser high-speed processing system of the present invention includes a frame, a base, a fixing fixture, a laser processing mechanism, and a vision mechanism; the fixing fixture is mounted on the base via a dual-axis translation mechanism; the laser processing mechanism includes a light source part and an output part, and the output part can be driven to move up and down relative to the base by a vertical lifting mechanism;

[0005] The base is made of marble and is mounted on the frame by multiple shock-absorbing mechanisms; a gantry frame made of marble is also mounted on the base, and the base of the vertical lifting mechanism and the light source are fixed on the crossbeam of the gantry frame; a corrugated pipe connects the output part and the light source part.

[0006] Furthermore, the light source portion includes a housing, within which a first light source and a second light source are installed in parallel. A transmissive mirror and a first reflective mirror are respectively installed in front of the first light source and the second light source. A second reflective mirror is also installed inside the housing, and a third reflective mirror is installed on the outside of the housing. The transmissive mirror, the first reflective mirror, and the second reflective mirror are collinear, and the line connecting the three is perpendicular to the line connecting the first light source and the transmissive mirror. The line connecting the second reflective mirror and the third reflective mirror is parallel to the line connecting the first light source and the transmissive mirror.

[0007] Furthermore, a first beam expander is provided between the first light source and the transmission mirror, and a second beam expander is provided between the second light source and the first reflection mirror.

[0008] Furthermore, the third reflector is installed inside the housing, and a horizontally extending pipe connects the housing portion to the housing; a light outlet is located at the bottom of the housing, and a corrugated pipe is installed between the light outlet and the output portion.

[0009] Furthermore, the vertical lifting mechanism also includes a lifting seat that is slidably mounted relative to the mechanism base. A lead screw is rotatably mounted on the mechanism base, and a lead screw nut that is helically coupled with the lead screw is mounted on the lifting seat. The lead screw is driven by a lifting drive motor.

[0010] Furthermore, the fixing fixture includes a fixture base and a cover that are fixed to each other. The fixture base has a cavity with an open top, and a suction hole for connecting a suction pipe is formed on the cavity wall. The suction pipe is connected to a fan. A through hole is formed on the cover.

[0011] Furthermore, the vision mechanism includes a camera and a ring light source, and the vision mechanism is fixed relative to the output portion.

[0012] Furthermore, the output section includes an output cylinder, and a focusing lens is installed inside the output cylinder.

[0013] Furthermore, it also includes a protective cover, in which the frame, base, fixing fixture, laser processing mechanism and vision mechanism are all placed; the protective cover has a workpiece inlet and outlet, a door that can be opened is installed at the workpiece inlet and outlet, and safety light curtains are installed on both sides of the workpiece inlet and outlet.

[0014] A high-speed laser processing method for glass micro-holes, applied to the aforementioned high-speed laser processing system for glass micro-holes, the method comprising:

[0015] Step 1), position the glass using a fixing fixture;

[0016] Step 2) Obtain an image of the glass to be processed through a vision device to obtain the position and orientation of the glass;

[0017] Step 3): Determine the coordinates of each processing point according to the processing requirements and the position and orientation of the glass;

[0018] Step 4), control the operation of the dual-axis translation mechanism to align each processing point with the output section vertically;

[0019] Step 5): Adjust the output power of the light source according to the processing requirements, and process the glass by outputting laser light through the output section;

[0020] Step 6): Once all micropores have been processed, control the fixture to release the glass.

[0021] Beneficial Effects: The glass micro-hole laser high-speed processing system and method of the present invention uses marble as the material for the base and gantry. Since marble has almost no elastic deformation capacity, it can greatly reduce the impact of the elastic deformation of the upper part of the base on manufacturing. Dividing the laser processing mechanism into two parts and fixing the light source part, while only the output part moves up and down driven by the vertical lifting mechanism, can effectively reduce the load on the vertical lifting mechanism and minimize system shaking caused by the lifting motion. Furthermore, a shock-absorbing mechanism is set between the base and the frame to prevent external vibrations from being transmitted to the fixed fixture or the laser processing mechanism. Therefore, through the above series of measures, system deformation or vibration caused by various factors is reduced or eliminated at the source, enabling the processing system to have stable processing accuracy and high-speed operation capability, allowing for fine micro-hole processing with high processing efficiency. Attached Figure Description

[0022] Figure 1 A 3D view of a high-speed laser processing system for micro-hole glass;

[0023] Figure 2 This is a front view of the internal structure of the enclosure;

[0024] Figure 3 A three-dimensional diagram of the internal structure of the enclosure;

[0025] Figure 4 This is a structural diagram of the light source section;

[0026] Figure 5 for Figure 3 Enlarged structural diagram of section A;

[0027] Figure 6 This is a structural diagram of the fixing fixture;

[0028] Figure 7 Exploded view of the fixture;

[0029] Figure 8 This is a structural diagram of the shock absorption mechanism.

[0030] In the diagram: 1-Base; 2-Fixing fixture; 21-Jig seat; 22-Cover; 23-Suction pipe; 24-Support column; 25-Screw; 3-Laser processing mechanism; 3A-Light source section; 31-Box section; 32-First light source; 33-Second light source; 34-Transmitting mirror; 35-First reflecting mirror; 36-Second reflecting mirror; 37-Third reflecting mirror; 38-First beam expander; 39-Second beam expander; 310-Box body; 311-Pipe; 3B-Output section; 312-Output cylinder; 4-Vertical lifting mechanism; 41 - Mechanism base; 42- Lifting seat; 43- Lead screw; 44- Lifting drive motor; 5- Shock absorption mechanism; 51- Fixed seat; 52- Floating seat; 53- Lifting partition; 531- Oil outlet hole; 54- Buffer; 541- Cavity; 542- Piston rod; 6- Gantry frame; 7- Bellows; 8- Vision mechanism; 81- Camera; 82- Ring light source; 9- Protective cover; 91- Cover door; 92- Safety light curtain; 10- Frame; 20- Dual-axis translation mechanism; 301- Baffle; 302- Lifting frame; 303- Bellows cover. Detailed Implementation

[0031] The invention will now be further described with reference to the accompanying drawings.

[0032] like Figure 1-3 The glass micro-hole laser high-speed processing system shown includes a frame 10, a base 1, a fixture 2, a laser processing mechanism 3, and a vision mechanism 8. The fixture 2 is mounted on the base 1 via a dual-axis translation mechanism 20. The laser processing mechanism 3 includes a light source portion 3A and an output portion 3B, the output portion 3B being driven to move up and down relative to the base 1 by a vertical lifting mechanism 4. A protective cover 9 is also included, within which the frame 10, base 1, fixture 2, laser processing mechanism 3, and vision mechanism 8 are all housed. The protective cover 9 has a workpiece inlet / outlet, with an openable door 91 installed at the inlet / outlet, and safety light curtains 92 installed on both sides of the inlet / outlet.

[0033] The base 1 is made of marble and is mounted on the frame 10 by multiple shock-absorbing mechanisms 5; a gantry frame 6 made of marble is also mounted on the base 1, and the mechanism seat 41 of the vertical lifting mechanism 4 and the light source part 3A are both fixed on the crossbeam of the gantry frame 6; a corrugated pipe 7 is connected between the output part 3B and the light source part 3A.

[0034] In the above structure, marble is used as the material for the base 1 and the gantry 6. Since marble has almost no elastic deformation capacity, the impact of the elastic deformation of the upper part of the base 1 on manufacturing can be greatly reduced. The laser processing mechanism 3 is divided into two parts, and the light source part 3A is fixed, while only the output part 3B moves up and down with the drive of the vertical lifting mechanism 4. This effectively reduces the load on the vertical lifting mechanism 4 and minimizes the system shaking caused by the lifting movement. In addition, a shock absorption mechanism 5 is set between the base 1 and the frame 10 to prevent external vibrations from being transmitted to the fixed fixture 2 or the laser processing mechanism 3. It can be seen that through the above series of measures, the system deformation or vibration caused by various factors is reduced or eliminated at the source, so that the processing system has stable processing accuracy and high-speed operation capability, enabling fine micro-hole processing with high processing efficiency.

[0035] like Figure 8 As shown, the shock absorption mechanism 5 includes a fixed seat 51 fixed on the frame 10 and a floating seat 52 connected to the base 1. The fixed seat 51 has an oil chamber, and the oil chamber has a lifting baffle 53. The lifting baffle 53 can rise and fall within the oil chamber. The floating seat 52 is installed on the upper side of the lifting baffle 53. There is oil between the lifting baffle 53 and the bottom of the oil chamber. The lifting baffle 53 has oil outlet holes 531 that run vertically through the four sides of the floating seat 52. Buffers 54 are provided between the four walls of the floating seat 52 and the floating seat 52. The buffer 54 has a horizontally placed cavity 541 and a piston rod 542 that slides relative to the cavity 541. The sliding direction of the piston rod 542 is horizontal, and the end of the piston rod 542 abuts against the floating seat 52. The number of cavities 541 is the same as the number of oil outlet holes 531, and the two are connected one-to-one. With the above structure, the oil in the damping mechanism 5 can not only keep the floating seat 52 in a suspended state, but also center the floating seat 52 relative to the oil chamber in the top view direction. Since the oil below the lifting baffle 53 is connected to the oil in the cavity 541, the floating seat 52 and the fixed seat 51 can generate relative movement in any direction. The floating seat 52 and each buffer 54 can achieve buffering and shock absorption through linkage, and can achieve rapid reset, thus achieving an effective vibration isolation effect. It is suitable for vibration isolation of heavy equipment.

[0036] like Figure 4As shown, the light source section 3A includes a housing section 31, in which a first light source 32 and a second light source 33 are installed in parallel. A transmissive mirror 34 and a first reflective mirror 35 are respectively installed in front of the first light source 32 and the second light source 33. A second reflective mirror 36 is also installed inside the housing section 31, and a third reflective mirror 37 is installed on the outside of the housing section 31. The transmissive mirror 34, the first reflective mirror 35, and the second reflective mirror 36 are collinear, and the line connecting the three is perpendicular to the line connecting the first light source 32 and the transmissive mirror 34. The line connecting the second reflective mirror 36 and the third reflective mirror 37 is parallel to the line connecting the first light source 32 and the transmissive mirror 34.

[0037] The laser light generated by the first light source 32 is reflected sequentially by the transmission mirror 34 and the second reflection mirror 36 to the third reflection mirror 37. This optical path forms a U-shape and occurs entirely within the water surface. The third reflection mirror 37 reflects the incident light as perpendicular light, which is then transmitted to the output section 3B. Similarly, the laser light generated by the second light source 33 is reflected by the first reflection mirror 35, then passes through the transmission mirror 34 and is reflected by the second reflection mirror 36 to the third reflection mirror 37. This optical path also forms a U-shape and occurs entirely within the water surface. The third reflection mirror 37 reflects the incident light as perpendicular light, which is then transmitted to the output section 3B. The output section 3B includes an output cylinder 312, within which a focusing lens is installed.

[0038] With the above structure, on the one hand, all the optical paths of the light source 3A are horizontal, and finally reflected into vertical light by the third reflecting mirror 37, which can improve the compactness of the structure, reduce the overall height of the equipment and reduce the volume of the structure; on the other hand, by setting up the reflecting mirror, the transmitting mirror and the two light sources, a larger range of laser power adjustment can be achieved, and costs can be saved. Each light source can be used alone, and the two light sources can also be used simultaneously to achieve greater laser power. Thus, it is not necessary to select a light source with a very high power, which can effectively save costs.

[0039] A first beam expander 38 is disposed between the first light source 32 and the transmission mirror 34, and a second beam expander 39 is disposed between the second light source 33 and the first reflector 35. The first beam expander 38 and the second beam expander 39 can increase or decrease the beam diameter so that the diameter of the final output laser meets the processing requirements.

[0040] like Figure 5 As shown, the third reflector 37 is installed inside the housing 310, and a horizontally extending pipe 311 connects the housing part 31 and the housing 310; the housing 310 has a light outlet at its lower part, and the corrugated pipe 7 is installed between the light outlet and the output part 3B. This allows the laser to propagate in a closed environment, preventing external stray light from affecting the laser.

[0041] like Figure 5 As shown, the vertical lifting mechanism 4 also includes a lifting seat 42 that is slidably installed relative to the mechanism base 41. A lead screw 43 is rotatably installed on the mechanism base 41, and a lead screw nut that is helically coupled with the lead screw 43 is installed on the lifting seat 42. The lead screw 43 is driven by a lifting drive motor 44.

[0042] like Figure 6-7 As shown, the fixing fixture 2 includes a fixture base 21 and a cover 22 that are fixed to each other. The fixture base 21 has a cavity with an open top, and a suction hole is formed on the cavity wall to connect to a suction pipe 23, which is connected to an exhaust fan. The cover 22 has a through hole running vertically through it. By drawing air from the cavity with the exhaust fan, a negative pressure is created inside and outside the suction hole, thereby generating suction. The upper surface of the cover 22 can exert suction on the glass being processed, thus fixing the glass and preventing it from shifting relative to the fixing fixture 2 during processing. The fixing fixture 2 also makes it convenient to fix and release the glass.

[0043] The cavity of the fixture base 21 contains a plurality of support pillars 24 arranged in a square array. The cover 22 has screws 25 corresponding to the positions of each support pillar 24, connecting to that pillar. This effectively prevents the center of the cover 22 from becoming concave and deformed after prolonged use when the glass area being processed is large, thus affecting the adsorption effect, and also ensures the stability of the connection between the cover 22 and the fixture base 21. Screws are also used to connect the cover 22 to the fixture base 21 at all four edges.

[0044] The vision mechanism 8 includes a camera 81 and a ring light source 82. The vision mechanism 8 is fixed relative to the output part 3B, which ensures the accuracy of the relative position between the vision mechanism 8 and the output part 3B and guarantees the processing precision.

[0045] In addition, a baffle 301 is provided above the fixing fixture 2, and a liftable lifting frame 302 is installed around the fixing fixture 2. A bellows cover 303 is connected between the lifting frame 302 and the fixture base 21, and the bellows cover is connected to an exhaust mechanism. The lifting frame 302 is driven to rise and fall by a lifting cylinder. After the glass is fixed to the fixing fixture 2, the lifting frame 302 can be driven to rise by the lifting cylinder, so that the lifting frame 302 reaches below the baffle 301. A gap is left between the lifting frame 302 and the baffle 301 for air intake. As the lifting frame 302 moves with the fixing fixture 2, it can always form a covered space around the fixing fixture 2. By exhausting the air in the space, the gas generated by laser drilling can be removed in time, preventing dust from affecting the operation of the equipment.

[0046] A high-speed laser processing method for glass micro-holes, applied to the aforementioned high-speed laser processing system for glass micro-holes, the method comprising:

[0047] Step 1: Position the glass using the fixing fixture 2. In this embodiment, the exhaust fan is controlled to operate and draw air from the cavity of the fixing fixture 2, creating a negative pressure inside and outside the suction hole, thereby generating suction. The upper surface of the cover 22 can generate suction on the glass being processed, thus fixing the glass.

[0048] Step 2: Obtain an image of the glass to be processed through vision mechanism 8 to obtain the position and orientation of the glass;

[0049] Step 3: Determine the coordinates of each processing point based on the processing requirements and the position and orientation of the glass;

[0050] Step 4: Control the operation of the dual-axis translation mechanism 20 to align each processing point vertically with the output part 3B;

[0051] Step 5: Adjust the output power of the light source section 3A according to the processing requirements, that is, determine that one of the first light source 32 and the second light source 33 is working, or both are working at the same time, and process the glass by outputting laser through the output section 3B;

[0052] Step 6: Once all micropores have been processed, control the fixing fixture 2 to release the glass.

[0053] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A high-speed laser processing system for glass micro-holes, comprising a frame (10), a base (1), a fixture (2), a laser processing mechanism (3), and a vision mechanism (8); the fixture (2) is mounted on the base (1) via a dual-axis translation mechanism (20); the laser processing mechanism (3) comprises a light source part (3A) and an output part (3B), the output part (3B) being driven to rise and fall relative to the base (1) by a vertical lifting mechanism (4); Its features are: The base (1) is made of marble and is mounted on the frame (10) by multiple shock-absorbing mechanisms (5); a gantry frame (6) made of marble is also mounted on the base (1), and the mechanism seat (41) of the vertical lifting mechanism (4) and the light source part (3A) are fixed on the crossbeam of the gantry frame (6); a corrugated pipe (7) is connected between the output part (3B) and the light source part (3A). The shock absorption mechanism (5) includes a fixed seat (51) fixed on the frame (10) and a floating seat (52) connected to the base (1). The fixed seat (51) has an oil chamber, and the oil chamber has a lifting baffle (53). The lifting baffle (53) can rise and fall within the oil chamber. The floating seat (52) is installed on the upper side of the lifting baffle (53). There is oil between the lifting baffle (53) and the bottom of the oil chamber. The lifting baffle (53) has oil outlet holes (531) that run vertically through the four sides of the floating seat (52). Buffers (54) are provided between the four walls of the floating seat (52) and the floating seat (52). The buffers (54) have a horizontally placed cavity (541) and a buffer relative to the cavity (541). A piston rod (542) is slidably installed, and the sliding direction of the piston rod (542) is horizontal. The end of the piston rod (542) abuts against the floating seat (52). The number of cavities (541) is the same as the number of oil outlet holes (531), and the two are connected one-to-one. The oil under the lifting partition (53) is connected to the oil in the cavity (541) so that the oil in the oil cavity and the oil in each of the buffers (54) form an interconnected whole oil system. The oil keeps the floating seat (52) in a suspended state and centered in the top view relative to the oil cavity. Any relative movement between the floating seat (52) and the fixed seat (51) in any direction is buffered, damped and reset through the linkage between the floating seat (52) and each of the buffers (54).

2. The high-speed laser processing system for glass micro-holes according to claim 1, characterized in that, The light source section (3A) includes a housing section (31), in which a first light source (32) and a second light source (33) are installed in parallel. A transmission mirror (34) and a first reflector (35) are respectively installed in front of the first light source (32) and the second light source (33). A second reflector (36) is also installed in the housing section (31), and a third reflector (37) is installed on the outside of the housing section (31). The transmission mirror (34), the first reflector (35) and the second reflector (36) are collinear, and the line connecting the three is perpendicular to the line connecting the first light source (32) and the transmission mirror (34). The line connecting the second reflector (36) and the third reflector (37) is parallel to the line connecting the first light source (32) and the transmission mirror (34).

3. The high-speed laser processing system for glass micro-holes according to claim 2, characterized in that, A first beam expander (38) is provided between the first light source (32) and the transmission mirror (34), and a second beam expander (39) is provided between the second light source (33) and the first reflector (35).

4. The high-speed laser processing system for glass micro-holes according to claim 2, characterized in that, The third reflector (37) is installed inside the housing (310), and a horizontally extending pipe (311) is connected between the housing part (31) and the housing (310); the housing (310) has a light outlet at the bottom, and the corrugated pipe (7) is installed between the light outlet and the output part (3B).

5. The high-speed laser processing system for glass micro-holes according to claim 1, characterized in that, The vertical lifting mechanism (4) further includes a lifting seat (42) that is slidably installed relative to the mechanism seat (41). A lead screw (43) is rotatably installed on the mechanism seat (41), and a lead screw nut that is in helical pair with the lead screw (43) is installed on the lifting seat (42). The lead screw (43) is driven by a lifting drive motor (44).

6. The high-speed laser processing system for glass micro-holes according to claim 1, characterized in that, The fixing fixture (2) includes a fixture base (21) and a cover (22) that are fixed to each other. The fixture base (21) has a cavity with an open top. A suction hole for connecting a suction pipe (23) is formed on the cavity wall. The suction pipe (23) is connected to a fan. A through hole is formed on the cover (22).

7. The high-speed laser processing system for glass micro-holes according to claim 1, characterized in that, The vision mechanism (8) includes a camera (81) and a ring light source (82), and the vision mechanism (8) is fixed relative to the output section (3B).

8. The high-speed laser processing system for glass micro-holes according to claim 1, characterized in that, The output section (3B) includes an output cylinder (312) in which a focusing lens is installed.

9. The high-speed laser processing system for glass micro-holes according to claim 1, characterized in that, It also includes a protective cover (9), in which the frame (10), base (1), fixing fixture (2), laser processing mechanism (3) and vision mechanism (8) are all placed; the protective cover (9) has a workpiece inlet and outlet, and a door (91) that can be opened is installed at the workpiece inlet and outlet, and safety light curtains (92) are installed on both sides of the workpiece inlet and outlet.

10. A method for high-speed laser processing of micro-holes in glass, applied to the high-speed laser processing system for micro-holes in glass according to any one of claims 1-9, characterized in that, The method includes: Step 1), the glass is positioned using a fixing fixture (2); Step 2), acquire an image of the glass to be processed through the vision mechanism (8) to obtain the position and orientation of the glass; Step 3) Determine the coordinates of each processing point according to the processing requirements and the position and orientation of the glass; Step 4), control the operation of the dual-axis translation mechanism (20) to align each processing point with the output part (3B) vertically; Step 5), adjust the output power of the light source section (3A) according to the processing requirements, and process the glass by outputting laser through the output section (3B); Step 6), once all the micropores have been processed, control the fixing fixture (2) to release the glass.

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