An apparatus for manufacturing a nanoimprint assembly jig and a method for manufacturing the same

Abstract

The application discloses a kind of equipment and its manufacturing method of nanoimprint working die of patching, wherein, a kind of equipment of nanoimprint working die of patching, including equipment base, the top of the equipment base is equipped with slidable platform, the top of the platform is placed with the first working die cut into regular rectangle, the top of first working die cut into regular rectangle is provided with silk screen, and scraper is provided on silk screen.The single master is made into large-size nanoimprint working die by patching process in the application, so that the production efficiency of optical waveguide is improved, mass production is facilitated, and industrialization is realized.

Description

Technical Field

[0001] This invention relates to the field of nanoimprint technology, and in particular to a device and method for manufacturing nanoimprint printing molds. Background Technology

[0002] With the rapid development of electronic information technology, AR (Augmented Reality) technology has also made substantial progress. Due to its own optical characteristics, AR technology can project virtual scenes into real scenes, giving users a unique experience that combines the virtual and the real. AR technology can be widely used in education, medical care, entertainment, industry and other industries, and has great commercial and educational value.

[0003] Currently, waveguide sheets for AR display modules are mainly produced directly using 4-inch master plates. This method involves imprinting flexible substrates (such as PET, PC, PMMA, flexible glass, etc.) onto the master plate to transfer the structure onto the flexible material to form a flexible template (referred to as a soft film). The structure is then transferred to the product through the soft film. This production process has low capacity and cannot meet the growing demand of the AR glasses market.

[0004] Mastering typically uses semiconductor technology, which results in high costs, long production times, and low yields for 4-inch mastering. These factors make it impossible to use this technology to directly produce 8 / 12-inch multi-panel masterings.

[0005] This article provides a method to create large-scale panel working molds based on existing 4-inch master templates. Summary of the Invention

[0006] In view of the technical problems existing in the background art, the present invention proposes a method for manufacturing a nanoimprint imprinting working mold, including the following process: S1 sets the first working mold on the screen printing platform; S2 performs screen printing and adhesive coating on a specific area of ​​the first working mold; S3 performs nanoimprinting on the first working mold, transferring the structure of the first working mold onto the second soft film.

[0007] Preferably, the specific area is a region on the first working mold that includes at least a structural area.

[0008] Preferably, the method further includes the following steps before step S1: S01 Prepare the required master template; S02 uses nanoimprinting to transfer the structure on the master plate onto a flexible substrate to form the first flexible film. S03 uses nanoimprinting to imprint the structure on the first soft film onto the wafer glass to create the first working mold; S04 cuts the first working mold into a rectangle using laser cutting.

[0009] Preferably, step S2 specifically comprises: S21 places the first working mold on the screen printing platform; The S22 screen printing stencil descends and contacts the surface of the first working mold, the squeegee moves to the left, and screen printing begins; S23 screen printing is complete. The screen printing plate rises, leaving a layer of soft film adhesive on the surface of the first working mold.

[0010] Preferably, step S3 specifically comprises: S31 mobile screen printing platform moves to the printing area; S32 The second soft film descends, while the first roller rolls to the left and completes UV curing; S33 demolds the second soft film and lifts it up.

[0011] Preferably, the method further includes: S4 uses nanoimprinting to transfer the structure of the second soft film onto an 8-inch second working mold.

[0012] Preferably, there are multiple first working molds, and the multiple first working molds are arranged in an array on the screen printing platform.

[0013] Preferably, in step S2, the adhesive for screen printing is applied to the designated area through the windowed area of ​​the screen printing stencil.

[0014] A device for fabricating a nanoimprinting stencil, the device using the aforementioned method for fabricating a diffractive waveguide nanoimprinting stencil, the device comprising a base, a slidable screen printing platform mounted on the top of the base, a first working mold placed on the top of the screen printing platform, a screen printing stencil positioned above the first working mold, and a squeegee positioned on the screen printing stencil.

[0015] Preferably, a second roller is installed at each of the four bottom corners of the screen printing platform.

[0016] In this invention, the equipment and method for manufacturing nano-imprinting imposition working molds involve screen printing adhesive onto multiple small working molds used for imposition, applying adhesive to designated areas of the working molds. This ensures that the soft film adhesive only covers the grating area of ​​the working molds. By selecting appropriate screens and imprinting parameters, the integrity of the adhesive during the imprinting process can be guaranteed without adhesive overflow. The coated working molds are then used to create imposition soft films through nano-imprinting, ultimately achieving the production of large-size imposition working molds.

[0017] This invention uses a panelization process to create a large-size nanoimprint working mold from a single master plate, thereby improving the production efficiency of optical waveguides, facilitating rapid mass production, and enabling industrialization. Attached Figure Description

[0018] Figure 1 A schematic diagram of the finished product of the equipment and method for manufacturing a nanoimprinting printing plate working mold proposed in this invention; Figure 2 This is a schematic diagram of step S21 of the method for manufacturing a nanoimprinting printing plate working mold proposed in this invention; Figure 3 This is a schematic diagram of step S22 of the method for manufacturing a nanoimprinting printing plate working mold proposed in this invention; Figure 4 This is a schematic diagram of step S23 of the method for manufacturing a nanoimprinting printing plate working mold proposed in this invention; Figure 5 This is a schematic diagram of step S31 of the method for manufacturing a nanoimprinting printing plate working mold proposed in this invention; Figure 6 This is a schematic diagram of step S32 of the method for manufacturing a nanoimprinting printing plate working mold proposed in this invention; Figure 7 This is a schematic diagram of step S33 of the method for manufacturing a nanoimprinting printing plate working mold proposed in this invention; Figure 8 This is a flowchart of a method for manufacturing a nanoimprinting printing plate working mold proposed in this invention. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0020] Reference Figure 1-8 A method for manufacturing a nanoimprinting printing die includes the following steps: S1 sets the first working mold 1 on the screen printing platform 2; S2 performs screen printing and adhesive coating on a specific area of ​​the first working mold 1; S3 performs nanoimprinting on the first working mold 1 to transfer the structure of the first working mold onto the second soft film 5.

[0021] In this invention, the specific region is the area on the first working mold that includes at least a structural region.

[0022] In this invention, preferably, the method further includes: S01 Prepare the required master template; S02 uses nanoimprinting to transfer the structure on the master plate onto a flexible substrate to form the first flexible film. S03 uses nanoimprinting to imprint the structure on the first soft film onto the wafer glass to create the first working mold 1; S04 cuts the first working mold 1 into a rectangle using laser cutting.

[0023] In this invention, step S2 specifically includes: S21 Place the first working mold 1 on the screen printing platform 2; The S22 screen printing plate 3 descends and contacts the surface of the first working mold 1, the squeegee moves to the left, and screen printing begins; S23 screen printing is completed, screen printing plate 3 rises, leaving a layer of soft film adhesive 6 on the surface of the first working mold 1.

[0024] In this invention, step S3 specifically includes: S31 mobile screen printing platform 2 to the printing area; S32 The second soft film 5 descends, while the first roller rolls to the left and completes UV curing; S33 will demold the second soft film 5 and lift it up.

[0025] In this invention, the method further includes: S4 transfers the structure of the second soft film 5 onto the 8-inch second working mold using nanoimprinting.

[0026] In this invention, there are multiple first working molds, and the multiple first working molds are arranged in an array on the screen printing platform 2.

[0027] In this invention, the adhesive used in step S2 is applied to the designated area through the windowed area of ​​the screen printing stencil.

[0028] A device for manufacturing nanoimprint stencils is disclosed. The device uses the aforementioned method for manufacturing nanoimprint stencils using diffraction waveguides. The device includes a base 4, a slidable screen printing platform 2 mounted on the top of the base 4, a first working mold 1 placed on the top of the screen printing platform 2, a screen printing stencil 3 positioned above the first working mold 1, and a squeegee mounted on the screen printing stencil 3.

[0029] In this invention, a second roller is installed at each of the four corners of the bottom of the platform.

[0030] This invention involves: preparing a master template; transferring the structure on the master template onto a flexible substrate using nanoimprinting to form a first flexible film; imprinting the structure on the first flexible film onto a wafer using nanoimprinting to create a first working mold; cutting the first working mold into a rectangle using laser cutting; placing the first working mold on a screen printing platform; applying adhesive to a specific area of ​​the first working mold using screen printing; and performing nanoimprinting on the first working mold to transfer its structure onto a second flexible film.

[0031] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. A method for manufacturing a waveguide sheet nanoimprinting dies, characterized in that, The process includes the following: S01 Prepare the required master template; S02 uses nanoimprinting to transfer the structure on the master plate onto a flexible substrate to form the first flexible film. S03 uses nanoimprinting to imprint the structure on the first soft film onto the wafer glass to create the first working mold; S04 cuts the first working mold into a rectangle using laser cutting; S1 sets the first working mold on the screen printing platform; there are multiple first working molds, and the multiple first working molds are arranged in an array on the screen printing platform; S2 performs screen printing and adhesive application on specific areas of the first working mold, including: S21 places the first working mold on the screen printing platform; The S22 screen printing stencil descends and contacts the surface of the first working mold. The squeegee moves to the left and screen printing begins. The adhesive for screen printing is applied to the designated area through the windowed area of ​​the screen printing stencil, so that the adhesive only covers the structural area of ​​the first working mold. The adhesive for screen printing is a soft film adhesive. S23 screen printing is complete. The screen printing plate rises, leaving a layer of soft film adhesive on the surface of the first working mold. S3 performs nanoimprinting on the first working mold to transfer the structure of the first working mold onto the second flexible film, including: S31 mobile screen printing platform moves to the printing area; S32 The second soft film descends, while the first roller rolls to the left and completes UV curing; S33 demolds the second soft film and lifts it up; S4 uses nanoimprinting to transfer the structure of the second soft film onto an 8-inch second working mold.

2. A device for manufacturing nanoimprint printing molds, characterized in that, The device uses the method for making a waveguide sheet nanoimprinting stencil working mold as described in claim 1 to make a stencil working mold. The device includes a device base, a slidable screen printing platform is installed on the top of the device base, a first working mold is placed on the top of the screen printing platform, a screen printing stencil is arranged above the first working mold, and a scraper is arranged on the screen printing stencil.

3. The equipment for manufacturing a nano-imprinting printing plate working mold according to claim 2, characterized in that, The screen printing platform is equipped with second rollers at each of the four bottom corners.

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