Mechanical hand piece fork gas path sealing structure and sealing method thereof

Abstract

This invention relates to the field of semiconductor equipment manufacturing technology, and in particular to a sealing structure and method for the gas path of a robotic arm fork. The sealing structure includes: a fork body with a recessed stepped groove, the stepped groove comprising a first groove, a second groove, and a gas channel stacked together; the second groove is formed by a downward recess of a portion of the bottom wall of the first groove, and the gas channel is formed by a downward recess of a portion of the bottom wall of the second groove; a sealing element is placed over the second groove to seal the gas channel; the sealing element and the first groove form a glue injection cavity; and a sealing pressure element is placed over the glue injection cavity. This invention, by setting a sealing element within the stepped groove, separates the glue injection cavity and the gas channel into independent cavities, thus ensuring reliable sealing of the gas channel while preventing glue from flowing into it. This ensures smooth gas flow and uniform gas flow within the gas channel, thereby ensuring that the robotic arm fork firmly adheres to the wafer without damaging it.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment manufacturing technology, and in particular to a sealing structure and sealing method for the air passage of a robotic arm fork. Background Technology

[0002] Wafer transfer equipment typically uses robotic arms to transfer wafers between different workstations. The fork at the front of the robotic arm makes direct contact with the wafer. A vacuum passage is installed inside the fork to ensure effective wafer adhesion.

[0003] The current method for sealing the pneumatic circuit of robotic arms uses adhesive. However, the flowing adhesive can easily enter the pneumatic circuit during the sealing process, causing blockage and leading to sealing failure. This also affects the stability and reliability of the wafer transfer by the fork. Therefore, the adhesive application process requires highly skilled personnel and is time-consuming and labor-intensive. To improve the sealing performance, adhesive is usually applied to the mating surface between the fork body and the pneumatic circuit cover, leaving adhesive marks on the fork surface. This can easily scratch the wafer surface and affect the aesthetics. Summary of the Invention

[0004] In view of this, the purpose of this application is to provide a sealing structure and sealing method for the air passage of a robotic arm fork, so as to solve the problem that the air passage in the existing robotic arm fork used for transporting wafers is easily blocked by adhesive, resulting in poor gas flow and thus affecting the stability and reliability of wafer transport.

[0005] The first aspect of the present invention provides a sealing structure for the air passage of a robotic arm fork, wherein the sealing structure comprises:

[0006] The fork body has a recessed stepped groove, which includes a first groove, a second groove and a gas channel stacked together. The second groove is formed by a portion of the bottom wall of the first groove being recessed downwards, and the gas channel is formed by a portion of the bottom wall of the second groove being recessed downwards.

[0007] A sealing element is provided on the second groove to seal the gas passage; the sealing element and the first groove form an injection cavity;

[0008] A sealing element is placed over the injection cavity.

[0009] Preferably, the gas channel is located in the middle of the second tank, and the entire outer circumference of the bottom of the seal is attached to the bottom wall of the second tank.

[0010] Preferably, the sidewall of the sealing member conforms to the inner sidewall of the first groove; the sidewall of the sealing member conforms to the inner sidewall of the second groove.

[0011] Preferably, the injection cavity is filled with adhesive, and the sealing member presses against the adhesive, so that part of the adhesive fills the injection cavity and the remaining adhesive flows out of the injection cavity.

[0012] Preferably, a portion of the adhesive in the injection cavity overflows onto the surface of the fork body, such that a portion of the adhesive fills the space between the sidewall of the sealing member and the inner sidewall of the first groove.

[0013] Preferably, the top of the sealing member covering the injection cavity is coplanar with the surface of the fork body.

[0014] Preferably, the seal and the sealing member disposed in the stepped groove are parallel to each other.

[0015] Preferably, the stepped groove is formed in a Y-shape, and both the sealing element and the sealing element are formed in a sheet-like structure with the same shape as the stepped groove.

[0016] Preferably, the seal is interference-fitted with the second groove.

[0017] A second aspect of the present invention provides a sealing method applied to the implementation of the air passage sealing structure of the robotic arm fork described in any of the above technical solutions, the sealing method comprising:

[0018] S10. Place the sealing cap on the second groove to seal the upper surface of the gas passage;

[0019] S20. Fill the injection cavity with adhesive, so that the injection cavity is completely filled with adhesive;

[0020] S30. Apply a predetermined pressure to press the sealing member against the adhesive until some of the adhesive overflows onto the surface of the fork body, so that the space between the side wall of the sealing member and the inner side wall of the first groove is filled with adhesive.

[0021] S40. Remove any excess adhesive from the surface of the fork body, and release the pressure after the adhesive has solidified. 。

[0022] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0023] The robotic arm fork air passage sealing structure of this invention separates the glue injection chamber and the gas channel into independent cavities by setting a sealant in the stepped groove. This ensures reliable sealing of the gas channel while preventing glue from flowing into it, thus guaranteeing smooth gas flow and uniform gas flow within the gas channel. This improves the stability and reliability of the robotic arm fork in transporting wafers, ensuring firm adhesion of the fork to the wafer without causing damage. Furthermore, the sealing method applied to the robotic arm fork air passage sealing structure is simple to operate, saves time and effort, provides reliable sealing, and effectively prevents glue from entering the gas channel, achieving air passage sealing.

[0024] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0025] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0026] Figure 1 A schematic diagram of the fork body in the air sealing structure of the robotic arm fork provided in an embodiment of the present invention;

[0027] Figure 2 An exploded view of the air passage sealing structure of the robotic arm fork provided in an embodiment of the present invention.

[0028] Icons: 10-Plate fork body; 11-First groove; 12-Second groove; 13-Gas passage; 20-Seal; 30-Sealing component. Detailed Implementation

[0029] The following detailed embodiments are provided to help the reader gain a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and / or systems described herein will be apparent after understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein; changes that will be apparent after understanding the disclosure of this application are possible, except for operations that must occur in a specific order. Furthermore, for clarity and brevity, descriptions of features known in the art may be omitted.

[0030] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many feasible ways of implementing the methods, apparatus, and / or systems described herein that will be apparent upon understanding the disclosure of this application.

[0031] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, it may be directly "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, or there may be one or more other elements in between. In contrast, when an element is described as being "directly on" another element, "directly connected to" another element, "directly bonded to" another element, "directly on" another element, or "directly covering" another element, there may be no other elements in between.

[0032] As used herein, the term “and / or” includes any one of the relevant items listed and any combination of any two or more items.

[0033] Although terms such as “first,” “second,” and “third” may be used herein to describe individual components, assemblies, regions, layers, or parts, these components, assemblies, regions, layers, or parts are not limited by these terms. Rather, these terms are used only to distinguish one component, assembly, region, layer, or part from another. Therefore, without departing from the teachings of the examples described herein, the first component, assembly, region, layer, or part referred to as the second component, assembly, region, layer, or part may also be referred to as the second component, assembly, region, layer, or part.

[0034] For ease of description, spatial relation terms such as “above,” “upper,” “below,” and “lower” are used herein to describe the relationship between one element and another, as shown in the accompanying drawings. Such spatial relation terms are intended to include not only the orientation depicted in the drawings but also different orientations of the device during use or operation. For example, if the device in the drawings is flipped, an element described as being “above” or “upper” relative to another element will subsequently be “below” or “lower” relative to that other element. Therefore, the term “above” includes both “above” and “below” orientations depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relation terms used herein will be interpreted accordingly.

[0035] The terminology used herein is for the purpose of describing various examples only and is not intended to limit this disclosure. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms “comprising,” “including,” and “having” enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0036] Variations in the shapes shown in the accompanying drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that may occur during manufacturing.

[0037] The features of the examples described herein can be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have a wide variety of constructions, other constructions are possible, as will be apparent upon understanding the disclosure of this application.

[0038] According to the present invention, a sealing structure for the air passage of a robotic arm fork is provided, which includes a fork body 10, a sealing element 20, and a sealing element 30.

[0039] The specific structure of the above-mentioned components of the robot fork air passage sealing structure according to this embodiment will be described below.

[0040] In this embodiment, as Figure 1 As shown, the fork body 10 has a recessed stepped groove. The fork body 10 is formed as a plate-like structure. The stepped groove is formed by a downward recess on one side surface of the fork body 10. The stepped groove includes a first groove 11, a second groove 12 and a gas channel 13 stacked in layers along the recessed direction of the stepped groove on the surface of the fork body 10. The gas channel 13 is the air passage of the robotic fork. That is, the first groove 11 is located at the top of the stepped groove, the gas channel 13 is located at the bottom of the stepped groove, and the second groove 12 is located between the first groove 11 and the gas channel 13.

[0041] Specifically, the second tank 12 is formed by a downward indentation of part of the bottom wall of the first tank 11, and the gas channel 13 is formed by a downward indentation of part of the bottom wall of the second tank 12, thus making the tank wall of the stepped tank form a stepped structure.

[0042] In this embodiment, as Figure 1 and 2As shown, the sealing element 20 is installed on the second groove 12. The sealing element 20 is formed as a sheet-like structure covering the bottom of the second groove 12. The bottom side of the sealing element 20 seals the gas channel 13, thus achieving a seal for the gas path. Specifically, the top side of the sealing element 20 and the first groove 11 form a glue injection cavity for filling the glue. This allows the sealing element 20 to separate the gas channel 13 and the glue injection cavity into two independent cavities. Thus, based on the double sealing of the gas channel 13 by the sealing element 20 and the glue, the sealing element 20 can also prevent the glue in the glue injection cavity from flowing into the gas channel 13, thereby ensuring smooth and uniform gas flow in the gas channel 13, which improves the stability and reliability of the robotic arm fork transporting wafers.

[0043] In this embodiment, as Figure 1 and 2 As shown, the sealing component 30 is placed over the glue injection cavity. The sealing component 30 is formed into a sheet-like structure to seal the glue injection cavity, so that the glue can solidify between the sealing component 30 and the sealing component 20. This prevents the solidified glue from being exposed, which would cause the robotic arm fork to generate dust during operation and fail to meet the cleanliness requirements for wafer transfer.

[0044] In this embodiment, as Figure 1 and Figure 2 As shown, the projection of the stepped groove onto the surface of the fork body 10 forms a Y-shaped structure, making it similar to the structural shape of the robotic fork, thereby ensuring smooth transport of the robotic fork and reliable wafer adsorption. Furthermore, in this embodiment, both the sealing element 20 and the sealing element 30 are formed with the same shape as the stepped groove to ensure that the sealing element 20 and the sealing element 30 are tightly and reliably assembled with the stepped groove, preventing the gas channel 13 from being unsealed and / or adhesive from flowing into the gas channel 13.

[0045] In this embodiment, as Figure 1 and Figure 2 As shown, the gas channel 13 is located in the middle of the second tank 12, so that the entire outer edge of the bottom side of the seal 20 is attached to the bottom wall of the second tank 12, thereby improving the reliability of preventing adhesive from flowing into the gas channel 13.

[0046] Furthermore, in this embodiment, as Figure 1 and Figure 2 As shown, the sidewall of the sealing member 30 conforms to the inner sidewall of the first groove 11 (the inner sidewall being the circumferential sidewall within the groove); the sidewall of the sealing member 20 conforms to the inner sidewall of the second groove 12, thus ensuring the sealing of the gas channel 13 and preventing adhesive from flowing into the gas channel 13. In a preferred embodiment, the sealing member 20 and the second groove 12 are connected by an interference fit, thereby further ensuring the sealing of the gas channel 13 and preventing adhesive from flowing into the gas channel 13.

[0047] In this embodiment, as Figure 1 and Figure 2 As shown, the injection cavity is filled with adhesive. When the sealing member 30 seals the injection cavity, it presses against the adhesive, causing some of the adhesive to remain and fill the cavity. The remaining adhesive flows out of the cavity under the pressure of the sealing member 30, thus ensuring that the injection cavity is filled with adhesive and guaranteeing a reliable seal for the gas passage 13. Furthermore, the sealing member 30 is fitted with the first groove 11 with a clearance fit, ensuring that when the sealing member 30 presses against the adhesive, some of the adhesive flows out of the injection cavity under the pressure of the sealing member 30, thus ensuring that the main injection cavity is filled with adhesive.

[0048] Furthermore, in a preferred embodiment, such as Figure 1 and Figure 2 As shown, some of the adhesive in the injection cavity overflows onto the surface of the fork body 10, filling the space between the side wall of the sealing member 30 and the inner side wall of the first groove 11 with adhesive, thus further improving the sealing effect and ensuring that the sealing member 30 and the fork body 10 are firmly and reliably assembled.

[0049] In this embodiment, as Figure 1 and Figure 2 As shown, the top of the sealing member 30, which covers the glue injection cavity, is coplanar with the surface of the fork body 10. This ensures that the sealing member 30 is subjected to uniform pressure, thereby ensuring reliable glue filling between the entire circumferential sidewall of the sealing member 30 and the inner sidewall of the first groove 11, and avoiding the occurrence of empty glue. In this embodiment, both the fork body 10 and the sealing member 30 are made of ceramic material. The sheet-like sealing member 30 is relatively thin, and the uniform pressure applied to the sealing member 30 can prevent it from breaking.

[0050] Furthermore, in this embodiment, as Figure 1 and Figure 2 As shown, the sealing element 20 and the sealing element 30, which are set in the stepped groove, are parallel to each other, thus ensuring that the adhesive is evenly filled in the injection cavity and thus ensuring a reliable seal.

[0051] Furthermore, in a preferred embodiment, the robotic fork also includes a protective film. The protective film includes a first protective film disposed on the side of the fork body 10 where the stepped groove is provided. The first protective film is attached to the surface of the fork body 10. The protective film also includes a second protective film disposed on the side of the sealing member 30 facing away from the glue injection cavity. The second protective film is attached to the surface of the sealing member 30. The protective film can be made of plastic or glass. When the sealing member 30 presses against the glue and causes some of the glue to overflow from the fork body 10, the overflowing glue sticks to the protective film. After the glue solidifies, the protective film can be removed. This avoids glue residue on the fork body and the surface of the sealing member 30, thereby preventing the exposed glue from generating dust, ensuring the cleanliness requirements of wafer transmission, and making glue removal simple and convenient.

[0052] According to the robotic arm fork air passage sealing structure of the present invention, by setting a seal in the stepped groove, the glue injection cavity and the gas channel are separated into independent cavities. This ensures reliable sealing of the gas channel and prevents glue from flowing into the gas channel, thereby ensuring smooth airflow and uniform gas flow in the gas channel. This improves the stability and reliability of the robotic arm fork in transporting wafers, ensuring that the robotic arm fork firmly adheres to the wafer and does not damage it.

[0053] According to a second aspect of the present invention, a sealing method is applied to the above-mentioned sealing structure of the air passage of the robotic arm fork.

[0054] Specifically, in this embodiment, the sealing method includes the following steps:

[0055] S10. Place the sealing element on the second groove to seal the upper surface of the gas channel, so that the gas channel and the glue injection cavity are isolated by the sealing element, thereby preventing the glue from entering the gas channel.

[0056] S20. Fill the injection cavity with adhesive, ensuring that some of the adhesive overflows when the sealing component is installed.

[0057] S30. Apply a predetermined pressure to press the sealing component against the adhesive until some of the adhesive overflows onto the surface of the fork body, so that the space between the side wall of the sealing component and the inner side wall of the first groove is filled with adhesive, so as to ensure that the adhesive is evenly distributed and reliably sealed.

[0058] S40. Remove the overflowing adhesive from the surface of the fork body to ensure the surface of the fork body is clean and meets the requirements of wafer transfer; and release the pressure after the adhesive has solidified to ensure reliable sealing.

[0059] Step S40 also includes S41, after the adhesive overflows, the first protective film and the second protective film are peeled off from the surfaces of the fork body and the sealing component, respectively, thus removing the overflowed adhesive and preventing the adhesive from leaving visually imperceptible residues on the surface of the fork body or the sealing component. This also prevents the solidified adhesive residues from generating dust during the movement of the robotic fork, which could affect wafer transfer. Furthermore, it has the advantages of convenient and reliable adhesive removal.

[0060] The sealing method of the air passage sealing structure for the robotic arm fork according to the present invention is simple to operate, saves time and effort, thus reducing the requirements for the operator's skill and proficiency in applying adhesive. Furthermore, it achieves a reliable seal, effectively preventing adhesive from entering the gas passage, thereby realizing a gas passage seal.

[0061] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The protection scope of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the technical scope disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the protection scope of this application. Therefore, the protection scope of this application should be determined by the protection scope of the claims.

Claims

1. A sealing structure for the pneumatic circuit of a robotic arm fork, characterized in that, The air circuit sealing structure of the robotic arm fork includes: The fork body has a recessed stepped groove, which includes a first groove, a second groove and a gas channel stacked together. The second groove is formed by a portion of the bottom wall of the first groove being recessed downwards, and the gas channel is formed by a portion of the bottom wall of the second groove being recessed downwards. A sealing element is provided on the second groove to seal the gas passage; the sealing element and the first groove form an injection cavity; A sealing element is provided on the injection cavity; the injection cavity is filled with adhesive, and the sealing element presses against the adhesive, so that part of the adhesive fills the injection cavity and the remaining adhesive flows out of the injection cavity.

2. The air passage sealing structure for the robotic arm fork according to claim 1, characterized in that, The gas passage is located in the middle of the second tank, and the entire outer circumference of the bottom of the seal is attached to the bottom wall of the second tank.

3. The air passage sealing structure for the robotic arm fork according to claim 1, characterized in that, The sidewall of the sealing element conforms to the inner sidewall of the first groove; the sidewall of the sealing element conforms to the inner sidewall of the second groove.

4. The air passage sealing structure for the robotic arm fork according to claim 1, characterized in that, Some of the adhesive in the injection cavity overflows onto the surface of the fork body, causing a portion of the adhesive to fill the space between the side wall of the sealing member and the inner side wall of the first groove.

5. The air passage sealing structure for the robotic arm fork according to claim 1, characterized in that, The top of the sealing member covering the injection cavity is coplanar with the surface of the fork body.

6. The air passage sealing structure for the robotic arm fork according to claim 1, characterized in that, The seal and the sealing element disposed in the stepped groove are parallel to each other.

7. The air passage sealing structure for the robotic arm fork according to claim 1, characterized in that, The stepped groove is formed in a Y-shaped structure, and the sealing element and the sealing pressure element are both formed in a sheet-like structure with the same shape as the stepped groove.

8. The air passage sealing structure for the robotic arm fork according to claim 1, characterized in that, The sealing element is interference-fitted with the second groove.

9. A sealing method for a pneumatic sealing structure of a robotic arm fork, characterized in that, In an implementation of the air passage sealing structure for the robotic arm fork according to any one of claims 1 to 8, the sealing method comprises: S10. Place the sealing cap on the second groove to seal the upper surface of the gas passage; S20. Fill the injection cavity with adhesive, so that the injection cavity is completely filled with adhesive; S30. Apply a predetermined pressure to press the sealing member against the adhesive until some of the adhesive overflows onto the surface of the fork body, so that the space between the side wall of the sealing member and the inner side wall of the first groove is filled with adhesive. S40. Remove any excess adhesive from the surface of the fork body and release the pressure after the adhesive has solidified.

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