An ultrasonic endpoint diffraction characteristic verification apparatus and a working method thereof

Abstract

The application provides an ultrasonic endpoint diffraction characteristic calibration device and a working method thereof. The device comprises a test block, a phased array ultrasonic detector and a phased array ultrasonic probe. The phased array ultrasonic probe is arranged on the first surface and the second surface of the test block respectively. The detector is used to excite the probe to emit ultrasonic waves to the grooves of the test block. The phased array ultrasonic detector records the echo data of the primary wave and the secondary wave of the endpoint diffraction wave and the end angle emission wave formed at the grooves. According to the echo data, the relative quantitative accuracy of the primary wave and the secondary wave, the correlation between the diffraction wave height and the endpoint curvature radius, and the correlation between the diffraction wave height and the sound beam refraction angle and the focusing depth are calculated based on the endpoint diffraction method. The performance of the ultrasonic endpoint diffraction characteristic can be more accurately evaluated. The phased array ultrasonic endpoint diffraction method provides quantitative process improvement basis, thereby helping to improve the quantitative accuracy of the endpoint diffraction method.

Description

Technical Field

[0001] This invention relates to the field of ultrasonic diffraction wave measurement technology, and specifically to a device for verifying the diffraction characteristics of an ultrasonic endpoint and its working method. Background Technology

[0002] When ultrasonic waves are incident on the edge of a defect, they scatter, generating scattered waves that propagate in all directions. These scattered waves, superimposed on the incident wave, interfere to form a complex interference sound field, a phenomenon known as ultrasonic diffraction. This diffraction often occurs at the endpoints of the defect, and the diffracted signal is much weaker than the defect's own reflected signal, propagating in all directions without a clear directionality—this is known as endpoint diffraction. Endpoint diffraction is commonly used in quantitative methods for defect endpoint diffraction, allowing for the measurement of dimensional data such as the defect's height. However, existing quantitative methods for endpoint diffraction suffer from difficulties in identifying the weak endpoint diffraction echo signal, and there is a lack of targeted research on the characteristics and quantitative accuracy of endpoint diffraction. Summary of the Invention

[0003] Therefore, the technical problem to be solved by the present invention is to overcome the weakness of the endpoint diffraction echo and the difficulty in identifying the diffraction echo signal in the prior art, thereby providing a verification device and working method for ultrasonic endpoint diffraction characteristics, which can be used to optimize the ultrasonic testing process, better identify the endpoint diffraction wave signal, and improve the quantitative accuracy of the endpoint diffraction method.

[0004] The technical solution of the present invention to solve the above-mentioned technical problems is as follows:

[0005] In a first aspect, the present invention provides a device for verifying the diffraction characteristics of an ultrasonic endpoint, the device comprising: a test block, a phased array ultrasonic detector, and a phased array ultrasonic probe;

[0006] The test block includes: a test block substrate and multiple grooves etched on the test block substrate. The test block substrate is a square body, including: a first surface and a second surface located on opposite sides, and a first end face and a second end face located on opposite sides. The multiple grooves are etched on the first surface or the second surface of the opposite side of the test block substrate, and the spacing between adjacent grooves is equal. The radius of curvature of the multiple grooves is a preset multiple of the wavelength of the ultrasonic wave type to be calibrated, and the preset multiple increases sequentially from one side of the first end face to one side of the second end face.

[0007] The phased array ultrasonic testing instrument is used to excite the phased array ultrasonic probe to generate ultrasonic waves and record the echo data of the endpoint diffraction waves and end-corner reflection waves formed by the ultrasonic waves at multiple grooves on the test block. Based on the echo data, the instrument calculates the relative quantitative accuracy of the primary and secondary waves, the correlation between the diffraction wave height and the endpoint curvature radius, and the correlation between the diffraction wave height and the beam refraction angle and the focusing depth of the phased array ultrasonic testing instrument using the endpoint diffraction method. The primary wave represents the echo received by the phased array ultrasonic probe set on the surface without grooves, and the secondary wave represents the echo received by the phased array ultrasonic probe set on the surface with grooves.

[0008] The phased array ultrasonic probe is used to be placed on the coupling surface of the test block to emit ultrasonic waves generated by the phased array ultrasonic detector and to receive the echoes of the endpoint diffraction waves and end corner reflection waves formed at multiple grooves and return them to the phased array ultrasonic detector.

[0009] The ultrasonic endpoint diffraction characteristic verification device provided in this invention testes multiple grooves etched on a test block with different endpoint curvature radii, and the spacing between adjacent grooves is equal. By changing a preset multiple of the curvature radius, ultrasonic endpoint diffraction characteristic data under multiple different conditions can be obtained during testing. By using a phased array ultrasonic probe to excite and receive endpoint diffracted waves and end-angle reflected waves, the relative quantitative accuracy of the primary and secondary waves, as well as the correlation between different detection conditions and diffraction wave data, can be calculated based on the endpoint diffraction method. This provides a basis for quantitative process improvement of the phased array ultrasonic endpoint diffraction method, thereby contributing to the improvement of the relative quantitative accuracy of the endpoint diffraction method.

[0010] Optionally, the distance between the grooves near the first end face and the first end face of the test block substrate is equal to the distance between the grooves near the second end face and the second end face of the test block substrate; the distance is not less than half the span of the undeflected sound wave emitted at the refraction angle of the phased array ultrasonic probe's wedge beam. Since the wedge of the phased array ultrasonic probe refracts the sound wave to a fixed angle, and the emitted sound beam also has a certain span, the distance between the grooves on the test block should not be less than half the beam span to ensure that the propagation path of the sound wave in the test block is symmetrical and the refraction angle is appropriate, preventing interference from non-target areas from the echo signal and improving the accuracy of the detection results.

[0011] Optionally, the spacing between the plurality of grooves is not less than the wedge length of the phased array ultrasonic probe, and the spacing is such that the secondary wave axis of the undeflected sound wave emitted from the wedge of the phased array ultrasonic probe crosses the adjacent groove to scan the next groove.

[0012] In the testing process of this invention, the spacing between multiple grooves is not less than the wedge length of the phased array ultrasonic probe. The secondary wave axis beam of the undeflected sound wave emitted from the wedge beam refraction angle of the phased array ultrasonic probe can effectively cross adjacent grooves and scan the next groove, thereby improving the accuracy and efficiency of the test.

[0013] Optionally, the plurality of grooves are engraved at a preset angle, and the depth and length directions are the same.

[0014] In this embodiment of the invention, the same depth and length directions ensure that each groove on the test block has the same shape and size, maintaining uniformity.

[0015] Secondly, embodiments of the present invention provide a method for operating a device for verifying the diffraction characteristics of ultrasonic endpoints, comprising the following steps:

[0016] The phased array ultrasonic probes were respectively placed at different positions on the first and second surfaces of the test block;

[0017] The phased array ultrasonic probe is excited by a phased array ultrasonic detector to emit ultrasonic waves to multiple grooves on the test block. The echo data of the first wave and the echo data of the end diffraction wave and end corner reflection wave formed at multiple grooves are recorded by the phased array ultrasonic detector.

[0018] Based on the echo data, the relative quantitative accuracy of the primary and secondary waves, the correlation between the diffraction wave height and the endpoint curvature radius, and the correlation between the diffraction wave height and the sound beam refraction angle and focusing depth are calculated using the endpoint diffraction method.

[0019] In this embodiment of the invention, a phased array ultrasonic detector is used to excite the phased array ultrasonic probe to emit ultrasonic waves to multiple grooves on a test block. The phased array ultrasonic detector records the echo data of the primary and secondary waves of the endpoint diffraction waves and end-angle reflection waves formed at multiple grooves. Based on the echo data, the relative quantitative accuracy of the primary and secondary waves, the correlation between the diffraction wave height and the endpoint curvature radius, and the correlation between the diffraction wave height and the beam refraction angle and focusing depth are calculated using the endpoint diffraction method. This allows for a more accurate evaluation of the ultrasonic endpoint diffraction characteristics, providing a basis for improving the quantitative process of the phased array ultrasonic endpoint diffraction method, thereby helping to improve the quantitative accuracy of the endpoint diffraction method.

[0020] Optionally, the plurality of grooves are etched on the second surface of the test block substrate; the echo received by the phased array ultrasonic probe disposed on the first surface is a primary wave, and the echo received by the phased array ultrasonic probe disposed on the second surface is a secondary wave.

[0021] This invention distinguishes between primary and secondary waves to enable more accurate analysis and calculation based on these echo data. It allows for targeted recording of diffraction characteristic data for these two types of waves, thereby achieving a more accurate and comprehensive verification of the ultrasonic endpoint diffraction characteristics.

[0022] Optionally, a phased array ultrasonic detector is used to excite the phased array ultrasonic probe to emit ultrasonic waves to the grooves on the test block. The phased array ultrasonic detector records the echo data of the primary wave of the endpoint diffraction wave and the end-corner reflection wave formed at the grooves. This includes: using the phased array ultrasonic detector with the same beam refraction angle and the same focusing depth, exciting the phased array ultrasonic probe set on the first surface of the test block to emit ultrasonic waves to multiple grooves on the test block; recording the first preset large-angle endpoint diffraction wave height, the first preset small-angle endpoint diffraction wave height, the first preset large-angle endpoint diffraction wave depth, the first preset small-angle endpoint diffraction wave depth, and the first end-corner reflection wave depth of the primary wave echo at the multiple grooves; using the phased array ultrasonic detector with the same focusing depth and different beam refraction angles to excite the phased array ultrasonic probe set on the first surface of the test block to emit ultrasonic waves to multiple grooves on the test block; recording the first preset large-angle endpoint diffraction wave height, the first preset small-angle endpoint diffraction wave depth, and the first end-corner reflection wave depth of the primary wave echo at the multiple grooves; and exciting the first preset large-angle endpoint diffraction wave height, the first preset small-angle endpoint diffraction wave depth, and the first end-corner reflection wave depth of the primary wave echo at the multiple grooves. Ultrasonic waves are emitted from a phased array ultrasonic probe on the first surface of the test block to any groove on the test block. The wave heights of the second preset large-angle endpoint diffraction waves, the second preset small-angle endpoint diffraction waves, the depths of the second preset large-angle endpoint diffraction waves, the depths of the second preset small-angle endpoint diffraction waves, and the depth of the second corner reflection wave of the primary echo at the groove are recorded respectively. Using a phased array ultrasonic detector with different focusing depths and the same beam refraction angle, ultrasonic waves are emitted from the phased array ultrasonic probe on the first surface of the test block to any groove on the test block. The wave heights of the third preset large-angle endpoint diffraction waves, the third preset small-angle endpoint diffraction waves, the depths of the third preset large-angle endpoint diffraction waves, the depths of the third preset small-angle endpoint diffraction waves, and the depth of the third corner reflection wave of the primary echo at the groove are recorded respectively.

[0023] In this embodiment of the invention, under three different control conditions of the sound beam refraction angle and focusing depth, the endpoint diffraction wave height, endpoint diffraction wave depth and end corner reflection wave depth of the primary wave echo data emitted by the phased array ultrasonic probe set on the first surface of the test block are recorded respectively, so as to provide a data basis for subsequent calculation of correlation and relative quantitative accuracy.

[0024] Optionally, a phased array ultrasonic detector is used to excite the phased array ultrasonic probe to emit ultrasonic waves to the grooves on the test block. The phased array ultrasonic detector records the echo data of the secondary waves of the endpoint diffraction waves and the corner reflection waves formed at the grooves. This includes: using the phased array ultrasonic detector with the same beam refraction angle and the same focusing depth, exciting the phased array ultrasonic probe set on the second surface of the test block to emit ultrasonic waves to multiple grooves on the test block; recording the fourth preset large-angle endpoint diffraction wave height, the fourth preset small-angle endpoint diffraction wave height, the fourth preset large-angle endpoint diffraction wave depth, the fourth preset small-angle endpoint diffraction wave depth, and the fourth corner reflection wave depth of the secondary wave echoes at multiple grooves; using the phased array ultrasonic detector with the same focusing depth and different beam refraction angles to excite the phased array ultrasonic probe set on the second surface of the test block to emit ultrasonic waves to multiple grooves on the test block; recording the fourth preset large-angle endpoint diffraction wave height, the fourth preset small-angle endpoint diffraction wave depth, and the fourth corner reflection wave depth of the secondary wave echoes at multiple grooves; and exciting the fourth preset large-angle endpoint diffraction wave height, the fourth preset small-angle endpoint diffraction wave depth, and the fourth corner reflection wave depth of the secondary wave echoes at multiple grooves. An ultrasonic wave is emitted from a phased array ultrasonic probe placed on the second surface of the test block to any groove on the test block. The wave heights of the diffracted waves at the fifth preset large-angle endpoint, the fifth preset small-angle endpoint, the depths of the diffracted waves at the fifth preset large-angle endpoint, the depths of the diffracted waves at the fifth preset small-angle endpoint, and the depth of the reflected wave at the fifth corner are recorded. An ultrasonic detector is used to excite the phased array ultrasonic probe placed on the second surface of the test block to emit ultrasonic waves to any groove on the test block with different focusing depths and the same beam refraction angle. The wave heights of the diffracted waves at the sixth preset large-angle endpoint, the sixth preset small-angle endpoint, the depths of the diffracted waves at the sixth preset large-angle endpoint, the depths of the diffracted waves at the sixth preset small-angle endpoint, and the depth of the reflected wave at the sixth corner are recorded.

[0025] In this embodiment of the invention, under three different control conditions of the sound beam refraction angle and focusing depth, the second wave echo data of the diffracted wave emitted by the phased array ultrasonic probe set on the second surface of the test block are recorded, including the endpoint diffracted wave height, endpoint diffracted wave depth and end corner reflected wave depth, providing a data basis for subsequent calculation of correlation and relative quantitative accuracy.

[0026] Optionally, based on the echo data, the relative quantitative accuracy of the primary wave, the correlation between the diffracted wave height and the endpoint curvature radius, and the correlation between the diffracted wave height and the beam refraction angle and focusing depth are calculated using the endpoint diffraction method. This includes: obtaining the corresponding actual depth of the grooves, the endpoint curvature radius, the beam refraction angle and focusing depth of the phased array ultrasonic probe, and based on the first preset large-angle endpoint diffracted wave depth, the first preset small-angle endpoint diffracted wave depth, the first end-angle reflected wave depth, the second preset large-angle endpoint diffracted wave depth, the second preset small-angle endpoint diffracted wave depth, the second end-angle reflected wave depth, the third preset large-angle endpoint diffracted wave depth, the third preset small-angle endpoint diffracted wave depth, and the third end-angle reflected wave depth, and according to the endpoint diffraction method, the first groove quantitative depth, the second groove quantitative depth, and the third groove quantitative depth are calculated using formulas.

[0027] D ni =|D ci -D ai |or D ni =|D bi -D ai | / 2;

[0028] Among them, D ni To determine the depth of the groove, D ci D represents the depth of the reflected wave at the end corner. ai To preset the depth of the diffracted wave at the large-angle endpoint, D bi The preset small-angle endpoint diffraction wave depth, where i is the groove number;

[0029] Based on the first groove quantitative depth, the second groove quantitative depth, the third groove quantitative depth, and the actual groove depth, and according to the endpoint diffraction method, the first relative quantitative accuracy, the second relative quantitative accuracy, and the third relative quantitative accuracy of the primary wave are calculated based on the following formulas.

[0030] Δ i1 =|D ni -D0|×100%;

[0031] Where, Δ i1 For relative quantitative accuracy, D0 is the actual depth of the groove, D ni To determine the depth of the groove;

[0032] Based on the first preset large-angle endpoint diffraction wave height, the first preset small-angle endpoint diffraction wave height, and the endpoint curvature radius, the correlation between the first wave diffraction wave height and the endpoint curvature radius of the primary wave is obtained through scatter plots or curve fitting. Based on the second preset large-angle endpoint diffraction wave height, the third preset large-angle endpoint diffraction wave height, the second preset small-angle endpoint diffraction wave height, the third preset small-angle endpoint diffraction wave height, the sound beam refraction angle, and the focusing depth, the correlation between the second preset large-angle endpoint diffraction wave height, the second preset small-angle endpoint diffraction wave height of the primary wave and the sound beam refraction angle, and the correlation between the third preset large-angle endpoint diffraction wave height, the third preset small-angle endpoint diffraction wave height of the primary wave and the focusing depth is obtained through scatter plots or curve fitting.

[0033] This invention obtains the actual depth and radius of curvature of the groove, as well as parameters such as the beam refraction angle and focusing depth of the phased array ultrasonic probe. By combining the actual depth of the groove with the depth of the diffracted wave at the endpoint and the depth of the reflected wave at the end corner, the relative quantitative accuracy under the primary wave condition can be calculated. This allows for the determination of the true quantitative accuracy when using the above-mentioned detection process and method to quantify the depth of real defects (grooved defects), thereby effectively inferring a more realistic defect depth. By combining the correlation between parameters such as the radius of curvature at the endpoint, the beam refraction angle, and the focusing depth with the wave height of the diffracted wave at the endpoint, the influence of the beam refraction angle and the focusing depth on the relative quantitative accuracy is explored, thus obtaining an optimized quantitative process.

[0034] Optionally, based on the echo data, the relative quantitative accuracy of the secondary wave, the correlation between the diffracted wave height and the endpoint curvature radius, and the correlation between the diffracted wave height and the beam refraction angle and focusing depth are calculated using the endpoint diffraction method, including:

[0035] Obtain the actual depth of the grooves, the radius of curvature at the endpoints, and the beam refraction angle and focusing depth of the phased array ultrasonic probe for multiple grooves;

[0036] Based on the fourth preset large-angle endpoint diffraction wave depth, the fourth preset small-angle endpoint diffraction wave depth, the fourth end-angle reflection wave depth, the fifth preset large-angle endpoint diffraction wave depth, the fifth preset small-angle endpoint diffraction wave depth, the fifth end-angle reflection wave depth, the sixth preset large-angle endpoint diffraction wave depth, the sixth preset small-angle endpoint diffraction wave depth, and the sixth end-angle reflection wave depth, and according to the endpoint diffraction method, the fourth groove quantitative depth, the fifth groove quantitative depth, and the sixth groove quantitative depth are calculated based on the following formula;

[0037] DD ni =|DD ci -DD ai |or DD ni =|DD bi -DD ai | / 2;

[0038] Among them, DD ni To determine the depth of the groove, DD ci DD represents the depth of the reflected wave at the end corner. ai To preset the depth of the diffraction wave at the large-angle endpoint, DD bi The preset small-angle endpoint diffraction wave depth, where i is the groove number;

[0039] Based on the quantitative depths of the fourth, fifth, and sixth grooves and the actual groove depths, the fourth relative quantitative accuracy, fifth relative quantitative accuracy, and sixth relative quantitative accuracy of the secondary wave are calculated using the following formulas.

[0040] Δ i2=|DD ni -D0|×100%;

[0041] Where, Δ i2 For relative quantitative accuracy, D0 is the actual depth of the groove, and DD... ni The depth of the groove is quantified, and i is the groove number;

[0042] Based on the fourth preset large-angle endpoint diffraction wave height, the fourth preset small-angle endpoint diffraction wave height, and the endpoint curvature radius, the correlation between the fourth diffraction wave height and the endpoint curvature radius of the secondary wave is obtained by scatter plot or fitting curve method.

[0043] Based on the diffraction wave heights at the fifth, sixth, fifth, and sixth preset large-angle endpoints, the beam refraction angle, and the focusing depth, the correlation between the diffraction wave heights at the fifth, sixth, and sixth preset small-angle endpoints of the secondary wave and the beam refraction angle, and the correlation between the diffraction wave heights at the sixth, sixth, and sixth preset small-angle endpoints of the secondary wave and the focusing depth are obtained through scatter plots or curve fitting.

[0044] This invention obtains the actual depth and radius of curvature of the groove, as well as parameters such as the beam refraction angle and focusing depth of the phased array ultrasonic probe. By combining the actual depth of the groove with the depth of the diffracted wave at the endpoint and the depth of the reflected wave at the end corner, the relative quantitative accuracy under the secondary wave condition can be calculated. This allows for the determination of the true quantitative accuracy when using the above-mentioned detection process and method to quantify the depth of real defects (grooved defects), thereby effectively inferring a more realistic defect depth. By combining the correlation between parameters such as the radius of curvature at the endpoint, the beam refraction angle, and the focusing depth with the wave height of the diffracted wave at the endpoint, the influence of the refraction angle and focusing depth on the quantitative accuracy is explored, thus obtaining an optimized quantitative process. Attached Figure Description

[0045] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0046] Figure 1 A schematic diagram of the structure of an ultrasonic endpoint diffraction characteristic verification device provided in an embodiment of the present invention;

[0047] Figure 2A schematic diagram of a test block structure for primary wave verification of an ultrasonic endpoint diffraction characteristic verification device provided in an embodiment of the present invention;

[0048] Figure 3 A schematic diagram of a test block structure for secondary wave verification of an ultrasonic endpoint diffraction characteristic verification device provided in an embodiment of the present invention;

[0049] Figure 4 This is a flowchart illustrating the working method of an ultrasonic endpoint diffraction characteristic verification device provided in an embodiment of the present invention. Detailed Implementation

[0050] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0051] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0052] Example 1

[0053] This invention provides a device for verifying the diffraction characteristics of ultrasonic endpoints, such as... Figure 1 As shown, the device includes: a test block, a phased array ultrasonic detector, and a phased array ultrasonic probe;

[0054] The test block includes: a test block substrate and multiple grooves etched on the test block substrate. The test block substrate is a square body, including: a first surface and a second surface located on opposite sides, and a first end face and a second end face located on opposite sides. Multiple grooves are etched on the first surface or the second surface of the opposite side of the test block substrate, and the spacing between adjacent grooves is equal. The radius of curvature of the multiple grooves is a preset multiple of the wavelength of the ultrasonic wave type to be calibrated, and the preset multiple increases sequentially from one side of the first end face to one side of the second end face.

[0055] It should be noted that this embodiment uses a rectangular block substrate as an example. The equal spacing of the grooves etched on the first or second surface of the substrate ensures quantitative evaluation and prevents inaccurate data in subsequent calculations of relative quantitative accuracy due to different spacing. The end point of the groove is the end embedded inside the substrate (i.e., the top), and the corner of the groove is the end where the groove connects to the lower surface of the substrate (i.e., the bottom). The grooves are processed using electrical discharge machining or wire cutting technology, and the etched shape can be U-shaped, V-shaped, etc. The radius of curvature of the groove endpoints increases sequentially according to a preset multiple to form grooves with gradient performance in the substrate, ensuring that the relative quantitative accuracy of the endpoint diffraction method and the correlation between the diffracted wave height and the endpoint radius of curvature can be calculated under different endpoint radii of curvature. There is a correlation between the wavelength of the ultrasonic wave and the radius of curvature of the groove endpoints. When the radius of curvature of the groove is a preset multiple of the wavelength of the diffracted wave mode to be checked, the diffracted wave can produce the expected diffraction effect at the groove.

[0056] For example, the radius of curvature of the end point of the groove is 0.1 times, 0.2 times, 0.4 times, 0.6 times, 0.8 times, and 1.0 times the wavelength of the waveform to be checked, from left (the side closer to the first end face) to right (the side closer to the second end face).

[0057] Specifically, the distance between the groove near the first end face and the first end face of the test block substrate is equal to the distance between the groove near the second end face and the second end face of the test block substrate; the distance is not less than half the span of the undeflected sound wave emitted at the refraction angle of the wedge beam of the phased array ultrasonic probe.

[0058] Understandably, if the spacing between the grooves is less than half the span of the undeflected sound wave emitted from the wedge's refraction angle, the ultrasonic wave may encounter a blind zone during propagation, failing to cover the groove under test and thus affecting the detection results. Since the wedge of the phased array ultrasonic probe refracts the sound wave at a fixed angle, and the emitted sound beam also has a certain span, the spacing between the grooves on the test block should not be less than half the beam span. This ensures that the propagation path of the sound wave in the test block is symmetrical and the refraction angle is appropriate, preventing interference from non-target grooves on the echo signal and improving the accuracy of the detection results.

[0059] Specifically, the spacing between multiple grooves is not less than the wedge length of the phased array ultrasonic probe, and the spacing is such that the secondary wave axis of the undeflected sound wave emitted from the wedge of the phased array ultrasonic probe crosses the adjacent groove to scan the next groove.

[0060] Specifically, multiple grooves are engraved at preset angles, and the depth and length directions are the same.

[0061] For example, the preset angle refers to the angle between the depth direction and the lower surface. The preset angle can be 90°, 80°, 70°, 60°, 50°, 45°, etc., and the embodiments of the present invention do not limit this.

[0062] A phased array ultrasonic testing instrument is used to excite a phased array ultrasonic probe to generate ultrasonic waves and record the echo data of endpoint diffraction waves and end-corner reflection waves formed at multiple grooves on a test block. Based on the echo data, the instrument calculates the relative quantitative accuracy of the primary and secondary waves, the correlation between the diffraction wave height and the endpoint curvature radius, and the correlation between the diffraction wave height and the beam refraction angle and focusing depth using the endpoint diffraction method. The primary wave represents the echo received by the phased array ultrasonic probe set on the surface without grooves, and the secondary wave represents the echo received by the phased array ultrasonic probe set on the surface with grooves.

[0063] It should be noted that the phased array ultrasonic testing instrument has multiple array elements on the corresponding probe. The transmission and reception of each array element can be controlled. The probe is placed on the test block to be tested, and then the ultrasonic waves are emitted by the array elements to generate diffraction echoes at the ends of the grooves on the test block. The testing instrument will record these echo data.

[0064] The phased array ultrasonic probe is used to set on the coupling surface of the test block to emit ultrasonic waves generated by the phased array ultrasonic detector and to receive the endpoint diffraction waves and end-corner reflection waves formed at multiple grooves and return them to the phased array ultrasonic detector.

[0065] It should be noted that a phased array ultrasonic probe is a non-destructive testing instrument, and its working principle is based on the propagation and reflection of ultrasonic waves. When the phased array ultrasonic probe is coupled to the surface of the test specimen, ultrasonic waves will enter the interior of the test object from the probe and propagate along different paths. If there are grooves in the material it passes through, the ultrasonic waves will diffract at the ends of the grooves. The diffracted echoes can be received by the probe and processed and displayed by the ultrasonic testing instrument.

[0066] For example, refer to Figure 2 or Figure 3 , Figure 2 This is a schematic diagram of the verification structure for the primary wave diffraction characteristics of the present invention. Figure 3 This is a schematic diagram of the verification structure for the secondary wave diffraction characteristics of the present invention. Figure 2 or Figure 3The surface roughness of the test block substrate is no greater than Ra = 3.2 μm, and the substrate is made of 20# steel. The phased array ultrasonic probe wedge has a refraction angle of 50°, a wedge length of 25 mm, a frequency of 5 MHz, and an ultrasonic shear wave wavelength of λ = 0.65 mm. The radii of curvature of the end points of the grooves (T1, T2, T3, T4, T5, T6) are 0.065 mm, 0.13 mm, 0.26 mm, 0.39 mm, 0.52 mm, and 0.65 mm respectively from left (first end face) to right (second end face). The test block height is 30 mm, the test block width is 40 mm, the groove depth is 3 mm, and the grooves are through grooves. The groove spacing is 50 mm, and the distance between the leftmost and rightmost grooves and the left and right end faces is 40 mm.

[0067] Figure 2 In the middle, the phased array ultrasonic probe is set on the upper surface (first surface) of the test block substrate, where along the dashed line H ai The sound wave is a diffracted wave at the preset large-angle endpoint of the first wave, along the dashed line H. bi The sound wave is the diffracted wave at the preset small-angle endpoint of the first wave, and the sound wave along the solid line is the reflected wave at the end angle of the first wave.

[0068] Figure 3 In the middle, the phased array ultrasonic probe is set on the lower surface (second surface) of the test block substrate, where along the dashed line H ai The sound wave is a secondary wave with a pre-defined large-angle endpoint diffraction wave, along the dashed line H. bi The sound wave is a diffracted wave at the preset small-angle endpoint of the secondary wave, and the sound wave along the solid line is the reflected wave at the end angle of the secondary wave.

[0069] It should be noted that, Figure 2 or Figure 3 The positions shown are for illustrative purposes only. In actual operation, the probe position needs to be adjusted according to the characteristics of the ultrasonic probe and the experimental requirements. This embodiment does not impose any restrictions on this.

[0070] The ultrasonic endpoint diffraction characteristic verification device provided in this invention testes multiple grooves etched on a test block with different radii of curvature, and the spacing between adjacent grooves is equal. By changing a preset multiple of the endpoint curvature radius, ultrasonic endpoint diffraction characteristic data under multiple different conditions can be obtained during testing. By using a phased array ultrasonic probe to receive endpoint diffracted waves and end-angle reflected waves, the relative quantitative accuracy of the primary and secondary waves can be calculated based on the endpoint diffraction method, as well as the correlation between diffracted wave height and endpoint curvature radius, beam refraction angle, and focusing depth. This provides a basis for quantitative process improvement of the phased array ultrasonic endpoint diffraction method, thereby contributing to the improvement of the quantitative accuracy of the endpoint diffraction method.

[0071] Example 2

[0072] This invention provides a method for operating a device for verifying the diffraction characteristics of ultrasonic endpoints, such as... Figure 4 As shown, the method is based on the apparatus provided in Example 1 and includes the following steps:

[0073] Step S1: Set the phased array ultrasonic probe at different positions on the first and second surfaces of the test block.

[0074] It should be noted that the distinction between primary and secondary waves is mainly based on the position of the ultrasonic probe. A primary wave refers to the echo received by a phased array ultrasonic probe positioned on the ungrooved surface; that is, the echo is reflected directly from the grooved area within the test block. A secondary wave refers to the echo received by a phased array ultrasonic probe positioned on the grooved surface; that is, the echo is reflected from the ungrooved surface within the test block before being reflected back at the grooved area.

[0075] This invention employs a phased array ultrasonic detector to excite a phased array ultrasonic probe to emit ultrasonic waves to multiple grooves on a test block. The phased array ultrasonic detector records the echo data of the primary and secondary waves of the endpoint diffraction waves and end-angle reflection waves formed at multiple grooves. Based on the echo data, the relative quantitative accuracy of the primary and secondary waves, the correlation between the diffraction wave height and the endpoint curvature radius, and the correlation between the diffraction wave height and the beam refraction angle and focusing depth are calculated using the endpoint diffraction method. This allows for a more accurate evaluation of the performance of ultrasonic endpoint diffraction characteristics, providing a basis for quantitative process improvement of the phased array ultrasonic endpoint diffraction method, thereby helping to improve the quantitative accuracy of the endpoint diffraction method.

[0076] Specifically, multiple grooves are etched on the second surface of the test block substrate; the echo received by the phased array ultrasonic probe on the first surface is the primary wave, and the echo received by the phased array ultrasonic probe on the second surface is the secondary wave.

[0077] In this embodiment of the invention, the primary wave and the secondary wave are distinguished so that more accurate analysis and calculation can be performed based on these echo data. The diffraction characteristic data of these two types of waves can be recorded separately in a targeted manner, thereby achieving a more accurate and comprehensive verification of the diffraction characteristics of the test block.

[0078] Step S2: The phased array ultrasonic probe is excited by the phased array ultrasonic detector to emit ultrasonic waves to multiple grooves on the test block. The echo data of the first wave and the echo data of the end diffraction wave and end corner reflection wave formed at multiple grooves are recorded by the phased array ultrasonic detector.

[0079] Specifically, step S2 above includes:

[0080] a1: A phased array ultrasonic detector is used to excite the phased array ultrasonic probe set on the first surface of the test block to emit ultrasonic waves to multiple grooves on the test block with the same sound beam refraction angle and the same focusing depth.

[0081] a2: Record the first preset large-angle endpoint diffraction wave height, the first preset small-angle endpoint diffraction wave height, the first preset large-angle endpoint diffraction wave depth, the first preset small-angle endpoint diffraction wave depth, and the first end-angle reflection wave depth of the primary wave echo at multiple groove locations.

[0082] a3: Using a phased array ultrasonic detector with the same focusing depth and different beam refraction angles, the phased array ultrasonic probe set on the first surface of the test block is excited to emit ultrasonic waves to any groove of the test block.

[0083] a4: Record the wave height of the second preset large-angle endpoint diffraction wave, the wave height of the second preset small-angle endpoint diffraction wave, the depth of the second preset large-angle endpoint diffraction wave, the depth of the second preset small-angle endpoint diffraction wave, and the depth of the second end-angle reflection wave of the primary wave echo at the groove.

[0084] a5: A phased array ultrasonic detector is used to excite the phased array ultrasonic probe set on the first surface of the test block to emit ultrasonic waves to any groove of the test block with different focusing depths and the same sound beam refraction angle.

[0085] a6: Record the wave height of the diffracted wave at the third preset large angle endpoint, the wave height of the diffracted wave at the third preset small angle endpoint, the depth of the diffracted wave at the third preset large angle endpoint, the depth of the diffracted wave at the third preset small angle endpoint, and the depth of the reflected wave at the third end angle, respectively.

[0086] It should be noted that the beam refraction angle refers to the angle formed by the refraction of ultrasonic waves on the surface of the test block. The focusing depth refers to the depth range at which the ultrasonic probe can focus and concentrate ultrasonic waves. The preset large angle and preset small angle refer to the different emission angles at which the ultrasonic probe emits ultrasonic waves. These angles can be preset manually and can be adjusted by controlling the emission delay of each array element. In this embodiment, by adjusting the emission delay differences of different array elements, the probe structure and emission control are adjusted to generate different control conditions and record different echo data.

[0087] For example, a phased array ultrasonic probe is coupled to the upper surface of the test block (the first surface, which is not grooved and therefore uses a single wave) and three measurements are performed.

[0088] The control conditions for the first measurement were: the same refraction angle and focusing depth, but different radii of curvature at the end of the groove.

[0089] The control conditions for the second measurement were: the same focusing depth, different refraction angles Aj (j=1,2,……, representing different sound beam refraction angles), and the same radius of curvature at the end of the groove;

[0090] The control conditions for the third measurement were: the same refraction angle, different focusing depths Fk (k = 1, 2, ..., representing different focusing depths), and the same radius of curvature at the end of the groove;

[0091] In the first experiment, endpoint diffraction was used to quantify the six grooves on the lower surface of the test block from left to right using a single wave. In the second and third experiments, endpoint diffraction was used to quantify any groove on the lower surface of the test block using a single wave. A phased array ultrasonic detector was used to excite and receive three sets of groove large-angle endpoint diffraction waves, small-angle endpoint diffraction waves, and end-corner reflection waves.

[0092] In this embodiment of the invention, under three different control conditions of sound beam refraction angle, focusing depth, and endpoint curvature radius, the endpoint diffraction wave height, endpoint diffraction wave depth, and endpoint corner reflection wave depth of the primary wave echo data of the diffraction wave emitted by the phased array ultrasonic probe set on the first surface of the test block are recorded respectively, providing a data basis for subsequent calculation of correlation and relative quantitative accuracy.

[0093] Specifically, step S2 above also includes:

[0094] b1: A phased array ultrasonic detector is used to excite the phased array ultrasonic probe set on the second surface of the test block to emit ultrasonic waves to multiple grooves on the test block with the same sound beam refraction angle and the same focusing depth.

[0095] b2: Record the fourth preset large-angle endpoint diffraction wave height, the fourth preset small-angle endpoint diffraction wave height, the fourth preset large-angle endpoint diffraction wave depth, the fourth preset small-angle endpoint diffraction wave depth, and the fourth end-angle reflection wave depth of the secondary wave echo at multiple grooves respectively.

[0096] b3: Using a phased array ultrasonic detector with the same focusing depth and different beam refraction angles, the phased array ultrasonic probe set on the second surface of the test block is excited to emit ultrasonic waves to any groove of the test block.

[0097] b4: Record the wave height of the diffracted wave at the fifth preset large angle endpoint, the wave height of the diffracted wave at the fifth preset small angle endpoint, the depth of the diffracted wave at the fifth preset large angle endpoint, the depth of the diffracted wave at the fifth preset small angle endpoint, and the depth of the reflected wave at the fifth end angle, respectively.

[0098] b5: A phased array ultrasonic detector is used to excite the phased array ultrasonic probe set on the second surface of the test block to emit ultrasonic waves to any groove of the test block with different focusing depths and the same beam refraction angle.

[0099] b6: Record the wave height of the diffracted wave at the sixth preset large angle endpoint, the wave height of the diffracted wave at the sixth preset small angle endpoint, the depth of the diffracted wave at the sixth preset large angle endpoint, the depth of the diffracted wave at the sixth preset small angle endpoint, and the depth of the reflected wave at the sixth end angle, respectively.

[0100] For example, a phased array ultrasonic probe is coupled to the lower surface of the test block (the second surface, which is grooved and therefore uses a secondary wave) and three measurements are performed.

[0101] The control conditions for the first measurement were: the same refraction angle and focusing depth, but different radii of curvature at the end of the groove.

[0102] The control conditions for the second measurement were: the same focusing depth, different refraction angles Aj (j=1,2,……, representing different sound beam refraction angles), and the same radius of curvature at the end of the groove;

[0103] The control conditions for the third measurement were: the same refraction angle, different focusing depths Fk (k = 1, 2, ..., representing different focusing depths), and the same radius of curvature at the end of the groove;

[0104] In the first experiment, endpoint diffraction was used to quantify the six grooves on the lower surface of the test block from left to right using a secondary wave. In the second and third experiments, endpoint diffraction was used to quantify any groove on the lower surface of the test block using a secondary wave. A phased array ultrasonic detector was used to excite and receive three sets of groove large-angle endpoint diffraction waves, small-angle endpoint diffraction waves, and end-corner reflection waves.

[0105] In this embodiment of the invention, under three different control conditions of sound beam refraction angle, focusing depth, and endpoint curvature radius, the endpoint diffraction wave height, endpoint diffraction wave depth, and endpoint corner reflection wave depth of the secondary wave echo data of the diffraction wave emitted by the phased array ultrasonic probe set on the second surface of the test block are recorded respectively, providing a data basis for subsequent calculation of correlation and relative quantitative accuracy.

[0106] Step S3: Based on the echo data, calculate the relative quantitative accuracy of the primary and secondary waves, the correlation between the diffraction wave height and the radius of curvature of the endpoint, and the correlation between the diffraction wave height and the sound beam refraction angle and focusing depth using the endpoint diffraction method.

[0107] Specifically, step S3 above includes:

[0108] c1: Obtain the actual depth of the grooves, the radius of curvature of the endpoints, the beam refraction angle and focusing depth of the phased array ultrasonic probe for multiple grooves.

[0109] Specifically, the above parameters can be preset manually or measured by machines or process equipment to obtain the actual depth of the groove. The depth can be precisely measured using a focused ion beam or electron beam. The radius of curvature can be obtained through microscopic measurement using an optical microscope or atomic force microscope. The beam refraction angle and focusing depth can be obtained using acoustic and optical measurement equipment; this embodiment does not impose any limitations on these aspects.

[0110] c2: Based on the first preset large-angle endpoint diffraction wave depth, the first preset small-angle endpoint diffraction wave depth, the first end-corner reflection wave depth, the second preset large-angle endpoint diffraction wave depth, the second preset small-angle endpoint diffraction wave depth, the second end-corner reflection wave depth, the third preset large-angle endpoint diffraction wave depth, the third preset small-angle endpoint diffraction wave depth, and the third end-corner reflection wave depth, and according to the endpoint diffraction method, the first groove quantitative depth, the second groove quantitative depth, and the third groove quantitative depth are calculated based on the formula.

[0111] D ni =|D ci -D ai |or D ni =|D bi -D ai | / 2;

[0112] Among them, D ni To determine the depth of the groove, D ci D represents the depth of the reflected wave at the end corner. ai To preset the depth of the diffracted wave at the large-angle endpoint, D bi The depth of the diffraction wave at the preset small-angle endpoint is denoted by i, where i is the groove number.

[0113] c3: Based on the quantitative depth of the first groove, the quantitative depth of the second groove, the quantitative depth of the third groove, and the actual depth of the groove, and according to the endpoint diffraction method, the first relative quantitative accuracy, the second relative quantitative accuracy, and the third relative quantitative accuracy of the primary wave are calculated based on the following formula.

[0114] Δ i1 =|D ni -D0|×100%;

[0115] Where, Δ i1 For relative quantitative accuracy, D0 is the actual depth of the groove, D ni The depth of the groove is quantified, and i is the groove number;

[0116] c4: Based on the first preset large-angle endpoint diffraction wave height, the first preset small-angle endpoint diffraction wave height, and the endpoint curvature radius, the correlation between the first preset large-angle endpoint diffraction wave height, the first preset small-angle endpoint diffraction wave height, and the endpoint curvature radius of the primary wave is obtained by scatter plot or fitting curve method.

[0117] c5: Based on the diffraction wave heights at the second and third preset large-angle endpoints, the second and third preset small-angle endpoints, the beam refraction angle, and the focusing depth, the correlation between the diffraction wave heights at the second and third preset large-angle endpoints of the primary wave and the beam refraction angle, as well as the correlation between the diffraction wave heights at the third and third preset small-angle endpoints of the primary wave and the focusing depth, is obtained through scatter plots or curve fitting.

[0118] For example, taking step c4, a scatter plot can be used to show the relationship between the height of the first pre-set large-angle endpoint diffracted wave and the radius of curvature of the endpoint. A scatter plot can be drawn for each diffracted wave height corresponding to its radius of curvature, and the relationship between the points can be preliminarily determined based on the distribution of the scatter points. If the scatter plot has already shown a preliminary linear or nonlinear relationship between the variables, this relationship can be further determined by fitting a curve. Statistical methods such as least squares can be used to fit a curve reflecting the quantitative relationship between the variables. This yields the correlation curve between the height of the first pre-set large-angle endpoint diffracted wave and the radius of curvature of the endpoint. Similarly, for step c5, the same method can be used to show the relationship between the height of the second endpoint diffracted wave and the beam refraction angle, and the height of the third endpoint diffracted wave and the focusing depth.

[0119] This invention obtains the actual depth and radius of curvature of the groove, as well as parameters such as the beam refraction angle and focusing depth of the phased array ultrasonic probe. By combining the actual depth of the groove with the depth of the diffracted wave at the endpoint and the depth of the reflected wave at the end corner, the relative quantitative accuracy under the primary wave condition can be calculated. This allows for the determination of the true quantitative accuracy when using the above-mentioned detection process and method to quantify the depth of real defects (grooved defects), thereby effectively inferring a more realistic defect depth. By combining the correlation between parameters such as the radius of curvature at the endpoint, the beam refraction angle, and the focusing depth with the wave height of the diffracted wave at the endpoint, the influence of the refraction angle and focusing depth on the relative quantitative accuracy is explored, thus obtaining an optimized quantitative process.

[0120] Specifically, step S3 above also includes:

[0121] d1: Obtain the actual depth of the grooves, the radius of curvature of the endpoints, the beam refraction angle and focusing depth of the phased array ultrasonic probe for multiple grooves.

[0122] d2: Based on the fourth preset large-angle endpoint diffraction wave depth, the fourth preset small-angle endpoint diffraction wave depth, the fourth end-angle reflection wave depth, the fifth preset large-angle endpoint diffraction wave depth, the fifth preset small-angle endpoint diffraction wave depth, the fifth end-angle reflection wave depth, the sixth preset large-angle endpoint diffraction wave depth, the sixth preset small-angle endpoint diffraction wave depth, and the sixth end-angle reflection wave depth, and according to the endpoint diffraction method, the fourth groove quantitative depth, the fifth groove quantitative depth, and the sixth groove quantitative depth are calculated based on the following formula;

[0123] DD ni =|DD ci -DD ai |or DD ni =|DD bi -DD ai | / 2;

[0124] Among them, DD ni To determine the depth of the groove, DD Ci DD represents the depth of the reflected wave at the end corner. ai To preset the depth of the diffraction wave at the large-angle endpoint, DD bi The depth of the diffraction wave at the preset small-angle endpoint is denoted by i, where i is the groove number.

[0125] d3: Based on the quantitative depths of the fourth, fifth, and sixth grooves corresponding to multiple grooves and the actual groove depths, the fourth relative quantitative accuracy, fifth relative quantitative accuracy, and sixth relative quantitative accuracy of the secondary wave are calculated according to the following formulas.

[0126] Δ i2 =|DD ni -D0|×100%;

[0127] Where Δi2 is the relative quantitative accuracy, D0 is the actual depth of the groove, and DD ni The depth of the groove is quantified, and i is the groove number.

[0128] d4: Based on the fourth preset large-angle endpoint diffraction wave height, the fourth preset small-angle endpoint diffraction wave height, and the endpoint curvature radius, the correlation between the fourth preset large-angle endpoint diffraction wave height, the fourth preset small-angle endpoint diffraction wave height, and the endpoint curvature radius of the secondary wave is obtained by scatter plot or fitting curve method.

[0129] d5: Based on the diffraction wave heights at the fifth, sixth, fifth, and sixth preset large-angle endpoints, the correlation between the diffraction wave heights at the fifth, sixth, and sixth preset small-angle endpoints and the beam refraction angle and the focusing depth, the correlation between the diffraction wave heights at the fifth, sixth, and sixth preset small-angle endpoints and the beam refraction angle, and the correlation between the diffraction wave heights at the sixth, sixth, and sixth preset small-angle endpoints and the focusing depth of the secondary wave are obtained through scatter plots or curve fitting.

[0130] It should be noted that the calculation of the correlation in steps d4 and d5 is the same as that in steps c4 and c5 above, and will not be repeated here.

[0131] This invention obtains the actual depth and radius of curvature of the groove, as well as parameters such as the beam refraction angle and focusing depth of the phased array ultrasonic probe. By combining the actual depth of the groove with the depth of the diffracted wave at the endpoint and the depth of the reflected wave at the end corner, the relative quantitative accuracy under the secondary wave condition can be calculated. This allows for the determination of the true quantitative accuracy when using the above-mentioned detection process and method to quantify the depth of real defects (grooved defects), thereby effectively inferring a more realistic defect depth. By combining the correlation between parameters such as the radius of curvature at the endpoint, the beam refraction angle, and the focusing depth with the wave height of the diffracted wave at the endpoint, the influence of the refraction angle and focusing depth on the quantitative accuracy is explored, thus obtaining an optimized quantitative process.

[0132] The order of steps S1 to S3 in this invention is not limited in this invention. The figures are for illustrative purposes only and may differ from the steps shown or described in the figures in some cases.

[0133] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A device for verifying the diffraction characteristics of an ultrasonic endpoint, characterized in that, include: Test block, phased array ultrasonic testing instrument and phased array ultrasonic probe; The test block includes: a test block substrate and multiple grooves etched on the test block substrate. The test block substrate is a square body, including: a first surface and a second surface located on opposite sides, and a first end face and a second end face located on opposite sides. The multiple grooves are etched on the first surface or the second surface of the opposite side of the test block substrate, and the spacing between adjacent grooves is equal. The radius of curvature of the multiple grooves is a preset multiple of the wavelength of the ultrasonic wave type to be calibrated, and the preset multiple increases sequentially from one side of the first end face to one side of the second end face. The phased array ultrasonic testing instrument is used to excite the phased array ultrasonic probe to generate ultrasonic waves and record the echo data of the endpoint diffraction waves and end-corner reflection waves formed by the ultrasonic waves at multiple grooves on the test block. Based on the echo data, the instrument calculates the relative quantitative accuracy of the primary and secondary waves, the correlation between the diffraction wave height and the endpoint curvature radius, and the correlation between the diffraction wave height and the beam refraction angle and the focusing depth of the phased array ultrasonic testing instrument using the endpoint diffraction method. The primary wave represents the echo received by the phased array ultrasonic probe set on the surface without grooves, and the secondary wave represents the echo received by the phased array ultrasonic probe set on the surface with grooves. The phased array ultrasonic probe is used to be placed on the coupling surface of the test block to emit ultrasonic waves generated by the phased array ultrasonic detector and to receive the echoes of the endpoint diffraction waves and end corner reflection waves formed at multiple grooves and return them to the phased array ultrasonic detector. The recording of echo data of endpoint diffraction waves and corner reflection waves formed by the ultrasonic waves at multiple grooves on the test block includes: using a phased array ultrasonic detector with the same beam refraction angle and the same focusing depth, exciting a phased array ultrasonic probe set on the first surface of the test block to emit ultrasonic waves to multiple grooves on the test block; recording the first preset large-angle endpoint diffraction wave height, the first preset small-angle endpoint diffraction wave height, the first preset large-angle endpoint diffraction wave depth, the first preset small-angle endpoint diffraction wave depth, and the first corner reflection wave depth of the primary echo at multiple grooves respectively; using a phased array ultrasonic detector with the same focusing depth and different beam refraction angles, exciting a phased array ultrasonic probe set on the first surface of the test block to emit ultrasonic waves to multiple grooves on the test block. A phased array ultrasonic probe emits ultrasonic waves to any groove on the test block; the wave heights of the second preset large-angle endpoint diffraction wave, the second preset small-angle endpoint diffraction wave, the second preset large-angle endpoint diffraction wave depth, the second preset small-angle endpoint diffraction wave depth, and the second end-angle reflection wave depth of the primary echo at the groove are recorded respectively; using a phased array ultrasonic detector with different focusing depths and the same beam refraction angle, the phased array ultrasonic probe set on the first surface of the test block emits ultrasonic waves to any groove on the test block; the wave heights of the third preset large-angle endpoint diffraction wave, the third preset small-angle endpoint diffraction wave, and the third preset large-angle endpoint diffraction wave depth of the primary echo at the groove are recorded respectively. The diffraction depth at the small-angle endpoint and the reflection depth at the third angle are preset. Using a phased array ultrasonic detector with the same beam refraction angle and focusing depth, ultrasonic waves are emitted from a phased array ultrasonic probe located on the second surface of the test block and sent to multiple grooves on the test block. The diffraction height at the fourth preset large-angle endpoint, the diffraction height at the fourth preset small-angle endpoint, the diffraction depth at the fourth preset large-angle endpoint, the diffraction depth at the fourth preset small-angle endpoint, and the reflection depth at the fourth angle are recorded for the secondary wave echoes at multiple grooves. Using a phased array ultrasonic detector with the same focusing depth and different beam refraction angles, ultrasonic waves are emitted from a phased array ultrasonic probe located on the second surface of the test block and sent to any groove on the test block. The heights of the diffracted waves at the fifth preset large-angle endpoint, the fifth preset small-angle endpoint, the depths of the diffracted waves at the fifth preset large-angle endpoint, the depths of the diffracted waves at the fifth preset small-angle endpoint, and the depth of the reflected waves at the fifth corner are recorded respectively. A phased array ultrasonic detector is used to excite the phased array ultrasonic probe set on the second surface of the test block to emit ultrasonic waves to any groove of the test block with different focusing depths and the same beam refraction angle. The heights of the diffracted waves at the sixth preset large-angle endpoint, the sixth preset small-angle endpoint, the depths of the diffracted waves at the sixth preset large-angle endpoint, the depths of the diffracted waves at the sixth preset small-angle endpoint, and the depth of the reflected waves at the sixth corner are recorded respectively.

2. The device for verifying the diffraction characteristics of ultrasonic endpoints according to claim 1, characterized in that, The distance between the groove near the first end face and the first end face of the test block substrate is equal to the distance between the groove near the second end face and the second end face of the test block substrate; the distance is not less than half the span of the undeflected sound wave emitted at the wedge beam refraction angle of the phased array ultrasonic probe.

3. The device for verifying the diffraction characteristics of ultrasonic endpoints according to claim 2, characterized in that, The spacing between the multiple grooves is not less than the length of the wedge of the phased array ultrasonic probe, and the spacing is such that the secondary wave axis of the undeflected sound wave emitted from the wedge of the phased array ultrasonic probe can cross the adjacent groove to scan the next groove.

4. The device for verifying the diffraction characteristics of ultrasonic endpoints according to claim 1, characterized in that, The multiple grooves are engraved at a preset angle, and the depth and length directions are the same.

5. A method for operating a device for verifying the diffraction characteristics of an ultrasonic endpoint, characterized in that, The method for verifying the ultrasonic endpoint diffraction characteristics based on the device described in any one of claims 1-4 includes: The phased array ultrasonic probes were respectively placed at different positions on the first and second surfaces of the test block; The phased array ultrasonic probe is excited by a phased array ultrasonic detector to emit ultrasonic waves to multiple grooves on the test block. The echo data of the first wave and the echo data of the end diffraction wave and end corner reflection wave formed at multiple grooves are recorded by the phased array ultrasonic detector. Based on the echo data, the relative quantitative accuracy of the primary and secondary waves, the correlation between the diffraction wave height and the endpoint curvature radius, and the correlation between the diffraction wave height and the sound beam refraction angle and focusing depth are calculated using the endpoint diffraction method.

6. The operating method of the ultrasonic endpoint diffraction characteristic verification device according to claim 5, characterized in that, The plurality of grooves are etched on the second surface of the test block substrate; the echo received by the phased array ultrasonic probe on the first surface is a primary wave, and the echo received by the phased array ultrasonic probe on the second surface is a secondary wave.

7. The operating method of the ultrasonic endpoint diffraction characteristic verification device according to claim 6, characterized in that, A phased array ultrasonic detector is used to excite the phased array ultrasonic probe to emit ultrasonic waves to the grooves of the test block. The phased array ultrasonic detector records the echo data of the primary wave of the end-point diffraction wave and the end-corner reflection wave formed at the groove, including: A phased array ultrasonic detector is used to excite the phased array ultrasonic probe set on the first surface of the test block to emit ultrasonic waves to multiple grooves of the test block with the same sound beam refraction angle and the same focusing depth. Record the first preset large angle endpoint diffraction wave height, the first preset small angle endpoint diffraction wave height, the first preset large angle endpoint diffraction wave depth, the first preset small angle endpoint diffraction wave depth, and the first end angle reflection wave depth of the primary wave echo at multiple groove locations respectively. A phased array ultrasonic detector is used to excite the phased array ultrasonic probe set on the first surface of the test block to emit ultrasonic waves to any groove of the test block with the same focusing depth and different sound beam refraction angles. Record the wave height of the second preset large-angle endpoint diffraction wave, the wave height of the second preset small-angle endpoint diffraction wave, the depth of the second preset large-angle endpoint diffraction wave, the depth of the second preset small-angle endpoint diffraction wave, and the depth of the second end-angle reflected wave of the primary wave echo at the groove location, respectively. A phased array ultrasonic detector is used to excite the phased array ultrasonic probe set on the first surface of the test block to emit ultrasonic waves to any groove of the test block with different focusing depths and the same sound beam refraction angle. Record the wave height of the diffracted wave at the third preset large angle endpoint, the wave height of the diffracted wave at the third preset small angle endpoint, the depth of the diffracted wave at the third preset large angle endpoint, the depth of the diffracted wave at the third preset small angle endpoint, and the depth of the reflected wave at the third end angle of the primary wave echo at the groove.

8. The operating method of the ultrasonic endpoint diffraction characteristic verification device according to claim 6, characterized in that, A phased array ultrasonic detector is used to excite the phased array ultrasonic probe to emit ultrasonic waves to the grooves of the test block. The phased array ultrasonic detector records the echo data of the secondary waves of the endpoint diffraction wave and the end corner reflection wave formed at the groove, including: A phased array ultrasonic detector is used to excite the phased array ultrasonic probe set on the second surface of the test block to emit ultrasonic waves to multiple grooves of the test block with the same sound beam refraction angle and the same focusing depth. Record the wave height of the fourth preset large-angle endpoint diffraction wave, the wave height of the fourth preset small-angle endpoint diffraction wave, the depth of the fourth preset large-angle endpoint diffraction wave, the depth of the fourth preset small-angle endpoint diffraction wave, and the depth of the fourth corner reflection wave at multiple groove locations. A phased array ultrasonic detector is used to excite ultrasonic waves from a phased array ultrasonic probe located on the second surface of the test block to any groove of the test block with the same focusing depth and different beam refraction angles. Record the wave height of the diffracted wave at the fifth preset large angle endpoint, the wave height of the diffracted wave at the fifth preset small angle endpoint, the depth of the diffracted wave at the fifth preset large angle endpoint, the depth of the diffracted wave at the fifth preset small angle endpoint, and the depth of the reflected wave at the fifth end angle, respectively. A phased array ultrasonic detector is used to excite the phased array ultrasonic probe set on the second surface of the test block to emit ultrasonic waves to any groove of the test block with different focusing depths and the same sound beam refraction angle. Record the wave height of the diffracted wave at the sixth preset large angle endpoint, the wave height of the diffracted wave at the sixth preset small angle endpoint, the depth of the diffracted wave at the sixth preset large angle endpoint, the depth of the diffracted wave at the sixth preset small angle endpoint, and the depth of the reflected wave at the sixth end angle of the secondary wave echo at the groove.

9. The operating method of the ultrasonic endpoint diffraction characteristic verification device according to claim 7, characterized in that, Based on the echo data, the relative quantitative accuracy of the primary wave, the correlation between the diffracted wave height and the endpoint curvature radius, and the correlation between the diffracted wave height and the beam refraction angle and focusing depth are calculated using the endpoint diffraction method, including: Obtain the actual depth of the grooves, the radius of curvature at the endpoints, and the beam refraction angle and focusing depth of the phased array ultrasonic probe for multiple grooves; Based on the first preset large-angle endpoint diffraction wave depth, the first preset small-angle endpoint diffraction wave depth, the first end-angle reflection wave depth, the second preset large-angle endpoint diffraction wave depth, the second preset small-angle endpoint diffraction wave depth, the second end-angle reflection wave depth, the third preset large-angle endpoint diffraction wave depth, the third preset small-angle endpoint diffraction wave depth, and the third end-angle reflection wave depth, and according to the endpoint diffraction method, the first groove quantitative depth, the second groove quantitative depth, and the third groove quantitative depth are calculated based on the formula. ； in, To determine the depth of the groove, The depth of the reflected wave at the end corner. D ai To preset the depth of the diffracted wave at the large-angle endpoint, The preset small-angle endpoint diffraction wave depth, where i is the groove number; Based on the first groove quantitative depth, the second groove quantitative depth, the third groove quantitative depth, and the actual groove depth, and according to the endpoint diffraction method, the first relative quantitative accuracy, the second relative quantitative accuracy, and the third relative quantitative accuracy of the primary wave are calculated based on the following formulas. ； in, For relative quantitative accuracy, This represents the actual depth of the groove. To determine the depth of the groove; Based on the first preset large-angle endpoint diffraction wave height, the first preset small-angle endpoint diffraction wave height, and the endpoint curvature radius, the correlation between the first diffraction wave height of the primary wave and the endpoint curvature radius is obtained by scatter plot or curve fitting. Based on the diffraction wave heights at the second, third, second, and third preset large-angle endpoints, the diffraction wave heights at the second, third, and third preset small-angle endpoints, along with the sound beam refraction angle and focusing depth, the correlations between the diffraction wave heights at the second, third, and third preset large-angle endpoints of the primary wave and the sound beam refraction angle, as well as the correlations between the diffraction wave heights at the third, third, and third preset small-angle endpoints of the primary wave and the focusing depth, are obtained through scatter plots or curve fitting.

10. The operating method of the ultrasonic endpoint diffraction characteristic verification device according to claim 8, characterized in that, Based on the echo data, the relative quantitative accuracy of the secondary wave, the correlation between the diffracted wave height and the radius of curvature of the endpoint, and the correlation between the diffracted wave height and the beam refraction angle and focusing depth are calculated using the endpoint diffraction method, including: Obtain the actual depth of the grooves, the radius of curvature at the endpoints, and the beam refraction angle and focusing depth of the phased array ultrasonic probe for multiple grooves; Based on the fourth preset large-angle endpoint diffraction wave depth, the fourth preset small-angle endpoint diffraction wave depth, the fourth end-angle reflection wave depth, the fifth preset large-angle endpoint diffraction wave depth, the fifth preset small-angle endpoint diffraction wave depth, the fifth end-angle reflection wave depth, the sixth preset large-angle endpoint diffraction wave depth, the sixth preset small-angle endpoint diffraction wave depth, and the sixth end-angle reflection wave depth, and according to the endpoint diffraction method, the fourth groove quantitative depth, the fifth groove quantitative depth, and the sixth groove quantitative depth are calculated based on the following formula; ； in, To determine the depth of the groove, The depth of the reflected wave at the end corner. To preset the depth of the diffracted wave at the large-angle endpoint, The preset small-angle endpoint diffraction wave depth, where i is the groove number; Based on the quantitative depths of the fourth, fifth, and sixth grooves and the actual groove depths, the fourth relative quantitative accuracy, fifth relative quantitative accuracy, and sixth relative quantitative accuracy of the secondary wave are calculated using the following formulas. ； in, For relative quantitative accuracy, This represents the actual depth of the groove. The depth of the groove is quantified, and i is the groove number; Based on the fourth preset large-angle endpoint diffraction wave height, the fourth preset small-angle endpoint diffraction wave height, and the endpoint curvature radius, the correlation between the fourth diffraction wave height and the endpoint curvature radius of the secondary wave is obtained by scatter plot or fitting curve method. Based on the diffraction wave heights at the fifth, sixth, fifth, and sixth preset large-angle endpoints, the beam refraction angle, and the focusing depth, the correlation between the diffraction wave heights at the fifth, sixth, and sixth preset small-angle endpoints of the secondary wave and the beam refraction angle, and the correlation between the diffraction wave heights at the sixth, sixth, and sixth preset small-angle endpoints of the secondary wave and the focusing depth are obtained through scatter plots or curve fitting.

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