Conveying device

Abstract

The conveyance device (100) is provided with a magnetic scale (4) including a linear movement magnetic scale (4) formed linearly in a linear direction and a curved movement magnetic scale (5) formed curvedly in a curved direction. The linear movement magnetic scale (4) and the curved movement magnetic scale (5) are disposed in a state of being separated from each other.

Description

Technical Field

[0001] This invention relates to a conveying device, and more particularly to a conveying device comprising a slider and a drive module. Background Technology

[0002] Previously, transport devices equipped with sliders and drive modules were known. Such transport devices are disclosed, for example, in International Publication No. 2019 / 007199.

[0003] International Publication No. 2019 / 007199 discloses a linear transport device comprising a moving body (slider) and a stator module (drive module). The moving body is configured to move linearly or curvilinearly by means of a magnetic field generated in the stator module.

[0004] The moving body disclosed in International Publication No. 2019 / 007199 comprises a substrate, a first magnetic generating unit, and a second magnetic generating unit. The first and second magnetic generating units are mounted on the substrate in a contacting and adjacent manner. The first magnetic generating unit generates a magnetic field for detecting the position of the moving body during linear movement. The second magnetic generating unit generates a magnetic field for detecting the position of the moving body during curvilinear movement.

[0005] The stator module of International Publication No. 2019 / 007199 includes a magnetic reading unit that reads the magnetism of each of the first and second magnetic generating units. In a linear transport device, the position of a moving body is detected based on the magnetism of each of the first and second magnetic generating units read by the magnetic reading unit.

[0006] Existing technical documents

[0007] Patent documents

[0008] Patent Document 1: International Publication No. 2019 / 007199. Summary of the Invention

[0009] The problem that the invention aims to solve

[0010] However, in the linear transport device of International Publication No. 2019 / 007199, the first magnetic generating unit and the second magnetic generating unit are mounted on the substrate in a state of mutual contact and adjacent proximity. Therefore, in the linear transport device of International Publication No. 2019 / 007199, it is considered that magnetic interference is easily generated between the first magnetic generating unit and the second magnetic generating unit. Therefore, in the linear transport device of International Publication No. 2019 / 007199, it is desirable to more reliably suppress the magnetic interference between the first magnetic generating unit (magnetic scale for linear movement) and the second magnetic generating unit (magnetic scale for curved movement).

[0011] The present invention was made to solve the problems described above. One object of the present invention is to provide a transport device that can more reliably suppress magnetic interference between magnetic scales for linear movement and magnetic scales for curved movement.

[0012] Methods for solving problems

[0013] One aspect of the conveying device of the present invention includes: a slider capable of moving along a straight line and a curved line; a drive module for moving the slider along a straight line or a curved line; a magnetic scale comprising a magnetic scale for linear movement formed in a straight line along the straight line and a magnetic scale for curved movement formed in a curved line along the curved line, disposed on one of the slider and the drive module; and a magnetic sensor disposed on the other of the slider and the drive module for detecting the magnetism of the magnetic scale for linear movement and the magnetic scale for curved movement, wherein the magnetic scale for linear movement and the magnetic scale for curved movement are disposed in a mutually separated state.

[0014] In one aspect of the conveying device of the present invention, as described above, the magnetic scale for linear movement and the magnetic scale for curved movement are arranged in a mutually separated state. This ensures the distance between the magnetic scale for linear movement and the magnetic scale for curved movement, thereby more reliably suppressing magnetic interference between them.

[0015] In the aforementioned conveying device, it is preferable that the magnetic scale for linear movement and the magnetic scale for curved movement are arranged separately on the same or different surfaces. With this configuration, the magnetic scale for linear movement and the magnetic scale for curved movement can be arranged on the same or different surfaces of the same component, thus suppressing an increase in the number of components in the conveying device compared to the case where the magnetic scale for linear movement and the magnetic scale for curved movement are each arranged on different surfaces of the component.

[0016] In the aforementioned conveying device, it is preferable that the magnetic scale is disposed on the slider and the magnetic sensor is disposed on the drive module. With this configuration, since the drive module is fixed in a predetermined location, unlike the case where the magnetic sensor is disposed on a structure that moves like a slider, it is easier to connect the power supply device for supplying power to the magnetic sensor to the magnetic sensor.

[0017] In this case, it is preferable that the slider includes a slider frame, and the magnetic scale is arranged inside the slider frame with magnetic graduations for linear movement and magnetic graduations for curved movement facing the magnetic sensor in the vertical direction or in the width direction orthogonal to the vertical direction and the slider's movement direction. With this configuration, the magnetic scale can be housed inside the slider frame, thus reducing the likelihood of a large slider compared to a case where the slider frame is the same size and the magnetic scale is located outside the slider frame.

[0018] In the aforementioned conveying device, it is preferable that the magnetic scale further includes a base integrally provided with magnetic scales for linear movement and magnetic scales for curved movement. With this configuration, the magnetic scales for linear movement and curved movement are integrally provided on the same base. Therefore, even if the base expands or contracts due to temperature changes, the position measurement error of the slider corresponding to the expansion or contraction of the base can be generated relative to the magnetic scales for linear and curved movement. Thus, the position measurement errors of the magnetic scales for linear and curved movement can be made approximately equal. As a result, the same correction value can be used to correct the position measurement error during linear movement of the slider and the position measurement error during curved movement of the slider, thus facilitating control for position acquisition.

[0019] In this case, it is preferable that the base includes a first surface with magnetic scale for linear movement and a second surface with magnetic scale for curved movement, which is different from the first surface. With this configuration, compared to the case where the magnetic scale for linear movement and the magnetic scale for curved movement are arranged on the same surface, it is possible to suppress the increase in the size of the base in the arrangement direction of the magnetic scale for linear movement and the magnetic scale for curved movement, thus suppressing the enlargement of the transport device in the aforementioned arrangement direction.

[0020] In a transport device having a second surface different from the first surface described above, it is preferable that the second surface is disposed in the base on the back side of the first surface. If configured in this way, the first surface constitutes the surface of the base and the second surface constitutes the surface of the base on the back side, and the magnetic scales for linear movement and curved movement can be arranged in an overlapping manner when viewed from above, thereby suppressing the increase in size of the slider in the movement direction of the base.

[0021] In the aforementioned transport device where the second surface is disposed on the back side of the first surface of the base, it is preferable that the magnetic scale has a magnetic isolation plate disposed between the linear motion magnetic scale and the curved motion magnetic scale, thus magnetically isolating the magnetic scales emanating from each of them. With this configuration, the magnetic isolation plate can suppress magnetic interference between the linear motion magnetic scale and the curved motion magnetic scale, thereby reducing the distance required to separate them. Consequently, the required thickness of the base disposed between the linear motion magnetic scale and the curved motion magnetic scale can be reduced, thus preventing the magnetic scale, which includes the linear motion magnetic scale, the curved motion magnetic scale, and the base, from becoming too large.

[0022] In the conveying device having the aforementioned first and second surfaces, it is preferable that the second and first surfaces are substantially orthogonal to each other. With this configuration, since a magnetic scale for linear movement is provided on the first surface and a magnetic scale for curved movement is provided on the second surface, which is substantially orthogonal to the first surface, a magnetic sensor for detecting the magnetic field of the linear movement magnetic scale can be placed near a magnetic sensor for detecting the magnetic field of the curved movement magnetic scale. As a result, the space required to arrange the magnetic sensors for detecting the magnetic field of the linear movement magnetic scale and the magnetic sensor for detecting the magnetic field of the curved movement magnetic scale can be made more compact.

[0023] In the aforementioned transport device where the second surface is orthogonal to the first surface, it is preferable that the second surface and the first surface are approximately orthogonal to each other, and the second surface is a curved surface corresponding to the curvature of the magnetic scale for curved movement. With this configuration, since the curved surface of the second surface is formed along the curved direction of the slider, the position of the slider during curved movement can be appropriately detected using the magnetic scale for curved movement provided on the second surface.

[0024] In the transport device having the aforementioned base, it is preferable that the magnetic scale for linear movement and the magnetic scale for curved movement are arranged on the same surface of the base in a state where they are separated from each other in their arrangement direction. With this configuration, compared to arranging the magnetic scales for linear and curved movement in a direction perpendicular to the aforementioned same surface, it is possible to suppress the increase in space required for arranging the magnetic scales for linear and curved movement in a direction perpendicular to the aforementioned same surface.

[0025] In the aforementioned conveying device, it is preferable that the magnetic scale further includes a base portion having magnetic scales for linear movement and magnetic scales for curved movement. The magnetic scales for curved movement include a first curved scale portion formed in accordance with a first curved direction which is the curved direction, and a second curved scale portion formed in accordance with a second curved direction different from the first curved direction. The base portion includes: a linear position detection surface constituting the upper or lower surface of the base portion, and having the magnetic scales for linear movement; a first curved position detection surface protruding from the linear position detection surface, having the first curved scale portion; and a second curved position detection surface facing the first curved position detection surface, having the second curved scale portion. With this configuration, the position measurement of the slider during multiple curved movements in the first and second curved directions can be performed using the first and second curved scale portions. Therefore, position measurement can be performed even when moving in mutually opposite curved directions. This increases the degree of freedom of the slider's movement path.

[0026] In the aforementioned conveying device, it is preferable that a magnetic scale is disposed on the slider, with one end of the linear movement magnetic scale and one end of the curved movement magnetic scale positioned approximately at the same location in the slider's movement direction, and the other end of the linear movement magnetic scale and the other end of the curved movement magnetic scale positioned approximately at the same location. With this configuration, the lengths of the linear and curved movement magnetic scales in the slider's movement direction can be made approximately the same. Therefore, when either the linear or curved movement magnetic scale reaches its maximum length corresponding to the installation space, the other side can also reach the same maximum length. As a result, by arranging the spacing between the magnetic sensors corresponding to the maximum length, the magnetic sensors can be arranged with the spacing between them maximized, thus minimizing the number of magnetic sensors required for slider position measurement.

[0027] Invention Effects

[0028] According to the present invention, as described above, magnetic interference between the magnetic scale for linear movement and the magnetic scale for curved movement can be suppressed more reliably. Attached Figure Description

[0029] Figure 1 This is a top view showing the transport device according to the first embodiment.

[0030] Figure 2 It is along Figure 1 A sectional view along line 111-111.

[0031] Figure 3 It is along Figure 1 A sectional view along line 112-112.

[0032] Figure 4 This is a top view of the magnetic scale of the conveying device according to the first embodiment.

[0033] Figure 5 This is a bottom view of the magnetic scale of the conveying device according to the first embodiment.

[0034] Figure 6 It's enlarged. Figure 3 An enlarged view of part D.

[0035] Figure 7 This is a schematic diagram showing the state in which the slider of the conveying device of the first embodiment is moving in a straight section.

[0036] Figure 8 This is a schematic diagram showing the slider of the conveying device according to the first embodiment moving in a curved section.

[0037] Figure 9 The equivalent of the transport device in the second embodiment Figure 3 The enlarged image of part D.

[0038] Figure 10 This is a top view of the magnetic scale of the conveying device according to the third embodiment.

[0039] Figure 11 This is a perspective view showing the magnetic scale of the transport device according to the fourth embodiment.

[0040] Figure 12 This is a perspective view showing the magnetic scale of the transport device according to the fifth embodiment.

[0041] Figure 13 This is a perspective view showing the back magnetic yoke and magnetic scale of the conveying device of the first modified example of the first embodiment.

[0042] Figure 14 This is a cross-sectional view showing the magnetic scale and magnetic partition plate of the conveying device in a second variation of the second embodiment.

[0043] Figure 15 This is a cross-sectional view showing the magnetic scale and magnetic partition plate of the transport device in a third variation of the second embodiment.

[0044] Figure 16 This is a perspective view showing the magnetic scale and magnetic partition plate of the transport device in a third variation of the second embodiment. Detailed Implementation

[0045] Hereinafter, embodiments embodying the present invention will be described with reference to the accompanying drawings.

[0046] [First Implementation Method]

[0047] Reference Figures 1 to 8 The structure of the transport device 100 according to the first embodiment of the present invention will be described.

[0048] (Structure of the transport device)

[0049] like Figure 1 and Figure 2 As shown, the conveying device 100 is laid on the upper surface 101a of the platform 101. Additionally, although not shown, various robots are installed on the platform 101 to perform tasks such as transferring workpieces like substrates and mounting electronic components onto substrates. These robots are arranged along the surrounding path 102 of the slider 3, which will be described later. The conveying device 100 is a linear conveyor that uses a linear motor to move the slider 3 along the surrounding path 102.

[0050] The transport device 100 is configured to move the slider 3 to the working position of various robots. Specifically, the transport device 100 includes multiple linear motion drive modules 1, multiple curved motion drive modules 2, multiple sliders 3, a magnetic ruler 4, a magnetic sensor 5, and a magnetic sensor 6. The multiple linear motion drive modules 1 and the multiple curved motion drive modules 2 form a surrounding path 102 for the slider 3. It should be noted that the linear motion drive modules 1 and the curved motion drive modules 2 are examples of the "drive modules" in the claims.

[0051] Here, the direction of linear movement in the horizontal direction extended by the drive module 1 is defined as the X direction, one direction of the X direction is defined as X1, and the other direction of the X direction is defined as X2. The direction orthogonal to the X direction in the horizontal direction is defined as the Y direction, one direction of the Y direction is defined as Y1, and the other direction of the Y direction is defined as Y2. The direction orthogonal to both the X and Y directions is defined as the Z direction (vertical direction), one direction of the Z direction is defined as Z1 (up), and the other direction of the Z direction is defined as Z2 (down). Furthermore, the movement direction of the slider 3 is defined as the M direction, one direction of the M direction is defined as M1, and the other direction of the M direction is defined as M2. Additionally, the width direction orthogonal to both the M and Z directions is defined as the W direction, one direction of the W direction is defined as W1, and the other direction of the W direction is defined as W2.

[0052] Each of the multiple linear motion drive modules 1 is a linear conveyor module. The multiple linear motion drive modules 1 are mounted on the platform 101. The multiple linear motion drive modules 1 are connected in a straight line in the X direction. The multiple linear motion drive modules 1 are respectively positioned on the Y1 direction side and the Y2 direction side. Since each of the multiple linear motion drive modules 1 has the same structure, the description will focus on the one linear motion drive module 1 positioned on the Y2 direction side and the X1 direction side.

[0053] The linear motion drive module 1 is a device that moves the slider 3 along a linear direction in the X1 or X2 direction. The linear motion drive module 1 is configured to stop the slider 3 at the robot's working position and move the slider 3 to the next robot's working position after the operation. Furthermore, in the linear motion drive module 1, it is also possible to move the slider 3 while performing position and speed control during operation and to move the slider 3 to the next robot's working position after the operation.

[0054] Specifically, such as Figure 2 As shown, the linear motion drive module 1 includes a support member 11, a guide rail 12, and a linear motor stator 13.

[0055] The support member 11 supports the guide rail 12 and the linear motor stator 13. The support member 11 is formed of a metal such as aluminum. Thus, the support member 11 is a metal frame. It should be noted that although an example of a metal support member 11 in this embodiment has been shown, the support member 11 may also be made of resin.

[0056] The guide rail 12 functions to guide the slider 3. The guide rail 12 is disposed at the central portion of the upper surface of the support member 11 in the Y direction. The guide rail 12 extends in the X direction. The linear motor stator 13 is composed of multiple electromagnets. It should be noted that although the example shown in this embodiment is of the guide rail 12 disposed at the central portion of the upper surface of the support member 11 in the Y direction, the guide rail 12 may also be disposed at a position offset from the central portion of the upper surface of the support member 11 in the Y direction. Furthermore, the guide rail 12 may also be disposed on the side of the support member 11 instead of its upper surface.

[0057] like Figure 1 As shown, each of the multiple curved movement drive modules 2 is a linear conveyor module. The multiple curved movement drive modules 2 are disposed on the platform 101. The multiple curved movement drive modules 2 are connected along the curved direction. The multiple curved movement drive modules 2 are respectively disposed on the X1 direction side and the X2 direction side of the platform 101. Since each of the multiple curved movement drive modules 2 has the same construction, the description will focus on the one curved movement drive module 2 disposed on the X1 direction side. It should be noted that the curved direction is along the R direction (circumferential direction) around the central axis C1 (or C2) extending in the Z direction.

[0058] The curved movement drive module 2 is a device that moves the slider 3 along the R1 or R2 direction (curved direction). The curved movement drive module 2 is configured to stop the slider 3 at the robot's working position and move it to the next robot's working position after the operation. Furthermore, the curved movement drive module 2 can also move the slider 3 while performing position and speed control during operation and move it to the next robot's working position after the operation.

[0059] Specifically, such as Figure 3 As shown, the drive module 2 for curved movement includes a support member 21, a guide rail 22, and a linear motor stator 23.

[0060] The support member 21 supports the guide rail 22 and the linear motor stator 23. The support member 21 is formed of a metal such as aluminum. Thus, the support member 21 is a metal frame. It should be noted that although an example of a metal support member 21 in this embodiment has been shown, the support member 21 may also be made of resin.

[0061] The guide rail 22 functions to guide the slider 3. The guide rail 22 is disposed at the central portion of the upper surface of the support member 21 in a direction orthogonal to the central axis C1. The guide rail 22 extends along the R direction. The linear motor stator 23 is composed of multiple electromagnets. It should be noted that although the example shown in this embodiment is of the guide rail 22 disposed at the central portion of the upper surface of the support member 21 in a direction orthogonal to the central axis C1, the guide rail 22 may also be disposed at a position offset from the central portion of the upper surface of the support member 21 in a direction orthogonal to the central axis C1. Furthermore, the guide rail 22 may also be disposed on the side of the support member 21 instead of its upper surface.

[0062] like Figure 1 As shown, multiple sliders 3 are arranged on the surrounding path 102. Since all sliders 3 have the same structure, only one of the sliders 3 will be described.

[0063] Slider 3 is configured to move along both a straight line and a curved line. Here, slider 3 moves in the straight line guided by guide rail 12. Slider 3 moves in the curved line guided by guide rail 22. Here, the straight line is the direction of movement along the X-axis. The curved line is the direction of movement along the R-axis.

[0064] Thus, slider 3 is configured to slide in both straight lines and curves along the surrounding path 102. Specifically, as... Figure 2 and Figure 3 As shown, slider 3 includes slider frame 31, linear motor mover 32 and bracket 33.

[0065] The slider frame 31 is formed of a metal material such as aluminum. The linear motor mover 32 is disposed on the W1 direction side of the inner upper surface 36 of the slider frame 31, located between a pair of inner surfaces 34 and 35 facing each other in the W direction. The linear motor mover 32 has a back magnetic yoke (not shown) and a permanent magnet (not shown). The back magnetic yoke is a component that holds the permanent magnet and forms a magnetic circuit; it is formed of an ferro-based material such as iron or steel. The permanent magnet is arranged such that the N and S poles alternately face the Z2 direction in the M direction. The permanent magnet is arranged facing the linear motor stator 13 in the Z direction. The bracket 33 is a component for fixing the magnetic scale 4 to the slider frame 31. The bracket 33 is disposed on the inner surface 34 on the W2 direction side of the pair of inner surfaces 34 and 35. The bracket 33 is fixed to the slider frame 31 by a fastening member.

[0066] In slider 3, propulsion is generated by the magnetic interaction between the magnetic flux generated in the coil due to the supply of currents with different phases to the linear motor stator 13 (23) and the magnetic flux of the permanent magnet of the linear motor mover 32. That is, slider 3 can move in the X direction or the R direction by the aforementioned propulsion force.

[0067] (Magnetic ruler)

[0068] like Figure 2 and Figure 3 As shown, the magnetic scale 4 is a scale used to measure the position of the slider 3, which slides in a straight line and a curve. The magnetic scale 4 is provided on the slider 3. Here, the magnetic scale 4 is provided on the slider frame 31 via the bracket 33. The magnetic scale 4 is arranged inside the slider frame 31 such that the magnetic scale 41 for linear movement faces the magnetic sensor 5 in the Z direction and the magnetic scale 42 for curved movement faces the magnetic sensor 6 in the Z direction.

[0069] The magnetic ruler 4 includes a base 40, a magnetic scale 41 for linear movement, and a magnetic scale 42 for curved movement.

[0070] <Base>

[0071] The base 40 is a plate-shaped member formed using a magnetic material such as ferrite. Specifically, the base 40, when viewed from the Z1 direction, has a rectangular shape with the X direction as its length. The base 40 has a cuboid shape. The thickness of the base 40 in the Z direction is smaller than its width in the Y direction. Magnetic graduations 41 for linear movement and magnetic graduations 42 for curved movement are recorded on the base 40 by magnetization.

[0072] <Magnetic scale for linear and curved movement>

[0073] like Figure 2 and Figure 4 As shown, the magnetic scale 41 for linear motion is recorded on the base 40 to measure the position of the slider 3 when it moves on the linear motion drive module 1. The magnetic scale 41 for linear motion is integrally provided on the base 40. It should be noted that in Figure 2 and Figure 4 In the figure, linear movement is shown in dashed lines using magnetic scale 41, but this is merely a schematic diagram used to visualize linear movement using magnetic scale 41 in the figure.

[0074] The magnetic scale 41 for linear movement is formed in a straight line along the X direction. The magnetic scale 41 for linear movement has a length L1 in the X direction (the movement direction of slider 3 (M direction)). Multiple (three) magnetic scales 41 for linear movement are provided at the base 40. Each of the multiple magnetic scales 41 for linear movement has a different magnetization mode. That is, the period and phase of the magnetization mode are different in each of the multiple magnetic scales 41 for linear movement. It should be noted that the magnetic scale 41 for linear movement may not be three at the base 40, but rather two or four or more.

[0075] Multiple linear motion magnetic scales 41 are used for the identification and position detection of multiple sliders 3. Here, the position of the slider 3 is set correspondingly to the difference in the magnetic detection value of each of the multiple linear motion magnetic scales 41 with different periods and phases of magnetization modes.

[0076] like Figure 3 and Figure 5 As shown, the magnetic scale 42 for curve movement is recorded on the base 40 to determine the position of the slider 3 when it moves on the curve movement drive module 2. The magnetic scale 42 for curve movement is integrally provided on the base 40. It should be noted that in Figure 3 and Figure 5 In the figure, the movement of the curve is shown by a dashed line using magnetic scale 42, but this is merely a schematic diagram used to visualize the movement of the curve using magnetic scale 42 in the figure.

[0077] The magnetic scale 42 for curved movement is formed in a curved shape along the curved direction (R direction). The magnetic scale 42 for curved movement has a length L2 in the M direction. Multiple (3) magnetic scales 42 for curved movement are provided at the base 40. Each of the multiple magnetic scales 42 for curved movement has a different magnetization mode. That is, the period and phase of the magnetization mode are different in each of the multiple magnetic scales 42 for curved movement. It should be noted that the magnetic scale 42 for curved movement may not be provided in three locations at the base 40, but rather in two or four or more locations.

[0078] Multiple curve-moving magnetic scales 42 are used for the identification and position detection of multiple sliders 3. Here, the position of the slider 3 is set correspondingly to the difference in the magnetic detection value of each of the multiple curve-moving magnetic scales 42 with different periods and phases of magnetization modes.

[0079] (Positional relationship between the magnetic scale used for linear movement and the magnetic scale used for curved movement)

[0080] In this embodiment, such as Figure 6 As shown, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are integrally disposed on the base 40 in a separate state. The magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are integrally disposed on different surfaces of the base 40 in a separate state. Figure 6 In the figure, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are shown as dashed lines, but this is only a schematic diagram used to visualize the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement in the figure.

[0081] Specifically, the linear motion magnetic scale 41 is integrally disposed on the first surface 40a of the base 40. The first surface 40a is the upper surface of the base 40 in the Z1 direction. The linear motion magnetic scale 41 faces the magnetic sensor 5 in the Z direction (see reference). Figure 2 The magnetic scale 42 for curved movement is integrally disposed on the second surface 40b of the base 40. The second surface 40b is the lower surface of the base 40 in the Z2 direction. Thus, the second surface 40b is disposed on the back side of the first surface 40a in the base 40. The magnetic scale 42 for curved movement faces the magnetic sensor 6 in the Z direction (see reference). Figure 3 ).

[0082] In addition, such as Figure 7 and Figure 8 As shown, in the moving direction (M direction) of slider 3, one end 41a of the magnetic scale 41 for linear movement and one end 42a of the magnetic scale 42 for curved movement are positioned at approximately the same location. Here, one end 41a of the magnetic scale 41 for linear movement is the end of the magnetic scale 41 for linear movement in the M1 direction. One end 42a of the magnetic scale 42 for curved movement is the end of the magnetic scale 42 for curved movement in the M1 direction.

[0083] The other end 41b of the linear motion magnetic scale 41 and the other end 42b of the curved motion magnetic scale 42 are positioned approximately at the same location. Here, the other end 41b of the linear motion magnetic scale 41 is the end on the M2 direction side of the linear motion magnetic scale 41. The other end 42b of the curved motion magnetic scale 42 is the end on the M2 direction side of the curved motion magnetic scale 42.

[0084] (Magnetic sensor)

[0085] like Figure 7 As shown, the magnetic sensor 5 is disposed in the linear motion drive module 1. The magnetic sensor 5 is configured to detect the magnetism of the linear motion magnetic scale 41. The magnetic sensor 5 corresponds to the length L1 in the X direction of the linear motion magnetic scale 41 (refer to...). Figure 4 Multiple magnetic sensors 5 are arranged at predetermined intervals in the M direction. The predetermined interval is smaller than the length L1. Multiple magnetic sensors 5 (3 in total) are arranged at predetermined intervals in the W direction in a manner that faces multiple linear movement magnetic scales 41.

[0086] like Figure 8 As shown, the magnetic sensor 6 is disposed in the curve movement drive module 2. The magnetic sensor 6 is configured to detect the magnetism of the curve movement magnetic scale 42. The magnetic sensor 6 corresponds to the length L2 in the M direction of the curve movement magnetic scale 42 (refer to...). Figure 5 Multiple magnetic sensors 6 are arranged at predetermined intervals in the R direction. The predetermined interval is smaller than the length L2. Multiple magnetic sensors 6 (3 in total) are arranged at predetermined intervals in a direction orthogonal to the central axis C1 (C2) in a manner that faces multiple magnetic scales 42 for curved movement.

[0087] (Effects of the first implementation method)

[0088] In the first embodiment, the following effect can be obtained.

[0089] In the first embodiment, as described above, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are set in a mutually separated state. This ensures the distance between the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement, thus more reliably suppressing magnetic interference between them.

[0090] Furthermore, in the first embodiment, as described above, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are provided on different surfaces in a mutually separate state. Therefore, it is possible to provide the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement on different surfaces of the same component, thus suppressing the increase in the number of components of the transport device 100 compared to the case where the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are respectively provided on different surfaces of the component.

[0091] Furthermore, in the first embodiment, as described above, the magnetic ruler 4 is disposed on the slider 3. Additionally, the magnetic sensor 5 and the magnetic sensor 6 are disposed on the linear motion drive module 1 and the curved motion drive module 2, respectively. Therefore, since the linear motion drive module 1 and the curved motion drive module 2 are fixed in predetermined locations, unlike the case where the magnetic sensor 5 (6) is disposed in a structure that moves like the slider 3, it is easy to connect the power supply device for supplying power to the magnetic sensor 5 (6) to the magnetic sensor 5 (6).

[0092] Furthermore, in the first embodiment, as described above, the slider 3 includes a slider frame 31, and the magnetic ruler 4 is arranged inside the slider frame 31 with magnetic scale 41 for linear movement and magnetic scale 42 for curved movement facing each other in the vertical direction relative to the magnetic sensor 5 and the magnetic sensor 6, respectively. Therefore, the magnetic ruler 4 can be housed inside the slider frame 31, thus reducing the likelihood of the slider 3 becoming too large compared to the case where the slider frame 31 is the same size and the magnetic ruler 4 is arranged outside the slider frame 31.

[0093] Furthermore, in the first embodiment, as described above, the magnetic ruler 4 includes a base 40 integrally provided with a magnetic scale 41 for linear movement and a magnetic scale 42 for curved movement. Therefore, since the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are integrally provided on the same base 40, even if the base 40 expands or contracts due to temperature changes, the position measurement error of the slider 3 corresponding to the expansion or contraction of the base 40 can be generated relative to the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement. Therefore, the position measurement errors of the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement can be made approximately equal. As a result, the same correction value can be used to correct the position measurement error of the slider 3 during linear movement and the position measurement error of the slider 3 during curved movement, thus enabling easy control for position acquisition.

[0094] Furthermore, in the first embodiment, as described above, the base 40 includes a first surface 40a on which linear movement magnetic scale 41 is provided and a second surface 40b on which curved movement magnetic scale 42 is provided and is different from the first surface 40a. Therefore, compared to the case where the linear movement magnetic scale 41 and the curved movement magnetic scale 42 are arranged on the same surface, the increase in the size of the base 40 in the arrangement direction of the linear movement magnetic scale 41 and the curved movement magnetic scale 42 can be suppressed, thus suppressing the enlargement of the transport device 100 in the aforementioned arrangement direction.

[0095] Furthermore, in the first embodiment, as described above, the second surface 40b is disposed in the base 40 on the back side of the first surface 40a. Thus, by having the first surface 40a form the surface of the base 40 and the second surface 40b form the surface of the back side of the base 40, they can be arranged such that the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement overlap when viewed from above, thereby suppressing the increase in size of the base 40 in the M direction.

[0096] Furthermore, in the first embodiment, as described above, in the moving direction of the slider 3, one end 41a of the linear movement magnetic scale 41 and one end 42a of the curved movement magnetic scale 42 are arranged at approximately the same position, and the other end 41b of the linear movement magnetic scale 41 and the other end 42b of the curved movement magnetic scale 42 are arranged at approximately the same position. Therefore, the lengths L1 and L2 of the linear movement magnetic scale 41 and the curved movement magnetic scale 42 in the M direction (moving direction of the slider 3) can be made approximately the same. Thus, when either the linear movement magnetic scale 41 or the curved movement magnetic scale 42 becomes the maximum length that conforms to the installation space, the other end of the linear movement magnetic scale 41 and the curved movement magnetic scale 42 can also become the same maximum length. As a result, by arranging the spacing between the magnetic sensors 5(8) according to the maximum length, the magnetic sensors 5(8) can be arranged to the maximum extent, thus making the number of magnetic sensors 5 and 6 required for measuring the position of the slider 3 as minimal.

[0097] [Second Implementation]

[0098] Reference Figure 9 The structure of the magnetic scale 204 of the transport device 200 in the second embodiment will be described. In the second embodiment, unlike the first embodiment, the magnetic scale 204 includes a magnetic partition plate 243 that magnetically separates the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement. It should be noted that, in the second embodiment, detailed descriptions of the same structure as in the first embodiment are omitted.

[0099] (Base)

[0100] like Figure 9 As shown, the magnetic ruler 204 of the second embodiment includes a magnetic isolation plate 243 disposed between a linear movement magnetic scale 41 and a curved movement magnetic scale 42, which magnetically isolates the magnetic scales 41 and 42 from each other. The magnetic isolation plate 243 is formed of a metal with a strong magnetic material such as iron. Figure 9 In the figure, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are shown as dashed lines, but this is only a schematic diagram used to visualize the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement in the figure.

[0101] The magnetic partition plate 243, when viewed from the Z1 direction side, has a rectangular shape with the M direction as its length. The magnetic partition plate 243 has a cuboid shape. The thickness of the magnetic partition plate 243 in the Z direction is smaller than its width in the W direction. A base 240 with multiple (3) magnetic graduations 41 for linear movement is mounted on the first surface 243a of the magnetic partition plate 243. The first surface 243a is the upper surface of the magnetic partition plate 243 in the Z1 direction side. A base 240 with multiple (3) magnetic graduations 42 for curved movement is mounted on the second surface 243b of the magnetic partition plate 243. The second surface 243b is the lower surface of the magnetic partition plate 243 in the Z2 direction side. It should be noted that two or more magnetic graduations 41 for linear movement may be recorded on the base 240. Similarly, two or more magnetic graduations 42 for curved movement may also be recorded on the base 240. Furthermore, the other structures of the second embodiment are the same as those of the first embodiment, so the description is omitted.

[0102] (Effects of the second implementation method)

[0103] In the second embodiment, similar to the first embodiment described above, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are arranged in a mutually separated state. This allows for more reliable suppression of magnetic interference between the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement.

[0104] Furthermore, in the second embodiment, as described above, the magnetic ruler 204 has a magnetic isolation plate 243 disposed between the linear motion magnetic scale 41 and the curved motion magnetic scale 42, which magnetically isolates the magnetic scales 41 and 42 from each other. Therefore, the magnetic isolation plate 243 can suppress magnetic interference between the linear motion magnetic scale 41 and the curved motion magnetic scale 42, thus reducing the distance required to separate them. As a result, the required thickness of the base 240 disposed between the linear motion magnetic scale 41 and the curved motion magnetic scale 42 can be reduced, thus preventing the magnetic ruler 204, which includes the linear motion magnetic scale 41, the curved motion magnetic scale 42, and the base 240, from becoming too large. It should be noted that the other effects of the second embodiment are the same as those of the first embodiment described above.

[0105] [Third Implementation Method]

[0106] Reference Figure 10The structure of the magnetic scale 304 of the transport device 300 in the third embodiment will be described. In the third embodiment, unlike the first embodiment, both the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are provided on the same surface of the base 340. It should be noted that in the third embodiment, descriptions of structures identical to those in the first embodiment are omitted.

[0107] (Base)

[0108] like Figure 10 As shown, the base 340 is a plate-shaped member formed using a magnetic material such as ferrite. Viewed from the Z1 direction side, the base 340 has a rectangular shape with the M direction as its length. The base 340 has a cuboid shape. The thickness of the base 340 in the Z direction is smaller than its width in the W direction. Here, in Figure 10 In the figure, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are shown as dashed lines, but this is only a schematic diagram used to visualize the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement in the figure.

[0109] Here, both the linear motion magnetic scale 41 and the curved motion magnetic scale 42 are arranged on the same surface 340a of the base 340. The same surface 340a is the upper surface of the base 340. The linear motion magnetic scale 41 and the curved motion magnetic scale 42 are arranged on the same surface 340a of the base 340 in a state that they are separated from each other in the arrangement direction of the linear motion magnetic scale 41 and the curved motion magnetic scale 42. Specifically, an isolation space S is provided between a group of multiple linear motion magnetic scales 41 and a group of multiple curved motion magnetic scales 42.

[0110] (Effects of the third implementation method)

[0111] In the third embodiment, the following effect can be obtained.

[0112] In the third embodiment, similar to the first embodiment described above, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are arranged in a mutually separated state. This allows for more reliable suppression of magnetic interference between the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement.

[0113] Furthermore, in the third embodiment, as described above, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are disposed on the same surface 340a in a mutually separate state. Therefore, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement can be disposed on the same surface 340a of the same component, thus suppressing the increase in the number of components of the transport device 300 compared to the case where the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are disposed on different surfaces of different components.

[0114] Furthermore, in the third embodiment, as described above, in the transport device 100, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are disposed on the same surface 340a of the base 340 in a state where they are separated from each other in the arrangement direction of the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement. Therefore, by disposing the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement on the same surface 340a of the base 340, compared to the case where the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are arranged in a direction perpendicular to the same surface 340a, the increase in space required for disposing of the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement in a direction perpendicular to the same surface 340a can be suppressed. It should be noted that the other effects of the third embodiment are the same as those of the first embodiment described above.

[0115] [Fourth Implementation Method]

[0116] Reference Figure 11 The structure of the magnetic scale 404 of the conveying device 400 in the fourth embodiment will be described. In the fourth embodiment, unlike the first embodiment, the first surface 440a and the second surface 440b in the base 440 are approximately orthogonal to each other. It should be noted that in the fourth embodiment, descriptions of structures identical to those in the first embodiment are omitted.

[0117] (Base)

[0118] like Figure 11 As shown, the base 440 is formed of a magnetic material such as ferrite. The base 440 is an angle iron with an approximately L-shaped cross-section along the Z direction. It should be noted that... Figure 11 In the figure, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are shown as dashed lines, but this is only a schematic diagram used to visualize the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement in the figure.

[0119] Here, linear movement is recorded using magnetic scale 41 on the first surface 440a of the base 440. The first surface 440a is the inner surface of the base 440. Curved movement is recorded using magnetic scale 42 on the second surface 440b of the base 440. The second surface 440b is the inner bottom surface of the base 440. The second surface 440b and the first surface 440a are approximately orthogonal to each other.

[0120] (Effects of the fourth implementation method)

[0121] In the fourth embodiment, the following effect can be obtained.

[0122] In the fourth embodiment, similar to the first embodiment described above, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are arranged in a mutually separated state. This allows for more reliable suppression of magnetic interference between the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement.

[0123] Furthermore, in the fourth embodiment, as described above, the second surface 440b and the first surface 440a are approximately orthogonal to each other. Therefore, since a linear motion magnetic scale 41 is provided on the first surface 440a and a curved motion magnetic scale 42 is provided on the second surface 440b, which is approximately orthogonal to the first surface 440a, the magnetic sensor 5 that detects the magnetism of the linear motion magnetic scale 41 can be placed near the magnetic sensor 6 that detects the magnetism of the curved motion magnetic scale 42. As a result, the space required to arrange the magnetic sensors 5 and 6 can be made more compact. It should be noted that the other effects of the fourth embodiment are the same as those of the first embodiment described above.

[0124] [Fifth Implementation Method]

[0125] Reference Figure 12 The structure of the magnetic scale 504 in the transport device 500 of the fifth embodiment will be described. In the fifth embodiment, unlike the first embodiment, the second surface 540b and the first surface 540a are approximately orthogonal to each other. It should be noted that in the fifth embodiment, descriptions of structures identical to those in the first embodiment are omitted.

[0126] (Base)

[0127] like Figure 12 As shown, the base 540 is formed of a magnetic material using ferrite materials or the like. It should be noted that... Figure 12 In the figure, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are shown as dashed lines, but this is only a schematic diagram used to visualize the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement in the figure.

[0128] Here, linear movement is recorded using magnetic scale 41 on the first surface 540a of the base 540. The first surface 540a is the upper surface of the base 540. Curved movement is recorded using magnetic scale 42 on the second surface 540b of the base 540. The second surface 540b is the outer surface of the base 540. The second surface 540b and the first surface 540a are approximately orthogonal to each other. The second surface 540b is a curved surface corresponding to the curvature of the magnetic scale 42 for curved movement.

[0129] (Effects of the fifth implementation method)

[0130] In the fifth embodiment, the following effect can be obtained.

[0131] In the fifth embodiment, similar to the first embodiment described above, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are arranged in a mutually separated state. This allows for more reliable suppression of magnetic interference between the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement.

[0132] Furthermore, in the fifth embodiment, as described above, the second surface 540b and the first surface 540a are approximately orthogonal to each other. The second surface 540b is a curved surface corresponding to the curvature of the magnetic scale 42 for curved movement. Therefore, the curved surface of the second surface 540b is formed along the curved direction of the slider 3, thus allowing for proper detection of the position of the slider 3 during curved movement using the magnetic scale 42 provided on the second surface 540b. It should be noted that the other effects of the fifth embodiment are the same as those of the first embodiment described above.

[0133] [Variation Example]

[0134] It should be noted that the embodiments disclosed herein are illustrative rather than restrictive in all respects. The scope of the invention is defined not by the description of the embodiments above but by the claims, and further includes all modifications (variations) within the meaning and scope equivalent to the claims.

[0135] For example, in the first to fifth embodiments described above, an example is shown in which linear motion magnetic scale 41 and curved motion magnetic scale 42 are integrally provided on the base 40 (240, 340, 440, and 540) of the magnetic scale 4 (204, 304, 404, and 504), but the present invention is not limited thereto. In the present invention, as Figure 13As shown in the first variation, one set of linear motion magnetic scales 41 and two sets of curved motion magnetic scales 42 may be integrally provided on the base material portion 640 instead of the base portion 40. Specifically, the transport device 600 includes a magnetic scale 604 and a back magnetic yoke 607. The magnetic scale 604 includes a base material portion 640 provided with linear motion magnetic scales 41 and curved motion magnetic scales 42. The curved motion magnetic scales 42 include a first curved scale portion 642a formed in accordance with a first curved direction which is a curved direction and a second curved scale portion 642b formed in accordance with a second curved direction different from the first curved direction. The base material portion 640 includes a linear position detection surface 640a constituting the lower surface of the base material portion 640 and provided with the linear motion magnetic scales 41. The base material portion 640 includes a first curved position detection surface 640b protruding from the linear position detection surface 640a and provided with the first curved scale portion 642a. The substrate portion 640 includes a second curve position detection surface 640c facing the first curve position detection surface 640b and having a second curve scale portion 642b. Thus, by using the first curve scale portion 642a and the second curve scale portion 642b, position measurement can be performed when the slider 3 moves along multiple curves in the first and second curve directions. Therefore, position measurement can be performed even when moving along curves in opposite directions. This increases the degree of freedom in the path of the slider 3. Here, the magnetic ruler 604 can be formed by magnetizing the linear movement magnetic scale 41, the first curve scale portion 642a, and the second curve scale portion 642b into magnetic bodies and then bonding them to the substrate portion 640. Alternatively, the magnetic ruler 604 can also be formed by magnetizing the linear movement magnetic scale 41, the first curve scale portion 642a, and the second curve scale portion 642b into magnetic bodies and bonding them to the substrate portion 640. In addition, the magnetic ruler 604 can also be formed by inserting multiple magnetic bodies, each of which is magnetized by magnetic scale 41 for linear movement, first curve scale portion 642a and second curve scale portion 642b, into the substrate portion 640.

[0136] Furthermore, in the first to fifth embodiments described above, examples are shown where the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are each integrally disposed on the base 40 (240, 340, 440, and 540), but the present invention is not limited thereto. In the present invention, magnetic bodies formed by magnetizing the magnetic scales for linear movement and the magnetic scales for curved movement may also be bonded to the base.

[0137] Furthermore, in the first to fifth embodiments described above, an example is shown where the magnetic scale 4 (204, 304, 404, and 504) is disposed on the slider 3, but the present invention is not limited thereto. In the present invention, the magnetic scale can also be disposed on the drive module. In this case, the magnetic sensor is disposed on the slider instead of the drive module.

[0138] Furthermore, in the first embodiment described above, an example is shown where the magnetic rulers 4 (204, 304, 404, and 504) are disposed on the inner side of the slider frame 31, but the present invention is not limited thereto. In the present invention, the magnetic rulers may also be disposed on the outer side of the slider frame.

[0139] Furthermore, in the first to third embodiments described above, examples were shown where the base 40 (240, 340, 440, and 540) was a thin plate with a thickness in the Z direction smaller than its width in the Y direction; however, the present invention is not limited thereto. In the present invention, the base may also be a thin plate with a thickness in the Y direction smaller than its width in the Z direction.

[0140] Furthermore, in the third embodiment described above, an example is shown where the same surface 340a is the upper surface of the base 40 (240, 340, 440, and 540), but the present invention is not limited thereto. In the present invention, the same surface may also be a lower surface, a side surface, etc., other than the upper surface.

[0141] Furthermore, in the first to fifth embodiments described above, the conveying device 100 (200, 300, 400, 500) is shown as an example of a linear conveyor that uses a linear motor to move the slider 3 along the surrounding path 102; however, the present invention is not limited thereto. In the present invention, the conveying device may also utilize a belt conveyor to drive the slider. Additionally, the conveying device may be a device composed of a conveying mechanism that transports the slider in a direction orthogonal to the linear movement direction of the slider.

[0142] Furthermore, in the first to fifth embodiments described above, an example was shown where the path of movement of the slider 3 is a loop-shaped path 102 disposed in a horizontal plane, but the present invention is not limited thereto. In the present invention, the path of movement of the slider may also be a path having a ramp inclined relative to the horizontal plane.

[0143] Furthermore, in the first to fifth embodiments described above, an example was shown where the path of movement of the slider 3 is a loop-shaped path 102 when viewed from above; however, the present invention is not limited to this. In the present invention, the path of movement of the slider may also be a path that is not a loop-shaped path but a J-shaped path when viewed from above, etc.

[0144] Furthermore, in the first to fifth embodiments described above, an example was shown where three magnetic scales 41 for linear movement and three magnetic scales 42 for curved movement were each provided; however, the present invention is not limited to this. In the present invention, two or more magnetic scales for linear movement and four or more magnetic scales for curved movement may also be provided.

[0145] Furthermore, in the fourth embodiment described above, an example of an angle iron with a generally L-shaped cross-section along the Z direction (vertical direction) is shown, but the present invention is not limited thereto. In the present invention, the base may also be a member with a generally C-shaped structure having a first and a second surface facing each other in the vertical direction and a connecting surface connecting the first and second surfaces.

[0146] Furthermore, in the fourth and fifth embodiments described above, examples are shown where the second surface 440b (562) and the first surface 440a (561) are approximately orthogonal to each other, but the present invention is not limited thereto. In the present invention, the second surface and the first surface may also intersect at an acute angle or an obtuse angle.

[0147] Furthermore, in the first embodiment described above, an example is shown where the magnetic ruler 4 is arranged inside the slider frame 31 with the magnetic scale 41 for linear movement facing the magnetic sensor 5 in the Z direction and the magnetic scale 42 for curved movement facing the magnetic sensor 6 in the Z direction. However, the present invention is not limited to this. The magnetic ruler may also be arranged inside the slider frame with the magnetic scale for linear movement facing the magnetic sensor in the width direction and the magnetic scale for curved movement facing the magnetic sensor in the width direction.

[0148] Furthermore, in the second embodiment described above, an example is shown where a base 240 recording a plurality (3) of magnetic scales 41 for linear movement is mounted on the first surface 243a of the magnetic partition plate 243, and a base 240 recording a plurality (3) of magnetic scales 42 for curved movement is mounted on the second surface 243b of the magnetic partition plate 243; however, the present invention is not limited thereto. In the present invention, as... Figure 14 As shown in the second modified example, multiple (3) bases 740 for recording linear movement magnetic scale 41 may be mounted on the first surface 243a of the magnetic partition plate 243. Alternatively, multiple (3) bases 740 for recording curved movement magnetic scale 42 may be mounted on the second surface 243b of the magnetic partition plate 243. It should be noted that two or more bases 740 for recording linear movement magnetic scale 41 may be mounted on the first surface 243a of the magnetic partition plate 243. Similarly, two or more bases 740 for recording curved movement magnetic scale 42 may be mounted on the second surface 243b of the magnetic partition plate 243. Furthermore, in... Figure 14 In the figure, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are shown as dashed lines, but this is only a schematic diagram used to visualize the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement in the figure.

[0149] Furthermore, in the second embodiment described above, an example is shown where a base 240 recording a plurality (3) of magnetic scales 41 for linear movement is mounted on the first surface 243a of the magnetic partition plate 243, and a base 240 recording a plurality (3) of magnetic scales 42 for curved movement is mounted on the second surface 243b of the magnetic partition plate 243; however, the present invention is not limited thereto. In the present invention, as... Figure 15 and Figure 16 As shown in the third variation, the base 840, on which multiple (3) linear movement magnetic scales 41 and multiple (3) curved movement magnetic scales 42 are recorded, can also be formed in the insert of the magnetic partition plate 243. It should be noted that two or more linear movement magnetic scales 41 can be recorded on the base 840. Similarly, two or more curved movement magnetic scales 42 can be recorded on the base 840. Furthermore, in... Figure 15 and Figure 16 In the figure, the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement are shown as dashed lines, but this is only a schematic diagram used to visualize the magnetic scale 41 for linear movement and the magnetic scale 42 for curved movement in the figure.

[0150] Label Explanation

[0151] 1. Linear movement drive module (drive module)

[0152] 2. Drive module for curved movement (drive module)

[0153] 3 sliders

[0154] 4. 204, 304, 404, 504 magnetic rulers

[0155] 5 magnetic sensors

[0156] 6 magnetic sensors

[0157] 31 Slider Frame

[0158] 40, 240, 340, 440, 540, 740, 840 base

[0159] 40a, 440a, 540a First Page

[0160] 40b, 440b, 540b second page

[0161] 41. Magnetic scale for linear movement

[0162] 41a one side end

[0163] 41b other end

[0164] 42. Magnetic scale for curve movement

[0165] 42a one side end

[0166] 42b other end

[0167] 100, 200, 300, 400, 500, 600 conveying devices

[0168] 243 Magnetic Partition Board

[0169] 340a Same side

[0170] 640 Substrate Section

[0171] 640a Linear Position Detection Surface

[0172] 640b First Curve Position Detection Surface

[0173] 640c second curve uses position detection surface

[0174] 642a First Curve Scale Section

[0175] 642b Second curve scale section.

Claims

1. A conveying device comprising: The slider can move along both straight and curved directions; The drive module causes the slider to move along the straight line or the curved direction; A magnetic scale includes magnetic graduations for linear movement formed in a straight line along the straight line direction and magnetic graduations for curved movement formed in a curved line direction, and is disposed on one of the slider and the drive module; A magnetic sensor, disposed on the other side of the slider and the drive module, detects the magnetic properties of the magnetic scale for linear movement and the magnetic scale for curved movement, respectively. The magnetic scale for linear movement and the magnetic scale for curved movement are set to be completely separated from each other at a distance that can suppress magnetic interference.

2. The conveying device according to claim 1, wherein, The magnetic scale for linear movement and the magnetic scale for curved movement are set on the same or different surfaces in a mutually separate state.

3. The conveying device according to claim 1 or 2, wherein, The magnetic ruler is disposed on the slider. The magnetic sensor is mounted on the drive module.

4. The conveying device according to claim 3, wherein, The slider includes a slider frame, and the magnetic scale is arranged inside the slider frame with the magnetic scale for linear movement and the magnetic scale for curved movement facing each other relative to the magnetic sensor in the vertical direction or in the width direction orthogonal to the vertical direction and the movement direction of the slider.

5. The conveying device according to claim 1, wherein, The magnetic ruler also includes a base integrally provided with the magnetic scale for linear movement and the magnetic scale for curved movement.

6. The conveying device according to claim 5, wherein, The magnetic scale for linear movement and the magnetic scale for curved movement are arranged on the same surface of the base in a state where they are separated from each other in the arrangement direction of the magnetic scale for linear movement and the magnetic scale for curved movement.

7. The conveying device according to claim 1, wherein, The magnetic ruler is disposed on the slider. In the direction of movement of the slider, one end of the magnetic scale for linear movement and one end of the magnetic scale for curved movement are positioned at approximately the same location, and the other end of the magnetic scale for linear movement and the other end of the magnetic scale for curved movement are positioned at approximately the same location.

8. A conveying device comprising: The slider can move along both straight and curved directions. The drive module causes the slider to move along the straight line or the curved direction; A magnetic scale includes magnetic graduations for linear movement formed in a straight line along the straight line direction and magnetic graduations for curved movement formed in a curved line direction, and is disposed on one of the slider and the drive module; A magnetic sensor, disposed on the other side of the slider and the drive module, detects the magnetic properties of the magnetic scale for linear movement and the magnetic scale for curved movement, respectively. The magnetic scale for linear movement and the magnetic scale for curved movement are set apart from each other at a distance that can suppress magnetic interference. The magnetic ruler also includes a base integrally provided with the magnetic scale for linear movement and the magnetic scale for curved movement. The base includes: The first surface is equipped with a magnetic scale for linear movement; and The second surface is provided with magnetic scales for the curve movement, and is a different surface from the first surface.

9. The conveying device according to claim 8, wherein, The second surface is disposed in the base on the back side of the first surface.

10. The conveying device according to claim 9, wherein, The base has a magnetic isolation plate, which is disposed between the magnetic scale for linear movement and the magnetic scale for curved movement, and provides magnetic isolation from the magnetic scale for linear movement and the magnetic scale for curved movement, respectively.

11. The conveying device according to claim 8, wherein, The second face and the first face are approximately orthogonal to each other.

12. The conveying device according to claim 11, wherein, The second surface is a curved surface that corresponds to the curvature of the magnetic scale used for the curve movement.

13. The conveying device according to claim 8, wherein, The magnetic ruler is disposed on the slider. In the direction of movement of the slider, one end of the magnetic scale for linear movement and one end of the magnetic scale for curved movement are positioned at approximately the same location, and the other end of the magnetic scale for linear movement and the other end of the magnetic scale for curved movement are positioned at approximately the same location.

14. A conveying device comprising: The slider can move along both straight and curved directions. The drive module causes the slider to move along the straight line or the curved direction; A magnetic scale includes magnetic graduations for linear movement formed in a straight line along the straight line direction and magnetic graduations for curved movement formed in a curved line direction, and is disposed on one of the slider and the drive module; A magnetic sensor, disposed on the other side of the slider and the drive module, detects the magnetic properties of the magnetic scale for linear movement and the magnetic scale for curved movement, respectively. The magnetic scale for linear movement and the magnetic scale for curved movement are set in a separate state. The magnetic ruler further includes a base material portion for setting the magnetic scale for linear movement and the magnetic scale for curved movement. The magnetic scale for curve movement includes: A first curve scale portion formed in accordance with a first curve direction that is the direction of the curve; and A second curve scale portion formed in accordance with a second curve direction different from the first curve direction. The substrate portion includes: A linear position detection surface constitutes the upper or lower surface of the substrate portion, and is provided with the magnetic scale for linear movement; A first curve position detection surface protrudes from the straight line position detection surface and is provided with a first curve scale portion; and The second curve position detection surface faces the first curve position detection surface and is provided with the second curve scale portion.

15. The conveying device according to claim 14, wherein, The magnetic ruler is disposed on the slider. In the direction of movement of the slider, one end of the magnetic scale for linear movement and one end of the magnetic scale for curved movement are positioned at approximately the same location, and the other end of the magnetic scale for linear movement and the other end of the magnetic scale for curved movement are positioned at approximately the same location.

Images