Microsphere templates, their preparation methods and applications

Abstract

This invention discloses a microsphere template, its preparation method, and its application. The method includes: adding microspheres to a curable adhesive liquid and stirring until homogeneous to obtain a microsphere suspension; coating the microsphere suspension onto a substrate; curing the microsphere suspension on the substrate to form a solidified layer; and removing the microspheres or colloid from the surface of the solidified layer to obtain a microsphere template with concave or convex microsphere surfaces. The prepared microsphere template can be reused as a nanoimprint template. The microsphere template, its preparation method, and its application provided by this invention improve the preparation efficiency of microsphere templates, reduce the preparation difficulty, and enable large-area preparation and reuse of microsphere templates, making them suitable for mass production.

Description

Technical Field

[0001] This invention relates to a template preparation method, and in particular to a microsphere template, its preparation method, and its application. Background Technology

[0002] Microsphere templates have microsphere surface structures, which refer to the formation of microsphere protrusions or depressions on the solid surface. Microsphere surface structures have special optical, biological, and physical properties and are widely used in many fields.

[0003] Conventional methods for fabricating microsphere templates at the micrometer and nanometer scale require complex photolithography processes. These processes involve expensive equipment such as photomasks, electron beam lithography, and laser direct writing, and are time-consuming with inconsistent production quality. As a result, current microsphere template production efficiency is low and costs are high.

[0004] Currently, the main method for preparing microsphere templates is single-layer self-assembly technology. However, this process is subject to various limitations, such as poor bonding between the substrate and the monolayer, uneven distribution of the monolayer, and the inability to reuse the template. These limitations result in complex production processes, low production efficiency, and uneven distribution of microspheres within the template, making large-area fabrication and reuse impossible.

[0005] The information disclosed in this background section is intended only to enhance the understanding of the overall background of the invention and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0006] The purpose of this invention is to provide a microsphere template, its preparation method and application, which improves the preparation efficiency of microsphere templates and reduces the preparation difficulty of microsphere templates.

[0007] To achieve the above objectives, the present invention provides a method for preparing microsphere templates, comprising the following steps:

[0008] S1. Add the microspheres to a curable adhesive liquid and stir until homogeneous to obtain a microsphere suspension;

[0009] S2. Coat the microsphere suspension onto the substrate;

[0010] S3. Solidify the microsphere suspension on the substrate to form a solidified layer; and

[0011] S4. Remove the microspheres or colloids from the upper surface of the solidified layer to obtain a microsphere template with concave or convex microsphere surfaces.

[0012] In one or more embodiments, the microspheres are polymers or inorganic materials.

[0013] In one or more embodiments, the microspheres include polystyrene microspheres and silica microspheres.

[0014] In one or more embodiments, the adhesive liquid includes polydimethylsiloxane and photoresist.

[0015] In one or more embodiments, step S2 includes: uniformly coating the microsphere suspension onto a substrate using a spin coating or spray coating process.

[0016] In one or more embodiments, the substrate includes a glass sheet, a silicon wafer, and a PET film.

[0017] In one or more embodiments, step S3 includes: using a thermosetting or photosetting method to cure the microsphere suspension on the substrate, so that the microsphere suspension solidifies to form a solidified layer.

[0018] In one or more embodiments, step S4 includes: removing the colloid from the upper surface of the solidified layer, retaining the microspheres on the upper surface, so that the upper surface of the solidified layer forms a microsphere protrusion surface, thereby obtaining a microsphere template with a microsphere protrusion surface on the surface.

[0019] In one or more embodiments, step S4 includes: removing the microspheres from the upper surface of the solidified layer, retaining the solidified colloid on the upper surface, so that a microsphere concave surface is formed on the upper surface of the solidified layer, thereby obtaining a microsphere template with the microsphere concave surface on its surface.

[0020] The present invention also proposes a microsphere template, including the microsphere template prepared by the microsphere template preparation method of the present invention.

[0021] The present invention also proposes an application of microsphere templates in nanoimprinting, wherein a microsphere template with microsphere protrusions is imprinted onto the surface of a substrate, thereby forming a functional recessed surface on the surface of the substrate.

[0022] Compared with existing technologies, the microsphere template and its preparation method according to an embodiment of the present invention, in preparing the microsphere template, involves using microspheres and a curable adhesive liquid to prepare a microsphere suspension. The microsphere suspension is then coated onto a substrate and cured to form a solidified layer. After removing the colloid or microspheres from the surface of the solidified layer, a microsphere template with raised or recessed microsphere surfaces is finally obtained. This microsphere template preparation method is simple to operate, low in cost, and time-efficient. The prepared microsphere templates have controllable density, can be prepared over large areas, and are reusable, greatly improving the preparation efficiency and reducing the difficulty of microsphere template preparation. Attached Figure Description

[0023] Figure 1 This is a flowchart of a microsphere template preparation method according to an embodiment of the present invention;

[0024] Figure 2 This is a diagram illustrating the preparation process of a microsphere suspension according to an embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of the solidification layer according to an embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of the structure of the microsphere template in Embodiment 1 of the present invention;

[0027] Figure 5 This is a schematic diagram of the structure of the microsphere template in Embodiment 2 of the present invention;

[0028] Figure 6 This is a schematic diagram of the imprinting process of the microsphere template in Embodiment 3 of the present invention;

[0029] Figure 7 This is a schematic diagram of the structure of the substrate and the functional recessed surface in Embodiment 3 of the present invention.

[0030] Among them, 1. microsphere suspension, 2. coagulation layer, 3. substrate, 4. microsphere template, 5. microsphere concave surface, 6. microsphere convex surface, 7. base, and 8. functional concave surface. Detailed Implementation

[0031] The specific embodiments of the present invention will now be described in detail with reference to the accompanying drawings, but it should be understood that the scope of protection of the present invention is not limited to the specific embodiments.

[0032] Unless otherwise expressly stated, throughout the specification and claims, the term "comprising" or its variations such as "including" or "comprises" shall be understood to include the stated elements or components without excluding other elements or other components.

[0033] like Figures 1-5 As shown in the microsphere template and its preparation method according to an embodiment of the present invention, the preparation method of the microsphere template includes steps S1 to S4:

[0034] In step S1, the microspheres are added to a curable adhesive liquid and stirred until homogeneous to obtain microsphere suspension 1.

[0035] Specifically, a certain amount of microspheres and colloidal liquid can be weighed and placed in a beaker for stirring, so that the microspheres are dispersed in the colloidal liquid to form a microsphere suspension 1.

[0036] In one embodiment, the microspheres in step S1 can be polymers or inorganic materials. Specifically, the microspheres can be polystyrene microspheres or silica microspheres, while the adhesive liquid in step S1 can be polydimethylsiloxane and photoresist. Specifically, when selecting microspheres and adhesive liquids, it is only necessary that after mixing the microspheres and adhesive liquids, the microspheres do not chemically react with the adhesive liquids, and the microspheres are insoluble or only slightly soluble in the adhesive liquids. Therefore, the materials of the microspheres and adhesive liquids are not limited to the materials listed above.

[0037] In one embodiment, the microspheres have a particle size of 1 μm-10 μm. 6 μm. Specifically, based on size, microspheres can be divided into micrometer-scale and nanometer-scale. Common particle sizes for micrometer-scale microspheres are 1μm, 5μm, 10μm, 50μm, and 100μm, while common sizes for nanometer-scale microspheres are 20nm, 100nm, 300nm, 700nm, and 900nm. The particle size of the microspheres can be determined based on the application scenario of the prepared microsphere template 4.

[0038] In step S2, the microsphere suspension 1 is coated onto the substrate 3.

[0039] Specifically, the microsphere suspension 1 can be uniformly coated onto the substrate 3 using spin coating or spray coating processes, and the microsphere suspension 1 can have a certain thickness.

[0040] In the above steps, the substrate 3 is made of solid material, such as glass sheet, silicon wafer and PET film. When selecting the substrate 3, it is necessary to ensure that the substrate 3 does not react with the microspheres and colloidal liquid in the microsphere suspension 1.

[0041] In step S3, the microsphere suspension 1 on the substrate 3 is solidified to form a solidified layer 2.

[0042] Specifically, thermosetting or photosetting methods can be used to cure the microsphere suspension 1 on the substrate 3, so that the microsphere suspension 1 solidifies to form a solidified layer 2.

[0043] In step S4, the colloid or microspheres on the upper surface of the solidified layer 2 are removed to obtain the microsphere template 4.

[0044] Specifically, when it is necessary to obtain a microsphere template 4 with microsphere protrusions 6, a colloid removal process is used to remove the colloid on the upper surface of the solidified layer 2, while retaining the microspheres on the upper surface, thus obtaining a microsphere template 4 with microsphere protrusions 6.

[0045] When it is necessary to obtain a microsphere template 4 with microsphere concave surface 5, a microsphere removal process is used to remove the microspheres on the upper surface of the solidified layer 2, while retaining the colloid on the upper surface, thus obtaining a microsphere template 4 with microsphere concave surface 5.

[0046] like Figures 2-7 As shown, one embodiment of the present invention also provides the application of microsphere templates in nanoimprinting. Specifically, a microsphere template 4 with microsphere protrusions on its surface can be prepared according to steps S1-S4. The microsphere template 4 with microsphere protrusions on its surface is then imprinted onto the surface of the substrate 7, so that a functional recessed surface 8 is formed on the surface of the substrate 7.

[0047] The present invention will be further described below with reference to specific embodiments.

[0048] Example 1:

[0049] In this embodiment, a microsphere suspension 1 is prepared using silica microspheres and photoresist to prepare a microsphere template 4 with microsphere depressions 5 on its surface. The specific steps are as follows:

[0050] 1. Prepare microsphere suspension

[0051] Weigh 1g of silica microspheres with a particle size of 400nm and measure 10mL of photoresist. Put both into a beaker and stir to fully disperse the silica microspheres in the photoresist, thus obtaining microsphere suspension 1.

[0052] 2. Coating microsphere suspension

[0053] The microsphere suspension 1 was uniformly coated onto the silicon wafer using a spin coating process, so that the thickness of the microsphere suspension 1 on the silicon wafer surface reached 1.5 μm.

[0054] 3. Solidified microsphere suspension

[0055] Photopolymerization technology is used to expose and solidify the microsphere suspension 1 on the surface of the silicon wafer using ultraviolet light to form a solidified layer 2.

[0056] 4. Remove surface microspheres

[0057] The silica microspheres on the upper surface of the solidified layer 2 are etched away using reactive ion etching, so that multiple irregular groove spherical structures are formed on the upper surface of the solidified layer 2, resulting in a microsphere template 4 with microsphere concave surfaces 5.

[0058] Example 2:

[0059] In this embodiment, a microsphere suspension 1 is prepared using silica microspheres and photoresist to prepare a microsphere template 4 with microsphere protrusions 6 on its surface. The specific steps are as follows:

[0060] 1. Prepare microsphere suspension

[0061] Weigh 1g of silica microspheres with a particle size of 400nm and measure 10mL of photoresist. Put both into a beaker and stir to fully disperse the silica microspheres in the photoresist, thus obtaining microsphere suspension 1.

[0062] 2. Coating microsphere suspension

[0063] The microsphere suspension 1 was uniformly coated onto the silicon wafer using a spin coating process, so that the thickness of the microsphere suspension 1 on the silicon wafer surface reached 1.5 μm.

[0064] 3. Solidified microsphere suspension

[0065] Photopolymerization technology is used to expose and solidify the microsphere suspension 1 on the surface of the silicon wafer using ultraviolet light to form a solidified layer 2.

[0066] 4. Remove surface colloids

[0067] A wet etching process is used to etch away the colloid on the upper surface of the solidified layer 2, so that multiple irregular convex spherical structures are formed on the upper surface of the solidified layer 2, resulting in a microsphere template 4 with microsphere convex surfaces 6.

[0068] Example 3:

[0069] like Figures 2-7 As shown, this embodiment illustrates the specific application of the microsphere template 4 in the field of nanoimprinting. In this embodiment, a microsphere suspension 1 is prepared using silica microspheres and photoresist to prepare a microsphere template 4 with microsphere protrusions 6 on its surface. The microsphere template 4 is then imprinted onto a substrate 7, forming a functional recessed surface 8 on the surface of the substrate 7. The specific steps are as follows:

[0070] 1. Prepare microsphere suspension

[0071] Weigh 1g of silica microspheres with a particle size of 400nm and measure 10mL of photoresist. Put both into a beaker and stir to fully disperse the silica microspheres in the photoresist, thus obtaining microsphere suspension 1.

[0072] 2. Coating microsphere suspension

[0073] The microsphere suspension 1 was uniformly coated onto the silicon wafer using a spin coating process, so that the thickness of the microsphere suspension 1 on the silicon wafer surface reached 1.5 μm.

[0074] 3. Solidified microsphere suspension

[0075] Photopolymerization technology is used to expose and solidify the microsphere suspension 1 on the surface of the silicon wafer using ultraviolet light to form a solidified layer 2.

[0076] 4. Remove surface colloids

[0077] A wet etching process is used to etch away the colloid on the upper surface of the solidified layer 2, so that multiple irregular convex spherical structures are formed on the upper surface of the solidified layer 2, resulting in a microsphere template 4 with microsphere convex surfaces 6.

[0078] 5. Imprinted film

[0079] Flexible PET film is selected as substrate 7. Microsphere template 4 with microsphere protrusion surface 6 is imprinted onto flexible PET film using nanoimprinting process, so that functional recessed surface 8 is formed on the surface of flexible PET film. The functional recessed surface 8 of flexible PET film can be used directly or after surface modification treatment as a functional product.

[0080] In summary, according to the embodiments of the present invention, in preparing microsphere templates, a microsphere suspension is prepared using microspheres and a curable adhesive liquid. The microsphere suspension is then coated onto a substrate and cured to form a solidified layer. After removing the colloid or microspheres from the surface of the solidified layer, a microsphere template with raised or recessed microsphere surfaces is finally obtained. This microsphere template preparation method is simple to operate, low in cost, and time-efficient. The prepared microsphere templates have controllable density, can be prepared over large areas, and are reusable, greatly improving the preparation efficiency and reducing the difficulty of microsphere template preparation.

[0081] The foregoing description of specific exemplary embodiments of the invention is for illustrative and explanatory purposes. These descriptions are not intended to limit the invention to the precise forms disclosed, and it will be apparent, as taught above, that many changes and variations can be made. The exemplary embodiments were chosen and described in order to explain the specific principles of the invention and its practical application, thereby enabling those skilled in the art to implement and utilize various different exemplary embodiments of the invention, as well as various different choices and variations. The scope of the invention is intended to be defined by the claims and their equivalents.

Claims

1. A method for preparing a microsphere template, characterized in that, include: S1. Add the microspheres to the curable adhesive liquid and stir evenly to obtain a microsphere suspension (1). S2. The microsphere suspension (1) is coated onto the substrate (3); S3, solidify the microsphere suspension (1) on the substrate (3) to form a solidified layer (2); and S4. Remove the microspheres or colloids from the upper surface of the solidified layer (2) to obtain a microsphere template (4) with a microsphere concave surface (5) or a microsphere convex surface (6). Step S2 includes: The microsphere suspension (1) is uniformly coated onto the substrate (3) using a spin coating or spray coating process; Step S4 includes: Remove the colloid from the upper surface of the solidified layer (2), leaving the microspheres on the upper surface, so that a microsphere protrusion surface (6) is formed on the upper surface of the solidified layer (2), resulting in a microsphere template (4) with the microsphere protrusion surface (6) on its surface; or, Remove the microspheres from the upper surface of the solidified layer (2) and retain the solidified colloid on the upper surface, so that a microsphere concave surface (5) is formed on the upper surface of the solidified layer (2), and obtain a microsphere template (4) with the microsphere concave surface (5) on the surface.

2. The method for preparing microsphere templates as described in claim 1, characterized in that, The microspheres are polymers or inorganic materials; and the microspheres include polystyrene microspheres and silica microspheres.

3. The method for preparing microsphere templates as described in claim 1, characterized in that, The adhesive liquid includes polydimethylsiloxane and photoresist.

4. The method for preparing microsphere templates as described in claim 1, characterized in that, The substrate (3) includes a glass sheet, a silicon wafer, and a PET film.

5. The method for preparing microsphere templates as described in claim 1, characterized in that, Step S3 includes: The microsphere suspension (1) on the substrate (3) is cured by thermosetting or photosetting, so that the microsphere suspension (1) solidifies to form a solidified layer (2).

6. A microsphere template, which is prepared by the microsphere template preparation method according to any one of claims 1-5.

7. The application of the microsphere template as described in claim 6 in nanoimprinting, characterized in that, The microsphere template (4) with the microsphere protrusion (6) is pressed onto the surface of the substrate (7), so that the surface of the substrate (7) forms a functional recessed surface (8).

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