A target body automatic adjustable telescopic device in a magnetron sputtering coating machine

Abstract

The application discloses a target body automatic adjustable telescopic device in a magnetron sputtering coating machine, which comprises a coating chamber, a coating chamber side wall plate, an ear chamber, an ear chamber enclosing plate, an ear chamber side wall plate, a target body, a sliding sealing mechanism and a telescopic device, the right side of the coating chamber is provided with the ear chamber, the inside of the ear chamber is provided with the target body, the right side of the ear chamber side wall plate is provided with the telescopic device, the right side of the ear chamber side wall plate is provided with the sliding sealing mechanism, the coating chamber side wall plate and the ear chamber enclosing plate are fixedly connected through a hexagonal socket head cap screw, and the right side of the ear chamber enclosing plate is fixedly connected with the ear chamber side wall plate. The application relates to a target body automatic adjustable telescopic device in a magnetron sputtering coating machine, which can automatically and smoothly adjust the position of the target body, and then adjust the target base distance, so as to ensure the coating effect of different coating products.

Description

Technical Field

[0001] This invention belongs to the technical field of magnetron sputtering coating machines, specifically an automatic adjustable telescopic device for a target in a magnetron sputtering coating machine. Background Technology

[0002] With the rapid development of various industries, more and more products in various fields need to be coated, such as decorative functional films, precision optical films, optoelectronic functional films, superhard films for molds and dies, and lubricating films for molds and dies. Using magnetron sputtering to deposit coatings is one of the mainstream coating technologies. Therefore, various types of magnetron sputtering coating machines are widely used in the coating industry.

[0003] Its core technology is the magnetron sputtering mechanism. During the magnetron sputtering coating process, the most critical process parameter is the target-substrate distance (the distance between the sputtering target surface and the surface of the product being coated). A closer target-substrate distance results in a faster deposition rate, but due to the poor diffraction ability of the deposited particles, it leads to a decrease in the uniformity of the film layer on the product surface.

[0004] The greater the target-substrate distance, the slower the deposition rate. At the same time, the energy and density of the deposited particles will decrease, which will lead to a deterioration in the quality of the film layer on the product surface. Therefore, in order to obtain a film layer with good uniformity and high quality, the target-substrate distance must be strictly controlled to keep it within the optimal parameter range.

[0005] However, existing magnetron sputtering coating machines still have some shortcomings: existing magnetron sputtering coating machines are divided into two types: one type is to fix the target on the side wall of the coating chamber, and the distance between the target and the product is not adjustable, which cannot meet the process requirements;

[0006] Another method involves fixing the target to the side wall of the coating chamber and adjusting the distance between the target and the product by hand-cranking a screw or using a linear cylinder. However, the hand-cranking method is laborious and unstable, and can only be operated manually, making it impossible to automate the process.

[0007] However, linear cylinders have limited adjustable distances, poor precision, complex operation, and a relatively high failure rate, making them unreliable and limiting their application. Therefore, improvements are needed. Summary of the Invention

[0008] The purpose of this invention is to provide an automatic adjustable telescopic target device in a magnetron sputtering coating machine to solve the problems mentioned in the background art.

[0009] To address the above problems, the present invention provides a technical solution:

[0010] An automatic adjustable telescopic device for a target in a magnetron sputtering coating machine includes a coating chamber, a side wall panel of the coating chamber, an ear chamber, an ear chamber enclosure panel, an ear chamber side wall panel, a target, a sliding sealing mechanism, and a telescopic device. The ear chamber is located on the right side of the coating chamber, and the target is located inside the ear chamber. The telescopic device is located on the right side of the ear chamber side wall panel, and the sliding sealing mechanism is located on the right side of the ear chamber side wall panel. The coating chamber side wall panel and the ear chamber enclosure panel are fixedly connected by hexagonal socket screws, and the right side of the ear chamber enclosure panel is fixedly connected to the ear chamber side wall panel.

[0011] Preferably, the target body includes a target material, a target base mechanism, an insulating mechanism, a shielding cover, and a target support rod. The target support rod is disposed inside the side wall of the ear chamber. The left side of the target support rod contacts the target base mechanism. The target base mechanism contains an insulating mechanism. The target material is disposed on the left side of the target base mechanism. The shielding cover is disposed outside the target base mechanism. The shielding cover contains an insulating mechanism. The insulating mechanism contacts the target base mechanism. Through the configuration of the target base mechanism, insulating mechanism, and other structures, the target body can be installed and used, ensuring insulation between the target support rod and the target base mechanism. This is used for subsequent coating treatment of the coated product.

[0012] Preferably, the target support rod is internally connected with a second hexagonal screw, which is threadedly connected to the target base mechanism. The hexagonal screw can be used to fix the target support rod and the target base mechanism.

[0013] Preferably, the sliding sealing mechanism includes a sealing cover, a skeleton oil seal, a sealing seat, a sliding inner sleeve, a sliding spacer, and a sliding outer sleeve. The sliding outer sleeve is disposed inside the ventricular sidewall plate and contacts the target support rod. The right side of the sliding outer sleeve contacts the sealing seat. An external hexagonal screw is movably connected inside the sealing seat and is movably connected to the sliding outer sleeve. The external hexagonal screw is threadedly connected to the ventricular sidewall plate. The inner side of the sealing seat is provided with a sliding inner sleeve, which contacts the target support rod. The left side of the sliding inner sleeve... A sliding spacer is provided, which contacts the target support rod and the sealing seat. The inner side of the sealing seat is provided with two skeleton oil seals. The left skeleton oil seal contacts the target support rod, the sliding spacer, and the sliding outer sleeve, while the right skeleton oil seal contacts the sliding inner sleeve and the target support rod. A sealing cap is provided on the right side of the right skeleton oil seal. The sealing is achieved by the skeleton oil seal, which makes the sealing method simple and reliable. With the cooperation of the sliding inner sleeve, the sliding spacer, and the sliding outer sleeve, the telescopic movement is smoother.

[0014] Preferably, the sealing cover is internally connected with a second external hexagonal screw, which is threadedly connected to the sealing seat. The sealing cover and the sealing seat can be fixedly installed by the second external hexagonal screw.

[0015] Preferably, the telescopic device includes a fixed ring, an adjusting plate, a guide rod fixing plate, a lead screw fixing top plate, a lead screw fixing bottom plate, a lead screw, a guide rod, a servo motor mounting plate, a synchronous belt adjusting block, a proximity switch sensing plate, a proximity switch mounting plate, a deep groove ball bearing, a shaft elastic retaining ring, a lead screw nut, a flange linear bearing, a synchronous pulley one, a synchronous pulley two, a synchronous belt, a reducer, a servo motor, a servo driver, and a proximity switch. The right side of the ear chamber sidewall plate contacts the lead screw fixing bottom plate. A hexagon socket head cap screw three is movably connected inside the lead screw fixing bottom plate and is threadedly connected to the ear chamber sidewall plate. Guide rod fixing plates are provided on both the front and rear sides of the lead screw fixing bottom plate, and a lead screw fixing top plate is provided between the guide rod fixing plates. The guide rod... An adjusting plate is located between the fixed plates and on the left side of the lead screw fixing top plate. A fixing ring is installed inside the adjusting plate, and the fixing ring is fixed to the target support rod by screws. A guide rod is in contact inside the lead screw fixing base plate. An external hexagonal screw three is movably connected inside the lead screw fixing base plate, and the external hexagonal screw is threadedly connected to the guide rod. The right side of the guide rod contacts the lead screw fixing top plate. An external hexagonal screw four is movably connected inside the lead screw fixing top plate, and the external hexagonal screw four is threadedly connected to the guide rod. A flange linear bearing is installed inside the adjusting plate by screws, and the flange linear bearing contacts the guide rod. Through the combined action of the guide rod and the flange linear bearing, the telescopic movement will not experience any jamming.

[0016] Preferably, the lead screw fixing base plate has a deep groove ball bearing inside, a shaft elastic retaining ring on the left side of the deep groove ball bearing, a lead screw inside the deep groove ball bearing, and the lead screw in contact with the shaft elastic retaining ring. A lead screw nut is installed inside the adjusting plate via screws, and the lead screw nut is in contact with the lead screw. A second deep groove ball bearing is inside the lead screw fixing top plate, and the second deep groove ball bearing is in contact with the lead screw. A first synchronous pulley is located on the outer side of the lead screw. A servo motor mounting plate is located on the right side of the lead screw fixing top plate, and a reducer is located on the left side of the servo motor mounting plate. The output shaft of the reducer is rotatably connected to the servo motor mounting plate. A second synchronous pulley is provided on the outer side of the output shaft. The surfaces of the second synchronous pulley and the first synchronous pulley are jointly provided with a synchronous belt. A synchronous belt adjustment block is provided on the right and left sides of the top plate of the lead screw. A servo motor is provided on the left side of the reducer. A servo driver is provided on the left side of the servo motor. Power is provided by the servo motor. With the cooperation of the servo driver and the reducer, the power output of the servo motor is more stable and continuous. Under the action of the first synchronous pulley, the second synchronous pulley, the synchronous belt and other structures, the lead screw can be driven to rotate. Through the cooperation of the lead screw and the lead screw nut and other structures, the target can perform telescopic movement. The telescopic movement of the lead screw is more stable, the target support rod will not wobble, and better sliding can be achieved.

[0017] Preferably, a proximity switch sensing plate is provided on the left side of the adjustment plate, a proximity switch mounting plate is provided on the left side of the lead screw fixing top plate, and a proximity switch is provided on the inner side of the proximity switch mounting plate. By setting up structures such as proximity switches and proximity switch sensing plates, the extension and retraction of the target can be controlled, and the extension and retraction distance can be controlled more precisely.

[0018] The beneficial effects of this invention are as follows: This invention relates to an automatic adjustable telescopic target device in a magnetron sputtering coating machine, which can automatically and smoothly adjust the position of the target, thereby adjusting the target-substrate distance to ensure the coating effect for different coating products. In specific use, compared with traditional magnetron sputtering coating machines, it has the following beneficial effects:

[0019] By incorporating a target body, target material, target base mechanism, insulation mechanism, sliding sealing mechanism, sealing cover, skeleton oil seal, sealing seat, sliding inner sleeve, telescopic device, fixing ring, adjusting plate, guide rod fixing plate, lead screw fixing top plate, lead screw fixing bottom plate, lead screw, guide rod, servo motor mounting plate, etc., the target body is telescopically propelled by a servo motor powered by a lead screw and lead screw nut. This telescopic movement is more stable, the target support rod does not wobble, and it achieves better sliding. The telescopic movement is achieved through the joint cooperation of the guide rod and flange linear bearing, eliminating any jamming. The skeleton oil seal provides a simple and reliable sealing method, and the cooperation of the sliding inner sleeve, sliding spacer, and sliding outer sleeve makes the telescopic movement smoother. The telescopic movement of the target body is controlled by the cooperation of a proximity switch and a proximity switch sensing plate, and the proximity switch sensing plate is adjustable, allowing for more precise control of the telescopic distance. Attached image description:

[0020] For ease of explanation, the present invention will be described in detail below with reference to specific embodiments and accompanying drawings.

[0021] Figure 1 This is a perspective view of the telescopic device of the present invention;

[0022] Figure 2 This is a cross-sectional schematic diagram of the present invention, showing the target body retracted into the inner ear cavity;

[0023] Figure 3 This is a cross-sectional schematic diagram of the present invention showing the target extending into the coating chamber;

[0024] Figure 4 For the present invention Figure 1 A partial frontal sectional view;

[0025] Figure 5 For the present invention Figure 1 Top view;

[0026] Figure 6 For the present invention Figure 1 Side view;

[0027] Figure 7 For the present invention Figure 2 Enlarged view of point A;

[0028] Figure 8 For the present invention Figure 2 Enlarged view of point B;

[0029] Figure 9 For the present invention Figure 4 Enlarged view of point C;

[0030] Figure 10 For the present invention Figure 4Enlarged view of point D;

[0031] Figure 11 For the present invention Figure 5 Enlarged view of point E.

[0032] In the diagram: 1. Coating chamber; 11. Side wall panel of coating chamber; 2. Ear chamber; 21. Ear chamber surrounding panel; 22. Side wall panel of ear chamber; 3. Target body; 31. Target material; 32. Target base mechanism; 33. Insulation mechanism; 34. Shielding cover; 35. Target support rod; 4. Sliding sealing mechanism; 41. Sealing cover; 42. Skeleton oil seal; 43. Sealing seat; 44. Sliding inner sleeve; 45. Sliding spacer; 46. Sliding outer sleeve; 5. Telescopic device; 51. Fixing ring; 52. Adjusting plate; 53. Guide rod fixing plate; 54. Screw fixing. 55. Top plate; 56. Lead screw fixing base plate; 57. Lead screw; 58. Guide rod; 59. Servo motor mounting plate; 50. Synchronous belt adjusting block; 510. Proximity switch sensing plate; 511. Proximity switch mounting plate; 512. Deep groove ball bearing; 513. Shaft elastic retaining ring; 514. Lead screw nut; 515. Flange linear bearing; 516. Synchronous pulley one; 5161. Synchronous pulley two; 517. Synchronous belt; 518. Reducer; 519. Servo motor; 520. Servo driver; 521. Proximity switch. Detailed Implementation

[0033] like Figure 1-11 As shown, the specific implementation adopts the following technical solution:

[0034] Example:

[0035] An automatic adjustable telescopic device for a target in a magnetron sputtering coating machine includes a coating chamber 1, a coating chamber side wall plate 11, an ear chamber 2, an ear chamber surrounding plate 21, an ear chamber side wall plate 22, a target 3, a sliding sealing mechanism 4, and a telescopic device 5. The ear chamber 2 is provided on the right side of the coating chamber 1. The coating chamber side wall plate 11 and the ear chamber surrounding plate 21 are fixedly connected by an internal hexagon screw. The right side of the ear chamber surrounding plate 21 is fixedly connected to the ear chamber side wall plate 22.

[0036] The ear chamber 2 contains a target body 3, which includes a target material 31, a target base mechanism 32, an insulating mechanism 33, a shielding cover 34, and a target support rod 35. The ear chamber sidewall 22 contains the target support rod 35, which contacts the target base mechanism 32 on its left side. The target base mechanism 32 contains an insulating mechanism to insulate the target support rod 35 from the target base mechanism 32. The target support rod 35 is movably connected to a hexagon socket screw. The target support rod 35 is connected to the target base mechanism 32 by a threaded connection and is fixed by an internal hexagon screw. The target support rod 35 is fixed to the target base mechanism 32. The target material 31 is provided on the left side of the target base mechanism 32, and a shielding cover 34 is provided on the outside of the target base mechanism 32. An insulating mechanism 33 is provided inside the shielding cover 34. The insulating mechanism 33 is in contact with the target base mechanism 32. Through the setting of the target base mechanism 32, the insulating mechanism 33 and other structures, the target body 3 can be installed and used for subsequent coating treatment of the coated product.

[0037] The right side of the ventricular sidewall panel 22 is provided with a sliding sealing mechanism 4. The sliding sealing mechanism 4 includes a sealing cover 41, a skeleton oil seal 42, a sealing seat 43, a sliding inner sleeve 44, a sliding spacer 45, and a sliding outer sleeve 46. The sliding outer sleeve 46 is disposed inside the ventricular sidewall panel 22 and contacts the target support rod 35. The right side of the sliding outer sleeve 46 contacts the sealing seat 43. An external hexagonal screw is movably connected inside the sealing seat 43 and is movably connected to the sliding outer sleeve 46. The external hexagonal screw is threadedly connected to the ventricular sidewall panel 22. The inner side of the sealing seat 43 is provided with the sliding inner sleeve 44 and contacts the target support rod 35. The left side of the sliding inner sleeve 44 is provided with the sliding spacer 45 and contacts the target support rod 35. The sliding spacer 45 contacts the sealing seat 43. Two skeleton oil seals 42 are provided on the inner side of the sealing seat 43. The left skeleton oil seal 42 contacts the target support rod 35, the sliding spacer 45, and the sliding outer sleeve 46. The right skeleton oil seal 42 contacts the sliding inner sleeve 44 and the target support rod 35. A sealing cover 41 is provided on the right side of the right skeleton oil seal 42. A second external hexagonal screw is movably connected inside the sealing cover 41. The second external hexagonal screw is threadedly connected to the sealing seat 43. The second external hexagonal screw allows for the fixed installation of the sealing cover 41 and the sealing seat 43. Sealing is achieved through the skeleton oil seal 42, making the sealing method simple and reliable. Furthermore, the coordinated action of the sliding inner sleeve 44, the sliding spacer 45, and the sliding outer sleeve 46 ensures smoother telescopic movement.

[0038] The right side of the anal chamber sidewall 22 is provided with a telescopic device 5. The telescopic device 5 includes a fixing ring 51, an adjusting plate 52, a guide rod fixing plate 53, a lead screw fixing top plate 54, a lead screw fixing bottom plate 55, a lead screw 56, a guide rod 57, a servo motor mounting plate 58, a synchronous belt adjusting block 59, a proximity switch sensing plate 510, a proximity switch mounting plate 511, a deep groove ball bearing 512, a shaft elastic retaining ring 513, a lead screw nut 514, a flange linear bearing 515, a first synchronous pulley 516, a second synchronous pulley 5161, a synchronous belt 517, a reducer 518, a servo motor 519, a servo driver 520, and a proximity switch 521. The right side of the anal chamber sidewall 22 contacts the lead screw fixing bottom plate 55. The screw fixing base plate 55 is internally connected to a hexagon socket screw three, which is threaded to the ear chamber side wall plate 22. Guide rod fixing plates 53 are provided on both the front and rear sides of the screw fixing base plate 55. A screw fixing top plate 54 is provided between the guide rod fixing plates 53. An adjusting plate 52 is provided between the guide rod fixing plates 53 and on the left side of the screw fixing top plate 54. A fixing ring 51 is provided inside the adjusting plate 52, and the fixing ring 51 is fixed to the target support rod 35 by screws. A guide rod 57 is in contact with the inside of the screw fixing base plate 55. An external hexagon socket screw three is internally connected to the screw fixing base plate 55, and the external hexagon socket screw is threaded to the guide rod 57. The right side of rod 57 contacts the lead screw fixing top plate 54. A hexagonal screw four is movably connected inside the lead screw fixing top plate 54, and the hexagonal screw four is threadedly connected to the guide rod 57. A flanged linear bearing 515 is installed inside the adjusting plate 52 via screws, and the flanged linear bearing 515 contacts the guide rod 57. A deep groove ball bearing 512 is installed inside the lead screw fixing base plate 55, and a shaft elastic retaining ring 513 is installed on the left side of the deep groove ball bearing 512. A lead screw 56 is installed inside the deep groove ball bearing 512, and the lead screw 56 contacts the shaft elastic retaining ring 513. A lead screw nut 514 is installed inside the adjusting plate 52 via screws, and the lead screw nut 514 connects to the lead screw 56. The screw fixing top plate 54 contains a second deep groove ball bearing, which contacts the screw 56. A first synchronous pulley 516 is located on the outer side of the screw 56. A servo motor mounting plate 58 is located on the right side of the screw fixing top plate 54, and a reducer 518 is located on the left side of the servo motor mounting plate 58. The output shaft of the reducer 518 is rotatably connected to the servo motor mounting plate 58. A second synchronous pulley 5161 is located on the outer side of the output shaft of the reducer 518. A synchronous belt 517 is provided on the surfaces of both the second synchronous pulley 5161 and the first synchronous pulley 516. A synchronous belt adjusting block 59 is located on the left side of the screw fixing top plate 54, and a servo motor 519 is located on the left side of the reducer 518.A servo driver 520 is located on the left side of the servo motor 519, a proximity switch sensing plate 510 is located on the left side of the adjusting plate 52, and a proximity switch mounting plate 511 is located on the left side of the lead screw fixing top plate 54. A proximity switch 521 is located on the inner side of the proximity switch mounting plate 511. Through the arrangement of the proximity switch 521, proximity switch sensing plate 510, and other structures, the extension and retraction of the target 3 can be controlled, allowing for more precise control of the extension and retraction distance. Power is provided by the servo motor 519, and with the cooperation of the servo driver 520 and reducer 518, the power output of the servo motor 519 is more stable and continuous. (The last sentence appears to be incomplete and possibly refers to a different topic.) 16. Under the action of structures such as the synchronous pulley 5161 and the synchronous belt 517, the lead screw 56 can be driven to rotate. Through the cooperation of the lead screw 56 and the lead screw nut 514, the target 3 can perform telescopic movement. The telescopic movement of the lead screw 56 is more stable, the target support rod 35 will not wobble, and better sliding can be achieved. Through the joint cooperation of the guide rod 57 and the flange linear bearing 515, the telescopic movement will not have any jamming. Through the cooperation of the proximity switch 521 and the proximity switch sensing plate 510, the telescopic movement of the target 3 can be controlled. The proximity switch sensing plate 510 is adjustable, which can more accurately control the telescopic distance.

[0039] The invention is used as follows: During use, power is provided by the servo motor 519. With the cooperation of the servo driver 520 and the reducer 518, the power output of the servo motor 519 is more stable and continuous. Under the action of the synchronous pulley 516, synchronous pulley 5161, synchronous belt 517, etc., the lead screw 56 can be driven to rotate. Through the cooperation of the lead screw 56 and the lead screw nut 514, the target 3 performs telescopic movement, and the telescopic movement of the lead screw 56 is more stable, the target support rod 35 does not wobble, and better sliding is achieved. The coordinated operation of the guide rod 57 and the flange linear bearing 515 ensures that the telescopic movement will not experience any jamming. The sealing method is achieved through the skeleton oil seal 42, which is simple and reliable. With the cooperation of the sliding inner sleeve 44, sliding spacer 45, and sliding outer sleeve 46, the telescopic movement will be smoother. The telescopic movement of the target 3 can be controlled by the cooperation of the proximity switch 521 and the proximity switch sensing plate 510. The proximity switch sensing plate 510 is adjustable, which can more accurately control the telescopic distance.

[0040] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the present invention. Various changes and modifications can be made to the present invention without departing from its spirit and scope. All such changes and modifications fall within the scope of the present invention as claimed, which is defined by the appended claims and their equivalents.

Claims

1. An automatic adjustable telescopic device for a target in a magnetron sputtering coating machine, comprising a coating chamber (1), a coating chamber side wall plate (11), an ear chamber (2), an ear chamber enclosure plate (21), an ear chamber side wall plate (22), a target (3), a sliding sealing mechanism (4), and a telescopic device (5), characterized in that: An ear chamber (2) is provided on the right side of the coating chamber (1). A target (3) is provided inside the ear chamber (2). A telescopic device (5) is provided on the right side of the ear chamber side wall plate (22). A sliding sealing mechanism (4) is provided on the right side of the ear chamber side wall plate (22). The coating chamber side wall plate (11) and the ear chamber surrounding plate (21) are fixedly connected by an internal hexagon screw. The right side of the ear chamber surrounding plate (21) is fixedly connected to the ear chamber side wall plate (22). The telescopic device (5) includes a fixed ring (51), an adjusting plate (52), a guide rod fixing plate (53), a lead screw fixing top plate (54), a lead screw fixing bottom plate (55), a lead screw (56), a guide rod (57), a servo motor mounting plate (58), a synchronous belt adjusting block (59), a proximity switch sensing plate (510), a proximity switch mounting plate (511), a deep groove ball bearing (512), a shaft elastic retaining ring (513), a lead screw nut (514), and a flange linear bearing (515). The system includes a first synchronous pulley (516), a second synchronous pulley (5161), a synchronous belt (517), a reducer (518), a servo motor (519), a servo driver (520), and a proximity switch (521). A lead screw fixing base plate (55) contacts the right side of the ear chamber sidewall plate (22). An internal hexagonal screw (3) is movably connected inside the lead screw fixing base plate (55). The hexagonal screw (3) is threadedly connected to the ear chamber sidewall plate (22). The lead screw fixing base plate (55) has a screw thread on both its front and rear sides. A guide rod fixing plate (53) is provided, and a lead screw fixing top plate (54) is provided between the guide rod fixing plates (53). An adjusting plate (52) is provided between the guide rod fixing plates (53) and on the left side of the lead screw fixing top plate (54). A fixing ring (51) is provided inside the adjusting plate (52). The fixing ring (51) is fixed to the target support rod (35) by screws. The lead screw fixing base plate (55) is in contact with the guide rod (57). The internal movable connection is a hexagonal screw three, which is threaded to the guide rod (57). The right side of the guide rod (57) is in contact with the screw fixing top plate (54). The internal movable connection of the screw fixing top plate (54) is a hexagonal screw four, which is threaded to the guide rod (57). The internal of the adjusting plate (52) is fitted with a flange linear bearing (515) by screws, which is in contact with the guide rod (57).

2. The automatic adjustable telescopic target device in a magnetron sputtering coating machine according to claim 1, characterized in that: The target body (3) includes a target material (31), a target base mechanism (32), an insulation mechanism (33), a shield (34), and a target support rod (35). The target support rod (35) is provided inside the ear chamber side wall plate (22). The target support rod (35) is in contact with the target base mechanism (32) on the left side. The target base mechanism (32) is provided with an insulation mechanism inside. The target material (31) is provided on the left side of the target base mechanism (32). The shield (34) is provided on the outside of the target base mechanism (32). The shield (34) is provided with an insulation mechanism (33) inside. The insulation mechanism (33) is in contact with the target base mechanism (32).

3. The automatic adjustable telescopic target device in a magnetron sputtering coating machine according to claim 2, characterized in that: The target support rod (35) is internally connected to a hexagonal screw, which is threadedly connected to the target base mechanism (32).

4. The automatic adjustable telescopic target device in a magnetron sputtering coating machine according to claim 2, characterized in that: The sliding sealing mechanism (4) includes a sealing cap (41), a skeleton oil seal (42), a sealing seat (43), a sliding inner sleeve (44), a sliding spacer (45), and a sliding outer sleeve (46). The sliding outer sleeve (46) is provided inside the ventricular sidewall plate (22). The sliding outer sleeve (46) contacts the target support rod (35). The right side of the sliding outer sleeve (46) contacts the sealing seat (43). An external hexagonal screw is movably connected inside the sealing seat (43). The external hexagonal screw is movably connected to the sliding outer sleeve (46). The external hexagonal screw is threadedly connected to the ventricular sidewall plate (22). The inner sleeve is provided inside the sealing seat (43). (44) The sliding inner sleeve (44) is in contact with the target support rod (35). A sliding spacer (45) is provided on the left side of the sliding inner sleeve (44). The sliding spacer (45) is in contact with the target support rod (35). The sliding spacer (45) is in contact with the sealing seat (43). Two skeleton oil seals (42) are provided on the inner side of the sealing seat (43). The skeleton oil seal (42) on the left side is in contact with the target support rod (35), the sliding spacer (45), and the sliding outer sleeve (46). The skeleton oil seal (42) on the right side is in contact with the sliding inner sleeve (44) and the target support rod (35). A sealing cover (41) is provided on the right side of the skeleton oil seal (42).

5. The automatic adjustable telescopic target device in a magnetron sputtering coating machine according to claim 4, characterized in that: The sealing cap (41) is internally connected to a hexagonal screw, which is threadedly connected to the sealing seat (43).

6. The automatic adjustable telescopic target device in a magnetron sputtering coating machine according to claim 1, characterized in that: The screw fixing base plate (55) is equipped with a deep groove ball bearing (512) inside. A shaft elastic retaining ring (513) is provided on the left side of the deep groove ball bearing (512). A screw (56) is provided inside the deep groove ball bearing (512). The screw (56) is in contact with the shaft elastic retaining ring (513). A screw nut (514) is installed inside the adjusting plate (52) by screws. The screw nut (514) is in contact with the screw (56). A second deep groove ball bearing is provided inside the screw fixing top plate (54). The second deep groove ball bearing is in contact with the screw (56). A first synchronous pulley (516) is provided on the outside of the screw (56). The screw fixing top plate (54) is equipped with a second deep groove ball bearing. The second deep groove ball bearing is in contact with the screw (56). A first synchronous pulley (516) is provided on the outside of the screw (56). A servo motor mounting plate (58) is provided on the right side of the servo motor mounting plate (58). A reducer (518) is provided on the left side of the servo motor mounting plate (58). The output shaft of the reducer (518) is rotatably connected to the servo motor mounting plate (58). A second synchronous pulley (5161) is provided on the outer side of the output shaft of the reducer (518). A synchronous belt (517) is provided on the surface of the second synchronous pulley (5161) and the first synchronous pulley (516). A synchronous belt adjusting block (59) is provided on the left side of the screw fixing top plate (54). A servo motor (519) is provided on the left side of the reducer (518). A servo driver (520) is provided on the left side of the servo motor (519).

7. The automatic adjustable telescopic target device in a magnetron sputtering coating machine according to claim 6, characterized in that: A proximity switch sensing plate (510) is provided on the left side of the adjusting plate (52), a proximity switch mounting plate (511) is provided on the left side of the lead screw fixing top plate (54), and a proximity switch (521) is provided on the inner side of the proximity switch mounting plate (511).

Images