一种可见-微波多谱段电磁波动态调控器件及其制备方法
By constructing a VO2 electromagnetic wave dynamic control device with top and bottom FP cavity structures and replacing the traditional metal layer with selective reflective materials, dynamic control of electromagnetic waves in the visible-microwave ultra-wideband was achieved. This solves the problem that existing devices cannot achieve wide-band, multi-spectral electromagnetic wave control and improves the control range.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- HARBIN INST OF TECH
- Filing Date
- 2023-11-07
- Publication Date
- 2026-07-17
AI Technical Summary
Existing VO2 electromagnetic wave dynamic control devices cannot achieve dynamic control of wide-band, multi-spectral electromagnetic waves. The R-value of existing devices is less than 100, which cannot meet the functional integration requirements of wide-band, multi-spectral electromagnetic waves.
A visible-microwave multi-band electromagnetic wave dynamic control device is constructed from bottom to top, consisting of a substrate, a first VO2 layer, a first intermediate dielectric layer, a selective reflective layer, a second VO2 layer, a second intermediate dielectric layer, and a third VO2 layer. Each layer is deposited using high-energy pulsed magnetron sputtering, DC magnetron sputtering, and radio frequency magnetron sputtering techniques to replace the fully reflective metal layer in the traditional FP structure, forming a top and bottom FP cavity structure to achieve joint control of electromagnetic waves.
It enables dynamic control of electromagnetic waves in the visible-microwave ultrawide band, increasing the maximum wavelength range R value by three orders of magnitude to 100,000, thus meeting the functional integration requirements of multi-spectral electromagnetic waves.
Smart Images
Figure CN117498037B_ABST