Evaporator
Patent Information
- Application Number
- CN202311647742.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-04
- Publication Date
- 2026-09-22
- Estimated Expiration
- 2043-12-04
AI Technical Summary
[0003]据现有技术,有一种电容薄膜的镀膜设备,公开号为CN205874524U,包括箱体、镀鼓、卷绕装置与蒸发装置,卷绕装置包括放卷机构与收卷机构,放卷机构设置有放卷轴,收卷机构设置有收卷轴,放卷轴与收卷轴分别与镀鼓呈平行设置,蒸发装置包括铝蒸发机构与锌蒸发器,镀鼓置于箱体的中部位置,镀鼓的径向方向两侧分别设置有屏蔽带,卷绕装置置于箱体内对应屏蔽带的上方位置,蒸发装置置于箱体内对应屏蔽带的下方位置,放卷轴与收卷轴分别置于镀鼓上方的两侧位置,铝蒸发机构置于镀鼓的下方对应放卷轴一侧位置,锌蒸发器置于镀鼓的下方对应收卷轴一侧位置,在镀膜过程中杂质会遗留在薄膜表面,箱体内没有除杂的装置,需要额外进行除杂处理,可靠性差,使用不方便
[0009]采用以上结构后,本发明与现有技术相比具有以下优点:在真空镀室内设置静电发生装置,静电发生装置设在冷却转鼓和收卷机构之间,薄膜在冷却转鼓上镀完膜后经过静电发生装置进行除尘最后卷绕在收卷机构上,具体地,静电发生装置包括左壳体和右壳体,左壳体和右壳体内均设有静电发生器同时在左壳体和右壳体之间设通孔,薄膜穿设在通孔内且静电发生器分别位于薄膜的左右两侧,能同时对薄膜的正反两侧面进行除尘,可靠性高;左壳体一端和右壳体一端铰接在一起,右壳体另一端的外侧面设卡扣组件,真空镀室内侧壁对应左壳体的位置设卡接座,利用卡扣组件与卡接座配合实现左壳体和右壳体之间的打开与关闭,不需要用螺栓锁紧,使用方便。
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Figure CN117512507B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of coating technology, and more particularly to a vapor deposition machine. Background Technology
[0002] The coating equipment for capacitor films typically includes a housing, a coating drum, a winding device, and an evaporation device. The winding device includes an unwinding mechanism and a winding mechanism. The unwinding mechanism is equipped with an unwinding shaft, and the winding mechanism is equipped with a winding shaft. The unwinding shaft and the winding shaft are respectively arranged parallel to the coating drum. The evaporation device includes an aluminum evaporation mechanism and a zinc evaporator.
[0003] According to existing technology, there is a capacitor film coating equipment, publication number CN205874524U, which includes a housing, a coating drum, a winding device, and an evaporation device. The winding device includes an unwinding mechanism and a winding mechanism. The unwinding mechanism is provided with an unwinding shaft, and the winding mechanism is provided with a winding shaft. The unwinding shaft and the winding shaft are respectively arranged parallel to the coating drum. The evaporation device includes an aluminum evaporation mechanism and a zinc evaporator. The coating drum is located in the middle of the housing. Shielding strips are provided on both sides of the coating drum in the radial direction. The winding device is located above the shielding strips in the housing, and the evaporation device is located below the shielding strips in the housing. The unwinding shaft and the winding shaft are respectively located on both sides above the coating drum. The aluminum evaporation mechanism is located below the coating drum on one side of the unwinding shaft, and the zinc evaporator is located below the coating drum on one side of the winding shaft. During the coating process, impurities will remain on the film surface. There is no impurity removal device in the housing, which requires additional impurity removal treatment. This results in poor reliability and inconvenience in use. Summary of the Invention
[0004] The technical problem to be solved by the present invention is to overcome the defects of the prior art and provide a vapor deposition machine with a post-treatment device that is highly reliable and easy to use.
[0005] To achieve the above objectives, the technical solution of the present invention is: a vapor deposition machine, comprising a vacuum deposition chamber, wherein the vacuum deposition chamber is respectively provided with an unwinding mechanism, a winding mechanism, a cooling drum, an anti-oxidation oil device, and a shielding oil evaporation device. The winding mechanism and the unwinding mechanism are respectively located on the front and rear sides of the cooling drum. The anti-oxidation oil device is disposed between the cooling drum and the winding mechanism. The shielding oil evaporation device is disposed between the cooling drum and the unwinding mechanism. It also includes an electrostatic generator for dust removal of the film, which is also disposed between the cooling drum and the winding mechanism. The electrostatic generator comprises:
[0006] The left housing has a first opening on its inner side, and an electrostatic generator is installed in the first opening.
[0007] The right shell has a second opening on its inner side, and an electrostatic generator is also provided in the second opening; when the left shell and the right shell are tightly attached together, a guide hole is formed between the left shell and the right shell to allow the thin film to pass through vertically, and the electrostatic generator is located on the left and right sides of the guide hole respectively.
[0008] The right shell is hinged to the left shell at one end, and a snap-fit seat is provided on the inner side wall of the vacuum plating chamber at the position corresponding to the other end of the left shell. A snap-fit assembly is provided on the outer side of the other end of the right shell. When the snap-fit assembly is snapped onto the snap-fit seat, the left shell and the right shell are tightly attached together.
[0009] With the above structure, the present invention has the following advantages compared with the prior art: An electrostatic generator is set in the vacuum coating chamber between the cooling drum and the winding mechanism. After the film is coated on the cooling drum, it passes through the electrostatic generator for dust removal and is finally wound onto the winding mechanism. Specifically, the electrostatic generator includes a left shell and a right shell. Both the left and right shells are equipped with electrostatic generators, and a through hole is provided between the left and right shells. The film passes through the through hole, and the electrostatic generators are located on the left and right sides of the film, respectively. This allows for simultaneous dust removal on both sides of the film, resulting in high reliability. One end of the left shell and one end of the right shell are hinged together, and a snap-fit assembly is provided on the outer side of the other end of the right shell. A snap-fit seat is provided on the inner side wall of the vacuum coating chamber corresponding to the position of the left shell. The snap-fit assembly and the snap-fit seat cooperate to open and close the left and right shells without the need for bolt locking, making it convenient to use.
[0010] Preferably, the snap-fit assembly includes:
[0011] The first support plate is horizontally disposed on the outer side of the right shell.
[0012] A locking block is located above the first support plate. The locking block rotates up and down in the middle and fits on the outer side of the right shell. The bottom surface of the locking block near the left shell has a locking groove, and the bottom surface of the locking block away from the left shell has a sliding groove. A compression spring is installed in the sliding groove.
[0013] The upper end of the spring block is slidably fitted in the slide groove, the lower end of the compression spring is connected to the upper end of the spring block, the lower end of the spring block abuts against the first support plate, and the compression spring is in a compressed state.
[0014] When the locking block moves above the locking seat, the compression spring drives the locking block to rotate counterclockwise, causing the locking slot to lock onto the locking seat. In the free state, the spring block drives the locking block to press against the locking seat, causing the locking slot on the locking block to lock onto the locking seat. The structure is simple and easy to use.
[0015] Preferably, the vacuum plating chamber is further provided with:
[0016] Two fixed supports are respectively located on the left and right sides of the vacuum plating chamber. Each fixed support includes a support body and a baffle. The support body is L-shaped, and the upper end of the support body is fixed to the inner wall of the vacuum plating chamber. The lower end of the baffle is hinged to the lower end of the support body. An upward-opening limiting groove is formed between the support body and the baffle. Both ends of the anti-oxidation oil device are placed in the limiting groove.
[0017] When the baffle rotates downwards, the antioxidant oil device is placed into or removed from the limiting groove; when the baffle rotates upwards, the antioxidant oil device is fixed in the limiting groove. Fixed supports are provided on both inner walls of the vacuum plating chamber, and the two ends of the antioxidant oil device are placed on these fixed supports for support. Specifically, the fixed supports include a support body and a baffle. The support body is L-shaped, which facilitates placing the ends of the antioxidant oil device on the support body and removing them from the support body, making installation and disassembly convenient. A baffle is also provided, forming an upward-opening limiting groove between the support body and the baffle. The lower end of the baffle is hinged to the lower end of the support body. When the baffle rotates downwards, the limiting groove is open, facilitating the installation and disassembly of the antioxidant oil device; when the baffle rotates upwards, the limiting groove is closed, facilitating the limiting of the antioxidant oil device.
[0018] Preferably, it also includes a limiting plate for limiting the rotation angle of the baffle. The front side of the lower end of the bracket body is provided with a limiting member. One end of the limiting plate is hinged to the front side of the baffle, and the other end of the limiting plate is provided with a sliding groove through hole. The limiting member is slidably engaged in the sliding groove through hole. By setting the limiting plate and providing the sliding groove through hole on the limiting plate, the rotation angle of the baffle is limited, preventing the baffle from swinging too much and making it convenient to use.
[0019] As a preferred option, it also includes:
[0020] The second support plate, wherein the shielding oil evaporation device is mounted on the second support plate;
[0021] The screw is located on the left and right sides of the shielding oil evaporation device. The upper and lower ends of the screw are rotatably fitted in the vacuum plating chamber. The middle part of the screw passes through the second support plate and the screw is threadedly fitted with the second support plate.
[0022] The motor drives the screw to rotate. When the screw rotates, the second support plate moves up and down, making the distance between the shielding oil evaporation device and the unwinding mechanism adjustable. The second support plate supports the shielding oil evaporation device. The screw and motor are installed at both ends of the screw, which rotates and engages in the vacuum plating chamber. The middle of the screw is threaded into the second support plate, forming a lead screw structure. The motor drives the screw to rotate, and the rotation of the screw simultaneously drives the second support plate to move up and down, thereby making the distance between the shielding oil evaporation device and the unwinding mechanism adjustable. This provides sufficient space to replace the cover plate without disassembling the entire shielding oil evaporation system, making cover plate replacement simple.
[0023] Preferably, the vacuum plating chamber is also provided with guide rails on both the left and right sides, and the guide rails are arranged along the height direction of the vacuum plating chamber; the second support plate is provided with guide seats at both the left and right ends, and the guide seats slide up and down on the guide rails to guide the second support plate, which has high reliability.
[0024] Preferably, it also includes a first guide roller and a second guide roller, which are distributed vertically. The first guide roller is located below the unwinding mechanism, and the second support plate is located below the second guide roller. The film passes sequentially from the unwinding mechanism through the first guide roller, the second guide roller, and the cooling drum. The shielding oil evaporation device covers the film on the second guide roller with a shielding tape layer, which facilitates the covering of the film with the shielding tape layer.
[0025] Preferably, the shielding oil evaporation device includes:
[0026] The shielding oil evaporator is used to evaporate the shielding oil.
[0027] The third support plate is used to support the shielding oil evaporator body. The third support plate is located between the unwinding mechanism and the cooling drum.
[0028] Oil container, used to hold shielding oil;
[0029] An oil pump is included. The oil pump inlet is connected to the oil reservoir outlet via an oil outlet pipe. The oil pump outlet is connected to the shielding oil evaporator inlet via an oil inlet pipe. A third support plate is provided, and the shielding oil evaporator is placed on the third support plate. The oil reservoir and oil pump are provided. The oil pump is used to transport the oil in the oil reservoir to the shielding oil evaporator. The oil pump can quantitatively deliver shielding oil to the shielding oil evaporator. This allows for the delivery of new oil only after the shielding oil in the shielding oil evaporator is used up, eliminating the need for frequent oil changes. It is convenient to use and highly efficient.
[0030] As a preferred option, it also includes:
[0031] A transition block is provided on the outer surface of the shielding oil evaporator body. The transition block contains a three-way valve, and the oil drain port of the shielding oil evaporator body is connected to the first interface of the three-way valve.
[0032] The oil outlet pipe includes a first pipe and a second pipe; one end of the first pipe is connected to the oil pump inlet, and the other end of the first pipe is connected to the second interface of the tee; one end of the second pipe is connected to the oil can outlet, and the other end of the second pipe is connected to the third interface of the tee. The tee is used to connect the drain port, the oil can outlet, and the oil pump inlet respectively, so that new oil can be added to the shielding oil evaporator and residual oil can be discharged from the shielding oil evaporator.
[0033] Preferably, it also includes an auxiliary tube, which is fitted onto the second tube. One end of the auxiliary tube is detachably connected to the oil outlet of the oil can, and the other end of the auxiliary tube is fixed to the transition block. One end of the second tube is located inside the auxiliary tube. By removing one end of the auxiliary tube from the oil outlet of the oil can, air inside the oil can be expelled to prevent excessive pressure inside the oil can, and residual oil can also be discharged through the second tube, making it convenient to use. Attached Figure Description
[0034] Figure 1 This is a schematic diagram of the vapor deposition machine of the present invention.
[0035] Figure 2 This is a perspective view of the electrostatic generator of the vapor deposition machine of the present invention without the clip assembly.
[0036] Figure 3 This is a perspective view of the left housing of the vapor deposition machine of the present invention.
[0037] Figure 4 This is a perspective view of the right housing of the vapor deposition machine of the present invention with the buckle assembly removed.
[0038] Figure 5 This is a front sectional view of the evaporation machine buckle assembly and buckle seat of the present invention.
[0039] Figure 6 This is a front sectional view of the evaporation machine buckle assembly of the present invention.
[0040] Figure 7 This is a front view of the vapor deposition machine mounting bracket of the present invention.
[0041] Figure 8 This is a front view of the evaporation machine mounting bracket of the present invention.
[0042] Figure 9 This is a right view of the evaporation machine support body of the present invention.
[0043] Figure 10 This is a rear view of the vapor deposition machine of the present invention.
[0044] Figure 11 This is a front view of the shielding oil evaporation device for the vapor deposition machine of the present invention.
[0045] Among them, 1. Vacuum plating chamber; 110. Guide rail; 2. Unwinding mechanism; 3. Rewinding mechanism; 4. Cooling drum; 5. Electrostatic generator; 510. Left housing; 511. First opening; 520. Right housing; 521. Second opening; 522. Rotating rod; 523. Limiting nut; 530. Electrostatic generator; 540. Guide through hole; 6. Antioxidant oil device; 7. Shielding oil evaporation device; 710. Shielding oil evaporation body; 711. Opening groove; 720. Third support plate; 730. Oil can; 740. Oil pump; 8. Snap-fit seat; 810. Snap-fit protrusion; 9. Snap-fit assembly; 910. First support plate; 911. Inclined surface; 912. Limiting protrusion; 913. 920. Through-hole groove, 921. Locking block, 922. Locking groove, 923. Slide groove, 924. Compression spring, 925. Limiting component, 926. Limiting hole, 930. Handle, 930. Spring block, 10. Fixed bracket, 11. Bracket body, 12. Baffle, 13. Limiting groove, 14. Limiting plate, 15. Limiting component, 16. Slide groove through hole, 17. First guide roller shaft, 18. Second guide roller shaft, 19. Second support plate, 20. Screw, 21. Guide seat, 22. First guide roller, 23. Second guide roller, 24. Support block, 25. Oil outlet pipe, 26. First pipe, 27. Second pipe, 28. Auxiliary pipe, 29. Oil inlet pipe, 30. Solenoid valve, 31. Transition block. Detailed Implementation
[0046] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.
[0047] like Figure 1As shown, the present invention provides a vapor deposition machine, including a vacuum deposition chamber 1. The vacuum deposition chamber 1 is equipped with an unwinding mechanism 2, a winding mechanism 3, a cooling drum 4, an electrostatic generator 5, an anti-oxidation oil device 6, and a shielding oil evaporation device 7. The winding mechanism 3 and the unwinding mechanism 2 are located on the front and rear sides of the cooling drum 4, respectively. The anti-oxidation oil device 6 is located between the cooling drum 4 and the winding mechanism 3. The shielding oil evaporation device 7 is located between the cooling drum 4 and the unwinding mechanism 2. The electrostatic generator 5 is also located between the cooling drum 4 and the winding mechanism 3. The electrostatic generator 5 is used to remove dust from the deposited film to ensure film quality. The anti-oxidation oil device 6 is used to cover the deposited film with an anti-oxidation oil layer to prevent film oxidation. The shielding oil evaporation device 7 is used to cover the film before deposition with a shielding strip. Specifically, there are two antioxidant oil devices 6, which respectively cover the front and back sides of the film with antioxidant oil layers. The electrostatic generator 5 is located between the two antioxidant oil devices 6. The film starts from the unwinding mechanism 2 and passes sequentially through the shielding oil evaporation device 7, the cooling drum 4, the antioxidant oil device 6, the electrostatic generator 5, and finally is wound onto the winding mechanism 3. Specifically, both the unwinding mechanism 2 and the winding mechanism 3 are rollers, and the aluminum evaporator and the zinc evaporator are located below the cooling drum 4.
[0048] As one example, as one example, such as Figure 2 , 3 4. To facilitate quick opening and closing of the electrostatic generator 5, the electrostatic generator 5 includes a left housing 510 and a right housing 520. The left housing 510 has a first opening 511 inside, and the right housing 520 has a second opening 521 inside. Electrostatic generators 530 are installed in both the first and second openings 511 and 521. The left housing 510 and right housing 520 are fixed together, forming a guide hole 540 between them for the thin film to pass through vertically. The guide hole 540 penetrates the upper and lower surfaces of the electrostatic generator 5, allowing the thin film to pass through the guide hole 540 from bottom to top within the electrostatic generator 5. The electrostatic generators 530 are located on the left and right sides of the thin film, enabling simultaneous dust removal from both sides. Simultaneously, the left housing 510 is fixed to the inner wall of the vacuum plating chamber 1 by bolts, while the right housing 520 is movable. Specifically, as shown... Figure 5One end of the right housing 520 is hinged to one end of the left housing 510 (via a hinge). A snap-fit assembly 9 is provided on the outer side of the other end of the right housing 520. A snap-fit seat 8 is provided on the inner wall of the vacuum plating chamber 1 at the position corresponding to the other end of the left housing 510. When the snap-fit assembly 9 is engaged with the snap-fit seat 8, the left housing 510 and the right housing 520 are tightly pressed together. Due to the cooperation between the snap-fit assembly 9 and the snap-fit seat 8, the right housing 520 can be opened and closed very easily without the need for bolts, making it convenient to use. Specifically, both the left housing 510 and the right housing 520 have upper and lower layers, with four electrostatic generators 530 respectively located in each layer, resulting in a large dust removal area and good dust removal effect.
[0049] As one example, such as Figure 5 and 6 The latching assembly 9 includes a first support plate 910, a latching block 920, and a spring block 930. The first support plate 910 is fixed to the outer side of the other end of the right housing 520. The latching block 920 is located above the first support plate 910, and its middle part is rotatably engaged with the outer side of the other end of the right housing 520. The bottom surface of the latching block 920 near the left housing 910 is provided with a latching groove 921, and the bottom surface of the latching block 920 away from the left housing 910 is provided with a sliding groove 922, and a compression spring 923 is fixed in the sliding groove 922. The lower end of the spring block 930 abuts against the first support plate 910. On the upper surface, the upper end of the spring block 930 slides within the groove 922, and the lower end of the compression spring 923 is located on the upper surface of the spring block 930. The compression spring 923 is always in a compressed state. When the right housing 520 moves closer to the left housing 510, the compression spring 923 drives the locking block 920 to rotate counterclockwise, causing the locking groove 921 to engage with the locking seat 8, thus fixing the right housing 520 onto the left housing 510. When the locking block 920 is pressed down away from the end of the left housing 510, the locking block 920 rotates clockwise, and the locking groove 921 disengages from the locking seat 8, thus opening the right housing 520. Specifically, a rotating rod 522 is provided on the outer side of the other end of the right housing 520. The rotating rod 522 is perpendicular to the outer side of the other end of the right housing 520, and the middle part of the locking block 920 is rotatably engaged with the rotating rod 522, facilitating clockwise and counterclockwise rotation of the locking block 920. Specifically, the rotating rod 522 is equipped with a limiting nut 523 to limit the movement of the locking block 920 and also to adjust the tightness of the rotation of the locking block 920.
[0050] As one embodiment, in order to facilitate the clockwise rotation of the locking block 920, a handle 926 is provided on the outer side of the end of the locking block 920 away from the left housing 510. By holding the handle 926 and pressing down, the locking block 920 can be easily rotated clockwise, at which time the compression spring 923 is compressed.
[0051] As one example, such as Figure 7To guide the right housing 520, the upper surface of the locking seat 8 is provided with a locking protrusion 810. When the right housing 520 moves towards the left housing 510, the bottom surface of the first support plate 910 slides on the upper surface of the locking seat 8. When the locking block 920 moves above the locking protrusion 810, the locking groove 921 engages with the locking protrusion 810. Specifically, as shown... Figure 6 To facilitate the sliding fit of the first support plate 910 onto the upper surface of the latching seat 8, the end of the bottom surface of the first support plate 910 near the latching seat 8 is sloped 911 to prevent jamming between the first support plate 910 and the latching seat 8, ensuring high reliability. Specifically, the bottom surface of the first support plate 910 is also provided with a limiting protrusion 912 protruding from the bottom surface of the first support plate 910. When the latching groove 921 is engaged with the latching protrusion 910, the outer side of the limiting protrusion 912 abuts against the outer side of the latching seat 8, limiting the right housing 520, ensuring high reliability.
[0052] As one embodiment, in order to limit the locking block 920, it also includes a limiting member 924. The upper surface of the locking block 920 near the left housing 510 is provided with a limiting hole 925, which is located between the rotating rod 522 and the locking groove 921. The upper surface of the first support plate 910 is provided with a through hole groove 913 corresponding to the position of the limiting hole 925. The through hole groove 913 is set along the length direction of the first support plate 910. The lower end of the limiting member 924 passes through the limiting hole 925 and extends into the through hole groove 913. During the rotation of the locking block 920, the lower end of the limiting member 924 moves back and forth in the through hole groove 913 to limit the rotation angle of the locking block 920, preventing the locking block 920 from rotating too much. This makes it easy for the locking block 920 to be locked on the locking protrusion 810 and also easy to disengage from the locking protrusion 810. In other words, the right housing 520 is easy to open and close and convenient to use. Specifically, the limiting hole 925 is a threaded hole. Adjusting the upper and lower positions of the limiting member 924 in the through hole groove 913 adjusts the rotation angle range of the locking block 920.
[0053] Specifically, the snap-fit assembly 9 is located on the right housing 520, while the corresponding snap-fit seat 8 is located on the inner wall of the vacuum plating chamber 1. This design ensures high strength of the snap-fit seat 8, making it less prone to falling off. Simultaneously, the left housing 510 experiences less impact and is less likely to shift, resulting in a more secure and stable fixation of the left housing 510 within the vacuum plating chamber 1, ensuring high reliability. Since the snap-fit seat 8 does not need to be connected to the left housing 510, installation and disassembly are convenient. Specifically, the snap-fit seat 8 is fixed to the inner wall of the vacuum plating chamber 1 at the opposite end of the left housing 510.
[0054] Specifically, an electrostatic generator 5 is installed inside the vacuum coating chamber 1, located between the cooling drum 4 and the winding mechanism 3. After the film is coated on the cooling drum 4, it passes through the electrostatic generator 5 for dust removal and is finally wound onto the winding mechanism 3. Specifically, the electrostatic generator 5 includes a left housing 510 and a right housing 520. Both the left housing 510 and the right housing 520 are equipped with electrostatic generators 530. A guide hole 540 is provided between the left housing 510 and the right housing 520, through which the film passes. The through hole 540 and the electrostatic generator 530 are located on the left and right sides of the film, respectively, which can remove dust from both sides of the film at the same time, with high reliability. One end of the left shell 510 and one end of the right shell 520 are hinged together. The outer side of the other end of the right shell 520 is provided with a buckle assembly 9. The inner side wall of the vacuum plating chamber 1 is provided with a snap-fit seat 8 corresponding to the position of the left shell 510. The buckle assembly 9 and the snap-fit seat 8 are used to realize the opening and closing between the left shell 510 and the right shell 520 without the need for bolt locking, which is convenient to use.
[0055] Operation process: 1. When opening the right housing 520, hold the handle 926 and press it down. The locking block 920 rotates clockwise, and the locking groove 921 on the locking block 920 disengages from the locking protrusion 810, pulling open the right housing 520. This opens the right housing 520, allowing the membrane to be installed inside the electrostatic generator 5. In the free state, squeezing the spring 923 causes the locking block 920 to move counterclockwise. 2. When closing the right housing 520, it is also necessary to hold the handle. Pressing the handle 926 down causes the locking block 920 to rotate clockwise, while simultaneously pushing the right housing 520 closer to the left housing 510. At this point, the first support plate 910 slides against the upper surface of the locking seat 8. Once the limiting protrusion abuts against the outer side of the locking seat 8, releasing the handle causes the compression spring 923 to rotate the locking block 920 counterclockwise, and the locking groove 921 engages with the locking protrusion 810. At this point, the right housing 520 and the left housing 510 are tightly pressed together, thus closing the right housing 520. The operation is simple and convenient.
[0056] like Figure 8To facilitate the placement of the antioxidant oil device 6 within the vacuum plating chamber, it also includes two fixed supports 10. The two fixed supports 10 are respectively fixed to the left and right inner side walls of the vacuum plating chamber 1. Each fixed support 10 includes a support body 11 and a baffle 12. The support body 11 is L-shaped, and the ends of the antioxidant oil device 6 are placed on the upper surface of the lower end of the support body 11. Alternatively, the antioxidant oil device 6 can be removed from the support body 11, making installation and disassembly very convenient. The lower end of the baffle 12 is hinged to the lower end of the support body 11. The inner side of the lower end of the baffle 12, the upper surface of the lower end of the support body 11, and the right side of the upper end of the support body 11 form an upward-opening limiting groove 13, which limits the antioxidant oil device 6 located on the support body 11. When the baffle 12 rotates upward, it can prevent the antioxidant oil device 6 from being removed from the lower end of the bracket body 11; when the baffle 12 rotates downward, it can allow the antioxidant oil device 6 to be removed from the lower end of the bracket body 11, or allow the end of the antioxidant oil device 6 to be placed in the limiting groove 13, making installation and disassembly convenient.
[0057] As one embodiment, the baffle 12 is tightly fitted to the bracket body 11, so that the baffle 12 will not easily rotate and has high reliability.
[0058] As one example, such as Figure 9 To facilitate the hinged connection of the baffle 12 to the bracket body 11, an opening slot is provided on the right side of the lower end of the bracket body 11. A rotating shaft is located within the opening slot, and the lower end of the baffle 12 is positioned on the rotating shaft. The baffle 12 rotates with the rotating shaft and engages with the opening slot. This allows the baffle 12 to rotate downwards so that its upper surface is flush with the upper surface of the lower end of the bracket body 11, facilitating the installation and removal of the anti-oxidation oil device 6. Rotating the baffle 12 upwards makes it perpendicular to the upper surface of the lower end of the bracket body 11, ensuring the reliability of the baffle 12 while maintaining the maximum width of the limiting groove 13, facilitating the placement of the anti-oxidation oil device 6.
[0059] As one embodiment, to facilitate limiting the rotation angle of the baffle 12, it also includes a limiting plate 14. The upper end of the limiting plate 14 is rotatably fitted onto the front side of the baffle 12, and the lower end of the limiting plate 14 is provided with a sliding groove through hole 16. Correspondingly, a limiting member 15 is provided on the front side of the lower end of the bracket body 1. The limiting member 15 extends into the sliding groove through hole 16. During the up-and-down rotation of the baffle 12, the limiting member 15 slides within the sliding groove through hole 16, thus limiting the rotation angle of the baffle 12, facilitating easy rotation of the baffle 12 and making it convenient to use. The sliding groove through hole 16 is elongated and is set along the length direction of the limiting plate, so it does not affect the normal rotation of the baffle 12. Specifically, the limiting member 15 is a screw, and the diameter of the screw nut is larger than the width of the sliding groove through hole 16, so that the limiting plate 14 will not fall off the limiting member 15, ensuring high reliability.
[0060] As one embodiment, the upper end of the bracket body 11 is fixed inside the vacuum plating chamber 1. Specifically, a threaded hole is provided on the bracket body 11, and a bolt passes through the vacuum plating chamber 1 and is screwed into the threaded hole.
[0061] In one embodiment, there are two antioxidant oil devices 6, which respectively coat the front and back surfaces of the film with a layer of antioxidant oil. Specifically, in order to make the two antioxidant oil devices 6 face upward, a first guide roller 17 and a second guide roller 18 are provided. The first guide roller 17 is located directly below the second guide roller 18. The film travels from the cooling drum 4 to the right, passes through the first guide roller 17, then passes through the second guide roller 18, and finally to the winding mechanism 3. One antioxidant oil device 6 is located between the cooling drum 4 and the first guide roller 17, and the other antioxidant oil device 6 is located between the winding mechanism 3 and the second guide roller 18.
[0062] Specifically, fixed supports 10 are provided on both the left and right inner walls of the vacuum plating chamber 1. The two ends of the anti-oxidation oil device 6 are respectively placed on the fixed supports 1 to support the anti-oxidation oil device 6. Specifically, the fixed supports 10 include a support body 11 and a baffle 12. The support body 11 is L-shaped, which facilitates the placement of the ends of the anti-oxidation oil device 6 on the support body 11 and also facilitates the removal of the two ends of the anti-oxidation oil device 6 from the support body 11, making installation and disassembly convenient. At the same time, the baffle 12 is provided, and an upward-opening limiting groove 13 is formed between the support body 11 and the baffle 12. The lower end of the baffle 12 is hinged to the lower end of the support body 11. When the baffle 12 rotates downward, the limiting groove 13 is in an open state, which facilitates the installation and disassembly of the anti-oxidation oil device 6. When the baffle 12 rotates upward, the limiting groove 13 is in a closed state, which facilitates the limiting of the anti-oxidation oil device 6.
[0063] Operation process: When installing and disassembling, simply rotate the baffle 12 downwards to keep it horizontal, so that the end of the antioxidant oil device 6 can be placed into or removed from the limiting groove 13; when both ends of the antioxidant oil device 6 are placed into the limiting groove 13, rotate the baffle 12 upwards to keep it vertical, so that the antioxidant oil device 6 will not fall off, making installation and disassembly convenient.
[0064] like Figure 10To facilitate the installation of the shielding oil evaporation device 7, a second support plate 19 is installed inside the vacuum plating chamber 1. The second support plate 19 is horizontally positioned, and the shielding oil evaporation device 7 is fixed on the second support plate 19. The shielding oil evaporation device 7 covers the film covering strip between the unwinding mechanism 2 and the cooling drum 4, and this section of film is located above the shielding oil evaporation device 7. Specifically, different specifications of screen strips are required during the coating process, necessitating the replacement of different cover plates for the shielding oil evaporation device 7. For ease of replacement, it also includes a screw 20 and a motor. The upper and lower ends of the screw 20 are rotated within the vacuum coating chamber 1 via bearings. The middle of the screw 20 is threaded into the second support plate 19, forming a screw drive structure. In other words, the upper and lower ends of the screw 20 are smooth shafts, and the outer surface of the middle of the screw 20 has external threads. The screw 20 passes through the second support plate 19, and there are two screws 20, located on the left and right sides of the shielding oil evaporation device 7. The motor drives the screw 20 to rotate, thereby moving the second support plate 19 up and down. This allows the second support plate 19 to move the shielding oil evaporation device 7 away from and towards the film. When the film needs to cover the screen strip, the second support plate 19 moves upward towards the film; when the cover plate needs to be replaced, the second support plate 19 moves downward away from the film, leaving sufficient space for replacement without needing to remove the shielding oil evaporation device 7 from the vacuum coating chamber 1. Cover plate replacement is convenient. Specifically, one screw 20 corresponds to one motor, and the two motors rotate synchronously, so that the screw 20 rotates synchronously, and the second support plate 19 can be raised and lowered smoothly, with high reliability.
[0065] As one embodiment, the motor is located at the lower end of the vacuum plating chamber 1, with a low height, facilitating installation and disassembly by personnel. Specifically, the motor is located on the upper surface of the lower end of the vacuum plating chamber 1.
[0066] As one embodiment, the second support plate 19 is located on the upper surface of the lower end of the vacuum plating chamber 1. Specifically, in order to facilitate the installation of the motor, the bottom surface of the second support plate 19 is provided with at least one support block 24. The second support plate 19 abuts against the upper surface of the lower end of the vacuum plating chamber 1 using the support block 24. This provides a certain space between the second support plate 19 and the upper surface of the lower end of the vacuum plating chamber 1, which facilitates the installation of the motor and ensures high reliability.
[0067] As one embodiment, in order to make the up-and-down movement of the second support plate 19 more reliable, guide rails 110 are provided on both the left and right inner walls of the vacuum plating chamber 1. The guide rails 110 are arranged along the height direction of the vacuum plating chamber 1. Correspondingly, guide seats 21 are provided on both the left and right ends of the second support plate 19. The guide seats 21 slide and cooperate on the guide rails 110 to guide the second support plate 19, which has high reliability.
[0068] As one embodiment, in order to facilitate the introduction of the film on the unwinding mechanism 2 onto the cooling drum 4 and to facilitate the shielding oil evaporation device 7 to cover the shielding strip with the film, it also includes a first guide roller 22 and a second guide roller 23. The first guide roller 22 and the second guide roller 23 are both horizontally arranged, with the first guide roller 22 located between the unwinding mechanism 2 and the second guide roller 23. The first guide roller 22 is located directly above the second guide roller 23, and the shielding oil evaporation device 7 is located directly below the second guide roller 23.
[0069] Specifically, a second support plate 19 is provided to support the shielding oil evaporation device 7. A screw 20 and a motor are also provided. The upper and lower ends of the screw 20 are rotatably engaged in the vacuum plating chamber 1, and the middle of the screw 20 is threadedly engaged with the second support plate 19. In this way, the screw 20 and the second support plate 19 form a lead screw structure. The motor drives the screw 20 to rotate, and the rotation of the screw 20 drives the second support plate 19 to move up and down. This makes the distance between the shielding oil evaporation device 7 and the unwinding mechanism 2 adjustable. This provides enough space to replace the cover plate without having to disassemble the entire shielding oil evaporation system, making the replacement of the cover plate simple.
[0070] Operation process: 1. During coating, the motor is started, and the forward rotation of the motor drives the screw 20 to rotate, thereby causing the second support plate 19 to rise and approach the film. The shielding oil evaporation device 7 then covers the film with the shielding screen. 2. When replacing the cover plate, the motor is started, and the reverse rotation of the motor drives the screw 20 to rotate, thereby causing the second support plate 19 to descend and detach the film. The shielding oil evaporation device 7 can then immediately replace the upper cover plate. Cover plate replacement is convenient and efficient.
[0071] The oil inlet of the shielding oil evaporator 7 is located at the upper end of the shielding oil evaporator 7, and the oil outlet of the shielding oil evaporator 7 is located at the lower end of the shielding oil evaporator 7.
[0072] like Figure 11The shielding oil evaporation device 7 includes a shielding oil evaporation body 710, a third support plate 720, an oil reservoir 730, and an oil pump 740. The shielding oil evaporation body 710 is located on the third support plate 720, which is located inside the vacuum plating chamber 1, facilitating the placement of the shielding oil evaporation device 7 within the chamber. An oil outlet pipe 25 is provided between the oil reservoir 730 and the oil pump 740, with its two ends connected to the oil outlet of the oil reservoir 730 and the oil inlet of the oil pump 740, respectively. An oil inlet pipe 29 is provided between the oil pump 740 and the shielding oil evaporation body 710, with its two ends connected to the oil outlet of the oil pump 740 and the oil inlet of the shielding oil evaporation body 710, respectively. The oil pump 740 can quantitatively deliver the shielding oil from the oil reservoir 730 to the shielding oil evaporation device 7, eliminating the need for frequent replenishment of new oil. The shielding oil evaporation device 7 can directly deliver a quantitative amount of shielding oil after it is used up, making it convenient and efficient. Specifically, in order to deliver new oil to the shielded oil evaporation device 7 more accurately, it also includes a solenoid valve 30, which is electrically connected to the oil pump 740. Specifically, the solenoid valve 30 is located on the upper surface of the oil pump 740 and does not occupy space.
[0073] As one example, the oil inlet pipe 29 is a metal hose that is resistant to high temperatures and has a long service life.
[0074] As one embodiment, both the oil reservoir 730 and the oil pump 740 are mounted on the third support plate 720, which is convenient for installation and saves space. Specifically, the oil pump 740 is located between the oil reservoir 730 and the shielded oil evaporator body 710, which is a reasonable distribution. The oil reservoir 730 has a cap at the top for easy addition of new oil; the oil outlet of the oil reservoir 730 is located at the top of the oil reservoir 730, so that the oil in the oil reservoir 730 will not flow out from the oil outlet when the oil pump is not running, ensuring high reliability.
[0075] As one embodiment, to facilitate the delivery of new oil and the discharge of residual oil, it also includes a transition block 31, which is fixed to the lower end of the outer side of the shielded oil evaporator body 710. The oil outlet pipe 25 includes a first pipe 26 and a second pipe 27. The transition block 31 is provided with a tee, which has three interfaces: a first interface, a second interface, and a third interface. The first interface is located on the back of the transition block 31 and is connected to the oil outlet of the shielded oil evaporator body 710 through a pipe. A valve is provided on the pipe. The second interface is located on the left side of the transition block 31 and is connected to the oil inlet of the oil pump 740 through the first pipe 26. The third interface is located on the front side of the transition block 31 and is connected to the oil outlet of the oil can 730 through the second pipe 27. When new oil needs to be supplied to the shielding oil evaporator 710, the valve is closed, and the oil pump 740 is started, supplying the new oil from the oil reservoir 730 to the shielding oil evaporator 710. When residual oil needs to be discharged from the shielding oil evaporator 710, the valve is opened, and the second pipe 27 is disconnected, allowing the residual oil to drain from the third port. Specifically, both the first pipe 26 and the second pipe 27 are flexible metal hoses, which are heat-resistant, have a long service life, and high reliability. Specifically, the front side of the lower end of the shielding oil evaporator 710 has an opening groove 711, and the transition block 31 is located within the opening groove 711, saving space. Specifically, the transition block 31 is a metal block that is heat-resistant.
[0076] The first pipe 26 is sealed to the oil pump 740 and the second interface; the second pipe 27 is sealed to the oil outlet of the oil reservoir 730 and the third interface; and the pipe is sealed to the oil outlet of the shielded oil evaporator 710 and the first interface.
[0077] As one embodiment, it also includes an auxiliary pipe 28, the diameter and length of which are larger than those of the second pipe 27. The auxiliary pipe 28 is fitted onto the second pipe 27. One end of the auxiliary pipe 28 is detachably connected to the oil outlet of the oil reservoir 730, and the other end of the auxiliary pipe 28 is sealed to the transition block 31. The end of the second pipe 27 away from the transition block 31 is located inside the auxiliary pipe 28. By removing one end of the auxiliary pipe 28 from the oil outlet of the oil reservoir 730, the air inside the oil reservoir 730 can be discharged from the oil outlet, preventing excessive pressure inside the oil reservoir 730. If one end of the auxiliary pipe 28 is turned downwards and the valve is opened, the residual oil in the shielded oil evaporator 710 passes sequentially through the oil outlet of the shielded oil evaporator 710, the pipe, the first interface, and the third interface, and is discharged from one end of the second pipe 27. This process discharges residual oil while venting air, making it convenient, easy to operate, and highly efficient. Specifically, one end of the auxiliary tube 28 is snapped onto the oil outlet of the oil reservoir 730 and sealed, and the other end of the auxiliary tube 28 extends to the bottom of the oil reservoir 730, with the liquid level in the oil reservoir 730 being lower than the height of the oil outlet of the oil reservoir 730.
[0078] Specifically, the oil can 730 is a white plastic can. The liquid level in the oil can 730 can be observed so that the lid on the oil can 730 can be opened to add oil, ensuring that there is enough new oil in the oil can 730.
[0079] Specifically, the auxiliary tube 28 is a transparent rubber tube. During use, some oil will remain in the space between the inner wall of the auxiliary tube 28 and the outer wall of the second tube 27. Because there is oil in the auxiliary tube 28, it is easy for the oil pump 740 to extract the oil from the oil reservoir 730, resulting in low power consumption. The transparency of the auxiliary tube 28 allows for clear viewing of the oil level, preventing oil from dripping everywhere when disassembling one end, thus ensuring high reliability. Furthermore, the height of the oil outlet of the oil reservoir 730 is higher than the height of the third interface, making it less likely for the oil in the auxiliary tube 28 to spray out directly, further enhancing reliability.
[0080] Specifically, the front side of the shielding oil evaporator body 710 is provided with a heating mechanism for heating the oil inside the shielding oil evaporator body 710. The heating mechanism can be a heating wire or a heating tube.
[0081] Specifically, a third support plate 720 is set up, and the shielding oil evaporator 710 is placed on the third support plate 720. At the same time, an oil can 730 and an oil pump 740 are set up. The oil pump 740 is used to transport the oil in the oil can 730 to the shielding oil evaporator 710. The oil pump 740 can quantitatively deliver shielding oil to the shielding oil evaporator 710. In this way, new oil can be delivered only after the shielding oil in the shielding oil evaporator 710 is used up, so there is no need to change the oil frequently. It is convenient to use and highly efficient.
[0082] Operation process: 1. During coating, first close the valve on the pipeline, start the oil pump 740, and the oil pump 740 delivers a metered amount of new oil into the shielding oil evaporator 710. The oil flows from the oil outlet of the oil reservoir 730 through the second pipe 27, the third interface, the second interface, the first pipe 26, the oil pump 740, the oil inlet pipe 29, and the oil inlet of the shielding oil evaporator 710, finally entering the shielding oil evaporator 710. 2. After the oil in the shielding oil evaporator 710 is consumed, the residual oil needs to be discharged. Open the valve on the pipeline, close the oil pump 740, and the residual oil in the shielding oil evaporator 710 flows through the oil outlet of the shielding oil evaporator 710 through the first interface, the third interface, and the second pipe 27, finally being discharged from one end of the second pipe 27.
[0083] Based on the above solutions, if various modifications or variations to the present invention do not depart from the spirit and scope of the present invention, and if such modifications and variations fall within the scope of the claims and equivalent technologies of the present invention, then the present invention also intends to include such modifications and variations.
Claims
1. A vapor deposition machine, comprising a vacuum deposition chamber (1), wherein the vacuum deposition chamber (1) is respectively provided with an unwinding mechanism (2), a winding mechanism (3), a cooling drum (4), an anti-oxidation oil device (6), and a shielding oil evaporation device (7), wherein the winding mechanism (3) and the unwinding mechanism (2) are respectively located on the front and rear sides of the cooling drum (4), the anti-oxidation oil device (6) is disposed between the cooling drum (4) and the winding mechanism (3), and the shielding oil evaporation device (7) is disposed between the cooling drum (4) and the unwinding mechanism (2), characterized in that: It also includes an electrostatic generator (5) for dust removal from the film, which is also located between the cooling drum (4) and the winding mechanism (3). The electrostatic generator (5) includes: a left housing (510) with a first opening (511) inside, and an electrostatic generator (530) inside the first opening (511); a right housing (520) with a second opening (521) inside, and an electrostatic generator (530) inside the second opening (521); the left housing (510) and the right housing (520) are in close contact with each other. When the film is in use, a guide hole (540) is formed between the left shell (510) and the right shell (520) to allow the film to pass through vertically. The electrostatic generator (530) is located on the left and right sides of the guide hole (540). One end of the right shell (520) is hinged to one end of the left shell (510). The inner wall of the vacuum plating chamber (1) is provided with a snap-fit seat (8) at the position corresponding to the other end of the left shell (510). The outer side of the other end of the right shell (520) is provided with a snap-fit assembly (9). When the snap-fit assembly (9) is snapped onto the snap-fit seat (8), the left shell (510) and the right shell (520) are tightly attached together.
2. The vapor deposition machine according to claim 1, characterized in that: The buckle assembly (9) includes: a first support plate (910), which is horizontally disposed on the outer side of the right housing (520); a locking block (920), located above the first support plate (910), which rotates vertically in the middle to engage with the outer side of the right housing (520); the bottom surface of the locking block (920) near the left housing (510) is provided with a locking groove (921), and the bottom surface of the locking block (920) away from the left housing (510) is provided with a sliding groove (922). 22) A compression spring (923) and a spring block (930) are provided inside. The upper end of the spring block (930) is slidably fitted in the slide groove (922). The lower end of the compression spring (923) is connected to the upper end of the spring block (930). The lower end of the spring block (930) abuts against the first support plate (910). The compression spring (923) is in a compressed state. When the locking block (920) moves above the locking seat (8), the compression spring (923) drives the locking block (920) to rotate counterclockwise so that the locking groove (921) is locked on the locking seat (8).
3. The vapor deposition machine according to claim 1, characterized in that: The vacuum plating chamber (1) is further provided with two fixed supports (10), which are respectively located on the left and right sides of the vacuum plating chamber (1). The fixed supports (10) include a support body (11) and a baffle (12). The support body (11) is L-shaped, and the upper end of the support body (11) is fixed to the inner side wall of the vacuum plating chamber (1). The lower end of the baffle (12) is hinged to the lower end of the support body (11). A limiting groove (13) with an upward opening is formed between the support body (11) and the baffle (12). The two ends of the antioxidant oil device (6) are respectively placed in the limiting groove (13). When the baffle (12) rotates downward, the antioxidant oil device (6) is placed in the limiting groove (13) or taken out from the limiting groove (13). When the baffle (12) rotates upward, the antioxidant oil device (6) is fixed in the limiting groove (13).
4. The vapor deposition machine according to claim 3, characterized in that: It also includes a limiting plate (14) for limiting the rotation angle of the baffle (12). The front side of the lower end of the bracket body (11) is provided with a limiting member (15). One end of the limiting plate (14) is hinged to the front side of the baffle (12), and the other end of the limiting plate (14) is provided with a sliding groove through hole (16). The limiting member (15) is slidably fitted in the sliding groove through hole (16).
5. The vapor deposition machine according to claim 1, characterized in that: Also includes: The second support plate (19) is provided on the shielding oil evaporation device (7); the screw (20) is located on the left and right sides of the shielding oil evaporation device (7), the upper and lower ends of the screw (20) are rotatably fitted in the vacuum plating chamber (1), the middle part of the screw (20) passes through the second support plate (19) and the screw (20) is threadedly fitted with the second support plate (19); the motor drives the screw (20) to rotate; when the screw (20) rotates, the second support plate (19) moves up and down so that the distance between the shielding oil evaporation device (7) and the unwinding mechanism (2) can be adjusted.
6. The vapor deposition machine according to claim 5, characterized in that: The vacuum plating chamber (1) is provided with guide rails (110) on both the left and right sides, and the guide rails (110) are arranged along the height direction of the vacuum plating chamber (1); the second support plate (19) is provided with guide seats (21) at both the left and right ends, and the guide seats (21) slide up and down on the guide rails (110).
7. The vapor deposition machine according to claim 5, characterized in that: It also includes a first guide roller (22) and a second guide roller (23), which are distributed vertically. The first guide roller (22) is located below the unwinding mechanism (2), and the second support plate (19) is located below the second guide roller (23). The film passes sequentially from the unwinding mechanism (2) through the first guide roller (22), the second guide roller (23), and the cooling drum (4). The shielding oil evaporation device (7) covers the film on the second guide roller (23) with a shielding tape layer.
8. The vapor deposition machine according to claim 1, characterized in that: The shielding oil evaporation device (7) includes: a shielding oil evaporation body (710) for evaporating shielding oil; a third support plate (720) for supporting the shielding oil evaporation body (710), the third support plate (720) being located between the unwinding mechanism (2) and the cooling drum (4); an oil container (730) for holding shielding oil; and an oil pump (740), the oil pump (740) having its inlet connected to the oil container (730) through an oil outlet pipe (25), and the oil pump (740) having its outlet connected to the shielding oil evaporation body (710) through an oil inlet pipe (29).
9. The vapor deposition machine according to claim 8, characterized in that: Also includes: The transition block (31) is located on the outer surface of the shielding oil evaporator body (710). The transition block (31) contains a three-way valve. The oil outlet of the shielding oil evaporator body (710) is connected to the first interface of the three-way valve. The oil outlet pipe (25) includes a first pipe (26) and a second pipe (27). One end of the first pipe (26) is connected to the oil inlet of the oil pump (740), and the other end of the first pipe (26) is connected to the second interface of the three-way valve. One end of the second pipe (27) is connected to the oil outlet of the oil can (730), and the other end of the second pipe (27) is connected to the third interface of the three-way valve.
10. The vapor deposition machine according to claim 9, characterized in that: It also includes an auxiliary tube (28), which is sleeved on the second tube (27). One end of the auxiliary tube (28) is detachably connected to the oil outlet of the oil can (730), and the other end of the auxiliary tube (28) is fixed on the transition block (31). One end of the second tube (27) is located inside the auxiliary tube (28).
Citation Information
Patent Citations
Capacitance diaphragm's filming equipment
CN205874524U
Evaporator with post-processing device
CN222024468U