Oven door assembly and vacuum apparatus

Abstract

This application discloses a furnace door assembly and vacuum equipment, including a first furnace door, a second furnace door, an end face seal, an axial seal, and a stop. The first furnace door has a through hole; the second furnace door has a protruding connecting portion that passes through the through hole and extends to the other side of the first furnace door. The connecting portion has a stop surface located on the side of the connecting portion away from the first furnace door. The end face seal is sealed and fixedly connected to the first furnace door; the axial seal is sealed and fixedly connected to the connecting portion; the stop is located on the side of the axial seal away from the end face seal and is fixedly connected to the axial seal. The stop abuts against the stop surface, preventing the connecting portion from moving closer to or further away from the first furnace door. This solution improves the reliability of the furnace door assembly and extends the service life of the equipment.

Description

Technical Field

[0001] This application relates to the field of coating technology, and in particular to a furnace door assembly and vacuum equipment. Background Technology

[0002] With the development of the photovoltaic industry, battery manufacturers are focusing on improving mass production efficiency, primarily by expanding production capacity. However, large-capacity equipment brings a host of problems. As production capacity increases, the diameter of the furnace cavity also increases, resulting in a larger furnace door. The increased load causes the furnace door to sag, leading to problems such as interference with the furnace door mechanism and interference contact caused by eccentricity with the cavity, even causing the cavity to break, significantly increasing equipment maintenance costs. Summary of the Invention

[0003] The main technical problem addressed by this application is to provide a furnace door assembly and a vacuum device, thereby improving the reliability of the furnace door assembly and extending the service life of the device.

[0004] To solve the above-mentioned technical problems, one technical solution adopted in this application is: providing a furnace door assembly, including a first furnace door, a second furnace door, an end face seal, an axial seal, and a stop. The first furnace door has a through hole; the second furnace door is located on one side of the first furnace door, and a connecting portion protrudes from the side of the second furnace door facing the first furnace door. The connecting portion passes through the through hole and extends to the other side of the first furnace door. A stop surface is provided on the connecting portion, and the stop surface is located on the side of the connecting portion away from the first furnace door; the end face seal is located on the side of the first furnace door away from the second furnace door and is sealed to the first furnace door, and the end face seal is fixedly connected to the first furnace door; the axial seal is located on the side of the end face seal away from the first furnace door and is sealed to the connecting portion, and the axial seal is fixedly connected to the end face seal; the stop is located on the side of the axial seal away from the end face seal and is fixedly connected to the axial seal, and the stop abuts against the stop surface to prevent the connecting portion from moving closer to or further away from the first furnace door.

[0005] Preferably, the connecting part is provided with a stop groove, the stop surface is located on the side wall of the stop groove, the stop member is provided with a protrusion, the protrusion is inserted into the stop groove, and the protrusion abuts against the stop surface.

[0006] Preferably, there are multiple connecting parts, with at least two connecting parts spaced apart on one side of the second furnace door and the line connecting at least two connecting parts passing through the center of the second furnace door.

[0007] Preferably, at least two of the connecting portions are arranged symmetrically around the center of the second furnace door.

[0008] Preferably, the end face seal is sleeved outside the connecting part, and the side of the end face seal facing the first furnace door is provided with a first sealing groove surrounding the connecting part. A first sealing ring is provided in the first sealing groove, and the first sealing ring is disposed between the end face seal and the first furnace door.

[0009] Preferably, the axial seal is sleeved outside the connecting part, and the side of the axial seal facing the connecting part is provided with a second sealing groove surrounding the connecting part. A second sealing ring is provided in the second sealing groove, and the second sealing ring is disposed between the axial seal and the connecting part.

[0010] Preferably, the second furnace door has a protrusion on the side facing the first furnace door, and the protrusion abuts against the side of the first furnace door facing the second furnace door.

[0011] Preferably, the first furnace door is made of metal; the second furnace door is made of quartz.

[0012] Preferably, the end face seal is locked to the second furnace door by a first bolt; the axial seal is locked to the end face seal by a second bolt; and the stop is locked to the axial seal by a third bolt.

[0013] To solve the above-mentioned technical problems, another technical solution adopted in this application is: to provide a vacuum device, including a furnace door assembly in any embodiment, the vacuum device having a process chamber and an opening, the first furnace door being installed in the opening, and the second furnace door being located on one side of the process chamber of the first furnace door.

[0014] The beneficial effects of this application are as follows: Unlike the prior art, the furnace door assembly of this application includes a first furnace door and a second furnace door located on one side of the first furnace door. Because the second furnace door has a connecting portion integrally formed with it and is fixedly connected to the first furnace door through this connecting portion, the first furnace door can stably support the connecting portion, ensuring the stability of the connection between the second and first furnace doors. Both end face seals and axial seals are used to seal the furnace door assembly, reducing the probability of gas leakage from the radial and axial gaps in the furnace door assembly. A stopper is used to press the end face seals and axial seals onto the first furnace door and prevent axial movement of the connecting portion and the second furnace door relative to the first furnace door, reducing the probability of interference between the first and second furnace doors. This ensures the sealing performance between the first and second furnace doors and guarantees the safety and lifespan of the equipment. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of one embodiment of the vacuum device of this application; Figure 2 This application is Figure 1 A partial structural diagram of region A in the middle; Figure 3 This is a right view of one embodiment of the furnace door assembly of this application. Detailed Implementation

[0016] To make the objectives, technical solutions, and effects of this application clearer and more explicit, the following detailed description is provided with reference to the accompanying drawings and embodiments. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0017] See Figure 1 and Figure 2 , Figure 1 This is a schematic diagram of one embodiment of the vacuum device of this application; Figure 2 This application is Figure 1 A partial structural diagram of region A. The vacuum equipment includes a furnace door assembly, which comprises a first furnace door 1, a second furnace door 2, an end face seal 3, an axial seal 4, and a stop 5.

[0018] The first furnace door 1 has a through hole 11. The second furnace door 2 is located on one side of the first furnace door 1. The side of the second furnace door 2 facing the first furnace door 1 has a protruding connecting part 21. The connecting part 21 passes through the through hole 11 and extends to the other side of the first furnace door 1. The connecting part 21 has a stop surface 21a, which is located on the side of the connecting part 21 away from the first furnace door 1. The end face seal 3 is located on the side of the first furnace door 1 away from the second furnace door 2 and is sealed to the first furnace door 1. The end face seal 3 is fixedly connected to the first furnace door 1. The axial seal 4 is located on the side of the end face seal 3 away from the first furnace door 1 and is sealed to the connecting part 21. The axial seal 4 is fixedly connected to the end face seal 3. The stop 5 is located on the side of the axial seal 4 away from the end face seal 3 and is fixedly connected to the axial seal 4. The stop 5 abuts against the stop surface 21a to prevent the connecting part 21 from moving closer to or further away from the first furnace door 1.

[0019] The furnace door assembly is used to seal the opening of the vacuum equipment. Specifically, the furnace door assembly has a double furnace door structure. The first furnace door 1 is the outer furnace door, and the material of the first furnace door 1 can be metal, such as stainless steel. Metal materials have good mechanical properties and are easy to process. The second furnace door 2 is the inner furnace door, and the material of the second furnace door 2 can be quartz. Since quartz material has good corrosion resistance and the second furnace door 2 is located inside the first furnace door 1, the second furnace door 2 can be used to block special gases with corrosive properties inside the equipment, preventing special gases from contacting the first furnace door 1 and causing corrosion, thus ensuring the reliability of the furnace door assembly. The second furnace door 2 has a connecting portion 21 integrally formed with it. The connecting portion 21 extends from the inner side to the outer side of the first furnace door 1. The second furnace door 2 is fixedly connected to the first furnace door 1 through this connecting portion 21. The first furnace door 1 can stably support the connecting portion 21, thereby ensuring the stability of the connection between the second furnace door 2 and the first furnace door 1. Therefore, even for furnace door assemblies with larger diameters in high-capacity equipment, the second furnace door 2 is less likely to fall due to its larger volume and weight, thus avoiding interference between the second furnace door 2 and the first furnace door 1 or the equipment, ensuring the safety of the equipment and improving its lifespan. The stop member 5 abuts against the stop surface 21a of the connecting portion 21, and is used to press the end face seal member 3 and the axial seal member 4 onto the first furnace door 1. Since the end face seal member 3 and the axial seal member 4 are used to seal the radial and axial gaps of the furnace door assembly, respectively, the probability of gas leakage from the gaps in the furnace door assembly in all directions is reduced. Furthermore, the stopper 5 prevents the connecting part 21 and the second furnace door 2 from moving axially relative to the first furnace door 1, reducing the probability of interference between the first furnace door 1 and the second furnace door 2, ensuring the safety of the equipment, and improving the service life of the equipment.

[0020] Optionally, see Figure 1 and Figure 3 , Figure 3 This is a right view of one embodiment of the furnace door assembly of this application. There are six connecting portions 21, spaced apart on one side of the second furnace door 2, evenly distributed around the center of the second furnace door 2. During installation, the line connecting at least one pair of connecting portions 21 is perpendicular to the ground and passes through the center of the second furnace door 2, reducing the impact of the weight of the second furnace door 2 on its stability and preventing interference between the second furnace door 2 and the first furnace door 1. Furthermore, at least two connecting portions 21 are symmetrically arranged around the center of the second furnace door 2. In other embodiments, the number of connecting portions 21 can be other numbers, such as three, four, eight, etc., which are not specifically limited in this application. To improve the supporting force of the first furnace door 1 on the second furnace door 2, the number of connecting portions 21 located at the lower part of the center of the second furnace door 2 can be greater than the number of connecting portions 21 located at the upper part.

[0021] Optionally, please continue reading Figure 2The end face seal 3 is fitted outside the connecting part 21. The side of the end face seal 3 facing the second furnace door 2 has a first sealing groove 31 surrounding the connecting part 21. A first sealing ring 311 is provided in the first sealing groove 31, and the first sealing ring 311 is positioned between the end face seal 3 and the second furnace door 2. Specifically, the connecting part 21 is cylindrical, and the end face seal 3 has an annular structure surrounding the connecting part 21. The first sealing groove 31 accommodates the first sealing ring 311, which is pressed between the second furnace door 2 and the first sealing groove 31 to seal the end face of the first furnace door 1. The end face seal 3 can be made of metal, such as stainless steel. Multiple first sealing rings 311 can be arranged radially, for example, two first sealing rings 311 can be concentrically arranged, providing multiple seals to ensure a sealing effect. Optionally, the end face seal 3 can be locked to the first furnace door 1 by a first bolt (not shown). Specifically, the first bolt can lock the end face seal 3 to the first furnace door 1 along the axial direction, and multiple first bolts can be evenly arranged around the connection part 21.

[0022] Optionally, please continue reading Figure 2 An axial seal 4 is fitted over the connecting portion 21. The side of the axial seal 4 facing the connecting portion 21 has a second sealing groove 41 surrounding the connecting portion 21. A second sealing ring 411 is provided in the second sealing groove 41, and the second sealing ring 411 is disposed between the axial seal 4 and the connecting portion 21. Specifically, the axial seal 4 has an annular structure, surrounding the connecting portion 21. The second sealing groove 41 accommodates the second sealing ring 411, which is pressed between the outer circumferential surface of the connecting portion 21 and the second sealing ring 411 to seal the outer circumferential surface of the connecting portion 21. The axial seal 4 can be made of metal, such as stainless steel. Multiple second sealing rings 411 can be provided along the axial direction of the connecting portion 21, for example, two second sealing rings 411 can be arranged side by side, providing multiple seals to ensure a sealing effect. Optionally, the axial seal 4 is locked to the end face seal 3 by a second bolt (not shown). Specifically, the second bolt can lock the axial seal 4 and the end face seal 3 along the axial direction, and multiple second bolts can be evenly arranged around the connecting part 21. The end face seal 3 and the axial seal 4 respectively seal the end face gap and the axial gap between the connecting part 21 and the first furnace door 1.

[0023] Optionally, please continue reading Figure 2 The connecting portion 21 is provided with a stop groove 211, and a stop surface 21a is located on the side wall of the stop groove 211. The stop member 5 is provided with a protrusion 51, which is inserted into the stop groove 211 and abuts against the stop surface 21a. Specifically, the stop groove 211 can be arranged in a ring shape on the outer periphery of the connecting portion 21. The stop member 5 is a split structure, which can be as follows: Figure 3Two stoppers 5 are provided for each connecting part 21. The protrusions 51 of the two stoppers 5 are inserted radially into the stop grooves 211, and then the stoppers 5 are fixed to the axial seal 4 to achieve contact between the stoppers 5 and the stop surface 21a. The sidewalls on both sides of the stop groove 211 prevent the stoppers 5 from moving axially, thereby preventing relative axial movement between the first furnace door 1 and the second furnace door 2. In this embodiment, the stoppers 5 are semi-ring structures, and the two together form a ring structure. In other embodiments, the stoppers 5 can be of other shapes or in other quantities, as long as they can achieve the stopping function; this application does not impose specific limitations. To ensure proper fit, a gap is left between the stoppers 5 and the axial seal 4 before installation. The two are tightened with bolts, and the gap ensures that the stoppers 5 function effectively when tightened. Optionally, the stop 5 is locked to the axial seal 4 by a third bolt (not shown). Specifically, the third bolt can lock the axial seal 4 and the stop 5 along the axial direction, and multiple third bolts can be evenly arranged around the connecting portion 21. The stop 5 can be made of metal, such as stainless steel. In other embodiments, the stop surface 21a can also be located at other positions of the connecting portion 21. For example, when the length of the connecting portion 21 protruding from the first furnace door 1 is short, the stop surface 21a can be located on the end face of the connecting portion 21 away from the first furnace door 1. In this case, the stop 5 can directly abut against the end face of the connecting portion 21, and the stop 5 is locked to the connecting portion 21 by the third bolt. In this case, the stop 5 can be an integral annular structure.

[0024] Optionally, a boss 22 is provided on the side of the second furnace door 2 facing the first furnace door 1, and the boss 22 abuts against the side of the first furnace door 1 facing the second furnace door 2. Specifically, in this embodiment, the boss 22 is in a ring structure surrounding multiple connecting parts 21. To prevent the end face of the boss 22 from not being fully fitted with the inner side of the first furnace door 1 after the connecting parts 21 are inserted into the through hole 11 of the first furnace door 1, a groove can be provided between the connecting parts 21 and the boss 22 to ensure that the end face of the boss 22 abuts against the first furnace door 1 after the first furnace door 1 and the second furnace door 2 are locked, avoiding interference between the second furnace door 2 and the first furnace door 1 or equipment, improving the reliability of the second furnace door 2, and extending the service life of the equipment. In this embodiment, a cavity is formed inside the second furnace door 2, which can reduce the weight of the second furnace door 2.

[0025] Continue reading Figure 1The vacuum equipment provided in this application also includes a quartz tube 6, which has a process chamber and an opening. A first furnace door 1 is installed at the opening for direct connection to the equipment, and a second furnace door 2 is located on the process chamber side of the first furnace door 1. The diameter of the quartz tube 6 on the side near the opening and accommodating the second furnace door 2 is larger than the diameter on the side away from the opening. The diameter of the second furnace door 2 on the side away from the first furnace door 1 is larger than the diameter on the side near the first furnace door 1. The second furnace door 2 and the quartz tube 6 partially overlap in the axial direction to prevent gas in the process chamber from flowing out of the opening. There is a gap between the second furnace door 2 and the inner wall of the quartz tube 6 to avoid interference between the second furnace door 2 and the quartz tube 6 when opening and closing the furnace door assembly. The vacuum equipment of this application may include diffusion equipment, annealing equipment, thin film deposition equipment such as LPCVD (low-pressure chemical vapor deposition) equipment and PECVD (plasma-enhanced chemical vapor deposition) equipment, etc.

[0026] The above are merely embodiments of this application and do not limit the scope of this patent application. Any equivalent structural or procedural changes made using the content of this application's specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the scope of patent protection of this application.

Claims

1. A furnace door assembly, characterized in that, include: The first furnace door, which has a through hole; The second furnace door is located on one side of the first furnace door. A connecting part protrudes from the side of the second furnace door facing the first furnace door. The connecting part is integrally formed with the second furnace door. The connecting part passes through the through hole and extends to the other side of the first furnace door. A stop surface is provided on the connecting part. The stop surface is located on the side of the connecting part away from the first furnace door. An end face seal is located on the side of the first furnace door away from the second furnace door and is sealed to the first furnace door; the end face seal is fixedly connected to the first furnace door. An axial seal is located on the side of the end face seal opposite to the first furnace door and is sealed to the connecting part; the axial seal is fixedly connected to the end face seal. A stop is located on the side of the axial seal opposite to the end face seal and is fixedly connected to the axial seal. The stop abuts against the stop surface to prevent the connection from moving closer to or further away from the first furnace door.

2. The furnace door assembly according to claim 1, characterized in that, The connecting part is provided with a stop groove, the stop surface is located on the side wall of the stop groove, the stop member is provided with a protrusion, the protrusion is inserted into the stop groove, and the protrusion abuts against the stop surface.

3. The furnace door assembly according to claim 1, characterized in that, The number of the connecting parts is multiple, with at least two of the connecting parts spaced apart on one side of the second furnace door and the line connecting at least two of the connecting parts passing through the center of the second furnace door.

4. The furnace door assembly according to claim 3, characterized in that, At least two of the connecting parts are arranged symmetrically around the center of the second furnace door.

5. The furnace door assembly according to claim 1, characterized in that, The end face seal is sleeved outside the connecting part. The side of the end face seal facing the first furnace door has a first sealing groove surrounding the connecting part. A first sealing ring is provided in the first sealing groove. The first sealing ring is disposed between the end face seal and the first furnace door.

6. The furnace door assembly according to claim 5, characterized in that, The axial seal is sleeved outside the connecting part. The side of the axial seal facing the connecting part is provided with a second sealing groove surrounding the connecting part. A second sealing ring is provided in the second sealing groove. The second sealing ring is disposed between the axial seal and the connecting part.

7. The furnace door assembly according to claim 1, characterized in that, The second furnace door has a protrusion on the side facing the first furnace door, and the protrusion abuts against the side of the first furnace door facing the second furnace door.

8. The furnace door assembly according to claim 1, characterized in that, The first furnace door is made of metal; The material of the second furnace door is quartz.

9. The furnace door assembly according to claim 1, characterized in that, The end face seal is locked to the first furnace door by a first bolt; The axial seal is locked to the end face seal by a second bolt. The stop is locked to the axial seal by a third bolt.

10. A vacuum device, characterized in that, The vacuum device includes a furnace door assembly as described in any one of claims 1-9, wherein the vacuum device has a process chamber and an opening, the first furnace door is mounted on the opening, and the second furnace door is located on one side of the process chamber of the first furnace door.

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