Apparatus for determining the attitude of a measurement reference rotating shaft and measurement method thereof

Abstract

The application discloses a device for determining the posture of a measuring reference rotating shaft and a measuring method thereof, which can be combined with a autocollimator, a rotating table and a reference prism to establish a measuring system, measure and quantify the posture of the reference rotating shaft, and facilitate subsequent processing, detection, assembly and the like. The device comprises an autocollimator, a rotating table, a reference prism, a supporting table, a vibration isolation table and a display controller. Two mutually parallel planes of the reference prism are used to measure and determine the included angle between the two planes and the optical axis of the autocollimator in the pitch direction by rotating the rotating table, and the included angle between the optical axis of the autocollimator and the rotating shaft of the rotating table can be calculated through reference conversion according to the perpendicular relationship between the adjacent planes of the reference prism, so as to establish a measuring system and measure and quantify the posture of the reference rotating shaft.

Description

Technical Field

[0001] This invention belongs to the field of optical detection, and specifically relates to a device and a measurement method for determining the attitude of a measurement reference rotation axis. Background Technology

[0002] The main method of angle measurement optical systems utilizes optical autocollimation. The detection principle involves optically positioning the object and its image on conjugate planes. When the object rotates, its image on the image plane also moves. By measuring the movement of the image point, the rotation angle of the object can be determined, achieving precise angle measurement. However, the angle measured using this technique is a spatial angle. The rotation angle of the axis is only precisely equal to the measured angle when both sides of the angle are strictly parallel to the axis of rotation. Therefore, to accurately convert the measured spatial angle into the measured angle, it is necessary to first determine the relative position between the axis of rotation and the optical axis, i.e., to determine the orientation of the measurement reference axis of rotation. Summary of the Invention

[0003] To address the aforementioned problems, this invention proposes a device and method for determining the orientation of a reference rotating shaft. This device can establish a measurement system to measure and quantify the orientation of the reference rotating shaft, facilitating subsequent processing, inspection, assembly, and other applications.

[0004] To achieve the above objectives, the present invention proposes the following technical solution:

[0005] An apparatus for determining the orientation of a measurement reference rotation axis, the apparatus comprising: a reference prism, an autocollimator, a rotary table, a support table, a vibration isolation table, and a display controller;

[0006] The rotating stage and support stage are located above the vibration isolation stage. The reference prism is located at the center above the rotating stage. The autocollimator is located above the support stage and is connected to the display controller. The display controller is used to display and save the tilt angle of the pitch direction between the light emitted by the autocollimator, reflected back to the autocollimator by the surfaces of the reference prism A / B, and the beam emitted by the autocollimator.

[0007] When the rotating platform rotates, it drives the reference prism to rotate synchronously.

[0008] The device is configured such that when light emitted from the autocollimator reaches and is reflected from surface A of the reference prism, it then returns to the autocollimator; after the rotating stage is rotated by °, light emitted from the autocollimator reaches and is reflected from surface B of the reference prism, and then returns to the autocollimator.

[0009] On the other hand, the present invention also proposes a measurement method based on the above-mentioned device for determining the attitude of a measurement reference rotation axis, the method comprising the following steps:

[0010] Step (1): Place the reference prism at the center of the rotating stage, and place and adjust the optical axis of the autocollimator to align with the center of the surface of the reference prism A.

[0011] Step (2): Adjust the position of the autocollimator so that the reflected beam from the surface of the reference prism A can enter the autocollimator;

[0012] Step (3): Rotate the rotation axis of the rotary table to perform the autocollimator sweeping operation within the field of view;

[0013] Step (4): After completing the above operations, adjust the beam emitted by the autocollimator to fall on the A surface of the reference prism, and make the reflected beam on the A surface enter the center of the autocollimator. Adjust its azimuth reading to 0, and use the display controller to record the pitch angle reading α of the autocollimator.

[0014] Step (5): Rotate the rotary table by ° so that the beam emitted by the autocollimator falls on the B surface of the reference prism and the reflected beam from the B surface enters the center of the autocollimator. Adjust its azimuth reading to 0 and use the display controller to record the pitch angle reading β of the autocollimator.

[0015] Step (6): Using the measurement results from steps (4) and (5), calculate the two pitch angle readings of the autocollimator. This is the quantified result of the relative positional relationship between the attitude of the rotary table's reference rotation axis and the optical axis of the autocollimator. This result can be applied to processes such as machining, inspection, and assembly as needed.

[0016] The advantages of this invention compared to the prior art are:

[0017] (1) Precision angle measurement: In the process of processing workpieces such as prisms, the existing technology is affected by the accuracy of equipment, the selection of materials, environment, personnel, etc., which leads to a large measurement error when directly inspecting the workpiece; In the process of establishing the measurement reference rotation axis, the present invention uses a reference prism as the medium for reference transformation, which ensures that the accuracy of angle measurement is only affected by the processing accuracy of the rotary table and the reference prism during the reference transformation process, thus ensuring the high accuracy of angle measurement.

[0018] (2) Batch angle detection: Existing technologies require single-piece adjustment and detection during the processing of workpieces such as prisms, which is inefficient. After finding, quantifying and determining the positional relationship between the center of the rotary table and the optical axis of the autocollimator and solidifying it, this invention can perform batch detection, thereby improving the efficiency of angle measurement while ensuring high-precision measurement.

[0019] (3) Regarding the quantification of the attitude of the reference rotating axis: The existing technology inserts a mandrel into the center of the rotary table and then uses a plane mirror to find and quantify the attitude of the rotation center of the rotary table by placing the mandrel against the mandrel. This existing method is to complete the measurement by converting between contact and non-contact methods. The accuracy is affected by the roundness of the mandrel and other mechanical processing, resulting in low accuracy (1″). This invention establishes a new measurement reference rotating axis through reference conversion and uses an autocollimator to quantify the attitude of the rotating axis of the rotary table. It can be widely applied in processing, testing, assembly and other processes. Attached Figure Description

[0020] Figure 1 A schematic diagram of the device for determining the attitude of the measurement reference rotation axis according to the present invention;

[0021] Figure 2 This is a schematic diagram of the method for determining the attitude of the measurement reference rotation axis according to the present invention. Detailed Implementation

[0022] The present invention will be further described below with reference to the accompanying drawings.

[0023] Figure 1 This is a schematic diagram of the device for determining the attitude of a reference rotation axis according to the present invention. The device includes a reference prism 101, an autocollimator 102, a rotating stage 103, a support stage 104, a vibration isolation stage 105, and a display controller 106. The rotating stage 103 and the support stage 104 are located above the vibration isolation stage 105. The reference prism 101 is located at the center above the rotating stage 103. The autocollimator 102 is located above the support stage 104 and is connected to the display controller 106. The display controller 106 displays and stores the tilt angle of the beam emitted by the autocollimator 102, which is reflected back to the autocollimator 102 by the surfaces A / B of the reference prism 101, relative to the beam emitted by the autocollimator 102. When the rotating stage 103 rotates, it drives the reference prism 101 to rotate synchronously.

[0024] In this process, the light emitted from the autocollimator 102 is reflected by the A surface of the reference prism 101 and then returns to the autocollimator; after the rotary stage is rotated by °, the light emitted from the autocollimator is reflected by the B surface of the reference prism and then returns to the autocollimator.

[0025] A schematic diagram of the method for determining the attitude of the measurement reference rotation axis according to the present invention is shown below. Figure 2 As shown,

[0026] The specific implementation steps are as follows:

[0027] Step (1): Place the reference prism 101 at the center of the table surface of the rotary table 103, and place and adjust the optical axis of the autocollimator 102 to align with the center of the surface of the reference prism A.

[0028] Step (2): Adjust the position of the autocollimator 102 so that the reflected beam from the surface of the reference prism 101A can enter the autocollimator 102.

[0029] Step (3): Rotate the rotation axis of the rotary table 103 to perform the autocollimator sweeping operation within the field of view;

[0030] Step (4): After completing the above operations, adjust the beam emitted by the autocollimator to fall on the A surface of the reference prism 101, and the reflected beam from the A surface enters the center of the autocollimator 102. Adjust its azimuth reading to 0, and use the display controller 106 to record the pitch angle reading α of the autocollimator.

[0031] Step (5): Rotate the rotary table by ° so that the beam emitted by the autocollimator 102 falls on the B surface of the reference prism 101 and the reflected beam from the B surface enters the center of the autocollimator. Adjust its azimuth reading to 0 and use the display controller to record the pitch angle reading β of the autocollimator.

[0032] Step (6): Using the measurement results from steps (4) and (5), since the parallelism between plane A and plane B of the reference prism 101 is excellent, it can be known from the geometric relationship that if there is no angle between the rotation axis and the perpendicular direction of the autocollimator optical axis, and the plane A and plane B of the reference prism are strictly perpendicular to the optical axis of the autocollimator, when the rotation axis rotates 180°, the pitch angle reading of the autocollimator 102 is α=β=0, and the angle between the rotation axis and the optical axis of the autocollimator is 90°. If there is an angle λ between the rotation axis and the perpendicular direction of the autocollimator optical axis, then our goal is to measure this angle λ. When the rotation axis is strictly parallel to the plane A and plane B of the reference prism, when the rotation axis rotates 180°, the pitch angle reading of the autocollimator is α=β=λ, and the angle between the rotation axis and the optical axis of the autocollimator is 90°±λ. If the rotation axis is not strictly parallel to surfaces A and B of the reference prism, but instead forms an angle γ with them, and also forms an angle λ between the rotation axis and the direction perpendicular to the optical axis of the autocollimator, when the reflected beam from surface A enters the autocollimator, the reading α is λ + γ, and when the reflected beam from surface B enters the autocollimator, the reading α is λ - γ. Calculate the elevation angle readings of the autocollimator 102 for the two elevation directions. therefore This is the quantitative result of the relative positional relationship between the attitude of the rotation axis of the rotating stage 103 and the optical axis of the autocollimator.

[0033] This invention relates to a device and method for determining the orientation of a measurement reference rotation axis. By combining an autocollimator, a rotary table, and a reference prism, an autocollimation measurement system is established, which can be used for high-precision measurement of various wedge mirror angles, angle blocks, cubic mirrors, etc.

[0034] By utilizing the parallel relationship between the relative planes of the reference prism, the angle between the optical axis of the autocollimator and the rotation axis of the rotary stage can be calculated through reference transformation, thereby establishing a measurement system to measure and quantify the attitude of the reference rotation axis.

[0035] The above description is only a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. The method for determining the attitude of the reference rotation axis can be carried out according to the specific needs of determining the attitude of the reference rotation axis.

Claims

1. A measurement method for determining the attitude of a measurement reference rotation axis, characterized in that, The measurement method employs a device for determining the orientation of the measurement reference rotation axis, comprising: a reference prism (101), an autocollimator (102), a rotating stage (103), a support stage (104), a vibration isolation stage (105), and a display controller (106). The rotating stage (103) and the support stage (104) are located above the vibration isolation stage (105), the reference prism (101) is located at the center above the rotating stage (103), the autocollimator (102) is located above the support stage (104) and is connected to the display controller (106). The display controller (106) is used to display and save the tilt angle of the pitch direction between the light emitted by the autocollimator (102) reflected back to the autocollimator (102) by the A / B surfaces of the reference prism (101) and the beam emitted by the autocollimator (102). When the rotating stage (103) rotates, it drives the reference prism (101) to rotate synchronously; The device is configured such that when light emitted from the autocollimator (102) is reflected at surface A of the reference prism (101) and then returns to the autocollimator (102); after the rotating stage (103) is rotated 180°, light emitted from the autocollimator (102) is reflected at surface B of the reference prism (101) and then returns to the autocollimator (102). The A surface and B surface of the reference prism (101) are parallel; The method includes the following steps: Step (1): Place the reference prism (101) at the center of the rotating stage (103), and place and adjust the optical axis of the autocollimator (102) to align with the center of the surface A of the reference prism (101); Step (2): Adjust the position of the autocollimator (102) so that the reflected light beam from the surface of the reference prism (101) A can enter the autocollimator (102). Step (3): Rotate the rotation axis of the rotary table (103) to perform the autocollimator sweeping operation within the field of view; Step (4): After completing the above operations, adjust the beam emitted by the autocollimator (102) to fall on the A surface of the reference prism (101), and the reflected beam from the A surface enters the center of the autocollimator (102). Adjust its azimuth reading to 0, and use the display controller (106) to record the pitch angle reading α of the autocollimator. Step (5): Rotate the rotary table (103) 180° so that the beam emitted by the autocollimator (102) falls on the B surface of the reference prism (101) and the reflected beam from the B surface enters the center of the autocollimator (102). Adjust its azimuth reading to 0 and use the display controller (106) to record the pitch angle reading β of the autocollimator. Step (6): Calculate the angle readings of the two pitch directions from the autocollimator (102). , The , This is the quantitative result of the relative positional relationship between the attitude of the rotation axis of the rotary stage (103) and the optical axis of the autocollimator (102).

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