A MEMS tri-axial gyroscope

Abstract

The application relates to the technical field of gyroscopes, and discloses a MEMS three-axis gyroscope, which comprises a driving fixed elastic element, a driving anchor point, a plurality of driving mass blocks, a plurality of driving coupling elastic elements, a comb tooth driving electrode, a plurality of coupling assemblies, a plurality of connecting frame assemblies, a center anchor point and a plurality of comb tooth driving detection electrodes. The MEMS three-axis gyroscope can drive the mass blocks to move along a first direction or a second direction in a driving state, and can detect angular velocities along the first direction, the second direction and a third direction respectively. The disclosed MEMS three-axis gyroscope has higher sensitivity, smaller volume and wider applicability.

Description

Technical Field

[0001] This invention relates to the field of gyroscope technology, and more particularly to a MEMS three-axis gyroscope. Background Technology

[0002] MEMS gyroscopes differ from traditional gyroscopes that utilize the principle of conservation of angular momentum. MEMS gyroscopes use Coriolis force to measure and control motion. MEMS gyroscopes typically have two types of movable capacitor plates. The radial capacitor plate is subjected to an oscillating voltage, which forces the mass block to move radially. The lateral capacitor plate measures the capacitance change caused by the lateral Coriolis motion. The angular velocity of the MEMS gyroscope can be calculated from the capacitance change.

[0003] MEMS gyroscopes are widely used due to their advantages such as small size, low power consumption, and ease of mass production. After years of development, the performance and accuracy of MEMS gyroscopes have continuously improved, and their application areas have expanded. With the rapid development of emerging fields such as unmanned systems, micro-nano satellites, and intelligent robots, users' performance requirements for MEMS gyroscopes are constantly increasing, especially the demand for MEMS gyroscopes with higher sensitivity and smaller size has become more urgent. Summary of the Invention

[0004] Based on the above, the purpose of this invention is to provide a MEMS three-axis gyroscope with higher sensitivity, smaller size, and wider applicability.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A MEMS triaxial gyroscope, defining a first direction, a second direction, and a third direction that are mutually perpendicular, the MEMS triaxial gyroscope comprising:

[0007] A drive-fixed elastic element and a drive anchor point are provided, with one end of the drive-fixed elastic element connected to the drive anchor point;

[0008] Multiple driving mass blocks, wherein at least two of the driving mass blocks are distributed along the first direction, at least two of the driving mass blocks are distributed along the second direction, the multiple driving mass blocks form a coupling cavity, and each driving mass block is connected to the other end of the driving fixed elastic member;

[0009] Multiple drive coupling elastic elements, each of which elastically connects two adjacent drive mass blocks;

[0010] The comb-tooth driving electrode is capable of driving the two driving mass blocks distributed along the first direction to move along the first direction.

[0011] Multiple coupling components are located within the coupling cavity, and each coupling component includes an external coupling beam, an internal coupling beam, and a coupling beam connecting elastic element connected to both. Each external coupling beam is positioned opposite one of the internal coupling beams, and the coupling beam connecting elastic element of each coupling component is connected to both the external coupling beam and the internal coupling beam of another coupling component. When the comb-tooth driving electrode drives the driving mass blocks distributed along the first direction to move along the first direction, the coupling components and the driving coupling elastic element can drive the driving mass blocks distributed along the second direction to move along the second direction.

[0012] Multiple connecting frame components are respectively associated with multiple coupling components, and one end of each connecting frame component is connected to the internal coupling beam;

[0013] The central anchor point is located within the coupling cavity and is connected to the other end of the plurality of connecting frame assemblies;

[0014] Multiple comb-tooth driven detection electrodes are located within the coupling cavity and each corresponds to one of the multiple coupling components;

[0015] In the driving state, the comb-tooth driving electrode drives the driving mass blocks distributed along the first direction to reciprocate synchronously in the first direction, and drives the driving mass blocks distributed along the second direction to reciprocate synchronously in the second direction. When the angular velocity in the first direction is detected, the driving mass blocks distributed along the second direction can reciprocate synchronously in the third direction under the action of the Coriolis force. When the angular velocity in the second direction is detected, the driving mass blocks distributed along the first direction can reciprocate synchronously in the third direction under the action of the Coriolis force. When the angular velocity in the third direction is detected, the driving mass blocks distributed along the first direction can reciprocate synchronously in the second direction under the action of the Coriolis force, and the driving mass blocks distributed along the second direction can reciprocate synchronously in the first direction under the action of the Coriolis force.

[0016] As a preferred embodiment of a MEMS triaxial gyroscope, the MEMS triaxial gyroscope further includes a substrate, the driving anchor point and the center anchor point are both fixed on the substrate, and the driving fixing elastic element, the driving mass block, the driving coupling elastic element, the coupling component and the connecting frame component are all suspended on the substrate.

[0017] As a preferred embodiment of a MEMS triaxial gyroscope, the MEMS triaxial gyroscope further includes a third-direction comb tooth detection electrode, which includes a third-direction detection movable electrode and a third-direction detection fixed electrode. The third-direction detection movable electrode is fixed on the driving mass block distributed along the second direction, and the third-direction detection fixed electrode is fixed on the substrate.

[0018] As a preferred embodiment of a MEMS triaxial gyroscope, the comb-tooth driving electrode includes a movable driving electrode and a fixed driving electrode. The movable driving electrode is fixed on the driving mass block distributed along the first direction, and the fixed driving electrode is fixed on the substrate.

[0019] As a preferred embodiment of a MEMS triaxial gyroscope, the comb-tooth drive detection electrode includes a drive detection movable electrode and a drive detection fixed electrode. The drive detection movable electrode is fixed on the external coupling beam, and the drive detection fixed electrode is fixed on the substrate.

[0020] As a preferred embodiment of a MEMS three-axis gyroscope, the driving coupling elastic element includes a first driving coupling sub-elastic element and a second driving coupling sub-elastic element that are vertically connected. The driving mass block distributed along the first direction is provided with a first connecting groove extending along the second direction. The first driving coupling sub-elastic element extends into the first connecting groove and is connected to the driving mass block. The driving mass block distributed along the second direction is provided with a second connecting groove extending along the first direction. The second driving coupling sub-elastic element extends into the second connecting groove and is connected to the driving mass block.

[0021] As a preferred embodiment of a MEMS three-axis gyroscope, the internal coupling beam includes an internal stiffness coupling beam and two internal arc-shaped coupling beams. The two internal arc-shaped coupling beams are respectively connected to both ends of the internal stiffness coupling beam, and the internal stiffness coupling beam is connected to the connecting frame assembly.

[0022] As a preferred embodiment of a MEMS triaxial gyroscope, the direction passing through the center of the central anchor point is defined as radial. The connecting frame assembly includes a stiffness frame and a stress frame that are radially distributed and connected. The stiffness frame is connected to the middle of the internal coupling beam, and the stress frame is connected to the central anchor point. The stiffness frame includes at least two radially extending stiffness sub-frames, and a first distance between two adjacent stiffness sub-frames is smaller than a second distance between the stiffness frame and the stress frame.

[0023] As a preferred embodiment of a MEMS three-axis gyroscope, the coupling beam connection elasticity includes a V-shaped beam, two Z-shaped beams, two external coupling connection beams, and two internal coupling connection beams. The two Z-shaped beams are respectively connected to both ends of the V-shaped beam and are symmetrically distributed relative to the V-shaped beam. Each Z-shaped beam corresponds to one external coupling connection beam and one internal coupling connection beam. One end of the external coupling connection beam is connected to the free end of the Z-shaped beam, and the other end of the external coupling connection beam is connected to the external coupling beam. One end of the internal coupling connection beam is connected to the Z-shaped beam, and the other end of the internal coupling connection beam is connected to the internal coupling beam.

[0024] As a preferred embodiment of a MEMS three-axis gyroscope, the extension lines of the V-shaped beam, the external coupling connection beam, and the internal coupling connection beam all pass through the center of the central anchor point, and the opening of the V-shaped beam faces the gap between two adjacent driving mass blocks.

[0025] The beneficial effects of this invention are as follows: The comb-tooth driving electrode and the comb-tooth driving detection electrode of the MEMS triaxial gyroscope disclosed in this invention are both comb-tooth structures with large capacitance, high linearity, and high sensitivity. The comb-tooth driving electrode can drive the driving mass blocks distributed along the first direction to move along the first direction, while the coupling component and the driving coupling elastic element can drive the driving mass blocks distributed along the second direction to move along the second direction. The movements between the driving mass blocks do not interfere with each other, reducing the impact of process deviations and external environmental changes on the output displacement of the driving mass blocks, thus ensuring the working stability of the MEMS triaxial gyroscope. The capacitance change detected by the comb-tooth driving detection electrode can be used to adjust the capacitance of the comb-tooth driving electrode in real time, ensuring the stable operation of the MEMS triaxial gyroscope. The driving mass blocks of this structure have high utilization and small size, making the space occupied by the MEMS triaxial gyroscope smaller. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of a MEMS three-axis gyroscope provided in a specific embodiment of the present invention;

[0028] Figure 2 This is a partial structural schematic diagram of a MEMS three-axis gyroscope provided in a specific embodiment of the present invention;

[0029] Figure 3 yes Figure 1 Enlarged view at circle A;

[0030] Figure 4 This is a schematic diagram of the coupling beam connecting elastic element of the MEMS triaxial gyroscope provided in a specific embodiment of the present invention;

[0031] Figure 5 This is a schematic diagram of a MEMS three-axis gyroscope in a driven state provided in a specific embodiment of the present invention;

[0032] Figure 6 This is a schematic diagram of a MEMS triaxial gyroscope in a specific embodiment of the present invention detecting angular velocity in a first direction;

[0033] Figure 7 This is a schematic diagram of a MEMS triaxial gyroscope detecting angular velocity in a second direction, provided in a specific embodiment of the present invention.

[0034] Figure 8 This is a schematic diagram of a MEMS three-axis gyroscope used in a specific embodiment of the present invention to detect the angular velocity in a third direction.

[0035] In the picture:

[0036] 10. Coupling cavity; 1. Driving mass block; 101. First driving mass block; 102. Second driving mass block; 103. Third driving mass block; 104. Fourth driving mass block; 11. First connecting slot; 12. Second connecting slot;

[0037] 2. Comb tooth driving electrode; 201. First comb tooth driving electrode; 2011. First comb tooth driving electrode; 2012. Second comb tooth driving electrode; 202. Second comb tooth driving electrode; 2021. Third comb tooth driving electrode; 2022. Fourth comb tooth driving electrode; 21. Movable driving electrode; 22. Fixed driving electrode;

[0038] 3. Comb tooth drive detection electrode; 301. First comb tooth drive detection electrode; 302. Second comb tooth drive detection electrode; 303. Third comb tooth drive detection electrode; 304. Fourth comb tooth drive detection electrode; 31. Drive detection movable electrode; 32. Drive detection fixed electrode;

[0039] 4. Third-direction comb tooth detection electrode; 41. Third-direction detection movable electrode; 42. Third-direction detection fixed electrode;

[0040] 5. Drive coupling elastic element; 51. First drive coupling sub-elastic element; 52. Second drive coupling sub-elastic element;

[0041] 6. Coupling components; 61. External coupling beam; 62. Internal coupling beam; 621. Internal stiffness coupling beam; 622. Internal arc-shaped coupling beam; 63. Elastic element connecting coupling beams; 631. V-shaped beam; 632. Z-shaped beam; 633. External coupling connection beam; 634. Internal coupling connection beam;

[0042] 7. Connecting frame assembly; 71. Stiffness frame; 711. Stiffness sub-frame; 72. Stress frame;

[0043] 8. Central anchor point;

[0044] 91. Drive the fixed elastic element; 92. Drive the anchor point. Detailed Implementation

[0045] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0046] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0047] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0048] This embodiment provides a MEMS three-axis gyroscope, defining a first direction, a second direction, and a third direction that are mutually perpendicular, such as... Figure 1 As shown, the first direction is the X-axis direction, the second direction is the Y-axis direction, and the third direction is the Z-axis direction. Figures 1 to 8As shown, the MEMS triaxial gyroscope includes multiple driving mass blocks 1, two comb-tooth driving electrodes 2, four comb-tooth driving detection electrodes 3, four driving coupling elastic elements 5, four coupling components 6, four connecting frame components 7, a central anchor point 8, a driving fixing elastic element 91, and a driving anchor point 92. In this embodiment, there are four driving mass blocks 1. One end of the driving fixing elastic element 91 is connected to the driving anchor point 92. The four driving mass blocks 1 are arranged at equal angles around the center of the ring, with two driving mass blocks 1 distributed along a first direction and the other two driving mass blocks 1 distributed along a second direction. The four driving mass blocks 1 are symmetrically distributed at intervals along the first and second directions, forming a coupling cavity 10. Each driving mass block 1 is connected to the other end of the driving fixing elastic element 91. Each driving coupling elastic element 5 elastically connects two adjacent driving mass blocks 1. The comb-tooth driving electrodes 2 can drive the two driving mass blocks 1 distributed along the first direction to move along the first direction. The system consists of four coupling components 6 located within the coupling cavity 10. Each coupling component 6 includes an external coupling beam 61, an internal coupling beam 62, and a coupling beam connecting elastic element 63 connected to both. Each external coupling beam 61 is positioned opposite an internal coupling beam 62. The coupling beam connecting elastic element 63 of each coupling component 6 is connected to both the external coupling beam 61 and the internal coupling beam 62 of another coupling component 6. When the comb-tooth driving electrode 2 drives two driving mass blocks 1 distributed along the first direction to move along the first direction, the coupling components 6 and the driving coupling elastic element 5 can drive the two driving mass blocks 1 distributed along the second direction to move along the second direction. Four connecting frame components 7 correspond one-to-one with the four coupling components 6. One end of each connecting frame component 7 is connected to the internal coupling beam 62. The central anchor point 8 is located within the coupling cavity 10 and is connected to the other end of the four connecting frame components 7. Four comb-tooth driving detection electrodes 3 are located within the coupling cavity 10 and correspond one-to-one with the four coupling components 6.

[0049] In the driving state, the comb-tooth driving electrode 2 drives two driving mass blocks 1 distributed along the first direction to move synchronously in opposite directions along the first direction, and drives two driving mass blocks 1 distributed along the second direction to move synchronously in opposite directions along the second direction. When detecting the angular velocity in the first direction, the two driving mass blocks 1 distributed along the second direction can move synchronously in opposite directions along the third direction under the action of the Coriolis force. When detecting the angular velocity in the second direction, the two driving mass blocks 1 distributed along the first direction can move synchronously in opposite directions along the third direction under the action of the Coriolis force. When detecting the angular velocity in the third direction, the two driving mass blocks 1 distributed along the first direction can move synchronously in opposite directions along the second direction under the action of the Coriolis force, and at the same time, the two driving mass blocks 1 distributed along the second direction can move synchronously in opposite directions along the first direction under the action of the Coriolis force.

[0050] It should be noted that in other embodiments of the present invention, the number of driving mass blocks 1 can be eight, twelve or other numbers. In this case, these driving mass blocks 1 are distributed at equal angles along the center of the ring. The number of comb-driven detection electrodes 3, driving coupling elastic elements 5, coupling components 6 and connecting frame components 7 can also be eight, twelve or other numbers, depending on actual needs.

[0051] The comb-tooth drive electrode 2 and comb-tooth drive detection electrode 3 of the MEMS triaxial gyroscope provided in this embodiment are both comb-tooth structures. This structure has a large electrode capacitance, high linearity, and high sensitivity. The comb-tooth drive electrode 2 can drive the drive mass 1 distributed along the first direction to move along the first direction, while the coupling component 6 and the drive coupling elastic element 5 can drive the drive mass 1 distributed along the second direction to move along the second direction. This allows the two comb-tooth drive electrodes 2 to drive the four drive mass 1 to move synchronously, and the movements of the four drive mass 1 do not interfere with each other. This reduces the impact of process deviations and changes in the external environment on the output displacement of the drive mass 1, ensuring the working stability of the MEMS triaxial gyroscope. The capacitance change detected by the comb-tooth drive detection electrode 3 can be used to adjust the capacitance of the comb-tooth drive electrode 2 in real time, ensuring the stable operation of the MEMS triaxial gyroscope. The drive mass 1 of this structure has high utilization and small size, making the space occupied by the MEMS triaxial gyroscope smaller.

[0052] The MEMS three-axis gyroscope in this embodiment also includes a substrate (not shown in the figure). The driving anchor point 92 and the center anchor point 8 are both fixed on the substrate. The driving fixing elastic element 91, the driving mass block 1, the driving coupling elastic element 5, the coupling component 6 and the connecting frame component 7 are all suspended on the substrate, and the driving fixing elastic element 91, the driving mass block 1, the driving coupling elastic element 5, the coupling component 6 and the connecting frame component 7 can all move relative to the substrate.

[0053] In this embodiment, the four driving mass blocks 1 are a first driving mass block 101, a second driving mass block 102, a third driving mass block 103, and a fourth driving mass block 104. The first driving mass block 101 and the third driving mass block 103 are distributed along the X-axis, and the second driving mass block 102 and the fourth driving mass block 104 are distributed along the Y-axis.

[0054] Furthermore, the driving mass block 1 and its opposing substrate form a detection capacitor. When detecting the angular velocity in the X-axis direction, the second driving mass block 102 and the fourth driving mass block 104 move along the Z-axis direction. At this time, the detection capacitor formed by the second driving mass block 102 and the fourth driving mass block 104 is used to detect the angular velocity in the X-axis direction. Since the capacitance of the two detection capacitors increases and the capacitance of the third driving mass block decreases, the difference between the two is obtained to obtain the capacitance change caused by the angular velocity in the X-axis direction, and thus the magnitude of the input angular velocity in the X-axis direction is obtained. When detecting the angular velocity in the Y-axis direction, the first driving mass block 101 and the third detection mass block move along the Z-axis direction. At this time, the detection capacitor formed by the first driving mass block 101 and the third driving mass block 103 is used to detect the angular velocity in the Y-axis direction. Since the capacitance of the two detection capacitors increases and the capacitance of the third driving mass block decreases, the difference between the two is obtained to obtain the capacitance change caused by the angular velocity in the Y-axis direction, and thus the magnitude of the input angular velocity in the Y-axis direction is obtained.

[0055] like Figure 1 As shown, the MEMS triaxial gyroscope of this embodiment also includes a third-direction comb tooth detection electrode 4. The third-direction comb tooth detection electrode 4 includes a third-direction detection movable electrode 41 and a third-direction detection fixed electrode 42. The third-direction detection movable electrode 41 is fixed on two driving mass blocks 1 distributed along the second direction. The third-direction detection movable electrode 41 can move with the driving mass blocks 1. The third-direction detection fixed electrode 42 is fixed on the substrate.

[0056] like Figure 1 and Figure 2 As shown, each comb tooth driving electrode 2 in this embodiment includes a driving movable electrode 21 and a driving fixed electrode 22, and each comb tooth driving detection electrode 3 includes a driving detection movable electrode 31 and a driving detection fixed electrode 32. The driving movable electrodes 21 of the two comb tooth driving electrodes 2 are respectively fixed on two driving mass blocks 1 distributed along the first direction, and the driving detection movable electrodes 31 of the four comb tooth driving detection electrodes 3 are respectively fixed on the external coupling beam 61. The driving movable electrode 21 and the driving detection movable electrode 31 can move with the movement of the driving mass block 1, and the driving fixed electrode 22 and the driving detection fixed electrode 32 are both fixed on the substrate.

[0057] like Figures 5 to 8As shown, the two comb drive electrodes 2 in this embodiment are a first comb drive electrode 201 and a second comb drive electrode 202. The first comb drive electrode 201 includes a first comb sub-drive electrode 2011 and a second comb sub-drive electrode 2012. The second comb sub-drive electrode 2012 is formed inside the first drive mass block 101. The second comb drive electrode 202 includes a third comb sub-drive electrode 2021 and a fourth comb drive electrode 2022. The fourth comb drive electrode 2022 is formed inside the third drive mass block 103. The first comb drive electrode 2011, the second comb drive electrode 2012, the third comb drive electrode 2021, and the fourth comb drive electrode 2022 are all comb sub-drive electrodes including a movable drive electrode 21 and a fixed drive electrode 22. The first comb drive electrode 201 corresponds to the first drive mass block 101, and the second comb drive electrode 202 corresponds to the third drive mass block 103. There are four third-direction comb tooth detection electrodes 4, two of which correspond to the second driving mass block 102, and the other two correspond to the fourth driving mass block 104. There are also four comb tooth drive detection electrodes 3, each corresponding to a driving mass block 1 via a coupling component 6. The four comb tooth drive detection electrodes 3 are designated as a first comb tooth drive detection electrode 301, a second comb tooth drive detection electrode 302, a third comb tooth drive detection electrode 303, and a fourth comb tooth drive detection electrode 304. Specifically, the first comb tooth drive detection electrode 301 faces the first driving mass block 101, the second comb tooth drive detection electrode 302 faces the second driving mass block 102, the third comb tooth drive detection electrode 303 faces the third driving mass block 103, and the fourth comb tooth drive detection electrode 304 faces the fourth driving mass block 104. Each comb tooth drive detection electrode 3 can detect the movement of one driving mass block 1.

[0058] like Figure 3 As shown, the drive coupling elastic element 5 in this embodiment includes a first drive coupling sub-elastic element 51 and a second drive coupling sub-elastic element 52 connected vertically. The drive mass blocks 1 distributed along the first direction are provided with a first connecting groove 11 extending along the second direction, that is, the first drive mass block 101 and the third drive mass block 103 are provided with the first connecting groove 11. The first drive coupling sub-elastic element 51 extends into the first connecting groove 11 and is connected to the first drive mass block 101 or the third drive mass block 103. The drive mass blocks 1 distributed along the second direction are provided with a second connecting groove 12 extending along the first direction, that is, the second drive mass block 102 and the fourth drive mass block 104 are provided with the second connecting groove 12. The second drive coupling sub-elastic element 52 extends into the second connecting groove 12 and is connected to the second drive mass block 102 or the fourth drive mass block 104.

[0059] like Figure 2 As shown, in this embodiment, the external coupling beam 61 is an arc-shaped structure with the center of the central anchor point 8 as its center. The internal coupling beam 62 includes an internal stiffness coupling beam 621 and two internal arc-shaped coupling beams 622. The internal arc-shaped coupling beams 622 are arc-shaped structures with the center of the central anchor point 8 as their center. The two internal arc-shaped coupling beams 622 are respectively connected to the two ends of the internal stiffness coupling beam 621. The internal stiffness coupling beam 621 is connected to the connecting frame assembly 7. The structure of the internal stiffness coupling beam 621 is as follows: Figure 2 As shown, this structure of the internal stiffness coupling beam 621 can increase the stiffness of the internal coupling beam 62, thereby making the MEMS triaxial gyroscope suitable for low-frequency modes.

[0060] Since the arc-shaped external coupling beam 61 and the arc-shaped internal arc-shaped coupling beam 622 occupy relatively little space, the area of ​​the driving mass block 1 can be maximized. In addition, the inclined surface of the driving mass block 1 extends along the direction passing through the center of the central anchor point 8. This setting can maximize the area of ​​the driving mass block 1 while ensuring that two adjacent driving mass blocks 1 do not collide with each other, thus ensuring the rationality of the spatial layout and further increasing the stability of the MEMS three-axis gyroscope operation.

[0061] In this embodiment, the direction passing through the center of the central anchor point 8 is defined as radial. Specifically, on the plane defined by the X-axis and Y-axis, the direction passing through the center of the central anchor point 8 is radial, such as... Figure 2 As shown, the connecting frame assembly 7 includes a rigid frame 71 and a stress frame 72 that are radially distributed and connected. The rigid frame 71 is connected to the middle of the internal coupling beam 62, and the stress frame 72 is connected to the central anchor point 8. The rigid frame 71 includes three radially extending rigid sub-frames 711. The first distance between two adjacent rigid sub-frames 711 is smaller than the second distance between the rigid frame 71 and the stress frame 72. The rigid frame 71 can reduce the connection stiffness with the central anchor point 8 through the internal rigid coupling beam 621. If this connection stiffness is large, the motion mode of the driving mass block 1 is prone to change when detecting the angular velocity in the Z-axis direction, thereby affecting the detection accuracy of the MEMS triaxial gyroscope. The stress frame 72 structure of this embodiment can reduce the stress between the stress frame 72 and the central anchor point 8, reduce the stress between the MEMS triaxial gyroscope and the central anchor point 8 in the driving and detection states, reduce the probability of damage to the MEMS triaxial gyroscope, and extend the service life of the MEMS triaxial gyroscope.

[0062] It should be noted that in other real-time examples of the present invention, the number of stiffness sub-frames 711 included in the stiffness frame 71 is not limited to the three in this embodiment, but may also be two or more than three. These stiffness sub-frames 711 are arranged radially, and the specific number is set according to actual needs.

[0063] like Figure 4 As shown, the elastic coupling beam connection in this embodiment includes a V-shaped beam 631, two Z-shaped beams 632, two external coupling connecting beams 633, and two internal coupling connecting beams 634. The extension lines of the V-shaped beam 631, the external coupling connecting beams 633, and the internal coupling connecting beams 634 all pass through the center of the central anchor point 8. The two Z-shaped beams 632 are respectively connected to both ends of the V-shaped beam 631 and are symmetrically distributed relative to the V-shaped beam 631. The opening of the V-shaped beam 631 faces the gap between two adjacent driving mass blocks 1. Each Z-shaped beam 632 corresponds to one external coupling connecting beam 633 and one internal coupling connecting beam 634. One end of the external coupling connecting beam 633 is connected to the free end of the Z-shaped beam 632, and the other end of the external coupling connecting beam 633 is connected to the external coupling beam 61. One end of the internal coupling connecting beam 634 is connected to the Z-shaped beam 632, and the other end of the internal coupling connecting beam 634 is connected to the internal coupling beam 62.

[0064] In the driving state, equal and opposite alternating voltages are applied to the driving fixed electrodes 22 of the first comb tooth driving electrode 2011 and the second comb tooth driving electrode 2012, and equal and opposite alternating voltages are applied to the driving fixed electrodes 22 of the third comb tooth driving electrode 2021 and the fourth comb tooth driving electrode 2022. Simultaneously, a DC voltage is applied to the four driving movable electrodes 21. The first and second comb tooth driving electrodes 201 and 202 respectively drive the first driving mass block 101 and the third driving mass block 103 to reciprocate along the X-axis in directions away from and towards each other. Meanwhile, due to the elastic coupling between the second driving mass block 102 and the fourth driving mass block 104... Component 5 and coupling component 6 are respectively connected to the first driving mass block 101 and the third driving mass block 103, enabling the second driving mass block 102 and the fourth driving mass block 104 to move synchronously along the Y-axis in directions closer to and further away from each other. Since the comb tooth driving detection electrode 3 is connected to the driving mass block 1 through coupling component 6, the driving mass block 1 can drive the driving detection movable electrode 31 to move, thereby changing the capacitance of the comb tooth driving detection electrode 3. That is, the comb tooth driving detection electrode 3 can detect the capacitance change caused by the movement of the driving mass block 1. By detecting the capacitance change by the comb tooth driving detection electrode 3, it can be determined whether the voltage applied to the comb tooth driving electrode 2 needs to be changed to ensure the stable movement of the MEMS triaxial gyroscope. Figure 5 This is a schematic diagram of the MEMS three-axis gyroscope moving away from each other in a driven state.

[0065] The two directions along the Z-axis, inward and outward, are defined as the Z-axis reverse and Z-axis positive directions, respectively. Specifically, when detecting the angular velocity in the X-axis direction, according to the right-hand rule, both the second driving mass 102 and the fourth driving mass 104 generate Coriolis forces along the Z-axis. The second driving mass 102 and the fourth driving mass 104 move in opposite directions along the Z-axis and reciprocate continuously. That is, at the same instant, when the second driving mass 102 moves in the positive Z-axis direction, the fourth driving mass 104 moves in the reverse Z-axis direction; when the second driving mass 102 moves in the reverse Z-axis direction, the fourth driving mass 104 moves in the positive Z-axis direction. Figure 6 This is a schematic diagram of the second driving mass 102 and the fourth driving mass 104 in the Z-axis direction of the MEMS triaxial gyroscope in the detection state.

[0066] When the angular velocity in the Y-axis direction is detected, according to the right-hand rule, both the first driving mass 101 and the third driving mass 103 generate Coriolis force in the Z-axis direction. The first driving mass 101 and the third driving mass 103 move in opposite directions along the Z-axis and reciprocate continuously. That is, at the same instant, when the first driving mass 101 moves in the positive direction along the Z-axis, the third driving mass 103 moves in the opposite direction along the Z-axis; when the first driving mass 101 moves in the opposite direction along the Z-axis, the third driving mass 103 moves in the positive direction along the Z-axis. Figure 7 This is a schematic diagram of the first driving mass block 101 and the third driving mass block 103 in the Z-axis direction of the MEMS triaxial gyroscope in the detection state.

[0067] When detecting the angular velocity in the Z-axis direction, according to the right-hand rule, the first driving mass block 101 and the third driving mass block 103 will both experience Coriolis force along the Y-axis direction, and the second driving mass block 102 and the fourth driving mass block 104 will both experience Coriolis force along the X-axis direction. The first driving mass block 101 and the third driving mass block 103 move in opposite directions along the Y-axis direction and reciprocate continuously, while the second driving mass block 102 and the fourth driving mass block 104 move in opposite directions along the X-axis direction and reciprocate continuously. Furthermore, the first driving mass block 101, the second driving mass block 102, the third driving mass block 103, and the fourth driving mass block 104 move in either a clockwise or counterclockwise direction. At this time, the third-direction comb tooth detection electrode 4 is used to detect the angular velocity in the Z-axis direction. Figure 8 This is a schematic diagram showing the first driving mass 101, the third driving mass 103, the fourth driving mass 104, and the third driving mass 104 moving counterclockwise in the detection state of the MEMS triaxial gyroscope.

[0068] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A MEMS three-axis gyroscope, characterized in that, The MEMS triaxial gyroscope, defined by a first perpendicular direction, a second perpendicular direction, and a third perpendicular direction, includes: A drive-fixed elastic element and a drive anchor point are provided, with one end of the drive-fixed elastic element connected to the drive anchor point; Multiple driving mass blocks, wherein at least two of the driving mass blocks are distributed along the first direction, at least two of the driving mass blocks are distributed along the second direction, the multiple driving mass blocks form a coupling cavity, and each driving mass block is connected to the other end of the driving fixed elastic member; Multiple drive coupling elastic elements, each of which elastically connects two adjacent drive mass blocks; The comb-tooth driving electrode is capable of driving the two driving mass blocks distributed along the first direction to move along the first direction. Multiple coupling components are located within the coupling cavity, and each coupling component includes an external coupling beam, an internal coupling beam, and a coupling beam connecting elastic element connected to both. Each external coupling beam is positioned opposite one of the internal coupling beams, and the coupling beam connecting elastic element of each coupling component is connected to both the external coupling beam and the internal coupling beam of another coupling component. When the comb-tooth driving electrode drives the driving mass blocks distributed along the first direction to move along the first direction, the coupling components and the driving coupling elastic element can drive the driving mass blocks distributed along the second direction to move along the second direction. Multiple connecting frame components are respectively associated with multiple coupling components, and one end of each connecting frame component is connected to the internal coupling beam; The central anchor point is located within the coupling cavity and is connected to the other end of the plurality of connecting frame assemblies; Multiple comb-tooth driven detection electrodes are located within the coupling cavity and each corresponds to one of the multiple coupling components; In the driving state, the comb-tooth driving electrode drives the driving mass blocks distributed along the first direction to reciprocate synchronously in the first direction, and drives the driving mass blocks distributed along the second direction to reciprocate synchronously in the second direction. When the angular velocity in the first direction is detected, the driving mass blocks distributed along the second direction can reciprocate synchronously in the third direction under the action of the Coriolis force. When the angular velocity in the second direction is detected, the driving mass blocks distributed along the first direction can reciprocate synchronously in the third direction under the action of the Coriolis force. When the angular velocity in the third direction is detected, the driving mass blocks distributed along the first direction can reciprocate synchronously in the second direction under the action of the Coriolis force, and the driving mass blocks distributed along the second direction can reciprocate synchronously in the first direction under the action of the Coriolis force. The drive coupling elastic element includes a first drive coupling sub-elastic element and a second drive coupling sub-elastic element that are vertically connected. The drive mass block distributed along the first direction is provided with a first connecting groove extending along the second direction. The first drive coupling sub-elastic element extends into the first connecting groove and is connected to the drive mass block. The drive mass block distributed along the second direction is provided with a second connecting groove extending along the first direction. The second drive coupling sub-elastic element extends into the second connecting groove and is connected to the drive mass block. The direction passing through the center of the central anchor point is defined as radial. The connecting frame assembly includes a stiffness frame and a stress frame that are radially distributed and connected. The stiffness frame is connected to the middle of the internal coupling beam, and the stress frame is connected to the central anchor point. The stiffness frame includes at least two radially extending stiffness sub-frames. The first distance between two adjacent stiffness sub-frames is smaller than the second distance between the stiffness frame and the stress frame. The elastic coupling beam connection includes a V-shaped beam, two Z-shaped beams, two external coupling connecting beams, and two internal coupling connecting beams. The two Z-shaped beams are respectively connected to both ends of the V-shaped beam and are symmetrically distributed relative to the V-shaped beam. Each Z-shaped beam corresponds to one external coupling connecting beam and one internal coupling connecting beam. One end of the external coupling connecting beam is connected to the free end of the Z-shaped beam, and the other end of the external coupling connecting beam is connected to the external coupling beam. One end of the internal coupling connecting beam is connected to the Z-shaped beam, and the other end of the internal coupling connecting beam is connected to the internal coupling beam.

2. The MEMS triaxial gyroscope according to claim 1, characterized in that, The MEMS three-axis gyroscope also includes a substrate, the driving anchor point and the center anchor point are both fixed on the substrate, and the driving fixing elastic element, the driving mass block, the driving coupling elastic element, the coupling component and the connecting frame component are all suspended on the substrate.

3. The MEMS triaxial gyroscope according to claim 2, characterized in that, The MEMS triaxial gyroscope further includes a third-direction comb tooth detection electrode, which includes a third-direction detection movable electrode and a third-direction detection fixed electrode. The third-direction detection movable electrode is fixed on the driving mass block distributed along the second direction, and the third-direction detection fixed electrode is fixed on the substrate.

4. The MEMS triaxial gyroscope according to claim 2, characterized in that, The comb drive electrode includes a movable drive electrode and a fixed drive electrode. The movable drive electrode is fixed on the drive mass block distributed along the first direction, and the fixed drive electrode is fixed on the substrate.

5. The MEMS triaxial gyroscope according to claim 2, characterized in that, The comb tooth drive detection electrode includes a drive detection movable electrode and a drive detection fixed electrode. The drive detection movable electrode is fixed on the external coupling beam, and the drive detection fixed electrode is fixed on the substrate.

6. The MEMS triaxial gyroscope according to claim 1, characterized in that, The internal coupling beam includes an internal stiffness coupling beam and two internal arc-shaped coupling beams. The two internal arc-shaped coupling beams are respectively connected to both ends of the internal stiffness coupling beam, and the internal stiffness coupling beam is connected to the connecting frame assembly.

7. The MEMS triaxial gyroscope according to claim 1, characterized in that, The extension lines of the V-shaped beam, the external coupling connecting beam, and the internal coupling connecting beam all pass through the center of the central anchor point, and the opening of the V-shaped beam faces the gap between two adjacent driving mass blocks.

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