一种输送线上晶棒端面斜度在线检测装置

By setting up a centering mechanism and a linear module assembly on the crystal rod conveyor line, combined with servo motor drive, the problems of low accuracy and poor stability of existing equipment have been solved, achieving high-precision measurement of the crystal rod end face slope, and improving production efficiency and equipment stability.

CN117533734BActive Publication Date: 2026-07-17LIANZHI (DALIAN) INTELLIGENT TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
LIANZHI (DALIAN) INTELLIGENT TECH CO LTD
Filing Date
2023-11-22
Publication Date
2026-07-17

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Abstract

本发明属于自动化技术领域，公开了一种输送线上晶棒端面斜度在线检测装置。装置设置在晶棒输送线上方，装置包括支架，支架上设置用于对中晶棒的对中机构，对中机构的两端分别设置用于检测晶棒两端端面斜度的头端检测机构、尾端检测机构，对中机构上还设置直线模组组件；直线模组组件与尾端检测机构滑动连接。该装置测量晶棒端面斜度，同时保证高精度及稳定性。同时提高空间利用率，加快生产节拍，提升工作效率。
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