A rapid loading device and method for very low temperature refrigeration systems
Patent Information
- Application Number
- CN202311450366.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-11-02
- Publication Date
- 2026-09-22
- Estimated Expiration
- 2043-11-02
AI Technical Summary
[0006]本发明的目的在于提供一种用于极低温制冷系统的快速装载装置及方法,它可以解决现有技术中存在的更换样品时流程复杂且耗时长、耗人力、易磕碰损坏的问题
[0017]本发明产生的有益效果是:本发明通过在极低温制冷系统最下层冷盘的底部安装对接坞,并在各个热辐射屏蔽罩和真空腔尾罩对应对接坞的正下方开设开口,且在开口处安装对应的弹簧门或高真空插板阀,形成一个可开关的极冷真空腔;同时,本发明设置一个可以装样品架的装载真空腔,使装载真空腔可拆卸的密封安装在高真空插板阀上,以使装载真空腔与极冷真空腔连通,再通过升降机构实现样品架的升降,当样品架从装载真空腔通过高真空插板阀进入极冷真空腔,再依次打开各个弹簧门升至对接坞下方,然后通过固定机构将样品架固定安装在对接坞底部,便可将样品送入极低温制冷系统内,然后固定机构、升降机构退出极低温制冷系统,弹簧门和高真空插板阀依次关闭,可以保证极冷真空腔的极冷温度和真空环境,即可快速完成更换样品,而不需要对极低温制冷系统进行包括回到室温、拆除再安装真空腔尾罩、各级热辐射屏蔽罩和超导磁体、重新密封、抽真空、再制冷等操作,可以大大缩短更换样品时间,可从将传统方式所需的80小时缩短至10小时以内,而且所有操作仅需一人即可完成,操作简单省时省力,且不存在磕碰损坏的风险,另外,由于无需对极低温制冷系统进行操作,因此无需对其内环境进行频繁监控操作,可以节省人力。
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Figure CN117537552B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of ultra-low temperature strong magnetic field technology, specifically relating to a rapid loading device and method for ultra-low temperature refrigeration systems. Background Technology
[0002] At extremely low temperatures (typically referring to temperatures on the order of mK), the quantum behavior of materials is revealed. Therefore, controlling quantum devices in the extreme environment of millikelvin is one of the important directions of current physics research. In the research process, it is essential to use different quantum devices for scientific research.
[0003] Cryogenic systems are extremely complex, involving multiple stages of cooling, and the lower the temperature, the longer the cooling process takes. For example... Figure 1 As shown, in a conventional cryogenic refrigeration system 200, the vacuum chamber top plate 201 is mounted on the refrigeration unit bracket 212 and fixed with screws; the first-stage cold plate 202, the second-stage cold plate 203, the third-stage cold plate 204, the fourth-stage cold plate 205, and the fifth-stage cold plate 206 are sequentially hung below the vacuum chamber top plate 201; a first-stage thermal radiation shield 208, a second-stage thermal radiation shield 209, and a third-stage thermal radiation shield 210 are respectively hung below the first-stage cold plate 202, the second-stage cold plate 203, and the third-stage cold plate 204 and fixed with screws. Good thermal contact exists between each stage of the cold plate and its corresponding thermal radiation shield; a superconducting magnet 211 is mounted below the secondary thermal radiation shield 209; the vacuum chamber tail cover 207 is mounted below the vacuum chamber top plate 201 and is sealed to the vacuum chamber top plate 201 through a sealing ring to form a vacuum chamber; the refrigerator 213 (a 4K refrigerator can be selected) is installed on the vacuum chamber top plate 201, with its cold head end protruding into the vacuum chamber. The refrigerator and the vacuum chamber top plate 201 are sealed to each other through a sealing ring. The first-stage cold head of the refrigerator 213... The first-stage cold plate is fixed to the second-stage cold plate via a thermally conductive copper braid, and the second-stage cold head is fixed to the second-stage cold plate via a thermally conductive copper braid. The dilution refrigeration mixing chamber 214 is mounted on the fifth-stage cold plate 206, ensuring good thermal contact with it. The refrigeration mixing chamber 214 is connected to the external circulation system of the vacuum chamber top plate 201 via an inlet pipe 215 and an exhaust pipe 216. An inlet pipe valve 217 is installed on the inlet pipe, and an exhaust pipe valve 218 is installed on the exhaust pipe. The inlet and exhaust pipes are connected to each stage of the cold plate. With good thermal contact, the intake and exhaust pipes are made of stainless steel and do not affect the thermal conductivity between the various cold plates. The dilution refrigeration mixing chamber 214, together with the intake pipe 215, the exhaust pipe 216, and the external circulation system of the vacuum chamber, forms a closed-loop gas path, in which the helium-3 and helium-4 mixed gas circulates. The temperature sensor 219 is installed on the fifth-stage cold plate 206 with good thermal contact and is used to monitor and collect the temperature of the cold plate. The sample is placed below the fifth-stage cold plate and is at the same temperature as the fifth-stage cold plate.
[0004] The existing cryogenic refrigeration system generally includes the following steps when changing samples: (1) return the entire cryogenic system to room temperature, (2) open the vacuum chamber tail cover, (3) remove the heat radiation shields and superconducting magnets at each level, (4) change the sample, (5) reinstall the heat radiation shields and superconducting magnets at each level, (6) seal the vacuum chamber tail cover, (7) evacuate the chamber, (8) turn on the refrigeration machine and cool down step by step. The entire system needs to be cooled down again for more than 50 hours.
[0005] Obviously, the above method has the following disadvantages: 1. The whole process requires heating, repeated disassembly and assembly, cooling, etc., which takes at least 80 hours, and the sample replacement time is too long; 2. When disassembling and installing the vacuum chamber tail cover, various levels of heat radiation shields and superconducting magnets, 2-3 people are needed to complete the task. The disassembly and assembly are complicated, time-consuming and labor-intensive; 3. Repeated disassembly and assembly of the vacuum chamber tail cover, various levels of heat radiation shields and superconducting magnets poses a risk of impact damage; 4. The experimental personnel need to frequently monitor the status of each stage throughout the process, which consumes manpower. Summary of the Invention
[0006] The purpose of this invention is to provide a rapid loading device and method for cryogenic refrigeration systems, which can solve the problems of complex and time-consuming processes, high manpower consumption, and susceptibility to damage during sample replacement in the prior art.
[0007] The technical solution adopted by this invention to solve its technical problem is: a rapid loading device for cryogenic refrigeration systems, comprising: The docking dock is installed at the bottom of the lowest layer of the cryogenic refrigeration system. Each heat radiation shield and vacuum chamber tail cover of the cryogenic refrigeration system has an opening located directly below the docking dock. Spring doors are sealed at the openings of each heat radiation shield and can open the openings of the heat radiation shield when subjected to external pressure. A high-vacuum slide gate valve is sealed and installed at the opening of the vacuum chamber tail cover and can be used to open and close the ultra-cold vacuum chamber. The loading vacuum chamber is detachably sealed and installed on the high vacuum gate valve. When the seal is installed on the high vacuum gate valve, the high vacuum gate valve is opened to connect the ultra-cold vacuum chamber with the loading vacuum chamber. The sample holder is located inside the loading vacuum chamber; The lifting mechanism is used to drive the sample holder to rise and fall, and to make the sample holder open each spring door in sequence during the rising process until it is located at the bottom of the docking dock; The fixing mechanism is used to fix or remove the sample holder from the docking dock.
[0008] Optionally, the loading vacuum chamber includes an upper platform, a lifting platform, and a lower platform arranged sequentially from top to bottom, as well as multiple guide rails, flanges, spring bellows, and a vacuum pump; The lower end of the guide rail is fixedly connected to the lower platform, and its upper end passes through the lifting platform and is fixedly connected to the upper platform. The lifting platform is slidably installed on the guide rail. The upper platform has an opening. The flange is sealed and installed on the upper platform and communicates with the opening. The flange is detachably connected to the high vacuum slide valve. The spring bellows is retractably and sealed between the upper platform and the lifting platform. The lower opening of the spring bellows is sealed and blocked by the lifting platform, and its upper opening communicates with the opening of the upper platform and the flange. The vacuum pump is used to evacuate the spring bellows.
[0009] Optionally, the lifting mechanism includes a lifting motor, a lifting screw, and a conveying rod. The lifting motor is fixedly installed on the lower platform. The lifting screw is vertically arranged outside the spring bellows, with its lower end fixedly connected to the lifting motor and its upper end threadedly connected to the lifting platform. The conveying rod is vertically arranged inside the spring bellows, with its lower end fixedly connected to the lifting platform. The sample holder is placed on top of the conveying rod.
[0010] Optionally, a limiting mechanism is provided between the conveyor rod and the sample holder to prevent the sample holder from rotating or moving.
[0011] Optionally, the fixing mechanism includes a torque motor, multiple long screws, and multiple fixing screws. The torque motor is fixedly installed at the bottom of the lifting platform. The multiple long screws are spaced apart and pass through the conveyor rod. The lower end of the long screws extends out of the lifting platform and connects to the torque motor. The top of the long screws is provided with a non-circular groove. The lower end of the fixing screw is provided with a non-circular post that matches the non-circular groove. The lower end of the fixing screw is embedded in the non-circular groove through its non-circular post, and its upper end passes through the sample holder. The docking dock is provided with screw holes that match the fixing screws.
[0012] Optionally, the non-circular groove is an internal hexagonal screw head, and the non-circular column is an external hexagonal screw head.
[0013] Optionally, the sample holder includes an upper shelf, a lower shelf, and multiple sleeves disposed between the upper and lower shelves, with the fixing screws passing through the corresponding sleeves.
[0014] Optionally, the upper frame is provided with multiple guide columns, and the docking dock is provided with multiple guide slots configured accordingly.
[0015] Optionally, the device may also include a movable flatbed trailer located below the lower platform and multiple air cushion columns installed between the flatbed trailer and the lower platform.
[0016] Accordingly, the present invention also provides a rapid loading method for cryogenic refrigeration systems, implemented based on the above-described device. When it is necessary to place quantum devices inside an ultra-low temperature refrigeration system, the method includes the following steps: S1. Place the quantum device on the sample holder; S2. Seal the loading vacuum chamber to the high vacuum gate valve, open the high vacuum gate valve to connect the ultra-cold vacuum chamber to the loading vacuum chamber, and ensure that the vacuum level inside the chamber reaches 10. -5 The mbar level; S3. Start the lifting mechanism to drive the sample rack to rise and open each spring door in sequence until it is at the bottom of the docking dock; S4. Activate the fixing mechanism to fix the sample holder onto the docking dock; S5. Start the lifting mechanism to descend into the loading vacuum chamber, and at the same time, the spring doors close in sequence; S6. Close the high vacuum gate valve and remove the loading vacuum chamber from the high vacuum gate valve; When it is necessary to replace the quantum device in the cryogenic refrigeration system, the method includes the following steps: referring to steps S2 and S3, raise the lifting mechanism to below the sample rack that has been installed on the docking dock, start the fixing mechanism to remove the sample rack from the docking dock, and then refer to steps S5 and S6 to remove the old quantum device and place the new quantum device on the sample rack. Repeat steps S2-S6 to complete the replacement of the quantum device.
[0017] The beneficial effects of this invention are as follows: This invention creates an openable cryogenic vacuum chamber by installing a docking dock at the bottom of the lowest layer of the cryogenic refrigeration system's cold plate, and opening openings directly below each thermal radiation shield and vacuum chamber tail cover corresponding to the docking dock. Corresponding spring doors or high-vacuum gate valves are installed at these openings. Simultaneously, this invention includes a loading vacuum chamber for mounting sample holders. The loading vacuum chamber is detachably and sealed to a high-vacuum gate valve, allowing communication between the loading vacuum chamber and the cryogenic vacuum chamber. A lifting mechanism is used to raise and lower the sample holder. When the sample holder enters the cryogenic vacuum chamber from the loading vacuum chamber through the high-vacuum gate valve, the spring doors are opened sequentially to raise it below the docking dock. Finally, a fixing mechanism secures the sample holder to the bottom of the docking dock, allowing the sample to be delivered. Inside the cryogenic refrigeration system, the fixing and lifting mechanisms exit the system, and the spring door and high-vacuum gate valve close sequentially. This ensures the extremely cold temperature and vacuum environment of the cryogenic vacuum chamber, allowing for rapid sample replacement without requiring operations such as returning the cryogenic refrigeration system to room temperature, removing and reinstalling the vacuum chamber tail cover, various levels of thermal radiation shielding and superconducting magnets, resealing, evacuating, and recooling. This significantly reduces sample replacement time from the traditional 80 hours to less than 10 hours. Moreover, all operations can be completed by a single person, making it simple, time-saving, and labor-saving, with no risk of damage from impacts. Furthermore, since no operation of the cryogenic refrigeration system is required, frequent monitoring of its internal environment is unnecessary, saving manpower. Attached Figure Description
[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments. In the accompanying drawings: Figure 1 This is a schematic diagram of a traditional cryogenic refrigeration system; Figure 2 This is a schematic diagram of the structure of a rapid loading device for an ultra-low temperature refrigeration system provided in an embodiment of the present invention; Figure 3 This is a schematic diagram of the structure of a rapid loading device that does not include an ultra-low temperature refrigeration system in an embodiment of the present invention; Figure 4 This is a schematic diagram of the sample holder in an embodiment of the present invention.
[0019] Wherein: 100-loading vacuum chamber, 101-guide rail, 102-lifting motor, 103-lifting screw, 104-lifting platform, 105-vacuum electronic valve, 106-torque motor, 107-long screw, 108-transfer rod, 109-spring bellows, 110-flange, 111-sample rack, 111.1-upper rack, 111.2-lower rack, 111.3-multiple sleeves, 112-fixing screw, 113-flatbed, 114-air cushion column, 115-vacuum bellows, 116-vacuum pump, 117-guide column, 118-upper platform, 119-lower platform, 120-electrical interface; 200-Ultra-low temperature refrigeration system; 201-Vacuum chamber top plate; 202-First-stage cold plate; 203-Second-stage cold plate; 204-Third-stage cold plate; 205-Fourth-stage cold plate; 206-Fifth-stage cold plate; 207-Vacuum chamber tail cover; 208-First-stage thermal radiation shield; 209-Second-stage thermal radiation shield; 210-Third-stage thermal radiation shield; 211-Superconducting magnet; 212-Refrigerator bracket; 213-Refrigerator; 214-Dilution refrigeration mixing chamber; 215-Inlet pipe; 216-Evacuation pipe; 217-Inlet pipe valve; 218-Evacuation pipe valve; 219-Temperature sensor; 220-Dock; 221-High vacuum slide gate valve; 222-Spring door. Detailed Implementation
[0020] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.
[0021] In the description of this invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.
[0022] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances. Furthermore, in the description of this invention, unless otherwise stated, "a plurality of" or "several" means two or more.
[0023] like Figure 2 , Figure 3 As shown, the present invention provides a rapid loading device for cryogenic refrigeration systems, comprising: The docking dock 220 is installed at the bottom of the lowest cold plate of the cryogenic refrigeration system 200, specifically below the center of the fifth-stage cold plate 206. It extends to the vicinity of the center of the superconducting magnet's magnetic field through oxygen-free copper heat-conducting columns. Each thermal radiation shield of the cryogenic refrigeration system 200 (specifically, the first-stage thermal radiation shield 208, the second-stage thermal radiation shield 209, and the third-stage thermal radiation shield 210) and the vacuum chamber tail cover 207 are provided with openings located directly below the docking dock 220 (each opening corresponds to the position of the spring door 222 and the high-vacuum gate valve 221), so that the high-vacuum gate valve 221, the spring door 222, and the docking dock 220 are coaxial in the vertical direction. Spring door 222 is sealed and installed at the openings of each heat radiation shield (i.e., spring doors are installed at the openings of the primary heat radiation shield 208, the secondary heat radiation shield 209, and the tertiary heat radiation shield 210). It can open the openings of the heat radiation shield when subjected to external force. The spring door includes a pair of door panels and a pair of springs. Each door panel is connected to the heat radiation shield through the spring. In the initial state, the pair of door panels are in a closed state to seal the openings of the heat radiation shield. When the door panels are subjected to external force, they will be pushed open to the left and right to open the openings of the heat radiation shield. When the external force disappears, the door panels return to their spring-closed state. The high vacuum slide gate valve 221 is sealed and installed at the opening of the vacuum chamber tail cover 207 and can open and close the ultra-cold vacuum chamber. The ultra-cold vacuum chamber is a vacuum chamber formed by the vacuum chamber tail cover 207 mounted below the vacuum chamber top plate 201 and the vacuum chamber top plate 201 being sealed and connected by a sealing ring. The high vacuum slide gate valve can be an electric high vacuum slide gate valve. The loading vacuum chamber 100 is detachably sealed and installed on the high vacuum gate valve 221. When the seal is installed on the high vacuum gate valve 221, the high vacuum gate valve 221 is opened to connect the ultra-cold vacuum chamber with the loading vacuum chamber 100. The sample holder 111 is located inside the loading vacuum chamber 100, thus ensuring that the sample inside the sample holder is always in a vacuum environment; The lifting mechanism (in this embodiment, it includes a lifting motor 102, a lifting screw 103, and a transmission rod 108) is used to drive the sample rack 111 to rise and fall, and to make the sample rack 111 open each spring door 222 in sequence during the rising process until it is located at the bottom of the docking dock 220. The fixing mechanism (in this embodiment, it includes a torque motor 106, multiple long screws 107, and multiple fixing screws 112) is used to fix or remove the sample holder 111 from the docking dock 220.
[0024] When changing samples using this invention, it is not necessary to return the cryogenic refrigeration system to room temperature. Simply stop the dilution refrigeration mixing chamber (during operation, the mixing chamber must contain liquid helium; if it is not stopped, the liquid helium will evaporate rapidly due to the temperature rise, and the gas passages in and out of the mixing chamber are very narrow pipes; a large amount of gas production will damage the pipes). Keep the 4K refrigerator running continuously, raising the docking point to above 4K. Then connect the loading vacuum chamber to the cryogenic vacuum chamber, placing the sample holder in an environment consistent with the docking point. Next, use the lifting and fixing mechanisms to install the sample holder onto the docking point. After installation, the fixing and lifting mechanisms retract from the cryogenic vacuum chamber, disconnecting the loading vacuum chamber from the cryogenic vacuum chamber. Then, restart the dilution refrigeration mixing chamber. This allows the cryogenic refrigeration system to drop from 4K to 10mK within 10 hours, minimizing the 60-hour cooling process required to drop from 300K to 4K, thus significantly shortening sample change time.
[0025] In one embodiment, such as Figure 3As shown, the loading vacuum chamber 100 includes, from top to bottom, an upper platform 118, a lifting platform 104, and a lower platform 119, as well as multiple guide rails 101, a flange 110, a spring bellows 109, and a vacuum pump 116. The lower end of the guide rail 101 is fixedly connected to the lower platform 119, and its upper end passes through the lifting platform 104 and is fixedly connected to the upper platform 118. The lifting platform 104 is slidably mounted on the guide rail 101. The upper platform 118 has an opening, and the flange 110 is sealed and mounted on the upper platform 118. The flange 110 is detachably connected to the high-vacuum gate valve 221. A retractable, sealed spring bellows 109 is located between the upper platform 118 and the lifting platform 104. The lower opening of the spring bellows 109 is sealed by the lifting platform 104, while its upper opening connects to the opening of the upper platform 118 and the flange 110. A vacuum pump 116 is used to evacuate the spring bellows 109. The vacuum pump is connected to the spring bellows via a vacuum bellows 115, on which a vacuum electronic valve 105 is installed. This invention utilizes the lifting platform's movement along the guide rail between the upper and lower platforms to extend and retract the spring bellows, thereby raising and lowering the sample holder within the spring bellows. When the flange is connected to the high-vacuum gate valve, the spring bellows connects to the ultra-cold vacuum chamber, allowing the sample holder to enter the ultra-cold vacuum chamber through the spring bellows under the same vacuum environment, ultimately reaching the bottom of the docking dock to complete sample replacement.
[0026] In one embodiment, such as Figure 3 As shown, the lifting mechanism includes a lifting motor 102, a lifting screw 103, and a conveyor rod 108. The lifting motor 102 is fixedly installed on the lower platform 119. The lifting screw 103 is vertically installed outside the spring bellows 109, with its lower end fixedly connected to the lifting motor 102 and its upper end threadedly connected to the lifting platform 104. The conveyor rod 108 is vertically installed inside the spring bellows 109, with its lower end fixedly connected to the lifting platform 104. The sample holder 111 is placed on top of the conveyor rod 108. When the sample holder needs to be raised or lowered, the lifting motor is started, driving the lifting screw to rotate, thereby raising or lowering the lifting platform. Since the conveyor rod is installed on the lifting platform, it will also rise or fall along with the sample holder, ultimately achieving the raising or lowering of the sample holder. Because both the conveyor rod and the sample holder are located inside the spring bellows and are sealed together on the lifting platform, the conveyor rod does not move relative to the spring bellows, which can better ensure the sealing of the spring bellows and thus ensure a good vacuum environment inside.
[0027] In one embodiment, such as Figure 3 As shown, a limiting mechanism (not shown in the figure) is provided between the conveyor rod 108 and the sample holder 111 to prevent the sample holder 111 from rotating or moving. This limiting mechanism can be a slot or pin configured to ensure that the sample holder placed on the top of the conveyor rod will not move in the horizontal direction, but is free in the vertical direction.
[0028] In one embodiment, such as Figure 3 , Figure 4 As shown, the fixing mechanism includes a torque motor 106, multiple long screws 107, and multiple fixing screws 112. The torque motor 106 is fixedly installed at the bottom of the lifting platform 104. The multiple long screws 107 are spaced apart and pass through the conveyor rod 108. The lower end of the long screws 107 extends out of the lifting platform 104 and connects to the torque motor 106. The top of the long screws 107 is provided with a non-circular groove (which can be triangular, rectangular, elliptical, polygonal, etc.). The lower end of the fixing screws 112 is provided with a non-circular post that matches the non-circular groove (the fixing screw can be an external hexagonal screw, the non-circular post is an external hexagonal screw head, and the non-circular groove is an internal hexagonal screw head). The lower end of the fixing screw 112 is embedded in the non-circular groove through its non-circular post, and its upper end passes through the sample holder 111. The docking dock 220 is provided with screw holes that match the fixing screws 112. The fixing screw is placed on the top of the long screw, and the two cannot rotate. It is free in the vertical direction. When it is necessary to fix the sample holder, the torque motor is started, the long screw rotates, and the fixing screw rotates together. The upper end of the fixing screw is screwed into the screw hole of the docking dock to achieve a fixed connection between the sample holder and the docking dock.
[0029] In one embodiment, such as Figure 4 As shown, the sample holder 111 includes an upper shelf 111.1, a lower shelf 111.2, and multiple sleeves 111.3 disposed between the upper and lower shelves 111.2. Fixing screws 112 pass through the corresponding sleeves 111.3. The sample can be placed on the lower shelf for protection, and the multiple sleeves connect the upper and lower shelves and guide and position the fixing screws.
[0030] In one embodiment, such as Figure 4 As shown, the upper shelf 111.1 is equipped with multiple guide posts 117, and the docking dock 220 is equipped with multiple guide slots of corresponding configuration, which can realize rapid and accurate positioning of the sample holder and the docking dock. The upper shelf 111.1 is also equipped with an electrical interface 120.
[0031] In one embodiment, such as Figure 2 , Figure 3 As shown, the device also includes a movable flatbed 113 located below the lower platform 119 and multiple air cushion columns 114 installed between the flatbed 113 and the lower platform 119. The flatbed 113 with rollers can move the loading vacuum chamber, and the air cushion columns can provide elastic adjustment for the lower platform to make the connection between the flange and the high vacuum slide valve more sealed.
[0032] Correspondingly, such as Figure 2 As shown, the present invention also provides a rapid loading method for cryogenic refrigeration systems, implemented based on the above-described apparatus. When it is necessary to place a quantum device into the cryogenic cooling system 200, the method includes the following steps: S1. Place the quantum device on the sample holder 111; S2. Seal the loading vacuum chamber 100 to the high vacuum gate valve 221, open the high vacuum gate valve 221 to connect the ultra-cold vacuum chamber to the loading vacuum chamber 100, and make its internal vacuum level reach 10. -5 The order of magnitude is in the mbar range; S3. Start the lifting mechanism to drive the sample rack 111 to rise and open each spring door 222 in sequence until it is at the bottom of the docking dock 220; S4. Activate the fixing mechanism to fix the sample holder 111 onto the docking dock 220; S5. Start the lifting mechanism to descend into the loading vacuum chamber 100, and at the same time, the spring doors 222 close in sequence; S6. Close the high vacuum gate valve 221 and remove the loading vacuum chamber 100 from the high vacuum gate valve 221; When it is necessary to replace the quantum device in the cryogenic cooling system 200, the method includes the following steps: referring to steps S2 and S3, raise the lifting mechanism to below the sample holder 111 that has been installed on the docking dock 220, start the fixing mechanism to remove the sample holder 111 from the docking dock 220, then refer to steps S5 and S6 to remove the old quantum device, place the new quantum device on the sample holder 111, and repeat steps S2-S6 to complete the replacement of the quantum device.
[0033] The following is Figures 2-4 The invention will be further explained using the structure shown as an example.
[0034] like Figure 2As shown, the cryogenic refrigeration system 200 of the present invention includes the following structure: a vacuum chamber top plate 201 is mounted on a refrigeration unit bracket 212 and fixed with screws; primary, secondary, tertiary, quaternary, and quinary stage cold plates are sequentially hung below the vacuum chamber top plate 201; thermal radiation shields are hung below the primary, secondary, and tertiary stage cold plates and fixed with screws, ensuring good thermal contact between the cold plates and the thermal radiation shields; a superconducting magnet is hung below the secondary stage thermal radiation shield; and a vacuum chamber tail cover 207 is mounted on the vacuum chamber top plate 201 and connected to the vacuum chamber top plate. The space between 201 and the vacuum chamber top plate 201 is sealed with an O-ring; the refrigerator 213 is mounted on the top plate 201 of the vacuum chamber, with its cold head protruding into the vacuum chamber and sealed with an O-ring between it and the top plate 201; the first-stage cold head of the refrigerator 213 is fixed to the first-stage cold plate with a thermally conductive copper braid, and the second-stage cold head is fixed to the second-stage cold plate with a thermally conductive copper braid; the dilution refrigeration mixing chamber 214 is mounted on the fifth-stage cold plate, having good thermal contact with the fifth-stage cold plate 206, and is connected to the external circulation system of the vacuum chamber top plate 201 through the helium inlet pipe 215 and the helium extraction pipe 216. The system is interconnected; the intake and exhaust pipes have good thermal contact with each stage of the cold plate; the helium intake and exhaust pipes themselves are made of stainless steel and do not affect the thermal conductivity between the cold plates; the dilution refrigeration mixing chamber 214, together with the intake and exhaust pipes and the external circulation system of the vacuum chamber, forms a closed-loop gas path, in which the helium-3 and helium-4 mixed gas circulates; the temperature sensor 219 is installed on the fifth-stage cold plate 206, with good thermal contact, and is used to monitor and collect the temperature of the cold plate; an electric high-vacuum slide gate valve. 221 is sealed and fixed at the lower end of the vacuum chamber tail cover 207; spring door 222 is installed at the lower end of each layer of thermal radiation shield. The spring door is in the closed state by default. When the lower conveyor rod 108 is raised, it will be pushed open to the left and right. When the conveyor rod 108 is lowered and retracted, the spring door will spring back and close; docking dock 220 is installed below the center of the five-stage cold plate 206 and extends to the vicinity of the center of the superconducting magnet's magnetic field through the oxygen-free copper heat-conducting column. The electric high-vacuum slide gate valve 221, spring door 222, and docking dock 220 are coaxial in the vertical direction. like Figure 2 , Figure 3As shown, the present invention also includes the following structure: a lifting motor 102 is fixed to a flatbed trolley 113 via four air cushion columns 114, which can lift upwards within a certain range; a lifting screw 103 is fixed to the lifting motor, and the rotation of the lifting motor can drive the lifting screw to rotate; a lifting platform 104 is placed on a guide rail 101, which passes through the lifting platform, limiting the platform to only moving up and down; the lifting screw 103 is threadedly connected to the lifting platform, and the rotation of the lifting screw drives the lifting platform to rise and fall; and a transmission rod... 108 is installed on the lifting platform; three small torque motors 106 are fixed below the lifting platform 104, and a long screw 107 is fixed on the small torque motors 106. The long screw 107 passes through the lifting platform and through the corresponding hole of the conveyor rod by means of sliding seal. The lower end of the long screw is equipped with a torque limiter, and the top is an external hex screwdriver. After installation, the external hex screwdriver is higher than the upper surface of the conveyor rod 108; the flange 110 is fixedly connected to the upper platform 118; and the spring bellows 109 is sleeved on the outside of the conveyor rod 108. The upper end of the spring bellows is sealed to the flange via an O-ring, and the lower end is sealed to the lifting platform 104 via an O-ring. The vacuum electronic valve 105 is fixed below the lifting platform and sealed to the lifting platform via an O-ring. When the flange is sealed to the high vacuum slide gate valve 221, and both the high vacuum slide gate valve 221 and the vacuum electronic valve 105 are closed, the inside of the spring bellows is a sealed environment, not connected to the atmosphere. The vacuum pump 116 is fixed to the flatbed trolley 113. The vacuum bellows 115 is connected to the vacuum electronic valve 105 via an O-ring and the air inlet of the vacuum pump 116. The sample rack is placed... At the top of the transmission rod, a limiting groove prevents the sample holder from rotating or wobbling horizontally. After placement, the top of the long screw 107 has an external hexagonal screwdriver that is embedded in the nut of the fixing screw 112 on the sample holder. The lifting motor, vacuum pump, vacuum electronic valve, and high vacuum gate valve can be remotely controlled. The upper end of the sample holder 111 is equipped with a guide post 117 and an electrical interface 120. The guide post 117 is made of polyetheretherketone polymer material and its function is to ensure that the sample holder 111 and the docking dock 220 are correctly connected without causing damage to the electrical interface. The electrical interface 120 is used for experimental measurement.
[0035] like Figure 2 As shown, during normal operation, the high-vacuum gate valve 221 and spring door 222 are closed, the ultra-cold vacuum chamber is under high vacuum, and the refrigerator 213 and dilution refrigeration mixing chamber 214 are in operation. The temperature of each cold plate decreases sequentially from top to bottom: 50K, 4K, 900mK, 100mK, and 10mK. The closed high-vacuum gate valve ensures the airtightness of the ultra-cold vacuum chamber, and the closed spring door prevents external heat radiation from entering the center of the chamber from the bottom and heating the sample position.
[0036] When it is necessary to change the sample, close the air inlet valve 217, stop the dilution refrigeration mixing chamber 214, keep the 4K refrigerator 213 running continuously, and raise the docking dock to above 4K; start the lifting motor 102 (a variable speed motor can be used) to rotate forward, driving the lifting screw 103 to rotate forward, and raise the lifting platform 104 until the top of the conveyor rod 108 is higher than the flange 110. Place the sample holder 111 with the quantum device installed on it on the upper end of the conveyor rod 108, with the fixing screw 112 nut facing down, and insert it into the top of the long screw 107 below. Using an external hex screwdriver; start the lifting motor 102 to reverse, driving the lifting screw to reverse, lowering the lifting platform until the top of the sample holder 111 is below the flange 110; push the entire frame of the loading vacuum chamber below the ultra-cold vacuum chamber, and seal the flange 110 with the high vacuum gate valve 221. At this time, the air cushion column 114 is in an upward-stretched state; start the automatic program, open the vacuum electronic valve 105, and turn on the vacuum pump 116 (a vacuum molecular pump group can be used) to expel the air in the spring bellows 109 until the vacuum degree reaches 10. -5 The vacuum gauge on the vacuum molecular pump assembly, in the mbar range, shows a vacuum level of less than 5*10. -5 At mbar, the trigger program opens the high-vacuum gate valve 221, at which point the vacuum chamber is connected to the spring bellows 109 and is in the same vacuum environment. After waiting for a few minutes (approximately 5 minutes), the lifting motor 102 is started to rotate forward, driving the lifting screw 103 to rotate forward, the lifting platform 104 rises, and the spring bellows 109 retracts. The sample holder rises out, and when the sample holder passes through the thermal radiation shield, it will push open the spring door 222. After the lifting platform rises to the designated position, the guide post 117 on the upper surface of the sample holder enters the corresponding groove of the docking dock 220, and the distance between the upper surface of the sample holder and the lower surface of the docking dock 220 is approximately 0.5 cm. The program controls... The small torque motor 106 rotates and tightens the fixing screw 112 to fix the sample holder 111 to the lower end of the docking dock 220, so that the surfaces of the two are in close contact and have good thermal connection. The control lifting motor 102 reverses to drive the lifting screw 103 to reverse, the lifting platform descends, and after the transmission rod 108 retracts, the spring door 222 will close. When the lifting platform 104 descends to the bottom, the high vacuum gate valve 221 is closed, the vacuum electronic valve 105 is closed, the vacuum molecular pump group 116 is turned off, the air inlet pipe valve 217 is reopened, the dilution cooling mixing chamber is turned on, the sample holder temperature is further reduced, and the experimental study is restarted after the temperature drops to the specified temperature.
[0037] The cryogenic refrigeration system of this invention only needs to be restored to a low temperature of 4 Kelvin. While maintaining low temperature and high vacuum, it can quickly replace or load samples and quickly return to a low temperature of milliKelvin. The heating process and reloading cooling time required by this invention is about 9 hours, which can shorten the 80 hours required by the traditional method to less than 10 hours. Moreover, it can achieve fully automated control without human intervention.
[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all fall within the protection scope of the appended claims of the present invention.
Claims
1. A rapid loading device for cryogenic refrigeration systems, characterized in that, include: The docking dock (220) is installed at the bottom of the lowest cold plate of the cryogenic refrigeration system (200). Each heat radiation shield and vacuum chamber tail cover (207) of the cryogenic refrigeration system (200) has an opening located directly below the docking dock (220). Spring door (222) is sealed at the opening of each heat radiation shield and can open the opening of the heat radiation shield when subjected to external pressure; A high-vacuum slide gate valve (221) is sealed and installed at the opening of the vacuum chamber tail cover (207) and can be used to open and close the extremely cold vacuum chamber; The loading vacuum chamber (100) is detachably sealed and installed on a high-vacuum gate valve (221). When it is sealed and installed on the high-vacuum gate valve (221), the high-vacuum gate valve (221) is opened to connect the extremely cold vacuum chamber with the loading vacuum chamber (100). The loading vacuum chamber (100) includes an upper platform (118), a lifting platform (104), and a lower platform (119) arranged sequentially from top to bottom, as well as multiple guide rails (101), a flange (110), a spring bellows (109), and a vacuum pump (116). The lower end of the guide rail (101) is fixedly connected to the lower platform (119), and its upper end passes through the lifting platform (104) and is fixedly connected to the upper platform (118). The lifting platform (104) is slidably mounted on the guide rail (101). The upper platform (118) has an opening. The flange (110) is sealed and mounted on the upper platform (118) and communicates with the opening. The flange (110) is detachably connected to the high vacuum slide valve (221). The spring bellows (109) is telescopically sealed between the upper platform (118) and the lifting platform (104). The lower opening of the spring bellows (109) is sealed and blocked by the lifting platform (104). Its upper opening communicates with the opening of the upper platform (118) and the flange (110). The vacuum pump (116) is used to evacuate the spring bellows (109). The sample holder (111) is disposed within the loading vacuum chamber (100); The lifting mechanism is used to drive the sample holder (111) to rise and fall, and to make the sample holder (111) open each spring door (222) in sequence during the rising process until it is located at the bottom of the docking dock (220); A fixing mechanism is used to fix or remove the sample holder (111) to the docking dock (220).
2. The rapid loading device for cryogenic refrigeration systems according to claim 1, characterized in that, The lifting mechanism includes a lifting motor (102), a lifting screw (103), and a conveying rod (108). The lifting motor (102) is fixedly installed on the lower platform (119). The lifting screw (103) is vertically arranged outside the spring bellows (109), with its lower end fixedly connected to the lifting motor (102) and its upper end threadedly connected to the lifting platform (104). The conveying rod (108) is vertically arranged inside the spring bellows (109), with its lower end fixedly connected to the lifting platform (104). The sample holder (111) is placed on top of the conveying rod (108).
3. The rapid loading device for cryogenic refrigeration systems according to claim 2, characterized in that, A limiting mechanism is provided between the transmission rod (108) and the sample holder (111) to prevent the sample holder (111) from rotating or moving.
4. The rapid loading device for cryogenic refrigeration systems according to claim 2, characterized in that, The fixing mechanism includes a torque motor (106), multiple long screws (107) and multiple fixing screws (112). The torque motor (106) is fixedly installed at the bottom of the lifting platform (104). The multiple long screws (107) are spaced apart and pass through the conveyor rod (108). The lower end of the long screw (107) extends out of the lifting platform (104) and connects to the torque motor (106). The top of the long screw (107) is provided with a non-circular groove. The lower end of the fixing screw (112) is provided with a non-circular post that matches the non-circular groove. The lower end of the fixing screw (112) is embedded in the non-circular groove through its non-circular post. Its upper end passes through the sample holder (111). The docking dock (220) is provided with screw holes that match the fixing screws (112).
5. The rapid loading device for a cryogenic refrigeration system according to claim 4, characterized in that, The non-circular groove is an internal hexagonal screw head, and the non-circular column is an external hexagonal screw head.
6. The rapid loading device for a cryogenic refrigeration system according to claim 4, characterized in that, The sample holder (111) includes an upper shelf (111.1), a lower shelf (111.2), and a plurality of sleeves (111.3) disposed between the upper and lower shelves (111.2), with the fixing screws (112) passing through the corresponding sleeves (111.3).
7. The rapid loading device for a cryogenic refrigeration system according to claim 6, characterized in that, The upper frame (111.1) is provided with multiple guide columns (117), and the docking dock (220) is provided with multiple guide slots configured accordingly.
8. The rapid loading device for a cryogenic refrigeration system according to claim 1, characterized in that, The device also includes a movable flatbed (113) located below the lower platform (119) and multiple air cushion columns (114) installed between the flatbed (113) and the lower platform (119).
9. A rapid loading method for a cryogenic refrigeration system, implemented based on the apparatus according to any one of claims 1-8, characterized in that, When it is necessary to place a quantum device into the cryogenic refrigeration system (200), the method includes the following steps: S1. Place the quantum device on the sample holder (111); S2. Seal the loading vacuum chamber (100) with the high vacuum gate valve (221), open the high vacuum gate valve (221) to connect the ultra-cold vacuum chamber with the loading vacuum chamber (100), and make its internal vacuum level reach 10. -5 The order of magnitude is in the mbar range; S3. Start the lifting mechanism to drive the sample rack (111) to rise and open each spring door (222) in sequence until it is at the bottom of the docking dock (220); S4. Start the fixing mechanism to fix the sample holder (111) onto the docking dock (220); S5. Start the lifting mechanism to descend into the loading vacuum chamber (100), and at the same time, the spring door (222) closes in sequence; S6. Close the high vacuum gate valve (221) and remove the loading vacuum chamber (100) from the high vacuum gate valve (221); When it is necessary to replace the quantum device in the cryogenic refrigeration system (200), the method includes the following steps: referring to steps S2 and S3, raise the lifting mechanism to below the sample rack (111) that has been installed on the docking dock (220), start the fixing mechanism to remove the sample rack (111) from the docking dock (220), then referring to steps S5 and S6, remove the old quantum device, place the new quantum device on the sample rack (111), and repeat steps S2-S6 to complete the replacement of the quantum device.
Citation Information
Patent Citations
Cryogen free cooling apparatus and method
US20120102975A1