A three-axis gyroscope with a lever

Abstract

The application relates to the technical field of gyroscopes, and discloses a three-axis gyroscope with a lever, which comprises a lever, a driving and detecting frame, driving and detecting electrodes, a driving frame, driving electrodes, a detecting frame, third direction detecting electrodes and four mass blocks in orthogonal and symmetrical distribution; the driving electrodes can drive two mass blocks distributed along a second direction to move along the second direction and drive other two mass blocks distributed along a first direction to move along the first direction; the movable end of the driving and detecting electrodes is arranged on the driving and detecting frame; the driving and detecting frame and the mass blocks distributed along the first direction are connected with the lever; the first force arm of the driving and detecting frame is smaller than the second force arm of the mass blocks; the detecting frame is located outside the four mass blocks and is elastically connected with each mass block; and the detecting frame is connected with the driving and detecting frame and the driving frame. The three-axis gyroscope with the lever disclosed by the application has improved detection sensitivity, signal-to-noise ratio and stability.

Description

Technical Field

[0001] This invention relates to the field of gyroscope technology, and more particularly to a three-axis gyroscope with a lever. Background Technology

[0002] MEMS gyroscopes are angular velocity sensors manufactured using micro-silicon mechanical processes. They offer advantages such as high integration, small size, and low cost, and are widely used in products such as automobiles, drones, and game controllers. Existing single-axis MEMS gyroscopes generally employ capacitive sensing, indirectly calculating rotational angular velocity by detecting the displacement caused by the Coriolis force. However, with the miniaturization of chips, their length and width are decreasing. When the chip length and width shrink to a certain extent, the sensitivity of capacitive sensing decreases significantly, affecting the gyroscope's signal-to-noise ratio and stability. Summary of the Invention

[0003] Based on the above, the purpose of this invention is to provide a lever-type three-axis gyroscope, which solves the problem of low capacitance detection sensitivity caused by the reduction of chip length and width to a certain extent, and improves the signal-to-noise ratio and stability of the gyroscope.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A lever-driven three-axis gyroscope includes a lever, a drive detection frame, a drive detection electrode, a drive frame, a drive electrode, a detection frame, a third-direction detection electrode, and four orthogonally symmetrically distributed mass blocks. The movable end of the drive electrode is disposed on the drive frame. The drive electrode can drive two of the mass blocks distributed along a second direction to move along the second direction, and drive two other mass blocks distributed along a first direction to move along the first direction. The movable end of the drive detection electrode is disposed on the drive detection frame. The drive detection frame and the mass blocks distributed along the first direction are both connected to the lever. The first lever arm of the drive detection frame is smaller than the second lever arm of the mass block. The detection frame is located outside the four mass blocks and is elastically connected to each mass block. The detection frame is connected to the drive detection frame and the drive frame. The movable end of the third-direction detection electrode is provided on the detection frame.

[0006] As a preferred embodiment of a lever-type three-axis gyroscope, two mass blocks distributed along the second direction and a substrate directly opposite them form a first-direction detection electrode. When detecting angular velocity along the first direction, the two mass blocks distributed along the second direction synchronously reciprocate in opposite directions along a third direction. Similarly, two mass blocks distributed along the first direction and a substrate directly opposite them form a second-direction detection electrode. When detecting angular velocity along the second direction, the two mass blocks distributed along the first direction synchronously reciprocate in opposite directions along a third direction. When detecting angular velocity in the third direction, the two mass blocks distributed along the first direction synchronously reciprocate in opposite directions along the second direction, and the two mass blocks distributed along the second direction move along the first direction, while the detection frame rotates along the third direction.

[0007] As a preferred embodiment of a lever-driven three-axis gyroscope, the lever-driven three-axis gyroscope further includes a first anchor point, a first straight beam, a second straight beam, and a first fixed connecting elastic element capable of extending and retracting along the second direction. The lever is connected to the first anchor point through the first straight beam, the lever is connected to the mass block through the second straight beam, and the lever is connected to the drive detection frame through the first fixed connecting elastic element. Both the first straight beam and the second straight beam extend along the first direction.

[0008] As a preferred embodiment of a lever-type three-axis gyroscope, the first fixed connecting elastic element is connected to one end of the lever, the second straight beam is connected to the other end of the lever, and the first straight beam is connected to the portion of the lever closest to the first fixed connecting elastic element.

[0009] As a preferred embodiment of a lever-type three-axis gyroscope, the lever-type three-axis gyroscope further includes a second anchor point, a second fixed connection elastic element, and a first detection connection elastic element. The second anchor point is located between the drive detection frame and the mass block. The drive detection frame is connected to the second anchor point through the second fixed connection elastic element, and the drive detection frame is connected to the detection frame through the first detection connection elastic element. Both the second fixed connection elastic element and the first detection connection elastic element are capable of extending and retracting along the first direction, and the first detection connection elastic element is also capable of deforming along the third direction.

[0010] As a preferred embodiment of a lever-driven three-axis gyroscope, the lever-driven three-axis gyroscope further includes a third straight beam extending along the second direction and a second detection connecting elastic element capable of telescoping along the second direction. The drive frame is connected to the mass block through the third straight beam, and the drive frame is connected to the detection frame through the second detection connecting elastic element.

[0011] As a preferred embodiment of a lever-driven three-axis gyroscope, the lever-driven three-axis gyroscope further includes a third detection connecting elastic member capable of extending and contracting along the second direction and deforming along the third direction, wherein the two ends of the third detection connecting elastic member are respectively connected to the detection frame and the mass blocks distributed along the second direction.

[0012] As a preferred embodiment of a lever-driven three-axis gyroscope, the lever-driven three-axis gyroscope further includes a central coupling component. The central coupling component includes a first central elastic element, a central connecting block, a second central elastic element, and a central anchor point. There are four first central elastic elements, four second central elastic elements, and four central anchor points. Each first central elastic element is connected to one of the mass blocks. All four first central elastic elements and four second central elastic elements are connected to the central connecting block. The first and second central elastic elements are alternately distributed. Each second central elastic element is located between two first central elastic elements and is connected to one of the central anchor points.

[0013] As a preferred embodiment of a lever-driven three-axis gyroscope, the first central elastic element includes a central connecting spring and a central connecting straight beam. The central connecting spring is deformable along the first direction, the second direction, and the third direction. One end of the central connecting straight beam is connected to the central connecting spring, and the other end of the central connecting straight beam is connected to the central connecting block.

[0014] As a preferred embodiment of a lever-type three-axis gyroscope, the lever-type three-axis gyroscope further includes a coupling connection elastic element, through which two adjacent mass blocks are connected.

[0015] The beneficial effects of this invention are as follows:

[0016] The lever-driven three-axis gyroscope disclosed in this invention employs a closed-loop drive control. The drive electrode drives the drive frame, which in turn moves the mass block. The mass block, through the drive detection frame, moves the movable end of the drive detection electrode, causing a change in the capacitance of the drive detection electrode, which reflects the movement of the mass block. In a stable state, the amplitude of the drive detection frame's movement is fixed. Since the first lever arm of the drive detection frame is shorter than the second lever arm of the mass block, and the drive frequency is fixed, both the amplitude and speed of the mass block's movement are increased. When detecting the angular velocity in the first and second directions, the Coriolis force on the mass block increases, facilitating accurate angular velocity detection. When detecting the angular velocity in the third direction, both the amplitude of the detection frame's movement and the Coriolis force increase with the increase in the amplitude of the mass block's movement and the Coriolis force. The mass block 51 drives the detection frame 41 to rotate, resulting in a significant change in the capacitance detected by the third-direction detection electrode, thus improving the detection sensitivity and enhancing the signal-to-noise ratio and stability of the lever-driven three-axis gyroscope. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of a lever-equipped three-axis gyroscope provided in a specific embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of a lever-equipped three-axis gyroscope with the detection frame and third-direction detection electrode removed, according to a specific embodiment of the present invention.

[0020] Figure 3 This is a schematic diagram of a lever-equipped three-axis gyroscope in a driving state, provided in a specific embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of a lever-equipped three-axis gyroscope detecting angular velocity in the X-axis direction according to a specific embodiment of the present invention;

[0022] Figure 5 This is a schematic diagram of a lever-equipped three-axis gyroscope detecting angular velocity in the Y-axis direction according to a specific embodiment of the present invention;

[0023] Figure 6 This is a schematic diagram of a lever-equipped three-axis gyroscope detecting angular velocity in the Z-axis direction, provided in a specific embodiment of the present invention.

[0024] In the picture:

[0025] 1. Leverage;

[0026] 21. Drive detection frame; 22. Drive detection electrode;

[0027] 31. Driver frame; 32. Driver electrode;

[0028] 41. Detection frame; 42. Third-party directional detection electrode;

[0029] 51. Mass block; 52. Elastic coupling element;

[0030] 61. First anchor point; 62. Second anchor point;

[0031] 71. First straight beam; 72. Second straight beam; 73. Third straight beam;

[0032] 81. First fixed connection elastic element; 82. Second fixed connection elastic element;

[0033] 91. First inspection of the connecting elastic element; 92. Second inspection of the connecting elastic element; 93. Third inspection of the connecting elastic element;

[0034] 10. Central coupling assembly; 101. First central elastic element; 1011. Central connecting spring; 1012. Central connecting straight beam; 102. Central connecting block; 103. Second central elastic element; 104. Central anchor point. Detailed Implementation

[0035] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0036] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0037] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0038] This embodiment provides a three-axis gyroscope with a lever, such as Figure 1 and Figure 2As shown, the device includes a lever 1, a drive detection frame 21, a drive detection electrode 22, a drive frame 31, a drive electrode 32, a detection frame 41, a third-direction detection electrode 42, and four mass blocks 51 orthogonally and symmetrically distributed. The movable end of the drive electrode 32 is disposed on the drive frame 31. The drive electrode 32 can drive two mass blocks 51 distributed along the second direction to move along the second direction, and drive two other mass blocks 51 distributed along the first direction to move along the first direction. The movable end of the drive detection electrode 22 is disposed on the drive detection frame 21. The drive detection frame 21 and the mass blocks 51 distributed along the first direction are both connected to the lever 1. The first lever arm of the drive detection frame 21 is smaller than the second lever arm of the mass block 51. The detection frame 41 is located outside the four mass blocks 51 and is elastically connected to each mass block 51. The detection frame 41 is connected to the drive detection frame 21 and the drive frame 31. The movable end of the third-direction detection electrode 42 is provided on the detection frame 41.

[0039] Specifically, two mass blocks 51 distributed along the second direction and their corresponding substrates form a first-direction detection electrode. When detecting angular velocity along the first direction, the two mass blocks 51 distributed along the second direction move synchronously in opposite directions along a third direction, causing a change in the capacitance of the first-direction detection electrode. At this time, the two mass blocks 51 distributed along the first direction do not move along the third direction. The two mass blocks 51 distributed along the first direction and their corresponding substrates form a second-direction detection electrode. When detecting angular velocity along the second direction, the two mass blocks 51 distributed along the first direction move synchronously in opposite directions along a third direction, causing a change in the capacitance of the second-direction detection electrode. At this time, the two mass blocks 51 distributed along the second direction do not move along the third direction. When detecting angular velocity in the third direction, the two mass blocks 51 distributed along the first direction move synchronously in opposite directions along the second direction, and the two mass blocks 51 distributed along the second direction move along the first direction. The four mass blocks 51 exhibit rotation along the third direction, and the mass blocks 51 drive the detection frame 41 to rotate along the third direction.

[0040] Furthermore, such as Figure 1 and Figure 2 As shown, the lever-type three-axis gyroscope of this embodiment also includes a coupling connection elastic element 52. Two adjacent mass blocks 51 are connected by the coupling connection elastic element 52. The coupling connection elastic element 52 is a U-shaped spring. One end of the U-shaped spring is connected to one mass block 51, and the other end of the U-shaped spring is connected to another mass block 51. The opening direction of the U-shaped spring forms an angle of 45° with both the first direction and the second direction. The 45° opening can ensure that the deformation mode of the coupling connection elastic element 52 of the lever-type three-axis gyroscope is unique in the driving state. In the driving state, the magnitude and amplitude of the movement speed of the four mass blocks 51 are the same, ensuring the consistency of the movement of the four mass blocks 51 and increasing the linearity of the driving displacement.

[0041] It should be noted that, as Figure 1 and Figure 2 As shown, in this embodiment, the first direction is the X-axis direction, the second direction is the Y-axis direction, and the third direction is the Z-axis direction. Figure 1 Therefore, the first direction detection electrode is the X-axis direction detection electrode, the second direction detection electrode is the Y-axis direction detection electrode, and the third direction detection electrode 42 is the Z-axis direction detection electrode. In other embodiments, the first direction can be the Y-axis direction, the second direction can be the X-axis direction, and the third direction can be the Z-axis direction, or the first direction, the second direction, and the third direction can be three other mutually perpendicular directions, depending on the actual needs.

[0042] The lever-driven triaxial gyroscope provided in this embodiment employs a closed-loop drive control. The drive electrode 32 drives the drive frame 31, which in turn moves the mass block 51. The mass block 51, through the drive detection frame 21, drives the movable end of the drive detection electrode 22, causing a change in the capacitance of the drive detection electrode 22, which reflects the movement of the mass block 51. In a steady state, the amplitude of the drive detection frame 21 is fixed. Since the first lever arm of the drive detection frame 21 is shorter than the second lever arm of the mass block 51, and the drive frequency is fixed, both the amplitude and speed of the mass block 51 are increased. When detecting the angular velocity in the X-axis and Y-axis directions, the Coriolis force on the mass block 51 increases. When detecting the angular velocity in the Z-axis direction, both the amplitude of the detection frame 41 and the Coriolis force increase with the increase of the amplitude of the mass block 51 and the Coriolis force. The mass block 51 drives the detection frame 41 to rotate, resulting in a significant change in the capacitance detected by the third-axis detection electrode 42, which improves the detection sensitivity and enhances the signal-to-noise ratio and stability of the lever-driven triaxial gyroscope.

[0043] like Figure 2 As shown, the lever-equipped three-axis gyroscope of this embodiment also includes a first anchor point 61, a first straight beam 71, a second straight beam 72, and a first fixed-connection elastic element 81 capable of extending and retracting along the Y-axis. The lever 1 is connected to the first anchor point 61 via the first straight beam 71, the lever 1 is connected to the mass block 51 via the second straight beam 72, and the lever 1 is connected to the drive detection frame 21 via the first fixed-connection elastic element 81. Both the first straight beam 71 and the second straight beam 72 extend along the X-axis. The first fixed-connection elastic element 81 is connected to one end of the lever 1, and the second straight beam 72 is connected to the other end of the lever 1. The first straight beam 71 is connected to the portion of the lever 1 closest to the first fixed-connection elastic element 81. Both the first straight beam 71 and the second straight beam 72 extend along the X-axis. The distance from the end of the first fixed-connection elastic element 81 connected to the lever 1 along the Y-axis to the first straight beam 71 is less than the distance between the second straight beam 72 and the first straight beam 71, making the first lever arm of the drive detection frame 21 less than the second lever arm of the mass block 51, thereby increasing the range of motion of the mass block 51.

[0044] In the driving state, the mass block 51 distributed along the X-axis direction drives the lever 1 to move through the second straight beam 72. Since the lever 1 is fixed on the first anchor point 61 through the first straight beam 71, the first straight beam 71 hardly bends. Therefore, the lever 1 rotates with the position where it is connected to the first straight beam 71 as the fulcrum, and at the same time, the first fixed connection elastic member 81 deforms.

[0045] Specifically, such as Figure 2 As shown, there are four first anchor points 61, four first straight beams 71, four second straight beams 72, and four first fixed connecting elastic elements 81. Each mass block 51 distributed along the X-axis corresponds to two second straight beams 72. The two second straight beams 72 are located at both ends of the mass block 51 along the Y-axis. Each second straight beam 72 corresponds to a lever 1, a first straight beam 71, a first anchor point 61, and a first fixed connecting elastic element 81. Two of the first fixed connecting elastic elements 81 are connected to a driving detection frame 21, and the other two are connected to another driving detection frame 21. The two first fixed connecting elastic elements 81 connected to the same driving detection frame 21 are located on both sides of the driving detection frame 21 along the Y-axis.

[0046] It should be noted that in other embodiments of the present invention, the lever-equipped three-axis gyroscope may also include a fixed straight beam instead of the first fixed connecting elastic element 81. One end of the first straight beam 71 is connected to the first anchor point 61, and the other end of the first straight beam 71 is connected to one end of the lever 1. The second straight beam 72 is connected to the other end of the lever 1. One end of the fixed straight beam is connected to the middle of the lever 1, and the other end of the fixed straight beam is connected to the drive detection frame 21. At this time, the first lever arm of the drive detection frame 21 is still smaller than the second lever arm of the mass block 51, and the lever 1 can still amplify the movement of the mass block 51. The specific settings are determined according to actual needs.

[0047] like Figure 2As shown, the lever-equipped three-axis gyroscope of this embodiment also includes a second anchor point 62, a second fixed connection elastic element 82, and a first detection connection elastic element 91. The second fixed connection elastic element 82 and the first detection connection elastic element 91 are respectively located on both sides of the drive detection frame 21 along the X-axis direction. The second anchor point 62 is located between the drive detection frame 21 and the mass block 51. The drive detection frame 21 is connected to the second anchor point 62 through the second fixed connection elastic element 82, and the drive detection frame 21 is connected to the detection frame 41 through the first detection connection elastic element 91. Both the second fixed connection elastic element 82 and the first detection connection elastic element 91 can extend and retract along the X-axis direction to ensure that the drive detection frame 21 can move along the X-axis direction. Each drive detection frame 21 corresponds to two second anchor points 62, two second fixed connection elastic elements 82, and two first detection connection elastic elements 91 to ensure that the drive detection frame 21 can move smoothly. The first detection connecting elastic element 91 can also deform along the Z-axis direction. When detecting the angular velocity in the Y-axis direction, the two driving detection frames 21 generate out-of-plane rotation. The rotation of the driving detection frames 21 is attenuated by the first detection connecting elastic element 91, realizing the decoupling of the detection of the Y-axis angular velocity and the Z-axis detection, reducing cross coupling and improving the accuracy of the Z-axis detection.

[0048] like Figure 2 As shown, the lever-driven three-axis gyroscope of this embodiment also includes a third straight beam 73 extending along the Y-axis and a second detection connecting elastic member 92 capable of telescoping along the Y-axis. The drive frame 31 is connected to the mass block 51 via the third straight beam 73, and the drive frame 31 is connected to the detection frame 41 via the second detection connecting elastic member 92. The third straight beam 73 and the second detection connecting elastic member 92 are located on both sides of the drive frame 31 along the Y-axis, respectively. Each drive frame 31 corresponds to two third straight beams 73 and two second detection connecting elastic members 92. The two third straight beams 73 are located at both ends of one side of the drive frame 31 along the X-axis, and the two second detection connecting elastic members 92 are located at both ends of the other side of the drive frame 31 along the X-axis. In the driving state, the presence of the third straight beam 73 enables the drive frame 31 and the mass block 51 to move synchronously. In the detection state, the presence of the third straight beam 73 can reduce the influence of the rotation of the mass block 51 on the drive frame 31, achieving unidirectional decoupling between detection and driving, and improving the stability of the drive. It should be noted that in other embodiments, the number of the third straight beam 73 and the second detection connecting elastic element 92 corresponding to each drive frame 31 is not limited to two in this embodiment, but can also be three or other numbers, depending on actual needs.

[0049] like Figure 2As shown, the lever-equipped three-axis gyroscope of this embodiment also includes a third detection connecting elastic element 93 capable of stretching along the Y-axis and deforming along the Z-axis. The two ends of the third detection connecting elastic element 93 are connected to the detection frame 41 and the mass blocks 51 distributed along the Y-axis, respectively. This embodiment has four third detection connecting elastic elements 93. Each mass block 51 distributed along the Y-axis corresponds to two third detection connecting elastic elements 93. The two third detection connecting elastic elements 93 are located at both ends of the mass block 51 along the X-axis to ensure an elastic connection between the mass block 51 and the detection frame 41.

[0050] When detecting the angular velocity in the Z-axis direction, the mass block 51 is subjected to the Coriolis force and moves, thereby driving the detection frame 41 to move through the third detection connecting elastic element 93. In addition, when detecting the angular velocity in the X-axis direction, the two mass blocks 51 distributed along the Y-axis generate out-of-plane rotation. The rotation of the mass blocks 51 is attenuated by the third detection connecting elastic element 93, realizing the decoupling of the detection of the angular velocity in the X-axis direction and the detection of the Z-axis, reducing cross coupling and improving the accuracy of the Z-axis detection.

[0051] like Figure 1 As shown, the lever-equipped three-axis gyroscope in this embodiment also includes a central coupling component 10, such as... Figure 2 As shown, the central coupling component 10 includes a first central elastic element 101, a central connecting block 102, a second central elastic element 103, and a central anchor point 104. There are four first central elastic elements 101, four second central elastic elements 103, and four central anchor points 104. Each first central elastic element 101 is connected to a mass block 51. The four first central elastic elements 101 and the four second central elastic elements 103 are connected to the central connecting block 102. The first central elastic elements 101 and the second central elastic elements 103 are alternately distributed. Each second central elastic element 103 is located between two first central elastic elements 101 and is connected to a central anchor point 104. The first central elastic element 101 includes a central connecting spring 1011 and a central connecting straight beam 1012. The central connecting spring 1011 can deform along the X-axis, Y-axis and Z-axis directions. One end of the central connecting straight beam 1012 is connected to the central connecting spring 1011, and the other end of the central connecting straight beam 1012 is connected to the central connecting block 102.

[0052] In the detection state, such as Figure 3As shown, the driving electrode 32 drives the driving frame 31 to move two mass blocks 51 distributed along the Y-axis along the Y-axis. The presence of the coupling connection elastic element 52 causes the two mass blocks 51 distributed along the X-axis to move synchronously along the X-axis. At the same time, the four mass blocks 51 move towards the direction closer to the central coupling component 10 or away from the central coupling component 10. At the same time, the lever 1 rotates with its connection point with the first straight beam 71 as the fulcrum. The rotation directions of the two levers 1 connected to the same mass block 51 are opposite. The movement direction of the driving detection frame 21 is opposite to the movement direction of the mass blocks 51. The presence of the first detection connection elastic element 91, the second detection connection elastic element 92 and the third detection connection elastic element 93 makes the detection frame 41 basically stationary.

[0053] When detecting angular velocity in the X-axis direction, such as Figure 4 As shown, two mass blocks 51 distributed along the Y-axis are subjected to Coriolis forces of equal magnitude and opposite direction along the Z-axis. The first direction detection electrode obtains the angular velocity in the X-axis direction by detecting the change in capacitance. At this time, due to the presence of the third detection connecting elastic element 93, the detection frame 41 remains basically stationary, reducing the cross-axis coupling between X-direction detection and Z-direction detection.

[0054] When detecting angular velocity in the Y-axis direction, such as Figure 5 As shown, two mass blocks 51 distributed along the X-axis are subjected to Coriolis forces of equal magnitude and opposite direction along the Y-axis. The second direction detection electrode obtains the angular velocity in the Y-axis direction by detecting the change in capacitance. At this time, due to the presence of the first detection connecting elastic element 91, the detection frame 41 remains basically stationary, reducing the cross-coupling between detection in the Y-direction and detection in the Z-direction.

[0055] When detecting the angular velocity in the Z-axis direction, such as Figure 6 As shown, the four mass blocks 51 are subjected to Coriolis forces in the clockwise or counterclockwise rotation direction. The presence of the first detection connecting elastic element 91 and the third detection connecting elastic element 93 causes the mass blocks 51 to drive the detection frame 41 to move in the clockwise or counterclockwise direction. The detection frame 41 moves in the same direction as the mass blocks 51. At this time, the third directional detection electrode 42 can obtain the angular velocity in the Z-axis direction by detecting the change in the capacitance.

[0056] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A three-axis gyroscope with a lever, characterized in that, The device includes a lever, a drive detection frame, a drive detection electrode, a drive frame, a drive electrode, a detection frame, a third-direction detection electrode, and four orthogonally symmetrically distributed mass blocks. The movable end of the drive electrode is disposed on the drive frame. The drive electrode can drive two of the mass blocks distributed along a second direction to move along the second direction, and drive two other mass blocks distributed along a first direction to move along the first direction. The movable end of the drive detection electrode is disposed on the drive detection frame. The drive detection frame and the mass blocks distributed along the first direction are all connected to the lever. The first lever arm of the drive detection frame is smaller than the second lever arm of the mass block. The detection frame is located outside the four mass blocks and is elastically connected to each mass block. The detection frame is connected to the drive detection frame and the drive frame. The movable end of the third-direction detection electrode is provided on the detection frame.

2. The lever-equipped three-axis gyroscope according to claim 1, characterized in that, The two mass blocks distributed along the second direction and the substrate directly opposite them form a first direction detection electrode. When detecting the angular velocity along the first direction, the two mass blocks distributed along the second direction move synchronously in opposite directions along a third direction. The two mass blocks distributed along the first direction and the substrate directly opposite them form a second direction detection electrode. When detecting the angular velocity along the second direction, the two mass blocks distributed along the first direction move synchronously in opposite directions along a third direction. When detecting the angular velocity in the third direction, the two mass blocks distributed along the first direction move synchronously in opposite directions along the second direction, the two mass blocks distributed along the second direction move along the first direction, and the detection frame rotates along the third direction.

3. The lever-equipped three-axis gyroscope according to claim 1, characterized in that, The lever-equipped three-axis gyroscope further includes a first anchor point, a first straight beam, a second straight beam, and a first fixed connecting elastic element capable of extending and retracting along the second direction. The lever is connected to the first anchor point through the first straight beam, the lever is connected to the mass block through the second straight beam, and the lever is connected to the drive detection frame through the first fixed connecting elastic element. Both the first straight beam and the second straight beam extend along the first direction.

4. The lever-equipped three-axis gyroscope according to claim 3, characterized in that, The first fixed connection elastic element is connected to one end of the lever, the second straight beam is connected to the other end of the lever, and the first straight beam is connected to the portion of the lever near the first fixed connection elastic element.

5. The lever-equipped three-axis gyroscope according to claim 3, characterized in that, The lever-equipped three-axis gyroscope further includes a second anchor point, a second fixed connection elastic element, and a first detection connection elastic element. The second anchor point is located between the drive detection frame and the mass block. The drive detection frame is connected to the second anchor point through the second fixed connection elastic element, and the drive detection frame is connected to the detection frame through the first detection connection elastic element. Both the second fixed connection elastic element and the first detection connection elastic element are capable of extending and retracting along the first direction, and the first detection connection elastic element is also capable of deforming along the third direction.

6. The lever-equipped three-axis gyroscope according to claim 1, characterized in that, The lever-driven three-axis gyroscope further includes a third straight beam extending along the second direction and a second detection connection elastic element capable of telescoping along the second direction. The drive frame is connected to the mass block through the third straight beam, and the drive frame is connected to the detection frame through the second detection connection elastic element.

7. The lever-equipped three-axis gyroscope according to claim 6, characterized in that, The lever-equipped three-axis gyroscope further includes a third detection connection elastic element capable of extending and contracting along the second direction and deforming along the third direction. The two ends of the third detection connection elastic element are respectively connected to the detection frame and the mass blocks distributed along the second direction.

8. The lever-equipped three-axis gyroscope according to claim 1, characterized in that, The lever-equipped three-axis gyroscope further includes a central coupling component, which comprises a first central elastic element, a central connecting block, a second central elastic element, and a central anchor point. There are four first central elastic elements, four second central elastic elements, and four central anchor points. Each first central elastic element is connected to one of the mass blocks. All four first central elastic elements and four second central elastic elements are connected to the central connecting block. The first and second central elastic elements are alternately distributed. Each second central elastic element is located between two first central elastic elements and is connected to one of the central anchor points.

9. The lever-equipped three-axis gyroscope according to claim 8, characterized in that, The first central elastic element includes a central connecting spring and a central connecting straight beam. The central connecting spring is deformable along the first direction, the second direction, and the third direction. One end of the central connecting straight beam is connected to the central connecting spring, and the other end of the central connecting straight beam is connected to the central connecting block.

10. The lever-equipped three-axis gyroscope according to claim 1, characterized in that, The lever-equipped three-axis gyroscope also includes a coupling connection elastic element, through which two adjacent mass blocks are connected.

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