A three-axis MEMS gyroscope

Abstract

The application relates to the technical field of gyroscopes, and discloses a three-axis MEMS gyroscope, which comprises four mass blocks, the four mass blocks are orthogonally and symmetrically distributed, and are respectively a first mass block, a second mass block, a third mass block and a fourth mass block; a central coupling component comprising a central anchor point and a central connecting piece; four detection blocks, the four detection blocks are one-to-one corresponding to the four mass blocks, the detection blocks arranged on the second mass block and the fourth mass block and the substrates opposite to the detection blocks form first direction detection electrodes, and the detection blocks arranged on the first mass block and the third mass block and the substrates opposite to the detection blocks form second direction detection electrodes; and a third direction detection electrode group arranged on the mass blocks and capable of detecting the angular velocity of the third direction. The three-axis MEMS gyroscope disclosed by the application can improve the linearity of detection and effectively increase the measurement accuracy by adding the detection blocks and the detection connecting beams.

Description

Technical Field

[0001] This invention relates to the field of gyroscope technology, and more particularly to a three-axis MEMS gyroscope. Background Technology

[0002] Unlike traditional gyroscopes, MEMS gyroscopes have no rotating parts and do not require bearings. Instead, they detect the angular displacement, angular velocity, and angular acceleration of the rotation axis by sensing the motion of a detection mass. In recent years, MEMS gyroscopes have been widely used in various fields such as automotive, aerospace, medical, and consumer electronics due to their advantages of small size and low cost. Existing three-axis MEMS gyroscopes use out-of-plane parallel-plate capacitors to detect the angular velocity in the X and Y axes. The relative motion between the detection mass and the detection electrodes is rotational, resulting in low linearity. Summary of the Invention

[0003] Based on the above, the purpose of this invention is to provide a three-axis MEMS gyroscope that converts the rotation of the detection block into translation, thereby improving the linearity of the detection.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A three-axis MEMS gyroscope, comprising:

[0006] Four mass blocks are arranged orthogonally and symmetrically. The two mass blocks distributed along the first direction are the first mass block and the third mass block, and the other two mass blocks distributed along the second direction are the second mass block and the fourth mass block.

[0007] A central coupling component includes a central anchor point and a central connector. The central anchor point is elastically connected to the mass block, and one end of the central connector is elastically connected to the central anchor point, while the other end is elastically connected to the mass block.

[0008] The system includes a detection block and a detection connecting beam. There are four detection blocks, each corresponding to one of the four mass blocks. Each detection block is located within a mass block via the detection connecting beam. The detection blocks are movable relative to the mass blocks in a third direction. The detection blocks located on the second and fourth mass blocks and their corresponding substrates form a first-direction detection electrode. The detection blocks located on the first and third mass blocks and their corresponding substrates form a second-direction detection electrode.

[0009] A third-direction detection electrode group is disposed on the mass block and is capable of detecting the angular velocity of a third direction, wherein the third direction, the first direction, and the second direction are perpendicular to each other;

[0010] When detecting the angular velocity in the first direction, the detection blocks on the second mass block and the fourth mass block can move in the opposite direction along the third direction, and the first direction detection electrode can detect the angular velocity in the first direction; when detecting the angular velocity in the second direction, the detection blocks on the first mass block and the third mass block can move in the opposite direction along the third direction, and the second direction detection electrode can detect the angular velocity in the second direction.

[0011] As a preferred embodiment of a three-axis MEMS gyroscope, each detection block is correspondingly arranged with four detection connecting beams, and the four detection connecting beams are respectively arranged on the four sides of the detection block.

[0012] As a preferred embodiment of a three-axis MEMS gyroscope, each of the detection connecting beams includes a first detection connecting beam and two second detection connecting beams. The two ends of the first detection connecting beam are respectively connected to the two second detection connecting beams. The two second detection connecting beams are arranged in parallel. One of the second detection connecting beams is connected to the mass block, and the other second detection connecting beam is connected to the detection block.

[0013] As a preferred embodiment of a three-axis MEMS gyroscope, the number of the three-axis detection electrode groups is four, and the four three-axis detection electrode groups correspond one-to-one with the four mass blocks. The four three-axis detection electrode groups are distributed on the same circle with the center of the four mass blocks as the center.

[0014] As a preferred embodiment of a three-axis MEMS gyroscope, each of the third-direction detection electrode groups is a differential electrode and includes a third-direction first detection sub-electrode and a third-direction second detection sub-electrode. When the mass block rotates along the third direction, the capacitance of the third-direction first detection sub-electrode and the third-direction second detection sub-electrode changes synchronously and in opposite phases.

[0015] As a preferred embodiment of a three-axis MEMS gyroscope, both the third-axis first detection sub-electrode and the third-axis second detection sub-electrode are comb-tooth detection electrodes, and the comb teeth of the comb-tooth detection electrodes are arc-shaped comb teeth with the center of the four mass blocks as the center.

[0016] As a preferred embodiment of a three-axis MEMS gyroscope, there are four central coupling components, and the four central coupling components and the four mass blocks are arranged in a one-to-one correspondence. Each central connector includes a first central connecting elastic component, a central moving block and a second central connecting elastic component connected in sequence. The first central connecting elastic component is connected to the mass block and the second central connecting elastic component is connected to the central anchor point. The central moving block of the four central coupling components is integrally formed into a central connecting block.

[0017] As a preferred embodiment of a three-axis MEMS gyroscope, the three-axis MEMS gyroscope further includes a first elastic connector capable of extending and retracting along the first direction or the second direction, one end of the first elastic connector being connected to the mass block and the other end being connected to the central anchor point.

[0018] As a preferred embodiment of a three-axis MEMS gyroscope, the three-axis MEMS gyroscope further includes a driving electrode and a driving detection electrode. The movable parts of the driving electrode and the driving detection electrode are both disposed on the mass blocks. The driving electrode can drive the four mass blocks to perform simple harmonic motion simultaneously in a direction close to or far from the central coupling component. The driving detection electrode can detect the simple harmonic motion of the mass blocks along the first direction or the second direction.

[0019] As a preferred embodiment of a three-axis MEMS gyroscope, the three-axis MEMS gyroscope further includes an end anchor point, a middle anchor point, a second elastic connector, and a third elastic connector. The end of the mass block is connected to the end anchor point through the second elastic connector, and the middle part of the mass block is connected to the middle anchor point through the third elastic connector.

[0020] The beneficial effects of this invention are as follows:

[0021] The triaxial MEMS gyroscope disclosed in this invention features four orthogonally symmetrically distributed mass blocks, and detection blocks mounted on these mass blocks are also orthogonally symmetrically distributed, forming a fully differential output. When detecting angular velocities in the first and second directions, the detection blocks are subjected to Coriolis forces along the third direction, resulting in displacement along that direction. The angular velocity in the first direction can be obtained from the capacitance change detected by the first direction detection electrode, and the angular velocity in the second direction can be obtained from the capacitance change detected by the second direction detection electrode. Influenced by the detection connecting beam, the movement of the detection blocks along the third direction is close to translation, exhibiting higher linearity and increased detection sensitivity compared to existing mass block rotation. Furthermore, the third-direction detection electrode group mounted on the mass blocks can also detect the angular velocity in the third direction, enabling the triaxial MEMS gyroscope to detect angular velocities in three directions. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of a three-axis MEMS gyroscope provided in a specific embodiment of the present invention;

[0024] Figure 2 This is a partial structural schematic diagram of a three-axis MEMS gyroscope provided in a specific embodiment of the present invention;

[0025] Figure 3 This is a schematic diagram of the central coupling component and the first elastic connector of a three-axis MEMS gyroscope provided in a specific embodiment of the present invention;

[0026] Figure 4 This is a schematic diagram of a three-axis MEMS gyroscope in a driven state provided in a specific embodiment of the present invention;

[0027] Figure 5 This is a schematic diagram of a three-axis MEMS gyroscope detecting angular velocity in the first direction, provided in a specific embodiment of the present invention;

[0028] Figure 6 This is a schematic diagram of a three-axis MEMS gyroscope detecting angular velocity in the second direction, provided in a specific embodiment of the present invention;

[0029] Figure 7 This is a schematic diagram of a three-axis MEMS gyroscope used in a specific embodiment of the present invention to detect a third-axis angular velocity.

[0030] In the picture:

[0031] 11. First mass block; 12. Second mass block; 13. Third mass block; 14. Fourth mass block;

[0032] 2. Central coupling component; 21. Central anchor point; 22. Central connector; 221. First central connecting elastic element; 2211. First central connecting frame; 2212. Central connecting straight beam; 222. Central moving block; 223. Second central connecting elastic element; 2231. Second central connecting frame;

[0033] 31. Detection block; 32. Detection connecting beam; 321. First detection connecting straight beam; 322. Second detection connecting straight beam;

[0034] 4. Third-party directional detection electrode group; 41. Third-party directional first detection sub-electrode; 42. Third-party directional second detection sub-electrode;

[0035] 51. First elastic connector; 52. Second elastic connector; 53. Third elastic connector;

[0036] 61. Driving electrode; 62. Driving detection electrode;

[0037] 71. End anchor point; 72. Intermediate anchor point;

[0038] 8. Coupling elastic element. Detailed Implementation

[0039] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0040] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0041] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal connections between two components. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0042] This embodiment provides a three-axis MEMS gyroscope, such as Figures 1 to 3As shown, the system includes four mass blocks, a central coupling assembly 2, detection blocks 31, a detection connecting beam 32, and a third-direction detection electrode group 4. The four mass blocks are orthogonally symmetrically distributed. The two mass blocks distributed along the first direction are the first mass block 11 and the third mass block 13, and the other two mass blocks distributed along the second direction are the second mass block 12 and the fourth mass block 14. The central coupling assembly 2 includes a central anchor point 21 and a central connector 22. The central anchor point 21 is elastically connected to the mass blocks, and one end of the central connector 22 is elastically connected to the central anchor point 21, while the other end is elastically connected to the mass blocks. The number of detection blocks 31 is four. Four detection blocks 31 are respectively set one-to-one with four mass blocks. Each detection block 31 is set inside the mass block through a detection connecting beam 32. The detection block 31 can move relative to the mass block in a third direction. The detection blocks 31 set on the second mass block 12 and the fourth mass block 14 and the substrate directly opposite them form a first direction detection electrode. The detection blocks 31 set on the first mass block 11 and the third mass block 13 and the substrate directly opposite them form a second direction detection electrode. The third direction detection electrode group 4 is set on the mass block and can detect the angular velocity in the third direction. The third direction, the first direction and the second direction are perpendicular to each other.

[0043] Specifically, such as Figure 1 As shown, in this embodiment, the first direction is the X-axis direction, the second direction is the Y-axis direction, and the third direction is the Z-axis direction. Figure 2 As shown, the triaxial MEMS gyroscope also includes a coupling elastic element 8, which connects adjacent mass blocks, thus coupling the four mass blocks together. Specifically, in this embodiment, the coupling elastic element 8 is a U-shaped spring, and the opening direction of the coupling elastic element 8 forms an angle of 45° with both the X-axis and Y-axis directions.

[0044] Specifically, in this embodiment, the detection block 31 is a rectangular block, and each detection block 31 corresponds to four detection connecting beams 32. The four detection connecting beams 32 are respectively arranged on the four sides of the detection block 31 to ensure that the detection block 31 is connected to the mass block through the detection connecting beams 32. When detecting the angular velocity in the first direction, the detection blocks 31 on the second mass block 12 and the fourth mass block 14 can move in the opposite direction along the third direction. The two detection electrodes in the first direction form a differential electrode, thereby enabling the detection of the angular velocity in the first direction. When detecting the angular velocity in the second direction, the detection blocks 31 on the first mass block 11 and the third mass block 13 can move in the opposite direction along the third direction. The two detection electrodes in the second direction form a differential electrode, thereby enabling the detection of the angular velocity in the second direction.

[0045] It should be noted that, in other embodiments of the present invention, the number of detection connecting beams 32 corresponding to each detection block 31 may also be two. The two detection connecting beams 32 corresponding to the detection blocks 31 on the first mass block 11 and the third mass block 13 are distributed along the first direction, and the two detection connecting beams 32 corresponding to the detection blocks 31 on the second mass block 12 and the fourth mass block 14 are distributed along the second direction. The specific number of detection connecting beams 32 corresponding to each detection block 31 is set according to actual needs.

[0046] The triaxial MEMS gyroscope provided in this embodiment has four mass blocks orthogonally and symmetrically distributed, and the detection blocks 31 set on the mass blocks are also orthogonally and symmetrically distributed, forming a fully differential output. When detecting the angular velocities in the first and second directions, according to the right-hand rule, the detection block 31 is subjected to a Coriolis force along the third direction, thereby generating displacement along the third direction. The angular velocity in the first direction can be obtained from the capacitance change detected by the first direction detection electrode, and the angular velocity in the second direction can be obtained from the capacitance change detected by the second direction detection electrode. The movement of the detection block 31 along the third direction is close to translation due to the influence of the detection connecting beam 32. Compared with the existing mass block rotation, the linearity is higher, and the detection sensitivity is increased. In addition, the third-direction detection electrode group 4 set on the mass block can also detect the angular velocity in the third direction, realizing the detection of angular velocities in three directions by the triaxial MEMS gyroscope.

[0047] Furthermore, such as Figure 2 As shown, each detection connecting beam 32 in this embodiment includes four first detection connecting straight beams 321 and two second detection connecting straight beams 322. The four first detection connecting straight beams 321 are arranged in parallel, and each of the two ends of each first detection connecting straight beam 321 is connected to one of the two second detection connecting straight beams 322. The two second detection connecting straight beams 322 are arranged in parallel, with one second detection connecting straight beam 322 connected to the mass block and the other second detection connecting straight beam 322 connected to the detection block 31. By adjusting the beam width and / or gap of the first detection connecting straight beams 321, the rotation of the detection block 31 can be effectively adjusted to translation along a third direction. It should be noted that in other embodiments of the present invention, the number of first detection connecting straight beams 321 is not limited to the four in this embodiment, but can also be one, two, three, or more than four. These first detection connecting straight beams 321 are distributed in parallel, and the specific number is set according to actual needs.

[0048] like Figure 1As shown, this embodiment has four third-direction detection electrode groups 4, each corresponding to one of the four mass blocks. The four third-direction detection electrode groups 4 are distributed on the same circle with the centers of the four mass blocks as their centers. Each third-direction detection electrode group 4 is a differential electrode and includes a third-direction first detection sub-electrode 41 and a third-direction second detection sub-electrode 42. When the mass blocks rotate along the third direction, the capacitances of the third-direction first detection sub-electrode 41 and the third-direction second detection sub-electrode 42 change synchronously and in opposite phases. The third-direction first detection sub-electrode 41 and the third-direction second detection sub-electrode 42 are both comb-tooth detection electrodes. The comb teeth of the comb-tooth detection electrodes are arc-shaped, which avoids interference between the fixed and moving parts of the comb-tooth detection electrodes. The arc-shaped comb teeth are centered on the centers of the four mass blocks.

[0049] When detecting the angular velocity in the third direction, according to the right-hand rule, the four mass blocks are subjected to Coriolis force and undergo simple harmonic motion around the Z-axis with the center of the circle as the rotation center. The third-direction detection electrode group 4 is set on the same circle to ensure the consistency of capacitance change at the same moment. This capacitance detection method of the third-direction detection electrode group 4 is variable area detection. The existing third-direction detection electrode method is generally variable gap detection, that is, the capacitance is detected by the change of the gap between the movable part and the fixed part of the third-direction detection electrode. Compared with variable gap detection, variable area detection has higher linearity.

[0050] In this embodiment, there are four central coupling components 2, each corresponding to one of the four mass blocks. The central coupling components 2 can isolate external stress, reduce the impact of the external environment on the performance of the three-axis MEMS gyroscope, and improve the environmental reliability of the three-axis MEMS gyroscope. Each central connector 22 includes a first central connecting elastic element 221, a central moving block 222, and a second central connecting elastic element 223 connected in sequence. The first central connecting elastic element 221 is connected to the mass block, and the second central connecting elastic element 223 is connected to the central anchor point 21. The central moving blocks 222 of the four central coupling components 2 are integrally formed into a central connecting block.

[0051] Specifically, the first central connecting elastic member 221 includes a first central connecting frame 2211 and a central connecting straight beam 2212. The first central connecting frame 2211 can deform along the length direction of the central connecting straight beam 2212 connected to it. The first central connecting elastic member 221 can provide stiffness in three directions, that is, the first central connecting elastic member 221 can move along the first direction, the second direction and the third direction.

[0052] Each second central connecting elastic element 223 is located between two first central connecting elastic elements 221 and includes multiple connected second central connecting frames 2231. The second central connecting frames 2231 can deform along the first direction, the second direction and the third direction, thereby effectively isolating the external stress brought by the central anchor point 21.

[0053] The triaxial MEMS gyroscope of this embodiment also includes a first elastic connector 51 capable of extending and retracting along a first direction or a second direction. One end of the first elastic connector 51 is connected to a mass block, and the other end is connected to a central anchor point 21. Specifically, the first elastic connector 51 in this embodiment is a U-shaped spring. The first elastic connector 51 connected to the first mass block 11 and the third mass block 13 can extend and retract along the first direction, and the first elastic connector 51 connected to the second mass block 12 and the fourth mass block 14 can extend and retract along the second direction.

[0054] The triaxial MEMS gyroscope of this embodiment also includes a driving electrode 61 and a driving detection electrode 62. The movable portions of both the driving electrode 61 and the driving detection electrode 62 are disposed on the mass blocks, while the fixed portions of both are disposed on the substrate. The driving electrode 61 can drive four mass blocks to simultaneously perform simple harmonic motion in directions approaching or away from the central coupling component 2. The driving detection electrode 62 can detect the simple harmonic motion of the mass blocks along a first or second direction. Specifically, each mass block in this embodiment is provided with two driving electrodes 61 and one driving detection electrode 62. The driving detection electrode 62 corresponding to each mass block is located between two driving electrodes 61. Both the driving electrode 61 and the driving detection electrode 62 are comb-tooth electrodes.

[0055] The triaxial MEMS gyroscope of this embodiment also includes an end anchor point 71, a middle anchor point 72, a second elastic connector 52, and a third elastic connector 53. The end of the mass block is connected to the end anchor point 71 via the second elastic connector 52, and the middle part of the mass block is connected to the middle anchor point 72 via the third elastic connector 53. Specifically, the second elastic connector 52 and the third elastic connector 53 are both fishhook beams. The second elastic connector 52 and the third elastic connector 53 connected to the first mass block 11 and the third mass block 13 can extend and retract along a first direction, while the second elastic connector 52 and the third elastic connector 53 connected to the second mass block 12 and the fourth mass block 14 can extend and retract along a second direction.

[0056] It should be noted that the stiffness of the detection connecting beam 32 in this embodiment is more than 6 times that in the third direction. Furthermore, the stiffness of the first elastic connector 51, second elastic connector 52, and third elastic connector 53, which extend and retract along the first direction, is much smaller in the first direction than in the second and third directions. Similarly, the stiffness of the first elastic connector 51, second elastic connector 52, and third elastic connector 53, which extend and retract along the second direction, is much smaller in the second direction than in the first and third directions. When detecting the angular velocity in the first direction, the second mass block 12 and the fourth mass block 14 remain essentially stationary, while the detection blocks 31 on the second mass block 12 and the fourth mass block 14 move synchronously in opposite directions along the Z-axis and are essentially close to translational motion. When detecting the angular velocity in the second direction, the first mass block 11 and the third mass block 13 remain essentially stationary, while the detection blocks 31 on the second mass block 12 and the fourth mass block 14 move synchronously in opposite directions along the Z-axis and are essentially close to translational motion, thus increasing the accuracy of the detection. Therefore, the first elastic connector 51, the second elastic connector 52 and the third elastic connector 53 of the above structure can effectively suppress the vibration of the mass block in the third direction. The detection connecting beam 32 of the above structure can separate the detection block 31 and the mass block in the third direction, realize the unidirectional decoupling of the three-axis MEMS gyroscope detection and the drive, and improve the stability of the drive.

[0057] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A three-axis MEMS gyroscope, characterized in that, include: Four mass blocks are arranged in an orthogonal and symmetrical manner. The two mass blocks distributed along the first direction are the first mass block and the third mass block, and the other two mass blocks distributed along the second direction are the second mass block and the fourth mass block. A central coupling component includes a central anchor point and a central connector. The central anchor point is elastically connected to the mass block, and one end of the central connector is elastically connected to the central anchor point, while the other end is elastically connected to the mass block. The system includes a detection block and a detection connecting beam. There are four detection blocks, each corresponding to one of the four mass blocks. Each detection block is located within a mass block via the detection connecting beam. The detection blocks are movable relative to the mass blocks in a third direction. The detection blocks located on the second and fourth mass blocks and their corresponding substrates form a first-direction detection electrode. The detection blocks located on the first and third mass blocks and their corresponding substrates form a second-direction detection electrode. A third-direction detection electrode group is disposed on the mass block and is capable of detecting the angular velocity of a third direction, wherein the third direction, the first direction, and the second direction are perpendicular to each other; When detecting the angular velocity in the first direction, the detection blocks on the second mass block and the fourth mass block can move in the opposite direction along the third direction, and the detection electrode in the first direction can detect the angular velocity in the first direction; When detecting the angular velocity in the second direction, the detection blocks on the first mass block and the third mass block can move in the opposite direction along the third direction, and the second direction detection electrode can detect the angular velocity in the second direction.

2. The triaxial MEMS gyroscope according to claim 1, characterized in that, Each of the detection blocks is correspondingly provided with four detection connecting beams, and the four detection connecting beams are respectively provided on the four sides of the detection block.

3. The three-axis MEMS gyroscope according to claim 2, characterized in that, Each of the detection connecting beams includes a first detection connecting straight beam and two second detection connecting straight beams. The two ends of the first detection connecting straight beam are respectively connected to the two second detection connecting straight beams. The two second detection connecting straight beams are arranged in parallel. One of the second detection connecting straight beams is connected to the mass block, and the other second detection connecting straight beam is connected to the detection block.

4. The three-axis MEMS gyroscope according to claim 1, characterized in that, The number of the three-dimensional detection electrode groups is four, and each of the four three-dimensional detection electrode groups corresponds to one of the four mass blocks. The four three-dimensional detection electrode groups are distributed on the same circle with the center of the four mass blocks as the center.

5. The triaxial MEMS gyroscope according to claim 4, characterized in that, Each of the three-direction detection electrode groups is a differential electrode and includes a third-direction first detection sub-electrode and a third-direction second detection sub-electrode. When the mass block rotates along the third direction, the capacitance of the third-direction first detection sub-electrode and the third-direction second detection sub-electrode changes synchronously and in opposite phases.

6. The triaxial MEMS gyroscope according to claim 5, characterized in that, Both the third-direction first detection sub-electrode and the third-direction second detection sub-electrode are comb-tooth detection electrodes, and the comb teeth of the comb-tooth detection electrode are arc-shaped comb teeth with the center of the four mass blocks as the center.

7. The three-axis MEMS gyroscope according to claim 1, characterized in that, The number of central coupling components is four, and the four central coupling components and the four mass blocks are arranged in a one-to-one correspondence. Each central connector includes a first central connecting elastic component, a central moving block and a second central connecting elastic component connected in sequence. The first central connecting elastic component is connected to the mass block and the second central connecting elastic component is connected to the central anchor point. The central moving block of the four central coupling components is integrally formed into a central connecting block.

8. The triaxial MEMS gyroscope according to claim 1, characterized in that, The triaxial MEMS gyroscope also includes a first elastic connector that can extend and retract along the first direction or the second direction. One end of the first elastic connector is connected to the mass block, and the other end is connected to the central anchor point.

9. The triaxial MEMS gyroscope according to claim 1, characterized in that, The triaxial MEMS gyroscope further includes a driving electrode and a driving detection electrode. The movable parts of the driving electrode and the driving detection electrode are both disposed on the mass blocks. The driving electrode can drive the four mass blocks to perform simple harmonic motion simultaneously in a direction close to or away from the central coupling component. The driving detection electrode can detect the simple harmonic motion of the mass blocks along the first direction or the second direction.

10. The triaxial MEMS gyroscope according to claim 1, characterized in that, The triaxial MEMS gyroscope further includes an end anchor point, a middle anchor point, a second elastic connector, and a third elastic connector. The end of the mass block is connected to the end anchor point through the second elastic connector, and the middle part of the mass block is connected to the middle anchor point through the third elastic connector.

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