A particle separation device for processing a solid-liquid mixture

Abstract

The application relates to a granular separation device for treating solid-liquid mixture, which comprises an inner overflow type reaction tank, an ultrasonic oscillation system, a multi-section metal recovery pipeline and a segmented online temperature control system. The ultrasonic oscillation system is arranged at the inner overflow type reaction tank. The inner overflow type reaction tank comprises an inner tank central cleaning area, an inner tank sedimentation area, an outer tank overflow area and an inner overflow liquid inlet flow uniform pipe. The inner tank sedimentation area is arranged below the inner tank central cleaning area. The highest surface of the outer tank overflow area is higher than that of the inner tank central cleaning area. The inner overflow liquid inlet flow uniform pipe is installed at the inner edge of the outer tank overflow area. The entering liquid is uniformly diffused in the outer tank overflow area and uniformly overflows to the inner tank central cleaning area. The liquid outlet of the inner tank sedimentation area is connected with the multi-section metal recovery pipeline. The other end of the multi-section metal recovery pipeline is connected with the inner overflow liquid inlet flow uniform pipe. The outer tank overflow area is connected with the segmented online temperature control system. The application can meet the requirements of semiconductor wet process and significantly improve the process efficiency to obtain higher production capacity advantage.

Description

[Technical Field]

[0001] This invention relates to the field of semiconductor wet process equipment, specifically a particle separation device for processing solid-liquid mixtures. [Background Technology]

[0002] Metal lift-off (Lift OFF) is an indispensable process in the fabrication of microelectromechanical systems (MEMS) and compound semiconductor devices. This process primarily uses organic solvents such as NMP or DMSO to dissolve and remove the photoresist used as an auxiliary layer, allowing the metal attached to the auxiliary layer to detach from the wafer, leaving only the target metal layer. This process presents two main challenges. First, the detached metal is typically a precious metal like gold, requiring efficient metal recovery during the lift-off process while minimizing maintenance time for the recovery system. Second, it is necessary to prevent the detached metal from redepositing on the wafer surface while simultaneously achieving a gentle metal removal process to avoid damage to sensitive MEMS devices.

[0003] Currently, there are two common types of metal lift-off technologies in the semiconductor wet process. The first type uses a controlled high-pressure mist, commonly found in monolithic equipment, to directly spray the area on the wafer surface where metal needs to be removed, using the impact force of the mist to peel off the metal. This high-pressure method generally encounters significant metal debris splatter problems, which usually increase the difficulty of metal recovery; in addition, if the splatter rebound phenomenon cannot be controlled, it can also cause accidental scratches on the wafer surface.

[0004] The second method involves using ultrasound to peel off the metal surface. In monolithic equipment, a quartz vibrator transmits ultrasonic waves to the peeling solvent. The vibrating solvent and wafer contact accelerate the peeling process, and the high-speed rotation of the wafer then ejects the material from its surface. In tank-type equipment, an ultrasonic vibrator is mounted on the outside of the reaction tank. The ultrasonic waves are transmitted into the tank through vibrations on the outer wall, and the circulated liquid within the tank carries the peeled metal out of the reaction area. For monolithic ultrasonic peeling, the debris is ejected by the solvent sprayed onto the wafer surface, and if the vibration energy or solvent is insufficient, re-precipitation can occur. For tank-type ultrasonic peeling, in addition to the influence of the wafer carrier within the tank on the ultrasonic waves, the debris enters the circulation pipes along with the solvent, easily causing debris accumulation and increasing the frequency of equipment downtime for maintenance.

[0005] In summary, several metal stripping technologies struggle to simultaneously meet the three key performance indicators of metal stripping efficiency, metal recovery efficiency, and equipment downtime maintenance. Consequently, metal stripping technologies cannot achieve significant optimization and improvement in terms of production efficiency and cost. [Summary of the Invention]

[0006] The purpose of this invention is to overcome the above-mentioned shortcomings and provide a particle separation device for processing solid-liquid mixtures, which can meet the requirements of semiconductor wet processes and significantly improve process efficiency to achieve higher production capacity advantages. It solves the problem that traditional metal stripping technology cannot be significantly optimized and improved in terms of production efficiency and cost.

[0007] To achieve the above objectives, a particle separation device for processing solid-liquid mixtures is designed, comprising an internal overflow reaction tank 1, an ultrasonic vibration system 2, a multi-section metal recovery pipeline 3, and a segmented online temperature control system 4. The ultrasonic vibration system 2 is installed in the internal overflow reaction tank 1. The internal overflow reaction tank 1 includes an inner tank central cleaning zone 1.1, an inner tank settling zone 1.2, an outer tank overflow zone 1.3, and an inner overflow inlet uniform flow pipe 1.4. The inner tank settling zone 1.2 is located below the inner tank central cleaning zone 1.1, and the highest horizontal surface of the outer tank overflow zone 1.3 is higher than that of the inner tank central cleaning zone 1.1. 1. To allow the liquid entering the outer tank overflow area 1.3 to overflow into the inner tank central cleaning area 1.1, the inner overflow inlet uniform flow pipe 1.4 is installed on the inner edge of the outer tank overflow area 1.3. The liquid entering the inner overflow inlet uniform flow pipe 1.4 is evenly diffused in the outer tank overflow area 1.3 and overflows evenly into the inner tank central cleaning area 1.1. The drain port 1.5 at the bottom of the inner tank settling area 1.2 is connected to a multi-section metal recovery pipe 3. The other end of the multi-section metal recovery pipe 3 is connected to the inner overflow inlet uniform flow pipe 1.4. The outer tank overflow area 1.3 is connected to a segmented online temperature control system 4.

[0008] Furthermore, the inner tank central cleaning area 1.1, the inner tank settling area 1.2, and the outer tank overflow area 1.3 are connected as a whole by welding. The side wall of the inner tank settling area 1.2 is in the shape of an acute-angle slope, which ensures that particulate matter cannot accumulate in the tank. The cross-sectional area of ​​the inner tank settling area 1.2 narrows from top to bottom to the size of the drain outlet 1.5, and there is no acute angle from the side wall of the inner tank settling area 1.2 to the bottom drain outlet 1.5. The drain outlet 1.5 at the bottom of the inner tank settling area 1.2 is connected to multiple sections of metal recovery pipeline 3 by a flange structure, and the bottom fully open structure is obtained with a shorter vertical space through the flange structure.

[0009] Furthermore, a capillary array 16 is distributed at the bottom of the inner overflow inlet uniform flow pipe 14 inside the outer tank overflow area 1.3. The inner overflow inlet uniform flow pipe 1.4 injects stripping solvent into the outer tank overflow area 1.3 through the capillary array 16 from the pipe inlet. All capillary jets in the capillary array 1.6 are aligned along the pipe axis and tilted downwards at an outward angle. The capillary array 1.6 of the inner overflow inlet uniform flow pipe 1.4 is divided into three regions from the inlet to the farthest side. The outlet holes in each region face downwards at an acute angle of 10-45 degrees. The distribution of the number and size of holes in the three density regions from near to far is as follows: the near region has small holes with large spacing, the middle region has medium holes with medium spacing, and the far region has large holes with large spacing. The proportion of the total cross-sectional area of ​​the jet holes in the three regions increases sequentially, and the total percentage of the total cross-sectional area and number of holes increases by 10%.

[0010] Furthermore, the liquid inlet position of the outer tank overflow area 1.3 is located on its outermost side, and the top edge of the inner tank central cleaning area 1.1 has a serrated overflow port 1.7. Before the solvent injected from the inner overflow inlet uniform flow pipe 1.4 enters the inner tank settling area 1.2, it first passes through the heat exchange area 1.8 in the outer tank overflow area 1.3 for secondary temperature control to remove the solvent. The heat exchange area 1.8 is connected to the segmented online temperature control system 4.

[0011] Furthermore, the ultrasonic oscillation system 2 includes a multi-frequency ultrasonic transducer plate 2.1 and a shock wave anti-diffusion mesh 2.2. The multi-frequency ultrasonic transducer plate 2.1 is installed on the four sides of the central cleaning area 1.1 of the inner tank, and the installation positions are at the same horizontal height. The shock wave anti-diffusion mesh 2.2 is composed of two sets of 600-mesh metal mesh, which are respectively installed above and in the middle area of ​​the settling area 1.2 of the inner tank. The shock wave anti-diffusion mesh 2.2 is provided with guide grooves 2.3 around its circumference and is placed on the side wall of the settling area 1.2 of the inner tank through the guide grooves 2.3. The top of the shock wave anti-diffusion mesh 2.2 is equipped with a handle.

[0012] Furthermore, the multi-frequency ultrasonic vibrating plate 2.1 is a single piece capable of generating ultrasonic waves in three frequency bands: 26, 78, and 130 kHz. The multi-frequency ultrasonic vibrating plate 2.1 transmits shock waves of different frequencies from four directions on the side to the central area, and vibrates the target at 26 kHz, 78 kHz, and 130 kHz in the early, middle, and late stages of the stripping process, respectively. The shock wave anti-diffusion mesh 2.2 adopts a double-layer structure to concentrate the shock wave energy while also turbulently controlling the downward flow of liquid, making the liquid flow into the bottom drain more stable. At the same time, the shock wave anti-diffusion mesh 2.2 is also used to intercept broken silicon wafers falling downwards into the multi-section metal recovery pipeline 3.

[0013] Furthermore, the multi-section metal recovery pipeline 3 includes a pre-pump recovery system 3.1, a post-pump recovery system 3.2, and a circulation pump 3.3. The pre-pump recovery system 3.1 is a set of parallel dual-channel recovery pipelines. The two parallel recovery pipelines are equipped with an inlet three-way valve 3.11 at their heads and an outlet three-way valve 3.12 at their tails. The inlet three-way valve 3.11 is connected to the drain port 1.5 at the bottom of the inner tank settling zone 1.2. Each recovery pipeline is equipped with an inlet normally closed shut-off valve 3.13, a Y-type filter 3.14, and a quick-release filter 3.12 sequentially from the inlet three-way valve 3.11 to the outlet three-way valve 3.12. The filter cup filter 3.15 and the normally closed shut-off valve 3.16 at the outlet are connected. The particles in the gravity flow are collected in the filter screen by the Y-type filter 3.14 for primary recovery and separation. The quick-release filter cup filter 3.15 adopts a filter bowl-type filter structure and collects the particles in the gravity flow in the filter screen for secondary recovery and separation. The quick-release filter cup filter 3.15 is connected to the filter cup filter drain valve 3.17. An outlet flow meter 3.18 is installed after the outlet three-way valve 3.12. The other side of the outlet flow meter 3.18 is connected to the circulation pump 3.3. The other side of the circulation pump 3.3 is connected to the post-pump recovery system 3.2.

[0014] Furthermore, the post-pump recovery system 3.2 is also a set of parallel dual-channel recovery pipelines, with an inlet three-way valve 3.21 and an outlet three-way valve 3.22 respectively at its head and tail. Each recovery pipeline, from the inlet three-way valve 3.21 to the outlet three-way valve 3.22, is sequentially equipped with an inlet normally closed shut-off valve 3.23, a third-stage filter 3.24, and an outlet normally closed shut-off valve 3.25. The top of the third-stage filter 3.24 is connected to an exhaust passage 3.26. A flow meter 3.27 is installed on the gas passage 3.26. The flow meter 3.27 is used to monitor the flow rate of the exhaust pipe. The bottom end of the third-stage filter 3.24 is connected to an automatic drain valve 3.28. The inlet and outlet of the post-pump recovery system 3.2 are respectively equipped with an inlet pressure gauge 3.29 and an outlet pressure gauge 3.30. The inlet pressure gauge 3.29 is connected to an accumulator 3.31. The other end of the accumulator 3.31 is connected to a circulating pump 3.3. The outlet pressure gauge 3.30 is connected to an internal overflow inlet equalization pipe 1.4.

[0015] Furthermore, the third-stage filter 3.24 includes a filter cup 3.32 and a customized filter element body 3.33 installed within the filter cup 3.32. The customized filter element body 3.33 has a filter element installation interface 3.34 installed at its top. The customized filter element body 3.33 includes a top interface ring 3.35, a middle mesh curtain 3.36, a middle mesh curtain frame 3.37, a bottom interface ring 3.38, and an anti-fall pad 3.39 inside the filter cup. The top interface ring 3.35 is installed at the top of the middle mesh curtain 3.36, and the filter element installation interface 3.34 is installed through the top interface ring 3.35. The middle mesh curtain 3.36 is disposed within the middle mesh curtain frame 3.37. The bottom interface ring 3.38 is installed at the bottom of the middle mesh curtain frame 3.37, and the anti-fall pad 3.39 inside the filter cup is installed below the bottom interface ring 3.38.

[0016] Furthermore, the segmented online temperature control system 4 is a two-stage temperature control system. The first-stage temperature control system is located between the outlet pressure gauge 3.30 and the internal overflow inlet uniform flow pipe 1.4. This first-stage temperature control system uses infrared radiation heating to control the liquid temperature within a range of ±1-3 degrees Celsius. Then, the second-stage temperature control system further controls the temperature variation within ±0.1-1 degrees Celsius. The second-stage temperature control system has a temperature-controlled water inlet 4.1 and a temperature-controlled water outlet 4.2. The temperature-controlled water inlet 4.1 and the temperature-controlled water outlet 4.2 are connected to the outer tank overflow area 1.3 through a capillary tube 4.3. The second-stage temperature control system uses a Pelta-type electronic temperature controller combined with a capillary heat exchanger to control the temperature of the liquid in the outer tank overflow area 1.3 and achieve a temperature control effect within ±0.1-1 degrees Celsius.

[0017] Compared with the prior art, the present invention provides a particle separation device for processing solid-liquid mixtures based on a batch immersion system. The particle separation device for processing solid-liquid mixtures mainly consists of an internal overflow reaction tank, a segmented online temperature control system, an ultrasonic oscillation system, and a multi-segment metal recovery pipeline. It can meet the requirements of semiconductor wet processing and significantly improve process efficiency to obtain higher production capacity. It solves the problem that traditional stripping technology has largely prevented the significant optimization and improvement of metal stripping technology in terms of production efficiency and cost. [Image Description]

[0018] Figure 1 This is a schematic diagram of the structure of the present invention;

[0019] Figure 2 This is an exploded view of the internal overflow reaction tank of the present invention;

[0020] Figure 3 yes Figure 2 A top view of the overflow area of ​​the outer tank in the middle;

[0021] Figure 4 This is a top view of the internal overflow reaction tank of the present invention;

[0022] Figure 5 This is a front structural schematic diagram of the internal overflow reaction tank of the present invention;

[0023] Figure 6 This is a schematic diagram of the capillary array in the internal overflow reaction tank of the present invention;

[0024] Figure 7 This is a diagram showing the relative positions of the overflow area of ​​the outer tank and the central cleaning area of ​​the inner tank in this invention.

[0025] Figure 8 This is a diagram showing the usage status of the internal overflow reaction tank of this invention;

[0026] Figure 9 This is a schematic diagram of the assembly structure of the ultrasonic oscillation system of the present invention;

[0027] Figure 10 yes Figure 9 A top-view structural diagram;

[0028] Figure 11 yes Figure 9 A schematic diagram of ultrasonic vibration;

[0029] Figure 12 yes Figure 10 A schematic diagram of ultrasonic vibration;

[0030] Figure 13 This is a schematic diagram of the vibration removal of the exfoliated material by the present invention at 26 kHz Vs 5 μm, 78 kHz Vs 1-5 μm and 130 kHz Vs 0.5-3 μm;

[0031] Figure 14 This is a schematic diagram of the structure of the multi-section metal recovery pipeline of the present invention;

[0032] Figure 15 yes Figure 14 A magnified view of a section at point I;

[0033] Figure 16 yes Figure 14 A magnified view of a section at point II;

[0034] Figure 17 yes Figure 15 Flowchart Figure 1 ;

[0035] Figure 18 yes Figure 15 Flowchart Figure 2 ;

[0036] Figure 19 yes Figure 16A partial structural diagram;

[0037] Figure 20 yes Figure 19 A schematic diagram of the structure of the third-stage filter in the middle stage;

[0038] Figure 21 yes Figure 19 Exploded view of the third-stage filter;

[0039] Figure 22 This is a schematic diagram of the segmented online temperature control system of the present invention. Figure 1 ;

[0040] Figure 23 This is a schematic diagram of the segmented online temperature control system of the present invention. Figure 2 ;

[0041] Figure 24 This is a schematic diagram of the heat exchange in the segmented online temperature control system of the present invention;

[0042] Figure 25 This is a diagram showing the usage status of the segmented online temperature control system of the present invention;

[0043] In the diagram: 1. Internal overflow reaction tank; 2. Ultrasonic oscillation system; 3. Multi-section metal recovery pipeline; 4. Segmented online temperature control system; 1.1. Central cleaning zone of the inner tank; 1.2. Settling zone of the inner tank; 1.3. Overflow zone of the outer tank; 1.4. Inner overflow inlet uniform flow pipe; 1.5. Drain outlet; 1.6. Capillary array; 1.7. Serrated overflow outlet; 1.8. Heat exchange zone; 2.1. Multi-frequency ultrasonic vibrating plate; 2.2. Shock wave anti-diffusion mesh screen; 2.3. Guide chute; 3.1. Pre-pump recovery system; 3.2. Post-pump recovery system; 3.3. Circulation pump; 3.11. Inlet three-way valve; 3.12. Outlet three-way valve; 3.13. Inlet normally closed shut-off valve; 3.14. Y-type filter; 3.15. Quick-release filter cup filter; 3.16. Outlet normally closed shut-off valve; 3.17. Filter cup filter drain valve; 3.18. Outlet flow... 3.21. Meter, 3.22. Inlet three-way valve II, 3.23. Outlet three-way valve II, 3.24. Inlet normally closed shut-off valve II, 3.25. Third-stage filter, 3.26. Outlet normally closed shut-off valve II, 3.27. Exhaust passage, 3.28. Flow meter, 3.29. Automatic drain valve, 3.30. Inlet pressure gauge, 3.31. Outlet pressure gauge, 3.32. Accumulator, 3.33. Filter cup, 3.34. Customized filter element body, 3.35. Filter element installation interface, 3.36. Top interface ring, 3.37. Middle mesh curtain, 3.38. Middle mesh curtain frame, 3.39. Bottom interface ring, 4.1. Filter cup inner anti-fall pad, 4.2. Temperature-controlled water inlet, 4.3. Temperature-controlled water outlet, 4.4. Capillary tube, 4.5. Temperature controller chilled water inlet, 4.6. Temperature controller chilled water outlet, 4.7. Standard chilled water pipe opening. [Detailed Implementation]

[0044] The present invention will be further described below with reference to the accompanying drawings:

[0045] As shown in the attached figures, the present invention provides a particle separation device for processing solid-liquid mixtures, including an internal overflow reaction tank 1, an ultrasonic vibration system 2, a multi-section metal recovery pipeline 3, and a segmented online temperature control system 4. The ultrasonic vibration system 2 is located at the internal overflow reaction tank 1. The internal overflow reaction tank 1 includes an inner tank central cleaning zone 1.1, an inner tank settling zone 1.2, an outer tank overflow zone 1.3, and an inner overflow inlet uniform flow pipe 1.4. The inner tank settling zone 1.2 is located below the inner tank central cleaning zone 1.1, and the highest horizontal surface of the outer tank overflow zone 1.3 is higher than that of the inner tank central cleaning zone 1.1. This allows the liquid entering the outer tank overflow zone 1.3 to overflow into the inner tank central cleaning zone 1.1, creating an overflow effect. The inner overflow inlet uniform flow pipe 1.4 is installed on the inner edge of the outer tank overflow zone 1.3. The liquid entering the inner overflow inlet uniform flow pipe 1.4 diffuses evenly in the outer tank overflow zone 1.3 and overflows evenly into the inner tank central cleaning zone 1.1. The drain port 1.5 at the bottom of the inner tank settling zone 1.2 is connected to a multi-section metal recovery pipe 3. The other end of the multi-section metal recovery pipe 3 is connected to the inner overflow inlet uniform flow pipe 1.4. The outer tank overflow zone 1.3 is connected to a segmented online temperature control system 4.

[0046] As attached Figure 2 To be continued Figure 8 As shown, the inner tank central cleaning zone 1.1, the inner tank settling zone 1.2, and the outer tank overflow zone 1.3 are connected as one unit by welding. The side wall of the inner tank settling zone 1.2 has an acute-angle slope, which ensures that particulate matter cannot accumulate in the tank. The cross-sectional area of ​​the inner tank settling zone 1.2 narrows from top to bottom to the size of the drain outlet 1.5. There are no acute angles from this side wall to the bottom drain outlet, so that no stripping residue remains in the entire inner tank settling zone 1.2. There are no acute angles from the side wall of the inner tank settling zone 1.2 to the bottom drain outlet 1.5. The drain outlet 1.5 at the bottom of the inner tank settling zone 1.2 is connected to multiple sections of metal recovery pipeline 3 by a flange structure, and the bottom fully open structure is obtained with a shorter vertical space through the flange structure. The liquid inlet of the outer overflow zone 1.3 is located at its outermost edge. The top edge of the inner central cleaning zone 1.1 has a serrated overflow port 1.7. Before the solvent injected from the inner overflow inlet uniform flow pipe 1.4 enters the inner sedimentation zone 1.2, it first undergoes secondary temperature control to strip the solvent through the heat exchange zone 1.8 in the outer overflow zone 1.3 to obtain a more stable solvent stripping efficiency. The heat exchange zone 1.8 is connected to the segmented online temperature control system 4.

[0047] The bottom of the inner overflow inlet uniform flow pipe 1.4 inside the outer overflow zone 1.3 has a capillary array 1.6. The inner overflow inlet uniform flow pipe 1.4 injects the stripping solvent into the outer overflow zone 1.3 through the capillary array 1.6 from the pipe inlet. All capillary nozzles in the capillary array 1.6 are aligned along the pipe axis and tilt downwards at an outward angle. The bottom of the pipe where the inner overflow inlet uniform flow pipe 1.4 is located has a capillary array with the following pattern. The capillary array 1.6 of the inner overflow inlet uniform flow pipe 1.4 starts from the inlet. The system is divided into three zones, from the beginning to the farthest point. Each zone's outlet holes, besides facing downwards at acute angles of 10-45 degrees, must also include a distribution of hole quantity and size across three density zones from near to far. The design prioritizes small holes with large spacing in the near zone, medium holes with medium spacing in the middle zone, and large holes with large spacing in the far zone. The total cross-sectional area of ​​the spray holes in the three zones increases progressively, with a 10% increase in the percentage of the total cross-sectional area and number of holes with a base diameter of 1.5mm. For example: the front zone has 39 holes (78% percentage); the middle zone has 44 holes (88% percentage); and the rear zone has 49 holes (98% percentage). This ratio ensures better uniform diffusion of the liquid entering the pipe within zone 1.3 and even overflow towards the central cleaning zone 1.1 of the inner tank, resulting in relatively uniform flow in all directions and a stable stripping effect of the stripping agent on the central area.

[0048] In the aforementioned internal overflow reaction tank 1, after the liquid enters the outer tank through the delivery pipe, it is first sprayed downwards and outwards, overflowing into the heat exchange area through the side wall of the outer tank. The solvent, after passing through the temperature control zone, overflows inwards into the inner tank. Through the uniform design of the outer tank and the serrated inner tank opening, a uniform inward flow effect is achieved, thereby forming a uniform downflow vertical flow effect in the inner tank to obtain a uniform solvent stripping effect. The inner tank edge has a serrated overflow port, which facilitates further homogenization of the solvent flow field during the liquid entering the inner tank. The external overflow downflow method allows the reaction solvent to overflow from the outer tank to the inner tank. The liquid in the inner tank settles downwards, accelerating the stripped particles downwards from the wafer surface by gravity and fluid force, and leaving the stripping area through the bottom inclined tank liquid outlet to enter the particle separation pipeline. The total outlet cross-sectional area is smaller at the front and larger at the back, and the uniform flow rate is output to the outer tank. The tank design with a sharp-angle ramp combined with a short-distance flange is a residue-free design, which can ensure that particles cannot accumulate in the tank. In addition, all capillary jet nozzles are aligned along the pipeline axis and tilted downwards at an outward angle; the drain outlet at the bottom of the inner tank settling zone is connected to the pipeline system using a flange structure, which allows for a shorter vertical space and a fully open bottom structure, enabling thorough bottom cleaning when necessary.

[0049] As attached Figure 9 To be continued Figure 13As shown, the ultrasonic oscillation system 2 includes a multi-frequency ultrasonic transducer 2.1 and a shock wave anti-diffusion mesh 2.2. The multi-frequency ultrasonic transducer 2.1 is installed on the four sides of the central cleaning area 1.1 of the inner tank, and the installation positions are at the same horizontal height. The transducer area covers 110% of the vibrated area, ensuring that the shock wave completely covers the wafer area. The shock wave anti-diffusion mesh 2.2 consists of two sets of 600-mesh metal mesh, which are installed above and in the middle area of ​​the settling area 1.2 of the inner tank, respectively. Both shock wave anti-diffusion meshes 2.2 are provided with guide grooves 2.3 around their circumference, and can be placed on the side wall of the settling area 1.2 of the inner tank through the guide grooves 2.3. The top of the shock wave anti-diffusion mesh 2.2 is equipped with a handle for easy removal and replacement during maintenance. The multi-frequency ultrasonic transducer 2.1 uses a single piece that can generate 26, 78, 1 The ultrasonic transducer 2.1, operating at three frequencies (30kHz), transmits shock waves of different frequencies from four sides to the central area. It vibrates the target at 26kHz, 78kHz, and 130kHz in the early, middle, and late stages of the stripping process, removing particles of 5µm in the early stage, 1-5µm in the middle stage, and 0.5-3µm in the late stage. This achieves a uniform stripping removal effect from relatively coarse to fine particles, addressing the complex stripping residue conditions after solvent removal. The shock wave anti-diffusion mesh 2.2 employs a double-layer structure to concentrate shock wave energy while also turbulenting the downward-flowing liquid, stabilizing the liquid flow into the bottom drain. Simultaneously, the shock wave anti-diffusion mesh 2.2 intercepts broken silicon wafers falling into the multi-section metal recovery pipeline 3.

[0050] In the ultrasonic oscillation system 2, the double-layer shock wave anti-diffusion mesh not only concentrates the shock wave energy but also turbulent the downward-flowing liquid, making the liquid flow into the bottom drain port more stable. Simultaneously, in the event of an accident, the mesh can intercept broken silicon wafers falling into the pipeline system, effectively preventing damage to the pipeline system from accidental fragments. Since the shock wave energy attenuates during transmission, using four ultrasonic transducers to sequentially deliver vibration energy to the central area from four directions significantly reduces the uneven stripping effect caused by uneven vibration received by the central object due to shock wave energy attenuation. Furthermore, based on the characteristics of the object being stripped, the order of vibration direction switching and vibration time can be set to achieve a more targeted stripping effect. The cavitation bubbles formed by low-frequency ultrasonic waves around 25kHz have a diameter of approximately 50-100µm. By using a 600-mesh mesh (approximately 20µm aperture) to block the cavitation bubbles, the ultrasonic waves are blocked and concentrated to a certain extent in the central cleaning area, preventing the diffusion of ultrasonic energy and thus achieving higher removal efficiency.

[0051] As attached Figure 14 To be continued Figure 21As shown, the multi-section metal recovery pipeline 3 includes a pre-pump recovery system 3.1, a post-pump recovery system 3.2, and a circulating pump 3.3. The pre-pump recovery system 3.1 is a set of parallel dual-channel recovery pipelines. The two parallel recovery pipelines are equipped with inlet three-way valves 3.11 at their heads and outlet three-way valves 3.12 at their tails. The inlet three-way valve 3.11 is connected to the drain port 1.5 at the bottom of the inner tank settling zone 1.2. Each recovery pipeline is equipped with a normally closed inlet valve between the inlet three-way valve 3.11 and the outlet three-way valve 3.12. The system includes a shut-off valve 3.13, a Y-type filter 3.14, a quick-release cup filter 3.15, and an outlet normally closed shut-off valve 3.16. The Y-type filter 3.14 collects particles from the gravity flow by settling them into the filter screen for primary recovery and separation. The quick-release cup filter 3.15 uses a cup-shaped filter structure to collect particles from the gravity flow by settling them into the filter screen for secondary recovery and separation. The quick-release cup filter 3.15 is connected to a cup filter drain valve 3.17, and an outlet flow meter 3.1 is installed after the outlet three-way valve 3.12. 8. The outlet flow meter 3.18 is connected to the circulating pump 3.3 on one side, and the circulating pump 3.3 is connected to the downstream recovery system 3.2 on the other side. The downstream recovery system 3.2 is also a set of parallel dual-channel recovery pipelines, with an inlet three-way valve 3.21 and an outlet three-way valve 3.22 at its head and tail, respectively. Each recovery pipeline is equipped with an inlet normally closed shut-off valve 3.23, a third-stage filter 3.24, and an outlet normally closed shut-off valve 3.25 sequentially between the inlet three-way valve 3.21 and the outlet three-way valve 3.22. The top of filter 3.24 is connected to exhaust passage 3.26, and a flow meter 3.27 is installed on exhaust passage 3.26. The flow meter 3.27 is used to monitor the flow rate of the exhaust pipe. The bottom of the third-stage filter 3.24 is connected to automatic drain valve 3.28. The inlet and outlet of the post-pump recovery system 3.2 are respectively equipped with inlet pressure gauge 3.29 and outlet pressure gauge 3.30. Inlet pressure gauge 3.29 is connected to accumulator 3.31. The other end of accumulator 3.31 is connected to circulation pump 3.3. Outlet pressure gauge 3.30 is connected to internal overflow inlet equalization pipe 1.4.

[0052] The third-stage filter 3.24 includes a filter cup 3.32 and a custom filter element body 3.33 installed inside the filter cup 3.32. The top of the custom filter element body 3.33 is equipped with a filter element installation interface 3.34. The custom filter element body 3.33 includes a top interface ring 3.35, a middle mesh curtain 3.36, a middle mesh curtain frame 3.37, a bottom interface ring 3.38, and an anti-fall pad 3.39 inside the filter cup. The top of the middle mesh curtain 3.36 is equipped with a top interface ring 3.35, and the filter element installation interface 3.34 is installed through the top interface ring 3.35. The middle mesh curtain 3.36 is set inside the middle mesh curtain frame 3.37. The bottom of the middle mesh curtain frame 3.37 is equipped with a bottom interface ring 3.38, and the anti-fall pad 3.39 inside the filter cup is installed below the bottom interface ring 3.38.

[0053] In the multi-section metal recovery pipeline 3, the pre-pump recovery system is a dual-path parallel recovery pipeline system. Each parallel path has a reversing three-way valve at both ends. A flow meter is installed after the outlet three-way valve. Each single path consists of an inlet shut-off valve, a Y-type filter, a quick-release filter cup filter, a filter cup filter drain valve, and an outlet shut-off valve. The difference between the post-pump collection system and the pre-pump collection system is that the outlet collection system has pressure gauges installed at the inlet and outlet. By comparing the pressure difference between the inlet and outlet, the load of particulate matter collected in the filter is confirmed. Once the negative pressure reaches 80% of the pump output capacity, it can be determined that the metal particles in the filter element are close to full load. At this time, the parallel path will be switched to perform filter element replacement. The parallel recovery pipeline allows for online precious metal recovery without system shutdown. A custom-designed three-way valve with a directional valve core alters fluid flow by rotating the valve core instead of cutting off the passage, resulting in smoother and faster A / B passage switching. Its inlet is a flange interface for the shortest possible connection to the reaction zone, while its outlet is a custom-designed valve that allows for direct insertion of the outlet shut-off valve to create the shortest possible connection between the passages, preventing the accumulation of liquid-solid mixture residues that could cause blockages. The adjustable recovery capacity / filtration efficiency three-stage recovery system balances the recovery cycle. The three stages utilize semiconductor conveying standard filter housings, and the filter elements are custom-designed to achieve the desired recovery effect.

[0054] A pneumatic pump with a certain self-priming capability is used to provide the circulating power for the liquid, and an accumulator is added at the pump outlet to reduce pipeline pulsation caused by periodic operation; since the recovered precious metals are relatively heavy, they may fall under full load if only assembly force is used, so a bottom anti-fall device is required. Figure 17 When in passage A, the three-way valves at both ends will be linked with the shut-off valve to ensure that passage A is fully open; when the three-way valve is in passage A, the shut-off valves at the inlet and outlet of passage B are both in the shut-off state, ensuring that even if the three-way valve fails, passage B can still be safely accessed for filter replacement. Figure 18In passage B, the three-way valves at the beginning and end will work in conjunction with the shut-off valve to ensure that passage B is fully open. For example... Figure 15 The shortest distance between the on / off valve and the three-way valve passages prevents the accumulation of liquid-solid mixture residue that could cause blockages; a custom-designed connector allows the on / off valve to be directly inserted into the three-way valve; shut-off valves are added before the filter inlet and outlet to ensure that leaks do not occur due to three-way valve malfunctions or other reasons during filter replacement, preventing potential hazards; the primary recovery separation allows for adjustment of the filter element size based on actual replacement frequency to balance the replacement and maintenance frequency of the tertiary recovery system; a Y-type filter structure is used to collect particles from the gravity flow by settling them into the filter screen; the primary recovery separation allows for filter element capacity expansion, while the secondary recovery separation uses a cup-type filter structure to collect particles from the gravity flow by settling them into the filter screen. Figure 19 The exhaust pipes after the third-stage filter pump are merged into the outer tank of the overflow trough, and an on / off valve is added at the end. Based on the exhaust pipe flow monitoring, the exhaust passage is cut off in case of abnormal flow. The flow meter monitors the exhaust pipe flow. Exhaust is discharged after the third-stage filter pump to avoid air bubbles in the pipe causing increased back pressure and unstable flow on-site. Figure 21 The filter element has detachable end rings, and precious metals can be recovered through cleaning.

[0055] As attached Figure 22 To be continued Figure 25 As shown, the segmented online temperature control system 4 is a two-stage temperature control system. The first-stage temperature control system is located between the outlet pressure gauge 3.30 and the internal overflow inlet uniform flow pipe 1.4. This first-stage temperature control system uses infrared radiation heating to control the liquid temperature within a range of ±1-3 degrees Celsius. Then, the second-stage temperature control system further controls the temperature variation within ±0.1-1 degrees Celsius, thereby obtaining a more stable solvent stripping effect. The second-stage temperature control system has a temperature-controlled water inlet 4.1 and a temperature-controlled water outlet 4.2. The temperature-controlled water inlet 4.1 and the temperature-controlled water outlet 4.2 are connected to the outer tank overflow area 1.3 through a capillary tube 4.3. The second-stage temperature control system uses a Pelta-type electronic temperature controller combined with a capillary heat exchanger to control the temperature of the liquid in the outer tank overflow area 1.3 and obtain a temperature control effect within ±0.1-1 degrees Celsius.

[0056] like Figure 22 The multi-hole capillary connector and the standard chilled water connector are connected by an adapter flange to obtain a larger heat exchange area, enabling the outer tank of the overflow tank to achieve higher heat exchange efficiency. The actual length of the capillary tube needs to wrap around the outer tank once. A Pelta-type electronic temperature controller + capillary heat exchanger area is used to control the temperature of the liquid in the outer tank, achieving a temperature control effect within + / -0.1-1 degrees Celsius. After the primary temperature control system controls the liquid temperature to the range of + / -1-3 degrees Celsius, a secondary temperature control system further controls the temperature variation within + / -0.1-1 degrees Celsius, thereby obtaining a more stable solvent stripping effect. Figure 23The capillary tube is placed in the outer tank, allowing for secondary high-precision temperature control of the solvent entering the inner tank. Referring to the online quartz heater (publication number CN202522066U), a halogen infrared lamp tube + labyrinth structure is used to provide high-frequency irradiation to the pipe, achieving a temperature control effect within + / -1-3 degrees Celsius. The halogen infrared light source can reach maximum output instantly during pneumatic operation and convert over 85% of its energy into infrared heat energy. Through the heater labyrinth and reflective structure, a high-response heating effect is achieved, resulting in a liquid heating effect within the pipe with an error of at least 3 degrees Celsius in the 70-90 degree Celsius heater range. For example... Figure 24 After the liquid enters the outer tank through the delivery pipe, it is first sprayed downwards and outwards, and then overflows into the heat exchange area through the side wall of the outer tank.

[0057] The contents not described in detail in this specification are existing technologies known to those skilled in the art. The standard parts used can be purchased from the market, and the irregular parts can be customized according to the description and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the existing technology. The machinery, parts and equipment adopt conventional models in the existing technology, and the circuit connection adopts conventional connection methods in the existing technology, which will not be described in detail here.

[0058] This invention is not limited to the above-described embodiments. Any changes, modifications, substitutions, combinations, or simplifications made without departing from the spirit and principle of this invention shall be considered equivalent substitutions and shall be included within the scope of protection of this invention.

Claims

1. A particle separation device for processing solid-liquid mixtures, characterized in that: The system includes an internal overflow reaction tank (1), an ultrasonic oscillation system (2), a multi-section metal recovery pipeline (3), and a segmented online temperature control system (4). The ultrasonic oscillation system (2) is located in the internal overflow reaction tank (1). The internal overflow reaction tank (1) includes an inner tank central cleaning zone (1.1), an inner tank settling zone (1.2), an outer tank overflow zone (1.3), and an inner overflow inlet uniform flow pipe (1.4). The inner tank settling zone (1.2) is located below the inner tank central cleaning zone (1.1). The highest horizontal surface of the outer tank overflow zone (1.3) is higher than that of the inner tank central cleaning zone (1.1) to ensure that the liquid entering the outer tank overflow zone (1.3) is... Liquid can overflow into the central cleaning zone (1.1) of the inner tank. The inner overflow inlet uniform flow pipe (1.4) is installed on the inner edge of the outer tank overflow zone (1.3). The liquid entering the inner overflow inlet uniform flow pipe (1.4) diffuses evenly in the outer tank overflow zone (1.3) and overflows evenly into the central cleaning zone (1.1) of the inner tank. The drain port (1.5) at the bottom of the inner tank settling zone (1.2) is connected to a multi-section metal recovery pipeline (3). The other end of the multi-section metal recovery pipeline (3) is connected to the inner overflow inlet uniform flow pipe (1.4). The outer tank overflow zone (1.3) is connected to a segmented online temperature control system (4). The ultrasonic vibration system (2) The system includes a multi-frequency ultrasonic vibrating plate (2.1) and a shock wave anti-diffusion mesh screen (2.2). The multi-frequency ultrasonic vibrating plate (2.1) is installed on the four sides of the central cleaning area (1.1) of the inner tank, and the installation positions are at the same horizontal height. The shock wave anti-diffusion mesh screen (2.2) is composed of two sets of 600-mesh metal mesh, which are installed above and in the middle area of ​​the settling area (1.2) of the inner tank, respectively. The shock wave anti-diffusion mesh screen (2.2) is provided with guide grooves (2.3) around its circumference and is placed on the side wall of the settling area (1.2) of the inner tank through the guide grooves (2.3). The top of the shock wave anti-diffusion mesh screen (2.2) is equipped with a handle; the multi-frequency ultrasonic vibrating plate (2.1) A single ultrasonic transducer plate capable of generating three frequency bands of 26, 78 and 130 kHz is used. The multi-frequency ultrasonic transducer plate (2.1) transmits different frequency shock waves from four directions on the side to the central area, and vibrates the target at 26 kHz, 78 kHz and 130 kHz in the early, middle and late stages, respectively. The shock wave anti-diffusion net (2.2) adopts a double-layer structure to concentrate the shock wave energy and turbulent the downward flowing liquid, making the liquid flow into the bottom drain more stable. At the same time, the shock wave anti-diffusion net (2.2) is also used to intercept broken silicon wafers falling downward into the multi-section metal recycling pipeline (3).

2. The particle separation device for processing solid-liquid mixtures as described in claim 1, characterized in that: The inner tank central cleaning area (1.1), inner tank settling area (1.2), and outer tank overflow area (1.3) are connected as one unit by welding. The side wall of the inner tank settling area (1.2) is in the shape of an acute-angle slope, and the acute-angle slope ensures that particles cannot accumulate in the tank. The cross-sectional area of ​​the inner tank settling area (1.2) is reduced from top to bottom to the size of the drain outlet (1.5), and there is no acute angle from the side wall of the inner tank settling area (1.2) to the bottom drain outlet (1.5). The drain outlet (1.5) at the bottom of the inner tank settling area (1.2) is connected to multiple sections of metal recovery pipeline (3) by a flange structure, and the bottom fully open structure is obtained with a shorter vertical space through the flange structure.

3. The particle separation device for processing solid-liquid mixtures as described in claim 1, characterized in that: The bottom of the inner overflow inlet uniform flow pipe (1.4) inside the outer overflow area (1.3) is distributed with a capillary array (1.6). The inner overflow inlet uniform flow pipe (1.4) injects stripping solvent into the outer overflow area (1.3) through the capillary array (1.6) from the pipe inlet. All capillary jets in the capillary array (1.6) are aligned along the pipe axis and tilted downwards at an outward angle. The capillary array (1.6) of the inner overflow inlet uniform flow pipe (1.4) is divided into three regions from the inlet to the farthest side. The outlet holes in each region face downwards at an acute angle of 10-45 degrees. The number and size of holes in the three density regions are distributed relatively from near to far as follows: the near region has small holes with small spacing, the middle region has medium holes with medium spacing, and the far region has large holes with large spacing. The proportion of the total cross-sectional area of ​​the jet holes in the three regions increases sequentially, and the total percentage of the total cross-sectional area and number of holes increases by 10%.

4. The particle separation device for processing solid-liquid mixtures as described in claim 1, characterized in that: The liquid inlet position of the outer overflow area (1.3) is set at its outermost side. The top edge of the inner central cleaning area (1.1) has a serrated overflow port (1.7). Before the solvent injected by the inner overflow inlet uniform flow pipe (1.4) enters the inner sedimentation area (1.2), it first passes through the heat exchange area (1.8) in the outer overflow area (1.3) for secondary temperature control to remove the solvent. The heat exchange area (1.8) is connected to the segmented online temperature control system (4).

5. The particle separation device for processing solid-liquid mixtures as described in claim 1, characterized in that: The multi-section metal recovery pipeline (3) includes a pre-pump recovery system (3.1), a post-pump recovery system (3.2), and a circulating pump (3.3). The pre-pump recovery system (3.1) is a set of parallel dual-channel recovery pipelines. The two parallel recovery pipelines are equipped with an inlet three-way valve (3.11) at the head and an outlet three-way valve (3.12) at the tail. The inlet three-way valve (3.11) is connected to the drain port (1.5) at the bottom of the inner tank settling zone (1.2). Each recovery pipeline is equipped with an inlet normally closed shut-off valve (3.13), a Y-type filter (3.14), and a quick-release filter (3.15) sequentially from the inlet three-way valve (3.11) to the outlet three-way valve (3.12). The filter cup filter (3.15) and the normally closed shut-off valve at the outlet (3.16) are used. The particles in the gravity flow are collected in the filter screen by the Y-type filter (3.14) for primary recovery and separation. The quick-release filter cup filter (3.15) adopts a filter bowl-type filter structure and collects the particles in the gravity flow in the filter screen for secondary recovery and separation. The quick-release filter cup filter (3.15) is connected to the filter cup filter drain valve (3.17). An outlet flow meter (3.18) is installed after the outlet three-way valve (3.12). The other side of the outlet flow meter (3.18) is connected to the circulation pump (3.3). The other side of the circulation pump (3.3) is connected to the post-pump recovery system (3.2).

6. The particle separation device for processing solid-liquid mixtures as described in claim 5, characterized in that: The post-pump recovery system (3.2) is also a set of parallel dual-channel recovery pipelines, with an inlet three-way valve two (3.21) and an outlet three-way valve two (3.22) respectively at its head and tail. Each channel recovery pipeline is equipped with an inlet normally closed shut-off valve two (3.23), a third-stage filter (3.24), and an outlet normally closed shut-off valve two (3.25) in sequence from the inlet three-way valve two (3.21) to the outlet three-way valve two (3.22). The top of the third-stage filter (3.24) is connected to an exhaust passage (3.26). The exhaust passage (3.26) is connected to the exhaust passage (3.27). 6) A flow meter (3.27) is installed on the upper part. The flow meter (3.27) is used to monitor the flow of the exhaust pipe. The bottom end of the third-stage filter (3.24) is connected to an automatic drain valve (3.28). The inlet and outlet of the pump recovery system (3.2) are respectively equipped with an inlet pressure gauge (3.29) and an outlet pressure gauge (3.30). The inlet pressure gauge (3.29) is connected to an accumulator (3.31). The other end of the accumulator (3.31) is connected to a circulating pump (3.3). The outlet pressure gauge (3.30) is connected to an internal overflow inlet uniform flow pipe (1.4).

7. The particle separation device for processing solid-liquid mixtures as described in claim 6, characterized in that: The third-stage filter (3.24) includes a filter cup (3.32) and a custom filter element body (3.33) installed inside the filter cup (3.32). The top of the custom filter element body (3.33) is equipped with a filter element installation interface (3.34). The custom filter element body (3.33) includes a top interface ring (3.35), a middle mesh screen (3.36), a middle mesh screen frame (3.37), a bottom interface ring (3.38), and an anti-fall device inside the filter cup. The middle mesh screen (3.36) is equipped with a top interface ring (3.35) at its top and a filter element installation interface (3.34) is installed through the top interface ring (3.35). The middle mesh screen (3.36) is set inside the middle mesh screen frame (3.37). The bottom interface ring (3.38) is installed at the bottom of the middle mesh screen frame (3.37). The bottom interface ring (3.38) is equipped with a filter cup anti-fall pad (3.39) below the bottom interface ring (3.38).

8. The particle separation device for processing solid-liquid mixtures as described in claim 1, characterized in that: The segmented online temperature control system (4) is a two-stage temperature control system. The first-stage temperature control system is located between the outlet pressure gauge (3.30) and the internal overflow liquid inlet equalization pipe (1.4). The first-stage temperature control system uses infrared radiation heating and controls the liquid temperature to a range of ±1-3 degrees. Then, the second-stage temperature control system further controls the temperature change range to within ±0.1-1 degrees. The second-stage temperature control system is equipped with a temperature control water inlet (4.1) and a temperature control water outlet (4.2). The temperature control water inlet (4.1) and the temperature control water outlet (4.2) are connected to the outer tank overflow area (1.3) through a capillary tube (4.3). The second-stage temperature control system uses a Pelta-type electronic temperature controller combined with a capillary heat exchanger to control the temperature of the liquid in the outer tank overflow area (1.3) and achieve a temperature control effect within ±0.1-1 degrees.

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