Negative pressure drying oven
By designing a cover, support mechanism, and guide plate in the negative pressure drying oven, the problem of uneven solvent crystallization caused by uneven gas flow was solved, and a uniform drying effect was achieved on the object to be dried.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SUZHOU MAIZHUANG SEMICON EQUIP CO LTD
- Filing Date
- 2022-08-08
- Publication Date
- 2026-06-16
AI Technical Summary
In existing negative pressure drying ovens, the gas flow inside the oven is uneven during the vacuum negative pressure process, causing the organic solvents on the edges of the items to be dried to crystallize prematurely, making it impossible to achieve uniform drying.
A negative pressure drying oven was designed, which uses a cover and a support mechanism to form a second chamber. The gas is guided to flow evenly through the through holes on the side wall of the cover and the air holes of the guide section. The bending part covers the edge of the object to be dried, and the guide plate and sealing part are used to improve the uniformity of gas flow and ensure uniform crystallization of solvent.
This method achieves uniform solvent crystallization on the surface of the object to be dried under negative pressure, thereby improving the uniformity and efficiency of the drying effect.
Smart Images
Figure CN117570657B_ABST
Abstract
Description
Technical Field
[0001] This disclosure generally relates to the field of drying equipment, and more specifically to a negative pressure drying oven. Background Technology
[0002] Negative pressure drying is a method of rapid drying by placing the object to be dried under negative pressure or vacuum conditions. A vacuum pump is used to remove air and moisture. When the object is under vacuum and negative pressure, the boiling point of the solvent on its surface decreases, making it easier to vaporize and accelerating the drying process. Compared to conventional drying methods, negative pressure drying offers advantages such as shorter drying time, applicability to objects with complex compositions or structures (e.g., heat-sensitive materials, easily oxidized materials, or powdered materials), and reduced likelihood of contamination during the drying process.
[0003] A negative pressure drying oven is a processing device based on the principle of negative pressure drying; it can also be called a vacuum drying oven, a reduced pressure drying device, or a substrate processing device. A negative pressure drying oven generally consists of a chamber and a negative pressure mechanism. The chamber forms a cavity to hold the material to be dried, and the negative pressure mechanism controls the pressure changes inside the cavity.
[0004] However, in existing negative pressure drying ovens, the uniformity of gas flow inside the oven is inconsistent during the vacuum process. Often, the excessively high gas velocity at the edges of the object to be dried causes premature crystallization of organic solvents at those edges, resulting in uneven crystallization and failing to meet the requirements of vacuum drying. Therefore, a negative pressure drying oven capable of guiding uniform gas flow is needed to achieve uniform crystallization of solvents on the object to be dried. Summary of the Invention
[0005] This disclosure is made in view of the above-mentioned situation, and its purpose is to provide a negative pressure drying oven that can guide the uniform flow of gas in a negative pressure environment to uniformly crystallize the solvent on the object to be dried.
[0006] To this end, this disclosure provides a negative pressure drying oven, which includes a box body having a first chamber, a support mechanism arranged in the first chamber for supporting the object to be dried, an airflow guiding mechanism cooperating with the support mechanism to form a second chamber containing the object to be dried, and a negative pressure mechanism communicating with the first chamber for forming negative pressure. The airflow guiding mechanism includes a cover covering the support mechanism to form the second chamber, a plurality of through holes formed on the side wall of the cover, a bent portion formed on the side wall of the cover for covering the upper surface of the object to be dried, a guide portion disposed on the bent portion and forming a guide cavity with the bent portion and the object to be dried, and a plurality of air holes located on the guide portion. The second chamber communicates with the first chamber through the air holes and the through holes.
[0007] In this disclosure, the cover and the support mechanism cooperate to form a second chamber that contains the object to be dried. When the negative pressure mechanism pumps air, the gas in the second chamber enters the first chamber through multiple through holes on the side wall of the cover and multiple air holes located in the guide section. During the gas flow, the bending part can effectively restrict the gas flow at the edge of the object to be dried, making the gas flow on the surface of the object to be dried more uniform, thereby enabling the solvent on the object to be dried to be dried and crystallized more uniformly.
[0008] Additionally, in the negative pressure drying oven disclosed herein, the bent portion may optionally be a portion extending inward from the inner sidewall of the casing. In this case, the bent portion more completely covers the edge of the object to be dried, thus better restricting gas flow at the edge of the object.
[0009] Furthermore, in the negative pressure drying oven disclosed herein, optionally, the plurality of air holes are evenly distributed along the circumference of the guide cavity. This allows for a more uniform gas flow into the first chamber via the evenly distributed air holes within the guide cavity.
[0010] Additionally, in the negative pressure drying oven disclosed herein, optionally, the plurality of through holes are evenly distributed along the circumference of the casing. In this case, the gas in the second chamber flows into the first chamber through the evenly distributed plurality of through holes, which can make the airflow into the first chamber more uniform.
[0011] Alternatively, in the negative pressure drying oven disclosed herein, the plurality of through holes may be located below the object to be dried. In this case, the gas located below the object to be dried flows into the first chamber through the plurality of through holes, instead of rising through the gap between the object to be dried and the side wall of the casing and flowing out from the guide section. By diverting the gas in the first chamber, the airflow into the first chamber can be made more uniform.
[0012] Furthermore, in the negative pressure drying oven disclosed herein, optionally, the distance between the bending portion and the object to be dried is a predetermined distance. In this case, the solvent on the object to be dried will not come into direct contact with the bending portion, which can prevent the solvent on the object to be dried from being insufficiently dried; at the same time, the predetermined distance between the bending portion and the object to be dried can better restrict the gas flow at the edge of the object to be dried.
[0013] Additionally, in the negative pressure drying oven disclosed herein, optionally, the support mechanism has a guide plate projected along a direction orthogonal to the guide plate. The guide plate covers the airflow guiding mechanism and the connection point where the negative pressure mechanism exchanges airflow with the first chamber. In this case, the guide plate, in conjunction with the cover, can better form a second chamber for drying the object to be dried. Furthermore, the connection point where the negative pressure mechanism exchanges airflow with the first chamber is located directly below the guide plate. When the negative pressure mechanism performs suction, the negative pressure adsorption force generated can be evenly distributed around the guide plate due to the obstruction of the guide plate, thereby allowing gas to flow evenly from around the guide plate to the connection point where the negative pressure mechanism exchanges airflow with the first chamber, thus enabling more uniform drying of the solvent on the object to be dried.
[0014] Furthermore, in the negative pressure drying oven disclosed herein, optionally, the plurality of air holes and the plurality of through holes, under the action of the negative pressure mechanism, allow gas above and below the object to be dried to enter the first chamber through the plurality of air holes and the plurality of through holes, respectively. In this case, the gas in the second chamber flows out through the air holes above and the through holes below the object to be dried, respectively, which enables the airflow flowing into the first chamber through the surface of the object to be dried to be more uniform.
[0015] Additionally, in the negative pressure drying oven disclosed herein, optionally, the distance between the side wall of the cover and the edge of the object to be dried is less than 5 mm. In this case, the distance between the side wall of the cover and the edge of the object to be dried is very small, and under the action of negative pressure, the gas located below the object to be dried is less likely to flow through the edge of the object to be dried into the space above the object, thus making the airflow more uniform throughout the object to be dried.
[0016] Additionally, the negative pressure drying oven disclosed herein may optionally include a first sealing portion for sealing the first chamber and a second sealing portion for sealing the second chamber. This improves the airtightness of the first and second chambers through the first and second sealing portions.
[0017] According to this disclosure, a negative pressure drying oven can be provided to uniformly crystallize solvents on a material to be dried by guiding the uniform flow of gas under negative pressure. Attached Figure Description
[0018] This disclosure will now be explained in further detail by way of example only with reference to the accompanying drawings, in which:
[0019] Figure 1 This is a schematic diagram showing a negative pressure drying oven according to an embodiment of the present disclosure.
[0020] Figure 2 This is a schematic diagram showing the internal structure of the negative pressure drying oven according to the embodiments of this disclosure.
[0021] Figure 3 This is a schematic diagram showing another internal structure of the negative pressure drying oven according to an embodiment of the present disclosure.
[0022] Figure 4 It shows Figure 2 A schematic diagram of the gas flow inside the negative pressure drying oven during operation.
[0023] Figure 5a This is a first schematic diagram illustrating an airflow guiding mechanism according to an embodiment of the present disclosure.
[0024] Figure 5b It shows Figure 5a A side view of the airflow guiding mechanism involved.
[0025] Figure 5c It shows Figure 5a A side cross-sectional view of the airflow guiding mechanism involved.
[0026] Figure 6a This is a second schematic diagram illustrating the airflow guiding mechanism according to an embodiment of the present disclosure.
[0027] Figure 6b It shows Figure 6a A side view of the airflow guiding mechanism involved.
[0028] Figure 6c It shows Figure 6a A side cross-sectional view of the airflow guiding mechanism involved.
[0029] Figure 7 This is a side cross-sectional schematic diagram showing a third embodiment of the airflow guiding mechanism according to the present disclosure.
[0030] Figure 8 This is a first non-limiting schematic diagram illustrating a first sealing part and housing assembly according to an embodiment of the present disclosure.
[0031] Figure 9 This is a second non-limiting schematic diagram illustrating the first sealing part and the housing assembly according to an embodiment of the present disclosure.
[0032] Explanation of reference numerals in the attached figures:
[0033] 1… Negative pressure drying oven, 10… Box body, 100… First chamber, 110… Top cover, 120… Bottom plate, 121… Support column, 130… Exhaust port, 140… First sealing part, 20… Airflow guiding mechanism, 200… Second chamber, 210… Cover, 211… Cover side wall, 220… Bending part, 230… Through hole, 240… Guide part, 241… Air hole, 242… Guide cavity, 30… Support mechanism, 310… Guide plate, 320… Support piece, 330… Second sealing part, 40… Negative pressure mechanism, 400… Pump body, 410… Gas pipeline, 50… Object to be dried. Detailed Implementation
[0034] The negative pressure drying oven disclosed herein can be more readily understood by referring to the following detailed description of specific embodiments and the embodiments included therein, as well as the accompanying drawings and their foregoing and hindsight descriptions.
[0035] In the following description, the same symbols are used for the same parts, and repeated descriptions are omitted. Furthermore, the accompanying drawings are only schematic diagrams, and the proportions of the parts or the shapes of the parts may differ from the actual figures.
[0036] It should be understood that the terminology used herein is for describing specific embodiments only and is not intended to limit the scope of the invention, which will be limited only by the appended claims.
[0037] While specific examples of this disclosure have been shown and described, it will be apparent to those skilled in the art that variations and modifications can be made based on the teachings of this disclosure without departing from this disclosure and its broader aspects, and therefore the appended claims are intended to cover within their scope all such changes and modifications within the true spirit and scope of this disclosure. Those skilled in the art will understand that, in general, the terms used in this disclosure are generally intended to be “open” terms (e.g., the term “comprising” should be interpreted as “including but not limited to”, the term “having” should be interpreted as “at least having”, the term “comprising” should be interpreted as “including but not limited to”, etc.).
[0038] It should be understood that the examples of the disclosure disclosed herein are illustrative of the principles of this disclosure. Other modifications that may be adopted are within the scope of this disclosure. Therefore, alternative configurations of this disclosure can be utilized in accordance with its teachings, not as examples or limitations. Thus, the examples of this disclosure are not limited to those shown and described.
[0039] The following examples are provided to better illustrate the claimed disclosure and are not intended to limit the scope of this disclosure. References to specific materials are for illustrative purposes only and are not intended to limit this disclosure. Those skilled in the art can develop equivalent means or reactants without exercising inventive ability and without departing from the scope of this disclosure.
[0040] Furthermore, to better illustrate this disclosure, numerous specific details are set forth in the following detailed description. Those skilled in the art will understand that this disclosure can be practiced without certain specific details. In some examples, methods, means, components, and circuits well known to those skilled in the art have not been described in detail in order to highlight the main points of this disclosure.
[0041] This disclosure relates to a negative pressure drying oven. By placing the object to be dried in the negative pressure drying oven of this disclosure, the object can be dried rapidly. The negative pressure drying oven of this disclosure may also be referred to as a negative pressure drying device, a vacuum drying device, a vacuum drying oven, a reduced pressure drying device, or a substrate processing device, etc. It should be understood that the above names are all for the purpose of indicating the equipment of this disclosure that uses a negative pressure drying method to dry the object, and should not be construed as limiting.
[0042] The negative pressure drying oven disclosed herein can be applied in the fields of food production, display manufacturing, solar cell manufacturing, lithium battery manufacturing, wafer manufacturing, and advanced packaging. In particular, the negative pressure drying oven disclosed herein is especially suitable for drying heat-sensitive materials, easily oxidized materials, powdered materials, solvents, or materials that may generate harmful waste gases during the drying process.
[0043] In this disclosure, the object to be dried can be in the form of sheets, plates, strips, or cubes. For example, the object to be dried can be an audio-visual disc in the VCD industry, a display panel in the display manufacturing industry, a solar panel in the solar cell manufacturing industry, or a wafer panel in the chip manufacturing industry, etc.
[0044] When drying materials with organic solvents on their surfaces, the uneven gas flow inside the negative pressure drying oven often causes premature crystallization of the solvent at the edges of the materials, resulting in uneven drying and failing to meet the requirements of vacuum drying. Therefore, restricting the gas flow inside the drying oven to achieve more uniform gas flow has become a problem that needs to be solved. The specific implementation method described below can effectively solve this problem.
[0045] The following describes the negative pressure drying oven involved in this disclosure in detail, taking a sheet-like object to be dried as an example and in conjunction with the accompanying drawings.
[0046] Figure 1 This is a schematic diagram showing the negative pressure drying oven 1 according to an embodiment of the present disclosure. Figure 2 This is a schematic diagram showing the internal structure of the negative pressure drying oven 1 according to the embodiments of this disclosure. Figure 3 This is a schematic diagram showing another internal structure of the negative pressure drying oven 1 according to an embodiment of the present disclosure.
[0047] In this embodiment, the negative pressure drying chamber 1 may include a chamber body 10, an airflow guiding mechanism 20, a support mechanism 30, and a negative pressure mechanism 40 (see [reference]). Figure 1 In some examples, the housing 10 may have a first chamber 100. In some examples, the airflow guiding mechanism 20 and the support mechanism 30 may cooperate to form a second chamber 200. In some examples, the second chamber 200 may be connected to the first chamber 100 via the airflow guiding mechanism 20. When the object to be dried 50 is supported on the support mechanism 30 and located in the second chamber 200, the gas inside the first chamber 100 is extracted by the negative pressure mechanism 40, which can create a negative pressure condition or a vacuum condition in the first chamber 100. The negative pressure airflow, after passing through the airflow guiding mechanism 20, can further create a negative pressure condition or a vacuum condition in the second chamber 200. The object to be dried 50 can form a dried material after drying under negative pressure conditions. The solvent on the surface of the object to be dried 50 can form uniform crystals after drying under negative pressure conditions.
[0048] See in some examples Figure 2 The housing 10 may include a top cover 110 and a bottom plate 120. The airflow guiding mechanism 20 may include a cover 210, a bending portion 220, and a guide portion 240. The support mechanism 30 may include a guide plate 310 and a support member 320. The negative pressure mechanism 40 may include a pump body 400 and a gas pipe 410. The negative pressure mechanism 40 is connected to the housing 10 to control the air pressure inside the housing 10. The airflow guiding mechanism 20 and the support mechanism 30 are located inside the housing 10.
[0049] In some examples, housing 10 may include a top cover 110 and a bottom plate 120 (see [reference]). Figure 2 In some examples, the top cover 110 can be detachably combined with the bottom plate 120. When the top cover 110 and the bottom plate 120 are combined, a sealed first chamber 100 can be formed. In some examples, when the top cover 110 and the bottom plate 120 are separated, it is convenient to transfer the object to be dried 50 into the chamber 10 or to remove the dried material from the chamber 10 after the object to be dried 50 has been dried.
[0050] In some examples, the negative pressure mechanism 40 may include a pump body 400 and a gas conduit 410 (see [link]). Figure 2In some examples, the gas conduit 410 may be connected to the first chamber 100. In some examples, the pump body 400 may change the gas pressure in the first chamber 100 via the gas conduit 410, and the negative pressure airflow may change the gas pressure in the second chamber 200 via the airflow guiding mechanism 20.
[0051] In some examples, the base plate 120 may have an exhaust port 130 (see Figure 2 and Figure 3 The exhaust port 130 is connected to the gas passage 410 of the negative pressure mechanism 40 to form a connection point for airflow exchange between the negative pressure mechanism 40 and the first chamber 100. In some examples, there may be one exhaust port 130, which may be located at the center point of the base plate 120. Thus, by evacuating the housing 10 through the exhaust port 130, the gas flowing into the first chamber 100 from the second chamber 200 can be more uniform. In some examples, there may be multiple exhaust ports 130. In some examples, multiple exhaust ports 130 are symmetrically distributed along the center of the base plate 120. In this case, by evacuating the housing 10 through the symmetrically distributed multiple exhaust ports 130, the negative pressure in the first chamber 100 can be made approximately uniform, thereby making the gas flowing into the first chamber 100 from the second chamber 200 more uniform. In some examples, there may be two exhaust ports 130 (see...). Figure 3 ).
[0052] Figure 4 It shows Figure 2 A schematic diagram of the gas flow inside the negative pressure drying oven 1 during operation. Figure 4 In the diagram, the arrows schematically indicate the direction of gas flow.
[0053] exist Figure 4 In the example shown, under the suction of the negative pressure mechanism 40, the first chamber 100 and the second chamber 200 generate negative pressure, and the gas begins to flow. The gas in the second chamber 200 enters the first chamber 100 through multiple through holes 230 and multiple air holes 241 located in the guide section 240, and finally flows into the pump body 400 through the connection between the negative pressure mechanism 40 and the first chamber 100.
[0054] In some examples, the airflow guiding mechanism 20 may include a housing 210 (see...) Figure 2In some examples, the housing 210 may cover the support mechanism 30. In some examples, the housing 210 and the support mechanism 30 may be combined to form a second chamber 200. In some examples, the object to be dried 50 may be placed in the second chamber 200 for drying. In some examples, the housing 210 may have housing sidewalls 211. In some examples, the housing 210 may be hollow cylindrical. For example, in some examples, the housing 210 may be hollow prismatic or cylindrical. Figure 2 In the example shown, the housing 210 can be hollow prism-shaped and formed by connecting four housing sidewalls 211 with cuboid outer contours in sequence.
[0055] In some examples, the airflow guiding mechanism 20 may also include a through-hole 230 formed in the sidewall 211 of the housing (see Figure 2 Therefore, gas located in the second chamber 200 can flow into the first chamber 100 through the through-hole 230. In some examples, there can be multiple through-holes 230. In some examples, the multiple through-holes 230 can be evenly distributed along the circumference of the cover 210. In this case, the gas in the second chamber 200 flows into the first chamber 100 through the evenly distributed multiple through-holes 230, which can make the airflow into the first chamber 100 more uniform.
[0056] Figure 5a This is a first schematic diagram showing the airflow guiding mechanism 20 according to an embodiment of the present disclosure. Figure 5b It shows Figure 5a A side view of the airflow guiding mechanism 20 involved. Figure 5c It shows Figure 5a A side cross-sectional view of the airflow guiding mechanism 20 involved. (To better and more intuitively illustrate the side cross-sectional view of the airflow guiding mechanism 20 involved in this figure, Figure 5c Some lines have been omitted.
[0057] In some examples, the airflow guiding mechanism 20 may also include a bend 220 formed in the housing 210. See also [other examples]. Figure 5a , Figure 5b and Figure 5c The cover sidewall 211, the bend 220 and the guide 240 can form a stepped structure, with the guide 240 formed in the inner ring of the bend 220.
[0058] In some examples, the bend 220 can be used to cover the edge of the upper surface of the object to be dried 50. In other words, projecting along a direction orthogonal to the upper surface of the object to be dried 50, the bend 220 can cover the outer periphery of the object to be dried 50. As mentioned above, when drying the object to be dried 50 by negative pressure, the gas velocity and flow rate at the edge of the object to be dried 50 are usually greater than those at the center of the object to be dried 50. This may result in inconsistent solvent crystallization rates at the center and the edge of the object to be dried, leading to poor drying effect. In this embodiment, by configuring the bend 220 to be located above the object to be dried 50 and covering the outer periphery of the upper surface of the object to be dried 50, the gas flow at the edge of the object to be dried 50 can be restricted, balancing the gas flow rate and velocity at the center and the edge of the object to be dried 50. This facilitates uniform solvent crystallization on the object to be dried 50, resulting in uniformly dried material.
[0059] In some examples, the bend 220 can completely cover the edge of the upper surface of the object to be dried 50. Therefore, the bend 220 can better restrict gas flow at the edge of the object to be dried 50.
[0060] In some examples, the bend 220 can be a portion extending inward from the sidewall 211 of the housing. That is, the bend 220 can be a structure that extends inward from the inner sidewall of the housing 210.
[0061] In some examples, the bend 220 can be integrally formed with the housing 210, allowing gas to flow along the desired trajectory of the seamless inner wall of the housing.
[0062] In some examples, the bend 220 can be detachably mounted on the housing 210. This allows for easy replacement of different types of bends 220, enabling the bends 220 to be adapted to different sizes and types of objects to be dried. For example, a wider bend 220 can be used for objects with a larger drying area.
[0063] In some examples, the width of the bend 220 can be from 1 mm to 15 mm. The width of the bend 220 can be adjusted according to the type of different items 50 to be dried.
[0064] In some examples, the distance between the bend 220 and the object to be dried 50 can be a predetermined distance. In some examples, the distance between the bend 220 and the object to be dried 50 can be 5 mm to 15 mm. In some examples, preferably, the distance between the bend 220 and the object to be dried 50 can be 10 mm. In this case, the bend 220 and the object to be dried 50 will not be in direct contact, so that the organic solvent on the object to be dried 50 will not come into contact with the bend 220, which can prevent the part of the object to be dried 50 corresponding to the bend 220 from being insufficiently dried and thus failing to meet the drying requirements. In some examples, the distance between the bend 220 and the object to be dried 50 should not be too far, so that the bend 220 can better restrict the gas flow at the edge of the object to be dried 50, prevent the gas flow rate at the edge of the object to be dried 50 from being too fast, and make the gas flow on the surface of the object to be dried 50 more uniform.
[0065] In some examples, the bend 220 may be parallel to the object to be dried 50. In this case, the distance between the upper surface of the object to be dried 50 opposite to the bend 220 (i.e., at the edge of the object to be dried 50) and the bend 220 is the same, and the gas flow rate is substantially uniform, which is conducive to uniform solvent drying on the upper surface of the object to be dried 50.
[0066] In some examples, the negative pressure drying oven 1 may include a sensor. The sensor can be used to sense the vertical distance between the bend 220 and the object to be dried 50. The support mechanism 30 may be configured to be height adjustable. In this case, by sensing the vertical distance between the bend 220 and the object to be dried 50 by the sensor, and then adjusting the height of the support mechanism 30 according to this vertical distance, the bend 220 and the object to be dried 50 can be kept at a preset distance, which is beneficial for the uniform drying of the object to be dried 50.
[0067] In some examples, the sensor can be an infrared sensor. In some examples, the sensor can be located at the bottom or side of the bend 220. When the object to be dried 50 is placed, the cover 210 is closed, and the infrared sensor located on the bend 220 starts working, measuring the distance between the bend 220 and the object to be dried 50 placed on the support mechanism 30 to obtain the measured distance between the bend 220 and the object to be dried 50. When the measured distance is less than a preset distance, the support mechanism 30 can be controlled to lower so that the object to be dried 50 is away from the bend 220, and when the measured distance is equal to the preset distance, the support mechanism 30 can be controlled to stop moving; when the measured distance is greater than the preset distance, the support mechanism 30 can be controlled to raise so that the object to be dried 50 is closer to the bend 220, and when the measured distance is equal to the preset distance, the support mechanism 30 can be controlled to stop moving. In some examples, the preset distance can be a value within a certain range, and when the measured distance is within this range, the height of the support mechanism 30 does not need to be adjusted. Taking a preset distance of 8mm to 12mm as an example, when the measurement distance is within the range of 8mm to 12mm, the height of the support mechanism 30 does not need to be adjusted.
[0068] In some examples, the airflow guiding mechanism 20 may further include a guide section 240 (see Figure 2). The guide section 240 may be disposed on the bend 220. In some examples, the guide section 240, the bend 220, and the object to be dried 50 may form a guide cavity 242. In some examples, the guide section 240 may have an air hole 241 communicating with the guide cavity 242 and the first chamber 100. In this case, the negative pressure airflow above the object to be dried 50 is located in the guide cavity 242 and then enters the first chamber 100 through the air hole 241.
[0069] In some examples, the flow guide cavity 242 may be formed directly above the bend 220. In some examples, the flow guide cavity 242 may enclose the bend 220. In some examples, the flow guide 240 may be an integrally formed structure with the housing 210. In other examples, the flow guide 240 may be detachably fitted onto the housing 210.
[0070] In some examples, there can be multiple vents 241. In some examples, the multiple vents 241 can be evenly distributed along the circumference of the guide cavity 242. In this case, the guide cavity 242 and the first chamber 100 can be connected through the multiple vents 241. The negative pressure airflow entering the first chamber 100 via the guide cavity 242 is evenly dispersed by the evenly distributed multiple vents 241, making the airflow flowing into the first chamber 100 through the guide cavity 242 more uniform. Figure 5aAs shown, multiple vents 241 can be neatly arranged around the perimeter of the guide cavity 242 to form a ring of vents. It should be understood that the illustration should not be construed as a limitation on the arrangement or shape of the multiple vents 241.
[0071] Figure 6a This is a second schematic diagram showing the airflow guiding mechanism 20 according to an embodiment of the present disclosure. Figure 6b It shows Figure 6a A side view of the airflow guiding mechanism 20 involved. Figure 6c It shows Figure 6a A side cross-sectional view of the airflow guiding mechanism 20 involved. (To better and more intuitively illustrate the side cross-sectional view of the airflow guiding mechanism 20 involved in this figure, Figure 6c Some lines have been omitted.
[0072] In other examples, see Figure 6a , Figure 6b and Figure 6c The bending portion 220 may be a rib formed on the side wall 211 of the cover. The bending portion 220 separates the second chamber 200 from the object to be dried 50 so as to form a guide portion 240 above the bending portion 220.
[0073] Figure 7 This is a side cross-sectional view showing a third embodiment of the airflow guiding mechanism 20 according to the present disclosure. (This is to better and more intuitively show the side cross-sectional view of the airflow guiding mechanism 20 according to the present drawing.) Figure 7 Some lines have been omitted.
[0074] See in some examples Figure 7 The housing 210 may not have a top wall. In some examples, the height of the housing 210 may be approximately the same as the height of the first chamber 100. The top of the housing 210 abuts against the bottom of the upper cover 110, thereby forming a second chamber 200 inside the housing 210. In some examples, the top of the side wall of the housing 210 may have an outwardly extending portion (see...). Figure 7 Thus, when the cover 210 abuts against the top cover 110, the outward extension of the cover 210 can improve the airtightness of the formed second chamber 200.
[0075] In some examples, multiple through-holes 230 may be located below the object to be dried 50. In this case, the gas located below the object to be dried 50 flows into the first chamber 100 through the multiple through-holes 230, instead of flowing into the guide section 240 through the gap between the edge of the object to be dried 50 and the side wall 211 of the cover. By diverting the gas in the second chamber 200, the airflow into the first chamber 100 can be made more uniform.
[0076] By diverting the gas, it is possible to reduce the amount of gas located in the lower half flowing into the upper half through the gap between the object to be dried 50 and the cover 210, thus reducing the adverse effects on the edge of the object to be dried 50.
[0077] In some examples, the distance between the side wall 211 of the housing and the edge of the object to be dried 50 is less than 5 mm. In this case, the distance between the side wall 211 of the housing and the edge of the object to be dried 50 is very small. Under negative pressure, the gas located below the object to be dried 50 is not easy to flow into the upper part of the object to be dried 50 through the edge of the object to be dried 50. At the same time, the shape of the housing 210 that fits the object to be dried 50 can facilitate the placement of the object to be dried 50 and prevent the object to be dried 50 from moving on the support mechanism 30.
[0078] In some examples, the second chamber 200 can be divided into an upper and a lower half with the object to be dried 50 as the dividing line. Under the action of the negative pressure mechanism 40, the gas in the upper half flows into the first chamber 100 through multiple air holes 241, and the gas in the lower half flows into the first chamber 100 through multiple through holes. In this case, the gas flow in the second chamber 200 can be better divided, and the exchange of gas above and below the object to be dried 50 at the edge of the object to be dried 50, which would affect the gas flow velocity at the edge of the object to be dried 50, can be suppressed. This makes the airflow flowing into the first chamber 100 through the surface of the object to be dried 50 more uniform, thereby improving the uniformity of drying of the object to be dried 50.
[0079] In some examples, the support mechanism 30 may have a baffle 310 (see Figure 2 In some examples, projecting along a direction orthogonal to the guide plate 310, the guide plate 310 may cover the airflow guiding mechanism 20. In this case, the guide plate 310 and the cover 210 cooperate to form a second chamber 200 for drying the object 50. In some examples, projecting along a direction orthogonal to the guide plate 310, the guide plate 310 may cover the connection between the negative pressure mechanism 40 and the first chamber 100 where airflow exchange occurs. In this case, the connection between the negative pressure mechanism 40 and the first chamber 100 where airflow exchange occurs is located directly below the guide plate 310. When the negative pressure mechanism 40 performs suction, the negative pressure adsorption force generated is evenly distributed around the guide plate 310 due to the obstruction of the guide plate 310, thereby causing the gas to flow evenly from around the guide plate 310 to the connection between the negative pressure mechanism 40 and the first chamber 100 where airflow exchange occurs.
[0080] In some examples, the support mechanism 30 may also have a support member 320. In some examples, there may be multiple supports 320. In some examples, multiple supports 320 may be evenly arranged. Thus, the support member 320 can support items 50 to be dried with different drying areas. In some examples, the height of the support member 320 is adjustable. In this case, by placing items 50 to be dried with different thicknesses and adjusting the height of the support member 320, the distance between the drying surface of the item 50 and the partition 211 can always be appropriate. In some examples, the support member 320 may be referred to as a pin.
[0081] In some examples, the negative pressure drying oven 1 may further include a second sealing portion 330 that seals the second chamber 200. This improves the airtightness within the second chamber 200. In some examples, the second sealing portion 330 may be disposed on the baffle 310. In some examples, when the housing 210 and the baffle 310 are combined, the second sealing portion 330 can be used to seal the gap formed when the housing 210 and the baffle 310 are combined. In some examples, the contour of the second sealing portion 330 may match the contour of the housing 210.
[0082] In some examples, the second sealing portion 330 may be located between the upper cover 110 and the bottom plate 120. In some examples, the second sealing portion 330 may be elastic, such as an elastic rubber ring or rubber gasket. In some examples, the mating edges of the cover 210 and the guide plate 310 may have a groove that can be fitted into the second sealing portion 330, thereby improving the airtightness of the second chamber 200 and ensuring that the air pressure change within the second chamber 200 is uniform and stable.
[0083] In some examples, the base plate 120 may have a support column 121 (see Figure 2 The function of the support column 121 is to support the second chamber 200 formed by the airflow guiding mechanism 20 and the support mechanism 30, so as to facilitate the flow of negative pressure gas from the airflow guiding mechanism 20 along the inner wall of the first chamber 100 to the bottom of the guide plate 310 and into the communication point between the negative pressure mechanism 40 and the first chamber 100 for airflow exchange. In this way, the gas flowing out from the multiple circumferential air holes 241 and multiple through holes 230 of the airflow guiding mechanism 20 can be further diverted, making the airflow more uniform. In some examples, there can be multiple support columns 121 to more conveniently support the formed second chamber 200.
[0084] In such Figure 4In the example shown, when the pump body 400 of the negative pressure mechanism 40 is working, the negative pressure airflow enters the first chamber 100 through the connection between the gas pipe 410 and the air extraction port 130 of the base plate 120, thereby changing the negative pressure in the first chamber 100. When the air pressure in the first chamber 100 decreases, the gas in the second chamber 200, which has a higher air pressure, begins to flow into the first chamber 100, and this process occurs almost simultaneously. The gas in the second chamber 200 flows into the first chamber 100 through multiple air holes 241 and multiple through holes 230. During this process, the bend 220 can limit the gas flow rate at the edge of the object to be dried 50, preventing the organic solvent at the edge of the object to be dried 50 from crystallizing prematurely. The diversion effect of the multiple air holes 241 and multiple through holes 230 on the upper and lower surfaces of the object to be dried ensures the consistency of the negative pressure airflow at all parts of the object to be dried 50, so that the organic solvent on the surface of the object to be dried 50 can be dried and crystallized uniformly.
[0085] Figure 8 This is a first non-limiting schematic diagram showing the combination of the first sealing part 140 and the housing 10 according to an embodiment of the present disclosure; Figure 9 This is a second non-limiting schematic diagram showing the combination of the first sealing part 140 and the housing 10 according to an embodiment of the present disclosure.
[0086] In some examples, housing 10 may also include a first sealing portion 140 that seals the first chamber 100 (see [reference]). Figure 8 and Figure 9 Therefore, the airtightness of the housing 10 can be improved by the first sealing part 140. In some examples, the first sealing part 140 may be provided on the bottom plate 120. In some examples, when the top cover 110 and the bottom plate 120 are combined, the first sealing part 140 may be used to seal the gap formed when the top cover 110 and the bottom plate 120 are combined. In some examples, the inner contour of the first sealing part 140 may match the outer contour of the top cover 110 (see...). Figure 8 ).
[0087] In some examples, the first sealing portion 140 may be located between the upper cover 110 and the base plate 120. In some examples, the first sealing portion 140 may be resilient. For example, the first sealing portion 140 may be a resilient rubber ring or a resilient rubber gasket. In some examples, the mating edges of the upper cover 110 and the base plate 120 may have a groove that can be fitted into the first sealing portion 140, which can be fitted into the groove (see [link]). Figure 8 Therefore, the airtightness of the housing 10 can be improved, which is conducive to the uniform and stable change of air pressure inside the housing 10.
[0088] According to this disclosure, a negative pressure drying oven can be provided to uniformly crystallize solvents on a substance to be dried by guiding the uniform flow of gas under negative pressure.
[0089] While the present disclosure has been specifically described above in conjunction with the accompanying drawings and examples, it is to be understood that the foregoing description does not limit the present disclosure in any way. Those skilled in the art can make modifications and variations to the present disclosure as needed without departing from its essential spirit and scope, and all such modifications and variations shall fall within the scope of the present disclosure.
Claims
1. A negative pressure drying oven, characterized in that, The device includes a housing having a first chamber, a support mechanism disposed within the first chamber for supporting the object to be dried, an airflow guiding mechanism cooperating with the support mechanism to form a second chamber containing the object to be dried, and a negative pressure mechanism communicating with the first chamber for generating negative pressure. The airflow guiding mechanism includes a cover covering the support mechanism to form the second chamber, a plurality of through holes formed on the side wall of the cover, a bent portion formed on the side wall of the cover to cover the upper surface of the object to be dried, a guide portion disposed on the bent portion and forming a guide cavity with the bent portion and the object to be dried, and a plurality of air holes located on the guide portion. The second chamber communicates with the first chamber via the air holes and the through holes. The plurality of air holes are evenly distributed along the circumference of the guide cavity, and the plurality of through holes are evenly distributed along the circumference of the cover. The air holes are located above the object to be dried, and the plurality of through holes are located below the object to be dried.
2. The negative pressure drying oven according to claim 1, characterized in that: The bent portion is the part that extends inward from the inner sidewall of the housing.
3. The negative pressure drying oven according to claim 1, characterized in that: The plurality of air holes form a ring of air holes around the flow guide cavity.
4. The negative pressure drying oven according to claim 1, characterized in that: The flow guide is an integrally formed structure with the cover.
5. The negative pressure drying oven according to claim 1, characterized in that: The distance between the bent portion and the object to be dried is 5 mm to 15 mm.
6. The negative pressure drying oven according to claim 1, characterized in that: The distance between the bent portion and the object to be dried is a predetermined distance.
7. The negative pressure drying oven according to claim 1, characterized in that: Under the action of the negative pressure mechanism, the plurality of air holes and the plurality of through holes allow the gas above and below the object to be dried to enter the first chamber through the plurality of air holes and the plurality of through holes, respectively.
8. The negative pressure drying oven according to claim 1, characterized in that: The support mechanism has a baffle plate projected along a direction orthogonal to the baffle plate, the baffle plate covering the airflow guiding mechanism and the connection between the negative pressure mechanism and the first chamber for airflow exchange.
9. The negative pressure drying oven according to claim 1, characterized in that: The distance between the side wall of the cover and the edge of the object to be dried is less than 5 mm.
10. The negative pressure drying oven according to claim 1, characterized in that: It also includes a first sealing part for sealing the first chamber and a second sealing part for sealing the second chamber.