Optical device for semiconductor elements

Abstract

The application relates to an optical device for a semiconductor element, comprising an optical microscope and an adjusting module, the adjusting module being sleeved outside the optical microscope and comprising: a first adjusting block and a second adjusting block, at least one of which is connected with the optical microscope; a guide mechanism connected with the first adjusting block and the second adjusting block and restricting the rotation freedom of the first adjusting block and the second adjusting block in the axial direction; and a lifting adjusting mechanism for driving the first adjusting block and / or the second adjusting block to move relatively to adjust the lifting of the optical microscope. The guide mechanism is connected with the first adjusting block and the second adjusting block and restricts the movement of the first adjusting block and the second adjusting block in the axial direction, so that the rotation of the optical microscope during the adjustment can be avoided, the stability of the optical microscope during the adjustment is ensured, unnecessary rotation movement is prevented, and a micro image of the semiconductor element in the positive direction can be more accurately obtained.

Description

Technical Field

[0001] This application relates to an optical system and system for semiconductor devices, and more particularly to an optical device for semiconductor devices. Background Technology

[0002] In electron beam inspection equipment in the semiconductor field, optical microscopy devices (OM devices) are needed to observe the pattern features on the surface of the target object (such as a wafer) and capture relevant features for preliminary observation and positioning of the target object.

[0003] Existing OM (Optical Marking) mechanism adjustment methods are typically very complex, resulting in high learning costs and low efficiency for operators when adjusting the working distance, wasting significant manpower and time, and thus increasing overall production costs. Furthermore, the applicant recognizes that after adjusting the working distance, when the target object remains unchanged, the image rotates during adjustment due to the mechanism's motion principle, greatly increasing the difficulty of correcting the image to a positive orientation. To mitigate this impact, the OM mechanism's adjustment structure needs to be changed or modified. Additionally, existing OM mechanisms are bulky and occupy relatively much space, increasing the difficulty of system design and installation for optical inspection systems with limited space or requiring compact layout.

[0004] The background discussion above is intended to assist the reader only and is not intended to limit the innovations described herein. Therefore, the above discussion should not be construed as indicating that any particular component of a prior system is unsuitable for use with the innovations described herein, nor is it intended to indicate that any component is essential for implementing the innovations described herein. Summary of the Invention

[0005] In view of the above-mentioned technical problems, the purpose of this application is to provide an optical device for semiconductor devices.

[0006] In a first aspect of this application, an optical device for a semiconductor element is provided, including an optical microscope and an adjustment module. The adjustment module is fitted outside the optical microscope and includes: a first adjustment block and a second adjustment block, wherein at least one of them is connected to the optical microscope; a guide mechanism, connecting the first adjustment block and the second adjustment block and constraining the rotational freedom of the first adjustment block and the second adjustment block in the axial direction; and a lifting adjustment mechanism, the first adjustment block and the second adjustment block, for driving the first adjustment block and / or the second adjustment block to move relative to each other to adjust the lifting of the optical microscope.

[0007] In a further embodiment of this application, the guiding mechanism includes multiple pins, and a first positioning hole and a second positioning hole adapted to the pins; the pins are arranged along the axial direction of the first adjusting block, the first positioning hole is disposed on the first adjusting block, and one end of the pin is connected to the first adjusting block through the first positioning hole; the second positioning hole is disposed on the second adjusting block, and the other end of the pin is connected to the second adjusting block through the second positioning hole.

[0008] In the optional embodiments of this application, the lifting and adjusting mechanism is a lifting nut or a smooth cylinder; the second adjusting block includes a first column structure and a second column structure, the inner wall of the lifting nut includes a first region and a second region, the first region is connected to the outer peripheral wall of the first column structure, and the second region is connected to the outer peripheral wall of the first adjusting block.

[0009] In a further embodiment of this application, the lifting adjustment mechanism is a lifting nut, and the first region and the second region have different threaded connection directions.

[0010] In a further embodiment of this application, the adjustment module further includes an anti-detachment mechanism, which is disposed between the first adjustment block and the second adjustment block and includes: a stud, one end of which is connected to the first adjustment block and the other end of which is connected to the second adjustment block; and an elastomer disposed on the outer periphery of the stud and connected between the first adjustment block and the second adjustment block.

[0011] In a further embodiment of this application, the adjustment module further includes a fixing mechanism, which includes: a clamping fixing block, which is annular and has an opening at its edge; a locking screw, which is disposed at the opening and adjusts the size of the opening to lock / unlock the clamping fixing block; and a plurality of first mounting holes adapted to first positioning holes for connecting the first adjustment block and the clamping fixing block.

[0012] In a further embodiment of this application, the first adjusting block includes a first central large hole, the second adjusting block includes a second central large hole, and the clamping fixing block includes a third central large hole; the optical microscope device passes through the first central large hole, the second central large hole, and the third central large hole respectively, so as to fit the adjusting module onto the optical microscope device; the optical microscope device is locked by adjusting the size of the locking screw in the third central large hole; when the lifting nut adjusts the movement of the first adjusting block, the clamping fixing block moves accordingly to adjust the lifting of the optical microscope device.

[0013] In a further embodiment of this application, the optical device also includes a vacuum placement module, which includes: a sealed chamber including a sealed groove for holding semiconductor components, and an observation window provided in the sealed chamber; a sealing ring disposed inside the sealed groove; a flange block including a plurality of second mounting holes, the second mounting holes and the observation window being connected by bolts; and a buffer rubber ring connected to the flange block, which provides a vacuum environment for the sealed groove by moving the flange block to press the observation window.

[0014] In a further embodiment of this application, the optical device also includes a mounting module, which includes a base portion and a sleeve portion; a window is provided at the second column structure, and a vertical fixing hole and a horizontal set screw hole are provided at the window. A flat spring pad passes through the fixing hole to connect the second adjusting block and the sleeve portion, and a set screw passes through the set screw hole to lock the optical microscope device.

[0015] In a further embodiment of this application, the optical microscope device includes a lens section, a main body section, and a signal transmission section, wherein the main body section, the lens section, and the transmission section are all detachably connected at their connection points.

[0016] In summary, this application provides an optical device including an optical microscope and an adjustment module. The adjustment module includes a first adjustment block, a second adjustment block, a guide mechanism, and a lifting adjustment mechanism. At least one adjustment block is connected to the optical microscope, and the lifting adjustment mechanism drives the first and / or second adjustment blocks to move relative to each other, thereby achieving height adjustment of the optical microscope to adapt to different height requirements.

[0017] The relative movement of the first and second adjustment blocks, driven by a lifting and adjusting mechanism, allows for precise adjustment of the lifting position of the optical microscope. The optical microscope is nested within the adjustment module, ensuring a compact structure. A guide mechanism connects the first and second adjustment blocks, constraining their rotational freedom in the axial direction. This prevents rotation of the optical microscope during adjustment, ensuring its stability and preventing unnecessary movement in other directions when adjusting the height. This results in more accurate acquisition of microscopic images of forward-facing semiconductor components.

[0018] Other features and advantages of the embodiments of the present invention will be described in the following detailed description section. Attached Figure Description

[0019] To more clearly illustrate the specific embodiments of this application or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 An exploded view of the structure of an optical device for semiconductor elements provided in an embodiment of the present invention;

[0021] Figure 2 This is a cross-sectional view from a first perspective of the optical device for semiconductor devices provided in an embodiment of the present invention;

[0022] Figure 3This is a cross-sectional view from a second perspective of the optical device for semiconductor elements provided in an embodiment of the present invention;

[0023] Figure 4 This is a schematic diagram of the structure of the first adjustment block in the optical device provided in an embodiment of the present invention;

[0024] Figure 5 This is a schematic diagram of the structure of the second adjustment block in the optical device provided in an embodiment of the present invention;

[0025] Figure 6 This is a partial cross-sectional view of the lifting and adjusting mechanism of the optical device provided in an embodiment of the present invention;

[0026] Figure 7 This is a schematic diagram of the fixing mechanism in the optical device provided in an embodiment of the present invention;

[0027] Figure 8 This is a schematic diagram of the structure of the vacuum placement module in the optical device provided in an embodiment of the present invention;

[0028] Figure 9 This is a schematic diagram of the flange block in the optical device provided in an embodiment of the present invention; and

[0029] Figure 10 This is a cross-sectional view of the optical microscope device in the optical equipment provided in an embodiment of the present invention.

[0030] Explanation of reference numerals in the attached figures:

[0031] 100. Optical equipment;

[0032] 10. Optical microscopy devices;

[0033] 11. Signal transmission unit; 12. Main body; 13. Lens unit;

[0034] 20. Adjust the module;

[0035] 21. First adjusting block; 211. First connecting hole; 212. Window; 213. Fixing hole; 214. Set screw hole; 21a. First column structure; 21b. Second column structure;

[0036] 22. Second adjusting block; 221. Second connecting hole;

[0037] 23. Guiding mechanism; 231. Pin; 232. First positioning hole; 233. Second positioning hole;

[0038] 24. Lifting and adjusting mechanism; 241. First zone; 242. Second zone;

[0039] 25. Fixing mechanism; 251. Clamping fixing block; 252. Locking screw; 253. First mounting hole; 2511. Opening; 2512. Locking hole;

[0040] 26. Anti-detachment mechanism; 261. Stud; 262. Elastomer;

[0041] 30. Install the mounting base module;

[0042] 31. Sleeve section;

[0043] 32. Base section;

[0044] 40. Vacuum storage module;

[0045] 41. Sealed chamber; 411. Sealing groove;

[0046] 42. Observation window;

[0047] 43. Sealing ring;

[0048] 44. Flange block; 441. Second mounting hole;

[0049] 45. Bolts;

[0050] 46. ​​Buffer rubber ring;

[0051] A. First central large hole; B. Second central large hole; C. Third central large hole; D. Fourth central large hole; a. Edge portion. Detailed Implementation

[0052] To make the above and other features and advantages of this application clearer, the application is further described below with reference to the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explanation to those skilled in the art, and are exemplary only, not restrictive.

[0053] In the following description, numerous specific details are set forth to provide a thorough understanding of this application. However, it will be apparent to those skilled in the art that the specific details are not required to practice this application. In other instances, well-known steps or operations have not been described in detail to avoid obscuring this application.

[0054] To make the above and other features and advantages of the present invention clearer, the invention will be further described below with reference to the accompanying drawings. It should be understood that the specific embodiments given herein are for the purpose of explanation to those skilled in the art and are exemplary only, not restrictive.

[0055] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0056] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0057] Please see Figure 1 , Figure 1 This is an exploded view of the structure of an optical device for semiconductor elements provided in an embodiment of the present invention.

[0058] According to a general inventive concept of the present invention, an optical device 100 for semiconductor devices is provided; including an optical microscope device 10 and an adjustment module 20, wherein the adjustment module 20 is fitted outside the optical microscope device 10, and the optical microscope device 10 can move freely up and down in the adjustment module 20.

[0059] The optical microscope device 10 is the main body of the optical device 100, used to magnify and observe the details of semiconductor components. The adjustment module 20 is used to support and adjust the position and height of the optical microscope device 10. It is fully fitted outside the optical microscope device, and the adjustment module 20 allows the optical microscope device 10 to move freely up and down inside it to meet different observation needs and obtain a suitable observation height.

[0060] The adjustment module 20 includes: a first adjustment block 21, a second adjustment block 22, a guide mechanism 23, and a lifting adjustment mechanism 24;

[0061] At least one of the first adjusting block 21 and the second adjusting block 22 is connected to the optical microscope device 10 to drive the optical microscope device 10 to move. The connection is not limited to a direct connection between the first adjusting block 21 and the second adjusting block 22 and the optical microscope device 10, but can also cover indirect connections through other structures, all of which fall within the protection scope of the embodiments of the present invention.

[0062] The guide mechanism 23 serves as a structure that defines the movement direction of the first adjusting block 21 and the second adjusting block 22. It connects the first adjusting block 21 and the second adjusting block 22 and constrains the rotational degrees of freedom of the first adjusting block 21 and the second adjusting block 22 in the axial direction, so that the first adjusting block 21 and the second adjusting block 22 can only move in the axial direction, and controls the accuracy and stability of the mechanical system. The central axes of the first adjusting block 21 and the second adjusting block 22 are aligned. The "axial direction" can also be directly defined as the height direction. Similarly, the "rotational degrees of freedom" are the degrees of freedom of the first adjusting block 21 and the second adjusting block 22 to rotate around their own axes.

[0063] Among some alternative solutions based on the general inventive concept, the guide mechanism 23 can adopt a slider guide, sleeve guide, ball guide, etc.

[0064] In some alternative embodiments based on this general inventive concept, the lifting adjustment mechanism 24 connects the first adjustment block 21 and the second adjustment block 22, and is used to drive the first adjustment block 21 and / or the second adjustment block 22 to move relative to each other, so as to adjust the lifting of the optical microscope device. It is understood that the lifting adjustment mechanism 24 is used to control the lifting of the optical microscope device 10 in order to adjust the focal length and sharpness of the observed sample.

[0065] Among some alternative solutions based on the general inventive concept, the lifting adjustment mechanism 24 may be a threaded lifting mechanism, a hydraulic lifting mechanism, or a gear lifting mechanism.

[0066] It is understood that when the lifting adjustment mechanism 24 is a threaded lifting mechanism, it can be threadedly connected to the first adjusting block 21 and the second adjusting block 22. The first adjusting block 21, the second adjusting block 22, and the lifting adjustment mechanism 24 adopt a similar fit to a nut or threaded rod and a guide rail. That is, when the nut or threaded rod (first adjusting block 21, second adjusting block 22) is screwed into the guide rail (lifting adjustment mechanism 24), due to the characteristics of the helix, the first adjusting block 21 and the second adjusting block 22 will rise or fall along the thread of the guide rail (lifting adjustment mechanism 24). Conversely, by rotating the lifting adjustment mechanism 24, the lifting movement of the first adjusting block 21 and the second adjusting block 22 can be controlled, that is, the height adjustment of the optical microscope device 10 can be realized.

[0067] Hydraulic lifting mechanisms include a cylinder and a piston inside the cylinder. A first adjusting block 21 or a second adjusting block 22 is connected to the piston as an actuator. When liquid is forced into the cylinder, the volume decreases, and the liquid exerts a force on the piston, causing the piston and the actuator connected to the piston to rise. When it is necessary to lower the height, the speed at which the liquid flows into the cylinder can be adjusted by a control valve. Gear lifting mechanisms, on the other hand, are based on the movement of gears, transmitting force between gears of different sizes to achieve vertical lifting. Hydraulic lifting mechanisms offer smooth lifting and good speed controllability; while gear lifting mechanisms and threaded lifting mechanisms have relatively simple structures and lower costs.

[0068] As described above, the first adjusting block 21 and the second adjusting block 22 can move simultaneously or individually.

[0069] In summary, the optical equipment includes an optical microscope device 10 and an adjustment module 20. The adjustment module 20 includes a first adjustment block 21, a second adjustment block 22, a guide mechanism 23, and a lifting adjustment mechanism 24. At least one adjustment block is connected to the optical microscope device 10. The lifting adjustment mechanism 24 drives the first adjustment block 21 and / or the second adjustment block 22 to move relative to each other, thereby adjusting the height of the optical microscope device 10 to accommodate different height requirements. By driving the first adjustment block 21 and the second adjustment block 22 to move relative to each other axially through the lifting adjustment mechanism 24, the lifting position of the optical microscope device 10 can be precisely adjusted.

[0070] Meanwhile, the guide mechanism 23 connects the first adjustment block 21 and the second adjustment block 22 and constrains them to move only in the axial direction. This can prevent the optical microscope device 10 from rotating during the adjustment process, ensure the stability of the optical microscope device 10 during the adjustment process, prevent unnecessary rotational movement, and thus obtain a more accurate microscopic image of the forward semiconductor device.

[0071] Please continue reading. Figure 1 and combined Figure 2 , Figure 3 , Figure 2 This is a cross-sectional view from a first perspective of the optical device 100 for semiconductor devices provided in an embodiment of the present invention. Figure 3 This is a cross-sectional view from a second perspective of an optical device 100 for semiconductor elements provided in an embodiment of the present invention.

[0072] Based on this concept, the following is a feasible implementation:

[0073] The optical device 100 includes an optical microscope 10, an adjustment module 20, a mounting module 30, and a vacuum placement module 40.

[0074] The optical microscope device 10 includes a signal transmission unit 11, a main body 12, and a lens 13. After the adjustment module 20 and the mounting module 30 are connected, the optical microscope device 10 is inside the adjustment module 20. The signal transmission unit 11 protrudes from the top of the adjustment module 20 to make electrical signal connections with the outside world. The main body 12 is placed inside the adjustment module 20, and the lens 13 is placed inside the mounting module 30.

[0075] Please continue reading. Figures 1 to 6 , Figure 4 This is a schematic diagram of the structure of the first adjustment block 21 in the optical device 100 provided in an embodiment of the present invention; Figure 5 This is a schematic diagram of the structure of the second adjustment block 22 in the optical device 100 provided in an embodiment of the present invention. Figure 6 This is a partial cross-sectional view of the optical device 100 provided in an embodiment of the present invention within the lifting and adjusting mechanism 24.

[0076] In this specific embodiment, the guide mechanism 23 includes multiple pins 231, a first positioning hole 232, and a second positioning hole 233.

[0077] The pin 231 is arranged along the axial direction of the first adjusting block 21 and is connected to one end of the first adjusting block 21 through the first positioning hole 232. The first positioning hole 232 is provided on the first adjusting block 21, while the second positioning hole 233 is provided on the second adjusting block 22, and the other end of the pin 231 is connected to the second adjusting block 22 through the second positioning hole 233.

[0078] The lifting adjustment mechanism 24 can be either a lifting nut or a light tube, used to control the lifting movement of the adjustment module.

[0079] The guide mechanism 23, through the connection of pin 231 and the first positioning hole 232 and the second positioning hole 233, achieves the relative fixation and positioning of the first adjusting block 21 and the second adjusting block 22. Simultaneously, the lifting adjustment mechanism 24 is designed to control the lifting movement of the adjustment module 20. This design provides stable lifting adjustment functionality to meet the adjustment requirements of the optical microscope under different observation needs.

[0080] join Figure 4 and Figure 6 The first adjusting block 21 includes a first column structure 21a and a second column structure 21b; the first column structure 21a and the second column structure 21b have different diameters so that an edge portion a is reserved at the connection between the first column structure 21a and the second column structure 21b.

[0081] The inner wall of the lifting adjustment mechanism 24 is divided into a first region 241 and a second region 242. The first region 241 is connected to the outer peripheral wall of the first column structure 21a and is supported by the edge a at the bottom. The second region 242 is connected to the outer peripheral wall of the second adjustment block 22.

[0082] Furthermore, when the lifting adjustment mechanism 24 is a lifting nut, the first region 241 and the second region 242 have different threaded connection directions (e.g., one clockwise thread and one counterclockwise thread). Because the threaded connection directions are opposite, the different threads in the two regions have a certain mutual restraining effect, enhancing the self-locking property of the lifting adjustment mechanism 24. Without external force, the lifting adjustment mechanism 24 can maintain a stable position at the selected height, improving its safety and stability. The different threaded connection directions allow for more precise adjustment, enabling fine-tuning of the lifting height as needed. Simultaneously, the threads in the two regions adjust to each other, balancing the load and reducing damage to the structure and components, thus extending the lifespan of the lifting adjustment mechanism 24.

[0083] In an alternative embodiment of the present invention, the lifting adjustment mechanism 24 can also be a light tube. When adjusting the height, the lifting adjustment mechanism can be directly raised to an appropriate height, and the lifting adjustment mechanism 24 can be directly fixed by a locking structure, which can also achieve the same function.

[0084] Please continue reading. Figure 1 and Figure 7 , Figure 7 This is a schematic diagram of the structure of the fixing mechanism 25 in the optical device 100 provided in an embodiment of the present invention;

[0085] The adjustment module 20 also includes a fixing mechanism 25, which includes a clamping fixing block 251, a locking screw 252, and multiple first mounting holes 253. The clamping fixing block 251 is used to lock the optical microscope device 10 and fix it to the second adjustment block 22, serving as an intermediate connection.

[0086] Furthermore, the clamping and fixing block 251 has an unclosed circular structure, that is, an opening 2511 is provided at the edge; a locking hole 2512 is provided through the opening 2511, and a locking screw 252 is provided at the locking hole 2512 to adjust the size of the opening 2511 to lock / unlock the clamping and fixing block 251.

[0087] Furthermore, multiple first mounting holes 253 and first positioning holes 232 are adapted to connect the second adjusting block 22 and the clamping fixing block 251, so that the fixing mechanism 25 and the second adjusting block 22 form a connection relationship.

[0088] Specifically, there are two first mounting holes 253 arranged diagonally, and four first positioning holes 232 in a rectangular matrix. That is, when the clamping and fixing block 251 is rotated 180 degrees, it can also be connected with the first positioning holes 232 to improve the foolproof function.

[0089] Please continue reading. Figure 1 , Figure 4 and Figure 5 The adjustment module 20 also includes an anti-detachment mechanism 26, which is disposed between the first adjustment block 21 and the second adjustment block 22. The anti-detachment mechanism 26 includes: a stud 261, one end of which is connected to the first adjustment block 21 and the other end of which is connected to the second adjustment block 22; and an elastic body 262, which is disposed on the outer periphery of the stud 261 to provide preload and prevent the first adjustment block 21 and the second adjustment block 22 from falling off outside their stroke.

[0090] As can be understood, stud 261 is the connecting element of the anti-detachment mechanism, with one end connected to the first adjusting block 21 and the other end connected to the second adjusting block 22. The function of stud 261 is to maintain the position and stability of the two adjusting blocks through its connection with them. An elastomer 262 is disposed on the outer periphery of stud 261, providing a preload to prevent the first adjusting block 21 and the second adjusting block 22 from falling off outside their travel range. The elastomer 262 can be a spring or other material with a certain degree of elasticity; it applies appropriate force to maintain good contact between the adjusting blocks, preventing the first adjusting block 21 and the second adjusting block 22 from accidentally loosening or detaching. The presence of the anti-detachment mechanism 26 also improves the safety of the entire device and reduces the potential risk of damage.

[0091] Specifically, the first adjusting block 21 is provided with a first connecting hole 211, and the second adjusting block 22 is provided with a second connecting hole 221, through which the anti-detachment mechanism 26 is connected.

[0092] Please continue reading. Figure 1 and Figure 8 and Figure 9 , Figure 8 This is a schematic diagram of the structure of the vacuum placement module 40 in the optical device 100 provided in an embodiment of the present invention; Figure 9 This is a schematic diagram of the structure of the flange block 44 in the optical device 100 provided in an embodiment of the present invention.

[0093] The optical device 100 also includes a vacuum placement module 40, which plays a role in achieving vacuum sealing and observation of semiconductor components in the optical device 100.

[0094] The vacuum placement module 40 includes a sealed chamber 41, an observation window 42, a sealing ring 43, a flange block 44, bolts 45, and a buffer rubber ring 46. Specifically, the sealed chamber 41 has a sealing groove 411 for accommodating semiconductor components (such as wafers). An observation window 42 is located at the top of the sealed chamber 41 for observing the components. The sealing ring 43 is located inside the sealing groove 411 and is responsible for supporting and sealing the semiconductor components. The function of the sealing ring is to ensure that the components are isolated from the outside environment and maintain a sealing performance in a vacuum environment. The flange block 44 includes multiple second mounting holes 441, which are connected to the observation window 42 by bolts 45. The main function of the flange block is to fix and compress the sealing groove 411. The buffer rubber ring 46 is installed on the flange block 44 and applies pressure by moving the flange block 44, thereby ensuring tight contact between the sealing groove 411 and the vacuum seal. The purpose of the buffer rubber ring is to provide clamping force to ensure the effectiveness of the vacuum seal.

[0095] Understandably, through the synergistic effect of the aforementioned components, the vacuum placement module 40 can place semiconductor components in the sealing groove 411, and adjust the distance of the flange block 44 by bolts 45. The flange block 44 achieves a vacuum environment by carrying a buffer rubber ring 46 and pressing the sealing groove 411. In this way, semiconductor components can be observed and processed in a vacuum environment, ensuring that they are in a stable working state and effectively isolating the components from the influence of the external environment.

[0096] Please continue reading. Figure 1 and Figure 4 The optical equipment also includes a mounting module 30, which includes a sleeve portion 31 and a base portion 32.

[0097] The second column structure 21b is provided with a window 212, a vertical fixing hole 213 and a horizontal set screw hole 214. A flat spring pad passes through the fixing hole 213 to connect the second adjusting block 22 and the sleeve part 31, and a set screw passes through the set screw hole 214 to lock the optical microscope device 10.

[0098] Furthermore, the first adjusting block 21 includes a first central large hole A, the second adjusting block 22 includes a second central large hole B, the clamping and fixing block 251 includes a third central large hole C, and the flange block 44 includes a fourth central large hole D.

[0099] The optical microscope device passes through the first central large hole A, the second central large hole B, the third central large hole C, and the fourth central large hole D respectively, so as to fit the adjustment module 20 onto the optical microscope device 10. The optical microscope device 10 is locked by adjusting the size of the locking screw 252 in the third central large hole C. At this time, when the lifting adjustment mechanism 24 adjusts the movement of the second adjustment block 22, the clamping fixing block 251 moves with the second adjustment block 22 to adjust the overall lifting of the optical microscope device 10.

[0100] Please continue reading. Figure 10 , Figure 10 This is a schematic diagram of the structure of the optical microscope device 10 in the optical device 100 provided in the embodiment of the present invention.

[0101] The optical microscope device 10 includes a signal transmission unit 11, a main body 12, and a lens unit 13, wherein the main body 12, the lens unit 13, and the signal transmission unit 11 are detachably connected at their joints. This facilitates the installation and removal of the optical microscope device 10 and the adjustment module 20.

[0102] In summary, the embodiments of the present invention provide...

[0103] A second aspect of the present invention also provides an assembly method for the optical device 100 described above, the method comprising:

[0104] a. Disconnect the lens section 13 of the optical microscope device 10 from the connection point B, and fit the mounting module 30 onto the lower part of the main body section 12.

[0105] b. Connect the first adjusting block 21 and the second adjusting block 22 through the guide mechanism 23, and then assemble the lifting adjusting mechanism 24 and the second adjusting block 22 into a whole.

[0106] c. Install the anti-detachment mechanism 26 between the first adjusting block 21 and the second adjusting block 22;

[0107] d. Connect the fixing mechanism 25 to the upper part of the second adjusting block 22, without locking and clamping the fixing block 251, to form an overall adjusting module 20;

[0108] e. Next, disassemble the optical microscope device 10 from the connection point A, and put the above-installed adjustment module 20 on the outer periphery of the optical microscope device 10; at this time, the optical microscope device 10 reassembles the signal transmission unit 11 and the lens unit 13 to the main body unit 12 through the connection point A and the connection point B respectively.

[0109] f. Connect the first adjusting block 21 and the mounting module 30;

[0110] G. Connect the mounting base module 30 and the vacuum placement module 40 to complete the assembly of the overall optical equipment 100.

[0111] At this point, the semiconductor optical element to be measured is placed into the vacuum placement module 40, and the optical microscope device 10 is rotated to obtain a forward image. Then, the fixing mechanism 25 is tightened to lock the rotating optical microscope device 10, restricting its rotational freedom. The lifting adjustment mechanism 24 can then be rotated to adjust the height of the optical microscope device 10. After adjusting the working distance of the optical microscope, the set screw is tightened through the set screw hole 214 to lock the first adjusting block 21, preventing the optical microscope device 10 from sliding.

[0112] In summary, the optical device for semiconductor components provided by this embodiment of the invention, through pin limiting, ensures that the optical microscope device 10 will not rotate when the image is already adjusted to the forward orientation. Furthermore, the double-threaded adjustment design of the lifting adjustment mechanism 24 ensures that the structure is compact and easy to adjust. The use of the anti-detachment mechanism 26 ensures the stability of the entire structure and prevents it from detaching when adjusting the height, thereby reducing the difficulty of adjustment, improving work efficiency, and saving production costs.

[0113] Furthermore, those skilled in the art should understand that if all or part of the sub-modules involved in the optical equipment 100 products provided in the embodiments of the present invention are combined or replaced by means of fusion, simple changes, mutual transformation, etc., such as moving the position of each component; for example, combining with an electron beam to form an electron beam detection instrument, or setting the product composed of them as one piece; or detachable design; as long as the combined components can form a device / apparatus / system with a specific function, using such a device / apparatus / system to replace the corresponding components of the present invention also falls within the protection scope of the present invention.

[0114] This invention also provides an electron beam detection instrument, including the optical device described above, and an electron beam device.

[0115] The technical features described above can be combined arbitrarily. Although not all possible combinations of these technical features are described, any combination of these technical features should be considered to be covered by this specification, provided that such combination does not contain contradictions.

[0116] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them; although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that they can still adjust the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some or all of the technical features; and these adjustments or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. An optical device for semiconductor elements, characterized in that, It includes an optical microscope device and an adjustment module, wherein the adjustment module is fitted outside the optical microscope device and includes: A first adjustment block and a second adjustment block, wherein at least one of them is connected to the optical microscope device; A guide mechanism connects the first adjusting block and the second adjusting block, and constrains the rotational freedom of the first adjusting block and the second adjusting block in the axial direction to prevent rotational movement, so that the first adjusting block and the second adjusting block can only move in the axial direction; A lifting and adjusting mechanism, connecting the first adjusting block and the second adjusting block, is used to drive the first adjusting block and / or the second adjusting block to move relative to each other, so as to adjust the lifting and lowering of the optical microscope device; the lifting and adjusting mechanism is a lifting nut or an optical cylinder; the first adjusting block includes a first column structure and a second column structure, the diameter of the second column structure is larger than that of the first column structure, so that an edge portion is reserved at the connection between the first column structure and the second column structure; the inner wall of the lifting and adjusting mechanism includes a first region and a second region, the first region is connected to the outer peripheral wall of the first column structure and uses the edge portion as the bottom support, and the second region is connected to the outer peripheral wall of the second adjusting block.

2. The optical device according to claim 1, characterized in that, The guiding mechanism includes multiple pins, and a first positioning hole and a second positioning hole to which the pins are adapted; The pin is arranged along the axial direction of the first adjusting block, the first positioning hole is arranged on the first adjusting block, and one end of the pin is connected to the first adjusting block through the first positioning hole; The second positioning hole is provided on the second adjusting block, and the other end of the pin is connected to the second adjusting block through the second positioning hole.

3. The optical device according to claim 1, characterized in that, The lifting adjustment mechanism is a lifting nut, and the first area and the second area have different threaded connection directions.

4. The optical device according to claim 1, characterized in that, The adjustment module further includes an anti-detachment mechanism, which is disposed between the first adjustment block and the second adjustment block, and includes: The stud is connected at one end to the first adjusting block and at the other end to the second adjusting block; An elastomer is disposed on the outer periphery of the stud and connected between the first adjusting block and the second adjusting block.

5. The optical device according to claim 2, characterized in that, The adjustment module further includes a fixing mechanism, which includes: The retaining block is circular in shape and has an opening at the edge; A locking screw is provided at the opening, and the size of the opening is adjusted so that the clamping fixing block locks / releases the optical microscope device; Multiple first mounting holes, adapted to the first positioning holes, are used to connect the second adjusting block and the clamping fixing block.

6. The optical device according to claim 5, characterized in that, The first adjustment block includes a first central large hole, the second adjustment block includes a second central large hole, and the clamping and fixing block includes a third central large hole; the optical microscope device passes through the first central large hole, the second central large hole, and the third central large hole respectively, so as to fit the adjustment module onto the optical microscope device; The optical microscope device is locked by adjusting the size of the locking screw in the third central large hole; when the lifting nut adjusts the movement of the first adjusting block, the clamping fixing block moves accordingly to adjust the lifting of the optical microscope device.

7. The optical device according to claim 1, characterized in that, The optical device further includes a vacuum placement module, which comprises: A sealed chamber includes a sealing groove for holding semiconductor components, and an observation window is provided in the sealed chamber. A sealing ring is disposed inside the sealing groove; The flange block includes multiple second mounting holes, which are connected to the observation window by bolts. A buffer rubber ring is attached to the flange block, and the flange block is moved to press the sealing groove to provide a vacuum environment.

8. The optical device according to claim 1, characterized in that, The optical device also includes a mounting module, which includes a base portion and a sleeve portion; The second column structure is provided with a window, as well as a vertical fixing hole and a horizontal set screw hole provided at the window. The fixing hole is used to connect the first adjusting block and the sleeve part, and the set screw hole is used to lock the optical microscope device and the first adjusting block.

9. The optical device according to any one of claims 1 to 8, characterized in that, The optical microscope device includes a lens section, a main body section, and a signal transmission section, wherein the main body section, the lens section, and the transmission section are detachably connected at their joints.

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