A target protection device, film forming apparatus

Abstract

The application provides a target protection device and a film forming device, and relates to the technical field of coating technology, and aims to solve the technical problem that the target and the target seat of the coating device are prone to short circuit. The target in the target protection device is a rotating target for film forming. The protection device comprises a cleaning device located on at least one side of the target. Each cleaning device comprises a support part and a blowing pipe rotatably arranged on the support part. The blowing pipe is arranged along the axial direction of the target. The blowing pipe has a plurality of blowing holes. The blowing holes are distributed along the axial direction of the blowing pipe. The blowing holes are used for blowing off the debris on at least part of the surface of the target. The debris on the surface of the target is blown off by the blowing pipe, so that the short circuit between the target and the target seat caused by the debris can be avoided.

Description

Technical Field

[0001] This invention relates to the field of coating technology, and in particular to a target protection device and a film forming equipment. Background Technology

[0002] The statements in this section are merely background information related to the present invention and do not necessarily constitute prior art.

[0003] Magnetron sputtering is a commonly used film deposition technology. Its principle is to ionize argon atoms (Ar) through plasma to form positively charged argon ions. Under the action of an electric field, the argon ions are accelerated to bombard the surface of the target material. After being bombarded, the target atomic components detach from the target material and are deposited on the surface of the target substrate to form a continuous and dense thin film.

[0004] The targets used in magnetron sputtering are mainly divided into two types: planar targets and rotating targets. Among them, rotating targets have a higher target utilization rate. However, in actual use, the debris such as wafers and flaking generated by the target substrate and the target can cause short circuits between the target and the target holder, resulting in equipment failure. Summary of the Invention

[0005] The purpose of this invention is to provide a target protection device and a film forming equipment to solve the technical problem of easy short circuit between the target and the target holder in the coating equipment.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] In a first aspect, the present invention provides a target material protection device, wherein the target material is a rotating target material for film formation, and the protection device includes a cleaning device located on at least one side of the target material, each of the cleaning devices including a support portion and a purge pipe rotatably disposed on the support portion;

[0008] The purge tube is arranged along the axial direction of the target material, and the purge tube has a plurality of purge holes distributed along the axial direction of the purge tube. The plurality of purge holes are used to purge debris from at least a portion of the surface of the target material.

[0009] According to at least one embodiment of the present invention, the support includes two brackets connected to the target base, the two brackets being respectively located at corresponding ends of the purge tube, and the purge tube being rotatably mounted on the two brackets; or,

[0010] The support includes a housing connected to the target base, the purge tube being rotatably disposed in the housing, the housing having at least a portion of a wall facing the corresponding target material, the wall having at least one strip-shaped hole for gas from the plurality of purge holes to pass through, each strip-shaped hole extending along the distribution direction of the plurality of purge holes.

[0011] According to at least one embodiment of the present invention, the wall surface is a planar wall surface or a curved wall surface.

[0012] According to at least one embodiment of the present invention, when the wall surface is a curved wall surface, the wall surface extends away from the corresponding target material along the direction from the target material to the object to be coated.

[0013] According to at least one embodiment of the present invention, the cross-section of the shell is a fan-shaped cross-section, and the arc segment of the cross-section of the curved wall is a quarter-circular arc segment.

[0014] According to at least one embodiment of the present invention, the number of the target materials is multiple, and the cleaning device is provided on both sides of the multiple target materials and between two adjacent target materials;

[0015] The centerline of the curved wall surface of the cleaning device located between two adjacent targets is opposite to the object being coated; and / or,

[0016] The centerline of the curved wall surface of the cleaning device located on both sides of the plurality of targets is opposite to the corresponding target.

[0017] The centerline of the curved wall refers to a line located on the curved wall, passing through the center point of the curved wall, and extending along the length of the curved wall.

[0018] According to at least one embodiment of the present invention, the number of the strip holes is multiple, and the multiple strip holes are evenly distributed on the wall surface.

[0019] According to at least one embodiment of the present invention, the cleaning device further includes at least one driving device, which is connected to the corresponding blowpipe via a transmission assembly.

[0020] According to at least one embodiment of the present invention, the transmission assembly includes a belt and a pulley disposed at one end of the purge pipe, the pulley being drively connected to the output shaft of the corresponding drive device via the belt; or,

[0021] The transmission assembly includes at least one gear pair, wherein one gear of the at least one gear pair is located at one end of the purge tube, and the other gear of the at least one gear pair is located on the output shaft of the corresponding drive device.

[0022] According to at least one embodiment of the present invention, the protective device includes a plurality of protective plates, each of the protective plates being located above the corresponding connection gap between the target material and the target base.

[0023] According to at least one embodiment of the present invention, the protective plate is an arc-shaped plate, and the curvature of the arc-shaped plate matches the curvature of the gap; or,

[0024] The protective plate is a flat plate.

[0025] In a second aspect, the present invention also provides a film forming apparatus, including a protective device and an air distribution device located on at least one side of the target material, each of the air distribution devices being connected to the target base, the protective device being the protective device described in the first aspect, and each of the support portions being disposed on the corresponding air distribution device.

[0026] In one or more technical solutions provided in the exemplary embodiments of the present invention, at least one of the following beneficial effects can be achieved.

[0027] The target protection device of an exemplary embodiment of the present invention provides a cleaning device on at least one side of the film-forming target. The cleaning device includes a rotatably disposed blowpipe with a plurality of blow holes distributed along the axial direction of the blowpipe. This device can blow away debris that falls on at least a portion of the surface of the target in the axial direction, such as the top of the target, thereby avoiding short circuits between the target and the target holder caused by debris and improving the stability of the target operation.

[0028] Furthermore, since the purge tube is rotatably mounted on the support, the purge holes can purge the same debris from different directions, preventing a single purge direction from failing to remove debris from the target surface. On one hand, the rotation of the purge tube expands the purge range on the target surface, removing as much debris as possible; on the other hand, since debris may enter and clog the purge holes, the rotational inertia of the purge tube prevents blockage. Attached Figure Description

[0029] The accompanying drawings illustrate exemplary embodiments of the invention and, together with the description thereof, serve to explain the principles of the invention. These drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification.

[0030] Figure 1 This is a schematic diagram of the film-forming device according to an embodiment of the present invention;

[0031] Figure 2 yes Figure 1 Enlarged schematic diagram of part A;

[0032] Figure 3 This is a schematic diagram of a cleaning device according to an embodiment of the present invention;

[0033] Figure 4 This is a schematic diagram of the housing and purge pipe structure according to an embodiment of the present invention;

[0034] Figure 5 This is a schematic diagram of the housing and air distribution device according to an embodiment of the present invention;

[0035] Figure 6 This is a schematic diagram of the purge tube structure according to an embodiment of the present invention;

[0036] Figure 7 This is a schematic diagram of the housing and purge pipe structure according to another embodiment of the present invention.

[0037] Reference numerals: 10, shell; 11, wall surface; 111, slotted hole; 20, purge pipe; 21, purge hole; 30, target base; 40, gas distribution device; 50, protective plate; 51, fixing plate; 60, gap; 70, drive device; 71, belt; 72, pulley; 80, target material. Detailed Implementation

[0038] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0039] Before introducing the exemplary embodiments of the present invention, the relevant terms involved in the exemplary embodiments of the present invention are first defined as follows:

[0040] Heterojunction with Intrinsic Thin-layer (HJT) solar cells are hybrid solar cells that use crystalline silicon as the substrate and amorphous silicon thin films.

[0041] Magnetron sputtering uses plasma to ionize argon atoms (Ar) into positively charged argon ions. These argon ions, under the influence of an electric field, are accelerated and bombard the target surface. The target atoms, upon impact, detach from the target and deposit onto the substrate surface, forming a continuous and dense thin film. Magnetron sputtering is primarily used in the preparation of thin film materials, such as metal thin films, alloy thin films, and oxide thin films. It boasts a high deposition rate, is suitable for various substrate materials, and is widely used in electronic devices, optical coatings, and anti-corrosion coatings.

[0042] In related technologies, the targets used in magnetron sputtering are mainly divided into two types: planar targets and rotating targets. Rotating targets are more widely used in the HJT field. During the coating process, especially in upward sputtering rotating target equipment, debris generated by the target or the substrate material to be coated, such as solar cells and target slag, will fall onto the target, causing a short circuit between the target and the target holder, affecting the uptime of the production equipment.

[0043] To address the aforementioned problems, the target protection device provided in the exemplary embodiment of the present invention removes debris from the target by setting a rotating purge pipe on one side of the target, thereby maximizing the removal of debris and preventing short circuit between the target and the target base.

[0044] It should be noted that the target protection device provided in the exemplary embodiment of the present invention is not only applicable to HJT coating, but also applicable to other substrate materials to be coated.

[0045] Figure 1 This is a schematic diagram of the film-forming device according to an embodiment of the present invention; Figure 3 This is a schematic diagram of a cleaning device according to an embodiment of the present invention; Figure 6 This is a schematic diagram of the purge pipe structure according to an embodiment of the present invention. Figure 1 , Figure 3 as well as Figure 6 As shown, the target protection device provided by the exemplary embodiment of the present invention includes a cleaning device located on at least one side of the target 80. Each cleaning device includes a support and a blow pipe 20 rotatably disposed on the support. The blow pipe 20 is arranged along the axial direction of the target 80 and has a plurality of blow holes 21. The plurality of blow holes 21 are distributed along the axial direction of the blow pipe 20 and are used to blow away debris on at least a portion of the surface of the target 80.

[0046] In practical applications, when the diameter of the target 80 is small, a cleaning device is installed on one side of the target 80, that is, a rotatable blowpipe 20 is installed on one side of the target 80, which can complete the cleaning of debris on the target 80 to prevent short circuits. When the diameter of the target 80 is large, a cleaning device is installed on both sides of the target 80, that is, a rotatable blowpipe 20 is installed on both sides of the target 80. The blowpipe 20 has multiple blowholes 21 along its axial direction. When the blowpipe 20 rotates, the gas in the blowholes 21 can sweep the surface of the target 80, such as the top or sides of the target 80, thereby removing debris that has fallen on the target 80. Since the blowpipe 20 is arranged along the axial direction of the target 80, and the multiple blowholes 21 are distributed along the axial direction of the blowpipe 20, debris along the entire axial direction of the target 80 can be blown away by the blowholes 21, making the cleaning more thorough. The rotating purge pipe 20 expands the purge range and prevents debris from clogging the purge holes 21, thereby improving the effectiveness and stability of the cleaning device. It should be noted that one end of the purge pipe 20 is connected to an external air supply device via a vent to provide purge gas.

[0047] For example, the purge hole 21 can be a circular hole or an elongated hole formed along the circumference of the purge tube 20.

[0048] Figure 4 This is a schematic diagram of the housing and purge pipe structure according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the housing and air distribution device according to an embodiment of the present invention. Figure 4 and Figure 5 As shown, the support portion of the protective device provided in the exemplary embodiment of the present invention includes a housing 10 connected to the target base 30, a purge pipe 20 rotatably disposed in the housing 10, the housing 10 having at least a portion of a wall surface 11 facing the corresponding target material 80, the wall surface 11 having at least one strip hole 111 through which gas from a plurality of purge holes 21 passes, each strip hole 111 extending along the distribution direction of the plurality of purge holes 21.

[0049] It should be noted that when a component is said to be "connected to" another component, it can be directly connected to the other component or indirectly connected to it. For example... Figure 4 As shown, the housing 10 is connected to the target base 30. Specifically, the gas distribution device 40 is connected to the target base 30, while the housing 10 is indirectly connected to the target base 30.

[0050] like Figure 4 As shown, the housing 10 is a housing with a cavity, wherein one end of the purge tube 20 is rotatably disposed on one end face of the housing 10, and the other end is rotatably disposed on the other end face of the housing 10. The portion of the purge tube 20 with the purge hole 21 is located within the cavity of the housing 10. The housing 10 also has a wall surface 11, wherein the wall surface 11 can be entirely oriented towards the target material 80, such as... Figure 2 As shown, the walls 11 of the shells 10 on both sides face the target 80, that is, the walls 11 are opposite to the target 80; the wall 11 of the shell 10 located between the two targets 80 faces one target 80 and the other part faces the other target 80, that is, part of the wall 11 is opposite to the corresponding target 80.

[0051] In order for the gas from the purge holes 21 to be blown from the housing 10 onto the surface of the corresponding target material 80, one or more strip-shaped holes 111 are provided on the wall surface 11, wherein the strip-shaped holes 111 extend along the distribution direction of the multiple purge holes 21. For example, the strip-shaped holes 111 can be rectangular holes or oblong holes. When the multiple purge holes 21 are rotated to the position of the strip-shaped hole 111, the gas from all the purge holes 21 can be blown out through the strip-shaped hole 111.

[0052] When a housing 10 is provided outside the purge pipe 20, the housing 10 can prevent debris from falling into the purge pipe 20 and thus damaging the purge pipe 20 or blocking the purge hole 21. It should be noted that the rotation of the purge pipe 20 can be either rotational or oscillating. By oscillating, the purge hole 21 can only move within the range of the wall surface 11, that is, reciprocating motion.

[0053] In another optional embodiment, the support portion of the protective device provided in the exemplary embodiment of the present invention includes two brackets connected to the target base 30. The two brackets are respectively located at the corresponding ends of the purge pipe 20, and the purge pipe 20 is rotatably mounted on the two brackets. In this embodiment, the purge pipe 20 can be rotated by being rotatably mounted on the two brackets, and its purge range is larger than that of being rotatably mounted on the housing 10.

[0054] like Figure 5 As shown, the protective device provided in the exemplary embodiment of the present invention has a curved wall surface 11 in the housing 10. The curved wall surface allows for a larger blowing range of the purge pipe 20 rotatably disposed within the housing 10. For example, through the arrangement of multiple strip-shaped holes 111, it can not only blow away debris on the target material 80, but also blow away the area near the top surface of the target material 80. For example, when part of the flaky debris is on the target material 80 and the other part extends outside the target material 80, that is, above the housing 10, the purge pipe 20 can also directly blow away the debris extending outside the target material 80. Even if it is not blown off, short circuits can be prevented by ensuring that the debris does not come into contact with the target base. Based on this, the curved wall surface 11 can expand the blowing range and has less impact on the movement state of the target particles.

[0055] In another alternative embodiment, the wall surface 11 is a planar wall surface, that is, the wall surface 11 is opposite to the corresponding target material 80. This embodiment simplifies the fabrication of the shell 10.

[0056] like Figure 1 , Figures 4-5 As shown, when the wall surface 11 is a curved surface, along the direction from the target material 80 to the object to be coated, the wall surface 11 extends away from the corresponding target material 80. The object to be coated, i.e., the substrate material, is placed above the target material 80, and along the direction from bottom to top, the curved wall surface gradually moves away from the target material 80. That is, when multiple strip holes 111 are provided in the wall surface 11, the purge pipe 20 can not only purge the sides of the target material 80, but also purge the debris on the top of the target material 80 and its surrounding area.

[0057] When wall 11 is a curved wall, such as Figure 5 As shown, the cross-section of the shell 10 is a fan-shaped cross-section, and the arc segment of the cross-section of the curved wall 11 is a quarter-circular arc segment, that is, the central angle of the arc segment is 90°.

[0058] Figure 7 This is a schematic diagram of the housing and purge pipe structure according to another embodiment of the present invention. Figure 1 and Figure 7As shown, the number of targets 80 can be one or more. When there are multiple targets 80, cleaning devices are provided on both sides of the multiple targets 80 and between two adjacent targets 80; the center line of the curved wall 11 of the cleaning device located between two adjacent targets 80 is opposite to the object to be coated.

[0059] For ease of description, we will use two targets 80 as an example. Cleaning devices are installed on both sides of the two targets 80 and between the two targets 80. The housing 10 of the cleaning device in the middle has a different shape than the housings 10 of the cleaning devices on both sides.

[0060] For example, the centerline of the curved wall 11 of the housing 10 located in the middle is opposite to the object to be coated, that is, the centerline of the curved wall 11 faces upward, with one part of the wall facing one target 80 and the other part facing another target 80. Based on this, the purge pipe 20 provided in the housing 10 can both purge debris from the two targets 80. At the same time, when flaky debris overlaps on the two targets 80, the purge pipe 20 can also blow upward, thereby blowing away debris that is not easy to fall off.

[0061] It should be noted that the center line of the aforementioned curved wall refers to a line located on the curved wall 11, passing through the center point of the curved wall 11, and extending along the length direction of the curved wall 11.

[0062] For example, the centerline of the curved wall surface 11 of the cleaning device located on the two outer sides of the two targets 80 is opposite to the corresponding target 80. Based on this, the blow pipe 20 provided in the housing 10 can blow away the surface of the target 80 where debris easily accumulates, and can also blow away debris protruding from the target 80. This embodiment not only expands the blowing range of the blow pipe 20, but also blows away debris from different directions, and can also remove debris that is difficult to remove.

[0063] like Figure 5 and Figure 7 As shown, when there are multiple strip holes 111, the multiple strip holes 111 can be evenly or unevenly distributed on the wall surface 11. When the multiple strip holes 111 are evenly distributed on the wall surface 11, the multiple strip holes 111 can have the same shape and size, the same spacing between the strip holes 111, and the number of strip holes 111 can be 2, 3, 4, 5, etc. The number of strip holes 111 is not further limited in some embodiments.

[0064] For example, the central angle of the strip hole 111 on the curved wall surface 11 can be 5°, 7°, 10°, 12°, etc., and is not further limited in some embodiments.

[0065] like Figure 3 As shown, the cleaning device also includes at least one drive device 70, which is connected to the corresponding blow pipe 20 via a transmission assembly. The transmission assembly includes a belt 71 and a pulley 72 located at one end of the blow pipe 20. The pulley 72 is connected to the output shaft of the corresponding drive device 70 via the belt 71.

[0066] In practical applications, for a protective device with three purge pipes 20, there can be three drive devices 70, each corresponding to one purge pipe 20. For example, a pulley 72 can be provided at one end of the purge pipe 20, and the output shaft of the drive device 70 can be connected to the pulley 72 via a belt 71. The rotation speed of the purge pipes 20 can be controlled differently by the three drive devices 70. Furthermore, using a belt 71 for transmission facilitates the placement of the drive devices 70; for example, the three drive devices 70 can be positioned on the target holder 30 above the target material 80, thus not occupying excessive space and facilitating the miniaturization of the entire device. It is understood that the aforementioned drive device 70 can be a servo motor or a stepper motor, or other power-providing mechanisms.

[0067] In some embodiments, for a protective device with three purge pipes 20, the drive device 70 may also be a single unit. For example, a synchronizing pulley may be provided at one end of the purge pipe 20, and a synchronizing pulley may also be provided on the output shaft of the drive device 70. A timing belt is used to drive the synchronizing pulley on the output shaft of the drive device 70 to the synchronizing pulleys on the three purge pipes 20. This embodiment can ensure the synchronicity of the rotation of the three purge pipes 20.

[0068] In another alternative embodiment, the transmission assembly includes at least one gear pair, wherein one gear of the at least one gear pair is located at one end of the purge tube 20, and the other gear of the at least one gear pair is located on the output shaft of the corresponding drive device 70.

[0069] For example, when there is one drive unit 70, the gear on the output shaft of the drive unit 70 meshes with three intermediate gears, and the three intermediate gears directly mesh with the gears on the corresponding purge pipes 20 to form a transmission connection. This gear transmission method also ensures the synchronous rotation of the three purge pipes 20. When there are three drive units 70, the three intermediate gears can also indirectly mesh with the gears on the corresponding purge pipes 20 through relay gears to form a transmission connection. For example, each intermediate gear is coaxial with its corresponding relay gear, each relay gear meshes with the gear on the purge pipe 20 to form a gear pair, and each gear on the drive unit 70 meshes with its corresponding intermediate gear to form another gear pair. This gear transmission method also meets the rotation requirements of the three purge pipes 20, and its transmission efficiency is higher than that of a synchronous belt.

[0070] Figure 2 yes Figure 1 An enlarged schematic diagram of part A. (See diagram below.) Figure 1 and Figure 2 As shown, the protective device also includes multiple protective plates 50, each of which is located above the corresponding gap 60 at the connection between the target material 80 and the target base 30.

[0071] Since the target 80 is a rotating target, there is a gap 60 at the connection between the target 80 and the target holder 30. When debris falls into the gap 60, it can cause a short circuit between the target 80 and the target holder 30. Therefore, a protective plate 50 is installed above each gap 60 to prevent short circuit failures. It should be noted that when there is only one target 80, both ends are connected to the target holder 30, meaning there are two gaps 60, and correspondingly, there are also two protective plates 50.

[0072] For example, the protective plate 50 can be fixed to the target base 30 by means of the fixing plate 51. The protective plate 50 can be an arc-shaped plate, and the curvature of the arc-shaped plate matches the curvature of the gap 60. That is, the two ends of the protective plate 50 are lower than the middle position, which provides better coverage for the circular gap 60 and prevents debris from falling into the gap 60.

[0073] For example, the protective plate 50 can also be a flat plate that can be horizontally positioned above the circular gap 60, with its length and width covering the entire gap 60 to prevent debris from falling into the gap 60.

[0074] like Figure 1 As shown, an exemplary embodiment of the present invention also provides a film forming apparatus, including a protective device and an air distribution device 40 located on at least one side of a target 80. Each air distribution device 40 is connected to a target 30. The protective device is the protective device of any of the above embodiments, and each support is provided on the corresponding air distribution device 40.

[0075] For example, the aforementioned film-forming equipment can be a magnetron sputtering coating equipment, with gas distribution devices 40 provided on both sides of the two targets 80 and between the two targets 80. Based on this, by placing the support portion on the corresponding gas distribution device 40, the modification to the original magnetron sputtering coating equipment is minimal, thus reducing costs. Furthermore, since the shape and arrangement of the support portion match the gas distribution device 40—for example, when the support portion is a housing 10, the bottom surface of the housing 10 coincides with the top surface of the gas distribution device—the arrangement of the support portion can reduce disturbances to the uniformity of the process gas distribution in the gas distribution device 40, ensuring the operational stability of the magnetron sputtering coating equipment.

[0076] As can be seen from the above, the target protection device and film-forming equipment provided in the exemplary embodiments of the present invention, by setting a corresponding rotatable purge pipe on the basis of the gas distribution device and setting a shell on the outside of the purge pipe to protect the purge pipe, allows debris falling on the target to be blown away by the purge pipe, avoiding short circuits. Furthermore, a protective plate is set above the gap between the target and the target holder, thereby preventing debris from falling into the gap and thus avoiding the risk of short circuits. At the same time, due to the matching setting of the purge pipe and the gas distribution device, the modification cost is low, and the operation method is simple and easy to use. It also minimizes disturbance to the gas uniformity of the gas distribution device, ensuring the operational stability of the entire equipment and guaranteeing the equipment's uptime.

[0077] Those skilled in the art should understand that the above embodiments are merely for illustrating the present invention and are not intended to limit the scope of the invention. Those skilled in the art can make other changes or modifications based on the above disclosure, and these changes or modifications still fall within the scope of the present invention.

Claims

1. A target shield apparatus, comprising: The target material is a rotating target material for film formation, and the protective device includes a cleaning device located on at least one side of the target material. Each cleaning device includes a support portion and a purge pipe rotatably disposed on the support portion. The purge tube is arranged along the axial direction of the target material, and the purge tube has a plurality of purge holes distributed along the axial direction of the purge tube. The plurality of purge holes are used to purge debris on or near the top surface of the target material. The support includes a housing connected to the target base, and the purge tube is rotatably disposed in the housing. The housing has at least a portion facing the wall of the corresponding target material, and the wall has a plurality of strip-shaped holes for gas from the plurality of purge holes to pass through. The wall surface is a curved surface that extends away from the target material along the direction from the target material to the object to be coated.

2. The guard of claim 1, wherein Each of the strip-shaped holes extends along the distribution direction of the plurality of purge holes.

3. The guard of claim 1, wherein, The shell has a fan-shaped cross-section, and the curved wall has a quarter-circle arc segment in its cross-section.

4. The guard of claim 1, wherein The number of targets is multiple, and the cleaning device is provided on both sides of the multiple targets and between two adjacent targets; The centerline of the curved wall surface of the cleaning device located between two adjacent targets is opposite to the object being coated; and / or, The centerline of the curved wall surface of the cleaning device located on both sides of the plurality of targets is opposite to the corresponding target. The centerline of the curved wall refers to a line located on the curved wall, passing through the center point of the curved wall, and extending along the length of the curved wall.

5. The protective device according to any one of claims 1-4, characterized in that, The multiple strip-shaped holes are evenly distributed on the wall surface.

6. The guard of any one of claims 1-4, wherein, The cleaning device further includes at least one drive device, which is connected to the corresponding blow pipe via a transmission assembly. The transmission assembly includes a belt and a pulley located at one end of the purge pipe, the pulley being connected to the output shaft of the corresponding drive device via the belt; or... The transmission assembly includes at least one gear pair, wherein one gear of the at least one gear pair is located at one end of the purge tube, and the other gear of the at least one gear pair is located on the output shaft of the corresponding drive device.

7. The guard of any one of claims 1-4, wherein, The protective device also includes multiple protective plates, each of which is located above the corresponding gap between the target material and the target base.

8. A film forming apparatus characterized by comprising: The device includes a protective device and a gas distribution device located on at least one side of the target material, each of the gas distribution devices being connected to the target base, the protective device being the protective device according to any one of claims 1-7, and each of the support portions being disposed on the corresponding gas distribution device.

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