一种半导体制备用坩埚杆组装设备
By utilizing the support and welding mechanism of the crucible rod assembly equipment for semiconductor fabrication, the automated and high-precision assembly of the support head and support rod is achieved, solving the problems of welding complexity and sealing, and improving the service life and production efficiency of the crucible rod.
CN117600706BActive Publication Date: 2026-07-17德玛克(浙江)精工科技有限公司
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 德玛克(浙江)精工科技有限公司
- Filing Date
- 2023-10-19
- Publication Date
- 2026-07-17
AI Technical Summary
Technical Problem
In the existing technology, the welding of the crucible rod support head and support rod is complicated, the docking accuracy is low, and the weld scar sealing is poor, which affects the performance of the crucible rod.
Method used
The equipment for assembling crucible rods for semiconductor fabrication uses a bearing mechanism and a welding mechanism to achieve automatic assembly of the support head and support rod, improving the docking accuracy. A ring-shaped welding rod is fitted at the docking point, resulting in good welding continuity and high sealing performance.
Benefits of technology
It improves the welding efficiency and service life of crucible rods, increases production efficiency, welding accuracy and sealing performance, and simplifies the operation process.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN117600706B_ABST
Abstract
本发明涉及一种半导体制备用坩埚杆组装设备，包括设置在机架上的输送机构、承载机构、下料机构以及焊接机构，承载机构包括第一载料组件、第二载料组件、第一对接组件、第二对接组件、定位组件、卡位组件以及设置在机架上且用于驱动托头自旋转的旋动组件；本发明能够自动组装焊接坩埚杆的托头和托杆，对接精度较高，定位效果较好，操作简单，可以批量化组装坩埚杆，增加企业的生产效益，环状焊熔条套在托头和托杆的对接焊缝内，焊接的连续性较好，焊疤成型效果较好，密封性较高，增加坩埚杆的使用寿命，从而解决了坩埚杆的托头和托杆焊接工作复杂，对接精度较低，焊疤密封性较差，影响坩埚杆使用效果的技术问题。
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