A box body internal air exchange mechanism under vacuum environment

Abstract

A ventilation mechanism for a chamber in a vacuum environment includes a static ventilation component fixedly installed inside an outer vacuum chamber and a dynamic ventilation component movable toward and away from the static ventilation component. The static ventilation component includes an upper ventilation element, and the dynamic ventilation component includes a lower ventilation element. The upper ventilation element communicates with a ventilation chamber body installed inside the outer vacuum chamber, and the lower ventilation element communicates with the outside of the outer vacuum chamber. The dynamic ventilation component moves toward the static ventilation component so that, when the lower ventilation element abuts against and conducts with the upper ventilation element, it connects the ventilation chamber body to the outside of the outer vacuum chamber. Through the static and dynamic ventilation components, when the lower ventilation element abuts against and conducts with the upper ventilation element, the ventilation chamber body is connected to the outside of the vacuum environment. This allows the gas pressure inside the ventilation chamber to remain balanced with atmospheric pressure without disrupting the vacuum environment, and also enables heat dissipation of the heat exchange chamber body and its internal electronic components through gas exchange, thus protecting the electronic components.

Description

Technical Field

[0001] This invention relates to the field of ventilation technology, specifically to a ventilation mechanism for a chamber in a vacuum environment. Background Technology

[0002] Currently, to prevent electronic components from being contaminated by dust or bumped, they are usually encapsulated in a sealed electrical box. However, under certain operating conditions, the sealed electrical box containing the electronic components may be in a vacuum environment as the equipment moves. In a vacuum environment, the electronic components in the sealed electrical box not only have difficulty dissipating heat, but are also adversely affected by the large pressure difference between the inside and outside of the vacuum. Summary of the Invention

[0003] The main technical problem solved by this invention is to provide a ventilation mechanism for a chamber in a vacuum environment, which can ventilate the chamber without disrupting the vacuum environment. This not only enables heat dissipation of the chamber but also keeps the air pressure inside the chamber balanced with atmospheric pressure.

[0004] One embodiment provides a ventilation mechanism for a chamber in a vacuum environment, comprising:

[0005] A static ventilation assembly, which can be fixedly installed inside an external vacuum chamber, includes an upper ventilation component for communicating with a ventilation chamber body installed inside the external vacuum chamber; and

[0006] A dynamic ventilation assembly is capable of moving toward and away from the static ventilation assembly. The dynamic ventilation assembly includes a lower ventilation element, which is configured to communicate with the outside of the outer vacuum chamber.

[0007] The dynamic ventilation component moves toward the static ventilation component so that when the lower ventilation component abuts against the upper ventilation component, the lower ventilation component and the upper ventilation component are connected, thereby enabling the ventilation box to communicate with the outside of the outer vacuum box.

[0008] In one embodiment, the number of both the upper and lower air exchange components is set to multiple, and the multiple lower air exchange components can be connected and communicated with the multiple upper air exchange components in a one-to-one correspondence; wherein:

[0009] At least one set of the upper and lower ventilation components is connected for discharging gas from the ventilation chamber to the outside of the outer vacuum chamber, and at least another set of the upper and lower ventilation components is connected for allowing gas from the outside of the outer vacuum chamber to enter the ventilation chamber.

[0010] In one embodiment, the upper ventilation component includes an air receiving and pressing valve core, an air receiving component, and an air receiving valve core. The air receiving component is used to connect to the ventilation box through an air pipe connector. The air receiving and pressing valve core is fixedly connected to the other end of the air receiving component. The air receiving valve core is disposed inside the air receiving component and passes through the air receiving and pressing valve core and is slidably connected to the air receiving and pressing valve core.

[0011] When the lower air exchange component abuts against the air receiving pressure valve core, the air receiving valve core is pressed into the air receiving component, and the lower air exchange component is connected to the upper air exchange component.

[0012] In one embodiment, the upper air exchange component further includes a valve core compression spring, the air receiving component has a receiving cavity, the air receiving pressure valve core covers the receiving cavity, the air receiving valve core is disposed in the receiving cavity, a valve core compression spring is disposed between one end of the air receiving valve core and the bottom of the receiving cavity, and the other end of the air receiving valve core passes through the air receiving pressure valve core.

[0013] In one embodiment, the lower air exchange component includes an air receiving top core, which is used to communicate with the outside of the outer vacuum box through an air pipe connector; the air receiving top core is also used to press the air receiving valve core into the air receiving component so that the lower air exchange component and the upper air exchange component are connected.

[0014] In one embodiment, the lower air exchange component further includes an air receiving top core pressure ring and an O-ring. The air receiving top core is provided with a columnar protrusion, and the air receiving top core pressure ring is sleeved on the columnar protrusion and fixedly connected to the air receiving top core. The O-ring is sleeved on the top of the columnar protrusion. When the air receiving top core pressure ring abuts against the air receiving pressure valve core, the air receiving top core presses the air receiving valve core into the air receiving component, and the O-ring abuts against the air receiving pressure valve core.

[0015] In one embodiment, a lifting body transmission assembly is further included, the lifting body transmission assembly being used to pass through the outer vacuum chamber, and one end of the lifting body transmission assembly located inside the outer vacuum chamber being connected to the dynamic ventilation assembly; the lifting body transmission assembly pushes the dynamic ventilation assembly to move toward and away from the static ventilation assembly.

[0016] In one embodiment, the lifting body transmission assembly includes a transmission shaft, a fixed seat, a lifting block, and an eccentric wheel. The transmission shaft is used to pass through the outer vacuum chamber, and the fixed seat is used to fix it inside the outer vacuum chamber.

[0017] The drive shaft is fixedly connected to the eccentric wheel at one end inside the outer vacuum chamber. The lifting block is sleeved on the eccentric wheel and is slidably connected to the fixed seat. The dynamic ventilation assembly is fixed on the lifting block.

[0018] In one embodiment, the drive shaft is rotatably connected to the outer vacuum chamber via a magnetohydrodynamic connection.

[0019] In one embodiment, the static ventilation assembly further includes a static ventilation plate, which is fixedly disposed inside the outer vacuum chamber, and the upper ventilation component is disposed through the static ventilation plate, with a buffer spring disposed between the static ventilation plate and the upper ventilation component; and / or the dynamic ventilation assembly further includes a dynamic ventilation plate, with the lower ventilation component disposed through the dynamic ventilation plate, and the dynamic ventilation plate is connected to the lifting body transmission assembly.

[0020] The ventilation mechanism inside the chamber under vacuum conditions according to the above embodiment includes a static ventilation component for being fixedly installed inside an outer vacuum chamber and a dynamic ventilation component that can move toward and away from the static ventilation component; the static ventilation component includes an upper ventilation component, and the dynamic ventilation component includes a lower ventilation component. The upper ventilation component is used to communicate with a ventilation chamber body installed inside the outer vacuum chamber, and the lower ventilation component is used to communicate with the outside of the outer vacuum chamber; the dynamic ventilation component moves toward the static ventilation component so that when the lower ventilation component abuts against and is connected to the upper ventilation component, it is used to connect the ventilation chamber body with the outside of the outer vacuum chamber. By cooperating with the dynamic and static ventilation components, the ventilation chamber can be connected to the outside of the vacuum environment when the lower ventilation component abuts against the upper ventilation component. Thus, without disrupting the vacuum environment, the air pressure inside the ventilation chamber can be kept in balance with the atmospheric pressure, preventing excessive pressure difference between the inside and outside of the ventilation chamber from adversely affecting the electronic components installed inside, thereby protecting the electronic components. On the other hand, by exchanging gases between the ventilation chamber and the outside of the vacuum environment, heat dissipation and cooling of the ventilation chamber and the internal electronic components can be achieved. Attached Figure Description

[0021] Figure 1 This is a structural diagram of a ventilation mechanism inside a chamber under vacuum conditions, according to one embodiment.

[0022] Figure 2 This is a structural diagram of the dynamic ventilation component in the ventilation mechanism inside the chamber under vacuum conditions, according to one embodiment.

[0023] Figure 3 This is a structural diagram of the static ventilation component in the ventilation mechanism inside the chamber under vacuum conditions, according to one embodiment.

[0024] Figure 4 This is a plan view of the air exchange component in the air exchange mechanism inside the chamber under vacuum conditions, according to one embodiment.

[0025] Figure 5 for Figure 4 Cross-sectional structural diagram of the ventilation unit.

[0026] Figure 6This is a schematic diagram of the ventilation mechanism inside the chamber in a vacuum environment under one embodiment, in use and installation.

[0027] Figure 7 This is a structural diagram of the transmission component in the air exchange mechanism inside the chamber under vacuum conditions, according to one embodiment.

[0028] Figure 8 for Figure 7 A partial structural cross-sectional view of the transmission assembly.

[0029] In the diagram: 1. Static ventilation assembly, 2. Dynamic ventilation assembly, 3. Lifting body transmission assembly, 4. Drive shaft, 5. Lifting block, 6. Eccentric wheel, 7. Fixed seat, 8. Lower ventilation component, 9. Upper ventilation component, 10. Silicone sleeve, 11. Ventilation plate fixing column, 12. Column, 13. Air pipe connector, 14. Air inlet core, 15. Air inlet core pressure ring, 16. O-ring seal, 17. Air inlet pressure valve core, 18. Air inlet component, 19. Buffer spring, 20. Air inlet valve core, 21. Valve core compression spring, 22. Servo motor, 23. External vacuum box, 24. Inlet pipe, 25. Outlet pipe, 26. Ventilation box body, 27. Magnetofluid. Detailed Implementation

[0030] The present invention will now be described in further detail with reference to specific embodiments and accompanying drawings. Similar elements in different embodiments are referred to by associated similar element reference numerals. In the following embodiments, many details are described to facilitate a better understanding of this application. However, those skilled in the art will readily recognize that some features may be omitted in different situations, or may be replaced by other elements, materials, or methods. In some cases, certain operations related to this application are not shown or described in the specification. This is to avoid obscuring the core parts of this application with excessive description. For those skilled in the art, detailed description of these related operations is not necessary; they can fully understand the related operations based on the description in the specification and general technical knowledge in the art.

[0031] Furthermore, the features, operations, or characteristics described in the specification can be combined in any suitable manner to form various embodiments. At the same time, the steps or actions in the method description can be rearranged or adjusted in a manner obvious to those skilled in the art. Therefore, the various orders in the specification and drawings are only for the clear description of a particular embodiment and do not imply a necessary order, unless otherwise stated that a particular order must be followed.

[0032] The serial numbers assigned to components in this document, such as "first," "second," etc., are merely for distinguishing the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). Furthermore, terms such as "upper," "lower," "left," "right," and "middle" used herein are merely for clarity of description and are not intended to limit the scope of the invention. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered within the scope of the invention. Example 1

[0033] This embodiment describes a specific implementation of a vacuum environment ventilation mechanism within a chamber, such as... Figure 1 As shown, it includes: a static ventilation assembly 1, a dynamic ventilation assembly 2, and a lifting transmission assembly 3; the static ventilation assembly 1 is fixedly installed inside the outer vacuum chamber 23; the lifting transmission assembly 3 passes through the outer vacuum chamber 23; one end of the lifting transmission assembly 3 located inside the outer vacuum chamber 23 is connected to the dynamic ventilation assembly 2, pushing the dynamic ventilation assembly 2 to move toward or away from the static ventilation assembly 1; the static ventilation assembly 1 is provided with at least two upper ventilation components 9, and at least two upper ventilation components 9 are all connected to the ventilation chamber 26; the dynamic ventilation assembly 2 is provided with at least two lower ventilation components 8, and at least two lower ventilation components 8 are all connected to an external air source; when the dynamic ventilation assembly 2 moves to abut against the static ventilation assembly 1, the at least two lower ventilation components 8 are respectively connected to the at least two upper ventilation components 9 one-to-one, realizing gas exchange between the external air source and the ventilation chamber 26.

[0034] In one specific embodiment, the static ventilation assembly 1 is fixed inside the outer vacuum chamber 23 by bolts or snap-fit ​​devices, and the dynamic ventilation assembly 2 is fixed to the lifting body transmission assembly 3 by bolts or snap-fit ​​devices. When airflow exchange is required, the dynamic ventilation assembly 2 moves toward the static ventilation assembly 1, and each lower ventilation component 8 on the dynamic ventilation assembly 2 abuts against the upper ventilation component 9. Through the cooperation of the two, the internal air passages of the lower ventilation component 8 and the upper ventilation component 9 are connected. After at least one set of upper ventilation components 9 and lower ventilation components 8 are connected, the external air is exchanged. The source gas enters the ventilation box 26 through the inlet pipe 24. At the same time, after at least one set of upper ventilation components 9 and lower ventilation components 8 are connected, the gas inside the ventilation box 26 is discharged to the outside of the outer vacuum box 23 through the outlet pipe 25, thereby realizing the gas exchange between the external gas source and the ventilation box 26. In the above specific embodiment, the end of the lifting body transmission component 3 located inside the outer vacuum box 23 can be composed of an eccentric wheel 6 mechanism, a crank connecting rod mechanism, or a lifting mechanism such as a cylinder or hydraulic cylinder.

[0035] The technical effect achieved by this embodiment is that it stably realizes air exchange in the chamber in a vacuum environment. Through the cooperation of the static air exchange component 1 and the dynamic air exchange component 2, it can achieve stable air exchange or cooling of the air exchange chamber 26. The structure is simple, the footprint is small, the movement process is simple, and it is easy to operate and control. Thus, it effectively solves the problem of air exchange in the chamber in a vacuum environment.

[0036] More specifically, after the lower air exchanger 8 abuts against the upper air exchanger 9, it can directly connect the interior of the air exchange chamber 26 with the outside of the vacuum environment (specifically, the external vacuum chamber 23). This can maintain the vacuum environment without disrupting it, and keep the internal air pressure of the air exchange chamber 26 balanced with the atmospheric pressure. This avoids the adverse effects of excessive pressure difference on the internal components (such as electronic components) of the air exchange chamber 26, thus protecting the electronic components. At the same time, by means of the conductive relationship between the lower air exchanger 8 and the upper air exchanger 9, the air exchange chamber 26 can be connected to an external air source located outside the vacuum environment. By using multiple sets of conductive upper air exchangers 9 and lower air exchangers 8, gas can enter and exit the air exchange chamber 26, thereby realizing gas exchange between the air exchange chamber 26 and the outside of the vacuum environment, so as to dissipate heat and cool the air exchange chamber 26 and its internal electronic components. Example 2

[0037] This embodiment is a further improvement on embodiment 1, such as... Figure 3 As shown, the static ventilation assembly 1 includes a static ventilation plate, which can be a plate-shaped part. At least two upper ventilation components 9 are fixed on the static ventilation plate. For example, in order to ensure that the gas enters and exits at the same time, the two upper ventilation components 9 can be connected to the static ventilation plate by means of a snap ring or by threads. The air outlets of the two upper ventilation components 9 are located on the upper surface of the static ventilation plate, and the conductive connectors of the upper ventilation components 9 are located on the lower surface of the static ventilation plate.

[0038] In one specific implementation, such as Figure 4 and Figure 5As shown, the upper ventilation component 9 includes: an air-connecting pressure valve core 17, an air-connecting component 18, an air-connecting valve core 20, and a valve core compression spring 21; wherein, the air-connecting component 18 can be a rotating part, that is, the air-connecting component 18 is a cylindrical section and a flange section connected in sequence. The cylindrical section of the air-connecting component 18 penetrates the stationary ventilation plate and a retaining spring groove is opened on the outer peripheral side wall of the cylindrical section. The retaining spring is used to snap the air-connecting component 18 into the circular hole on the stationary ventilation plate; a columnar receiving cavity is opened inward from the lower surface of its flange section on the air-connecting component 18. The air-connecting pressure valve core 17 and the air-connecting component 18 are fixedly connected and cover the receiving cavity. The air-connecting pressure valve core 17 is annular. The plate-shaped component has a central circular hole on the air-pressure valve core 17 with a diameter smaller than the diameter of the receiving cavity, and the axis of the circular hole on the air-pressure valve core 17 is coaxial with the axis of the receiving cavity. The air-pressure valve core 20 includes a large cylindrical section and a small cylindrical section connected in sequence. The air-pressure valve core 20 is disposed in the receiving cavity. A valve core compression spring 21 is disposed between one end face of the large cylindrical section of the air-pressure valve core 20 and the bottom of the receiving cavity. The two ends of the valve core compression spring 21 abut against the bottom of the receiving cavity and the end face of the large cylindrical section of the air-pressure valve core 20, respectively. The other end of the air-pressure valve core 20, that is, the small cylindrical section, passes through the air-pressure valve core 17 and is slidably connected to it.

[0039] In one specific implementation, such as Figure 4 and Figure 5 As shown, several guide posts are threadedly connected to the flange section of the air receiving component 18. Each guide post is fitted with a buffer spring 19. One end of the buffer spring 19 abuts against the upper surface of the flange of the air receiving component 18, and the other end of the buffer spring 19 abuts against the lower surface of the stationary air exchange plate. This achieves the buffering effect of fixing the upper air exchange component 9 to the stationary air exchange plate, reducing the collision wear caused by the upper air exchange component 9 being abutted by the lower air exchange component 8 multiple times.

[0040] In one specific implementation, such as Figure 4 and Figure 5 As shown, the lower ventilation component 8 includes: a venting core 14, a venting core pressure ring 15, and an O-ring seal 16. The venting core 14 is a rotating structure, with a flange integrally formed on the outer peripheral sidewall at the middle position of the cylindrical section of the venting core 14. A columnar protrusion is provided on the upper surface of the venting core 14. The venting core pressure ring 15 is an annular plate-like component, which is sleeved on the columnar protrusion and fixedly connected to the venting core 14, for example, by bolt connection. 5. Connects to the gas receiving core 14. An O-ring 16 is fitted onto the top of the columnar protrusion located at the upper end of the flange of the gas receiving core 14. When the upper surface of the gas receiving core pressure ring 15 abuts against the lower surface of the gas receiving pressure valve core 17, the gas receiving core 14 presses the gas receiving valve core 20 in, connecting the lower gas exchange component 8 and the upper gas exchange component 9. At this time, the O-ring 16 abuts against the lower surface of the gas receiving pressure valve core 17, preventing leakage and ensuring that gas does not enter the vacuum environment, thus preventing disruption of the vacuum environment. Figure 2 As shown, the dynamic ventilation assembly 2 includes a dynamic ventilation plate, which can be a rectangular plate-shaped part. At least two lower ventilation components 8 are disposed through the dynamic ventilation plate. For example, the two lower ventilation components 8 are fixed to the dynamic ventilation plate by bolts. The air receiving core 14 of the lower ventilation component 8 is set upward, and the air receiving valve core 20 of the upper ventilation component 9 is directly opposite the air receiving core 14 and set downward. Air pipe connectors 13 are fixed on both the air receiving core 14 and the air receiving component 18. The air pipe connectors 13 are used to connect to the pipeline.

[0041] In the above specific embodiment, the working process of the upper ventilation component 9 and the lower ventilation component 8 cooperating for ventilation is as follows: When the ventilation box 26 inside the outer vacuum box 23 needs ventilation, the lower ventilation component 8 rises with the moving ventilation plate under the action of the lifting body transmission assembly 3 until the air receiving top core 14 presses against the air receiving valve core 20. At this time, the valve core compression spring 21 contracts, and the air receiving valve core 20 opens. At this time, the air pipe on the lower ventilation component 8 enters or exits, and the gas enters or exits into the ventilation box 26 through the air receiving component 18. When the ventilation ends, the lower ventilation component 8 descends with the moving ventilation plate under the action of the lifting body transmission assembly 3, and the air receiving top core 14 pressing against the air receiving valve core 20 disengages from the air receiving valve core 20. At this time, the valve core compression spring 21 expands, the air receiving valve core 20 returns to its initial position, the air receiving valve core 20 closes, and ventilation stops.

[0042] In one specific embodiment, the system also includes a ventilation plate fixing column 11, which is a cylinder. One end of the ventilation plate fixing column 11 is fixed to the stationary ventilation plate, and a flange is provided at the upper end of the ventilation plate fixing column 11. Multiple round holes can be opened on the flange at the upper end of the ventilation plate fixing column 11. The end of the ventilation plate fixing column 11 with the flange is fixed to the outer vacuum box 23 by bolts. The system also includes multiple columns 12, which are fixed to the upper surface of the stationary ventilation plate. For example, the columns 12 can be four aluminum cylinders. To avoid electric sparks between the columns 12, a silicone sleeve 10 is provided on the outer periphery of each column 12. The stability of the stationary ventilation plate is improved by setting the columns 12.

[0043] The beneficial effects of this embodiment are as follows: the lower air exchange component 8 moves up and down to press against the air valve core 20, thus opening the air valve core 20; the valve core compression spring 23 closes the air valve core 20, ensuring the internal sealing of the air exchange box 26; that is, when the moving air exchange component 2 moves toward the stationary air exchange component 1, causing the lower air exchange component 8 to press against the air valve core 20 (at this time, the valve core compression spring 21 contracts) and open the upper air exchange component 9, the upper air exchange component 9 and the lower air exchange component 8 are connected, and the interior of the air exchange box 26 is directly connected to the exterior of the vacuum environment (specifically, the exterior of the outer vacuum box 23), thus preventing damage to the vacuum environment; when the moving air exchange component 2 moves away from the stationary air exchange component 1, causing the lower air exchange component 8 to release the pressure on the air valve core 20 and close the upper air exchange component 9, the air exchange box 26 will not be connected to the interior or exterior of the vacuum environment, thus achieving the sealing of the air exchange box 26 and preventing damage to the vacuum environment. An O-ring 16 is used between the upper ventilation component 9 and the lower ventilation component 8 to avoid damaging the seal and preventing air leakage, so as to achieve the purpose of air exchange in the chamber without destroying the vacuum environment, ensuring productivity. The mechanism is lightweight and ensures the stability of the equipment. By setting a buffer spring 19, the lower ventilation component 8 can be prevented from being worn by repeated collisions with the upper ventilation component 9. While ensuring the structural stability of the lower ventilation component 9, the gas in the ventilation chamber 26 can be prevented from leaking into the outer vacuum chamber 23, thereby ensuring that the vacuum environment is not destroyed. Example 3

[0044] This embodiment includes all the technical features of embodiment 2, and based on this, such as Figures 6 to 8 As shown, the lifting body transmission assembly 3 includes: a transmission shaft 4, a fixed seat 7, a lifting block 5, and an eccentric wheel 6; the transmission shaft 4 passes through the outer vacuum box 23; one end of the transmission shaft 4 located inside the outer vacuum box 23 is fixedly connected to the eccentric wheel 6, and the lifting block 5 is sleeved on the outer periphery of the eccentric wheel 6; the fixed seat 7 is fixed inside the outer vacuum box 23, and a groove is provided on the fixed seat 7; the lifting block 5 is set in the groove and slidably connected to the fixed seat 7; the transmission shaft 4 is rotatably connected to the outer vacuum box 23 through a magnetic fluid 27.

[0045] Specifically, the drive shaft 4 is fixed to the servo motor 22 via a universal joint. The drive shaft 4 is a cylindrical shaft. The drive shaft 4 and the eccentric wheel 6 are fixed together by an overfit and a key connection. The lifting block 5 can be a square block structure. A square hole is opened on the lifting block 5. The square hole is fitted on the outer circumference of the eccentric wheel 6. The two sides of the drive shaft 4 located on the eccentric shaft are rotatably connected by bearings and fixed seats 7. The fixed seats 7 are fixed in the outer vacuum box 23 by bolts.

[0046] like Figure 6As shown, the working process of this embodiment is as follows: the servo motor 22 rotates, and the power is transmitted through the transmission shaft 4 to drive the eccentric wheel 6 to rotate. The eccentric effect of the eccentric wheel 6 drives the lifting block 5 to move up and down reciprocally on the fixed seat 7. The dynamic ventilation component 2 fixed on the lifting block 5 moves up and down reciprocally accordingly. When the dynamic ventilation component 2 moves upward to cooperate with the static ventilation component 1, the two lower ventilation components 8 are respectively connected to the two upper ventilation components 9. One set of lower ventilation components 8 discharges the gas through the upper ventilation components 9 and then through the air inlet pipe 24 into the ventilation box 26. The other set of upper ventilation components 9 discharges the gas through the lower ventilation components 8 and then through the air outlet pipe 25 into the ventilation box 26. When the ventilation is completed, the dynamic ventilation component 2 moves downward with the lifting block 5 and gradually moves away from the static ventilation component 1. The lower ventilation components 8 and the upper ventilation components 9 are separated, the valve core closes, and the ventilation ends.

[0047] The beneficial effects of this embodiment are as follows: the servo motor 22 drives the eccentric wheel 6 to rotate smoothly and accurately, ensuring that it can hit the valve core every time. The eccentric wheel 6 saves design costs compared with cams, etc. The air receiving part 18 is small and sensitive, saving space to the maximum extent. Through the setting of the magnetic fluid 27, the transmission shaft 4 does not affect the vacuum environment inside the outer vacuum box 23 during rotation, and has good sealing performance.

[0048] The above examples illustrate the present invention only to aid in understanding it and are not intended to limit the scope of the invention. Those skilled in the art can make various simple deductions, modifications, or substitutions based on the principles of this invention.

Claims

1. A mechanism for air exchange in a box in a vacuum environment, characterized by, include: A static ventilation assembly (1) is fixedly installed inside an external vacuum chamber (23). The static ventilation assembly (1) includes an upper ventilation component (9), which communicates with a ventilation box body (26) installed inside the external vacuum chamber (23). The dynamic ventilation assembly (2) is capable of moving toward and away from the static ventilation assembly (1). The dynamic ventilation assembly (2) includes a lower ventilation component (8) which is configured to communicate with the outside of the outer vacuum chamber (23). The lifting body transmission assembly (3) is used to pass through the outer vacuum box (23). One end of the lifting body transmission assembly (3) located inside the outer vacuum box (23) is connected to the dynamic ventilation assembly (2). The lifting body transmission assembly (3) is also used to push the dynamic ventilation assembly (2) to move toward and away from the static ventilation assembly (1). The dynamic ventilation assembly (2) moves toward the static ventilation assembly (1) so that when the lower ventilation component (8) abuts against the upper ventilation component (9), the lower ventilation component (8) and the upper ventilation component (9) are connected to each other, so as to enable the ventilation box (26) to communicate with the outside of the outer vacuum box (23). in: The upper ventilation component (9) includes an air-receiving pressure valve core (17), an air-receiving component (18), and an air-receiving valve core (20). The air-receiving component (18) is used to connect to the ventilation box (26) through an air pipe connector (13). The air-receiving pressure valve core (17) is fixedly connected to the other end of the air-receiving component (18). The air-receiving valve core (20) is disposed inside the air-receiving component (18). The air-receiving valve core (20) passes through the air-receiving pressure valve core (17) and is slidably connected to the air-receiving pressure valve core (17). When the lower ventilation component (8) abuts against the air-receiving pressure valve core (17), the air-receiving valve core (20) is pressed into the air-receiving component (18). The lower ventilation component (8) is connected to the upper ventilation component (9). The lower air exchange component (8) includes an air inlet core (14), which is used to communicate with the outside of the outer vacuum box (23) through an air pipe connector (13); the air inlet core (14) is also used to press the air inlet valve core (20) into the air inlet component (18) so that the lower air exchange component (8) and the upper air exchange component (9) are connected. The lifting body transmission assembly (3) includes a transmission shaft (4), a fixed seat (7), a lifting block (5), and an eccentric wheel (6). The transmission shaft (4) is used to pass through the outer vacuum box (23), and the fixed seat (7) is used to fix it inside the outer vacuum box (23). The end of the transmission shaft (4) located inside the outer vacuum box (23) is fixedly connected to the eccentric wheel (6). The lifting block (5) is sleeved on the eccentric wheel (6), and the lifting block (5) is slidably connected to the fixed seat (7). The dynamic ventilation assembly (2) is fixed on the lifting block (5).

2. The ventilation mechanism inside the chamber under vacuum environment as described in claim 1, characterized in that, The number of the upper ventilation component (9) and the lower ventilation component (8) is set to multiple, and the multiple lower ventilation components (8) can be connected and communicated with the multiple upper ventilation components (9) in a one-to-one correspondence; wherein: At least one set of the upper air exchanger (9) and the lower air exchanger (8) are connected for the gas in the air exchange box (26) to be discharged to the outside of the outer vacuum box (23), and at least another set of the upper air exchanger (9) and the lower air exchanger (8) are connected for the gas outside the outer vacuum box (23) to enter the air exchange box (26).

3. The ventilation mechanism inside the chamber under vacuum environment as described in claim 1, characterized in that, The upper air exchange component (9) also includes a valve core compression spring (21). The air receiving component (18) has a receiving cavity. The air receiving pressure valve core (17) covers the receiving cavity. The air receiving valve core (20) is disposed in the receiving cavity. The valve core compression spring (21) is disposed between one end of the air receiving valve core (20) and the bottom of the receiving cavity. The other end of the air receiving valve core (20) passes through the air receiving pressure valve core (17).

4. The ventilation mechanism inside the chamber under vacuum environment as described in claim 1, characterized in that, The lower air exchange component (8) also includes an air receiving top core pressure ring (15) and an O-ring seal (16). The air receiving top core (14) is provided with a columnar protrusion. The air receiving top core pressure ring (15) is sleeved on the columnar protrusion and fixedly connected to the air receiving top core (14). The O-ring seal (16) is sleeved on the top of the columnar protrusion. When the air receiving top core pressure ring (15) abuts against the air receiving pressure valve core (17), the air receiving top core (14) presses the air receiving valve core (20) into the air receiving component (18), and the O-ring seal (16) abuts against the air receiving pressure valve core (17).

5. The ventilation mechanism inside the chamber under vacuum environment as described in claim 1, characterized in that, The drive shaft (4) is rotatably connected to the outer vacuum box (23) via a magnetic fluid (27).

6. The ventilation mechanism inside the chamber under vacuum environment as described in claim 1, characterized in that, The static ventilation assembly (1) further includes a static ventilation plate, which is fixedly installed inside the outer vacuum box (23). The upper ventilation component (9) is installed through the static ventilation plate, and a buffer spring (19) is provided between the static ventilation plate and the upper ventilation component (9). And / or the dynamic ventilation assembly (2) further includes a dynamic ventilation plate, and the lower ventilation component (8) is installed through the dynamic ventilation plate. The dynamic ventilation plate is connected to the lifting body transmission assembly (3).

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