一种基于扫描声学显微镜的批量器件检测装置

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CN117607267BActive Publication Date: 2026-07-17EAST CHINA INST OF OPTOELECTRONICS INTEGRATEDDEVICE

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Patent Information

Authority / Receiving Office: CN · China
Patent Type: Patents(China)
Current Assignee / Owner: EAST CHINA INST OF OPTOELECTRONICS INTEGRATEDDEVICE
Filing Date: 2023-11-22
Publication Date: 2026-07-17

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Abstract

本发明涉及一种基于扫描声学显微镜的批量器件检测装置，包括机架，机架上设有粘片装置和去水泡装置；粘片装置包括粘片箱，粘片箱内设有一对相平行的导杆，导杆上滑动连接一对相平行的限位板，每个限位板上设有锁紧件；在限位板下侧还设有输送机构，输送机构上可放有粘片台，粘片台包括承载板，在承载板上设有夹持件；去水泡装置位于粘片装置出口一侧的机架上，其包括去水泡箱，去水泡箱内设有空间位移机构，空间位移机构的移动端上连接喷水组件，在喷水组件下方设有水槽，喷水组件可伸入至水槽在内。本发明简化了手工作业的繁琐操作，减少了人的直接接触，避免人体静电损伤和降低了元器件引脚的物理损伤，同时节省大量时间，提高了工作效率。

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