一种动态可调的混合全介电超表面结构及参数优化方法
By integrating a hybrid structure of silicon, phase change material, and titanium dioxide layer into an all-dielectric metasurface structure and optimizing the structural parameters, the optical loss problem caused by the high absorption of phase change material was solved, achieving efficient dynamic tunability and performance improvement.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- NAT UNIV OF DEFENSE TECH
- Filing Date
- 2023-11-23
- Publication Date
- 2026-07-17
AI Technical Summary
In the prior art, the high absorption coefficient of phase change materials in the short optical band results in limited performance of dynamically tunable all-dielectric metasurface structured color devices in the short optical band, causing excessive optical loss and reducing device performance.
A hybrid all-dielectric metasurface structure is adopted, including a substrate and a resonator composed of 5 layers. The resonator is composed of alternating layers of silicon, phase change material and titanium dioxide. The structural parameters are optimized by a pattern search algorithm, and antimony trisulfide phase change material is integrated to achieve dynamic tunability and reduce optical loss.
By integrating antimony trisulfide phase change material, the Mie resonance intensity inside the metasurface was enhanced, breaking the short-wavelength efficiency limit and achieving efficient dynamic tunability and improved device performance.
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Figure CN117613564B_ABST