A liquid supplement device and ozone water decomposition system

Abstract

The application provides a liquid supplement device and an ozone water decomposition system, which comprises a liquid storage device, a liquid guide pipe and an adjuster; the liquid storage device is used for storing reaction liquid; one end of the liquid guide pipe is communicated with the liquid storage device, and the other end of the liquid guide pipe is used for being communicated with a reaction chamber; the adjuster comprises a containing box and an adjusting part; the containing box is arranged on the liquid guide pipe, so that the reaction liquid of the liquid guide pipe is discharged through the containing box; and the adjusting part is movably arranged in the containing box and is used for adjusting the speed of discharging the reaction liquid from the containing box. The liquid supplement device disclosed by the application switches the flow size of the reaction liquid by arranging the adjuster on the liquid guide pipe, reduces the equipment installation space, and does not need to additionally arrange a control valve on the reaction chamber, thereby improving the sealing performance of the reaction chamber.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a liquid replenishment device and an ozone water decomposition system. Background Technology

[0002] Both ozone and ozonated water possess extremely strong oxidizing capabilities; in solution, ozone's oxidation potential is second only to fluorine. Ozone water can oxidize organic matter in solution into H₂O, CO₂, organic acids, etc., and can oxidize metal elements to their highest oxidation states. Therefore, the powerful oxidizing ability of ozonated water can be used to replace H₂O₂ in chemical cleaning. In the photovoltaic field, the oxidizing power of ozonated water is frequently used for cleaning, such as pre-texturing cleaning, post-texturing cleaning, post-alkali polishing cleaning, and post-decoration cleaning. Furthermore, the oxidizing power of ozonated water can also be used for sterilization and oxidation.

[0003] Ozone water takes tens of minutes to several hours to decompose naturally under ideal conditions. Since ozone water is harmful to the human body, it is necessary to decompose and treat the ozone water discharged after use as soon as possible.

[0004] Existing ozone water decomposition systems include a reaction chamber, a liquid delivery pipe, and a replenishment device. One end of the reaction chamber is connected to the liquid delivery pipe, and the side wall of the reaction chamber is connected to the replenishment device. The liquid delivery pipe is used to discharge ozone water into the reaction chamber, and the replenishment device uses a flexible hose to introduce the reaction solution into the reaction chamber so that the ozone water reacts with the reaction solution. Because the amount of reaction solution required for the ozone water decomposition reaction differs from the amount required for liquid replacement within the reaction chamber, existing equipment uses two flexible hoses to introduce different amounts of reaction solution. However, this two-hose delivery structure occupies more space and increases the number of valves on the reaction chamber, thus affecting the chamber's sealing performance. Summary of the Invention

[0005] The purpose of this invention is to provide a liquid replenishment device and an ozone water decomposition system that can regulate the discharge rate of the reaction liquid while reducing installation space and increasing sealing performance.

[0006] To achieve the above objectives, in a first aspect, the present invention provides a replenishment device for providing a reaction solution, comprising a reservoir, a delivery tube, and a regulator;

[0007] The reservoir is used to hold the reaction liquid;

[0008] One end of the liquid guide tube is connected to the liquid reservoir, and the other end of the liquid guide tube is used to connect to the reaction chamber;

[0009] The regulator includes a receiving tank and an adjusting element. The receiving tank is disposed on the liquid guide tube so that the reaction liquid in the liquid guide tube is discharged through the receiving tank. The adjusting element is movably disposed inside the receiving tank and is used to adjust the rate at which the reaction liquid is discharged from the receiving tank.

[0010] In some embodiments, the liquid guide tube includes a first pipe, a second pipe, and a third pipe; wherein,

[0011] One end of the first pipe is connected to the liquid reservoir, and the other end of the first pipe is connected to the top of the container.

[0012] The third pipe passes through the second pipe, and one end of the second pipe and one end of the third pipe are both connected to the bottom of the container, and the other end of the second pipe and the other end of the third pipe are both used to connect to the reaction chamber.

[0013] The adjusting component is disposed inside the receiving box and is used to divert liquid in the first pipe to the third pipe, or to divert liquid in the first pipe to both the third pipe and the second pipe.

[0014] In some embodiments, the regulator includes a transmission mechanism;

[0015] The adjusting member has a telescopic part and a drainage part. The adjusting member has a drainage channel along its axial direction. The drainage channel passes through the telescopic part and the drainage part. The telescopic part is connected to the first pipe. The drainage part corresponds to the third pipe so that the drainage part and the third pipe are coaxially arranged.

[0016] The transmission mechanism is located on the side wall of the receiving box and connected to the draining part, and is used to drive the draining part to be inserted into the third pipe, or to drive the draining part to be positioned above the third pipe.

[0017] In some embodiments, the regulator further includes a driver and a retainer;

[0018] The driver is located on the outer side wall of the housing and is connected to the transmission mechanism located inside the housing. The driver is used to drive the transmission mechanism to move.

[0019] The fixing member is provided on the transmission mechanism, and one end of the fixing member is connected to the drainage part.

[0020] In some embodiments, the transmission mechanism includes a transmission assembly, a first moving member, and a second moving member;

[0021] The driver is connected to the first moving part and is used to drive the first moving part to move;

[0022] The second movable member is slidably disposed on the first movable member, and the first movable member and the second movable member are movably connected through the transmission assembly;

[0023] When the driver moves the first moving member up and down, the second moving member also moves up and down relative to the first moving member.

[0024] In some embodiments, the regulator further includes a support box, and the transmission assembly includes a drive chain, a first spur rack, a second spur rack, a rotating rod, a first gear, and a second gear;

[0025] The side wall of the first moving part is provided with a linear rack structure, the drive chain is connected to the driver, and the drive chain meshes with the linear rack structure to drive the first moving part to move;

[0026] The rotating rod is rotatably mounted on the support box and is located between the first moving member and the second moving member that are arranged opposite to each other.

[0027] The first and second spur racks are spaced apart on the same side of the rotating rod, and the first spur rack is connected to the first moving member, and the second spur rack is connected to the second moving member.

[0028] The first gear and the second gear are sleeved on the rotating rod at intervals, and the first gear meshes with the first spur rack, and the second gear meshes with the second spur rack;

[0029] The fixing member is located on the second movable member, and the fixing member is close to the side of the third pipe.

[0030] In some embodiments, the second moving member is further provided with a sliding protrusion near the side wall of the first moving member, the sliding protrusion extending along the axial direction of the adjusting member, and the sliding protrusion being located on the side of the first rack and the second rack.

[0031] The first movable component has a sliding groove corresponding to the sliding protrusion, and the sliding protrusion is slidably disposed in the sliding groove.

[0032] In some embodiments, a buffer sleeve located within the receiving box is also included, the buffer sleeve being fitted at one end of the third pipe.

[0033] In some embodiments, the system further includes a resilient support member disposed on the side of the buffer sleeve, with one end of the support member connected to the buffer sleeve and the other end of the support member connected to the third pipe.

[0034] In some embodiments, the buffer sleeve is a rubber sleeve, and the buffer sleeve has a flared structure.

[0035] Secondly, embodiments of the present invention provide an ozone water decomposition system, including a reaction chamber, a drain pipe, and the aforementioned replenishment device;

[0036] One end of the drain pipe is connected to the reaction chamber and is used to introduce ozone water into the reaction chamber.

[0037] The replenishment device is connected to the reaction chamber and is used to introduce the reaction liquid into the reaction chamber to react with ozone water.

[0038] The beneficial effects of the liquid replenishment device and ozone water decomposition system provided by the present invention are as follows:

[0039] 1. The speed at which the reaction liquid is discharged from the liquid guide tube can be adjusted by setting a regulator to meet the required amount of reaction liquid in the reaction chamber.

[0040] 2. The structure is simple, occupies little space, and increases the sealing of the reaction chamber.

[0041] 3. The transmission mechanism in this embodiment can be used to quickly adjust the discharge speed of the reaction liquid, thereby improving the efficiency of flow rate adjustment.

[0042] 4. By setting a buffer sleeve, direct contact between the adjusting component and the end face of the third pipe is avoided, which would cause structural wear. Attached Figure Description

[0043] Figure 1 This is a schematic diagram of the connection between the liquid replenishment device and the reaction chamber in an embodiment of the present invention;

[0044] Figure 2 A partial cross-sectional view of the regulator located at the liquid guide tube in an embodiment of the present invention;

[0045] Figure 3 A schematic diagram of the transmission mechanism provided in an embodiment of the present invention;

[0046] Figure 4 A front view of the first movable component according to an embodiment of the present invention;

[0047] Figure 5 An exploded view of a portion of the transmission mechanism provided in an embodiment of the present invention;

[0048] Figure 6 for Figure 5 Detailed diagram of point A in the middle;

[0049] Figure 7 This is a top view of the second moving member and the first moving member cooperating and connecting according to an embodiment of the present invention;

[0050] Figure 8 This is a schematic diagram showing the connection between the buffer sleeve and the third pipe in an embodiment of the present invention.

[0051] Figure label:

[0052] Liquid reservoir 1, liquid guide tube 2, first pipe 21, second pipe 22, third pipe 23, regulator 3, container 31, adjusting component 32, telescopic part 321, drainage part 322, drainage channel 323, transmission mechanism 33, first moving component 331, linear rack structure 3311, second moving component 332, sliding protrusion 3321, drive chain 3331, first linear rack 3332, second linear rack 3333, rotating rod 3334, first gear 3335, second gear 3336, driver 34, fixing component 35, support box 36, buffer sleeve 4, support component 5, replenishing valve 6, control valve 7, reaction chamber 8. Detailed Implementation

[0053] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects.

[0054] refer to Figure 1 As shown, this embodiment of the invention provides a replenishment device for supplying reaction solution, including a reservoir 1, a delivery pipe 2, and a regulator 3. The reservoir 1 holds the reaction solution, and its upper end is equipped with a replenishment valve 6. When the reaction solution in the reservoir 1 is insufficient, the replenishment valve 6 is opened to replenish the reservoir 1. One end of the delivery pipe 2 is connected to the lower end of the reservoir 1, and the other end is connected to a reaction chamber 8 via a control valve 7. The regulator 3 is mounted on the delivery pipe 2 and is used to regulate the rate at which the reaction solution is discharged from the delivery pipe 2.

[0055] In this embodiment, since the amount of reaction liquid required for the ozone water decomposition reaction is different from the amount of reaction liquid required for changing the liquid in the reaction chamber 8, the flow rate of the reaction liquid is switched by setting the regulator 3 on one of the liquid guide pipes 2, which reduces the equipment installation space and eliminates the need to add a control valve 7 to the reaction chamber 8, thereby improving the sealing performance of the reaction chamber 8.

[0056] refer to Figure 1 and Figure 2 As shown, in some embodiments, the regulator 3 includes a receiving tank 31 and an adjusting member 32, and the liquid guide pipe 2 includes a first pipe 21, a second pipe 22, and a third pipe 23. One end of the first pipe 21 is connected to the liquid reservoir 1, and the other end of the first pipe 21 is connected to the top of the receiving tank 31. The third pipe 23 passes through the second pipe 22 and is coaxially arranged with the second pipe 22. One end of the second pipe 22 and one end of the third pipe 23 are both connected to the bottom of the receiving tank 31, and the other ends of the second pipe 22 and the third pipe 23 are both connected to the reaction chamber 8 via control valves 7. The adjusting member 32 is located inside the receiving tank 31. The adjusting member 32 can directly guide the liquid in the first pipe 21 into the third pipe 23, or guide the liquid in the first pipe 21 into the receiving tank 31, and then discharge it simultaneously through the third pipe 23 and the second pipe 22.

[0057] In this embodiment, when the ozone water oxidation reaction is carried out in the reaction chamber 8, the reaction liquid can be directly drained into the reaction chamber 8 through the third pipe 23 by adjusting the regulating component 32. When the liquid in the reaction chamber 8 needs to be replaced, a large amount of reaction liquid is required. The liquid in the first pipe 21 can be drained into the receiving tank 31 through the regulating component 32, and then discharged simultaneously through the third pipe 23 and the second pipe 22 to increase the discharge speed of the reaction liquid, so that a large amount of reaction liquid can be quickly obtained in the reaction chamber 8.

[0058] Specifically, the regulator 3 includes a transmission mechanism 33, and the regulating member 32 has a telescopic part 321 and a drainage part 322. The regulating member 32 has a drainage channel 323 extending along its axial direction, which passes through the telescopic part 321 and the drainage part 322. The telescopic part 321 is connected to the first pipe 21, and the drainage part 322 corresponds to the third pipe 23, so that the drainage part 322 and the third pipe 23 are coaxially arranged. The transmission mechanism 33 is located on the side wall of the receiving box 31 and connected to the drainage part 322. Since the telescopic part 321 is telescopic, the transmission mechanism 33 can drive the drainage part 322 to move up and down. When the transmission mechanism 33 drives the drainage part 322 to move downward, the drainage part 322 can be inserted into the third pipe 23. At this time, the liquid in the first pipe 21 can flow through the drainage part 322 until it flows into the third pipe 23. When the transmission mechanism 33 drives the drainage part 322 to move upward, so that the drainage part 322 is above the third pipe 23, the liquid in the first pipe 21 can be discharged into the container 31, and then discharged simultaneously through the third pipe 23 and the second pipe 22.

[0059] In this embodiment, the telescopic part 321 can be a telescopic tube, and the drainage part 322 can be a drainage pipe.

[0060] Furthermore, the regulator 3 also includes a driver 34 and a fixing member 35. The driver 34 is disposed on the outer side wall of the receiving box 31 and connected to the transmission mechanism 33 located inside the receiving box 31. The driver 34 provides driving force to drive the transmission mechanism 33 to move axially along the regulator 32. The fixing member 35 is disposed on the transmission mechanism 33, and one end of the fixing member 35 is fixedly connected to the draining part 322 to drive the draining part 322 to move up and down.

[0061] refer to Figures 1 to 3 As shown, in some embodiments, the transmission mechanism 33 includes a transmission assembly, a first moving member 331, and a second moving member 332. The driver 34 is connected to the first moving member 331 and is used to drive the first moving member 331. The first moving member 331 and the second moving member 332 are movably connected through the transmission assembly. When the driver 34 drives the first moving member 331 to move upward, the second moving member 332 also moves upward relative to the first moving member 331. Similarly, when the driver 34 drives the first moving member 331 to move downward, the second moving member 332 also moves downward relative to the first moving member 331.

[0062] In this embodiment, by setting the transmission component, the effect of one-step drive and two-step movement can be achieved. That is, when the driver 34 is running, while the first moving part 331 moves up and down, the second moving part 332 moves up and down synchronously relative to the first moving part 331, so as to improve the efficiency of adjusting the discharge of the reaction liquid.

[0063] Specifically, in combination Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, the regulator 3 also includes a support box 36, which is disposed on the receiving box 31 and covers the transmission mechanism 33. The transmission assembly includes a drive chain 3331, a first spur rack 3332, a second spur rack 3333, a rotating rod 3334, a first gear 3335, and a second gear 3336, all disposed within the support box 36. Specifically, the first moving member 331 has a spur rack structure 3311 on one side wall near the support box 36. The driver 34 is located outside the receiving box 31, and the driving shaft and driven shaft of the driver 34 pass through the support box 36 and mesh with the two ends of the inner side of the drive chain 3331. The outer side of the drive chain 3331 meshes with the spur rack structure 3311. It should be noted that the two ends of the drive chain 3331 are connected to form a closed loop, and the driving shaft and the driven shaft are located within the closed loop of the drive chain 3331 to drive the drive chain 3331 to rotate. Therefore, when the drive chain 3331 moves, it can drive the first moving member 331 to move upward or downward. The rotating rod 3334 is rotatably disposed within the support box 36, and the extended portion of the rotating rod 3334 is located between the first moving member 331 and the second moving member 332, which are arranged opposite to each other. The first rack 3332 and the second rack 3333 are spaced apart on the same side of the rotating rod 3334. One end of the first rack 3332 is provided with a connecting rod that can be inserted into the side wall of the first moving member 331 so that the first rack 3332 is fixedly connected to the first moving member 331. The second rack 3333 is connected to the second moving member 332 near the side wall of the first moving member 331, and the first rack 3332 and the second rack 3333 have the same extension direction as the straight rack structure 3311. The first gear 3335 and the second gear 3336 are spaced apart and sleeved on the rotating rod 3334. The first gear 3335 meshes with the first spur rack 3332, and the second gear 3336 meshes with the second spur rack 3333. The fixing member 35 is provided on the second moving member 332, and the fixing member 35 is located near the third pipe 23.

[0064] In this embodiment, when the driver 34 drives the drive chain 3331 to rotate counterclockwise, the drive chain 3331 will drive the first moving member 331 to move downward. Since the first rack 3332 is connected to the first moving member 331, the first rack 3332 will move downward synchronously with the first moving member 331. Furthermore, since the first rack 3332 meshes with the first gear 3335, the downward movement of the first rack 3332 will simultaneously drive the first gear 3335 to rotate counterclockwise, so that the first gear 3335 drives the rotating rod 3334 and the second gear 3336 to rotate counterclockwise (specific details can be found in conjunction with...). Figure 6 and Figure 7 (Understanding). Since the second gear 3336 and the second rack 3333 mesh, when the second gear 3336 rotates counterclockwise, it will drive the second moving member 332 to move downward relative to the first moving member 331 through the second rack 3333, thus achieving the effect of one-step drive and two-step movement.

[0065] Similarly, when the drive chain 3331 drives the first moving member 331 to move upward, the first spur rack 3332 on the first moving member 331 will drive the first gear 3335 to rotate clockwise, so that the first gear 3335 drives the rotating rod 3334 and the second gear 3336 to rotate clockwise. When the second gear 3336 rotates, it will drive the second moving member 332 to move upward relative to the first moving member 331 through the second spur rack 3333.

[0066] In some embodiments, the second moving member 332 is further provided with a sliding protrusion 3321 near the side wall of the first moving member 331. The sliding protrusion 3321 extends along the axial direction of the adjusting member 32 and is located on the side of the first rack 3332 and the second rack 3333. The first moving member 331 is provided with a sliding groove corresponding to the sliding protrusion 3321. The sliding groove is adapted to the sliding protrusion 3321 so that the sliding protrusion 3321 is slidably disposed in the sliding groove.

[0067] refer to Figure 5 , Figure 6 and Figure 7As shown, in this embodiment, the sliding protrusion 3321 is T-shaped and passes through the sliding groove, so that the second moving member 332 can only move along the sliding groove. Furthermore, due to the friction between the sliding protrusion 3321 and the sliding groove, the meshing force between the first spur rack 3332 and the first gear 3335, and the meshing force between the second spur rack 3333 and the second gear 3336, the second moving member 332 remains fixed relative to the first moving member 331 without external force.

[0068] Therefore, when the drive chain 3331 drives the first moving member 331 to move, the second moving member 332 will move along with the first moving member 331. Since the first spur rack 3332 on the first moving member 331 will drive the first gear 3335 to rotate during the movement, the first gear 3335 will drive the rotating rod 3334 and the second gear 3336 to rotate. Since the second gear 3336 and the second spur rack 3333 mesh, when the second gear 3336 rotates, it is equivalent to providing an external force to the second moving member 332, so that while the first moving member 331 moves, the second moving member 332 moves further relative to the first moving member 331.

[0069] Furthermore, by setting the sliding protrusion 3321 and the sliding groove, the moving direction of the first moving member 331 and the second moving member 332 can be limited, and the first moving member 331 and the second moving member 332 can be kept stable during movement.

[0070] refer to Figure 2 and Figure 8 As shown, in some embodiments, the fluid replenishment device further includes a buffer sleeve 4 disposed in the receiving tank 31, one end of the buffer sleeve 4 is inserted into the first pipe 21, a portion of the buffer sleeve 4 is located in the receiving tank 31, and the buffer sleeve 4 is in communication with the first pipe 21.

[0071] In this embodiment, the buffer sleeve 4 is a rubber sleeve with a trumpet-shaped structure. When the transmission mechanism 33 drives the drainage part 322 to move toward the third pipe 23, the drainage part 322 will abut against the buffer sleeve 4 to avoid the drainage part 322 directly contacting the third pipe 23 and causing structural wear.

[0072] Furthermore, the fluid replenishment device also includes an elastic support member 5, which is disposed on the side of the buffer sleeve 4, with one end of the support member 5 connected to the outer wall of the buffer sleeve 4 and the other end of the support member 5 connected to the end face of the third pipe 23.

[0073] In this embodiment, the support member 5 serves to support and fix the buffer sleeve 4. The support member 5 can be a spring.

[0074] In yet another embodiment of the present invention, an ozone water decomposition system is provided, with reference to... Figure 1 As shown, the device includes a reaction chamber 8, a drain pipe (not shown in the figure), and a replenishing device. One end of the drain pipe is connected to the reaction chamber and is used to introduce ozone water into the reaction chamber 8. The replenishing device is connected to the reaction chamber 8 through a control valve 7 and is used to introduce reaction liquid into the reaction chamber 8 to react with ozone water.

[0075] In this embodiment, by employing the liquid replenishment device disclosed above, the internal installation space occupied in the ozone water decomposition system is reduced. Furthermore, by setting a regulator 3 on one of the liquid guide pipes 2, the discharge rate of the reaction liquid from the liquid guide pipe 2 can be adjusted to meet the required amount of reaction liquid in the reaction chamber 8. This reduces the need for control valves 7 and increases the sealing performance of the reaction chamber 8.

[0076] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A device for supplying a reaction solution, characterized in that, Includes a reservoir, a delivery tube, and a regulator; The reservoir is used to hold the reaction liquid; One end of the liquid guide tube is connected to the liquid reservoir, and the other end of the liquid guide tube is used to connect to the reaction chamber; The regulator includes a receiving tank and an adjusting component. The receiving tank is disposed on the liquid guide tube so that the reaction liquid in the liquid guide tube is discharged through the receiving tank. The adjusting component is movably disposed inside the receiving tank and is used to adjust the rate at which the reaction liquid is discharged from the receiving tank. The liquid guiding tube includes a first pipe, a second pipe, and a third pipe; wherein, One end of the first pipe is connected to the liquid reservoir, and the other end of the first pipe is connected to the top of the container. The third pipe passes through the second pipe, and one end of the second pipe and one end of the third pipe are both connected to the bottom of the container, and the other end of the second pipe and the other end of the third pipe are both used to connect to the reaction chamber. The adjusting component is located inside the receiving tank and is used to directly guide the liquid in the first pipe into the third pipe, or to guide the liquid in the first pipe into the receiving tank and discharge it simultaneously through the third pipe and the second pipe.

2. The fluid replenishment device according to claim 1, characterized in that, The regulator includes a transmission mechanism; The adjusting member has a telescopic part and a drainage part. The adjusting member has a drainage channel along its axial direction. The drainage channel passes through the telescopic part and the drainage part. The telescopic part is connected to the first pipe. The drainage part corresponds to the third pipe so that the drainage part and the third pipe are coaxially arranged. The transmission mechanism is located on the side wall of the receiving box and connected to the draining part, and is used to drive the draining part to be inserted into the third pipe, or to drive the draining part to be positioned above the third pipe.

3. The fluid replenishment device according to claim 2, characterized in that, The regulator also includes a driver and a fixing element; The driver is located on the outer side wall of the housing and is connected to the transmission mechanism located inside the housing. The driver is used to drive the transmission mechanism to move. The fixing member is provided on the transmission mechanism, and one end of the fixing member is connected to the drainage part.

4. The fluid replenishment device according to claim 3, characterized in that, The transmission mechanism includes a transmission assembly, a first moving part, and a second moving part; The driver is connected to the first moving part and is used to drive the first moving part to move; The second movable member is slidably disposed on the first movable member, and the first movable member and the second movable member are movably connected through the transmission assembly; When the driver moves the first moving member up and down, the second moving member also moves up and down relative to the first moving member.

5. The fluid replenishment device according to claim 4, characterized in that, The regulator also includes a support box, and the transmission assembly includes a drive chain, a first rack, a second rack, a rotating rod, a first gear, and a second gear. The side wall of the first moving part is provided with a linear rack structure, the drive chain is connected to the driver, and the drive chain meshes with the linear rack structure to drive the first moving part to move; The rotating rod is rotatably mounted on the support box and is located between the first moving member and the second moving member that are arranged opposite to each other. The first and second spur racks are spaced apart on the same side of the rotating rod, and the first spur rack is connected to the first moving member, and the second spur rack is connected to the second moving member. The first gear and the second gear are sleeved on the rotating rod at intervals, and the first gear meshes with the first spur rack, and the second gear meshes with the second spur rack; The fixing member is located on the second movable member, and the fixing member is close to the side of the third pipe.

6. The fluid replenishment device according to claim 5, characterized in that, The second moving member is also provided with a sliding protrusion near the side wall of the first moving member. The sliding protrusion extends along the axial direction of the adjusting member and is located on the side of the first straight rack and the second straight rack. The first movable component has a sliding groove corresponding to the sliding protrusion, and the sliding protrusion is slidably disposed in the sliding groove.

7. The fluid replenishment device according to claim 1, characterized in that, It also includes a buffer sleeve located inside the receiving box, the buffer sleeve being fitted at one end of the third pipe.

8. The fluid replenishment device according to claim 7, characterized in that, It also includes a flexible support member, which is located on the side of the buffer sleeve, with one end of the support member connected to the buffer sleeve and the other end of the support member connected to the third pipe.

9. The fluid replenishment device according to claim 7, characterized in that, The buffer sleeve is a rubber sleeve, and the buffer sleeve has a trumpet-shaped structure.

10. An ozone water decomposition system, characterized in that, Includes a reaction chamber, a drain pipe, and a replenishment device as described in any one of claims 1 to 9; One end of the drain pipe is connected to the reaction chamber and is used to introduce ozone water into the reaction chamber. The replenishment device is connected to the reaction chamber and is used to introduce the reaction liquid into the reaction chamber to react with ozone water.

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