一种喷墨打印水基前驱体制备二维过渡金属硫属化物的方法
By combining inkjet printing of water-based precursors with CVD equipment and magnet rapid movement technology, high-precision and highly repeatable patterned growth of large-area, high-quality two-dimensional transition metal chalcogenides was achieved, solving the growth control problem in existing technologies and achieving rapid and stable growth results.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- JIANGNAN UNIV
- Filing Date
- 2023-11-23
- Publication Date
- 2026-07-17
AI Technical Summary
Existing technologies struggle to achieve high-precision, reproducible patterned growth of large-area, high-quality two-dimensional transition metal chalcogenides, and the control of precursors during the growth process is difficult to achieve quickly, stably, and controllably.
Using a commercial flatbed inkjet printer and a self-made XY heating stage, patterns are printed on the growth substrate by inkjet printing water-based precursors. Combined with CVD equipment and magnets to move the sample quickly, high-precision control of growth temperature and patterning is achieved. Custom quartz rods and ring magnets are used to move the sample for rapid heating. Water-based precursor solutions with printable inks are prepared to reduce surface tension and viscosity.
Rapid growth of large-area, high-quality two-dimensional transition metal chalcogenides was achieved, with carrier mobilities reaching 21 cm2V-1s-1 and 54 cm2V-1s-1. This simplified experimental procedures, reduced human error, and extended the application to other high-temperature substrates.
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Figure CN117626216B_ABST