一种喷墨打印水基前驱体制备二维过渡金属硫属化物的方法

By combining inkjet printing of water-based precursors with CVD equipment and magnet rapid movement technology, high-precision and highly repeatable patterned growth of large-area, high-quality two-dimensional transition metal chalcogenides was achieved, solving the growth control problem in existing technologies and achieving rapid and stable growth results.

CN117626216BActive Publication Date: 2026-07-17JIANGNAN UNIV

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
JIANGNAN UNIV
Filing Date
2023-11-23
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing technologies struggle to achieve high-precision, reproducible patterned growth of large-area, high-quality two-dimensional transition metal chalcogenides, and the control of precursors during the growth process is difficult to achieve quickly, stably, and controllably.

Method used

Using a commercial flatbed inkjet printer and a self-made XY heating stage, patterns are printed on the growth substrate by inkjet printing water-based precursors. Combined with CVD equipment and magnets to move the sample quickly, high-precision control of growth temperature and patterning is achieved. Custom quartz rods and ring magnets are used to move the sample for rapid heating. Water-based precursor solutions with printable inks are prepared to reduce surface tension and viscosity.

Benefits of technology

Rapid growth of large-area, high-quality two-dimensional transition metal chalcogenides was achieved, with carrier mobilities reaching 21 cm2V-1s-1 and 54 cm2V-1s-1. This simplified experimental procedures, reduced human error, and extended the application to other high-temperature substrates.

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Abstract

本发明公开了一种喷墨打印水基前驱体制备二维过渡金属硫属化物的方法,属于二维半导体材料技术领域。本发明方法通过使用工业喷墨打印机,实现了在皮克(10‑12g)水平实现的具有稳定使用控制的原位水前驱体,并通过精确调整喷墨打印参数,然后是快速加热过程,可以轻松实现大面积厘米尺寸和良好厚度可控性的图案化TMDCs薄膜,并且可以在短时间内轻松合成毫米级的高质量单层TMDCs(相应的增长速率可达到36.4μm s‑1)。一定程度上的解决了在合成大面积毫米尺寸和良好厚度可控性的图案化的TMDCs的过程中,对前驱体进行高精度、高重复性的定量控制,简化了实验操作,避免了部分人为引入的误差。
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