Reconfigurable and bidirectionally enhanced fano resonators and optoelectronic devices

Abstract

The application provides a reconfigurable and bidirectional enhanced Fano resonator, which comprises a first transmission waveguide, a 1:2 coupler, an upper and lower channel micro-ring resonator embedded with a Mach-Zehnder interferometer, a second transmission waveguide, a third transmission waveguide and a waveguide thermal electrode arranged above the third transmission waveguide; the first transmission waveguide, the second transmission waveguide and the third transmission waveguide are used for transmitting optical signals in a forward direction or a reverse direction; the 1:2 coupler is used for splitting the optical signals in the forward direction or combining the optical signals in the reverse direction; the waveguide thermal electrode is used for phase adjustment of the optical signals transmitted in the forward direction or the reverse direction of the third transmission waveguide, and provides an asymmetric phase spectrum required for Fano resonance; and the upper and lower channel micro-ring resonator embedded with the Mach-Zehnder interferometer is used for generating Fano resonance and regulating the Fano resonance spectrum of the optical signals transmitted in the forward direction or the reverse direction. The Fano resonator realizes fine regulation of bidirectional Fano resonance spectrum lines and increases the reconfigurable dimension.

Description

Technical Field

[0001] This invention relates to the field of silicon-based optoelectronics, and particularly to a reconfigurable and bidirectionally enhanced Fano resonator. Background Technology

[0002] A special phenomenon in optical resonance is the Fano resonance, which typically occurs when discrete local states and continuous states couple and interfere with each other, breaking the typical Lorentz symmetry of the spectral lines. Fano resonance spectral lines exhibit significant asymmetry, often displaying a very steep shape, with an extremely small wavelength difference between the power peaks and troughs, meaning the spectral line slope is very large. It is precisely because of the steep characteristics of the Fano resonance spectral lines that they hold great promise for applications in numerous scenarios, including ultra-low power optical switches, highly sensitive optical sensing, real-time microwave frequency monitoring, and optical time-domain differentiation.

[0003] In recent years, Fano resonance phenomena based on various structures such as photonic crystals, plasmonic nanostructures, slit waveguides, grating-assisted microrings, and cascaded microrings have been reported. However, the resonance spectral lines of these Fano resonators cannot be precisely controlled and tuned, and the fabrication processes of structures such as photonic crystals are complex, making it difficult to form resonant cavities with high quality factors, thus hindering the formation of steep spectral lines with large slopes. Therefore, achieving precise control and reconfigurability of Fano resonance spectral lines, and providing multi-directionally enhanced Fano resonance spectral lines within a single device, is crucial for studying and improving the performance of Fano resonators, and is currently a research hotspot in academia and industry. Summary of the Invention

[0004] This invention provides a reconfigurable and bidirectionally enhanced Fano resonator that enables fine-tuning and reconfigurability of the Fano resonance spectral lines, providing bidirectionally enhanced Fano resonance spectral lines in a single device.

[0005] This invention provides a reconfigurable and bidirectionally enhanced Fano resonator, comprising: a first transmission waveguide, a 1-to-2 coupler, upper and lower channel micro-ring resonators with embedded Mach-Zehnder interferometers, a second transmission waveguide, a third transmission waveguide, and waveguide-on-thermal electrodes, the waveguide-on-thermal electrodes being disposed above the third transmission waveguide; the first, second, and third transmission waveguides are configured to transmit optical signals in either the forward or reverse direction; the 1-to-2 coupler is configured to split the optical signal during forward transmission or combine the optical signal during reverse transmission; the waveguide-on-thermal electrodes are configured to phase-adjust the optical signal transmitted in either the forward or reverse direction through the third transmission waveguide, providing the asymmetric phase spectrum required for Fano resonance; the upper and lower channel micro-ring resonators with embedded Mach-Zehnder interferometers are configured to generate Fano resonance for the forward or reverse transmitted optical signal, and to control the shape, parameters, and resonant wavelength of the Fano resonance spectrum.

[0006] According to an embodiment of the present invention, in the case of forward transmission: a first transmission waveguide is configured to input an off-chip optical signal; a splitter coupler is configured to split the off-chip optical signal into a first optical signal and a second optical signal; a hot electrode on the waveguide is configured to perform phase adjustment on the second optical signal to obtain a third optical signal; the upper and lower channel micro-ring resonators with an embedded Mach-Zehnder interferometer are configured to perform Fano resonance on the first and third optical signals to obtain a first Fano resonance spectrum and a second Fano resonance spectrum; a second transmission waveguide is configured to output the first Fano resonance spectrum; a third transmission waveguide... It is configured to output the second Fano resonance spectral line; in the case of reverse transmission: the second or third transmission waveguide is configured to input the off-chip optical signal; the upper and lower channel micro-ring resonators of the embedded Mach-Zehnder interferometer are configured to perform Fano resonance on the off-chip optical signal to obtain the fourth and fifth optical signals; the hot electrode on the waveguide is configured to perform phase adjustment on the fifth optical signal to obtain the sixth optical signal; the 1-to-2 coupler is configured to combine the fourth and sixth optical signals to obtain the third Fano resonance spectral line; the first transmission waveguide is configured to output the third Fano resonance spectral line.

[0007] According to an embodiment of the present invention, the micro-ring resonator with an embedded Mach-Zehnder interferometer includes: a ring waveguide, a ring-on-thermionic electrode, and a Mach-Zehnder interferometer; the ring-on-thermionic electrode is disposed above the ring waveguide; the Mach-Zehnder interferometer is embedded in the ring waveguide and connected to the ring waveguide; the ring waveguide is configured to achieve optical field resonance and Fano resonance under two-beam interference; the ring-on-thermionic electrode is configured to change the resonant wavelength position of the micro-ring resonator with the embedded Mach-Zehnder interferometer; the Mach-Zehnder interferometer is configured to turn the optical field resonance and Fano resonance states on or off.

[0008] According to an embodiment of the present invention, a Mach-Zehnder interferometer includes two waveguide coupling regions, two arms of the Mach-Zehnder interferometer, and hot electrodes on the arms of the Mach-Zehnder interferometer, the hot electrodes on the arms of the Mach-Zehnder interferometer being arranged above the arms of the Mach-Zehnder interferometer; the two waveguide coupling regions are configured for evanescent wave coupling in the propagation of the optical field; the two arms of the Mach-Zehnder interferometer are configured for the propagation of the optical field; the hot electrodes on the arms of the Mach-Zehnder interferometer are configured to jointly control at least one of the extinction ratio, slope, and shape of the Fano resonance spectral line with the hot electrodes on the waveguides, the Fano resonance spectral line including a first Fano resonance spectral line, a second Fano resonance spectral line, or a third Fano resonance spectral line.

[0009] According to an embodiment of the present invention, the Mach-Zehnder interferometer arms are composed of two waveguides of equal length, and the thermoelectric electrodes on the Mach-Zehnder interferometer arms are arranged above one of the waveguides.

[0010] According to embodiments of the present invention, the fabrication of a reconfigurable and bidirectionally enhanced Fano resonator is based on silicon, silicon dioxide, or silicon nitride as the core material.

[0011] According to an embodiment of the present invention, the first transmission waveguide, the second transmission waveguide, and the third transmission waveguide can be connected to a grating coupler or an end-face coupler; the on-chip optical signal can be coupled into the first transmission waveguide, the second transmission waveguide, or the third transmission waveguide through the grating coupler or the end-face coupler.

[0012] This invention also provides an optoelectronic device, including a reconfigurable and bidirectionally enhanced Fano resonator as described above.

[0013] The reconfigurable and bidirectionally enhanced Fano resonator provided according to embodiments of the present invention can achieve at least the following technical effects:

[0014] A reconfigurable and bidirectionally enhanced Fano resonator is constructed based on a micro-ring resonator with an embedded Mach-Zehnder interferometer. This allows for precise control of the Fano resonance spectral lines through manipulation of the thermoelectrode combination. Furthermore, regardless of whether the optical signal is input from the forward or reverse propagation direction, this Fano resonator can achieve a Fano resonance spectrum with adjustable shape and parameters, increasing the reconfigurability of the Fano resonance device and providing a bidirectionally enhanced Fano resonance spectrum. Therefore, it can be widely applied in various scenarios such as optical switches, optical sensors, microwave frequency monitoring, and optical time-domain differentiation, demonstrating significant application value. Attached Figure Description

[0015] The above and other objects, features and advantages of the present invention will become more apparent from the following description of embodiments of the invention with reference to the accompanying drawings, in which:

[0016] Figure 1 A schematic diagram of a reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention is shown.

[0017] Figure 2 A schematic diagram of a reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention is shown in the forward transmission.

[0018] Figure 3 A schematic diagram of a reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention is shown in reverse transmission.

[0019] Figure 4 The diagram illustrates the reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention, showing the resonant spectrum changes of the two output ports as a function of the phase difference on the waveguide arm during positive output.

[0020] Figure 5The diagram illustrates the reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention, showing the resonant spectrum changes of the two output ports as a function of the phase difference on the arm of the in-ring Mach-Zehnder interferometer during positive output.

[0021] Figure 6 The diagram illustrates the resonant spectrum variation of a single output port of a reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention when the output is reversed, caused by the phase difference on the waveguide arm, and the resonant spectrum variation curve caused by the phase difference on the arm of an in-ring Mach-Zehnder interferometer.

[0022] Explanation of reference numerals in the attached figures:

[0023] 1. First transmission waveguide; 2. One-to-two coupler; 3. Micro-ring resonators for upper and lower channels with embedded Mach-Zehnder interferometer; 4. Second transmission waveguide; 5. Third transmission waveguide; 6. Thermoelectric electrode on the waveguide; 7. Ring waveguide; 8. Thermoelectric electrode on the ring; 9. Mach-Zehnder interferometer; 10. Two waveguide coupling regions; 11. Two arms of the Mach-Zehnder interferometer; 12. Thermoelectric electrode on the arm of the Mach-Zehnder interferometer; 2a. First port of the one-to-two coupler; 2b. Second port of the one-to-two coupler; 2c. Third port of the one-to-two coupler; a1. First optical signal; b1. Second optical signal; c1. Third optical signal; a2. Fourth optical signal; b2. Fifth optical signal; c2. Sixth optical signal. Detailed Implementation

[0024] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are merely exemplary and not intended to limit the scope of the invention. In the following detailed description, numerous specific details are set forth to provide a thorough understanding of the embodiments of the invention for ease of explanation. However, it will be apparent that one or more embodiments may be practiced without these specific details. Furthermore, descriptions of well-known structures and techniques are omitted in the following description to avoid unnecessarily obscuring the concept of the invention.

[0025] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the invention. The terms “comprising,” “including,” etc., as used herein indicate the presence of the stated features, steps, operations, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, or components.

[0026] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein are to be interpreted in a manner consistent with the context of this specification, and not in an idealized or overly rigid way.

[0027] When using expressions such as "at least one of A, B, and C", they should generally be interpreted in accordance with the meaning that is commonly understood by a person skilled in the art (e.g., "a system having at least one of A, B, and C" should include, but is not limited to, a system having A alone, a system having B alone, a system having C alone, a system having A and B, a system having A and C, a system having B and C, and / or a system having A, B, and C, etc.).

[0028] Figure 1 A schematic diagram of a reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention is shown.

[0029] like Figure 1 As shown, the reconfigurable and bidirectionally enhanced Fano resonator of this embodiment may include: a first transmission waveguide 1, a one-to-two coupler 2, an upper and lower channel micro-ring resonator 3 with an embedded Mach-Zehnder interferometer, a second transmission waveguide 4, a third transmission waveguide 5, and a waveguide hot electrode 6.

[0030] The 1-to-2 coupler 2 includes a first port 2a, a second port 2b, and a third port 2c. The first port 2a is connected to the first transmission waveguide 1, the second port 2b is connected to the second transmission waveguide 4, and the third port 2c is connected to the third transmission waveguide 5. The thermal electrode 6 is arranged above the third transmission waveguide 5.

[0031] The first transmission waveguide 1, the second transmission waveguide 4, and the third transmission waveguide 5 are configured to transmit optical signals in either the forward or reverse direction.

[0032] The 1-to-2 coupler 2 is configured to split the optical signal during forward transmission or to combine the optical signal during reverse transmission.

[0033] The hot electrode 6 on the waveguide is configured to phase-modulate the optical signal transmitted in the forward or reverse direction of the third transmission waveguide 5, providing the asymmetric phase spectrum required for Fano resonance.

[0034] The micro-ring resonators 3 of the upper and lower channels with embedded Mach-Zehnder interferometers are configured to generate Fano resonance for forward or reverse optical signals and to control the shape, parameters and resonant wavelength of the Fano resonance spectrum.

[0035] Figure 2 A schematic diagram of a reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention is shown in the forward transmission.

[0036] like Figure 2 As shown, in the case of forward transmission:

[0037] The first transmission waveguide 1 is configured to input an off-chip optical signal. A 1-to-2 coupler 2 is configured to split the off-chip optical signal into a first optical signal a1 and a second optical signal b1. A thermoelectric electrode 6 on the waveguide is configured to phase-adjust the second optical signal b1 to obtain a third optical signal c1. Microring resonators 3 with an embedded Mach-Zehnder interferometer are configured to perform Fano resonance on the first optical signal a1 and the third optical signal c1 to obtain a first Fano resonance spectral line and a second Fano resonance spectral line. The second transmission waveguide 4 is configured to output the first Fano resonance spectral line. The third transmission waveguide 5 is configured to output the second Fano resonance spectral line.

[0038] Figure 3 A schematic diagram of a reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention is shown in reverse transmission.

[0039] like Figure 3 As shown, in the case of reverse transmission:

[0040] The second transmission waveguide 4 or the third transmission waveguide 5 is configured to input off-chip optical signals, meaning the off-chip optical signals can be input from either the second transmission waveguide 4 or the third transmission waveguide 5. The upper and lower channel micro-ring resonators 3 with embedded Mach-Zehnder interferometers are configured to perform Fano resonance on the off-chip optical signals, resulting in a fourth optical signal a2 and a fifth optical signal b2. The hot electrode 6 on the waveguide is configured to perform phase adjustment on the fifth optical signal b2, resulting in a sixth optical signal c2. The 1-to-2 coupler 2 is configured to combine the fourth optical signal a2 and the sixth optical signal c2, resulting in a third Fano resonance spectral line. The first transmission waveguide 1 is configured to output the third Fano resonance spectral line.

[0041] Continue reading Figures 1-3 In some embodiments, the microring resonator 3 with an embedded Mach-Zehnder interferometer includes: a ring waveguide 7, a ring-on-ring thermoelectric electrode 8, and a Mach-Zehnder interferometer 9. The ring-on-ring thermoelectric electrode 8 is arranged above the ring waveguide 7, and the Mach-Zehnder interferometer 9 is embedded in the ring waveguide 7 and connected to the ring waveguide 7.

[0042] The ring waveguide 7 is configured to achieve optical field resonance and Fano resonance under two-beam interference. The ring-mounted thermoelectrode 8 is configured to change the resonant wavelength position of the upper and lower channel micro-ring resonators 3 of the embedded Mach-Zehnder interferometer. The Mach-Zehnder interferometer 9 is configured to turn the optical field resonance and Fano resonance states on or off.

[0043] In some embodiments, the Mach-Zehnder interferometer 9 includes two waveguide coupling regions 10, two arms 11 of the Mach-Zehnder interferometer, and hot electrodes 12 on the arms of the Mach-Zehnder interferometer, the hot electrodes 12 being arranged above the arms 11. The two waveguide coupling regions 10 are configured for evanescent wave coupling in the propagation of the optical field, the two arms 11 of the Mach-Zehnder interferometer are configured for optical field propagation, and the hot electrodes 12 on the arms of the Mach-Zehnder interferometer are configured to, in conjunction with the hot electrodes 6 on the waveguides, control at least one of the extinction ratio, slope, and shape of the Fano resonance spectral lines, wherein the Fano resonance spectral lines include a first Fano resonance spectral line, a second Fano resonance spectral line, or a third Fano resonance spectral line.

[0044] Furthermore, the Mach-Zehnder interferometer's dual arms 11 consist of two waveguides of equal length. The thermoelectric electrodes 12 on the arms are positioned above one of the waveguides. In other words, the embedded Mach-Zehnder interferometer 9 is composed of two waveguide coupling regions 10 cascaded with two waveguides of equal length. The two waveguides of equal length are configured for optical field propagation under equidistant transmission, providing the Mach-Zehnder interferometer 9 with a working bandwidth exceeding a preset threshold. This preset threshold is determined based on the actual application scenario.

[0045] In some embodiments, the first transmission waveguide 1, the second transmission waveguide 4, and the third transmission waveguide 5 can be connected to a grating coupler or an end-face coupler, and the on-chip optical signal is coupled into the first transmission waveguide 1, the second transmission waveguide 4, and the third transmission waveguide 5 through the grating coupler or the end-face coupler.

[0046] In some embodiments, the fabrication of a reconfigurable and bidirectionally enhanced Fano resonator is based on silicon, silicon dioxide, or silicon nitride as the core material.

[0047] To more clearly describe the reconfigurable and bidirectionally enhanced Fano resonator provided by the present invention, a specific example is given below.

[0048] In this example, a silicon nanowire optical waveguide based on silicon insulator (SOI) material is selected to prepare a Fano resonator based on an embedded Mach-Zehnder interferometer for the upper and lower channel micro-ring resonators 3. The core layer is made of silicon material with a thickness of 220 nm and a refractive index of 3.4744. The waveguide width is 500 nm, and the thermo-optic effect is used to change the phase of the waveguide.

[0049] A 50:50 splitting ratio 1-to-2 coupler 2 is selected for beam splitting and combining. The upper and lower channel micro-ring resonators 3 of the embedded Mach-Zehnder interferometer have a radius of 30 μm. The waveguide coupling region 10 in the embedded Mach-Zehnder interferometer 9 is designed with a 50:50 coupling ratio. The two arms of the Mach-Zehnder interferometer are composed of rings with a radius of 10 μm, and the arm length is 94.25 μm. In addition, the coupling interval between the silicon-based straight waveguide and the silicon-based curved waveguide is 240 nm, and the waveguide coupling region 10 in the embedded Mach-Zehnder interferometer 9 is also spaced at 240 nm.

[0050] Figure 4 The diagram illustrates the reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention, showing the resonant spectrum changes of the two output ports as a function of the phase difference on the waveguide arm during positive output.

[0051] like Figure 4 As shown, when the phase change on arm 9 of the embedded Mach-Zehnder interferometer is fixed at π, changing the phase change introduced by the thermoelectric electrode 6 on the waveguide can change the phase difference between the two beams entering the upper and lower micro-ring resonators 3 of the embedded Mach-Zehnder interferometer, thereby adjusting the extinction ratio, slope and shape of the Fano resonance spectrum. At the same time, the outputs from both ends of the second transmission waveguide 4 and the third transmission waveguide 5 are both finely adjustable Fano resonance spectra.

[0052] Figure 5 The diagram illustrates the reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention, showing the changes in the resonance spectrum of the two output ports as a function of the phase difference on the arm of the in-ring Mach-Zehnder interferometer during positive output.

[0053] like Figure 5 As shown, when the phase change introduced by the hot electrode 6 on the fixed waveguide is 0.5π, changing the phase change on the arm of the embedded Mach-Zehnder interferometer 9 can change the switching of the internal state of the micro-ring resonator 3 of the upper and lower channels of the embedded Mach-Zehnder interferometer, thereby adjusting the extinction ratio, slope and shape of the Fano resonance spectrum. At the same time, the outputs of the second transmission waveguide 4 and the third transmission waveguide 5 are also finely adjustable Fano resonance spectra.

[0054] Figure 6 The diagram illustrates the resonant spectrum variation of a single output port of a reconfigurable and bidirectionally enhanced Fano resonator according to an embodiment of the present invention, caused by the phase difference on the waveguide arm, during reverse output, and the resonant spectrum variation curve caused by the phase difference on the arm of an inlaid Mach-Zehnder interferometer.

[0055] like Figure 6 As shown, the reconfigurable and bidirectionally enhanced Fano resonator in this example can also achieve multidimensional fine control of the Fano resonance spectrum through thermoelectric combination modulation when the input is reversed.

[0056] Combination Figures 4-6 It can be seen that the Fano resonator in this example can achieve multidimensional fine-tuning of the Fano resonance spectral lines by controlling the thermoelectrode combination. Therefore, the Fano resonator based on an embedded Mach-Zehnder interferometer microring resonator provided in this embodiment of the invention can achieve fine-tuning of the Fano resonance spectral lines by controlling the thermoelectrode combination; simultaneously, regardless of whether light is input from the forward or reverse propagation direction, this Fano resonator can achieve a Fano resonance spectrum with adjustable shape and parameters. Furthermore, it increases the reconfigurability dimension of the Fano resonance device, provides a bidirectional enhanced Fano resonance spectrum, and has advantages such as simple design, easy fabrication, and compact structure, making it suitable for mass production.

[0057] Based on the same inventive concept, embodiments of the present invention also provide an optoelectronic device, including a reconfigurable and bidirectionally enhanced Fano resonator as described above.

[0058] It should be noted that the implementation details and technical effects of the optoelectronic device embodiment are the same as or similar to the implementation details and technical effects of the reconfigurable and bidirectionally enhanced Fano resonator embodiment, and will not be repeated here.

[0059] Although the invention has been illustrated and described in detail in the accompanying drawings and the foregoing description, such illustrations and descriptions should be considered illustrative or exemplary rather than restrictive.

[0060] Those skilled in the art will understand that the features described in the various embodiments and / or claims of the present invention can be combined and / or combined in various ways, even if such combinations or combinations are not explicitly described in the present invention. In particular, the features described in the various embodiments and / or claims of the present invention can be combined and / or combined in various ways without departing from the spirit and teachings of the present invention. All such combinations and / or combinations fall within the scope of the present invention.

[0061] Although the invention has been shown and described with reference to specific exemplary embodiments thereof, those skilled in the art will understand that various changes in form and detail may be made to the invention without departing from the spirit and scope of the invention as defined by the appended claims and their equivalents. Therefore, the scope of the invention should not be limited to the above embodiments, but should be determined not only by the appended claims but also by their equivalents.

Claims

1. A reconfigurable and bidirectionally enhanced Fano resonator, characterized in that, include: The first transmission waveguide (1), the one-to-two coupler (2), the upper and lower channel micro-ring resonators (3) with embedded Mach-Zehnder interferometer, the second transmission waveguide (4), the third transmission waveguide (5) and the waveguide hot electrode (6), the waveguide hot electrode (6) being arranged above the third transmission waveguide (5); The first transmission waveguide (1), the second transmission waveguide (4), and the third transmission waveguide (5) are configured to transmit optical signals in either the forward or reverse direction. The splitter coupler (2) is configured to split the optical signal during forward transmission or to combine the optical signal during reverse transmission; The hot electrode (6) on the waveguide is configured to phase-modulate the optical signal transmitted in the forward or reverse direction of the third transmission waveguide (5) to provide the asymmetric phase spectrum required for Fano resonance; The micro-ring resonators (3) of the upper and lower channels of the embedded Mach-Zehnder interferometer are configured to generate Fano resonance for forward-transmitted or reverse-transmitted optical signals, and to control the shape, parameters and resonant wavelength of the Fano resonance spectrum. In the case of forward transmission: The first transmission waveguide (1) is configured to input off-chip optical signals; The splitter coupler (2) is configured to split the off-chip optical signal into a first optical signal (a1) and a second optical signal (b1). The waveguide hot electrode (6) is configured to phase-adjust the second optical signal (b1) to obtain a third optical signal (c1). The micro-ring resonators (3) of the upper and lower channels of the embedded Mach-Zehnder interferometer are configured to perform Fano resonance on the first optical signal (a1) and the third optical signal (c1) to obtain the first Fano resonance spectrum and the second Fano resonance spectrum. The second transmission waveguide (4) is configured to output the first Fano resonance spectral line; The third transmission waveguide (5) is configured to output the second Fano resonance spectral line; In the case of reverse transmission: The second transmission waveguide (4) or the third transmission waveguide (5) is configured to input the off-chip optical signal; The upper and lower channel micro-ring resonators (3) of the embedded Mach-Zehnder interferometer are configured to perform Fano resonance on the off-chip optical signal to obtain the fourth optical signal (a2) and the fifth optical signal (b2). The waveguide hot electrode (6) is configured to phase-adjust the fifth optical signal (b2) to obtain the sixth optical signal (c2). The split-coupler (2) is configured to combine the fourth optical signal (a2) and the sixth optical signal (c2) to obtain the third Fano resonance spectral line; The first transmission waveguide (1) is configured to output the third Fano resonance spectral line.

2. The reconfigurable and bidirectionally enhanced Fano resonator according to claim 1, characterized in that, The upper and lower channel micro-ring resonators (3) of the embedded Mach-Zehnder interferometer include: A ring waveguide (7), a ring-on-thermite (8), and a Mach-Zehnder interferometer (9); the ring-on-thermite (8) is arranged above the ring waveguide (7); the Mach-Zehnder interferometer (9) is embedded in the ring waveguide (7) and connected to the ring waveguide (7); The ring waveguide (7) is configured to achieve optical field resonance and Fano resonance under two-beam interference; The ring-on-thermal electrode (8) is configured to change the resonant wavelength position of the upper and lower channel microring resonators (3) of the embedded Mach-Zehnder interferometer. The Mach-Zehnder interferometer (9) is configured to turn on or off the optical field resonance and Fano resonance states.

3. The reconfigurable and bidirectionally enhanced Fano resonator according to claim 2, characterized in that, The Mach-Zehnder interferometer (9) includes two waveguide coupling regions (10), two arms of the Mach-Zehnder interferometer (11), and a hot electrode (12) on the arms of the Mach-Zehnder interferometer, which is arranged above the two arms of the Mach-Zehnder interferometer (11). The two waveguide coupling regions (10) are configured for evanescent wave coupling in optical field propagation; The two arms (11) of the Machzendel interferometer are configured for optical field propagation; The Machzendel interferometer arm hot electrode (12) is configured to jointly control at least one of the extinction ratio, slope and shape of the Fano resonance spectral line with the waveguide hot electrode (6), the Fano resonance spectral line including the first Fano resonance spectral line, the second Fano resonance spectral line or the third Fano resonance spectral line.

4. The reconfigurable and bidirectionally enhanced Fano resonator according to claim 3, characterized in that, The Mach-Zehnder interferometer arms (11) are composed of two waveguides of equal length, and the thermoelectric electrodes (12) on the arms are arranged above one of the waveguides.

5. The reconfigurable and bidirectionally enhanced Fano resonator according to claim 1, characterized in that, The fabrication of the reconfigurable and bidirectionally enhanced Fano resonator is based on silicon, silicon dioxide, or silicon nitride as the core material.

6. The reconfigurable and bidirectionally enhanced Fano resonator according to claim 1, characterized in that, The first transmission waveguide (1), the second transmission waveguide (4), and the third transmission waveguide (5) can be connected to a grating coupler or an end-face coupler; the on-chip optical signal can be coupled into the first transmission waveguide (1), the second transmission waveguide (4), or the third transmission waveguide (5) through the grating coupler or the end-face coupler.

7. An optoelectronic device, characterized in that, Includes a reconfigurable and bidirectionally enhanced Fano resonator as described in any one of claims 1-6.

Images