Slurry arm, chemical mechanical polishing system, and method of operating a slurry arm

Abstract

The application discloses a polishing liquid arm, a chemical mechanical polishing system and an operating method of the polishing liquid arm, and relates to the field of semiconductors. The polishing liquid arm comprises a support main body, a liquid pipe, a knob and an angle adjusting member, wherein the support main body is provided with scale marks along the length direction of the support main body, and the support main body is configured as a hollow cavity; the liquid pipe is used for polishing liquid outflow, and the liquid pipe is slidably connected to the bottom of the hollow cavity along the length direction; the liquid pipe is connected to the outer periphery of the knob close to the proximal end of the knob, the knob can drive the liquid pipe to rotate in the circumferential direction of the knob, the outer periphery of the knob is provided with a clamping structure, and the knob is clamped and fixed to the support main body through the clamping structure; the angle adjusting member is rotationally connected to the proximal end of the support main body, the top surface of the angle adjusting member is provided with angle marks, and the angle adjusting member is configured as a same-direction pointer on the top surface of the angle adjusting member and the top surface of the support main body, so as to indicate the rotation angle of the support main body relative to the horizontal plane. The application can accurately adjust the falling point position of the polishing liquid.

Description

Technical Field

[0001] This disclosure relates to the semiconductor field, and more particularly to an abrasive arm, a chemical mechanical polishing system, and a method of operating the abrasive arm. Background Technology

[0002] A chemical mechanical polishing (CMP) unit mainly consists of a polishing platform, a polishing head, and a slurry arm. The landing point of the slurry is crucial to the smoothness of the polished surface. However, currently, the landing point of the slurry arm on mainstream machines is determined manually or by selecting a reference object. This method has significant errors. Furthermore, to improve the overall process effect, the position of the slurry arm needs to be moved, but the position of the slurry arm on mainstream machines can only move left and right, not forward or backward, which cannot meet the process requirements.

[0003] The slurry arms used in existing chemical mechanical polishing (CMP) units can usually only move left and right but cannot extend or retract forward and backward. Moreover, the distance moved is often measured manually, which has a large error and cannot accurately control the landing position of the slurry, making it difficult to meet process requirements. Summary of the Invention

[0004] This disclosure provides an abrasive slurry arm, a chemical mechanical polishing system, and a method for operating the abrasive slurry arm, to at least solve the technical problem of the inability to accurately control the landing position of existing abrasive slurries.

[0005] The technical solution provided in this disclosure is as follows:

[0006] According to a first aspect of this disclosure, a grinding liquid arm is provided, comprising: a support body, a liquid tube, a knob, and an angle adjustment member. The support body has graduations along its length and is constructed as a hollow cavity. The liquid tube is used for the outflow of grinding liquid and is located within the hollow cavity. The liquid tube is slidably engaged with the bottom of the hollow cavity along its length. The liquid tube is connected to the outer periphery of the knob near its proximal end. Turning the knob causes the liquid tube to rotate circumferentially. The outer periphery of the knob has a locking structure, which engages and fixes the knob to the support body. The angle adjustment member is rotatably connected to the proximal end of the support body. The top surface of the angle adjustment member has an angle marking around its circumference. The angle adjustment member is configured to form a pointer on its top surface that points in the same direction as the top surface of the support body, for indicating the rotation angle of the support body relative to a horizontal plane.

[0007] In one embodiment, the grinding fluid arm further includes a guide rail and a slider that slides with the guide rail, and the fluid tube is fixedly installed with the slider; the guide rail is installed along the length direction at the bottom of the hollow cavity of the support body.

[0008] In one embodiment, the grinding liquid arm further includes a guide rail, which is installed along the length direction at the bottom of the hollow cavity of the support body. The outer structure of the liquid tube has a concave cavity, and the liquid tube is slidably connected to the guide rail through the concave cavity.

[0009] In one embodiment, the engaging structure is configured to protrude relative to the outer wall of the knob.

[0010] In one embodiment, the support body further has a blocking structure for engaging with the engaging structure.

[0011] In one embodiment, the grinding fluid arm further includes a set screw structure, wherein at least three set screw structures are provided, each set screw structure passing through the angle adjustment member and forming a tenon-and-mortise structure with the proximal end of the support body; or

[0012] Each of the aforementioned top screw structures passes through the angle adjustment member and abuts against the proximal end of the support body.

[0013] In one embodiment, the angle adjustment member is constructed as a cylindrical structure.

[0014] In one embodiment, the angle adjustment component includes a first pointer and a second pointer. The first pointer is used to indicate the direction of the support body, and the second pointer is used to indicate a reference direction. The angle between the first pointer and the second pointer is used to indicate the rotation angle of the support body on the angle adjustment component.

[0015] According to a second aspect of this disclosure, this disclosure provides a chemical mechanical polishing system, including the above-described polishing liquid arm, and further including: a polishing platform for carrying a wafer and a polishing head for polishing the wafer on the surface of the polishing platform;

[0016] The grinding fluid arm is horizontally positioned above the grinding platform. As the grinding fluid arm moves and rotates with the grinding fluid arm, the fluid tube can adjust the position of the grinding fluid as it falls onto the grinding platform.

[0017] According to a third aspect of this disclosure, this disclosure provides a method for operating a grinding fluid arm, using the above-described grinding fluid arm, the method comprising:

[0018] Determine the landing point of the grinding slurry;

[0019] Based on the landing point position, determine the target length and target angle of the grinding fluid arm;

[0020] Control the liquid tube to move forward or backward so that the length of the grinding liquid arm reaches the target length;

[0021] Control the support body to swing left or right relative to the angle adjustment member so that the rotation angle of the grinding fluid arm reaches the target angle.

[0022] The beneficial effects of this disclosure are as follows:

[0023] The grinding fluid arm, chemical mechanical polishing system, and operating method of the grinding fluid arm provided in this disclosure utilize a liquid tube that slides along its length relative to the hollow cavity, following a knob. This allows adjustment of the liquid tube's extension distance relative to the support body's port, effectively adjusting the position of the liquid tube's opening in one direction. Furthermore, turning the knob allows the liquid tube to rotate in or out relative to the support column along the knob's circumferential direction, equivalent to pulling the liquid tube outwards or pushing it inwards. During the turning process, the knob engages and secures with the support body through a locking structure. Further, the support body and angle adjustment component are detachably connected. The support body can rotate relative to the angle adjustment component. In the initial position, the top surface of the angle adjustment component and the top surface of the support body have pointers pointing in the same direction. After the support body rotates relative to the angle adjustment component, the pointers on the top surface of the angle adjustment component and the top surface of the support body form an angle, which is the rotation angle of the support body. In this way, the position of the liquid tube extending out of the support body port can be determined by adjusting the fixed rotation angle and the sliding distance along the length direction, thereby adjusting the landing point of the grinding liquid in the liquid tube.

[0024] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this disclosure, nor is it intended to limit the scope of this disclosure. Other features of this disclosure will become readily apparent from the following description. Attached Figure Description

[0025] The above and other objects, features, and advantages of this disclosure will become readily apparent from the following detailed description of exemplary embodiments, taken in conjunction with the accompanying drawings. Several embodiments of this disclosure are illustrated in the drawings by way of example and not limitation, in which:

[0026] In the accompanying drawings, the same or corresponding reference numerals indicate the same or corresponding parts.

[0027] Figure 1 The figure shown is a schematic diagram of the axial structure of an embodiment of the grinding fluid arm provided in this disclosure;

[0028] Figure 2The diagram shown is an axial side view of another embodiment of the grinding fluid arm provided in this disclosure;

[0029] Figure 3 The image shown is provided in this disclosure. Figure 1 Enlarged structural diagram at point A in the middle;

[0030] Figure 4 The diagram shown is a structural schematic of an embodiment of the chemical mechanical polishing system provided in this disclosure.

[0031] Explanation of the labels in the diagram:

[0032] 10-Grinding liquid arm; 20-Grinding platform; 21-Center point; 30-Grinding head; 11-Support body; 111-Scale marking; 112-Blocking structure; 12-Liquid tube; 13-Knob; 131-Interlocking structure; 14-Angle adjustment component; 141-Angle marking; 142-First pointer; 143-Second pointer; 15-Guide rail; 16-Slider; 17-Setting screw structure. Detailed Implementation

[0033] To make the objectives, features, and advantages of this disclosure more apparent and understandable, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this disclosure, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0034] In the description of this specification, references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this disclosure. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of those different embodiments or examples.

[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this disclosure, "a plurality of" means two or more, unless otherwise explicitly specified.

[0036] Figure 1The diagram shown is an axial side view of an embodiment of the grinding fluid arm provided in this disclosure.

[0037] Please see Figure 1 The polishing slurry arm 10 provided in this embodiment includes: a support body 11 and a slurry pipe 12. The support body 11 has scale markings 111 along its length and is constructed as a hollow cavity. The slurry pipe 12 is used for the polishing slurry to flow out. Specifically, the slurry pipe 12 is used to transport the polishing slurry, and one end of the slurry pipe 12 is provided with an opening from which the polishing slurry flows out.

[0038] In one embodiment, scale markings 111 are formed on the outer peripheral surface of the support body 11. For example, the outer peripheral surface of the support body 11 can be one, two, or more sides that are easy for an operator to observe.

[0039] In one embodiment, the liquid pipe 12 is located in the hollow cavity of the support body 11, and the liquid pipe 12 slides with the bottom of the hollow cavity along the length direction.

[0040] For example, the liquid pipe 12 and the bottom of the hollow cavity can be directly slidingly fitted along their length. For further details, please refer to... Figure 1 The grinding liquid arm 10 also includes a guide rail 15, which is installed along its length at the bottom of the hollow cavity of the supporting body 11. The outer structure of the liquid tube 12 has a concave cavity, through which the liquid tube 12 is slidably connected to the guide rail 15. In this way, the liquid tube 12 forms a direct sliding connection with the bottom of the hollow cavity through its own structure.

[0041] Alternatively, for example, the liquid pipe 12 and the bottom of the hollow cavity can be indirectly slidably fitted along their length. For details, please refer to [link to relevant documentation]. Figure 2 The grinding liquid arm 10 also includes a guide rail 15 and a slider 16 that slides with the guide rail 15. The liquid pipe 12 is fixedly installed with the slider 16. The guide rail 15 is installed along its length at the bottom of the hollow cavity of the supporting body 11. In this way, the liquid pipe 12 forms an indirect sliding connection with the bottom of the hollow cavity through the external structure slider 16.

[0042] Please see Figure 1 and Figure 2The grinding fluid arm 10 provided in this embodiment also includes a knob 13, and a fluid tube 12 is connected to the outer periphery of the knob 13 near its proximal end, with the proximal end of the fluid tube 12 being the end furthest from the opening. When the knob 13 is manually turned, the fluid tube 12 can rotate circumferentially with the knob 13 and rotate in or out relative to the support body 11. Specifically, the fluid tube 12 can slide relative to the hollow cavity of the support body 11. As needed, when the knob 13 is manually turned, the fluid tube 12 can rotate its opening in or out relative to the support body 11. Furthermore, the outer periphery of the knob 13 has a locking structure 131, which is constructed as a protrusion relative to the outer wall of the knob 13. This facilitates manual operation by the operator.

[0043] Please see further. Figure 3 The knob 13 is engaged and fixed to the support body 11 via the engaging structure 131. Specifically, the support body 11 has a blocking structure 112, which can be matched and engaged with the aforementioned engaging structure 131.

[0044] For example, the blocking structure 112 can be a structure that is recessed relative to the engaging structure 131 toward itself.

[0045] This disclosure does not limit the specific form of the blocking structure 112, which can be sheet-like, block-like, or strip-like.

[0046] This disclosure does not limit the specific form of the locking structure 131. It can be a standard block structure, or it can be a structure with hooks, sheets or blocks formed from a standard block structure.

[0047] In one embodiment, the grinding fluid arm 10 of this disclosure further includes an angle adjustment member 14, which is constructed as a cylinder. Exemplarily, the angle adjustment member 14 is rotatably connected to the proximal end of the support body 11, the proximal end of the support body 11 being the end near the proximal end of the fluid tube 12. Thus, the support body 11 and the angle adjustment member 14 can be installed or removed at any time.

[0048] For example, the support body 11 can rotate clockwise or counterclockwise relative to the angle adjustment member 14.

[0049] For example, the angle adjustment member 14 and the support body 11 are adjustablely installed by means of a positioning member abutting against each other. Specifically, the positioning member is a set screw structure 17, and at least three set screw structures 17 are provided. Each set screw structure 17 passes through the angle adjustment member 14 and abuts against the proximal end of the support body 11. When it is necessary to adjust the rotation angle of the support body 11 relative to the angle adjustment member 14, the set screw structure 17 is screwed to disengage it from the proximal end of the support body 11, thus loosening the connection between them. After adjusting to the desired angle, the set screw structure 17 is tightened to restore it to the abutting state with the proximal end of the support body 11.

[0050] Alternatively, for example, the angle adjustment member 14 and the support body 11 are adjustablely mounted via a mortise and tenon structure. Specifically, the grinding fluid arm 10 includes a set screw structure 17, with at least three set screw structures 17. Each set screw structure 17 passes through the angle adjustment member 14 and forms a mortise and tenon structure with the proximal end of the support body 11. When it is necessary to adjust the rotation angle of the support body 11 relative to the angle adjustment member 14, the set screw structure 17 is screwed to disengage it from the mortise and tenon connection with the proximal end of the support body 11, thus loosening the connection between them. After adjusting to the desired angle, the set screw structure 17 is tightened to restore the mortise and tenon connection with the proximal end of the support body 11.

[0051] In one embodiment, the top surface of the angle adjustment member 14 has an angle mark 141 around its perimeter. Thus, the rotation angle of the support body 11 relative to the angle adjustment member 14 can be obtained through the angle mark 141.

[0052] For example, the angle adjustment member 14 is configured to form a pointer on its top surface that points in the same direction as the top surface of the support body 11, for indicating the rotation angle of the support body 11 relative to the horizontal plane. Specifically, the angle adjustment member 14 includes a first pointer 142 and a second pointer 143. The first pointer 142 indicates the direction of the support body 11, and the second pointer 143 indicates a reference direction. The angle between the first pointer 142 and the second pointer 143 is used to indicate the rotation angle of the support body 11 on the angle adjustment member 14. Thus, when the support body 11 rotates relative to the angle adjustment member 14, the angle between the first pointer 142 and the second pointer 143 can be used to read the rotation angle of the support body 11 relative to the angle adjustment member 14, facilitating operation and reading.

[0053] In summary, by manually rotating knob 13, since knob 13 is directly connected to liquid pipe 12, liquid pipe 12 can slide relative to the hollow cavity along its length direction as knob 13 rotates. This allows adjustment of the extension distance of liquid pipe 12 relative to the port of support body 11, i.e., adjustment of the position of the pipe opening in one direction. Furthermore, liquid pipe 12 can also rotate circumferentially with knob 13, thus allowing knob 13 to engage and fix with support body 11 during the turning process. Further, support body 11 and angle adjustment component 14 are detachably connected. Support body 11 can rotate relative to angle adjustment component 14. In the initial position, the top surface of angle adjustment component 14 and the top surface of support body 11 have pointers pointing in the same direction. After support body 11 rotates relative to angle adjustment component 14, the pointers on the top surface of angle adjustment component 14 and the pointers on the top surface of support body 11 form an angle, which is the rotation angle of support body 11. In this way, the position of the liquid tube 12 extending out of the support body 11 port can be determined by adjusting the fixed rotation angle and the sliding distance along the length direction, thereby adjusting the landing point of the grinding liquid in the liquid tube 12.

[0054] Figure 4 The diagram shown is a structural schematic of an embodiment of the chemical mechanical polishing system provided in this disclosure. Please refer to [link / reference]. Figure 4 This disclosure also provides a chemical mechanical polishing system, including the aforementioned polishing slurry arm 10, and further including a polishing platform 20 for supporting a wafer and a polishing head 30 for polishing the wafer on the surface of the polishing platform 20. Specifically, the polishing slurry arm 10 is horizontally positioned above the polishing platform 20. During the movement and rotation of the slurry arm 10, the slurry tube 12 can adjust the landing point of the polishing slurry on the polishing platform 20. This allows adjustment of the vertical projection position of the slurry tube 12 port relative to the center point 21 of the polishing platform 20, facilitating the adjustment of the polishing slurry landing point and thereby promoting the interaction between the polishing head 30 and the wafer.

[0055] This disclosure further provides an operating method for the polishing fluid arm 10, using the above-described polishing fluid arm 10, the method comprising:

[0056] Determine the landing point of the grinding slurry;

[0057] Based on the landing point, determine the target length and target angle of the grinding fluid arm 10;

[0058] Control the liquid pipe 12 to move forward or backward so that the length of the grinding liquid arm 10 reaches the target length;

[0059] The control support body 11 swings to the left or right relative to the angle adjustment component 14 so that the rotation angle of the grinding fluid arm 10 reaches the target angle.

[0060] This allows for precise adjustment of the landing point of the grinding fluid in the liquid tube 12. It also facilitates the accurate recording of the moving distance and rotation angle of the liquid tube 12, so as to further refine the landing point of the grinding fluid.

[0061] The above are merely specific embodiments of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

Claims

1. A grinding fluid arm, characterized in that, The grinding fluid arm is horizontally positioned above the grinding platform; it includes: The support body has scale markings along its length and is constructed as a hollow cavity; the liquid tube is used for the grinding liquid to flow out and is located in the hollow cavity, and the liquid tube slides in conjunction with the bottom of the hollow cavity along its length. A knob is provided, and a liquid tube is connected to the outer periphery of the knob near its proximal end, which is the end away from the opening. When the knob is turned, the knob can drive the liquid tube to rotate along the circumferential direction of the knob, and the liquid tube can slide relative to the hollow cavity along its length direction as the knob rotates. The outer periphery of the knob has a locking structure, and the knob is locked and fixed to the support body through the locking structure. An angle adjustment component is rotatably connected to the proximal end of the support body. The angle adjustment component and the support body are adjustablely installed by abutting against each other via a positioning element. The proximal end of the support body is the end closest to the proximal end of the liquid pipe. The support body can rotate clockwise or counterclockwise relative to the angle adjustment component. The top surface of the angle adjustment component has an angle marking, and the angle adjustment component is configured to form a pointer on its own top surface that points in the same direction as the top surface of the support body, indicating the rotation angle of the support body relative to the horizontal plane. The support body can rotate relative to the angle adjustment component. In its initial position, the top surface of the angle adjustment component and the top surface of the support body have pointers pointing in the same direction. After the support body rotates relative to the angle adjustment component, the pointers on the top surface of the angle adjustment component and the pointers on the top surface of the support body form an angle, which is the rotation angle of the support body.

2. The grinding fluid arm according to claim 1, characterized in that, The grinding fluid arm also includes a guide rail and a slider that slides with the guide rail, and the fluid tube is fixedly installed with the slider; the guide rail is installed at the bottom of the hollow cavity of the support body along the length direction.

3. The grinding fluid arm according to claim 1, characterized in that, The grinding liquid arm also includes a guide rail, which is installed along the length direction at the bottom of the hollow cavity of the support body. The outer structure of the liquid tube has a concave cavity, and the liquid tube is slidably connected to the guide rail through the concave cavity.

4. The grinding fluid arm according to claim 1, characterized in that, The engaging structure is constructed such that it protrudes relative to the outer wall of the knob.

5. The grinding fluid arm according to claim 4, characterized in that, The supporting body also has a blocking structure, which is used to match and engage with the engaging structure.

6. The grinding fluid arm according to claim 1, characterized in that, The grinding fluid arm also includes a set screw structure, with at least three set screw structures provided. Each set screw structure passes through the angle adjustment member and forms a tenon-and-mortise structure with the proximal end of the support body; or Each of the aforementioned top screw structures passes through the angle adjustment member and abuts against the proximal end of the support body.

7. The grinding fluid arm according to claim 1, characterized in that, The angle adjustment component is constructed as a cylindrical structure.

8. The grinding fluid arm according to claim 7, characterized in that, The angle adjustment component includes a first pointer and a second pointer. The first pointer is used to indicate the direction of the support body, and the second pointer is used to indicate the reference direction. The angle between the first pointer and the second pointer is used to indicate the rotation angle of the support body on the angle adjustment component.

9. A chemical mechanical polishing system, characterized in that, The device includes the polishing fluid arm as described in any one of claims 1-8, and further includes: a polishing platform for carrying the wafer and a polishing head for polishing the wafer on the surface of the polishing platform; The grinding fluid arm is horizontally positioned above the grinding platform. As the grinding fluid arm moves and rotates with the grinding fluid arm, the fluid tube can adjust the position of the grinding fluid as it falls onto the grinding platform.

10. A method of operating a grinding fluid arm, using the grinding fluid arm as described in any one of claims 1-8, characterized in that, The method includes: Determine the landing point of the grinding slurry; Based on the landing point position, determine the target length and target angle of the grinding fluid arm; Control the liquid tube to move forward or backward so that the length of the grinding liquid arm reaches the target length; Control the support body to swing left or right relative to the angle adjustment member so that the rotation angle of the grinding fluid arm reaches the target angle.

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