Polishing machine and polishing method for side edge of large aperture optical element with wedge angle

Abstract

A kind of side polishing machine and polishing method of meter-level large aperture optical element, and polishing machine includes back pad, main shaft turntable, swing reducer, swing motor, main shaft reducer, main shaft motor.The back pad of the application can be customized according to the wedge angle of element, increase the applicability of the application.The application drives the grinding disc to do reciprocating motion in mutually perpendicular direction by the way of double-shaft linkage, and realizes uniform removal by the adjustment of rotation speed ratio, and there is no rotation in the reciprocating motion, avoids the phenomenon of face shape distortion in processing process.The application effectively improves the uniformity of the face shape distribution of meter-level large aperture optical element with wedge angle, greatly improves the processing precision of meter-level large aperture optical element with wedge angle, and improves processing efficiency.

Description

Technical Field

[0001] This invention relates to the side processing of meter-sized optical elements with wedge angles, and in particular to a side polishing machine and polishing method for meter-sized optical elements with wedge angles. Background Technology

[0002] As a gain medium in high-power laser systems, neodymium glass is susceptible to stimulated amplification (SAA) of its energy storage efficiency. Therefore, to suppress SAA, a layer of SAA-absorbing medium needs to be bonded to the side perpendicular to the light transmission direction; this is known as laser neodymium glass edging. Consequently, extremely stringent requirements are placed on the side processing parameters of laser neodymium glass, including surface shape distribution meeting specific requirements. Figure 6 The regular "carrying pole" shaped distribution and zero defects shown present unprecedented challenges for the side processing of laser-cut neodymium glass.

[0003] Optical elements with a radial diameter greater than 0.5m are generally referred to as large-diameter elements in optical processing. Traditional optical processing involves grinding the optical element against a polishing pad, which is typically slightly larger than the element. As the size of the optical element increases, the size of the polishing pad also increases, leading to greater requirements for the flatness of the polishing pad and increasing processing difficulty.

[0004] For the processing of the sides of meter-scale large-diameter optical elements with wedge angles, existing methods include: Method 1 uses the large-size multi-piece neodymium glass element side processing device mentioned in patent CN108177037B, processing multiple neodymium glass elements in one go; Method 2 uses the flexible device for processing the sides of rectangular optical elements mentioned in patent CN114905371A. However, this method has a drawback: insufficient clamping precision, failing to meet the requirements for direct rough polishing. Specifically, the plane of the clamped rectangular optical element and the plane of the accompanying polishing plate are not on the same plane. Since the rough polishing removal is on the order of μm, it takes a long time to polish to the same plane, resulting in extremely low processing efficiency. Furthermore, both methods involve firmly clamping the meter-scale large-diameter element and rotating it with the fixture. Ensuring no misalignment during rotation requires a large holding force, leading to a fatal flaw: after being lowered, the previously polished surface deforms and the striations become disordered due to stress release. Figure 7 As shown, this method cannot produce the side of a large-aperture optical device with a wedge angle and high surface accuracy at the meter level. Summary of the Invention

[0005] This invention proposes a side polishing machine and method for meter-sized optical elements with wedge angles. The machine can effectively improve the uniformity of the surface distribution of meter-sized optical elements with wedge angles through dual-axis linkage. At the same time, using the processing method of this invention, the meter-sized optical elements are stationary, so no large holding force is required. Therefore, there is no stress release after the elements are lowered, which greatly improves the processing accuracy of meter-sized optical elements with wedge angles.

[0006] The technical solution of the present invention is as follows:

[0007] A side polishing machine for meter-scale large-aperture optical components, comprising a frame, a polishing mechanism, and a drive mechanism, characterized in that it further comprises:

[0008] A partition is provided inside the frame, dividing the frame into left and right sides. One side is used to place the optical components to be polished, and the other side is used to place the drive mechanism.

[0009] An upper rectangular tube is fixed in the middle of the frame and located on one side of the partition. The upper rectangular tube is provided with a lower pad for placing the long side of the optical element to be polished.

[0010] A lower rectangular tube is fixed to the bottom of the frame and located on one side of the partition, for placing the short side of the optical element to be polished;

[0011] The polishing mechanism, located on the upper part of the frame, includes a rotating head, a transition plate grinding disc, a vertical shaft, and a guide rail. The two ends of the rotating head are fixed to two outer fixing blocks, the bottom of which slides on the guide rail via ball bearings, thereby driving the rotating head to move back and forth. The transition plate is connected to the rotating head via the vertical shaft. The grinding disc is placed on one side of the partition of the frame, and its top has a circular hole for placing a shaft head, which is connected to the transition plate, thereby controlling the back and forth movement of the grinding disc.

[0012] The drive mechanism, located on the other side of the partition of the frame, includes a main spindle motor and a swing motor. The main spindle motor is connected to the main spindle turntable via a main spindle reducer and controls the tilting head via a connecting rod and ball joint, thereby controlling the speed and amplitude of the left and right movement of the grinding disc. The swing motor is connected to the swing turntable via a swing reducer and controls the tilting head via a connecting rod and ball joint, thereby controlling the speed and amplitude of the forward and backward movement of the grinding disc.

[0013] Furthermore, it also includes:

[0014] A back pad, having a wedge angle whose size is determined according to the wedge angle of the optical element to be polished, is fixed to the partition plate for the inner side of the optical element to be polished to rest against.

[0015] A baffle, fixed at the bottom to the upper rectangular tube, is provided for the outer side of the optical element to be polished to rest against.

[0016] Furthermore, it also includes an upper fixed crossbar, a middle fixed crossbar, and a lower fixed crossbar. The two ends of the upper fixed crossbar are horizontally fixed to the outer side of the upper part of the frame by upper side pads. The middle fixed crossbar is horizontally fixed to the outer side of the middle part of the frame by middle side pads. The lower fixed crossbar is horizontally fixed to the outer side of the lower part of the frame by lower side pads. Multiple screw holes are distributed on the upper fixed crossbar, the middle fixed crossbar, and the lower fixed crossbar.

[0017] When processing the long side of the optical element to be polished, screws are used to pass through the screw holes of the upper and middle fixed crossbars and then contact the baffle to fix the front and back of the optical element to be polished.

[0018] When machining the short side of the optical element to be polished, screws are used to pass through the screw holes of the upper and lower fixed crossbars and then contact the baffle to fix the front and back of the optical element to be polished.

[0019] Furthermore, it also includes a side baffle. The two ends of the side baffle are vertically fixed to the outer side of the upper part of the frame by pads. The side baffle has multiple screw holes. After the screws pass through the screw holes of the side baffle, they contact the left and right sides of the optical element to be polished, thus fixing the left and right sides of the optical element to be polished.

[0020] Furthermore, the motion trajectory of the grinding disc satisfies the following formula:

[0021]

[0022]

[0023] In the formula, A x A y Let ω be the amplitude in the x and y directions. x ω is the rotational speed of the spindle disk in the x-direction. y Let y be the rotational speed of the oscillating turntable. The initial phases in the x and y directions represent the starting position of the grinding wheel. The x direction indicates the left-right movement of the grinding wheel, and the y direction indicates the front-back movement of the grinding wheel.

[0024] On the other hand, the present invention also provides a polishing method for meter-scale large-aperture optical elements, characterized by comprising the following steps:

[0025] S1 Preparation Phase: Set up a side polishing machine for large-diameter optical components with a meter-level aperture as described above;

[0026] S2 processing stage:

[0027] S2.1 Machining of the long side of the optical element to be polished, the steps are as follows:

[0028] ① Upper plate: Place the long side of the optical element to be polished on the lower pad on the upper rectangular tube, and fix the inner side of the optical element to be polished close to the back pad on the frame;

[0029] Place the baffle close to the optical element to be polished on the upper rectangular tube. The upper fixed crossbar and the middle fixed crossbar are fixed to the frame by screws and upper side pads. The screws pass through the upper fixed crossbar and the middle fixed crossbar and directly and slightly contact the baffle to fix the meter-level large-diameter optical element at the front and back.

[0030] Fix the left and right sides of the meter-scale large-diameter optical element using the screw and baffle fixing method described above, and the mounting of the wedge-angled meter-scale large-diameter optical element is completed.

[0031] ② Grinding: The grinding disc is made of cast iron and is ground through a dual-axis linkage. The swing motor and the main spindle motor are turned on, and the speed ratio of the swing motor and the main spindle motor is adjusted to achieve the removal of different distributions.

[0032] The flatness of the entire optical element disk is measured using a dial indicator. If the flatness of the entire disk reaches 10μm, the next step of processing is carried out; otherwise, the sanding continues.

[0033] ③ Polishing:

[0034] The grinding disc is an asphalt disc, and polishing is performed through a dual-axis linkage. The swing motor and the main spindle motor are turned on, and the speed ratio between the swing motor and the main spindle motor is adjusted to achieve different distributions of removal.

[0035] An interferometer is used to inspect the surface shape. If the reflective surface shape meets the requirements, the process proceeds to the next step; otherwise, polishing continues.

[0036] ④ Lower plate: Gradually remove the side baffle, middle fixed crossbar, upper fixed crossbar and baffle, and lower the optical element to be polished into the plate;

[0037] ⑤ Cleaning: Use deionized water to clean the optical components to be polished, and complete the processing of one long side.

[0038] ⑥ Follow steps ①-⑤ to complete the machining of the other long side of the optical element to be polished;

[0039] S2.2 Processing of the short side of the optical element to be polished, the steps are as follows:

[0040] ① Upper plate: Place the long side of the optical element to be polished on the lower rectangular tube, close to the back pad fixed on the frame;

[0041] Place the long side of the baffle (close to the optical element to be polished) on the lower rectangular tube, and fix the upper and lower fixed crossbars to the frame with screws and lower side pads. The screws pass through the upper and lower fixed crossbars and directly and slightly contact the baffle to fix the optical element to be polished at the front and back.

[0042] Fix the left and right sides of the meter-scale large-diameter optical element using the screw and baffle fixing method described above, and the mounting of the wedge-angled meter-scale large-diameter optical element is completed.

[0043] ② Grinding: Cast iron grinding discs are used. Grinding is performed through a dual-axis linkage. A dial indicator is used to measure the flatness of the entire optical element disc. If the flatness of the entire disc reaches 10μm, the next step of processing is carried out; otherwise, grinding continues.

[0044] ③ Polishing: An asphalt disc is used for polishing. Polishing is carried out through a dual-axis linkage until there are no sand holes on the surface. An interferometer is used to detect the surface shape. If the reflective surface shape meets the index requirements, proceed to the next step; otherwise, continue polishing.

[0045] ④ Lower the plate, gradually remove the side baffle, lower fixed crossbar, upper fixed crossbar and baffle, and lower the optical element to be polished;

[0046] ⑤ Cleaning: Use deionized water to clean the optical element to be polished, completing the processing of one short side of the optical element to be polished.

[0047] ⑥ Follow steps ①-⑤ to complete the processing of the other short side of the optical element to be polished.

[0048] Compared with the prior art, the beneficial effects of the present invention are:

[0049] 1) By using a dual-axis linkage, the grinding disc is driven to reciprocate in mutually perpendicular directions. Uniform removal is achieved by adjusting the speed ratio. At the same time, there is no rotational motion in this reciprocating motion, which avoids the phenomenon of surface distortion during processing.

[0050] 2) The back pad used can be customized according to the wedge angle of the component, which increases the applicability of the present invention.

[0051] 3) Improves the uniformity of surface distribution of large-aperture optical elements with wedge angles at the meter level, greatly improving the processing accuracy of large-aperture optical elements with wedge angles at the meter level. Attached Figure Description

[0052] Figure 1 This is a front view of Embodiment 1 of the long side polishing of the meter-level large-diameter optical element side polishing machine with wedge angle according to the present invention;

[0053] Figure 2 This is a left view of the polishing of a long side of an optical element using a wedge-angled meter-scale large-diameter optical element side polishing machine according to the present invention.

[0054] Figure 3 This is a schematic diagram illustrating the polishing of short sides using a wedge-angled meter-scale large-diameter optical element side polishing machine according to the present invention;

[0055] Figure 4 This is a perspective view of the side polishing machine for meter-level large-diameter optical elements with wedge angle according to the present invention;

[0056] Figure 5 This is a three-dimensional top view of the wedge-angle meter-scale large-diameter optical element side polishing machine of the present invention;

[0057] Figure 6 Processing requirements for the sides of large-aperture optical elements

[0058] Figure 7 For the side surface deformation of large-aperture optical elements

[0059] Figure 8 The motion trajectory of grinding disc 3 at different speed ratios

[0060] In the diagram: 1-Tilting head, 2-Transition plate, 3-Grinding disc, 4-Upper fixed crossbar, 5-Baffle, 6-Frame, 7-Middle fixed crossbar, 8-Rectangular tube, 9-Lower side pad, 10-Vertical shaft, 11-Outer fixed block, 12-Shaft head, 13-Workpiece, 14-Screw, 15-Lower pad, 16-Back pad, 17-Guide rail, 18-Connecting rod, 19-Swing turntable, 20-Main spindle turntable, 21-Swing reducer, 22-Swing motor, 23-Main spindle reducer, 24-Side baffle, 25-Main spindle motor, 26-Partition, 27-Upper side pad, 28-Lower fixed crossbar, 29-Lower rectangular tube. Detailed Implementation

[0061] The present invention will be further described below with reference to embodiments, but these should not be construed as limiting the scope of protection of the present invention.

[0062] See Figure 1 , Figure 2 and Figure 3 , Figure 1 This is a front view of Embodiment 1 of the long side polishing method for the meter-scale large-diameter optical element side polishing machine with wedge angle according to the present invention. Figure 2 This is a left view of Embodiment 1 of the side polishing machine for meter-scale large-diameter optical elements with wedge angle of the present invention, showing the long side edge polishing process. Figure 3This is a schematic diagram of the short side polishing of a meter-scale large-diameter optical element side polishing machine with wedge angle according to the present invention. As shown in the figure, the meter-scale large-diameter optical element side polishing machine of the present invention includes a flipping head 1, a transition plate 2, a grinding disc 3, an upper fixed crossbar 4, a baffle 5, a frame 6, a middle fixed crossbar 7, an upper rectangular tube 8, a lower side pad 9, a vertical shaft 10, an outer fixed block 11, a shaft head 12, an optical element 13, a screw 14, a lower pad 15, a guide rail 17, a connecting rod 18, a side baffle 24, a partition 26, an upper side pad 27, a lower fixed crossbar 28, and a lower rectangular tube 29. The side polishing machine is characterized by including a back pad 16, a swing turntable 19, a main spindle turntable 20, a swing reducer 21, a swing motor 22, a main spindle reducer 23, and a main spindle motor 25.

[0063] The frame 6 is supported by four rectangular support legs placed on the ground. The partition 26 structurally separates the frame 6 front and back. The long side of the optical element 13 is placed on the lower pad 15 welded and fixed to the upper rectangular tube 8. The inner side of the optical element 13 is close to the back pad 16 fixed to the frame 6. The long side of the baffle 5 is placed on the upper rectangular tube 8 close to the outer side of the optical element 13 for protection. The upper fixed crossbar 4 and the middle fixed crossbar 7 are fixed to the frame 6 by screws and the upper pad 27. The screw 14 passes through the upper fixed crossbar 4 and the middle fixed crossbar 7 and directly and slightly contacts the baffle 5 to secure the optical element. The optical element 13 is fixed at the front and back. The side baffle 24 is fixed to the left and right sides of the optical element 13 in the manner described above. The short side of the optical element 13 is placed on the lower rectangular tube 29, and the inner side is close to the back pad 16 fixed on the frame 6. The inner side of the baffle 5 is close to the optical element 13 and is placed on the upper rectangular tube 8 for protection. The upper fixing crossbar 4 and the lower fixing crossbar 28 are fixed to the frame 6 by screws and the lower side pad 9. The screw 14 passes through the upper fixing crossbar 4 and the lower fixing crossbar 28 and directly and slightly contacts the baffle 5 to fix the optical element 13 at the front and back. The side baffle 24 is fixed to the left and right sides of the optical element 13 in the manner described above. Behind the partition plate 26 are the swing motor 22 and the main spindle motor 25. The main spindle reducer 23 is connected to the main spindle motor 25, and the main spindle turntable 20 is connected to the main spindle reducer 23. The speed and amplitude of the left and right movement of the grinding disc 3 are controlled by the connecting rod 18. The swing reducer 21 is connected to the swing motor 22, and the swing turntable 19 is connected to the swing reducer 21. The speed and amplitude of the forward and backward movement of the grinding disc 3 are controlled by the connecting rod 18. The movement of the grinding disc 3 can be achieved by placing the shaft head 12 in the corresponding hole on the grinding disc 3. The shaft head 12 is fixed on the transition plate 2. The transition plate 2 is connected to the flipping head 1 through the vertical shaft 10. The flipping head is fixed on the outer fixing block 11 by the shaft. The outer fixing block 11 is fixed on the guide rail 17 by ball bearings.

[0064] A method for polishing optical components using a wedge-angle meter-scale large-aperture optical component side polishing machine includes the following steps:

[0065] 1) The first long side edge processing includes the following steps:

[0066] ① For the upper plate, place the long side of the wedge-angled meter-scale large-diameter optical element on the lower pad 15 fixed on the upper rectangular tube 8, close to the back pad 16 fixed on the frame 6. The baffle 5 is placed close to the meter-scale large-diameter optical element on the upper rectangular tube 8 for protection. The upper fixed crossbar 4 and the middle fixed crossbar 7 are fixed to the frame 6 by screws and the upper side pad 27. The screw 14 passes through the upper fixed crossbar 4 and the middle fixed crossbar 7 and directly and slightly contacts the baffle 5 to fix the meter-scale large-diameter optical element front and back. The side baffle 24 is fixed to the left and right sides of the meter-scale large-diameter optical element by the above screw and baffle fixing method. The upper plate of the wedge-angled meter-scale large-diameter optical element is then completed.

[0067] ② Grinding: Grinding disc 3 is made of cast iron and is ground by dual-axis linkage. The flatness of the entire optical element is measured by a dial indicator. If the flatness of the entire disc reaches 10μm, it proceeds to the next step of processing; otherwise, grinding continues.

[0068] ③ Polishing: The grinding disc 3 is an asphalt disc. Polishing is carried out through a dual-axis linkage method until there are no sand holes on the surface. The surface shape is detected by an interferometer. If the reflective surface shape meets the index requirements, proceed to the next step; otherwise, continue polishing.

[0069] ④ Lower the plate, gradually remove the side baffle 24, the middle fixed crossbar 7, the upper fixed crossbar 4 and the baffle 5, and lower the meter-level large-diameter optical element;

[0070] ⑤ Cleaning: Use deionized water to clean the meter-sized large-diameter optical components.

[0071] ⑥ The first long side is now complete:

[0072] 2) The second long side of the large-diameter optical element with wedge angle is processed according to the same process as the first long side.

[0073] 3) The first short side processing includes the following steps:

[0074] ① For the upper plate, place the long side of the wedge-angled meter-scale large-diameter optical element on the lower rectangular tube 29, close to the back pad 16 fixed on the frame 6. The long side of the baffle 5 is placed close to the meter-scale large-diameter optical element on the lower rectangular tube 29 for protection. The upper fixing crossbar 4 and the lower fixing crossbar 28 are fixed to the frame 6 by screws and the lower side pad 9. The screw 14 passes through the upper fixing crossbar 4 and the lower fixing crossbar 28 and directly and slightly contacts the baffle 5 to fix the meter-scale large-diameter optical element front and back. The side baffle 24 is fixed to the left and right sides of the meter-scale large-diameter optical element by the above screw and baffle fixing method. The upper plate of the wedge-angled meter-scale large-diameter optical element is then completed.

[0075] ② Grinding: Grinding disc 3 is made of cast iron and is ground by dual-axis linkage. The flatness of the entire optical element is measured by a dial indicator. If the flatness of the entire disc reaches 10μm, it proceeds to the next step of processing; otherwise, grinding continues.

[0076] ③ Polishing: The grinding disc 3 is an asphalt disc. Polishing is carried out through a dual-axis linkage method until there are no sand holes on the surface. The surface shape is detected by an interferometer. If the reflective surface shape meets the index requirements, proceed to the next step; otherwise, continue polishing.

[0077] ④ Lowering the plate: Gradually remove the side baffle 24, lower fixed crossbar 28, upper fixed crossbar 4 and baffle 5, and lower the meter-sized large-diameter optical element.

[0078] ⑤ Cleaning: Use deionized water to clean the meter-sized large-diameter optical components.

[0079] ⑥ The first long side is now complete:

[0080] 4) The second short side of the large-diameter optical element with wedge angle is processed according to the same procedure as the first short side processing step;

[0081] 5) Processing completed.

[0082] The dual-axis linkage method, that is, the motion trajectory of the grinding disc 3 satisfies the following formula:

[0083]

[0084]

[0085] In the formula, A x A y Let ω be the amplitude in the x and y directions. x ω y Let x and y be the rotational speeds. The initial phase in the x and y directions is related to the starting position of the grinding wheel; where the x direction represents the left-right movement of the grinding wheel, and the y direction represents the front-back movement of the grinding wheel. This is achieved by adjusting ω. x With ω y The ratio between them also affects the movement trajectory of the grinding disc 3, such as Figure 8 As shown. For different initial surface shapes, ω can be adjusted. x With ω y The ratio of [value] is used to achieve the function of facial contouring.

[0086] Experiments show that this invention can process the sides of large-diameter optical elements with wedge angles at the meter level. The dual-axis linkage method ensures the uniformity of the processing surface distribution of the optical elements. There is no stress release after the device is placed on the ground, which improves the processing accuracy. The integrated processing from grinding and polishing to the completion of the process improves the processing efficiency.

Claims

1. A polishing method for meter-scale large-aperture optical elements, characterized in that, Includes the following steps: S1 Preparation Phase: Constructing a meter-scale large-aperture optical component side polishing machine. This machine includes a frame, a polishing mechanism, and a drive mechanism, and further includes: A partition (26) is provided inside the frame (6) to divide the frame (6) into left and right sides. One side is used to place the optical components to be polished, and the other side is used to place the drive mechanism. An upper rectangular tube (8) is fixed in the middle of the frame (6) and located on one side of the partition (26). The upper rectangular tube (8) is provided with a lower pad (15) for placing the long side of the optical element to be polished. The lower rectangular tube (29) is fixed to the bottom of the frame (6) and located on one side of the partition (26) for placing the short side of the optical element to be polished; The polishing mechanism is located on the upper part of the frame (6) and includes a rotating head (1), a transition plate (2), a grinding disc (3), a vertical shaft (10), and a guide rail (17). The two ends of the rotating head (1) are fixed on two outer fixing blocks (11). The bottom of the outer fixing blocks (11) slides on the guide rail (17) through ball bearings, thereby driving the rotating head (1) to move back and forth. The transition plate (2) is connected to the rotating head (1) through the vertical shaft (10). The grinding disc (3) is placed on one side of the partition plate (26) of the frame (6). The top of the grinding disc (3) is provided with a round hole for the shaft head (12) to be placed. The shaft head (12) is connected to the transition plate (2), thereby controlling the back and forth movement of the grinding disc (3). The drive mechanism is located on the other side of the partition (26) of the frame (6), and includes a spindle motor (25) and a swing motor (22). The spindle motor (25) is connected to the spindle turntable (20) through a spindle reducer (23), and controls the rotating head (1) through a connecting rod (18) and a ball joint, thereby realizing the control of the speed and amplitude of the left and right movement of the grinding disc (3) by the spindle motor (25); the swing motor (22) is connected to the swing turntable (19) through a swing reducer (21), and controls the rotating head (1) through a connecting rod and a ball joint, thereby realizing the control of the speed and amplitude of the forward and backward movement of the grinding disc (3) by the swing motor (22). S2 processing stage: S2.1 Machining of the long side of the optical element to be polished, the steps are as follows: Upper plate: Place the long side of the optical element to be polished on the lower pad on the upper rectangular tube, and fix the inner side of the optical element to be polished close to the back pad on the frame; Place the baffle close to the optical element to be polished on the upper rectangular tube. The upper fixed crossbar and the middle fixed crossbar are fixed to the frame by screws and upper side pads. The screws pass through the upper fixed crossbar and the middle fixed crossbar and directly and slightly contact the baffle to fix the meter-level large-diameter optical element at the front and back. Fix the left and right sides of the meter-sized large-diameter optical element using the screw and baffle fixing method described above, and the mounting of the wedge-angled meter-sized large-diameter optical element is completed. Grinding: The grinding disc is made of cast iron. Grinding is performed by dual-axis linkage. The swing motor (22) and the main shaft motor (25) are turned on. The speed ratio of the swing motor (22) and the main shaft motor (25) is adjusted to achieve removal of different distributions. The flatness of the entire optical component disk is measured using a dial indicator. If the flatness of the entire disk reaches 10µm, the next step of processing is carried out; otherwise, the sanding continues. polishing: The grinding disc is an asphalt disc, and polishing is performed by dual-axis linkage. The swing motor (22) and the main shaft motor (25) are turned on, and the speed ratio of the swing motor (22) and the main shaft motor (25) is adjusted to achieve different distributions of removal. An interferometer is used to inspect the surface shape. If the reflective surface shape meets the requirements, the process proceeds to the next step; otherwise, polishing continues. Lower plate: Gradually remove the side baffle (24), middle fixed crossbar (7), upper fixed crossbar (4) and baffle (5) to lower the optical element to be polished; Cleaning: Use deionized water to clean the optical components to be polished, completing the processing of one long side. Follow the steps Complete the machining of the other long side of the optical element to be polished; S2.2 The short side of the optical element to be polished is processed in the following steps: Upper plate: Place the long side of the optical element to be polished on the lower rectangular tube (29), next to the back pad (16) fixed on the frame (6). Place the long side of the baffle (5) close to the optical element to be polished on the lower rectangular tube (29). Fix the upper fixed crossbar (4) and the lower fixed crossbar (28) to the frame (6) with screws and the lower side pad (9). The screw (14) passes through the upper fixed crossbar (4) and the lower fixed crossbar (28) and directly and slightly contacts the baffle (5) to fix the optical element to be polished in front and behind. Fix the side baffle (24) to the left and right sides of the meter-sized large-diameter optical element using the above-mentioned screw and baffle fixing method, and the mounting of the wedge-angled meter-sized large-diameter optical element is completed; For sanding, a cast iron disc is used, and sanding is performed through a dual-axis linkage. A dial indicator is used to measure the flatness of the entire disc of optical components. If the flatness of the entire disc reaches 10µm, the next step of processing is carried out; otherwise, sanding continues. Polishing is performed using an asphalt disc and a dual-axis linkage method until the surface is free of pinholes. An interferometer is used to check the surface shape. If the reflective surface shape meets the requirements, the process proceeds to the next step; otherwise, polishing continues. Lower the plate, gradually remove the side baffle (24), lower fixed crossbar (28), upper fixed crossbar (4) and baffle (5), and lower the optical element to be polished; Cleaning: The optical component to be polished is thoroughly cleaned with deionized water, completing the processing of one short side of the optical component. Follow the steps Complete the machining of the other short side of the optical element to be polished.

2. The polishing method for meter-scale large-aperture optical elements according to claim 1, characterized in that, The meter-scale large-diameter optical element side polishing machine also includes: The back pad (16) has a wedge angle, the size of which is determined according to the wedge angle of the optical element to be polished, and is fixed on the partition (26) for the inner side of the optical element to be polished to lean against. The baffle (5) is fixed at the bottom to the upper rectangular tube (8) for the outer side of the optical element to be polished to lean against.

3. The polishing method for meter-scale large-aperture optical elements according to claim 1 or 2, characterized in that, The meter-level large-diameter optical element side polishing machine also includes: an upper fixed crossbar (4), a middle fixed crossbar (7) and a lower fixed crossbar (28). The two ends of the upper fixed crossbar (4) are horizontally fixed to the upper outer side of the frame (6) by upper side pads. The middle fixed crossbar (7) is horizontally fixed to the middle outer side of the frame (6) by middle side pads. The lower fixed crossbar (28) is horizontally fixed to the lower outer side of the frame (6) by lower side pads. Multiple screw holes are distributed on the upper fixed crossbar (4), the middle fixed crossbar (7) and the lower fixed crossbar (28). When processing the long side of the optical element to be polished, the screws are used to pass through the screw holes of the upper fixed crossbar (4) and the middle fixed crossbar (7) and then contact the baffle (5) to fix the front and back of the optical element to be polished. When processing the short side of the optical element to be polished, the screws are used to pass through the screw holes of the upper fixed crossbar (4) and the lower fixed crossbar (28) and then contact the baffle (5) to fix the front and back of the optical element to be polished.

4. The polishing method for meter-scale large-aperture optical elements according to claim 3, characterized in that, The meter-level large-diameter optical element side polishing machine also includes: a side baffle (24), the two ends of which are vertically fixed to the upper outer side of the frame (6) by pads. The side baffle (24) has multiple screw holes. After the screws pass through the screw holes of the side baffle (24), they contact the left and right sides of the optical element to be polished, thus fixing the left and right sides of the optical element to be polished.

5. The polishing method for meter-scale large-aperture optical elements according to claim 1 or 2, characterized in that, The motion trajectory of the grinding disc (3) satisfies the following formula: In the formula, The amplitudes in the x and y directions are... Let x be the rotational speed of the spindle turntable (20) in the x-direction. Let be the rotational speed of the y-axis swing disk (19). The initial phases in the x and y directions represent the starting position of the grinding disc (3). The x direction indicates the left-right movement of the grinding disc (3), and the y direction indicates the front-back movement of the grinding disc (3).

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