A vertical PSOD process purification cooling system

Abstract

The application provides a vertical PSOD process purification cooling system, which comprises a PSOD process chamber, a first space in the process chamber, a PSOD production device arranged in the first space, an exhaust system for exhausting dust generated in the process chamber, an exhaust port of the exhaust system, a supply air system for supplying air flow into the process chamber, a first air supply port and a second air supply port of the supply air system, the first air supply port and the second air supply port are distributed along the longitudinal direction and are respectively located on the two sides of the exhaust port, and a control system connected with the exhaust system and the supply air system. The purification cooling system can reduce the temperature difference between the upper and lower parts of the first space, make the prepared product stress uniform, simultaneously achieve the effect of cooling the process chamber, delay the aging of the production equipment parts, has high dust removal efficiency, can reduce the dust deposited on the production equipment, and prevent the dust from damaging the production equipment.

Description

Technical Field

[0001] This application relates to the field of purification and cooling technology, specifically to a vertical PSOD process purification and cooling system. Background Technology

[0002] High-frequency plasma solid outside deposition (PSOD) is a process that uses a high-frequency plasma generator to produce a high-frequency magnetic field. This magnetic field ionizes the working gas to generate a high-temperature plasma torch, which heats and melts high-purity natural quartz powder to prepare quartz glass. It is one of the main processes for preparing high-end quartz materials.

[0003] Currently, due to the special structure of the vertical PSOD grinding mill, the horizontal space is small and the vertical distance is large, such as Figure 4 As shown, a purification and cooling method is set up with top active exhaust 01 and bottom passive air supply 02 to clean dust and cool the entire PSOD production room. The generating device 03 in the middle of the equipment is the point of generation of heat and dust.

[0004] In the existing scheme, a large amount of high-temperature gas is concentrated at the top of the PSOD process grinding chamber, making the temperature at the top about 90-110℃. Moreover, the temperature distribution in the entire grinding chamber is extremely uneven, with huge temperature differences between high-temperature and low-temperature zones, with the maximum temperature difference reaching about 65-75℃. At the same time, the amount of dust accumulated in the grinding chamber is relatively large, reaching 30-35 kg after a single production cycle.

[0005] The shortcomings of the existing solution are: 1. The temperature in the main working area is high, and the high temperature aging of the parts is serious; 2. The temperature difference between the top and bottom of the space is large, and the stress of the product is uneven; 3. The dust particles are extremely small, and a large amount of fine dust causes great damage to the mechanical and electrical equipment in the grinding room. Summary of the Invention

[0006] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a vertical PSOD process purification and cooling system, comprising:

[0007] The PSOD process room has a first space, in which PSOD production equipment is installed;

[0008] An exhaust system is provided to remove dust generated in the process room. The exhaust system includes an exhaust vent located near the production equipment.

[0009] A makeup air system is provided to supply airflow into the process chamber. The makeup air system includes a first makeup air inlet and a second makeup air inlet, which are distributed longitudinally and located on both sides of the exhaust vent.

[0010] The control system is connected to both the exhaust system and the make-up air system.

[0011] According to the technical solution provided in the embodiments of this application, the production equipment includes:

[0012] The discharge pipe has a discharge port for discharging silicon dioxide;

[0013] A preform, wherein the preform is vertically disposed on one side of the discharge pipe and is rotatable about its own axis;

[0014] A plasma generator, the output port of which is located below the discharge port and on the side of the discharge pipe away from the preform, is used to generate a high-temperature plasma torch to melt the silicon dioxide output from the discharge pipe, and then spray the molten silicon dioxide onto the preform.

[0015] According to the technical solution provided in the embodiments of this application, the exhaust vent is located 40-60cm above the plasma generator.

[0016] According to the technical solution provided in the embodiments of this application, the exhaust system further includes:

[0017] A dust collection device, wherein the inlet of the dust collection device is connected to the outlet of the exhaust;

[0018] An exhaust fan is provided, the input end of which is connected to the output port of the dust collection device, and the exhaust fan is controlled to be connected to the output end of the control system.

[0019] According to the technical solution provided in the embodiments of this application, the make-up air system includes:

[0020] A first blower device, the output port of the first blower device is connected to the first air supply port; the first blower device is controlled to be connected to the output terminal of the control system;

[0021] The second blower is connected to the output port of the second blower and the second air supply port; the second blower is connected to the output terminal of the control system.

[0022] According to the technical solution provided in the embodiments of this application, a temperature measuring device is provided on the side wall of the process chamber, and the temperature measuring device is controlled to be connected to the input terminal of the control system.

[0023] The beneficial effects are:

[0024] By placing the exhaust vent of the ventilation system close to the production equipment, dust generated at the production equipment can be discharged in a timely manner, preventing dust from accumulating on the production equipment and preventing dust from damaging the production equipment.

[0025] Since the air supply system includes a first air supply port and a second air supply port, which are distributed longitudinally and located on both sides of the exhaust port, when the air supply system supplies air to the process chamber, the airflow from the two air supply ports flows longitudinally into the exhaust port from both sides, which can reduce the temperature difference between the top and bottom of the first space, making the stress of the produced product uniform. In addition, the air supply system can deliver airflow to the process chamber, which can cool the process chamber and delay the aging of the production equipment parts. Attached Figure Description

[0026] Other features, objects, and advantages of this application will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0027] Figure 1 This is a schematic diagram of the internal structure of a vertical PSOD process purification and cooling system.

[0028] Figure 2 A schematic diagram showing the positional relationship between the discharge pipe and the plasma generator;

[0029] Figure 3 This is a schematic diagram of a partial structure of a vertical PSOD process purification and cooling system;

[0030] Figure 4 This is a schematic diagram of the existing PSOD process purification and cooling system.

[0031] In the picture:

[0032] 1. Process room; 2. Production equipment; 21. Discharge pipe; 22. Preform; 23. Plasma generator; 31. Exhaust vent; 32. Dust collection device; 33. Exhaust fan; 41. First air supply port; 42. Second air supply port; 51. First blower; 52. Second blower; 6. Temperature measuring device; 01. Active exhaust; 02. Passive air supply; 03. Generator. Detailed Implementation

[0033] The present application will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.

[0034] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0035] Please refer to Figures 1-3 A vertical PSOD process purification and cooling system, comprising:

[0036] PSOD process room 1, wherein the process room 1 has a first space, and the first space is equipped with PSOD production equipment 2;

[0037] An exhaust system is provided to remove dust generated in the process chamber 1. The exhaust system includes an exhaust vent 31, which is located near the production equipment 2.

[0038] The air supply system is used to supply airflow into the process chamber 1. The air supply system includes a first air supply port 41 and a second air supply port 42. The first air supply port 41 and the second air supply port 42 are distributed longitudinally and are located on both sides of the exhaust port 31, respectively.

[0039] The control system is connected to both the exhaust system and the make-up air system.

[0040] Specifically, such as Figure 1 and Figure 3 As shown, the longitudinal length of the process chamber 1 is greater than its transverse length.

[0041] Furthermore, the first air supply vent 41 is located at the top of the process chamber 1, and the second air supply vent 42 is located on the side wall of the process chamber 1 and near the bottom of the process chamber 1.

[0042] Furthermore, the exhaust vent 31 is located between the first air supply vent 41 and the second air supply vent 42, and the area near the production equipment 2 is a high-temperature zone.

[0043] Working principle:

[0044] When the vertical PSOD process purification and cooling system is working, the control system controls the exhaust system to work. The dust and heat generated by the production equipment 2 enter the exhaust port 31 and are then discharged from the exhaust port 31 into the process chamber 1. This can promptly remove the dust generated by the production equipment 2, prevent dust from accumulating on the production equipment 2, and prevent dust from damaging the production equipment 2.

[0045] The control system controls the operation of the air supply system. The first air supply port 41 delivers airflow from top to bottom to the exhaust port 31, and the second air supply port 42 delivers airflow from bottom to top to the exhaust port 31. This can reduce the temperature difference between the top and bottom of the first space, making the stress of the produced product uniform. In addition, the air supply system can deliver airflow into the process chamber 1, which can cool the process chamber 1 and delay the aging of the components of the production equipment 2.

[0046] In a preferred embodiment, the production equipment 2 includes:

[0047] The discharge pipe 21 has a discharge port for discharging silicon dioxide.

[0048] Preform 22, which is vertically arranged on one side of the discharge pipe 21 and can rotate about its own axis;

[0049] The plasma generator 23 has its output port located below the discharge port and on the side of the discharge pipe 21 away from the preform 22. It is used to generate a high-temperature plasma torch to melt the silicon dioxide output from the discharge pipe 21, and then spray the molten silicon dioxide onto the preform 22.

[0050] Specifically, the silicon dioxide is in powder form.

[0051] Furthermore, the plasma generator 23 generates a high-frequency magnetic field, which ionizes the working gas to generate a high-temperature plasma torch, which heats and melts the silica powder.

[0052] Furthermore, the working gas is dry compressed air or argon, without the introduction of external impurities, resulting in a low hydroxyl content and high purity in the outer coating of the preform.

[0053] In a preferred embodiment, the exhaust vent 31 is located 40 to 60 cm above the plasma generator 23.

[0054] Specifically, the exhaust vent 31 is located 50cm above the plasma generator 23.

[0055] In a preferred embodiment, the exhaust system further includes:

[0056] Dust collection device 32, the inlet of the dust collection device 32 is connected to the exhaust outlet 31;

[0057] The exhaust fan 33 has its input end connected to the output port of the dust collection device 32, and the exhaust fan 33 is controlled to be connected to the output end of the control system.

[0058] Specifically, the inlet of the dust collection device 32 is connected to the exhaust outlet 31 via a pipe.

[0059] Furthermore, the dust collection device 32 is equipped with multi-stage filters for filtering dust step by step.

[0060] Furthermore, the dust collection device 32 has an output port on the side away from the input port for outputting the dust-removed air.

[0061] In a preferred embodiment, the make-up air system includes:

[0062] The first blower 51 has its output port connected to the first air supply port 41; the first blower 51 is also connected to the output of the control system.

[0063] The second blower 52 has its output port connected to the second air supply port 42; the second blower 52 is also connected to the output of the control system.

[0064] Specifically, the output port of the first blower 51 is connected to the first air supply port 41 through a pipe, which is used to transport air outside the process chamber 1 to the top of the process chamber 1 to supplement the pressure difference at the top of the process chamber 1.

[0065] Specifically, the output port of the first blower 51 is connected to the second air supply port 42 through a pipe, which is used to transport air outside the process chamber 1 to the bottom of the process chamber 1 to supplement the pressure difference at the bottom of the process chamber 1.

[0066] Specifically, the first blower 51 and the second blower 52 are blowers.

[0067] In a preferred embodiment, a temperature measuring device 6 is provided on the side wall of the process chamber 1, and the temperature measuring device 6 is connected to the input terminal of the control system.

[0068] Specifically, the temperature measuring device 6 is a thermal imager used to detect the temperature of the product on the preform 22.

[0069] Work process:

[0070] The control system controls the operation of the exhaust fan 33, the first blower 51, and the second blower 52. The heat and dust generated by the plasma production equipment 2, under the action of the exhaust fan 33, are carried by the airflow through the exhaust port 31 into the dust collection device 32. The dust accumulates on the filter screen, and the heat is discharged to the outside of the process chamber 1 with the airflow, reducing the temperature of the high-temperature zone from 90-110℃ to 65-75℃. The first blower 51 transports the airflow from the outside of the process chamber 1 to the first air supply port 41. The airflow then flows from the first air supply port... Air flows from top to bottom through the outlet 41 to the exhaust outlet 31. The second blower 52 delivers airflow from the outside of the process chamber 1 to the second air inlet 42. The airflow then flows from bottom to top through the second air inlet 42 to the exhaust outlet 31, thus circulating the airflow within the process chamber 1 and ensuring stable air pressure within the process chamber 1. This also reduces the temperature difference between the top and bottom of the first space. This vertical PSOD process purification and cooling system can reduce the temperature difference from 65-75°C to 25-35°C, while simultaneously reducing the dust deposited in the process chamber 1 from 30-35 kg to 12-16 kg.

[0071] The above description is merely a preferred embodiment of this application and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of the invention involved in this application is not limited to technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the inventive concept. For example, technical solutions formed by substituting the above features with (but not limited to) technical features with similar functions disclosed in this application.

Claims

1. A vertical PSOD process purification and cooling system, characterized in that, include: PSOD process room (1), the process room (1) has a first space, and the first space is equipped with PSOD production equipment (2). An exhaust system is provided for discharging dust generated in the process room (1). The exhaust system includes an exhaust vent (31) located near the production equipment (2). The air supply system is used to supply airflow into the process chamber (1). The air supply system includes a first air supply port (41) and a second air supply port (42). The first air supply port (41) and the second air supply port (42) are distributed longitudinally and are located on both sides of the exhaust port (31). A control system is provided, which is connected to both the exhaust system and the make-up air system. The production equipment (2) includes: The discharge pipe (21) has a discharge port for discharging silicon dioxide; Preform (22), which is vertically arranged on one side of the discharge pipe (21) and can rotate about its own axis; The plasma generator (23) has its output port located below the discharge port and on the side of the discharge pipe (21) away from the preform (22). It is used to generate a plasma high-temperature torch to melt the silicon dioxide output from the discharge pipe (21) and then spray the molten silicon dioxide onto the preform (22). The exhaust vent (31) is located 40-60cm above the plasma generator (23); The exhaust system also includes: A dust collection device (32) is provided, wherein the inlet of the dust collection device (32) is connected to the outlet (31); The exhaust fan (33) is connected to the output port of the dust collection device (32), and the exhaust fan (33) is connected to the output port of the control system. The dust collection device (32) is equipped with multi-stage filters for filtering dust step by step.

2. The vertical PSOD process purification and cooling system according to claim 1, characterized in that, The make-up air system includes: The first blower (51) has its output port connected to the first air supply port (41); the first blower (51) is connected to the output of the control system. The second blower (52) is connected to the output port of the second blower (52) and the second air supply port (42); the second blower (52) is connected to the output terminal of the control system.

3. The vertical PSOD process purification and cooling system according to claim 2, characterized in that, A temperature measuring device (6) is installed on the side wall of the process chamber (1), and the temperature measuring device (6) is connected to the input terminal of the control system.

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