A circulating intelligent vacuum system

Abstract

The application relates to a circulating intelligent vacuum pumping system, which comprises a rough vacuum main pipe, a high vacuum main pipe, a plurality of vacuum leg pipes and a vacuum pumping unit arranged on an overhead platform. A plurality of connecting pipes are arranged between the rough vacuum main pipe and the high vacuum main pipe, each connecting pipe corresponds to a vacuum leg pipe, one end of the connecting pipe connected with the rough vacuum main pipe is provided with a rough vacuum plug valve, one end of the connecting pipe connected with the high vacuum main pipe is provided with a high vacuum plug valve, the connecting pipe is connected with the vacuum leg pipe through a bypass pipeline, the bypass pipeline is provided with a bypass vacuum baffle valve, a plurality of uniformly distributed vacuum air suction ports are arranged on the vacuum leg pipe, and the vacuum air suction ports are connected with a container to be pumped through a vacuum connection valve. The application realizes the heat flushing of the container interlayer material and the automatic switching of the rough vacuum to the high vacuum under the satisfaction condition, shortens the operation time of the vacuum pumping system, reduces the labor intensity of the workers, saves the human resources and energy consumption.

Description

Technical Field

[0001] This invention relates to the field of vacuum technology, and more particularly to a cyclic intelligent vacuum system. Background Technology

[0002] Cryogenic insulated pressure vessels are primarily used for storing and transporting cryogenic liquids such as liquid oxygen, liquid nitrogen, liquid argon, liquid carbon dioxide, and liquefied natural gas (LNG). A cryogenic insulated pressure vessel mainly consists of an inner liner, an outer shell, and a valve and accessory system. The inner liner stores the cryogenic liquid, while the outer shell provides protection and support. A jacket is formed between the inner liner and the outer shell, designed as a high-vacuum, multi-layered insulated structure. This jacket needs to be evacuated to a vacuum level, typically not less than 1.0 x 10⁻⁶ Pa, to achieve good insulation performance and reduce gas emissions. Higher vacuum levels result in better insulation.

[0003] Currently, vacuuming technology in the industrial field generally consists of two steps: the first step is rough evacuation, which involves filling the vacuum jacket with a heated gas medium to replace the internal air; carbon dioxide or nitrogen is a relatively mature method for this. The second step is high vacuum evacuation, which uses common vacuum pumps such as Roots pumps, diffusion pumps, or molecular pumps for continuous evacuation for up to ten days to achieve a high vacuum state in the jacket. However, current vacuuming systems can only be performed in separate steps; rough vacuum and high vacuum are two separate systems. The container to be evacuated 16 undergoes rough vacuum evacuation before switching to the high vacuum system. Therefore, existing vacuuming technology is not only damaging to equipment but also time-consuming and energy-intensive. Summary of the Invention

[0004] The purpose of this invention is to overcome the above-mentioned shortcomings and provide a cyclic intelligent vacuum system that can realize the thermal flushing of the interlayer material and the automatic switching between rough vacuum and high vacuum conditions.

[0005] The objective of this invention is achieved as follows: A circulating intelligent vacuum pumping system includes a rough vacuum main pipe, a high vacuum main pipe, multiple vacuum leg pipes, and a vacuum pumping unit mounted on an elevated platform. The vacuum pumping unit includes a rough vacuum cold trap, a high vacuum cold trap, a rough vacuum slide valve pump, a first diffusion pump, a second diffusion pump, a first mechanical pump, and a second mechanical pump. The rough vacuum cold trap is connected to one end of the rough vacuum main pipe via a rough vacuum pre-vacuum gate valve, and is connected to the rough vacuum slide valve pump via a rough vacuum post-vacuum gate valve. The high vacuum cold trap is connected to one end of the high vacuum main pipe via a high vacuum pre-vacuum gate valve, and is connected to the first diffusion pump via a first high vacuum post-vacuum gate valve. The first diffusion pump is connected to the first mechanical pump via a first baffle valve. The high vacuum cold trap is connected to the second diffusion pump via a second high vacuum post-vacuum gate valve, and the second diffusion pump is connected to the second mechanical pump via a second baffle valve. Multiple connecting pipes are provided between the main coarse vacuum pipe and the main high vacuum pipe. Each connecting pipe corresponds to a vacuum leg pipe. An electrical cable tray is provided above each vacuum leg pipe, and a row of container shelves is provided below it. The container shelves are used to place containers to be evacuated. A coarse vacuum gate valve is provided at one end of the connecting pipe connected to the main coarse vacuum pipe, and a high vacuum gate valve is provided at the other end of the connecting pipe connected to the main high vacuum pipe. The connecting pipe is connected to the vacuum leg pipe through a bypass pipe, and a bypass vacuum baffle valve is provided on the bypass pipe. A row of multiple evenly distributed vacuum evacuation ports is provided on the vacuum leg pipe. The vacuum evacuation ports are connected to the containers to be evacuated through evacuation connection valves.

[0006] Furthermore, the container shelf is connected to a winch via a shelf lifting traction steel cable to achieve the lifting and lowering of the container shelf.

[0007] Furthermore, a vacuum gauge tube is provided at each end of the vacuum leg tube.

[0008] Furthermore, the vacuum leg tube is also equipped with a nitrogen replacement valve.

[0009] Furthermore, the container to be evacuated is provided with a sealing valve body, and the sealing valve body is provided with a sealing valve stem and a valve core.

[0010] Furthermore, the sealing valve body is connected to the vacuum leg pipe's evacuation connection valve via a metal bellows.

[0011] Furthermore, a temperature insulation plate is provided at the opening of the container to be evacuated, and a heater and a temperature probe are inserted into the temperature insulation plate. The heater and the temperature probe pass through the temperature insulation plate and enter the container to be evacuated.

[0012] Furthermore, the pumps and valves of the aforementioned pipelines are connected to the control cabinet, which controls the switching of each pump and valve.

[0013] Compared with the prior art, the beneficial effects of the present invention are: This invention integrates two vacuum lines, rough vacuum and high vacuum, onto the same production line. By utilizing vacuum pump sets and corresponding valve sets, rough vacuum and high vacuum can operate independently or switch between each other after meeting process conditions. Through PLC control of various vacuum baffle valves and vacuum gate valves, it achieves thermal rinsing of container jacket materials and automatic switching between rough vacuum and high vacuum conditions. This shortens the operation time of the vacuum system, reduces the labor intensity of workers, saves human resources and energy, and facilitates equipment maintenance, saving time and effort. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of the present invention.

[0015] Figure 2 for Figure 1 A schematic diagram of the evacuation unit.

[0016] Figure 3 for Figure 1 A magnified view of part A.

[0017] Figure 4 This is another structural schematic diagram of the present invention.

[0018] Figure 5 for Figure 4 A schematic diagram of the evacuation unit.

[0019] Figure 6 for Figure 4 A magnified view of section B.

[0020] Figure 7 This is a schematic diagram of the intelligent vacuum system of the present invention.

[0021] in: 1. Rough vacuum main pipe; 2. High vacuum main pipe; 3. Rough vacuum cold trap; 3.1. Rough vacuum pre-vacuum gate valve; 3.2. Rough vacuum post-vacuum gate valve; 4. High vacuum cold trap; 4.1. High vacuum pre-vacuum gate valve; 4.2. First high vacuum post-vacuum gate valve; 4.3. Second high vacuum post-vacuum gate valve; 5. Rough vacuum slide valve pump; 6. First diffusion pump; 7. Second diffusion pump; 8. First mechanical pump; 8.1. First baffle valve; 9. Second mechanical pump; 9.1. Second baffle valve; 10. Vacuum leg pipe; 10.1. Vacuum evacuation port; 11. Evacuation connection valve. 0.2, Nitrogen replacement valve; 10.3, Vacuum gauge pipe; 10.4, Connecting pipe; 11, Coarse vacuum slide gate valve; 11.1, High vacuum slide gate valve; 11.2, Bypass line; 12, Bypass vacuum baffle valve; 12.1, Electrical cable tray; 13, Container shelf; 14, Shelf lifting traction steel rope; 14.1, Winch; 15, Container to be evacuated; 16, Sealing valve body; 16.1, Sealing valve stem and valve core; 16.2, Metal bellows; 16.3, Temperature insulation plate; 16.4, Heater; 16.5, Temperature probe; 16.6, Control cabinet; 17. Implementation

[0022] To better understand the technical solution of the present invention, a detailed description will be provided below in conjunction with relevant illustrations. It should be understood that the specific embodiments described below are not intended to limit the specific implementation of the technical solution of the present invention, but are merely possible implementations of the technical solution of the present invention. It should be noted that the descriptions of the positional relationships of the components herein, such as component A being located above component B, are based on the relative positions of the components in the illustrations and are not intended to limit the actual positional relationships of the components. Example 1

[0023] See Figure 1-7 , Figure 1A schematic diagram of the intelligent vacuum system of the present invention is shown. As shown in the figure, an intelligent vacuum system includes a rough vacuum main pipe 1, a high vacuum main pipe 2, multiple vacuum leg pipes 10, and a vacuum pumping unit installed on an overhead platform. The vacuum pumping unit includes a rough vacuum cold trap 3, a high vacuum cold trap 4, a rough vacuum slide valve pump 5, a first diffusion pump 6, a second diffusion pump 7, a first mechanical pump 8, and a second mechanical pump 9. A coarse vacuum front vacuum gate valve 3.1 is provided in front of the coarse vacuum cold trap 3. The coarse vacuum cold trap 3 is connected to one end of the coarse vacuum main pipe 1 through the coarse vacuum front vacuum gate valve 3.1. A coarse vacuum rear vacuum gate valve 3.2 is provided behind the coarse vacuum cold trap 3. The coarse vacuum cold trap 3 is connected to the coarse vacuum slide valve pump 5 through the coarse vacuum rear vacuum gate valve 3.2. A high-vacuum pre-vacuum gate valve 4.1 is provided in front of the high-vacuum cold trap 4. The high-vacuum cold trap 4 is connected to one end of the high-vacuum main pipe 2 through the high-vacuum pre-vacuum gate valve 4.1. A first high-vacuum post-vacuum gate valve 4.2 and a second high-vacuum post-vacuum gate valve 4.3 are respectively provided on the rear two sides of the high-vacuum cold trap 4. The high-vacuum cold trap 4 is connected to a first diffusion pump 6 through the first high-vacuum post-vacuum gate valve 4.2. The first diffusion pump 6 is connected to a first mechanical pump 8 through a first baffle valve 8.1. The high-vacuum cold trap 4 is connected to a second diffusion pump 7 through the second high-vacuum post-vacuum gate valve 4.3. The second diffusion pump 7 is connected to a second mechanical pump 9 through a second baffle valve 9.1.

[0024] Multiple connecting pipes 11 are provided between the coarse vacuum main pipe 1 and the high vacuum main pipe 2. Each connecting pipe 11 corresponds to a vacuum leg pipe 10. An electrical cable tray 13 is provided above each vacuum leg pipe 10, and a row of container shelves 14 is provided below it. The container shelves 14 are connected to a winch 15 through a shelf lifting traction steel rope 14.1 to realize the lifting and lowering of the container shelves 14. The container shelves 14 are used to place containers 16 to be evacuated.

[0025] One end of the connecting pipe 11 connected to the rough vacuum main pipe 1 is equipped with a rough vacuum gate valve 11.1, and the other end of the connecting pipe 11 connected to the high vacuum main pipe 2 is equipped with a high vacuum gate valve 11.2. The connecting pipe 11 is connected to the vacuum leg pipe 10 through a bypass pipe 12, and a bypass vacuum baffle valve 12.1 is provided on the bypass pipe 12. The vacuum leg pipe 10 is provided with a row of multiple evenly distributed vacuum extraction ports 10.1, and the vacuum extraction ports 10.1 are connected to the evacuation connection valve 10.2. A vacuum gauge pipe 10.4 is provided at each end of the vacuum leg pipe 10, and a nitrogen replacement valve 10.3 is also provided on the vacuum leg pipe 10.

[0026] The container 16 to be evacuated is provided with a sealing valve body 16.1, which is provided with a sealing valve stem and a valve core 16.2. The sealing valve body 16.1 is connected to the evacuation connection valve 10.2 of the vacuum leg pipe 10 through a metal bellows pipe 16.3. The opening of the container 16 to be evacuated is provided with a temperature insulation plate 16.4, which is provided with a heater 16.5 and a temperature probe 16.6. The heater 16.5 and the temperature probe 16.6 pass through the temperature insulation plate 16.4 and enter the container 16 to be evacuated.

[0027] The pumps and valves of the above-mentioned pipelines are connected to the control cabinet 17, and the control cabinet 17 controls the switching of each pump and valve; the electrical cable tray 13 connects each electrical appliance.

[0028] See Figure 1-7 The present invention relates to a cyclic intelligent vacuum pumping system, which, based on the above-mentioned intelligent vacuum pumping system, includes the following: S1. Installation Inspection Install and inspect the flange seals of the coarse vacuum cold trap and the high vacuum cold trap. After confirming that the seals are intact, apply vacuum grease to the seals and install the inner liner of each cold trap onto the cold trap, and tighten it with C-clamps. S2. Pre-evacuate the main rough vacuum pipeline. Open the pre-vacuum gate valve and the post-vacuum gate valve of the rough vacuum, close the rough vacuum gate valve on each vacuum leg pipe, start the rough vacuum slide valve pump, pre-evacuate the main rough vacuum pipeline, observe the vacuum gauge value on the vacuum leg, if it can be quickly evacuated to ≤3.0E-0Pa, the rough vacuum pipeline is normal (at this time, the rough vacuum cold trap cannot be added to the cold trap). S3. Pre-evacuate the high vacuum pipeline. Turn on one of the mechanical pumps (the other mechanical pump is a backup), close the high vacuum gate valves on each vacuum leg, and open the corresponding diffusion pump and mechanical pump baffle valves. After the diffusion pump oil temperature reaches the working temperature, pre-evacuate the high vacuum pipeline and observe the vacuum gauge value on the vacuum leg. If it can be quickly evacuated to ≤3.0E-1Pa, the high vacuum pipeline is normal (at this time, the high vacuum cold trap cannot be added). S4. Connect the container to be drawn. Place the aluminum container with the interlayer helium-tested on the container rack, align the position of the vacuum leg pipeline evacuation connection valve with the container to be evacuated, and connect the vacuum leg pipeline to the sealing valve of the container to be evacuated using clamps through a metal bellows with a KF connector. S5. Installation of the container to be pumped Install the sealing ring on the sealing valve core of the container to be pumped, and apply a small amount of vacuum silicone grease along with the sealing ring. Then screw the valve core onto the valve stem thread of the sealing valve. Check the sealing ring of the sealing valve to ensure it is intact, and connect the sealing valve to the vacuum pump port of the vacuum leg pipeline through the vacuum connection valve. Install a heat insulation plate on the container to be pumped, put the finned heating rod into the inner liner of the container, and after it touches the bottom, lift it up and fix it, and install the fixed temperature probe. S6. Perform rough extraction on the container to be extracted. Open the valve corresponding to the container to be pumped, open the bypass vacuum baffle valve of the vacuum leg tube where the container to be pumped is located, and reduce the pressure of the vacuum leg to below 800Pa through rough evacuation. Close the bypass vacuum baffle valve, open the rough vacuum valve, and perform rough evacuation on the container. S7. Purge the container jacket with nitrogen. According to the process requirements, a rough vacuum is drawn. After the pressure of the vacuum leg tube reaches the process requirement pressure, the rough vacuum gate valve of the corresponding vacuum leg tube is closed, the nitrogen replacement valve of the vacuum leg tube is opened, and the jacket of the container to be evacuated is flushed with nitrogen. After the flushing is completed, the nitrogen replacement valve is closed. S8. Heating the inner liner of the container. Turn on the heater of the vacuum leg tube to heat the inner liner of the container under pressure; S9. Obtain high vacuum by applying it to the container jacket. Continuous heating is performed, and step 6 is repeated until the rough vacuum reaches the process-specified time and the vacuum level in the vacuum leg pipeline reaches the process-specified pressure. The rough vacuum valve is then closed, and the high vacuum valve is opened to obtain a high vacuum in the container jacket. S10, Leakage Test After the high vacuum is achieved for the specified time and the vacuum leg pressure is better than the specified pressure, a leak test is performed on the vacuum leg and container jacket: the high vacuum valve is closed and the pressure change over time is recorded. The test is considered passed if the leak test conditions are met. If the leakage test strip is not met, evacuation should continue. After that, a test should be conducted after each test time specified in the process. If the test fails after more than the number of tests specified in the process, the superior should be notified for investigation. S11. Seal the container. After the leakage test is passed and the total high vacuum time reaches the process specification time, heating is stopped, the container is sealed, and the corresponding valve of the container is closed after sealing; the sealing valve is removed, the heater and temperature probe are taken out, and the container is transferred to the next process. S12. Nitrogen purging of the vacuum leg tube. After sealing is completed, open the nitrogen purging valve on the vacuum leg tube to provide nitrogen protection for the vacuum leg tube.

[0029] The above are merely specific application examples of the present invention and do not constitute any limitation on the scope of protection of the present invention. All technical solutions formed by equivalent transformations or substitutions fall within the scope of protection of the present invention.

Claims

1. A cyclic intelligent vacuum pumping system, characterized in that: It includes a rough vacuum main pipe (1), a high vacuum main pipe (2), multiple vacuum leg pipes (10), and a vacuum pumping unit installed on an overhead platform. The vacuum pumping unit includes a rough vacuum cold trap (3), a high vacuum cold trap (4), a rough vacuum slide valve pump (5), a first diffusion pump (6), a second diffusion pump (7), a first mechanical pump (8), and a second mechanical pump (9). The rough vacuum cold trap (3) is connected to one end of the rough vacuum main pipe (1) through a rough vacuum pre-vacuum gate valve (3.1), and the rough vacuum cold trap (3) is connected to a rough vacuum post-vacuum gate valve (3.2). A rough vacuum slide valve pump (5); the high vacuum cold trap (4) is connected to one end of the high vacuum main pipe (2) through a high vacuum pre-vacuum gate valve (4.1), the high vacuum cold trap (4) is connected to a first diffusion pump (6) through a first high vacuum post-vacuum gate valve (4.2), the first diffusion pump (6) is connected to a first mechanical pump (8) through a first baffle valve (8.1), the high vacuum cold trap (4) is connected to a second diffusion pump (7) through a second high vacuum post-vacuum gate valve (4.3), and the second diffusion pump (7) is connected to a second mechanical pump (9) through a second baffle valve (9.1); Multiple connecting pipes (11) are provided between the main rough vacuum pipe (1) and the main high vacuum pipe (2). Each connecting pipe (11) corresponds to a vacuum leg pipe (10). An electrical cable tray (13) is provided above each vacuum leg pipe (10), and a row of container shelves (14) is provided below each vacuum leg pipe (10). The container shelves (14) are used to place containers (16) to be evacuated. A rough vacuum gate valve (11.1) is provided at one end of the connecting pipe (11) that connects to the main rough vacuum pipe (1). A high vacuum gate valve (11.2) is provided at one end of the pipeline (11) connected to the high vacuum main pipe (2). The connecting pipeline (11) is connected to the vacuum leg pipe (10) through the bypass pipeline (12). A bypass vacuum baffle valve (12.1) is provided on the bypass pipeline (12). A row of multiple evenly distributed vacuum evacuation ports (10.1) is provided on the vacuum leg pipe (10). The vacuum evacuation ports (10.1) are connected to the container to be evacuated (16) through the evacuation connection valve (10.2).

2. The cyclic intelligent vacuum system according to claim 1, characterized in that: The container shelf (14) is connected to a winch (15) via a shelf lifting traction steel rope (14.1) to realize the lifting and lowering of the container shelf (14).

3. The cyclic intelligent vacuum system according to claim 1, characterized in that: A vacuum gauge tube (10.4) is provided at each end of the vacuum leg tube (10).

4. The cyclic intelligent vacuum system according to claim 1, characterized in that: The vacuum leg tube (10) is also equipped with a nitrogen replacement valve (10.3).

5. The cyclic intelligent vacuum system according to claim 1, characterized in that: The container to be evacuated (16) is provided with a sealing valve body (16.1), and the sealing valve body (16.1) is provided with a sealing valve stem and a valve core (16.2).

6. The cyclic intelligent vacuum system according to claim 5, characterized in that: The sealing valve body (16.1) is connected to the vacuum leg pipe (10.2) of the vacuum connection valve (10) via a metal bellows pipe (16.3).

7. The cyclic intelligent vacuum system according to claim 1, characterized in that: A temperature insulation plate (16.4) is provided at the opening of the container to be evacuated (16). A heater (16.5) and a temperature probe (16.6) are inserted into the temperature insulation plate (16.4). The heater (16.5) and the temperature probe (16.6) pass through the temperature insulation plate (16.4) and enter the container to be evacuated (16).

8. The cyclic intelligent vacuum system according to claim 1, characterized in that: The pre-vacuum gate valve (3.1), post-vacuum gate valve (3.2), pre-vacuum gate valve (4.1), post-vacuum gate valve (4.2), post-vacuum gate valve (4.3), post-vacuum gate valve (8.1), post-vacuum gate valve (9.1), evacuation connection valve (10.2), nitrogen replacement valve (10.3), pre-vacuum gate valve (11.1), post-vacuum gate valve (11.2), and bypass vacuum gate valve (12.1) are respectively connected to the control cabinet (17), and the control cabinet (17) controls the switching of each pump valve.

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