A manufacturing method of a vapor chamber having stable temperature uniformity

Abstract

The application relates to a manufacturing method of a heat uniform plate with stable temperature uniform performance, and belongs to the technical field of heat uniform plate manufacturing. In order to realize stable control of the performance of the produced heat uniform plate, the application comprises a process flow of machining, sintering, welding, finishing, vacuumizing and filling, exhaust, first temperature uniform test, second exhaust, second temperature uniform test and sealing. The vacuumizing and filling process is realized through a vacuumizing and filling system, the vacuumizing and filling system comprises a vacuum pump, a filter, a vacuum gauge, a first manual switch, a T-shaped tee joint, a second manual switch starting joint, a starting joint, a rubber plug combination and a syringe. The heat uniform plate reaches a near net state to realize vacuumizing, filling and testing, the adjustment items are determined through a test characteristic curve, the working medium and the vacuum degree are slightly adjusted through the second exhaust to solve the problems of large temperature uniform performance discrete interval and unqualified performance, and the heating mode adopts water bath heating. The method is simple, convenient to realize, has high universality and is suitable for mass production.

Description

Technical Field

[0001] This invention belongs to the field of temperature equalization plate manufacturing technology, and specifically relates to a method for manufacturing a temperature equalization plate with stable temperature equalization performance. Background Technology

[0002] In recent years, the manufacturing technology of heat exchange plates has developed rapidly. The current mainstream manufacturing technology solutions are as follows:

[0003] Machining - Sintering - Welding - Vacuuming - Filling - Exhausting - Secondary Exhausting - Finishing - Sealing.

[0004] Producing a complex vapor chamber requires mounting a printed circuit board (PCB) with a dozen or more chips. However, it's impossible to test the vapor chamber's performance directly by mounting the PCB during production. A common method is to simulate equivalent heating power for testing. This often involves attaching heating elements of equivalent power to the corresponding chip locations on the vapor chamber. However, this method requires a dedicated heating scheme, soldering heating chips and wires, and bonding heating elements. Poor adhesion of the heating elements can lead to significant errors in the simulated power. Furthermore, the system involves parallel and overlapping use with temperature sensor wires, resulting in a cluttered and inconvenient testing environment. Additionally, a single testing system can only test the vapor chamber performance of one vapor chamber at a time, leading to high resource consumption, low production efficiency, and hindering mass production of vapor chambers.

[0005] Furthermore, achieving the final uniform temperature performance of the product through full-process parameter control during production involves numerous process parameters, including filling volume, vacuum level, sintered core state, cavity size, and secondary exhaust control. This makes it difficult to accurately control the final uniform temperature performance, resulting in large dispersion ranges in uniform temperature performance or product defects. Especially for new product development, where the various control parameters in the manufacturing process are not yet accurately known, it is difficult to precisely pinpoint the cause when products fail to meet uniform temperature performance standards. Summary of the Invention

[0006] The problem to be solved by this invention is to achieve stable control of the performance of the produced temperature homogenizer, and proposes a manufacturing method for a temperature homogenizer with stable temperature homogenization performance.

[0007] To achieve the above objectives, the present invention provides the following technical solution:

[0008] A method for manufacturing a temperature equalization plate with stable temperature uniformity performance, wherein the manufacturing process of the temperature equalization plate with stable temperature uniformity performance is as follows: machining → sintering → welding → precision machining → vacuuming and filling → venting → first temperature equalization test → second venting → second temperature equalization test → sealing.

[0009] Furthermore, the finishing process involves finishing the process surfaces of the heat spreader plate other than the filling process holes.

[0010] Furthermore, the vacuuming and filling process is achieved through a vacuuming and filling system, which includes a vacuum pump, a filter, a vacuum gauge, a first manual switch, a T-shaped tee, a second manual switch starter connector, a starter connector, a rubber plug assembly, and a syringe.

[0011] The vacuum pump is connected to a filter, the filter is connected to a vacuum gauge, the vacuum gauge is connected to a first manual switch, the first manual switch is connected to a T-shaped tee, the other two ports of the T-shaped tee are respectively connected to a second manual switch and a starter connector, the starter connector is connected to a heat spreader, and the second manual switch is connected to a syringe via a rubber plug assembly.

[0012] Furthermore, the vacuuming and filling system controls the volume of the pre-filled working medium to be 25% larger than the volume of the vacuum chamber of the heat spreader. The vacuuming and filling system evacuates the vacuum chamber of the heat spreader until the vacuum degree of the vacuum chamber of the heat spreader is 0.8 MPa, and then the working medium is filled using the vacuuming and filling system.

[0013] Furthermore, the exhaust temperature is selected according to the filling medium during the exhaust process, and then the filling valve of the temperature equalization plate is closed to seal the temperature equalization plate.

[0014] Furthermore, the first temperature uniformity test is achieved through a temperature uniformity test system, which includes a temperature uniformity plate, a temperature sensor, a simple support, a constant temperature water bath, a data acquisition card, and a computer.

[0015] A temperature sensor is attached to the temperature distribution plate, the temperature sensor is connected to a data acquisition card, and the data acquisition card is connected to a computer.

[0016] The multiple temperature equalization plates are placed on a simple support, and the depth of the temperature equalization plates entering the constant temperature water tank is controlled by the simple support, so as to realize the simultaneous online measurement of multiple temperature equalization plates.

[0017] Furthermore, during the first temperature uniformity test, 3-4 detection points are selected on the 20cm x 30cm temperature uniformity plate to test the overall temperature uniformity performance of the plate. A detection trigger temperature sensor is attached to the part of the temperature uniformity plate that is first immersed in water, which is used to trigger the temperature uniformity test system to detect and record after the temperature uniformity plate is immersed in water. The specific implementation method includes the following steps:

[0018] S1. Set the constant temperature water bath temperature according to the ambient temperature of the temperature distribution plate;

[0019] S2. Calculate the heating area of ​​the heat spreader using the equivalent heat flux density:

[0020] S2.1. First, calculate the heat flux density q, the calculation expression is:

[0021] q=λ*(T2-T1) / δ

[0022] Where λ is the thermal conductivity of the heat exchanger, T2 is the center temperature of the heat exchanger, T1 is the outer surface temperature of the heat exchanger, and δ is the thickness of the heat exchanger.

[0023] S2.2. Then, the total heat flux density qz is calculated based on the thermal conduction heat flux density. The calculation expression is:

[0024] qz=q+Eb

[0025] Where Eb represents the radiative force;

[0026] The formula for calculating the radiative force Eb is:

[0027] Eb = ε * C0 * (T / 100)

[0028] Where C0 is the radiation constant, T is the test water temperature, and ε is the correction coefficient;

[0029] S2.3. Calculate the heating area Az of the temperature equalization plate. The calculation expression is:

[0030] Az=P / qz

[0031] Where P is the input power;

[0032] S3. Based on the fact that the heat flux density of heating the isothermal plate and the heat flux density of high-temperature water heating the isothermal plate are equal, the water immersion depth Lz of the isothermal plate is calculated. The calculation expression is:

[0033] Lz=Az / L1

[0034] Wherein, L1 is the perimeter of the water-equalizing plate structure;

[0035] S4. Based on the water immersion depth of the temperature equalization plate calculated in step S3, the water immersion depth of the temperature equalization plate is controlled by a simple bracket made of folded steel wire.

[0036] S5. The data collected by the temperature sensors at each point are synchronized to the computer through the data acquisition card. The computer generates time and temperature curves from the temperature data of each detection point. Then, the difference between the highest and lowest temperatures at the same time point is calculated to generate time and temperature curves. After the test is completed, the maximum temperature difference data during the detection process is obtained.

[0037] Furthermore, the first temperature equalization test process lasts for 100 seconds, and the maximum temperature difference between each measurement point at any given time point is no greater than 4℃.

[0038] Furthermore, based on the temperature curve characteristics of the detection point in the first uniform temperature test, the direction of adjustment of the working fluid and vacuum degree is determined. The volume of the working fluid is controlled to be 25% of the vacuum chamber volume of the uniform temperature plate through secondary exhaust, and the vacuum degree of the vacuum chamber of the uniform temperature plate is 0.65 MPa.

[0039] Furthermore, the second temperature equalization test is performed using a temperature equalization test system.

[0040] The beneficial effects of this invention are:

[0041] The present invention discloses a method for manufacturing a temperature uniform plate with stable temperature uniformity. The temperature uniform plate is brought to a near-clean state and then vacuumed, filled, and tested. The adjustment items are determined by the test characteristic curve. The working fluid and vacuum degree are finely adjusted by secondary exhaust to solve the problems of large dispersion range of temperature uniformity and unqualified performance.

[0042] The present invention discloses a method for manufacturing a temperature equalization plate with stable temperature uniformity. The heating method uses water bath heating instead of heating element heating. The method is simple, convenient to implement, highly versatile, and suitable for mass production.

[0043] The present invention discloses a method for manufacturing a temperature equalization plate with stable temperature uniformity performance, wherein the water immersion area of ​​the temperature equalization plate during water bath testing can be calculated based on the water bath temperature (operating temperature) and heat flux density.

[0044] The present invention discloses a method for manufacturing a heat spreader with stable temperature uniformity. Through a self-built temperature uniformity testing system, a trigger temperature sensor and a detection sensor are set up to record the working time of the heat spreader under heat activation in a timely and accurate manner. Attached Figure Description

[0045] Figure 1 This is a schematic diagram of the vacuuming and filling system described in this invention;

[0046] Figure 2 This is a schematic diagram of the uniform temperature testing system described in this invention. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only for explaining the invention and are not intended to limit the invention; that is, the described specific embodiments are merely a part of the embodiments of the invention, and not all of them. The components of the specific embodiments of the invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations, and the invention may also have other embodiments.

[0048] Therefore, the following detailed description of specific embodiments of the invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected specific embodiments of the invention. All other specific embodiments obtained by those skilled in the art based on these specific embodiments without inventive effort are within the scope of protection of this invention.

[0049] To further understand the invention's content, features, and effects, the following specific embodiments are provided, along with accompanying drawings. Figure 1 -Appendix Figure 2 Detailed explanation is as follows: Specific implementation method one:

[0051] A method for manufacturing a temperature equalization plate with stable temperature uniformity performance, wherein the manufacturing process of the temperature equalization plate with stable temperature uniformity performance is as follows: machining → sintering → welding → precision machining → vacuuming and filling → venting → first temperature equalization test → second venting → second temperature equalization test → sealing.

[0052] Furthermore, the finishing process involves finishing the process surfaces of the heat spreader plate other than the filling process holes.

[0053] Furthermore, the vacuuming and filling process is achieved through a vacuuming and filling system, which includes a vacuum pump 1, a filter 2, a vacuum gauge 3, a first manual switch 4, a T-type tee 5, a second manual switch 6, a starter connector 7, a rubber plug assembly 8, and a syringe 9.

[0054] The vacuum pump 1 is connected to the filter 2, the filter 2 is connected to the vacuum gauge 3, the vacuum gauge 3 is connected to the first manual switch 4, the first manual switch 4 is connected to the T-shaped tee 5, the other two ports of the T-shaped tee 5 are respectively connected to the second manual switch 6 and the start connector 7, the start connector 7 is connected to the heat spreader 10, and the second manual switch 6 is connected to the syringe 9 through the rubber plug assembly 8.

[0055] Furthermore, the vacuuming and filling system controls the volume of the pre-filled working medium to be 25% larger than the volume of the vacuum chamber of the temperature distribution plate 10. The vacuuming and filling system evacuates the vacuum chamber of the temperature distribution plate 10 until the vacuum degree of the vacuum chamber of the temperature distribution plate 10 is 0.8 MPa, and then the working medium is filled using the vacuuming and filling system.

[0056] Furthermore, the exhaust process selects the exhaust temperature according to the filling medium, and then closes the filling valve of the temperature equalization plate 10 to seal the temperature equalization plate 10.

[0057] Furthermore, the first temperature uniformity test is achieved through a temperature uniformity test system, which includes a temperature uniformity plate 10, a temperature sensor 11, a simple support 12, a constant temperature water bath 13, a data acquisition card 14, and a computer 15.

[0058] A temperature sensor 11 is attached to the temperature distribution plate 10. The temperature sensor 11 is connected to a data acquisition card 14, and the data acquisition card 14 is connected to a computer 15.

[0059] The multiple temperature equalization plates 10 are placed on the simple support 12, and the depth of the temperature equalization plates 10 entering the constant temperature water tank 13 is controlled by the simple support 12, so as to realize the simultaneous online measurement of multiple temperature equalization plates.

[0060] Furthermore, during the first temperature uniformity test, 3-4 detection points are selected on the 20cm x 30cm temperature uniformity plate 10 to test the overall temperature uniformity performance of the temperature uniformity plate 10. A detection trigger temperature sensor is attached to the part of the temperature uniformity plate 10 that is first immersed in water, so that the temperature uniformity test system can be triggered to detect and record after the temperature uniformity plate 10 is immersed in water. The specific implementation method includes the following steps:

[0061] S1. Set the constant temperature water bath temperature according to the ambient temperature of the temperature distribution plate;

[0062] S2. Calculate the heating area of ​​the heat spreader using the equivalent heat flux density:

[0063] S2.1. First, calculate the heat flux density q, the calculation expression is:

[0064] q=λ*(T2-T1) / δ

[0065] Where λ is the thermal conductivity of the heat exchanger, T2 is the center temperature of the heat exchanger, T1 is the outer surface temperature of the heat exchanger, and δ is the thickness of the heat exchanger.

[0066] S2.2. Then, the total heat flux density qz is calculated based on the thermal conduction heat flux density. The calculation expression is:

[0067] qz=q+Eb

[0068] Where Eb represents the radiative force;

[0069] The formula for calculating the radiative force Eb is:

[0070] Eb=ε*C0*T / 100

[0071] Where C0 is the radiation constant, T is the test water temperature, and ε is the correction coefficient;

[0072] S2.3. Calculate the heating area Az of the temperature equalization plate. The calculation expression is:

[0073] Az=P / qz

[0074] Where P is the input power;

[0075] S3. Based on the fact that the heat flux density of heating the isothermal plate and the heat flux density of high-temperature water heating the isothermal plate are equal, the water immersion depth Lz of the isothermal plate is calculated. The calculation expression is:

[0076] Lz=Az / L1

[0077] Wherein, L1 is the perimeter of the water-equalizing plate structure;

[0078] S4. Based on the water immersion depth of the temperature equalization plate calculated in step S3, the water immersion depth of the temperature equalization plate is controlled by a simple bracket made of folded steel wire.

[0079] S5. The data collected by the temperature sensors at each point are synchronized to the computer through the data acquisition card. The computer generates time and temperature curves from the temperature data of each detection point. Then, the difference between the highest and lowest temperatures at the same time point is calculated to generate time and temperature curves. After the test is completed, the maximum temperature difference data during the detection process is obtained.

[0080] Furthermore, the first temperature equalization test process lasts for 100 seconds, and the maximum temperature difference between each measurement point at any given time point is no greater than 4℃.

[0081] Furthermore, based on the temperature curve characteristics of the detection point in the first uniform temperature test, the direction of adjustment of the working fluid and vacuum degree is determined. The volume of the working fluid is controlled to be 25% of the vacuum chamber volume of the uniform temperature plate through secondary exhaust, and the vacuum degree of the vacuum chamber of the uniform temperature plate is 0.65 MPa.

[0082] Furthermore, the second temperature equalization test is performed using a temperature equalization test system.

[0083] Furthermore, since there are significant differences in the parameters of different power temperature distribution plates and filling media, the ideal temperature distribution performance test curve is obtained before final sealing. This technology can effectively solve the problems of large dispersion range in product temperature distribution performance and defective products. Moreover, this technology is highly suitable for new product development, and can, to a certain extent, eliminate the impact of manufacturing parameter variations on the final temperature distribution performance.

[0084] It should be noted that relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0085] Although this application has been described above with reference to specific embodiments, various modifications can be made and components can be replaced with equivalents without departing from the scope of this application. In particular, as long as there is no structural conflict, the features in the specific embodiments disclosed in this application can be combined with each other in any way. The lack of an exhaustive description of these combinations in this specification is merely for the sake of brevity and resource conservation. Therefore, this application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A method for manufacturing a temperature equalization plate with stable temperature uniformity, characterized in that, The manufacturing process of the temperature plate with stable temperature uniformity is as follows: machining → sintering → welding → precision machining → vacuuming and filling → exhaust → first temperature uniformity test → second exhaust → second temperature uniformity test → sealing. The first temperature uniformity test is achieved through a temperature uniformity test system, which includes a temperature uniformity plate (10), a temperature sensor (11), a simple bracket (12), a constant temperature water bath (13), a data acquisition card (14), and a computer (15). A temperature sensor (11) is attached to the temperature distribution plate (10), the temperature sensor (11) is connected to a data acquisition card (14), and the data acquisition card (14) is connected to a computer (15). Multiple temperature equalization plates (10) are placed on a simple support (12). The depth of the temperature equalization plates (10) entering the constant temperature water bath (13) is controlled by the simple support (12) to achieve simultaneous online measurement of multiple temperature equalization plates. During the first temperature uniformity test, 3-4 detection points are selected on the 20cm x 30cm temperature uniformity plate (10) to test the overall temperature uniformity performance of the temperature uniformity plate (10). A detection trigger temperature sensor is attached to the part of the temperature uniformity plate (10) that is first immersed in water. This sensor is used to trigger the temperature uniformity test system to detect and record the temperature after the temperature uniformity plate (10) is immersed in water. The specific implementation method includes the following steps: S1. Set the constant temperature water bath temperature according to the ambient temperature of the temperature distribution plate; S2. Calculate the heating area of ​​the heat spreader using the equivalent heat flux density: S2.

1. First, calculate the heat flux density q, the calculation expression is: q=λ*(T2-T1) / δ Where λ is the thermal conductivity of the heat exchanger, T2 is the center temperature of the heat exchanger, T1 is the outer surface temperature of the heat exchanger, and δ is the thickness of the heat exchanger. S2.

2. Then, the total heat flux density qz is calculated based on the thermal conduction heat flux density. The calculation expression is: qz=q+Eb Where Eb represents the radiative force; The formula for calculating the radiative force Eb is: Eb = ε * C0 * (T / 100) Where C0 is the radiation constant, T is the test water temperature, and ε is the correction coefficient; S2.

3. Calculate the heating area Az of the temperature equalization plate. The calculation expression is: Az=P / qz Where P is the input power; S3. Based on the fact that the heat flux density of heating the isothermal plate and the heat flux density of high-temperature water heating the isothermal plate are equal, the water immersion depth Lz of the isothermal plate is calculated. The calculation expression is: Lz=Az / L1 Wherein, L1 is the perimeter of the water-equalizing plate structure; S4. Based on the water immersion depth of the temperature equalization plate calculated in step S3, the water immersion depth of the temperature equalization plate is controlled by a simple bracket made of folded steel wire. S5. The data collected by the temperature sensors at each point are synchronized to the computer through the data acquisition card. The computer generates time and temperature curves from the temperature data of each detection point. Then, the difference between the highest and lowest temperatures at the same time point is calculated to generate time and temperature curves. After the test is completed, the maximum temperature difference data during the detection process is obtained.

2. The method for manufacturing a temperature equalization plate with stable temperature uniformity according to claim 1, characterized in that, The finishing process refers to finishing the process surfaces of the heat spreader plate other than the filling process holes.

3. The method for manufacturing a temperature equalization plate with stable temperature uniformity according to claim 2, characterized in that, The vacuuming and filling process is achieved through a vacuuming and filling system, which includes a vacuum pump (1), a filter (2), a vacuum gauge (3), a first manual switch (4), a T-type tee (5), a second manual switch (6), a starter connector (7), a rubber plug assembly (8), and a syringe (9). The vacuum pump (1) is connected to the filter (2), the filter (2) is connected to the vacuum gauge (3), the vacuum gauge (3) is connected to the first manual switch (4), the first manual switch (4) is connected to the T-shaped tee (5), the other two ports of the T-shaped tee (5) are connected to the second manual switch (6) and the start connector (7) respectively, the start connector (7) is connected to the heat spreader (10), and the second manual switch (6) is connected to the syringe (9) through the rubber plug assembly (8).

4. The method for manufacturing a temperature equalization plate with stable temperature uniformity according to claim 3, characterized in that, The vacuuming and filling system controls the volume of the pre-filled working medium to be 25% larger than the volume of the vacuum chamber of the temperature plate (10). The vacuuming and filling system evacuates the vacuum chamber of the temperature plate (10) until the vacuum degree of the vacuum chamber of the temperature plate (10) is 0.8 MPa. Then the working medium is filled using the vacuuming and filling system.

5. A method for manufacturing a temperature equalization plate with stable temperature uniformity according to claim 4, characterized in that, The exhaust temperature is selected according to the filling medium during the exhaust process, and then the filling valve of the temperature equalization plate (10) is closed to seal the temperature equalization plate (10).

6. A method for manufacturing a temperature equalization plate with stable temperature uniformity according to claim 5, characterized in that, The first temperature equalization test lasted 100 seconds, and the maximum temperature difference between the measurement points at any given time point was no greater than 4℃.

7. A method for manufacturing a temperature equalization plate with stable temperature uniformity according to claim 6, characterized in that, Based on the temperature curve characteristics of the detection point in the first uniform temperature test, the working fluid and vacuum degree adjustment direction are determined. The volume of the working fluid is controlled to be 25% of the vacuum chamber volume of the uniform temperature plate through secondary exhaust, and the vacuum degree of the vacuum chamber of the uniform temperature plate is 0.65 MPa.

8. A method for manufacturing a temperature equalization plate with stable temperature uniformity according to claim 7, characterized in that, The second temperature uniformity test was conducted using a temperature uniformity test system.

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