inlet assembly

Abstract

An inlet assembly, an abatement apparatus, and a method are disclosed. The inlet assembly is for use in an abatement apparatus, the abatement apparatus is for processing an exhaust stream from a semiconductor processing tool, and the inlet assembly includes a combustion chamber module defining a plenum configured to supply a combustion agent to its combustion chamber, the combustion chamber module having a mount configured to engage with a common head, the common head defining at least one gallery configured to supply the combustion agent, the mount including a plurality of feed holes positioned for fluid communication of the combustion agent between the gallery and the plenum. In this way, the mount of its combustion chamber module engages with a standard or common head, which enables the combustion agent to be supplied from the gallery of the common head to the plenum of the combustion chamber module via the mount. This enables the common head to be used for different combustion chamber modules, which reduces the number of components required for assembly and maintenance of the abatement apparatus.

Description

Technical Field

[0001] The field of this invention relates to inlet components, emission reduction devices, and methods. Background Technology

[0002] Emission reduction devices (such as radiant burners or other types of emission reduction devices) are known and commonly used to treat exhaust gases from manufacturing tools used in industries such as semiconductor or flat panel display manufacturing. During such manufacturing, residual perfluorinated compounds (PFCs) and other compounds are present in the exhaust gases pumped from the manufacturing tools. PFCs are difficult to remove from exhaust gases, and it is undesirable for them to be released into the environment because PFCs are known to have a relatively high greenhouse effect.

[0003] Known radiant burners utilize combustion to remove PFCs and other compounds from the exhaust gas stream, as described in EP0694735, for example. Typically, the exhaust gas stream is a nitrogen stream containing PFCs and other compounds. This exhaust stream is fed into a combustion chamber laterally surrounded by the outlet surface of a perforated gas burner. In some cases, a treatment material, such as fuel gas, may be mixed with the exhaust gas stream before entering the combustion chamber. Fuel gas and air are simultaneously supplied to the perforated burner to influence combustion at the outlet surface. Combustion products from the perforated burner react with the exhaust stream mixture to burn off the compounds in the exhaust stream.

[0004] Although there are existing layout structures for emission reduction equipment, each has its own drawbacks. Therefore, it is desirable to provide an improved layout structure for emission reduction equipment. Summary of the Invention

[0005] According to a first aspect, an inlet assembly for an emission reduction device is provided for treating an exhaust stream from a semiconductor processing tool, the inlet assembly comprising: a combustion chamber module defining a gas chamber configured to supply a propellant to its combustion chamber, the combustion chamber module having a mounting member configured to engage with a common head defining at least one channel configured to supply the propellant, the mounting member including a plurality of supply orifices positioned for fluid communication of the propellant between the channel and the gas chamber.

[0006] The first aspect recognizes that the challenge with emission reduction equipment lies in the fact that each combustion chamber needs to be carefully constructed to suit the flow rate and type of the exhaust stream to ensure adequate emission reduction. This means the need to manufacture a variety of components, often custom-made, to provide emission reduction equipment suitable for operation under diverse conditions. For example, the arrangement of the delivery nozzles that feed the exhaust stream into the emission reduction chamber can vary depending on the exhaust stream and / or its flow rate. Furthermore, the dimensions of the emission reduction chamber can vary. Having delivery nozzles and emission reduction chambers with different constructions can be problematic because it can lead to the need for components with different constructions, increasing the inventory of parts required for the production and maintenance of such emission reduction equipment.

[0007] Therefore, an inlet assembly is provided. This inlet assembly can be used in an emission reduction device that can handle exhaust streams from semiconductor processing tools. The inlet assembly may include a combustion chamber module. The combustion chamber module may define a gas chamber. The gas chamber may be configured or arranged to supply propellant to the combustion chamber of the combustion chamber module. The combustion chamber module may have a mounting member. The mounting member may be configured to engage or connect to a common head. The common head may define at least one channel or chamber. The channel may be configured or arranged to supply propellant. The mounting member may include a plurality of supply orifices. The supply orifices may be positioned or defined to provide fluid communication of propellant between the channel and the gas chamber. Thus, a mounting member suitable for its combustion chamber module engages with a standard or common head, allowing propellant to be supplied from the channel of the common head via the mounting member to the gas chamber of the combustion chamber module. This allows the common head to be used for different combustion chamber modules, reducing the number of components required for the assembly and maintenance of the emission reduction device.

[0008] The gas chamber may surround the combustion charge chamber. The supply port may be positioned above or aligned with the gas chamber. Therefore, the supply port may be positioned aligned with the gas chamber.

[0009] The supply hole can be positioned to extend or be located around the periphery or outer edge of the mounting component.

[0010] The inlet assembly may include multiple combustion chamber modules. Each combustion chamber module may have a mounting element configured to engage with a corresponding one of a plurality of channels in the common head. Each mounting element may include multiple supply orifices positioned for fluid communication of propellant between the channel and the corresponding gas chamber. Thus, the common head may be provided with multiple separate channels, each supplying propellant to a corresponding combustion chamber module via its mounting element. This allows each combustion chamber module to be supplied independently of the other modules.

[0011] At least one combustion chamber module mounting may be configured or arranged to engage or connect with multiple channels of a common head. The mounting may include multiple supply ports positioned or defined for fluid communication of the propellant between those channels and their gas chambers. Thus, more than one channel within the common head can supply the combustion chamber module. This allows the combustion chamber module to be supplied with an increased amount of propellant.

[0012] Each combustion chamber module may be configured or arranged to receive, or have said at least one exhaust nozzle extending from a common head positioned therein. A supply orifice may be positioned to bypass each exhaust nozzle. Thus, the exhaust nozzles may extend through the common head and through the mounting, with the supply orifice positioned away from the exhaust nozzles.

[0013] The mounting member may define at least one exhaust nozzle orifice. The exhaust nozzle orifice may be positioned or defined to receive a corresponding exhaust nozzle. Thus, the exhaust nozzle may extend from the common head and pass through the mounting member to reach the combustion chamber.

[0014] The mounting component may include at least one discharge nozzle seal positioned around each respective discharge nozzle.

[0015] Each exhaust nozzle seal can be configured to isolate the corresponding exhaust nozzle from the propellant fluid.

[0016] The combustion chamber module may include at least one exhaust nozzle seal groove configured to receive a corresponding exhaust nozzle seal.

[0017] The supply orifice can be positioned or defined to avoid each discharge flow nozzle seal.

[0018] The mounting component may include a peripheral seal that may be configured to contain a propellant.

[0019] The common head can be configured to removably provide at least one additional exhaust nozzle for enhancing the combustion chamber module. This nozzle can extend from the common head. Therefore, the common head can provide additional exhaust nozzles when needed, but those additional exhaust nozzles can be removed when not needed. This allows the common head to support different types of combustion chamber modules.

[0020] The combustion chamber module can be an enhanced combustion module. The mounting element can be configured to receive at least one additional exhaust nozzle extending from the common head. The supply orifice can be positioned to bypass the location of each additional exhaust nozzle. Thus, the supply orifice is positioned away from any exhaust nozzle that may extend from the common head.

[0021] The mounting components of the enhanced combustion chamber module can be configured or arranged to receive multiple exhaust nozzles extending from a common head.

[0022] The mounting components for the enhanced combustion chamber module can be constructed or arranged to engage with multiple channels of a common head.

[0023] The combustion chamber module can be separate from the enhanced combustion chamber module. In this case, the peripheral seal can be positioned offset to avoid the location of at least one additional flow nozzle.

[0024] In addition to the enhanced combustion chamber module, the mounting components of the combustion chamber module can be configured or arranged to receive a single exhaust nozzle extending from a common head.

[0025] In addition to the enhanced combustion chamber module, the mounting components of the combustion chamber module can be configured to engage with a single passageway of the common head.

[0026] Each peripheral seal may follow a swaying or non-linear path to avoid at least one additional discharge flow nozzle.

[0027] The supply port can be positioned to avoid surrounding seals.

[0028] The supply hole can be positioned to follow a deviating path extending around the periphery of the mounting element.

[0029] The inlet assembly may include a common head having an inlet configured to supply a propellant discharge stream to the corridor.

[0030] The inlet assembly may include a common head to have multiple inlets configured to supply discharge flow to corresponding multiple channels.

[0031] The inlet component may include a combustion chamber module.

[0032] The inlet assembly may include a discharge flow nozzle.

[0033] The combustion chamber module may include a perforated sleeve that is configured or arranged to define the combustion chamber.

[0034] According to the second aspect, an emission reduction device including the inlet component of the first aspect is provided.

[0035] Emission reduction equipment may include the features of the inlet component described above.

[0036] According to a third aspect, a method is provided, the method comprising: providing a combustion chamber module and a mounting member, the combustion chamber module defining a gas chamber configured to supply a propellant to its combustion chamber, the mounting member being configured to engage with a common head, the common head having at least one channel configured to supply the propellant; and providing the mounting member with a plurality of supply holes positioned for fluid communication of the propellant between the channel and the gas chamber.

[0037] The method may include: surrounding the combustion chamber with a gas chamber and positioning the supply orifice above the gas chamber.

[0038] The method may include positioning the supply hole to extend around the periphery of the mounting element.

[0039] The method may include: providing a plurality of combustion chamber modules; configuring each mount to engage with a corresponding one of a plurality of channels in a common head; and positioning a plurality of supply holes in each mount for fluid communication of propellant between the channel and the corresponding gas chamber.

[0040] The method may include: configuring an mounting of at least one combustion chamber module to engage with a plurality of passages of a common head, and positioning a plurality of supply holes located on the mounting for fluid communication of propellant between those passages and their gas chambers.

[0041] The method may include: configuring each combustion chamber module to receive at least one exhaust nozzle extending from a common head, and positioning the supply orifice to avoid each exhaust nozzle.

[0042] The method may include: using a mounting member to define at least one discharge nozzle orifice, and positioning the at least one discharge nozzle orifice to receive a corresponding discharge nozzle.

[0043] The method may include: providing at least one discharge nozzle seal to the mounting component, and positioning the at least one discharge nozzle seal around each respective discharge nozzle.

[0044] The method may include: configuring each discharge nozzle seal to fluidly isolate the corresponding discharge nozzle from the propellant.

[0045] The method may include receiving a discharge flow nozzle seal in at least one corresponding discharge flow nozzle seal groove.

[0046] The method may include positioning the supply orifice to avoid each discharge flow nozzle seal.

[0047] The method may include: providing a peripheral seal to the mounting component, and configuring the peripheral seal to contain a propellant.

[0048] The method may include: configuring a common head to removably provide at least one additional exhaust flow nozzle extending from the common head for use in an enhanced flow combustion chamber module.

[0049] The method may include: providing a combustion chamber module as an enhanced combustion chamber module, configuring the mounting to receive at least one additional exhaust nozzle extending from a common head, and positioning the supply orifice to avoid each additional exhaust nozzle.

[0050] The method may include: configuring the mounting of the enhanced combustion chamber module to receive a plurality of exhaust flow nozzles extending from a common head.

[0051] The method may include: configuring the mounting of the enhanced combustion chamber module to engage with multiple channels of a common head.

[0052] The method may include: when the combustion chamber module is in addition to the enhanced combustion chamber module, dislocating the peripheral seal to avoid the position of at least one additional exhaust nozzle.

[0053] The method may include: configuring the mounting of a combustion chamber module, other than an enhanced combustion chamber module, to receive a single exhaust nozzle extending from a common head.

[0054] The method may include: configuring the mounting of the combustion chamber module, other than the enhanced combustion chamber module, to engage with a single passageway of the common head.

[0055] The method may include: making each peripheral seal follow a swing path to avoid at least one additional discharge flow nozzle.

[0056] The method may include positioning the supply port to avoid the surrounding seal.

[0057] The method may include positioning the supply hole to follow an off-path extending around the periphery of the mounting element.

[0058] The method may include providing a common head with an inlet configured to supply propellant to the corridor.

[0059] The method may include providing a common head with multiple inlets configured to supply propellant to corresponding multiple channels.

[0060] The method may include: providing a combustion chamber module.

[0061] The method may include: providing a discharge flow nozzle.

[0062] The method may include: providing a combustion chamber module including a perforated sleeve, the perforated sleeve being configured to define a combustion chamber.

[0063] Further specific and preferred aspects are set forth in the appended independent and dependent claims. Features of the dependent claims may be appropriately combined with features of the independent claims, and may be combined with combinations other than those expressly set forth in the claims.

[0064] When a device feature is described as operable to provide a function, it will be understood that this includes device features that provide that function or are adapted or constructed to provide that function. Attached Figure Description

[0065] Embodiments of the invention will now be described further with reference to the accompanying drawings, in which: Figure 1 AC is a cross-sectional perspective view of a component of a modular emission reduction device according to one embodiment; Figure 2 Components of an emission reduction device according to one embodiment are shown; Figure 3 A mounting component according to one embodiment is shown in more detail; Figure 4 Components of an emission reduction device according to one embodiment are shown; and Figure 5 The mounting components according to one embodiment are shown in more detail. Detailed Implementation

[0066] Before discussing the embodiments in more detail, an overview will first be provided. The embodiments provide an arrangement utilizing one or more common head configurations that can be used to support different types of combustion chamber modules. The common head is provided with at least one orifice through which an inlet nozzle extends to deliver one or more exhaust streams to the combustion chamber of the combustion chamber module. The common head at least partially defines one or more channels into which propellant is supplied. Each combustion chamber module is provided with a mounting member that engages the combustion chamber module to the common head. The mounting member is provided with at least one orifice through which an inlet nozzle passes to allow the exhaust streams to have full fluid communication into the combustion chamber of the combustion chamber module. The combustion chamber is generally defined by a perforated sleeve that defines a gas chamber between the perforated sleeve and the housing of the combustion chamber module for delivering propellant within the combustion chamber for ignition on the inner surface of the sleeve. The mounting member is provided with a supply orifice that supplies propellant from the channels into the gas chamber. These supply orifices are positioned on the mounting assembly in a location that is above the gas chamber but avoids the locations of other structures within the common head, such as inlet nozzles, observation glass, pilot supply components, and purge supply components. This allows combustion chamber modules and mounting assemblies with different configurations to be assembled with the common head, which helps reduce the inventory of components required for different configurations of emission reduction equipment.

[0067] Emission reduction equipment Figure 1 A is a perspective view of components of a modular emission reduction device 10 according to one embodiment. Figure 1 B is through Figure 1 The cross-sectional view of A provides a cross-sectional view of the pilot module 20. Figure 1 C is through Figure 1 Section A provides a cross-sectional view of the combustion chamber module 30.

[0068] A housing 40 is provided, which defines a common housing chamber in which the combustion chamber module 30 is disposed (also in...) Figure 1 (C is marked). A common head 150 is provided, which covers the upstream opening of the housing 40. The head 150 receives an exhaust inlet 60 for supplying an exhaust flow, a propellant inlet 70 for supplying a propellant (e.g., fuel), a pilot module inlet 110 for supplying fuel, and a purge inlet 160 for supplying inter-module purging gas (e.g., nitrogen). Downstream of the housing 40 is a weir 170 defining a wet-wall chamber 180, which has walls in operation over which fluids such as water flow. In this example, two combustion chamber modules 30 are arranged linearly within the housing 40; however, different configurations of the combustion chamber modules 30 sharing a common housing and a common head are also possible, as will be explained in more detail below.

[0069] A mounting member 50 is provided between the head 150 and the combustion chamber module 30, which holds the combustion chamber module 30 in the proper position within the housing 40. The depth of the mounting member 50 can be varied to accommodate combustion chamber modules 30 of different lengths, while still ensuring that each combustion chamber module 30 is discharged into the weir 170 at the same position.

[0070] Combustion chamber module 30 has a module housing 80, within which a perforated sleeve is fitted. This perforated sleeve defines a combustion chamber 120, within which the supplied exhaust stream is processed. Each combustion chamber module 30 is provided with an exhaust stream inlet 60 that delivers the exhaust stream to be processed into the combustion chamber of that combustion chamber module 30. The perforated sleeve is slightly spaced from the module housing 80 to define a gas chamber 100. A propellant inlet 70 delivers processing material (e.g., fuel) through mounting 50 and into the gas chamber 100 of the respective combustion chamber module 30. Therefore, each combustion chamber module 30 is essentially self-contained, and its operation has no effect on the other combustion chamber modules 30 within the housing 40. Figure 2Components of an emission reduction device 10A according to one embodiment are shown. A common head 150A is provided, defining orifices 760A and 770A, the dimensions of which are determined to receive inlet assemblies. In this example, orifice 760A receives inlet assembly 780A, while orifice 770A is unused, thus remaining unfilled or closed. The common head 150A defines a corridor 790A having an inlet (not shown) that receives a propellant, in this case, a fuel and an oxidizer.

[0071] A pair of mounting members 50A are provided, attached to the downstream surface of a common head 150A. Each mounting member 50A is provided with a supply port 810A extending through the mounting member 50A. A combustion chamber module 30A is attached to the downstream surface of each mounting member 50A. The combustion chamber module 30A has an aperture for receiving an inlet assembly 780A. The combustion chamber module 30A also accommodates a perforated sleeve 90A having an upstream top plate 200 and overhanging, diverging walls 180A, which define a combustion chamber 120A. The outer surface of the perforated sleeve 90A and the inner surface of the housing retaining combustion chamber module 30A define a gas chamber 100A. The supply port 810A is positioned above the gas chamber 100A.

[0072] Figure 3 Mounting member 50A is shown in more detail. Each mounting member 50A is provided with a seal 840A, which surrounds the inlet assembly 780A and cooperates with the common head 150A. Additionally, a peripheral seal 850A extends around the periphery of the mounting member 50A and also cooperates with the common head 150A. These seals 840A and 850A, cooperating with the common head 150A, retain the propellant within the region between the seals in the passageway 790A. Therefore, all supply holes 810A are located between these seals 840A and 850A, and each is supplied with propellant. The supply holes 810A are positioned approximately around the periphery of the mounting member 50A, above the upstream portion of the gas chamber 100A. However, to avoid the location of the hole 770A (which is unused in this case), both the supply holes 810A and the peripheral seals 850A are offset from the location of the hole 770A. In other words, the supply hole 810A and the peripheral seal 850A are positioned near the hole 770A along a swinging nonlinear path.

[0073] Figure 4 Components of an emission reduction device 10B according to one embodiment are shown. This arrangement is similar to that described above and has the same common head 150A. However, in this arrangement, an additional inlet assembly 780B is provided, received by a hole 770A, and a single mounting piece 50B is provided to hold a single combustion chamber module 30B.

[0074] Mounting member 50B is attached to the downstream surface of common head 150A. Mounting member 50B is provided with a supply port 810B extending through mounting member 50B. Combustion chamber module 30B is attached to the downstream surface of mounting member 50B. Combustion chamber module 30B has holes for receiving inlet assemblies 780A, 780B. Combustion chamber module 30B also accommodates a perforated sleeve 90B having an upstream top plate 200B and overhanging, diverging walls 180B, which define combustion chamber 120B. The outer surface of perforated sleeve 90B and the inner surface of housing retaining combustion chamber module 30B define gas chamber 100B. Supply port 810B is positioned above gas chamber 100B.

[0075] Figure 5 Mounting member 50B is shown in more detail. Mounting member 50B is provided with a seal 840A surrounding inlet assembly 780A and a seal 840B surrounding inlet assembly 780B and cooperating with common head 150A. Additionally, a peripheral seal 850B extends around the periphery of mounting member 50B and also cooperates with common head 150A. These seals 840A, 840B, and 850B cooperating with common head 150A retain propellant within the region between the seals in the passageway 790A. Therefore, all supply holes 810B are located between these seals 840A, 840B, and 850B, and each is supplied with propellant. Supply holes 810B are positioned generally around the periphery of mounting member 50B, above the upstream portion of gas chamber 100B. However, both supply holes 810B and peripheral seals 850B are offset from the possible locations of other holes. In other words, the supply hole 810B and the peripheral seal 850B are positioned near the possible locations of other holes along a swinging nonlinear path.

[0076] Therefore, it can be seen that combustion chamber modules with different constructions can be attached to the same common head using mounting hardware with different constructions without interfering with the supply of propellant to their (one or more) chambers.

[0077] Some embodiments provide a modular architecture for emissions reduction systems that allows standard burner elements to be nested to form arrays of different system configurations. This provides a coordinated design where the combination and arrangement of burner elements can form a leak-proof seal to a common head, thereby reducing inventory and allowing for upgrades / future inspections.

[0078] Existing methods require different heads for each combination and arrangement of modules because there is overlap between the purification area and the premix supply area between modules, and both coincide with the location of the auxiliary inlet on the double-width module. In contrast to existing methods, some embodiments provide a new geometry that avoids these problems, thereby allowing for a significant reduction in cost / complexity / design effort.

[0079] The ability to jog and reposition multiple fuel-air premix ports allows for versatility in seal placement. Specifically, in dual modules, the seal around the auxiliary inlet coincides with the joggle portion in the peripheral seal groove.

[0080] Although illustrative embodiments of the invention have been disclosed in detail herein with reference to the accompanying drawings, it should be understood that the invention is not limited to the exact embodiments, and that various changes and modifications can be made therein by those skilled in the art without departing from the scope of the invention as defined by the appended claims and their equivalents.

[0081] Figure Labels Emission reduction equipment 10; 10A; 10B Pilot Module 20 Combustion chamber module 30; 30A; 30B 40 housing Mounting parts 50; 50A; 50B Discharge inlet 60 Combustion inlet 70 Module housing 80 Perforated sleeves 90A and 90B Air chambers 100; 100A; 100B Pilot module entry 110 Combustion chamber 120; 120A; 120B Shared head 150; 150A Purification entrance 160 Weir 170 180 wetted wall chamber Wall 180A; 180B Top plate 200; 200B Hole 760A, 770A Entry components 780A; 780B Corridor 790A Supply port 810A; 810B Seals 840A; 840B Peripheral seals 850A; 850B.

Claims

1. An inlet assembly for an emission reduction device, the emission reduction device being used to treat an exhaust stream from a semiconductor processing tool, the inlet assembly comprising: A common head, wherein the common head defines multiple corridors configured to supply propellant; Multiple combustion chamber modules, each defining a gas chamber configured to supply propellant to its combustion chamber, each combustion chamber module having a mounting member configured to engage with a corresponding one of the multiple channels of a common head, each mounting member including multiple supply holes positioned for fluid communication of the propellant between the corresponding channel and the corresponding gas chamber.

2. The inlet component as claimed in claim 1, wherein, The gas chamber surrounds the combustion chamber, and the supply port is positioned above the gas chamber.

3. The inlet component as claimed in claim 1, wherein, The supply hole is positioned to extend around the periphery of the mounting element.

4. The inlet component as described in any one of claims 1 to 3, wherein, The mounting of at least one combustion chamber module is configured to engage with a plurality of channels of the common head, the mounting including a plurality of supply holes positioned for fluid communication of the propellant between those channels and its gas chamber.

5. The inlet component as described in any one of claims 1 to 3, wherein, Each combustion chamber module is configured to receive at least one exhaust nozzle extending from the common head, and the supply orifice is positioned to avoid the location of each exhaust nozzle.

6. The inlet component as described in any one of claims 1 to 3, wherein, The mounting element defines at least one discharge nozzle orifice, the at least one discharge nozzle orifice being positioned to receive a corresponding discharge nozzle.

7. The inlet component as described in any one of claims 1 to 3, wherein, The mounting element includes at least one discharge nozzle seal positioned around each corresponding discharge nozzle.

8. The inlet component as claimed in claim 7, wherein, The supply orifice is positioned to avoid each discharge nozzle seal.

9. The inlet component as described in any one of claims 1 to 3, wherein, The mounting component includes a peripheral seal configured to contain the propellant.

10. The inlet component as claimed in any one of claims 1 to 3, wherein, The common head can be configured to removably provide at least one additional exhaust nozzle extending from the common head for enhancing the combustion chamber module.

11. The inlet component as claimed in any one of claims 1 to 3, wherein, The combustion chamber module is an enhanced combustion chamber module, the mounting is configured to receive at least one additional exhaust nozzle extending from the common head, and the supply orifice is positioned to avoid the location of each additional exhaust nozzle.

12. The inlet component as claimed in any one of claims 1 to 3, wherein, The combustion chamber module includes a perforated sleeve configured to define the combustion chamber.

13. An emission reduction device comprising an inlet component as claimed in any one of claims 1 to 12.

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