A method for improving white spots on coating

Abstract

This application discloses a method for improving white spots on a coating, relating to the field of coating technology and applied to coating equipment. The coating equipment includes a vacuum chamber, a loading rack disposed in the vacuum chamber for moving the sample to be coated, and a magnetically filtered cathode vacuum arc source for coating the sample in the vacuum chamber. A fixed baffle is added to the cathode filter pipe, and the through holes in the baffle restrict the plasma movement area, concentrating the plasma movement area on the sample to be coated. Furthermore, the coating process parameters are adjusted so that the loading rack drives the loading disk to rotate around a horizontal axis at a preset rotation speed, and the entire assembly reciprocates around a vertical axis at a preset deflection angle. This increases the uniformity of the plasma on the surface of the sample to be coated, improves the uniformity of the coating layer, effectively solves the problem of white bright spots on the surface of the sample to be coated, improves the product qualification rate, and increases the competitiveness of the coated mold core product in the market.

Description

Technical Field

[0001] This application relates to the field of coating technology, and in particular to a method for improving white spots on coatings. Background Technology

[0002] The fabrication of glass lenses is divided into precision grinding and molding. Precision grinding requires the use of ultra-precision machining centers or aspherical grinding machines, followed by aspherical polishing. However, this method has the disadvantage of very low mass production capability and requires highly skilled technicians. For high mass production capability, molding is necessary. Currently, commonly used mold core materials include tungsten carbide and silicon carbide. Because tungsten carbide and silicon carbide are used for mold core materials, a protective film needs to be coated on the mold core surface to improve its lifespan.

[0003] However, in the current process of mold core coating, for large-diameter mold cores, the probability of white bright spots is significantly increased due to the larger coating area. For high-precision lenses, this will have a serious adverse effect on imaging, ultimately resulting in poor imaging effect. Summary of the Invention

[0004] In view of this, the purpose of this application is to provide a method for improving white spots on coatings, which eliminates the need for additional personnel to conduct on-site verification, reduces workload, improves efficiency, and achieves efficient intelligent supervision.

[0005] To achieve the above-mentioned technical objectives, this application provides a method for improving white spots in coating, applied to a coating equipment. The coating equipment includes a vacuum chamber, a loading rack disposed in the vacuum chamber for moving the sample to be coated, and a magnetically filtered cathode vacuum arc source for coating the sample to be coated in the vacuum chamber. The method includes the following steps:

[0006] A baffle is fixedly installed in the cathode filter pipe of the magnetic filter cathode vacuum arc source, wherein the baffle has a through hole in the middle.

[0007] Place the sample to be coated on the loading tray and then load it onto the loading rack;

[0008] Adjust the coating process parameters so that the loading frame drives the loading disk to rotate around the horizontal axis at a preset rotation speed, and the whole assembly reciprocates around the vertical axis at a preset deflection angle;

[0009] The magnetic filter cathode vacuum arc source is activated to coat the sample to be coated.

[0010] Furthermore, the side of the baffle facing the inside of the cathode filter pipe is provided with several annular grooves around the outer ring of the through hole;

[0011] The baffle, facing the inside of the cathode filter pipe, has several annular protrusions on the outer ring of the through hole.

[0012] Furthermore, the annular grooves are multiple and arranged in a concentric, uniform circular array;

[0013] The annular protrusions are multiple and arranged in a concentric circular array.

[0014] Furthermore, the diameter of the through hole is 20mm to 200mm.

[0015] Furthermore, the diameter of the through hole is 100 mm.

[0016] Furthermore, the preset rotation speed is 15 r / min to 25 r / min.

[0017] Furthermore, the preset deflection angle is the angle between the loading disc and the baffle.

[0018] Furthermore, the included angle is -30° to +30°.

[0019] Furthermore, the baffle is provided with mounting holes.

[0020] Furthermore, there are multiple mounting holes distributed around the outer circumference of the through hole.

[0021] As can be seen from the above technical solutions, the coating white spot improvement method designed in this application adds a fixed baffle in the cathode filter pipe and uses the through holes in the baffle to limit the plasma movement area, so that the plasma movement area is concentrated on the sample to be coated; and adjusts the coating process parameters so that the loading frame drives the loading disk to rotate around the horizontal axis at a preset rotation speed, and the whole rotates back and forth around the vertical axis at a preset deflection angle, which increases the uniformity of the plasma on the surface of the sample to be coated, improves the uniformity of the coating layer, effectively solves the problem of white bright spots on the surface of the sample to be coated, improves the product qualification rate, increases the competitiveness of the coated mold core product in the market, and lays the groundwork for high-efficiency precision molded lenses. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 A flowchart of a method for improving white spots in a coating provided in this application;

[0024] Figure 2 This is a top view of a method for improving white spots in a coating provided in this application;

[0025] Figure 3 This is a cross-sectional view of a method for improving white spots in a coating provided in this application;

[0026] Figure 4 This is a partial working principle diagram of the coating equipment that applies a method for improving white spots in coatings, as provided in this application.

[0027] In the diagram: 1. Baffle; 11. Through hole; 12. Annular groove; 13. Annular protrusion; 14. Mounting hole; 2. Plasma; 3. Loading rack; 4. Loading tray. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the embodiments of this application.

[0029] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application based on the specific circumstances.

[0031] This application discloses a method for improving white spots on coatings.

[0032] Please see Figures 1 to 4This invention relates to an existing coating equipment based on FCVA technology. The coating equipment includes a vacuum chamber, a loading rack disposed within the vacuum chamber for moving the sample to be coated, and a magnetically filtered cathode vacuum arc source for coating the sample in the vacuum chamber. The invention comprises the following steps:

[0033] S1, a baffle is fixedly installed in the cathode filter pipe of the magnetic filter cathode vacuum arc source, wherein the baffle has a through hole in the middle. Specifically, the baffle 1 is generally in the form of a ring plate structure, and the through hole 11 in the baffle 1 is used to restrict the movement area of ​​plasma 2, so that the movement area of ​​plasma 2 is concentrated on the sample to be coated.

[0034] S2, Place the sample to be coated on the loading tray and mount it on the loading rack.

[0035] S3, adjust the coating process parameters so that the loading frame drives the loading disk to rotate around the horizontal axis at a preset rotation speed, and the whole assembly reciprocates around the vertical axis at a preset deflection angle. Specifically, this increases the uniformity of the plasma 2 on the surface of the sample to be coated. Regarding the design of the loading frame 3, it has a first drive mechanism and a second drive mechanism. The first drive mechanism drives the loading disk 4 to rotate around the horizontal axis, and the second drive mechanism is connected to the first drive mechanism and drives the loading disk 4 to reciprocate around the vertical axis by moving the first drive mechanism.

[0036] S4. Start the magnetically filtered cathode vacuum arc source to coat the sample. Specifically, the other preparations required for coating are the same as those for existing coating methods, so they will not be described in detail.

[0037] The above design method improves the uniformity of the coating layer, effectively solves the problem of white bright spots on the surface of the sample to be coated, improves the product qualification rate, increases the competitiveness of the coated mold core product in the market, and lays the groundwork for high-efficiency precision molded lenses.

[0038] The above is Embodiment 1 of a method for improving white spots in a coating provided by this application. The following is Embodiment 2 of a method for improving white spots in a coating provided by this application. Please refer to the following for details. Figures 2 to 4 .

[0039] Based on the above implementation plan:

[0040] Furthermore, the side of the baffle 1 facing the inside of the cathode filter pipe has several annular grooves 12 around the outer ring of the through hole 11, and the other side of the baffle 1 facing the inside of the cathode filter pipe has several annular protrusions 13 around the outer ring of the through hole 11. This design can increase the surface roughness of the baffle 1, which is conducive to the deposition of excess plasma 2 in the pipe and is less likely to fall off and cause contamination in the vacuum chamber.

[0041] Furthermore, the annular groove 12 is preferably designed as a plurality of concentric uniform circular arrays, and correspondingly, the annular protrusion 13 is also preferably designed as a plurality of concentric uniform circular arrays.

[0042] Furthermore, the diameter of the through hole 11 can be from 20mm to 200mm, preferably 100mm. The specific diameter of the through hole 11 can be designed to vary depending on the area to be coated on the sample, and is not limited thereto. The size and shape of the baffle 1 itself can be designed to vary depending on the shape and size of the cathode filter pipe, and is not limited thereto.

[0043] Furthermore, the preset rotation speed is preferably 15 r / min to 25 r / min.

[0044] Furthermore, the preset deflection angle is the angle between the loading disk 4 and the baffle 1.

[0045] Furthermore, the included angle is -30° to +30°, that is, the preset deflection angle range is 60°. When the loading plate 4 is in the state of parallel baffle 1, the deflection angle is 0°.

[0046] Furthermore, in order to facilitate the installation of the baffle 1, mounting holes 14 are provided on the baffle 1.

[0047] Furthermore, to improve installation reliability, the mounting holes 14 are designed to be multiple and evenly distributed around the outer circumference of the through hole 11.

[0048] The above provides a detailed description of a method for improving white spots on a coating provided in this application. For those skilled in the art, based on the ideas of the embodiments of this application, there will be changes in the specific implementation methods and application scope. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. A method for improving white spots on a coating, characterized in that, The coating equipment includes a vacuum chamber, a loading rack (3) disposed in the vacuum chamber and used to move the sample to be coated, and a magnetically filtered cathode vacuum arc source for coating the sample to be coated in the vacuum chamber, comprising the following steps: A baffle (1) is fixedly installed in the cathode filter pipe of the magnetic filter cathode vacuum arc source. The baffle (1) has a through hole (11) in the middle to limit the plasma movement area so that the plasma movement area is concentrated on the sample to be coated. The side of the baffle (1) facing the inside of the cathode filter pipe is provided with several annular grooves (12) on the outer ring of the through hole (11). The other side of the baffle (1) facing the inside of the cathode filter pipe is provided with several annular protrusions (13) on the outer ring of the through hole (11). Place the sample to be coated on the loading tray (4) and mount it on the loading rack (3); Adjust the coating process parameters so that the loading rack (3) drives the loading disk (4) to rotate around the horizontal axis at a preset rotation speed, and the whole rotates back and forth around the vertical axis at a preset deflection angle; The magnetic filter cathode vacuum arc source is activated to coat the sample to be coated; The preset deflection angle is the angle between the loading disk (4) and the baffle (1).

2. The method for improving white spots in a coating according to claim 1, characterized in that, The annular grooves (12) are multiple and arranged in a concentric uniform circular array; The annular protrusions (13) are multiple and arranged in a concentric uniform circular array.

3. The method for improving white spots in a coating according to claim 1, characterized in that, The diameter of the through hole (11) is 20mm~200mm.

4. The method for improving white spots in a coating according to claim 3, characterized in that, The diameter of the through hole (11) is 100 mm.

5. The method for improving white spots in a coating according to claim 1, characterized in that, The preset rotation speed is 15 r / min to 25 r / min.

6. The method for improving white spots in a coating according to claim 5, characterized in that, The included angle is -30° to +30°.

7. The method for improving white spots in a coating according to claim 1, characterized in that, The baffle (1) is provided with mounting holes (14).

8. The method for improving white spots in a coating according to claim 7, characterized in that, There are multiple mounting holes (14), which are distributed around the outer circumference of the through hole (11).

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