A smart cryogenic pump

Abstract

This invention relates to the field of cryogenic pumps, and more particularly to an intelligent cryogenic pump. The technical problem to be solved is that during the regeneration process of a cryogenic pump, a large amount of moisture is generated, which affects the coating inside the shielding cylinder, causing the coating to peel off, resulting in surface contamination of the cooling umbrella, reducing the cooling speed and efficiency of the cryogenic pump. During the reduction process, the gas adsorbed inside the shielding cylinder and the gas adsorbed on the cooling umbrella condense at different temperatures at the same time, resulting in the ice crystals vaporizing at the same time not being of the same atoms, affecting the cryogenic pump's ability to filter atoms within the gas. The technical solution of this invention is: an intelligent cryogenic pump, including a compressor and a transmission pipe, etc.; a transmission pipe is disposed above the compressor. This invention achieves the interception of peeled coating through a filter, preventing the coating from adsorbing onto the surface of the cooling umbrella, causing surface contamination, reducing the reflectivity of the cooling umbrella, and causing the temperature inside the shielding cylinder to rise.

Description

Technical Field

[0001] This invention relates to the field of cryogenic pumps, and more particularly to an intelligent cryogenic pump. Background Technology

[0002] A cryogenic pump is a vacuum pump that uses condensation or adsorption to capture gas molecules on a cryogenic plate cooled to an ultra-low temperature for exhaust. The regeneration and maintenance of existing devices are usually carried out by heating, using an electric heater to heat the cryogenic pump back to temperature. Electric heating regeneration provides the fastest and most complete regeneration for the pump's cryogenic array. During the regeneration process of the cryogenic pump, a large amount of moisture is generated, which affects the coating inside the shielding cylinder, causing the coating to peel off and fall onto the surface of the cooling umbrella, causing surface contamination, reducing the cooling umbrella's heat reflection effect, causing the temperature inside the shielding cylinder to rise, and reducing the cooling speed and cooling efficiency of the cryogenic pump.

[0003] Meanwhile, during the gas condensation process inside the cryogenic pump, some of the gas condenses and freezes, adsorbing onto the inside of the shielding cylinder instead of onto the cooling umbrella. During the gas reduction process, the gas adsorbed on the inside of the shielding cylinder and the gas adsorbed on the cooling umbrella receive different temperatures of heat at the same time, resulting in different vaporization times. This means that the ice that vaporizes at the same time is not the same atom, affecting the cryogenic pump's ability to filter atoms within the gas. Summary of the Invention

[0004] To overcome the drawbacks of the cryogenic pump regeneration process, which generates a large amount of moisture, affecting the coating inside the shielding cylinder, causing coating peeling, contaminating the surface of the cooling umbrella, increasing the temperature inside the shielding cylinder, and reducing the cooling speed and efficiency of the cryogenic pump, and the fact that during gas reduction, the gas adsorbed on the inside of the shielding cylinder and the gas adsorbed on the cooling umbrella receive different temperatures of heat at the same time, resulting in the ice crystals vaporizing at the same time not being of the same atoms, thus affecting the cryogenic pump's ability to filter atoms within the gas, this invention provides an intelligent cryogenic pump.

[0005] The technical solution of the present invention is as follows: an intelligent cryogenic pump, comprising a compressor, a transmission pipe, a housing, a top cover, and a shielding cylinder; a transmission pipe is disposed above the compressor; a housing is disposed above the transmission pipe; a top cover is disposed above the housing; a shielding cylinder is disposed below the top cover, and the shielding cylinder is located inside the housing; a plurality of cooling umbrellas are disposed inside the shielding cylinder; an air inlet pipe is connected to the top of the top cover via a high vacuum flange; the pump also includes a filter screen, a shaking assembly, and a cleaning system; a filter screen is disposed on the housing to isolate the coating peeling off on the inner wall of the shielding cylinder, and the filter screen is located inside the shielding cylinder; a shaking assembly is disposed on the housing to prevent the filter screen from clogging, and the shaking assembly is located inside the filter screen; a cleaning system is disposed on the shielding cylinder to clean the frost on the inner wall of the shielding cylinder.

[0006] As a preferred embodiment of the present invention, the shaking component includes an airbag; an airbag is installed on the housing to expand and squeeze the filter screen to make it shake, the airbag is located inside the filter screen, and a fan is connected to the airbag through a hose.

[0007] As a preferred embodiment of the present invention, the shaking component further includes a first baffle; a first baffle for limiting the airbag inflation direction is fixedly connected to the lower side of the top cover, and the first baffle is located inside the airbag.

[0008] As a preferred embodiment of the present invention, the cleaning system includes a scraper; a scraper for cleaning frost on the inner wall of the shielding cylinder is slidably connected to the inner side of the shielding cylinder.

[0009] As a preferred embodiment of the present invention, the vertical cross-section of the scraper is in the shape of an inverted frustum.

[0010] As a preferred embodiment of the present invention, the inner side of the scraper is provided with a plurality of bristles for cleaning the filter screen.

[0011] As a preferred embodiment of the present invention, the cleaning system further includes a second baffle; a second baffle for intercepting gas is fixedly connected to the inner side of the housing.

[0012] As a preferred technical solution of the present invention, without using the above-mentioned second baffle to be fixedly connected to the housing, the second baffle is slidably connected to the inner side of the housing.

[0013] As a preferred embodiment of the present invention, it further includes a thermometer; a thermometer for detecting whether the temperature has risen is fixedly attached to the lower side of the housing.

[0014] As a preferred embodiment of the present invention, the connection between the housing and the top cover is configured as a threaded structure.

[0015] The present invention has the following advantages: The present invention achieves the interception of the detached coating through the filter screen, preventing the coating from adsorbing on the surface of the cooling umbrella, causing surface contamination of the cooling umbrella, reducing the cooling umbrella's heat reflection effect, and causing the temperature inside the shielding cylinder to rise.

[0016] The airbag expands and squeezes the filter screen repeatedly, causing the filter screen to shake and clear the air, preventing the coating from getting stuck in the holes of the filter screen and causing the filter screen to become clogged, thus ensuring the gas flow efficiency inside the shielding cylinder.

[0017] By forming a sealed space between the scraper and the shell, the atomic ice at the frosting point is isolated from the same atomic ice inside the shielding cylinder, preventing the gas formed after the atomic ice at the frosting point vaporizes from mixing with the gas formed after the different atoms in the shielding cylinder vaporize, thus ensuring the screening effect of the cryogenic pump on the atoms in the air.

[0018] The second baffle intercepts the gas generated after the frost vaporizes in the sealed space between the scraper and the shell, preventing the gas from entering the inside of the shielding tube and mixing with the gas generated after the atoms inside the shielding tube freeze and vaporize, thus ensuring the screening effect of the cryogenic pump on the atoms in the air.

[0019] The temperature inside the housing is monitored and an alarm is triggered by a thermometer, prompting staff to check whether the integrity of the coating on the inner wall of the shielding cylinder meets the standard. If the coating integrity does not meet the standard, a new shielding cylinder is replaced in time, ensuring the working stability of the cryogenic pump. Attached Figure Description

[0020] Figure 1 This is a three-dimensional structural diagram of the intelligent cryogenic pump of the present invention.

[0021] Figure 2 This is a cross-sectional view of the housing and shielding cylinder assembly of the present invention.

[0022] Figure 3 This is a schematic diagram of the three-dimensional structure of the airbag of the present invention.

[0023] Figure 4 For the present invention Figure 3 Enlarged view of area A in the middle.

[0024] Figure 5 This is a three-dimensional structural diagram of the cleaning system of the present invention.

[0025] Figure 6 For the present invention Figure 5 Enlarged view of area B in the middle.

[0026] Figure 7 This is a three-dimensional structural diagram of the thermometer of the present invention.

[0027] Wherein: 1-compressor, 2-transmission pipe, 3-shell, 4-top cover, 5-shielding cylinder, 5001-cooling umbrella, 6-filter screen, 101-airbag, 102-first baffle, 201-scraper, 20101-brush bristles, 202-second baffle, 203-driving component, 204-pull rope, 301-thermometer. Implementation

[0028] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but this is not intended to limit the present invention. Example

[0029] like Figures 1-4As shown, an intelligent cryogenic pump includes a compressor 1, a transmission pipe 2, a housing 3, a top cover 4, and a shielding cylinder 5; the transmission pipe 2 is disposed above the compressor 1; the housing 3 is disposed above the transmission pipe 2; the top cover 4 is disposed above the housing 3; the shielding cylinder 5 is disposed below the top cover 4 and is located inside the housing 3; a plurality of cooling umbrellas 5001 are disposed inside the shielding cylinder 5; an air inlet pipe is connected to the top of the top cover 4 through a high vacuum flange;

[0030] It also includes a filter screen 6, a shaking component, and a cleaning system. The filter screen 6 is installed on the housing 3, located inside the shielding cylinder 5. When the coating adsorbed on the inner wall surface of the shielding cylinder 5 falls off, the filter screen 6 intercepts the coating, preventing it from adsorbing onto the surface of the cooling umbrella 5001, causing surface contamination of the cooling umbrella 5001, reducing the heat reflection effect of the cooling umbrella 5001, and causing the temperature inside the shielding cylinder 5 to rise. The shaking component is installed on the housing 3, located inside the filter screen 6. During the operation of the cryogenic pump, the shaking component causes the filter screen 6 to shake, thereby clearing the filter screen 6 and preventing the coating from getting stuck in the holes of the filter screen 6, causing blockage and ensuring the gas flow efficiency inside the shielding cylinder 5. The shielding cylinder 5 is equipped with a cleaning system. When the inside of the shielding cylinder 5 begins to heat up, the cleaning system cleans the frost on the inner wall of the shielding cylinder 5, preventing the melting rate of atomic ice at that location from being inconsistent with the melting rate of the same atomic ice inside the shielding cylinder 5, ensuring the screening effect of the cryogenic pump on atoms in the air.

[0031] The shaking component includes an airbag 101; the airbag 101 is installed on the housing 3 and is located inside the filter screen 6. The airbag 101 is connected to a fan through a hose; during the operation of the cryogenic pump, the fan circulates air into and evacuates air into the airbag 101, causing the airbag 101 to expand and compress the filter screen 6, thereby causing the filter screen 6 to shake, thus clearing the filter screen 6, preventing the coating from getting stuck in the holes on the filter screen 6, which would cause the filter screen 6 to become clogged, and ensuring the gas flow efficiency inside the shielding cylinder 5.

[0032] The shaking assembly also includes a first baffle 102; the first baffle 102 is fixedly connected to the lower side of the top cover 4, and the first baffle 102 is located inside the airbag 101; during the process of the fan venting air into the airbag 101, the first baffle 102 restricts the expansion direction of the airbag 101, further ensuring the shaking effect of the filter 6. Example

[0033] Based on Example 1, such as Figure 5 and Figure 6As shown, the cleaning system includes a scraper 201; the scraper 201 is slidably connected to the inner side of the shielding cylinder 5; when the inner side of the shielding cylinder 5 starts to heat up, the downward-moving scraper 201 scrapes the frost on the inner wall of the shielding cylinder 5, causing the frost to flow downward along the inner wall of the shielding cylinder 5. When the scraper 201 moves to the same horizontal plane as the bottom of the filter screen 6, a sealed space is formed between the scraper 201 and the housing 3. Since the temperature of the atomic ice at the frost point is different from that of the atomic ice inside the shielding cylinder 5, the sealed space formed between the scraper 201 and the housing 3 isolates the atomic ice at the frost point from the atomic ice inside the shielding cylinder 5, preventing the atomic ice at the frost point from vaporizing and mixing with the gas formed after the different atoms inside the shielding cylinder 5 vaporize, thus ensuring the screening effect of the cryogenic pump on the atoms in the air.

[0034] The vertical cross-section of the scraper 201 is in the shape of an inverted frustum. As the scraper 201 moves downward, the lower surface of the scraper 201, which has an inverted frustum-shaped vertical cross-section, guides the frost on the inner wall of the shielding cylinder 5, thereby enhancing the cleaning effect of the frost on the inner wall of the shielding cylinder 5 and further ensuring the screening effect of the cryogenic pump on the atoms in the air.

[0035] The scraper 201 has several bristles 20101 on its inner side; as the scraper 201 moves downward, the bristles 20101 clean the surface of the filter screen 6, enhance the unblocking effect on the holes in the filter screen 6, and further ensure the gas flow efficiency inside the shielding cylinder 5.

[0036] The cleaning system also includes a second baffle 202; the second baffle 202 is fixedly connected to the inside of the housing 3; during the heating process inside the shielding cylinder 5, the second baffle 202 intercepts the gas generated after the frost vaporization in the sealed space formed between the scraper 201 and the housing 3, preventing the gas from entering the inside of the shielding cylinder 5 and mixing with the gas generated after the atoms inside the shielding cylinder 5 freeze and vaporize, resulting in impure gas, thus ensuring the screening effect of the cryogenic pump on the atoms in the air. Example

[0037] Based on Examples 1-2, such as Figure 5 and Figure 6 As shown, without using the second baffle 202 fixed to the housing 3 in the above embodiment 2, the second baffle 202 is slidably connected to the inner side of the housing 3; during the gas exchange process in the shielding cylinder 5, the gas generated after the frost vaporization in the sealed space formed between the scraper 201 and the housing 3 moves downward by the downward moving second baffle 202, while the scraper 201 moves upward, so that the inner side of the housing 3 is connected to the inner side of the shielding cylinder 5, thereby allowing the gas generated after the frost vaporization to be introduced into the inner side of the shielding cylinder 5 and mixed with the newly introduced air into the inner side of the shielding cylinder 5, thereby achieving re-screening of the gas generated after the frost vaporization, further ensuring the screening effect of the cryogenic pump on the atoms in the air.

[0038] It also includes a drive unit 203 and a pull rope 204; several drive units 203 are installed on the upper side of the top cover 4, and the drive unit 203 is a motor; each drive unit 203 has a pull rope 204 rotatably connected to its output end; one end of the pull rope 204 is fixedly connected to the scraper 201, and the other end is fixedly connected to the second baffle 202; during the operation of the cryogenic pump, the pull rope 204 is rotated by the forward and reverse rotation of the drive unit 203, which in turn drives the scraper 201 and the second baffle 202 to rise and fall. Example

[0039] Based on Example 3, such as Figure 7 As shown, it also includes a thermometer 301; the thermometer 301 is fixedly connected to the lower side of the housing 3; during the operation of the cryogenic pump, the temperature inside the housing 3 is monitored by the thermometer 301. When the temperature inside the housing 3 rises abnormally, the thermometer 301 issues an alarm message, prompting the staff to check whether the integrity of the coating on the inner wall of the shielding cylinder 5 meets the standard. If the integrity of the coating does not meet the standard, a new shielding cylinder 5 is replaced in time to ensure the working stability of the cryogenic pump.

[0040] The connection between the housing 3 and the top cover 4 is set with a threaded structure; during the replacement of the shielding cylinder 5, the threaded structure at the connection between the housing 3 and the top cover 4 enables quick disassembly and assembly of the shielding cylinder 5.

[0041] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention.

Claims

1. A smart cryogenic pump, comprising a compressor (1), a transmission pipe (2), a housing (3), a top cover (4), and a shielding cylinder (5); the transmission pipe (2) is disposed above the compressor (1); the housing (3) is disposed above the transmission pipe (2); the top cover (4) is disposed above the housing (3); the shielding cylinder (5) is disposed below the top cover (4), and the shielding cylinder (5) is located inside the housing (3); a plurality of cooling umbrellas (5001) are disposed inside the shielding cylinder (5); an air inlet pipe is connected to the top of the top cover (4) via a high vacuum flange; characterized in that: It also includes a filter screen (6), a shaking assembly and a cleaning system; the housing (3) is provided with a filter screen (6) for isolating the coating peeling off on the inner wall of the shielding cylinder (5), and the filter screen (6) is located inside the shielding cylinder (5); the housing (3) is provided with a shaking assembly for preventing the filter screen (6) from clogging, and the shaking assembly is located inside the filter screen (6); the shielding cylinder (5) is provided with a cleaning system for cleaning the frost on the inner wall of the shielding cylinder (5); The shaking assembly includes an airbag (101); an airbag (101) is installed on the housing (3) to expand and squeeze the filter screen (6) to make it shake. The airbag (101) is located inside the filter screen (6), and a fan is connected to the airbag (101) through a hose. The cleaning system includes a scraper (201); the inner side of the shielding cylinder (5) is slidably connected to a scraper (201) for cleaning the frost on the inner wall of the shielding cylinder (5); The cleaning system also includes a second baffle (202); the second baffle (202) for intercepting gas is fixedly connected to the inside of the housing (3); or, without using the second baffle (202) fixedly connected to the housing (3), the second baffle (202) is slidably connected to the inside of the housing (3).

2. The intelligent cryogenic pump according to claim 1, characterized in that: The shaking assembly also includes a first baffle (102); a first baffle (102) for limiting the inflation direction of the airbag (101) is fixedly attached to the lower side of the top cover (4), and the first baffle (102) is located inside the airbag (101).

3. The intelligent cryogenic pump according to claim 1, characterized in that: The vertical cross section of the scraper (201) is shaped like an inverted frustum.

4. The intelligent cryogenic pump according to claim 3, characterized in that: The scraper (201) has several bristles (20101) on its inner side for cleaning the filter screen (6).

5. The intelligent cryogenic pump according to claim 1, characterized in that: It also includes a thermometer (301); a thermometer (301) for detecting whether the temperature has risen is fixed to the lower side of the housing (3).

6. The intelligent cryogenic pump according to claim 5, characterized in that: The connection between the housing (3) and the top cover (4) is set as a threaded structure.

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