A method and apparatus for testing the output force of a micro actuator

Abstract

This invention discloses a method and apparatus for testing the output force of a micro-actuator. The method includes: assembling the apparatus; fixing the measurement position of the micro-displacement actuator and the testing mechanism of the apparatus; adjusting and fixing the test position; testing the output force under static current conditions; testing the output force under dynamic current conditions; and repeating the test at different test positions. Tests are performed at various points on the moving part of the micro-displacement actuator's output end to obtain curves showing the relationship between the position of the moving part and the magnitude of the output force, the relationship between the input current and the magnitude of the output force at each point, and the range of locations where output force exists. This comprehensive testing of the output force of the moving part of the micro-displacement actuator makes the test results more accurate and the obtained data more convincing. It also simplifies the operation steps, shortens the time required for detection and analysis, and improves detection efficiency.

Description

Technical Field

[0001] This invention belongs to the field of testing equipment technology, and more specifically, relates to a method and apparatus for testing the output force of a micro actuator. Background Technology

[0002] In micro-displacement motion control, the force output of the actuator in the direction of motion affects its response performance. For the same controlled object, the greater the force output, the better the system's response speed; the higher the force output accuracy, the higher the system's stability and controllability; and the higher the force output bandwidth, the higher the upper limit of the system's motion bandwidth in motion control. Therefore, the system's force output directly determines the upper limit of motion control performance, making the testing of the force output of micro-displacement actuators essential.

[0003] Currently, there is no dedicated equipment on the market for measuring the output force of micro-displacement actuators. Most methods use a simple fixed force sensor method, fixing the force sensor at the output position of the micro-displacement actuator and performing a simple test on its output force. By providing a static current signal to the actuator, the magnitude of the output force is continuously measured. This allows for continuous testing of the output force of the micro-displacement actuator and obtaining a linear curve between the output force and the current.

[0004] However, this fixed measurement method can only continuously measure a single point and relies solely on experience to determine the location of the maximum output force of the micro-displacement actuator. It cannot accurately determine the actuator's maximum output force or measure its range, leading to misjudgments of the system's response speed. Furthermore, it cannot test the output bandwidth, resulting in missing motion bandwidth data and failing to meet the testing requirements for actuator motion control performance. Therefore, there is an urgent need to design a method and device for testing the output force of micro-displacement actuators, enabling convenient and stable testing of the output force of micro-displacement actuators at different positions, and providing a comprehensive test of the actuator's motion control performance. Summary of the Invention

[0005] To address the aforementioned deficiencies or improvement needs of existing technologies, this invention provides a method and apparatus for testing the output force of a micro-displacement actuator. The method tests various points on the moving part of the micro-displacement actuator's output terminal, obtaining curves showing the relationship between the position of the moving part and the magnitude of the output force, the relationship between the input current and the output force at each point, and the range of locations where output force exists. This comprehensive testing of the output force at the moving part of the micro-displacement actuator makes the test results more accurate and the data more convincing. Furthermore, it simplifies the operation steps, shortens the time required for detection and analysis, and improves detection efficiency.

[0006] According to a first aspect of the present invention, a method for testing the output force of a micro actuator is provided, comprising the following steps:

[0007] S0100. After moving the device to the designated location, assemble it.

[0008] S0200. Fix the micro-displacement actuator to be tested onto the force measuring fixture base, and connect the moving part of the micro-displacement actuator to the micro-displacement actuator connector with screws.

[0009] S0300. Based on the motion stroke of the micro-displacement actuator and the testing requirements, determine the testing range and testing interval, adjust the moving part to the axial critical coordinate position of the lead screw, and fix several positioning nuts.

[0010] S0400. Check that all components are securely connected. Give the micro-displacement actuator a static current signal and gradually increase the current intensity. Measure that the output force at the critical coordinate position increases linearly with the increase of current.

[0011] S0500: Using the first positioning nut and the second positioning nut, adjust the position of the moving part of the micro-displacement actuator to the middle of the test range by a test interval. Following the method in step S0400, it is found that the output force at this position increases linearly with the increase of current.

[0012] S0600, Repeat steps S0400-S0500 to test the output of multiple test points within the test range. After all tests are completed, output the test results and compare and analyze the test results.

[0013] Furthermore, step S0100 specifically includes the following steps:

[0014] S0101. Place the force measuring fixture fixing base in the measuring position and stabilize it. Install the force measuring fixture side plate in the side groove and fix it with screws to assemble it into a fixing mechanism.

[0015] S0102. Connect the micro-displacement actuator connector to the force sensor connector and fix it to one end of the force sensor with fastening screws to assemble a test mechanism.

[0016] S0103. Install the screw fixing flange on one end of the screw and lock it with the third positioning bolt. Fix the force sensor connecting flange to the other end of the force sensor with screws, and then fix it to the screw fixing flange with bolts.

[0017] S0104. After the other end of the lead screw is fitted with a washer, a spring washer and a second positioning nut, it passes through the mounting hole on the side plate of the force measuring fixture, and then another washer and spring washer are fitted on it and the first positioning nut is used to fix it.

[0018] Furthermore, the test range and test spacing mentioned in steps S0300 and S0400 need to be determined based on the motion stroke of the micro-displacement actuator under test and the test requirements.

[0019] Further, after step S0400 is completed, the input current is changed to a sine or cosine current, and the relationship between the dynamic response force at that point and the amplitude and frequency of the sine or cosine current signal is measured.

[0020] According to a second aspect of the present invention, a micro actuator output force testing device is provided, comprising:

[0021] A fixing mechanism that provides fixed support for the device, the fixing mechanism including a force measuring fixture fixing base located at the bottom of the device and a force measuring fixture side plate located on the fixing base;

[0022] An adjustment mechanism is provided on the side plate of the force measuring fixture. The adjustment mechanism includes a lead screw that passes through the side plate of the force measuring fixture, a first positioning nut provided on one side of the side plate of the force measuring fixture, and a second positioning nut provided on the other side of the side plate of the force measuring fixture.

[0023] A connecting mechanism is provided at one end of the lead screw, the connecting mechanism including a flange provided at one end of the lead screw and a third positioning bolt provided on the side of the flange;

[0024] And a testing mechanism located on the side of the flange, the testing mechanism including a force sensor to accurately measure the output force of the micro-displacement actuator.

[0025] Furthermore, the adjustment mechanism also includes a washer disposed between the first positioning nut and the side plate of the force measuring fixture;

[0026] And a spring washer located between the first positioning nut and the washer.

[0027] Furthermore, the gasket and the spring washer are also disposed between the second positioning nut and the side plate of the force measuring fixture.

[0028] Furthermore, the flange includes a screw fixing flange disposed at one end of the screw and a force sensor connecting flange disposed on the screw fixing flange.

[0029] Furthermore, the testing mechanism also includes a force sensor connector disposed on the side of the force sensor;

[0030] Micro-displacement actuator connector located on the side of the force sensor connector;

[0031] And fastening screws for connecting the force sensor connector to the force sensor.

[0032] Furthermore, the micro-displacement actuator connector is connected to the output end moving part of the micro-displacement actuator.

[0033] In summary, compared with the prior art, the above-described technical solutions conceived by this invention can achieve the following beneficial effects:

[0034] 1. This invention provides a method and apparatus for testing the output force of a micro-actuator. The method tests various points on the moving part of the output terminal of the micro-displacement actuator to obtain curves showing the relationship between the position of the moving part and the magnitude of the output force, the relationship between the input current and the magnitude of the output force at each point, and the range of locations where output force exists. This comprehensive testing of the output force at the moving part of the micro-displacement actuator makes the test results more accurate and the obtained data more convincing. Furthermore, it simplifies the operation steps, shortens the time required for detection and analysis, and improves detection efficiency.

[0035] 2. The present invention provides a method and apparatus for testing the output force of a micro-actuator. In addition to inputting static current, the micro-displacement actuator can also input sinusoidal or cosine dynamic current. The method measures the relationship between the dynamic response force and the amplitude and frequency of the sinusoidal or cosine current signal, providing more effective reference values ​​for the testing of the micro-displacement actuator and making the test analysis results more accurate.

[0036] 3. The present invention provides a method and apparatus for testing the output force of a micro-actuator. By adjusting the position of the moving part at the output end of the micro-displacement actuator and the force sensor along the lead screw axis through an adjustment mechanism, the output force of the micro-displacement actuator at different positions can be tested, thereby measuring the effective bandwidth of the output force of the micro-displacement actuator.

[0037] 4. The micro-actuator output force testing device of the present invention can eliminate all structures of the adjustment mechanism except for the lead screw and replace it with an adjustment cylinder, which is fixed on the side plate of the force measuring fixture. By controlling the extension and retraction of the piston of the adjustment cylinder, the position of the testing mechanism and the moving part of the micro-displacement actuator connected thereto can be controlled. Using the adjustment cylinder for control makes the extension and retraction of the lead screw more precise and enhances the accuracy of the test. Attached Figure Description

[0038] Figure 1 This is a schematic diagram of the overall structure of a micro-actuator output force testing device according to an embodiment of the present invention;

[0039] Figure 2 This is a partial structural schematic diagram of a micro-actuator output force testing device according to an embodiment of the present invention;

[0040] Figure 3 This is a front view of the overall structure of a micro-actuator output force testing device according to an embodiment of the present invention;

[0041] Figure 4 This is a schematic diagram illustrating the specific steps of a method for testing the static output force of a micro actuator according to an embodiment of the present invention;

[0042] Figure 5 This is a schematic diagram illustrating the specific steps of step S0100 in a micro-actuator output force testing method according to an embodiment of the present invention;

[0043] Figure 6 This is a schematic diagram illustrating the specific steps of a method for testing the dynamic output force of a micro-actuator according to an embodiment of the present invention.

[0044] In all the accompanying drawings, the same reference numerals denote the same technical features, specifically: 1-fixing mechanism, 11-force measuring fixture fixing base, 12-force measuring fixture side plate, 2-adjusting mechanism, 21-first positioning nut, 22-washer, 23-spring washer, 24-second positioning nut, 25-lead screw, 3-connecting mechanism, 31-third positioning bolt, 32-flange, 321-lead screw fixing flange, 322-force sensor connecting flange, 4-testing mechanism, 41-force sensor, 42-fastening screw, 43-force sensor connector, 44-micro-displacement actuator connector, 5-micro-displacement actuator. Detailed Implementation

[0045] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention. Furthermore, the technical features involved in the various embodiments of this invention described below can be combined with each other as long as they do not conflict with each other.

[0046] Example 1:

[0047] This embodiment provides a micro-displacement actuator output force testing device, including a fixing mechanism 1 that supports and fixes other structures, an adjustment mechanism 2 installed on the fixing mechanism 1, a connecting mechanism 3 installed at one end of the adjustment mechanism 2, and a testing mechanism 4 installed on the connecting mechanism 3. The micro-displacement actuator 5 is fixed to the fixing mechanism 1, and the adjustment mechanism 2 finely adjusts the measurement points to test various points on the moving part of the output end of the micro-displacement actuator 5. This allows for the acquisition of curves showing the relationship between the position of the moving part at the output end and the magnitude of the output force under the same current, the relationship between the magnitude of the input current and the magnitude of the output force at each point, and the range of locations where output force exists. This comprehensive testing of the output force of the moving part at the output end of the micro-displacement actuator 5 makes the test results more accurate and the obtained data more convincing. It also simplifies the operation steps, shortens the time required for detection and analysis, and improves detection efficiency.

[0048] The fixing mechanism 1 includes a force-measuring fixture fixing base 11 located at the bottom of the device and a force-measuring fixture side plate 12 fixed to one side of the force-measuring fixture fixing base 11. The force-measuring fixture fixing base 11 is a thick square plate structure with a shallow groove along one edge and holes at both ends of the groove. A square hole is cut along the center of the other side to serve as an actuator mounting platform, with mounting holes pre-drilled at the four corners. The force-measuring fixture side plate 12 is an inverted "T" shaped plate structure with holes at both ends of the bottom horizontal plate for screw fixing to the force-measuring fixture fixing base 11. Mounting holes are provided on the vertical plate for mounting other devices. Fixing the micro-displacement actuator 5 and other test structures on the same base ensures no deviation between them, guarantees stability during testing, makes the device's testing of the micro-displacement actuator's output force more accurate, and enables rapid response when the input environment changes.

[0049] Preferably, the force measuring fixture side plate 12 is provided with multiple force measuring fixture side plates 12 with different mounting hole arrangements according to the specifications of the micro-displacement actuator 5 being tested, which can meet the testing requirements of most micro-displacement actuators 5. When using it, only the corresponding test fixture side plate 12 needs to be replaced, which greatly enhances the versatility of the device.

[0050] The adjusting mechanism 2 includes a lead screw 25 installed in the mounting hole on the side plate 12 of the force measuring fixture, washers 22 fitted on the lead screw 25 and placed on both sides of the side plate 12, spring washers 23 fitted on the lead screw 25 and placed outside the two washers 22, a first positioning nut 21 installed on the lead screw 25 and placed on one side of the side plate 12, and a second positioning nut 24 installed on the lead screw 25 and placed on the other side of the side plate 12. The lead screw 25 is a long cylindrical rod with a diameter matching the diameter of the mounting hole on the side plate 12, and is threaded. The washers 22 are fitted on the lead screw 25, one on each side of the side plate 12. The spring washers 23 are annular washers, also fitted on the lead screw 25, one on each side of the two washers 22, and have a diameter smaller than the washers 22. The first positioning nut 21 is screwed onto the lead screw 25 and located on one side of the force measuring fixture side plate 12. The second positioning nut 24 is screwed onto the lead screw 25 and located on the other side of the force measuring fixture side plate 12. The spring washer 23 is sandwiched between the first positioning nut 21 and the washer 22, and between the second positioning nut 24 and the washer 22. The remaining structure is connected to the fixing mechanism 1. The washer 22 and the spring washer 23 are provided between the positioning nut and the force measuring fixture side plate 12, so that the nut generates pressure when fixed, preventing the nut from loosening due to vibration or force during the test, buffering the pressure at the nut and the threaded connection, preventing thread damage due to high-frequency adjustment or over-tightening, increasing the contact area, dispersing pressure, and reducing damage or plastic deformation of the components of the adjustment mechanism 2. Furthermore, the first positioning nut 21 and the second positioning nut 24 can be used to adjust the fixed position of the lead screw 25 on the force measuring fixture side plate 12, thereby meeting the requirements for changes in the test position.

[0051] The connecting mechanism 3 includes a third positioning bolt 31 mounted on one end of the lead screw 25 and a flange 32 mounted on the lead screw 25 at the same end as the third positioning bolt 31. The flange 32 includes a lead screw fixing flange 321 located at one end of the lead screw 25 and a force sensor connecting flange 322 connected to the lead screw fixing flange 321. The inner diameter of the lead screw fixing flange 321 matches the diameter of the lead screw 25 and is threaded, screwed onto the lead screw 25. The outer ring of the lead screw fixing flange 321 has openings for connecting other structures. The force sensor connecting flange 322 is an unconventional flange, with an overall circular plate structure. Its diameter is the same as the outer diameter of the lead screw fixing flange 321. One side is milled with a large circular groove containing multiple holes, and the outer ring also has multiple connecting holes. It is bolted to the lead screw fixing flange 321 through the outer ring connecting holes. The third positioning bolt 31 is installed on the other side of the lead screw fixing flange 321. After the lead screw fixing flange 321 is installed on the lead screw 25, it is tightened using the third positioning bolt 31. The flange 32 is fixed to the lead screw 25 by a threaded connection, and the positioning bolt is used to further tighten the flange 32 to prevent shaking during the test, which would affect the test results.

[0052] The testing mechanism 4 includes a force sensor 41 mounted on the force sensor connecting flange 322, a force sensor connector 43 fixed to one end of the force sensor 41, fastening screws 42 for connecting the force sensor 41 and the force sensor connector 43, and a micro-displacement actuator connector 44 fixed to the force sensor connector 43. The force sensor 41 has threaded holes at both ends, and one end is fixed to the force sensor connecting flange 322 with screws. The force sensor connector 43 is a small inverted "T"-shaped block structure with holes at both ends of the horizontal plate and countersunk through holes on the vertical plate. The force sensor 41 is fixed to the other end of the force sensor 41 through the countersunk through holes on the vertical plate. The micro-displacement actuator connector 44 is a plate structure with multiple holes. It is connected to the lower part of the force sensor connector 43 with screws and is also connected to the output moving part of the micro-displacement actuator 5 on the fixed base 11 with screws. The force sensor 41 is fixed to the micro-displacement actuator 5, and its output force is stabilized for testing.

[0053] Preferably, the force sensor 41 and the micro-displacement actuator 5 of the device are both connected to the central control computer. The input current of the micro-displacement actuator 5 and the output force of the micro-displacement actuator 5 measured by the force sensor 41 are connected to the central control computer, processed, and displayed on the same curve. The motion control performance indicators of the micro-displacement actuator 5, including response capability, stability and controllability, and bandwidth limit, can be quickly analyzed based on the content displayed on the screen.

[0054] Example 2:

[0055] Based on Embodiment 1, all structures of the adjustment mechanism 2 except for the lead screw 25 are eliminated and replaced with an adjustment cylinder, which is fixed to the side plate 12 of the force measuring fixture. During measurement, the position of the test mechanism 4 and the moving part of the micro-displacement actuator 5 connected to it is controlled by controlling the extension and retraction of the piston of the adjustment cylinder. Using the adjustment cylinder for control makes the extension and retraction of the lead screw 25 more precise, thus enhancing the accuracy of the test.

[0056] Example 3:

[0057] This embodiment provides a method for testing the static output force of a micro-displacement actuator, including the following steps:

[0058] S0100. After moving the device to the designated location, assemble it.

[0059] S0200, Fix the micro-displacement actuator 5 to be tested onto the force measuring fixture base 11, and fix the moving part of the micro-displacement actuator 5 to the micro-displacement actuator connector 44 with screws.

[0060] S0300. Based on the motion stroke of the micro-displacement actuator 5 and the testing requirements, determine the testing range as ±5mm and the testing interval as 1mm. Adjust the moving part to the axial position of the lead screw 25 at -5mm and fix several positioning nuts.

[0061] S0400. Check that all components are securely connected. Give the micro-displacement actuator 5 a static current signal and gradually increase the current intensity. Measure that the output force at the -5mm position increases linearly with the increase of current.

[0062] S0500: Using the first positioning nut 21 and the second positioning nut 24, adjust the position of the moving part of the micro-displacement actuator 5 to -4mm. Following the method in step S0400, it is measured that the output force at the -4mm position increases linearly with the increase of current.

[0063] S0600, Repeat steps S0400-S0500 to test the output of 11 test points within the test range. After all tests are completed, output the test results and compare and analyze the test results.

[0064] Specifically, step S0100 includes the following steps:

[0065] S0101. Place the force measuring fixture fixing base 11 in the measuring position and stabilize it. Install the force measuring fixture side plate 12 in the side groove and fix it with screws to assemble the fixing mechanism 11.

[0066] S0102. Connect the micro-displacement actuator connector 44 to the force sensor connector 43, and fix it to one end of the force sensor 41 with the fastening screw 42 to assemble the test mechanism 4.

[0067] S0103. Install the screw fixing flange 321 on one end of the screw 25 and lock it with the third positioning bolt 31. Fix the force sensor connecting flange 322 to the other end of the force sensor 41 with screws, and then fix it to the screw fixing flange 321 with bolts.

[0068] S0104. After the other end of the lead screw 25 is fitted with a washer 22, a spring washer 23 and a second positioning nut 24, it passes through the mounting hole on the side plate 12 of the force measuring fixture, and then another layer of washer 22 and spring washer 23 are fitted and fixed with the first positioning nut 21.

[0069] Preferably, the test range and test spacing mentioned in steps S0300 and S0400 should be determined based on the motion stroke of the micro-displacement actuator 5 under test and the test requirements.

[0070] Example 4:

[0071] This embodiment provides a method for testing the dynamic output force of a micro-displacement actuator, including the following steps:

[0072] S0700. After moving the device to the designated location, assemble it.

[0073] S0800. Fix the micro-displacement actuator 5 to be tested onto the force measuring fixture base 11, and fix the moving part of the micro-displacement actuator 5 to the micro-displacement actuator connector 44 with screws.

[0074] S0900. Based on the motion stroke of the micro-displacement actuator 5 and the test requirements, determine the test range as ±5mm and the test interval as 1mm. Adjust the moving part to the axial position of the lead screw 25 at -5mm and fix several positioning nuts.

[0075] S1000. Check that all components are securely connected. Given a sine or cosine current signal to the micro-displacement actuator 5, measure the relationship between the dynamic response force at the -5mm position and the amplitude and frequency of the sine or cosine current signal.

[0076] S1100: Use the first positioning nut 21 and the second positioning nut 24 to adjust the position of the moving part of the micro-displacement actuator 5 to -4mm. According to the method in step S1000, measure the relationship between the dynamic response force at the -4mm position and the amplitude and frequency of the sine or cosine current signal.

[0077] S1200, Repeat steps S1000-S1100 to test the output of 11 test points within the test range. After all tests are completed, output the test results and compare and analyze the test results.

[0078] Specifically, step S0700 includes the following steps:

[0079] S0701. Place the force measuring fixture fixing base 11 in the measuring position and stabilize it. Install the force measuring fixture side plate 12 in the side groove and fix it with screws to assemble the fixing mechanism 11.

[0080] S0702. Connect the micro-displacement actuator connector 44 to the force sensor connector 43, and fix it to one end of the force sensor 41 with the fastening screw 42 to assemble the test mechanism 4.

[0081] S0703. Install the screw fixing flange 321 on one end of the screw 25 and lock it with the third positioning bolt 31. Fix the force sensor connecting flange 322 to the other end of the force sensor 41 with screws, and then fix it to the screw fixing flange 321 with bolts.

[0082] S0704. After the other end of the lead screw 25 is fitted with a washer 22, a spring washer 23 and a second positioning nut 24, it passes through the mounting hole on the side plate 12 of the force measuring fixture, and then another layer of washer 22 and spring washer 23 are fitted and fixed with the first positioning nut 21.

[0083] Preferably, the test range and test spacing mentioned in steps S0900 and S1000 should be determined based on the motion stroke of the micro-displacement actuator 5 under test and the test requirements.

[0084] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for testing the output force of a micro actuator, characterized in that, Includes the following steps: S0100. After moving the device to the designated location, assemble it. S0200, Fix the micro-displacement actuator (5) to be tested onto the force measuring fixture base (11), and fix the moving part of the micro-displacement actuator (5) to the micro-displacement actuator connector (44) with screws; S0300. Based on the motion stroke of the micro-displacement actuator (5) and the test requirements, determine the test range and test interval, adjust the moving part to the axial critical coordinate position of the lead screw (25), and fix several positioning nuts. S0400, check that all components are securely connected, give the micro-displacement actuator (5) a static current signal, and gradually increase the current intensity. Measure the output force at the critical coordinate position, which shows a linear increasing trend with the increase of current. S0500. Using the first positioning nut (21) and the second positioning nut (24), adjust the position of the moving part of the micro-displacement actuator (5) to the middle of the test range by a test interval. According to the method in step S0400, the output force at this position is measured to increase linearly with the increase of current. S0600, Repeat steps S0400-S0500 to test the output of multiple test points within the test range. After all tests are completed, output the test results and compare and analyze the test results.

2. The method for testing the output force of a micro-actuator according to claim 1, characterized in that, Step S0100 specifically includes the following steps: S0101. Place the force measuring fixture fixing base (11) in the measuring position and place it stably. Install the force measuring fixture side plate (12) in the groove on its side and fix it with screws to assemble it into a fixing mechanism (11). S0102. Connect the micro-displacement actuator connector (44) to the force sensor connector (43) and fix it to one end of the force sensor (41) with a fastening screw (42) to assemble the test mechanism (4). S0103. Install the screw fixing flange (321) on one end of the screw (25) and lock it with the third positioning bolt (31). Fix the force sensor connecting flange (322) to the other end of the force sensor (41) with screws, and then fix it to the screw fixing flange (321) with bolts. S0104. After the other end of the lead screw (25) is fitted with a washer (22), a spring washer (23) and a second positioning nut (24), it passes through the mounting hole on the side plate (12) of the force measuring fixture, and then a layer of washer (22) and spring washer (23) are fitted and fixed with the first positioning nut (21).

3. A method for testing the output force of a micro-actuator according to any one of claims 1-2, characterized in that, The test range and test spacing mentioned in steps S0300 and S0400 should be determined based on the motion stroke of the micro-displacement actuator (5) under test and the test requirements.

4. A method for testing the output force of a micro-actuator according to any one of claims 1-2, characterized in that, After step S0400 is completed, the input current is changed to a sine or cosine current, and the relationship between the dynamic response force at that point and the amplitude and frequency of the sine or cosine current signal is measured.

5. A micro-actuator output force testing device, used to implement the micro-actuator output force testing method as described in any one of claims 1-4, characterized in that, include: A fixing mechanism (1) that provides fixed support for the device includes a force measuring fixture fixing base (11) located at the bottom of the device and a force measuring fixture side plate (12) located on the fixing base (11). An adjustment mechanism (2) is provided on the side plate (12) of the force measuring fixture. The adjustment mechanism (2) includes a lead screw (25) inserted through the side plate (12), a first positioning nut (21) provided on one side of the side plate (12) of the force measuring fixture, and a second positioning nut (24) provided on the other side of the side plate (12). A connecting mechanism (3) is provided at one end of the lead screw (25). The connecting mechanism (3) includes a flange (32) provided at one end of the lead screw (25) and a third positioning bolt (31) provided on the side of the flange (32). And a test mechanism (4) located on the side of the flange (32), the test mechanism (4) including a force sensor (41) for accurately measuring the output force of the micro-displacement actuator (5).

6. The micro-actuator output force testing device according to claim 5, characterized in that, The adjustment mechanism (2) also includes a washer (22) disposed between the first positioning nut (21) and the force measuring tool side plate (12). And a spring washer (23) disposed between the first positioning nut (21) and the washer (22).

7. The micro-actuator output force testing device according to claim 6, characterized in that, The gasket (22) and the spring washer (23) are also provided between the second positioning nut (24) and the side plate (12) of the force measuring fixture.

8. A micro-actuator output force testing device according to any one of claims 5-7, characterized in that, The flange (32) includes a screw fixing flange (321) located at one end of the screw (25) and a force sensor connecting flange (322) located on the screw fixing flange (321).

9. A micro-actuator output force testing device according to any one of claims 5-7, characterized in that, The testing mechanism (4) also includes a force sensor connector (43) disposed on the side of the force sensor (41). Micro-displacement actuator connector (44) is provided on the side of the force sensor connector (43); And fastening screws (42) for connecting the force sensor connector (43) and the force sensor (41).

10. A micro-actuator output force testing device according to claim 9, characterized in that, The micro-displacement actuator connector (44) is connected to the output end moving part of the micro-displacement actuator (5).

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