A parametric excitation oscillation-based synchronous bandwidth enhancement system

Abstract

The application discloses a kind of synchronous bandwidth promotion systems based on parametric excitation oscillation, belong to micro electro mechanical system technical field, including contact force sensing module, the contact probe of contact force sensing module is connected in Z type force amplification beam as the input end of amplification beam, while amplification beam is fixed through flexible folding beam, sensitive resonant beam one end is connected in the output end of amplification beam, other end is fixed end and is driven by first drive electrode plate;Parametric excitation oscillation synchronization module includes arched double-end fixed beam, by second drive electrode plate drive;Sensitive resonant beam and parametric excitation oscillation synchronization module generate electrostatic coupling by coupling electrode, sensitive resonant beam and arched double-end fixed beam respectively in oscillation loop produce self-excitation oscillation, and the sensing signal of force sensing module is injected into parametric excitation oscillation synchronization module by coupling electrode plate.The application can significantly improve synchronous bandwidth, easy to realize wide-range contact force detection while improving sensor resolution.

Description

Technical Field

[0001] This invention belongs to the field of microelectromechanical systems (MEMS) technology, specifically relating to a synchronous bandwidth enhancement system based on parametric oscillation. Background Technology

[0002] Highly sensitive weak force sensors are key components in important fields such as intermolecular force detection, cell manipulation, and microgravity navigation. They not only relate to fundamental research on the service performance of microscale materials but also influence the development of high-end instruments and equipment such as inertial navigation systems. Resonant MEMS force sensors are gradually becoming the mainstream technology due to their high sensitivity and near-digital output.

[0003] Resonator force sensors change their natural frequency when subjected to external force, and the magnitude of the measured force can be obtained by observing the change in the resonator's natural frequency. Current research on resonant MEMS force sensors mainly focuses on improving sensor sensitivity, resolution, and detection range. By designing resonators that meet a certain frequency ratio, two oscillators can achieve synchronization, significantly improving sensor sensitivity and stability. Therefore, synchronous sensing is an effective technique for improving the performance of resonant MEMS sensors. However, due to manufacturing limitations of micro-nano devices, unexpected effects such as geometrical errors and internal stress can easily be introduced into the resonator, leading to frequency mismatch and making it difficult to establish a synchronized oscillation state. Furthermore, for large-scale measurements, synchronized oscillators may lose synchronization. The frequency ratio requirement for synchronization and the oscillator's synchronization bandwidth limit the sensor's detection range, becoming a major challenge in its practical applications. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a synchronous bandwidth enhancement system based on parametric oscillation to address the shortcomings of the prior art, thereby solving the technical problem of resonator frequency mismatch. By constructing a synchronous oscillator through parametric excitation, the synchronous bandwidth can be significantly extended, making it suitable for applications involving a wide range of measurements.

[0005] The present invention adopts the following technical solution:

[0006] A synchronous bandwidth enhancement system based on parametric oscillation includes a contact force sensing module and a parametric oscillation synchronization module. The contact force sensing module and the parametric oscillation synchronization module are connected. The contact force sensing module is connected to a first oscillation circuit, and the parametric oscillation synchronization module is connected to a second oscillation circuit.

[0007] The sensitive resonant beam of the contact force sensing module and the arched beam of the parametric oscillation synchronization module are arranged in parallel. The sensitive resonant beam and the arched beam oscillate in a closed loop at the resonant frequency. A DC voltage is applied through the coupling plate of the sensitive resonant beam and the arched beam to form electrostatic coupling.

[0008] When the contact force sensing module is subjected to an external force, the external force is amplified and applied to the sensitive resonant beam. The frequency signal of the sensitive resonant beam is transmitted to the parametric oscillation synchronization module through electrostatic coupling, and the parametric oscillation synchronization module reads the frequency change.

[0009] Preferably, the contact force sensing module includes a Z-shaped amplifying beam, with one end of the bottom of the Z-shaped amplifying beam connected to a contact force probe and the other end connected to a second fixed anchor point;

[0010] One end of the top of the Z-shaped amplification beam is connected to the third fixed anchor point, and the other end is connected to one end of the sensitive resonant beam, while the other end of the sensitive resonant beam is connected to the first fixed anchor point.

[0011] The first driving electrode and the first detection electrode are connected to one side of the middle part of the sensitive resonant beam, and the second detection electrode and the second driving electrode are connected to the other side via an arched beam.

[0012] The two ends of the arched beam are connected to the fourth fixed anchor point and the fifth fixed anchor point, respectively.

[0013] More preferably, the gap between the first driving electrode, the first detection electrode and the sensitive resonant beam is 1 to 5 μm; the gap between the second driving electrode, the second detection electrode and the sensitive resonant beam is 1 to 5 μm.

[0014] More preferably, the Z-shaped enlarged beam is connected to the second fixed anchor point by a flexible folding beam.

[0015] More preferably, the width of a single flexible folding beam is 1 to 10 μm.

[0016] More preferably, the length of the Z-shaped enlarged beam is 200–2000 μm and the width is 50–500 μm.

[0017] More preferably, the tip width of the contact force probe is less than or equal to 5 μm.

[0018] More preferably, the first oscillation circuit includes a first voltage-controlled oscillator, and the first driving electrode is connected in sequence to the first phase detector and the first detection electrode via the first voltage-controlled oscillator; the first phase detector is connected to the first voltage-controlled oscillator via a first low-pass filter.

[0019] More preferably, the second oscillation circuit includes a second phase detector, and the second detection plate is connected in sequence to the second low-pass filter, the second voltage-controlled oscillator and the second driving plate via the second phase detector. The second voltage-controlled oscillator is connected to the second phase detector.

[0020] More preferably, a driving signal at one times the natural frequency of the sensitive resonant beam is applied to the first driving electrode, and the first detection electrode demodulates at one times the natural frequency of the sensitive resonant beam.

[0021] A driving signal twice the natural frequency of the arch beam is applied to the second driving electrode, and the second detection electrode demodulates the signal at one natural frequency of the arch beam.

[0022] Compared with the prior art, the present invention has at least the following beneficial effects:

[0023] A synchronous bandwidth enhancement system based on parametric oscillation is presented. This system constructs a closed-loop parametric oscillation of an arched beam and a closed-loop oscillation of a contact force sensor, achieving signal transmission between the two closed-loop systems through electrostatic coupling. This provides a method and system for enhancing synchronous bandwidth based on parametric oscillation, thereby expanding the synchronous bandwidth and improving the sensor's high-sensitivity, high-resolution detection range. It solves the problem of difficulty in achieving synchronization due to resonant frequency mismatch caused by manufacturing errors, making synchronization easier to implement in engineering applications. The coupling strength is adjusted by regulating the coupling voltage on the resonant beam, thus regulating the signal strength injected into the parametric synchronization module and controlling the synchronous bandwidth. Research and analysis show that by constructing synchronization between the parametric oscillator and the contact force sensing module, the bandwidth can be expanded by more than five times compared to current directly excited synchronous sensors.

[0024] Furthermore, the gap between the driving electrode, the detection electrode, and the sensitive resonant beam determines the intensity of the excitation force and the detection signal; the gap is set to 1 to 5 μm so that the arched beam and the sensitive resonant beam are subjected to a larger excitation force to maintain stable oscillation, while enhancing the intensity of the detection signal to improve the signal-to-noise ratio.

[0025] Furthermore, the sensitive direction of the probe is connected to a fixed anchor point using a flexible folding beam. This flexible folding beam is configured to have low stiffness in the sensitive direction of the probe, so that the external contact force on the probe is transmitted to the sensitive resonant beam to the maximum extent; and high stiffness in the non-sensitive direction of the probe, so as to provide sufficient support for the probe and the Z-shaped lever in the out-of-plane direction.

[0026] Furthermore, the thickness of the flexible folded beam determines its stiffness in the probe's sensitive direction. The greater the stiffness in the sensitive direction, the smaller the force transmitted to the sensitive resonant beam, i.e., the lower the system's sensitivity. Setting the thickness of a single folded beam to 1–10 μm ensures that the folded beam has relatively low stiffness in the probe's sensitive direction, thereby improving the system's sensitivity.

[0027] Furthermore, the length of the Z-shaped amplifying beam determines the amplification factor of the external contact force by the amplification mechanism. Its length is set to 200–2000 μm to ensure that the amplification mechanism has sufficient amplification factor. The width of the Z-shaped amplifying beam determines its bending stiffness, which is set to 50–500 μm to ensure that the amplifying beam has sufficient bending stiffness to amplify the contact force sensed by the probe and transmit it to the sensitive resonant beam.

[0028] Furthermore, the width of the contact force probe is set to be less than or equal to 5 μm so that the probe has a sufficiently small scale to be suitable for measuring point contact forces in both small-scale and large-scale environments.

[0029] Furthermore, the sensitive beam and the arched beam maintain stable oscillation through a closed-loop oscillation circuit, and use their own frequency changes to complete feedback, enabling them to sense changes in external contact force in real time and achieve real-time frequency reading.

[0030] In summary, this invention achieves a significant increase in synchronization bandwidth through the coupling of a parameter-excited oscillator and a contact force sensing system, and has advantages such as high sensitivity, high resolution, and adjustable detection range; it can be applied to fields such as the detection of mechanical properties of micro- and nano-scale materials and the measurement of cellular mechanical properties.

[0031] The technical solution of the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0032] Figure 1 This is a schematic diagram of the MEMS weak force sensor structure in an embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram of the measurement circuit in an embodiment of the present invention;

[0034] Figure 3 This is a frequency sweep diagram of the closed-loop test disturbance frequency in an embodiment of the present invention;

[0035] Figure 4 This diagram shows the synchronization bandwidth of the para-excited oscillation in this embodiment of the invention, as well as the synchronization bandwidth when directly excited with different amplitudes.

[0036] Wherein: 1-1. First fixed anchor point; 1-2. Sensitive resonant beam; 1-3. First driving electrode; 1-4. First detection electrode; 1-5. Second fixed anchor point; 1-6. Flexible folding beam; 1-7. Contact force probe; 1-8. Z-shaped amplifying beam; 1-9. Third fixed anchor point; 2-1. Fourth fixed anchor point; 2-2. Arched beam; 2-3. Second detection electrode; 2-4. Second driving electrode; 2-5. Fifth fixed anchor point; 3-1. First phase detector; 3-2. First low-pass filter; 3-3. First voltage-controlled oscillator; 4-1. Second phase detector; 4-2. Second low-pass filter; 4-3. Second voltage-controlled oscillator. Detailed Implementation

[0037] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0038] In the description of this invention, it should be understood that the terms "comprising" and "including" indicate the presence of the described features, integrals, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integrals, steps, operations, elements, components and / or collections thereof.

[0039] It should also be understood that the terminology used in this specification is for the purpose of describing particular embodiments only and is not intended to limit the invention. As used in this specification and the appended claims, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise.

[0040] It should also be further understood that the term "and / or" as used in this specification and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes such combinations. For example, A and / or B can represent three cases: A alone, A and B simultaneously, and B alone. Additionally, the character " / " in this invention generally indicates that the preceding and following objects have an "or" relationship.

[0041] It should be understood that although terms such as first, second, third, etc., may be used in the embodiments of the present invention to describe the preset range, these preset ranges should not be limited to these terms. These terms are only used to distinguish the preset ranges from one another. For example, without departing from the scope of the embodiments of the present invention, the first preset range may also be referred to as the second preset range, and similarly, the second preset range may also be referred to as the first preset range.

[0042] Depending on the context, the word "if" as used here can be interpreted as "when," "when," "in response to determination," or "in response to detection." Similarly, depending on the context, the phrase "if determination" or "if detection (of the stated condition or event)" can be interpreted as "when determination," "in response to determination," "when detection (of the stated condition or event)," or "in response to detection (of the stated condition or event)."

[0043] The accompanying drawings illustrate various structural schematic diagrams according to embodiments disclosed in this invention. These drawings are not to scale, and some details have been enlarged for clarity, and some details may have been omitted. The shapes of the various regions and layers shown in the drawings, as well as their relative sizes and positional relationships, are merely exemplary and may deviate from reality due to manufacturing tolerances or technical limitations. Furthermore, those skilled in the art can design regions / layers with different shapes, sizes, and relative positions as needed.

[0044] This invention provides a synchronization bandwidth enhancement system based on parametric oscillation. A contact probe is connected to the input end of a Z-shaped force amplification beam, which is fixed by a flexible folding beam. One end of a sensitive resonant beam is connected to the output end of the amplification beam, while the other end is a fixed support driven by a first driving electrode. A second driving electrode drives an arched double-ended fixed beam. The sensitive resonant beam and the parametric oscillation synchronization module are electrostatically coupled through coupling electrodes. Both the sensitive resonant beam and the arched double-ended fixed beam generate self-excited oscillations in the oscillation circuit, and the sensing signal from the force sensing module is injected into the parametric oscillation synchronization module through the coupling electrode. This invention significantly improves the synchronization bandwidth, easily enabling wide-range contact force detection while simultaneously improving sensor resolution, achieving a significant improvement in the resolution, scaling factor, and stability of the resonant sensor.

[0045] Please see Figure 1 and Figure 2 This invention discloses a synchronous bandwidth enhancement system based on parametric oscillation, comprising a contact force sensing module and a parametric oscillation synchronization module. The contact force sensing module is connected to a first oscillation circuit, and the parametric oscillation synchronization module is connected to a second oscillation circuit. The sensitive resonant beam 1-2 of the contact force sensing module and the arched beam 2-2 of the parametric oscillation synchronization module undergo closed-loop oscillation at the resonant frequency. The force sensing module and the parametric oscillation synchronization module are electrostatically coupled by applying a DC voltage through the coupling plates of the sensitive resonant beam 1-2 and the arched beam 2-2. When the contact force probe 1-7 of the contact force sensing module is subjected to an external force, the external force is amplified by the Z-shaped amplifying beam 1-8 and applied to the sensitive resonant beam 1-2. The frequency signal of the sensitive resonant beam 1-2 is transmitted to the parametric oscillation synchronization module through electrostatic coupling, and the second detection electrode 2-3 in the parametric oscillation synchronization module completes the reading of the frequency change.

[0046] Please see Figure 1 The contact force sensing module mainly includes: a first fixed anchor point 1-1, a sensitive resonant beam 1-2, a first driving electrode 1-3, a first detection electrode 1-4, a second fixed anchor point 1-5, a flexible folding beam 1-6, a contact force probe 1-7, a Z-shaped amplifying beam 1-8, and a third fixed anchor point 1-9.

[0047] The left end of the sensitive resonant beam 1-2 is connected to the first fixed anchor point 1-1, and the right end of the sensitive resonant beam 1-2 is connected to the Z-shaped amplification beam 1-8. The first driving electrode 1-3 and the first detection electrode 1-4 are connected to one side of the middle part of the sensitive resonant beam 1-2. The first driving electrode 1-3 and the first detection electrode 1-4 are respectively sputtered with metal layers on their surfaces. The other side of the middle part of the sensitive resonant beam 1-2 is connected to the arched beam 2-2 of the para-excited oscillation synchronization module.

[0048] The right end of the Z-shaped magnifying beam 1-8 is connected to the third fixed anchor point 1-9; one side of the lower end of the Z-shaped magnifying beam 1-8 is connected to the contact force probe 1-7, and the other side is connected to the second fixed anchor point 1-5 through the folding beam 1-6.

[0049] The first driving electrode 1-3 is electrically connected to the first detection electrode 1-4 via the first voltage-controlled oscillator 3-3 and the first phase detector 3-1. The first phase detector 3-1 is electrically connected to the first voltage-controlled oscillator 3-3 via the first low-pass filter 3-2. A driving signal at one times the natural frequency of the sensitive resonant beam 1-2 is applied to the first driving electrode 1-3, and the first detection electrode 1-4 demodulates at one times the natural frequency of the sensitive resonant beam 1-2.

[0050] The sensitive resonant beam 1-2 is provided with excitation force by the first driving electrode 1-3. Under the action of the excitation force, the sensitive resonant beam 1-2 generates vibration with a certain frequency and a certain amplitude. The first detection electrode 1-4 and the resonant beam 1-2 form a capacitor. The frequency of the force sensing module is obtained through the first detection electrode 1-4. The input terminal of the first phase detector 3-1 is connected to the first detection electrode 1-4, and the output terminal is input to the first voltage-controlled oscillator 3-3 through the first low-pass filter 3-2. The first voltage-controlled oscillator 3-3 is connected to the first driving electrode 1-3 and sends the feedback signal to the first phase detector 3-1, so that the contact force sensing module forms a closed-loop oscillation.

[0051] The parametric oscillation synchronization module includes a fourth fixed anchor point 2-1, an arched beam 2-2, a second detection electrode 2-3, a second driving electrode 2-4, and a fifth fixed anchor point 2-5.

[0052] One side of the middle section of the arched beam 2-2 is connected to the sensitive resonant beam 1-2 of the contact force sensing module, and the other side of the middle section of the arched beam 2-2 is connected to the second driving electrode 2-4 and the second detection electrode 2-3 respectively. The second driving electrode 2-4 and the second detection electrode 2-3 are respectively sputtered with metal layers on their surfaces; the left end of the arched beam 2-2 is connected to the fifth fixed anchor point 2-5, and the right end of the arched beam 2-2 is connected to the fourth fixed anchor point 2-1.

[0053] The arched beam 2-2 is suspended on the insulating substrate; the fifth fixed anchor point 2-5, the fourth fixed anchor point 2-1, the second driving electrode plate 2-4, and the second detection electrode plate 2-3 are fixed on the insulating substrate.

[0054] The arch beam 2-2 is provided with an excitation force twice that of the natural frequency of the arch beam 2-2 by the second driving electrode 2-4. Under the action of the excitation force, the arch beam 2-2 generates stable vibration at its natural frequency. The second detection electrode 2-3 forms a capacitor with the arch beam 2-2, and the frequency of the para-excited oscillation synchronization module is obtained through the second detection electrode 2-3.

[0055] The second detection electrode 2-3 is electrically connected to the second driving electrode 2-4 after passing through the second phase detector 4-1, the second low-pass filter 4-2, and the second voltage-controlled oscillator 4-3. A driving signal with twice the natural frequency of the arch beam 2-2 is applied to the second driving electrode 2-4, and the second detection electrode 2-2 is demodulated at one natural frequency of the arch beam 2-2.

[0056] The input terminal of the second phase detector 4-1 is connected to the second detection electrode 2-3, and the output terminal is input to the second voltage-controlled oscillator 4-3 through the second low-pass filter 4-2. The second voltage-controlled oscillator 4-3 is connected to the driving electrode 2-4 and sends the feedback signal to the second phase detector 4-1 to form a parametric closed-loop oscillation.

[0057] The frequency ratio between the frequency ω1 of the sensitive resonant beam 1-2 and the frequency ω2 of the arch beam 2-2 is:

[0058] ω2 / ω1=N

[0059] Where N is an integer, and the arched beam 2-2 amplifies the frequency shift of the sensitive resonant beam 1-2 by a factor of N.

[0060] The lengths of the sensitive resonant beam 1-2 and the arched beam 2-2 are 50–800 μm, and the width of a single beam is 1–10 μm.

[0061] The gap between the first driving electrode 1-3, the first detection electrode 1-4 and the sensitive resonant beam 1-2 is 1-5 μm;

[0062] The gap between the second driving electrode 2-3, the second detection electrode 2-4 and the sensitive resonant beam 1-2 is 1-5 μm.

[0063] The width of a single flexible folding beam 1-6 is 1-10 μm;

[0064] The length of the Z-type enlarged beams 1-8 is 200-2000μm, and the width ranges from 50-500μm;

[0065] The tip width of contact force probes 1-7 is less than or equal to 5 μm.

[0066] Please see Figure 2 The working principle of the synchronous bandwidth enhancement system based on parametric oscillation of the present invention is as follows:

[0067] When the external contact force is sensed by the contact force probe 1-7, the external force is amplified by the Z-shaped amplification beam 1-8 and applied to the sensitive resonant beam 1-2. The Z-shaped amplification beam 1-8 applies an axial tensile force to the sensitive resonant beam 1-2, thereby increasing the frequency of the sensitive resonant beam 1-2.

[0068] The frequency ω of the sensitive resonant beam 1-2 s The closed-loop oscillation frequency ω0 of the parametric oscillation synchronization module remains at a frequency ratio of 1 when no external force is applied. Under the action of external force, the frequency change generated by the contact force sensing module will cause the frequency of the parametric oscillation synchronization module to change synchronously. The external contact force is sensed by reading the detection plates 2-3 in the parametric oscillation synchronization module.

[0069] In the parametric oscillation synchronization module, parametric oscillation states with different amplitudes are constructed using different excitation forces. The synchronization bandwidth can be described as follows:

[0070]

[0071] Among them, f s The signal strength of the parametric oscillation synchronization module is injected into the contact force sensing module, where R is the closed-loop oscillation amplitude of the parametric oscillation synchronization module, η is the nonlinear damping of the parametric oscillation synchronization module, and β and κ are the nonlinear stiffness.

[0072] The synchronous bandwidth enhancement system based on parametric oscillation of this invention senses contact force through a probe, causing a change in the frequency of a sensitive resonant beam. This frequency change is then read by an arched beam electrostatically coupled to the sensitive resonant beam. The arched beam achieves closed-loop oscillation through parametric excitation, significantly increasing the synchronous bandwidth and thus expanding the system's contact force measurement range. Simultaneously, the synchronous oscillation method significantly improves the stability of the closed-loop oscillation, enhancing the resolution and sensitivity of contact force detection.

[0073] In summary, this invention is applicable to high-precision applications with a wide range of mechanical scales, such as the measurement of the mechanical properties of micro- and nano-scale materials and the mechanical properties of cells.

[0074] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0075] Please see Figure 3 A DC voltage of 30V and an AC driving voltage of 2V are applied to the second driving plate 2-4 in the parametric oscillation synchronization module, and a DC voltage of 30V is applied to the second detection plate. Self-excited oscillation is constructed through the second closed-loop oscillation circuit. Figure 3 This refers to the synchronization bandwidth of the parametric oscillation synchronization module, measured by frequency sweeping of the external disturbance signal. During synchronization, the frequency of the parametric oscillation synchronization module maintains a frequency ratio of 1 to the frequency of the external signal.

[0076] Please see Figure 4 The closed-loop oscillation amplitude of the parametric oscillation synchronization module can be controlled by adjusting the AC drive voltage of the second drive plate. Directly excited closed-loop oscillation and parametric oscillation are constructed respectively. Figure 4 The value in the middle represents the synchronization bandwidth measured under different steady-state amplitudes for different excitation methods.

[0077] Research has shown that the synchronous bandwidth enhancement system based on parametric oscillation provided by this invention can extend the synchronous bandwidth by more than 5 times compared with the traditional direct excitation method.

[0078] In summary, this invention provides a synchronization bandwidth enhancement system based on parametric oscillation. By constructing the parametric oscillation state of the resonator, it achieves a significant increase in synchronization bandwidth, solving the engineering application difficulties caused by small bandwidth and resonator frequency mismatch in sensing applications. Furthermore, the transmission of the sensing signal in the parametric oscillation synchronization module is accomplished through electrostatic coupling, and the synchronization bandwidth can be controlled by adjusting the coupling voltage, thereby adjusting the sensor's detection range.

[0079] The above content is only for illustrating the technical concept of the present invention and should not be construed as limiting the scope of protection of the present invention. Any modifications made to the technical solution based on the technical concept proposed in this invention shall fall within the scope of protection of the claims of this invention.

Claims

1. A synchronous bandwidth enhancement system based on parametric oscillation, characterized in that, It includes a contact force sensing module and a parametric oscillation synchronization module. The contact force sensing module and the parametric oscillation synchronization module are connected. The contact force sensing module is connected to a first oscillation circuit, and the parametric oscillation synchronization module is connected to a second oscillation circuit. The sensitive resonant beam (1-2) of the contact force sensing module and the arched beam (2-2) of the parametric oscillation synchronization module are arranged in parallel. The sensitive resonant beam (1-2) and the arched beam (2-2) oscillate in a closed loop at the resonant frequency. A DC voltage is applied through the coupling plates of the sensitive resonant beam (1-2) and the arched beam (2-2) to form electrostatic coupling. When the contact force sensing module is subjected to an external force, the external force is amplified and applied to the sensitive resonant beam (1-2). The frequency signal of the sensitive resonant beam (1-2) is transmitted to the parametric oscillation synchronization module through electrostatic coupling, and the parametric oscillation synchronization module reads the frequency change. The contact force sensing module includes a Z-shaped amplifying beam (1-8), with one end of the bottom of the Z-shaped amplifying beam (1-8) connected to a contact force probe (1-7) and the other end connected to a second fixed anchor point (1-5). One end of the top of the Z-shaped amplifying beam (1-8) is connected to the third fixed anchor point (1-9), and the other end is connected to one end of the sensitive resonant beam (1-2). The other end of the sensitive resonant beam (1-2) is connected to the first fixed anchor point (1-1). The first driving electrode (1-3) and the first detection electrode (1-4) are connected to one side of the middle part of the sensitive resonant beam (1-2), and the second detection electrode (2-3) and the second driving electrode (2-4) are connected to the other side via the arched beam (2-2). The two ends of the arched beam (2-2) are connected to the fourth fixed anchor point (2-1) and the fifth fixed anchor point (2-5) respectively. The first oscillation circuit includes a first voltage-controlled oscillator (3-3), and a first driving electrode (1-3) is connected to a first phase detector (3-1) and a first detection electrode (1-4) in sequence via the first voltage-controlled oscillator (3-3); the first phase detector (3-1) is connected to the first voltage-controlled oscillator (3-3) via a first low-pass filter (3-2). The second oscillation circuit includes a second phase detector (4-1), and the second detection electrode (2-3) is connected in sequence to the second low-pass filter (4-2), the second voltage-controlled oscillator (4-3) and the second drive electrode (2-4) via the second phase detector (4-1). The second voltage-controlled oscillator (4-3) is connected to the second phase detector (4-1).

2. The synchronous bandwidth enhancement system based on parametric oscillation according to claim 1, characterized in that, The gap between the first driving electrode (1-3), the first detection electrode (1-4) and the sensitive resonant beam (1-2) is 1~5μm; the gap between the second driving electrode (2-4), the second detection electrode (2-3) and the sensitive resonant beam (1-2) is 1~5μm.

3. The synchronous bandwidth enhancement system based on parametric oscillation according to claim 1, characterized in that, The Z-shaped enlarged beam (1-8) is connected to the second fixed anchor point (1-5) by a flexible folding beam (1-6).

4. The synchronous bandwidth enhancement system based on parametric oscillation according to claim 3, characterized in that, The width of a single flexible folding beam (1-6) is 1~10μm.

5. The synchronous bandwidth enhancement system based on parametric oscillation according to claim 1, characterized in that, The length of the Z-type enlarged beam (1-8) is 200~2000μm and the width ranges from 50~500μm.

6. The synchronous bandwidth enhancement system based on parametric oscillation according to claim 1, characterized in that, The tip width of the contact force probes (1-7) is less than or equal to 5 μm.

7. The synchronous bandwidth enhancement system based on parametric oscillation according to claim 1, characterized in that, A driving signal at one times the natural frequency of the sensitive resonant beam (1-2) is applied to the first driving electrode (1-3), and the first detection electrode (1-4) demodulates at one times the natural frequency of the sensitive resonant beam (1-2). A driving signal at twice the natural frequency of the arch beam (2-2) is applied to the second driving electrode (2-4), and the second detection electrode (2-3) demodulates at once the natural frequency of the arch beam (2-2).

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