A device for testing the sensitive characteristics of a humidity gap sensor

Abstract

The application discloses a kind of humidity gap sensor sensitive characteristic experimental device, comprising: humidity generation module, distance generation module, element support and signal transmission module and acquisition and analysis module.Humidity generation module is composed of humidity generation solution and sealed container;Distance generation module is composed of two-axis displacement table, distance control unit and target object;Element support and signal transmission module are composed of circuit bottom plate and probe clamp plate;Acquisition and analysis module is composed of impedance analysis unit and host computer.The experimental platform realizes the fixed installation and signal transmission of sensitive element by element support and signal transmission module, provides accurate, reliable and controllable distance excitation by distance generation module, provides accurate, convenient and stable humidity excitation by humidity generation module, realizes impedance and inductance parameter acquisition and analysis by acquisition and analysis module, and provides experimental basis for humidity-distance sensor humidity-impedance characteristic research and distance-impedance characteristic research.

Description

Technical Field

[0001] This invention relates to the field of sensor performance testing, and in particular to the field of sensor humidity distance experimental platforms. Background Technology

[0002] Multimodal detection and composite sensing are important directions for future sensor development. The limited distances between narrow layers inside modern industrial equipment are crucial to its performance and safety, thus creating a need for distance detection. Simultaneously, high humidity inside modern industrial equipment can cause rust and short circuits, necessitating humidity detection. Therefore, achieving simultaneous detection of both distance and humidity variables within modern industrial equipment is a pressing issue. Traditional non-contact distance sensors typically use metal probes with non-contact sensitive layers, lacking humidity sensitivity. Traditional humidity sensors, with their sandwich structure of interdigitated electrodes coated with sensitive material, also lack non-contact distance sensitivity. Therefore, simultaneous detection of both variables requires the installation of two separate sensors, a solution with limitations. Firstly, frequently switching between different sensitive elements to meet varying measurement needs is cumbersome. Secondly, simultaneous measurement of multiple variables requires multiple sensitive elements, leading to high costs and limited installation environments. This is especially problematic in confined measurement environments with complex internal structures, making simultaneous installation and detection of multiple sensitive elements difficult. With the advent of microelectromechanical systems (MEMS), the demand for sensor integration is increasing. Integrating sensors with different functions and sensitivity directions, and exploring new principles and functions through miniaturization and integration, allows for the development of components and systems that elevate automation, intelligence, and reliability to new heights, significantly impacting industry, agriculture, information technology, the environment, bioengineering, medicine, space technology, and scientific development. Consequently, more and more researchers are focusing their efforts on the research of multifunctional, multi-parameter sensor probes. However, the performance research of multifunctional sensor probes requires dedicated multifunctional experimental platforms. Therefore, the research and development of experimental platforms and devices for multi-parameter performance research of multi-parameter sensor probes is essential. Summary of the Invention

[0003] To address the lack of experimental platforms for the combined performance of humidity and distance-sensitive elements, this invention provides an experimental device for the sensitivity characteristics of a humidity gap sensor, comprising: a humidity generation module, a distance generation module, an element support and signal transmission module, and a data acquisition and analysis module. The humidity generation module consists of several sealed containers filled with a humidity-generating solution. The distance generation module comprises a two-axis displacement stage, a distance control unit, and a target object. The element support and signal transmission module comprises a circuit board, a probe clamp, and a signal transmission line. The data acquisition and analysis module comprises an impedance analysis unit and a host computer. The humidity generation module provides different humidity environments by changing the sealed containers filled with different humidity-generating solutions. The target object of the distance generation module is fixedly mounted on the two-axis displacement stage of the distance generation module. The component support and signal transmission module is used for the fixed installation of the sensitive element and the transmission of experimental signals. The component support and signal transmission module, the sensitive element, and the target object of the distance generation module are all located inside the sealed container of the humidity generation module. The target object and the component support and signal transmission module are always kept parallel. The distance control unit of the distance generation module controls the two-axis displacement stage and the target object fixedly installed on its horizontal extension plate to move horizontally. The sensitive element is connected to the impedance analysis unit of the acquisition and analysis module through the component support and signal transmission module. The sensitive element generates a humidity-sensitive effect and / or a distance-sensitive effect. The humidity and / or distance-impedance response of the sensitive element is obtained through the acquisition and analysis module.

[0004] In one embodiment, the circuit base plate of the component support and signal transmission module is a long-handled circuit board, the probe clamp of the component support and signal transmission module is a combination of a circuit board and a probe, and the upper surface of the circuit base plate has a recessed groove for fixing and installing the sensitive element.

[0005] In one embodiment, the sealed container of the humidity generating module has a T-shaped cutout at the top for fixing the component support, the circuit board of the signal transmission module, and the target object. In one embodiment, the operation steps are as follows:

[0006] A component supports and signals the transmission module (3) to fix the sensitive element;

[0007] The sealed container (5) of the humidity generating module (1) is left to stand for more than 8 hours until the preset humidity is reached;

[0008] C. Distance generation module (2) adjusts and maintains the horizontal distance between the sensitive element and the target object (8) at the preset distance;

[0009] The D acquisition and analysis module (4) inputs AC excitation and acquires the output of the sensitive impedance;

[0010] E. Repeat steps C and D until the maximum preset distance is reached;

[0011] F switches the sealed container (5) of the humidity generating module (1) and repeats steps B, C, D and E until the preset maximum humidity is reached.

[0012] In one embodiment, the acquisition and analysis module (4) receives AC excitation of 1vAC to 5vAC, 100Hz to 100MHz.

[0013] In one embodiment, the preset distance is 0mm to 10mm; the preset humidity is 5%RH to 90%RH.

[0014] In one embodiment, the acquisition time of the impedance output of the sensitive element in step D is more than 600 seconds.

[0015] The beneficial effects of the experimental platform used in the above-mentioned humidity distance sensitivity study:

[0016] (1) Different humidity environments are generated by different humidity generating liquids, resulting in stable humidity and low cost;

[0017] (2) Place both the sensitive element and the target object inside the humidity generating bottle, and ensure that the sensitive element is parallel to the target object by sealing the T-shaped cutout at the top of the container;

[0018] (3) The T-shaped perforated structure at the top of the sealed container ensures the container's airtightness and facilitates wire connection, reducing interference;

[0019] (4) The sensitive element is reliably installed through the component support and signal transmission module, and the humidity sensitive signal inside the sealed container is transmitted to the impedance analysis unit outside the sealed container;

[0020] (5) The experimental platform for studying humidity distance sensitivity can provide accurate, reliable, and controllable distance excitation through the distance generation module, accurate, convenient, and stable humidity excitation through the humidity generation module, and obtain the humidity-impedance and / or distance-impedance characteristics of the sensitive element through the acquisition and analysis module. It can provide an experimental basis for the development of humidity distance sensors and the study of their sensitivity characteristics. Attached Figure Description

[0021] Figure 1 This is a simplified functional diagram of the experimental platform for studying the performance of humidity distance-sensitive elements;

[0022] Figure 2 This is a schematic diagram of the experimental platform for studying the performance of humidity distance-sensitive elements;

[0023] Figure labels: 1 Humidity generation module; 2 Distance generation module; 3 Component support and signal transmission module; 4 Acquisition and analysis module; 5 Sealed container; 6 Two-axis displacement stage; 7 Distance control unit; 8 Target object; 9 Circuit base plate; 10 Probe clamp; 11 Impedance analysis unit; 12 Host computer. Detailed Implementation

[0024] To facilitate understanding of the invention, a more complete description of the invention is provided below, along with preferred embodiments. However, the invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a thorough and complete understanding of the disclosure of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0026] like Figure 1 As shown, the experimental platform for studying the performance of the humidity distance sensing element consists of four parts: humidity generation module 1, distance generation module 2, element support and signal transmission module 3, and acquisition and analysis module 4.

[0027] The humidity generation module 1 is divided into a humidity generation submodule and a humidity maintenance submodule. The humidity generation submodule consists of a humidity generating liquid, and the humidity maintenance submodule consists of a sealed container. The humidity generating liquid is placed in the sealed container 5 to generate and maintain a stable humidity environment. The distance generation module 2 is divided into a distance control submodule and a distance application submodule. The distance control submodule consists of a two-axis displacement stage 6 and a distance control unit 7, and the distance application submodule consists of a target object 8. The target object 8 moves along with the extension plate of the two-axis displacement stage 6 under the control of the distance control unit 7, thereby applying distance excitation to the sensitive element. The element support and signal transmission module 3 is divided into an element support submodule and a signal transmission submodule. The element support submodule consists of a circuit base plate 9 and a probe clamp 10; the signal sensing submodule consists of a signal transmission line; the sensitive element is mounted on the circuit base plate 9 and fixed and connected to the electrode leads of the sensitive element by the probe clamp 10, realizing the fixed installation of the sensitive element and the transmission of signals. The acquisition and analysis module 4 is divided into an impedance acquisition submodule and an impedance analysis submodule. The impedance acquisition submodule consists of an impedance analysis unit 11, which in turn consists of a host computer 12. The impedance analysis unit 11 acquires the impedance information of the sensitive element, performs acquisition and preliminary analysis, and then transfers the data to the host computer 12 for further analysis.

[0028] like Figure 2 As shown, the humidity generating module 1 consists of several sealed containers 5 containing humidity generating liquids; the humidity generating liquids are LiCl, CH3COOK, MgCl2, K2CO3, NaBr, KI, NaCl, KCl and K2SO4, and at a temperature of 20°C, the above humidity generating liquids can generate humidity of 11%RH, 23%RH, 33%RH, 43%RH, 59%RH, 70%RH, 75%RH, 85%RH and 98%RH respectively.

[0029] like Figure 2 The circuit base plate 9 is a long-handled double-sided PCB board with a thickness of 1.6mm. It is composed of two rectangular PCB boards joined together, with dimensions of 50mm×10mm×1.7mm and 85mm×38.5mm×1.7mm respectively. One of the rectangular PCB boards has a recessed groove measuring 35.8mm×50mm×10mm on its upper surface for fixing and mounting the sensitive element. The probe clamp 10 is made of gold-plated elastic probes soldered onto the PCB board to ensure good electrical connection of the sensitive element. The circuit base plate and the probe clamp are connected by M4 through-hole screws. The component support and signal transmission module 3 connects to the electrodes of the sensitive element via the probes on the probe clamp, and then connects to the impedance analysis unit of the impedance acquisition and analysis module 4 via signal connection lines.

[0030] like Figure 2 As shown, the distance generating module 2 consists of a bidirectional movable electric displacement stage 6 (horizontal and vertical), a target object 8, and a distance control unit 7. The range of its two-axis displacement stage 6 is 0mm-15mm, with an accuracy of 5μm. The target object 8 is made of SUS304 stainless steel and has dimensions of 60mm × 60mm × 1mm.

[0031] like Figure 2 As shown, the acquisition and analysis module 4 consists of an impedance analysis unit 11 and a host computer 12. The impedance analysis unit 11 can acquire and perform preliminary analysis of parameters such as impedance, capacitance, inductance, and resistance from 100Hz to 100MHz. The host computer 11 can read the impedance, resistance, capacitance, and other parameters of the sensitive element 9 output by the impedance analysis unit 11, which can be used for further analysis of the impedance and other performance of the sensitive element.

[0032] like Figure 2As shown, the sensitive element is installed between the circuit base plate 9 and the probe clamp 10 of the component support and signal transmission module 3, and remains parallel to the target object 8 of the distance generation module. The tail end of the circuit base plate of the component support and signal transmission module 3 passes through the top of the sealed container and is connected to the impedance analysis unit 11 of the acquisition and analysis module 4 via a shielded wire. The target object 8 of the distance generation module 2 passes through the top of the sealed container 5 and is fixedly connected to the horizontal extension plate of the two-axis displacement stage 6. The distance control unit 7 of the distance generation module 2 controls the two-axis displacement stage 6 and the target object 8 fixedly connected to it to move in the horizontal direction.

[0033] The humidity generating module 1 provides different humidity environments inside the sealed container 5 by changing the humidity generating liquid. The sensitive element and the target object 8 are kept in the set humidity environment. The humidity and distance-impedance sensitive response of the sensitive element are obtained by the acquisition and analysis module 4. Specific Implementation Example 1

[0035] A 50-turn nickel-chromium alloy coil sensing element with a linewidth and line spacing of 1 mm was prepared by thermal evaporation process. The substrate material was single-crystal silicon, and the size was 50 mm × 50 mm.

[0036] Humidity generating liquids, namely LiCl, CH3COOK, MgCl2, K2CO3, NaBr, KI, NaCl, KCl, and K2SO4, were prepared in sealed cylindrical containers with a diameter of 80 mm and a height of 200 mm. The containers were kept at a constant temperature of 24 °C and allowed to stand for 24 hours. The actual humidity values ​​of the humidity generating liquids were then calibrated using a commercial humidity sensor.

[0037] The top of the sealed glass container has a T-shaped cutout (1.7mm×10mm, 10mm×2mm), which is used to fix the long handle of the PCB board of the circuit connection unit and the end of the SUS304 stainless steel target (60mm×60mm×1mm).

[0038] The sensing element is mounted on the PCB circuit board and secured with probe clamps and through-hole screws. The PCB board and the target object are respectively mounted at the T-shaped cutouts on the top of a sealed container containing a supersaturated lithium chloride solution, ensuring the sensing element and target object are parallel. The sealed container is placed on the breadboard base of a two-axis displacement stage, and the target object is moved horizontally by the horizontal axis of the electrically driven two-axis displacement stage. Maintaining the target object parallel to the sensing element mounted on the PCB board, the target object moves at a speed of 1 mm / s within the 0 mm-10 mm range. The humidity and / or distance-impedance response of the sensing element is recorded using an impedance analyzer and a host computer.

[0039] Then, switch the humidity generating liquid bottle and replace LiCl with CH3COOK, MgCl2, K2CO3, NaBr, KI, NaCl, KCl and K2SO4 in sequence. Repeat the above process. Move the target object horizontally at a speed of 1 mm / s using a two-axis displacement stage. At the same time, record the impedance change of the sensitive element in different relative humidity environments as it moves at a speed of 1 mm / s within the 0-10 mm range. Specific Implementation Example 2

[0041] A 30-turn zinc oxide coil sensing element with a linewidth and line spacing of 1.5 mm was prepared by thermal evaporation process. The substrate material was glass, and the size was 50 mm × 50 mm.

[0042] Humidity generating liquids, namely LiCl, CH3COOK, MgCl2, K2CO3, NaBr, KI, NaCl, KCl, and K2SO4, were prepared in sealed cylindrical containers with a diameter of 100 mm and a height of 100 mm. The containers were kept at a constant temperature of 24 °C and allowed to stand for 24 hours. The actual humidity values ​​of the humidity generating liquids were then calibrated using a commercial humidity sensor.

[0043] The top of the sealed acrylic container has a T-shaped cutout (1.7mm×10mm, 10mm×2mm), which is used to fix the long handle of the PCB board of the circuit connection unit and the end of the 304 stainless steel target object (60mm×60mm×1mm).

[0044] The sensing element is mounted on a PCB circuit board and secured with probe clamps and through-hole screws. The PCB circuit board and the target object are respectively mounted on the T-shaped cutout at the top of a sealed container containing a supersaturated lithium chloride solution, ensuring the sensing element and target object are parallel. The sealed container is placed on the breadboard base of a two-axis displacement stage, and the target object is moved horizontally by the horizontal axis of the electrically driven two-axis displacement stage. Maintaining the target object parallel to the sensing element mounted on the PCB board, the target object moves at a speed of 0.5 mm / s within the 0 mm-4 mm range. The humidity and / or distance-impedance response of the sensing element is recorded using an impedance analyzer and a host computer.

[0045] Then, the humidity generating liquid bottle was switched, and LiCl was successively replaced with CH3COOK, MgCl2, K2CO3, NaBr, KI, NaCl, KCl, and K2SO4 solutions. The above process was repeated, using a two-axis displacement stage to move the target object horizontally at a speed of 1 mm / s. Simultaneously, an impedance analyzer was used to record the impedance changes of the sensitive element during movement at a speed of 0.5 mm / s within a distance of 0-4 mm in different relative humidity environments. The above embodiments only illustrate several implementation methods of the present invention, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of the present invention. It should be noted that those skilled in the art can make several modifications and improvements without departing from the concept of the present invention, and these all fall within the protection scope of the present invention. Therefore, the protection scope of this patent should be determined by the appended claims.

Claims

1. An experimental device for the sensitive characteristics of a humidity gap sensor, comprising a humidity generation module (1), a distance generation module (2), a component support and signal transmission module (3), and an acquisition and analysis module (4); the humidity generation module (1) consists of several sealed containers (5) containing humidity generation solutions, and different humidity environments are provided by changing the sealed containers (5) containing different humidity generation solutions; the distance generation module (2) consists of a two-axis displacement stage (6), a distance control unit (7), and a target object (8), the target object (8) being fixedly mounted on the horizontal extension plate of the two-axis displacement stage (6), and the distance control unit (7) controlling the two-axis displacement stage (6) and the target object (8) fixedly mounted on its horizontal extension plate to move horizontally; the acquisition and analysis module (4) consists of an impedance analysis unit (11) and a host computer (12); characterized in that: The component support and signal transmission module (3) consists of a circuit base plate (9), a probe clamp (10), and a signal transmission line. The circuit base plate (9) is a long-handled double-sided PCB board. The upper surface of the circuit base plate (9) is provided with a recessed groove for fixing and installing the sensitive element. The probe clamp (10) is a combination of a circuit board and a probe. The top of the sealed container (5) is provided with a T-shaped cutout. The T-shaped cutout is used for fixing and installing the long-handled part of the circuit base plate (9) and the target object (8). The component support and signal transmission module (3), the sensitive element, and the target object (8) are all located inside the sealed container (5), and the target object (8) and the sensitive element installed on the circuit base plate (9) are always kept parallel. The sensitive element is connected to the impedance analysis unit (11) through the component support and signal transmission module (3) so as to obtain the humidity and / or distance-impedance response of the sensitive element through the acquisition and analysis module (4).

2. The experimental apparatus for the sensitive characteristics of a humidity gap sensor according to claim 1, characterized in that, The T-shaped cutout is used for the fixed installation of the circuit base plate (9) of the component support and signal transmission module and the target object (8); the circuit base plate (9) is composed of two rectangular PCB boards spliced ​​together, and the thickness of the circuit base plate (9) is 1.6mm; the probe clamp (10) is made of gold-plated elastic probes welded on the PCB board, and the circuit base plate (9) and the probe clamp (10) are connected by M4 through-hole screws; the target object (8) is a SUS304 stainless steel target object with a size of 60mm×60mm×1mm; the range of the two-axis displacement stage (6) is 0mm-15mm, and the accuracy is 5μm; the impedance analysis unit (11) is used to obtain impedance, capacitance, inductance and resistance parameters in the range of 100Hz-100MHz.

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