An atomic force microscope probe mounting device

Abstract

The application discloses an atomic force microscope probe mounting device, wherein a scanner comprises a laser light source, a scanning tube and a position adjusting mechanism; an end of the scanning tube away from the laser light source is provided with a scanner mounting seat; the position adjusting mechanism is arranged on a shell of the scanner; the position adjusting mechanism comprises an adjusting piezoelectric tube capable of being controlled to translate and an electromagnetic coil capable of being controlled to flow current; the adjusting piezoelectric tube is movably sleeved outside the scanning tube; the electromagnetic coil is used for magnetically attracting a probe carrier on the adjusting piezoelectric tube or controlling the probe carrier to be magnetically attracted on the scanner mounting seat; at this time, since the laser light source is fixed, fluctuation displacement of the adjusting probe carrier will not be amplified under the same wear condition of a positioning surface, the cantilever can be quickly aligned with the laser, and therefore, large horizontal fluctuation displacement of a laser spot at the probe caused by surface wear of a guiding surface of the position adjusting mechanism is avoided, and the system cannot be quickly adjusted.

Description

Technical Field

[0001] This invention relates to the technical field of atomic force microscopy, and particularly to an atomic force microscopy probe mounting device. Background Technology

[0002] An atomic force microscope (AFM) is an analytical instrument used to study the surface morphology of materials. It investigates the surface structure of materials by detecting the interatomic interactions between the sample surface and the probe tip. When the probe wears out or a new test is required, it needs to be replaced. The replacement procedure involves first removing the old probe from the scanner and then placing the replacement probe onto the scanner. Magnetic adsorption is a method that uses the attraction force of a magnet to fix the probe carrier to the probe mount. The magnetic force on the probe carrier allows it to adhere to the probe mount.

[0003] Because atomic force microscopy uses nanoscale probe tips to detect the shape of the sample surface, probe replacement requires precise positioning of the probe to ensure that the laser used to detect cantilever deflection illuminates the reflective area at the cantilever's tip. However, when replacing the probe, the cantilever's size is only tens of micrometers. Factors such as installation errors between the probe and probe carrier, installation errors between the probe carrier and the mounting base, and scanner reset accuracy can cause the reflective area at the tip of the newly installed probe's cantilever to deviate from the laser axis. Therefore, the laser's position relative to the probe cantilever must be readjusted to accurately align the laser with the reflective layer at the cantilever's tip, maximizing the intensity of the reflected light illuminating and reflecting off the cantilever. Generally, probe installation and laser adjustment are performed sequentially. After installing the probe carrier, the laser source position at the scanner's fixed end is adjusted to align the laser axis with the probe cantilever's reflective area.

[0004] The closest existing technology:

[0005] For example, US Patent Application No. 6021665A discloses a structure capable of adjusting the position of a laser source. Its position adjustment mechanism includes a fixing system, a moving system, and a driving system. The moving system includes a movable element and multiple spheres. The laser source is mounted on the movable element, and the spheres are rotatably positioned between the guide surfaces of the movable element and the fixing element. This allows the movable element to move along the guide surface of the fixing element under the action of the driving system, achieving the function of aligning the laser optical axis with the probe cantilever.

[0006] For example, US Patent No. 8099793B2 discloses a scanning probe microscope with an automatic probe replacement function. Its probe replacement technology system includes a probe carrier, a mounting base, and a tray. The probe carrier is installed and removed from the tray and the mounting base using magnetic force. When the magnetic force on the mounting base side is greater, the probe carrier is installed on the upper carrier holder. When the magnetic force on the tray side is greater, the probe carrier is removed and placed on the tray.

[0007] However, existing technologies have the following drawbacks:

[0008] The existing method of aligning the laser axis with the probe cantilever by adjusting the position of the laser source has the problem of laser alignment difficulties and increased adjustment difficulty after multiple adjustments. In the existing technology, the laser source position is constrained by the guide surface and oscillates around the geometric center of the guide surface contour. The contact between the guide surface and the rolling ball is a point contact, with a small contact area and concentrated stress. After long-term and repeated use, micro-wear will occur at the contact point between the guide surface and the ball, resulting in recessed structural areas on the guide surface. Areas with more contact times tend to have deeper recesses, while areas with fewer contact times tend to have shallower recesses. Although the existing technology uses multiple balls to contact the guide surface, due to the influence of processing and installation errors, each ball and the guide surface will have multiple non-equal and irregular wear areas. During the adjustment process, as each sphere rolls through areas of varying depths, the displacement of the light source changes non-linearly. The displacement of the light source at the fixed end amplifies the displacement of the laser spot at the probe carrier at the free end. Because the probe is relatively small, only 30-50 micrometers wide, the laser spot may rapidly jump from one side of the probe cantilever to the other during adjustment, failing to move smoothly across the cantilever. This necessitates multiple adjustments of the light source position to center the spot within the probe cantilever's reflection area. Consequently, this increases the difficulty of laser adjustment, requires more time to complete the laser alignment operation, and reduces adjustment efficiency.

[0009] In probe replacement systems, existing technologies can only adsorb and install probe carriers; they cannot automatically adjust the position of the probe cantilever. After the probe carrier with the probe is adsorbed onto the scanner mount under the influence of a magnetic field, the protrusions on the mount and the grooves on the probe carrier interact, constraining the probe carrier and preventing adjustment of the cantilever's position relative to the laser axis. A separate light source position adjustment system is still required. There is still room for improvement in probe replacement systems. Summary of the Invention

[0010] The purpose of this invention is to provide an atomic force microscope probe mounting device to achieve magnetic adsorption mounting of the probe carrier during probe replacement and to align the cantilever reflection area with the laser optical axis by adjusting the probe carrier.

[0011] To address the aforementioned technical problems, this invention provides an atomic force microscope probe mounting device, comprising a supply mechanism and a scanner. A probe carrier is placed on the supply mechanism, which is also equipped with a photoelectric sensor. The scanner is positioned above the supply mechanism and includes a laser light source, a scanning tube, and a position adjustment mechanism. The laser light source is aligned with the cavity of the scanning tube. A scanner mounting base is located at the end of the scanning tube away from the laser light source. The position adjustment mechanism is mounted on the scanner's housing and includes an adjustable piezoelectric tube capable of translational control and an electromagnetic coil with controllable inflow current. The adjustable piezoelectric tube is movably fitted over the scanning tube. The electromagnetic coil is used to adjust the inflow current to magnetically attract the probe carrier to the adjustable piezoelectric tube, or to control the probe carrier to magnetically attract to the scanner mounting base.

[0012] In one embodiment, the scanning tube is a piezoelectric ceramic tube that can be controlled to translate and extend.

[0013] In one embodiment, the scanning tube includes a translational section and a telescopic section connected to each other. The translational section has four sets of translational piezoelectric elements around its periphery, and the telescopic section has a ring of telescopic piezoelectric elements around its periphery.

[0014] In one embodiment, the adjusting piezoelectric tube has a magnetically attracted guide on the side adjacent to the electromagnetic coil, the guide being fitted over the scanning tube.

[0015] In one embodiment, the position adjustment mechanism further includes a mounting sleeve that is fitted over the scanning tube. The mounting sleeve is fitted with the electromagnetic coil, the guide, and the adjusting piezoelectric tube, and the port of the mounting sleeve is provided with a flange that limits the movement of the guide.

[0016] In one embodiment, a spring is compressed between the electromagnetic coil and the guide, with both ends of the spring connected and fixed to the electromagnetic coil and the guide, respectively.

[0017] In one embodiment, the adjusting piezoelectric tube is provided with four sets of translational adjusting piezoelectric elements around its periphery.

[0018] In one embodiment, the end of the adjusting piezoelectric tube away from the electromagnetic coil is provided with an annular positioning pin mounting component, and the positioning pin mounting component is provided with multiple positioning pins; the probe carrier is provided with a laser through hole, a probe receiving groove and positioning holes, the probe receiving groove is arranged adjacent to the laser through hole, and the multiple positioning holes are arranged around the periphery of the laser through hole, and the setting positions of the multiple positioning holes match the setting positions of the multiple positioning pins.

[0019] In one embodiment, the locating pin includes a support section, a locating section, and a guide section connected in sequence; the support section is connected to the locating pin mounting component, and the radial dimension of the support section is greater than the radial dimension of the locating section; the radial dimension of the locating section is consistent with the diameter of the locating hole; the end of the guide section is a frustum structure.

[0020] In one embodiment, the atomic force microscope probe mounting device further includes a bidirectional moving platform and a lifting mechanism; the bidirectional moving platform is located below the scanner, and the bidirectional moving platform is equipped with the supply mechanism, the bidirectional moving platform being used to control the supply mechanism to perform bidirectional translation; the lifting mechanism is connected to the scanner, and the lifting mechanism being used to control the scanner to perform lifting and lowering movements.

[0021] The beneficial effects of this invention are as follows:

[0022] Since the position adjustment mechanism includes an adjustable piezoelectric tube that can be translated and an electromagnetic coil with controllable inflow current, and the electromagnetic coil is used to adjust the inflow current to magnetically attract the probe carrier to the adjustable piezoelectric tube, the probe carrier can be translated by using the adjustable piezoelectric tube after it is magnetically attracted to the adjustable piezoelectric tube, thereby aligning the probe cantilever reflection area on the probe carrier with the laser optical axis.

[0023] This invention employs a novel replacement and adjustment method, integrating laser alignment into the probe installation process. This effectively solves the problem in existing systems where adjusting the laser source to align the cantilever results in amplified spot displacement along the optical axis, making the adjustment process difficult. By adjusting the probe carrier instead of the light source, the laser source's position is fixed. Given the same wear on the positioning surface, the fluctuation displacement caused by adjusting the probe carrier is not amplified, allowing for faster cantilever alignment with the laser. This avoids large horizontal fluctuations in the laser spot at the probe caused by wear on the guide surface of the position adjustment mechanism, preventing the system from quickly completing the adjustment. Attached Figure Description

[0024] To more clearly illustrate the technical solution of the present invention, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure provided in an embodiment of the present invention;

[0026] Figure 2 yes Figure 1 A schematic diagram of the scanner structure;

[0027] Figure 3 yes Figure 2 A schematic diagram of the scanning tube structure;

[0028] Figure 4 yes Figure 2 Schematic diagram of the position adjustment mechanism;

[0029] Figure 5 yes Figure 4 A schematic diagram of another spring setting method;

[0030] Figure 6 yes Figure 1 A schematic diagram of the drive system's connection relationships;

[0031] Figure 7 yes Figure 2 A schematic diagram of the probe carrier structure;

[0032] Figure 8 yes Figure 1 A schematic diagram of the supply chain structure;

[0033] Figure 9 This is a schematic diagram of the operation state provided in the embodiment of the present invention. Figure 1 ;

[0034] Figure 10 This is a schematic diagram of the operation state provided in the embodiment of the present invention. Figure 2 ;

[0035] Figure 11 This is a schematic diagram of the operation state provided in the embodiment of the present invention. Figure 3 ;

[0036] Figure 12 This is a schematic diagram of the operation state provided in the embodiment of the present invention. Figure 4 ;

[0037] Figure 13 This is a schematic diagram of the photoelectric sensor structure provided in an embodiment of the present invention;

[0038] Figure 14 This is a schematic diagram of the probe cantilever structure provided in an embodiment of the present invention;

[0039] Figure 15 This is a schematic diagram of the optical axis alignment process provided in an embodiment of the present invention. Figure 1 ;

[0040] Figure 16 This is a schematic diagram of the optical axis alignment process provided in an embodiment of the present invention. Figure 2 ;

[0041] Figure 17This is a flowchart illustrating the optical axis alignment principle provided in an embodiment of the present invention.

[0042] The attached figures are labeled as follows:

[0043] 10. Supply mechanism; 11. Photoelectric sensor; 12. Base; 13. Buffer; 14. Limiting structure; 15. Step hole;

[0044] 20. Scanner; 21. Laser source; 22. Scanning tube; 221. Scanner mounting base; 222. Translation section; 223. Telescopic section; 224. Translation piezoelectric element; 225. Telescopic piezoelectric element; 23. Position adjustment mechanism; 231. Adjustment piezoelectric tube; 232. Electromagnetic coil; 233. Guide; 234. Mounting sleeve; 235. Flanged edge; 236. Spring; 237. Translation adjustment piezoelectric element; 238. Positioning pin mounting part; 239. Positioning pin; 2391. Support section; 2392. Positioning section; 2393. Guide section;

[0045] 30. Probe carrier; 31. Limiting groove; 32. Laser through hole; 33. Probe receiving groove; 34. Positioning hole;

[0046] 40. Drive system; 41. Two-way moving platform; 42. Lifting mechanism;

[0047] 50. Cantilever;

[0048] 60. Light spot. Detailed Implementation

[0049] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0050] This invention provides an atomic force microscope probe mounting device, the implementation of which is as follows: Figures 1 to 17 As shown, the scanner includes a supply mechanism 10 and a scanner 20. A probe carrier 30 is placed on the supply mechanism 10, and a photoelectric sensor 11 is provided on the supply mechanism 10. The scanner 20 is located above the supply mechanism 10 and includes a laser light source 21, a scanning tube 22, and a position adjustment mechanism 23. The laser light source 21 is aligned with the cavity of the scanning tube 22. A scanner mounting base 221 is provided at the end of the scanning tube 22 away from the laser light source 21. The position adjustment mechanism 23 is located on the housing of the scanner 20 and includes an adjustable piezoelectric tube 231 that can be translated and an electromagnetic coil 232 with controllable inflow current. The adjustable piezoelectric tube 231 is movably fitted over the scanning tube 22. The electromagnetic coil 232 is used to adjust the inflow current to magnetically attract the probe carrier 30 to the adjustable piezoelectric tube 231, or to control the probe carrier 30 to magnetically attract to the scanner mounting base 221.

[0051] In application, the probe is placed on the probe carrier 30. Specifically, the probe can be glued to the probe carrier 30, or the probe can be clamped to the probe carrier 30 by a spring clip. After the probe carrier 30 and the scanner 20 are aligned, the electromagnetic coil 232 is powered, thereby attracting the entire probe carrier 30 to the underside of the adjusting piezoelectric tube 231. Then, by controlling the adjustment piezoelectric tube 231 with power, the adjustment piezoelectric tube 231 can drive the probe carrier 30 to move back, forth, left, and right. By using the photoelectric sensor 11 to monitor the optical axis alignment, the optical axis alignment of the cantilever 50 reflection area of ​​the probe on the probe carrier 30 with the laser source 21 can be completed.

[0052] Finally, after the reflective area of ​​the probe cantilever 50 is aligned with the optical axis of the laser source 21, the current flowing through the electromagnetic coil 232 is increased, causing the adjusting piezoelectric tube 231 to move the probe carrier 30 upward together until the probe carrier 30 is attracted to the scanner mounting base 221 and the probe carrier 30 and the adjusting piezoelectric tube 231 are separated. Then, the scanning tube 22 can be used to move the probe carrier 30 to perform the required scanning work.

[0053] It should be noted that supply institutions 10, such as Figure 1 , Figure 2 , Figure 7 and Figure 8 As shown, its function is to place the probe carrier 30 to be installed or disassembled, detect the position of the laser spot center, and provide feedback information to complete the probe installation and laser alignment work together with the position adjustment mechanism 23. The main structure includes a base 12, a buffer 13, a limiting structure 14, and a photoelectric sensor 11. The base 12 is cylindrical and is used to support the entire supply mechanism 10. A stepped hole 15 is provided on the upper surface of the supply mechanism 10. The larger diameter and shallower depth hole is used to accommodate the probe carrier 30. The depth of this hole is less than the thickness of the probe carrier 30. A limiting structure 14 is provided on its side wall, which cooperates with the limiting groove 31 on the probe carrier 30. The smaller diameter and deeper depth hole is used to install the photoelectric sensor 11. The photoelectric sensor 11 is a four-quadrant photoelectric sensor.

[0054] like Figure 13 As shown, the photoelectric sensor 11 divides the circular photosensitive surface into four regions: A, B, C, and D. Each quadrant can be regarded as an independent photodiode. When the laser spot shines on the photosensitive surface of the photoelectric sensor 11, each quadrant generates a photocurrent of a corresponding magnitude according to the energy of the spot received in the region. The center position of the spot is obtained by detecting the output current or voltage of each quadrant.

[0055] A circular groove is provided on the stepped hole 15 to accommodate a ring-shaped buffer 13. The buffer 13 is made of plastic and provides cushioning for the probe carrier 30 during disassembly.

[0056] Clearly, this embodiment uses a new replacement and adjustment method, integrating the laser alignment operation into the probe installation process. This effectively solves the problem in existing systems where the laser spot displacement fluctuation is amplified along the optical axis when adjusting the laser source 21 to align the cantilever 50, making the adjustment process more difficult. By adjusting the probe carrier 30 instead of the light source, the laser source 21 is fixed in position. Therefore, even with the same wear on the positioning surface, the fluctuation displacement caused by adjusting the probe carrier 30 will not be amplified. This allows for faster alignment of the cantilever 50 with the laser, avoiding large horizontal fluctuations in the laser spot at the probe due to wear on the guide surface of the position adjustment mechanism 23, and preventing situations where the system cannot quickly complete the adjustment.

[0057] like Figure 2 and Figure 3 As shown, in this embodiment, the scanning tube 22 is preferably configured as a piezoelectric ceramic tube that can be controlled to translate and extend.

[0058] It should be noted that piezoelectric ceramics are a type of information-functional ceramic material capable of converting mechanical energy and electrical energy into each other—the piezoelectric effect. In addition to piezoelectricity, piezoelectric ceramics also possess dielectric properties and elasticity, and have been widely used in medical imaging, acoustic sensors, acoustic transducers, ultrasonic motors, and other fields. Piezoelectric ceramics utilize the polarization caused by the relative displacement of the positive and negative charge centers within the material under mechanical stress, resulting in bound charges of opposite signs on the surfaces at both ends of the material—the piezoelectric effect. They possess sensitive characteristics and are mainly used in the manufacture of ultrasonic transducers, underwater acoustic transducers, electroacoustic transducers, ceramic filters, ceramic transformers, ceramic frequency discriminators, high-voltage generators, infrared detectors, surface acoustic wave devices, electro-optic devices, ignition and detonation devices, and piezoelectric gyroscopes. Beyond their applications in high-tech fields, they serve people in everyday life, striving to create a better life for everyone.

[0059] For example, in this embodiment, the scanning tube 22 includes a translation section 222 and a telescopic section 223 connected to each other. The translation section 222 is provided with four sets of translation piezoelectric elements 224 around its periphery, and the telescopic section 223 is provided with a ring of telescopic piezoelectric elements 225 around its periphery.

[0060] Therefore, when the two sets of translational piezoelectric elements 224 are controlled to input opposite voltages, the bending control of the scanning tube 22 can be realized, thereby meeting the requirement of translational control of the scanning tube 22; while when voltages in different directions are input to the telescopic piezoelectric element 225, the telescopic control of the scanning tube 22 can be realized, thereby meeting the requirement of telescopic control of the scanning tube 22.

[0061] like Figure 2 and Figure 4 As shown, in this embodiment, a magnetically attracted guide 233 is preferably provided on the side of the adjusting piezoelectric tube 231 adjacent to the electromagnetic coil 232, and the guide 233 is sleeved on the outside of the scanning tube 22.

[0062] For example, the guide 233 can be made of a magnetically attracted metal ring and fitted around the scanning tube 22. So, with this arrangement, once the electromagnetic coil 232 is energized to form a magnetic field, it can generate a magnetic attraction force on the guide 233, thereby driving the adjustment piezoelectric tube 231 to move together.

[0063] It should be noted that, in order to make the movement of the guide 233 and the adjusting piezoelectric tube 231 smoother, such as Figure 2 and Figure 4 As shown, in this embodiment, the position adjustment mechanism 23 is preferably provided to further include a mounting sleeve 234. The mounting sleeve 234 is fitted over the scanning tube 22. The mounting sleeve 234 is fitted with an electromagnetic coil 232, a guide 233, and an adjusting piezoelectric tube 231. The port of the mounting sleeve 234 is provided with a flange 235 to limit the movement of the guide 233.

[0064] In this embodiment, the upper end of the mounting sleeve 234 is fixedly connected to the scanner 20. The inner diameter of the mounting sleeve 234 is larger than the outer diameter of the scanning tube 22, so that there is sufficient space between the mounting sleeve 234 and the scanning tube 22 to facilitate the scanning tube 22 to perform translation, extension and retraction and other activities.

[0065] Moreover, the electromagnetic coil 232 can be stably fixed outside the mounting sleeve 234 at this time, and the guide 233 and the adjusting piezoelectric tube 231 can also move smoothly against the outer wall of the mounting sleeve 234. When the guide 233 moves down to the lowest position, the guide 233 will abut against the flange 235, thereby preventing the guide 233 and the adjusting piezoelectric tube 231 from moving further down, thus limiting the movement stroke of the guide 233 and the adjusting piezoelectric tube 231.

[0066] It should be noted that, in order to make the movement control of the probe carrier 30 more stable, this embodiment preferably provides a spring 236 compressed between the electromagnetic coil 232 and the guide 233, with the two ends of the spring 236 connected and fixed to the electromagnetic coil 232 and the guide 233 respectively.

[0067] For example, in Figure 4 As shown, spring 236 is fitted over mounting sleeve 234. When electromagnetic coil 232 generates a magnetic field to attract guide 233, spring 236 can buffer the movement, preventing the guide 233 from moving too fast and causing an impact, thus providing important protection for all components. Similarly, other methods can also be used. Figure 5As shown, by replacing the spring 236 with multiple springs 236 arranged around the periphery of the mounting sleeve 234, the same effect can be achieved.

[0068] It should be noted that the working principle of adjusting the piezoelectric tube 231 is basically the same as that of the scanning tube 22, such as... Figure 4 As shown, in this embodiment, the piezoelectric tube 231 is preferably provided with four sets of translational adjustment piezoelectric elements 237 around its periphery.

[0069] Therefore, when the two sets of piezoelectric elements 237 are controlled to input opposite voltages, the bending control of the piezoelectric tube 231 can be realized, thereby satisfying the requirement of the piezoelectric tube 231 to perform translation control.

[0070] Specifically, since the working principle of the piezoelectric tube 231 and the scanning tube 22 is the same, this embodiment also preferably sets them to share the same drive system 40, such as... Figures 2 to 4 ,as well as Figure 6 As shown, at this time, the four sets of translation adjustment piezoelectric elements 237 of the adjustment piezoelectric tube 231 correspond to the positions of the four translation piezoelectric elements 224 of the scanning tube 22, and are driven by the same driving system 40. When the position of the probe carrier 30 is adjusted, the driving system 40 applies a driving voltage to the adjustment piezoelectric tube 231. When scanning, the driving system 40 applies a driving voltage to the scanning tube 22, thereby improving the utilization rate of the driving system 40.

[0071] To better achieve the positioning and installation of the probe carrier 30, such as Figure 2 , Figure 4 and Figure 7 As shown, in this embodiment, the end of the piezoelectric tube 231 away from the electromagnetic coil 232 is preferably provided with an annular positioning pin mounting part 238, and the positioning pin mounting part 238 is provided with multiple positioning pins 239; the probe carrier 30 is provided with a laser through hole 32, a probe receiving groove 33 and positioning holes 34, the probe receiving groove 33 is arranged adjacent to the laser through hole 32, and the multiple positioning holes 34 are arranged around the laser through hole 32, and the positions of the multiple positioning holes 34 match the positions of the multiple positioning pins 239.

[0072] After adopting this setting method, if it is necessary to adsorb the probe carrier 30, an alignment operation can be performed first so that multiple positioning pins 239 are aligned with multiple positioning holes 34 respectively. When adsorbing the probe carrier 30, multiple positioning pins 239 will pass through multiple positioning holes 34 respectively, thereby achieving accurate positioning and adsorption of the probe carrier 30.

[0073] Furthermore, such as Figure 4 and Figure 7As shown, in this embodiment, the positioning pin 239 preferably includes a support section 2391, a positioning section 2392, and a guide section 2393 connected in sequence; the support section 2391 is connected to the positioning pin mounting part 238, and the radial dimension of the support section 2391 is larger than the radial dimension of the positioning section 2392; the radial dimension of the positioning section 2392 is consistent with the diameter of the positioning hole 34; the end of the guide section 2393 is a frustum structure.

[0074] With this setup, once the electromagnetic coil 232 attracts the probe carrier 30, the probe carrier 30 will first be fixed to the multiple positioning pins 239. At this time, the frustum structure of the guide section 2393 can easily pass through the positioning hole 34. The outer diameter of the positioning section 2392 matches the inner diameter of the positioning hole 34, thus achieving a stable and precise installation of the probe carrier 30 on the positioning pins 239. Finally, the probe carrier 30 abuts against the support section 2391 to complete the installation and positioning of the probe carrier 30.

[0075] If the current flowing through the electromagnetic coil 232 is continuously increased, the probe carrier 30 can be moved upward until it comes into contact with the scanner mounting base 221. Then, each positioning pin 239 will continue to move upward to release the mounting relationship with the probe carrier 30, and the probe carrier 30 will be stably attached to the scanner mounting base 221, thereby facilitating the scanning tube 22 to move the probe carrier 30 for scanning operations.

[0076] like Figure 1 As shown, this embodiment preferably includes a bidirectional moving platform 41 and a lifting mechanism 42 in the atomic force microscope probe mounting device. The bidirectional moving platform 41 is located below the scanner 20 and is equipped with a supply mechanism 10. The bidirectional moving platform 41 is used to control the supply mechanism 10 to perform bidirectional translation. The lifting mechanism 42 is connected to the scanner 20 and is used to control the scanner 20 to perform lifting and lowering movements.

[0077] With this setup, the probe carrier 30 can be moved by the bidirectional moving platform 41, and the scanner 20 can be moved up and down by the lifting mechanism 42 to meet the needs of alignment and other applications.

[0078] To better understand the solution, a more detailed operating procedure will be provided below:

[0079] Step 1: As Figure 1 , Figure 7 and Figure 9As shown; when probe installation is required, the bidirectional moving platform 41 drives the supply mechanism 10 to carry the probe carrier 30 to directly below the scanner 20. The lifting mechanism 42 drives the scanner 20 to descend, so that the distance between the lower end face of the positioning pin 239 and the upper surface of the probe carrier 30 is s. The distance s ensures that the positioning pin 239 can be successfully inserted into the positioning hole 34 during the upward movement of the probe carrier 30. s can take positive, negative, or 0 values. At this time, the electromagnetic coil 232 is not energized, the spring 236 is in the minimum compression state, and the guide 233 is in the lowest position.

[0080] Step 2: As Figure 10 As shown; the current supplied to the electromagnetic coil 232 is I1(t). In the magnetic field generated by the electromagnetic coil 232, the guide 233 and the probe carrier 30 are subjected to the magnetic force and have an upward tendency. Since the weight of the probe carrier 30 is less than the overall weight of the position adjustment mechanism, and the position adjustment mechanism is also subjected to the elastic force of the spring 236, the probe carrier 30 will be attracted to the support section 2391 of the positioning pin first.

[0081] Step 3: After the probe carrier 30 is attracted away from the supply mechanism 10, the current at both ends of the electromagnetic coil 232 is kept at I1(t)max, and the laser alignment adjustment process is started. The drive system 40 controls the adjustment piezoelectric tube 231 to make the probe carrier 30 move in the horizontal XY direction. The photoelectric sensor 11 of the supply mechanism 10 detects the laser signal during the adjustment process, and finally completes the alignment operation between the reflective area of ​​the cantilever 50 and the laser optical axis. For details of the adjustment steps, please refer to the subsequent laser adjustment section.

[0082] Step 4: As Figure 11 As shown; after the laser adjustment step is completed, the current flowing through the electromagnetic coil 232 is gradually increased to I2(t). At this time, the magnetic force on the guide 233 and the probe carrier 30 increases, and the upward magnetic attraction force is greater than the sum of the elastic force of the spring 236, the gravity of the position adjustment mechanism, and the gravity of the probe carrier 30, causing the guide 233 to move upward. Due to the buffering effect of the spring 236, the spring 236 is compressed during the upward movement of the guide 233, and the elastic force gradually increases. Thus, by controlling the coil current I2(t), the probe carrier 30 can be slowly moved upward until the upper surface of the probe carrier 30 contacts the scanner mounting base 221. By using the compression spring 236 to provide a force opposite to the direction of movement, the increased magnetic force caused by the shortening distance between the guide 233 and the electromagnetic coil 232 during the upward movement of the probe carrier 30 is avoided, which would lead to an increased movement speed and cause the probe carrier 30 to collide and impact with the scanner mounting base 221, damaging the probe and mating surfaces.

[0083] Step 5: As Figure 1 and Figure 12As shown; when the probe carrier 30 contacts the scanner mounting base 221, the probe carrier 30 stops moving upward and is fixed on the scanner mounting base 221 under the action of magnetic force. At this time, the current supplied to the electromagnetic coil 232 is I3(t), causing the guide 233 to continue moving upward, eventually causing the positioning pin 239 to disengage from the positioning hole of the probe carrier 30. The lifting mechanism 42 drives the scanner 20 to rise, and the bidirectional moving platform 41 moves to drive the sample stage to directly below the scanner 20. The system performs scanning, and the electromagnetic coil 232 maintains I3(t)max until the scanning ends.

[0084] Step 6: When the scanning is finished and the probe needs to be disassembled, the bidirectional moving platform 41 drives the supply mechanism 10 to move directly below the scanner 20. The lifting mechanism 42 drives the scanner 20 to descend to a position where the distance between the lower surface of the probe carrier 30 and the supply mechanism 10 is s1. The value of s1 is such that the probe carrier 30 falls from the height of s1 onto the buffer 13 of the supply mechanism 10 without damaging the probe carrier 30 or the probe. The current of the electromagnetic coil 232 gradually decreases to 0. The shrinkage process is the reverse process of I3(t), I2(t), and I1(t) in sequence, causing the probe carrier 30 to detach from the scanner mounting base 221 and the positioning pin 239 and fall back into the supply mechanism 10.

[0085] In addition, the laser adjustment process is as follows:

[0086] like Figure 13 As shown; the diameter of the photoelectric sensor 11 is D, the diameter of the light spot is d, and the center position coordinates of the light spot 60 are a(x0, y0).

[0087] According to the classic circular model spot localization algorithm, the laser spot is equivalent to a uniformly distributed cylinder. The light energy received in each quadrant is proportional to the area of ​​the spot mapped on the photosensitive surface of the detector. The position coordinates of the spot center are calculated using the following formula.

[0088]

[0089] In the above formula, k is the proportionality constant, and U A U B U C U D This represents the output voltage value of each region under laser irradiation.

[0090] like Figure 14As shown; the width of the cantilever 50 is W, the length of the cantilever 50 is L, the laser reflecting surface is L1, and the length of the non-laser reflecting surface is L2. The probe microcantilever 50 has a symmetrical structure in the length direction, with the probe tip located on the axis of symmetry. To improve the probe's reflectivity, a reflective layer is usually coated on the back of the cantilever 50. The purpose of laser adjustment is to ensure that the central axis o of the laser passes through the probe's axis of symmetry l in the width direction and is located at L1 / 2 of the reflective area in the length direction.

[0091] When the cantilever 50 comes into contact with the laser beam from one side, the contact part of the cantilever 50 blocks the light that was originally shining on the photodetector. Therefore, the current coordinate value A(x, y) calculated by the system will change relative to the initial value a(x0, y0) when it is not blocked.

[0092] like Figure 15 As shown, when the cantilever 50 moves along the Y direction until its axis intersects the central axis of the laser, the area of ​​light illuminating the photoelectric sensor 11 on both sides of the cantilever 50 axis is equal, and the calculated center coordinate y of the light spot is equal to the initial value y0. During the movement of the cantilever 50 from the positive Y direction (moving upwards) to the axis of symmetry passing through the initial y0, when one side of the cantilever 50 just begins to contact the laser beam, the currently calculated y coordinate will increase. The center point A(x, y) of the light spot relative to the initial center point a(x0, y0) in the positive Y direction will shift by a distance T (T = y - y0). When the other side of the cantilever 50 also contacts the laser beam, the deviation T reaches its maximum value. As the cantilever 50 continues to move upwards, the deviation gradually decreases. When the axis passes through the center of the light spot, T = 0, i.e., y = y0. The deviation is reversed when moving in the negative direction.

[0093] like Figure 16 As shown, when the cantilever 50 moves along the negative X direction until its front edge is tangent to the surface of the light column, if it continues to move, the area of ​​the light spot illuminating the photoelectric sensor 11 will not change, and the calculated center coordinate x value will not change. Before this, when the front end of the cantilever 50 is located in the positive direction of a(x0, y0), the calculated coordinate A(x, y) will be offset by a distance T1 (T1 = x - x0) relative to a(x0, y0) in the negative X direction. When the front end of the cantilever 50 passes through the initial light spot center, the offset distance T1 gradually decreases until it becomes 0 when tangent.

[0094] Based on the above principles, the specific adjustment steps are as follows:

[0095] Step 1: Calculate the initial coordinates (x0, y0) of the light spot to obtain the center value of the light spot before adjustment.

[0096] Step 2: Move the probe back and forth a distance D along the Y direction at a speed V0 once. Determine if the y-coordinate of the current light spot center changes positive or negative. If it doesn't change, the light spot and the probe cantilever 50 do not intersect. Then determine if the back-and-forth movement of the distance D is complete. If it has moved the distance D, the laser is not in the current probe movement area. If the y-coordinate changes, the probe intersects with the laser. In this case, reduce the probe's moving speed and move the probe to the center line of the cantilever 50, aligning it with the laser axis to complete the y-direction alignment.

[0097] Step 3: Compare the current x-coordinate with x0.

[0098] If the two values ​​are equal, it means that the laser center is located on the cantilever 50 and the edge of the laser spot does not intersect with the front end of the cantilever 50. At this time, the probe should move along the positive X direction at a speed of V1 until the edge of the laser spot exposes the front end of the cantilever 50. This is numerically represented by a change in x. At this time, stop moving in the positive X direction and then move the probe along the negative X direction to compensate for the distance s0, so that the laser spot will not intersect with the front end of the probe cantilever 50 and can compensate for the deformation margin of the cantilever 50.

[0099] If the two values ​​are not equal, it means that the area of ​​the laser beam in the negative X direction at the initial laser spot center a(x0, y0) is not equal to the area in the positive X direction. The laser beam in the positive X direction is blocked by the cantilever 50. At this time, let the probe move along the negative X direction at a speed V1 so that the laser beam in the negative X direction is also blocked by the probe cantilever 50. When the movement stops at x equal to x0, the probe moves along the negative X direction to compensate for the distance s0. The laser alignment adjustment is then completed.

[0100] The detailed adjustment flowchart is as follows: Figure 17 As shown.

[0101] The above description represents the preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the present invention, and these improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. An atomic force microscope probe mounting device, characterized in that, This includes supply organizations and scanners; The supply mechanism is equipped with a probe carrier and a photoelectric sensor. The scanner is positioned above the supply mechanism and includes a laser source, a scanning tube, and a position adjustment mechanism. The laser source is aligned with the cavity of the scanning tube. A scanner mounting base is provided at the end of the scanning tube away from the laser source. The position adjustment mechanism is located on the outer shell of the scanner and includes an adjustable piezoelectric tube capable of translational control and an electromagnetic coil with controllable inflow current. The adjustable piezoelectric tube is movably fitted around the scanning tube. The electromagnetic coil is used to adjust the inflow current to magnetically attract the probe carrier to the adjustable piezoelectric tube, or to control the probe carrier to magnetically attract to the scanner mounting base. In application, the electromagnetic coil is powered, and the probe carrier is adsorbed below the adjusting piezoelectric tube. By controlling the adjustment piezoelectric tube to move the probe carrier back and forth and left and right, the photoelectric sensor is used to monitor the optical axis alignment, and the cantilever reflection area of ​​the probe on the probe carrier is aligned with the optical axis of the laser source. After the cantilevered reflection area of ​​the probe is aligned with the optical axis of the laser source, the current flowing through the electromagnetic coil is increased, causing the adjusting piezoelectric tube to move the probe carrier upward together until the probe carrier is attracted to the scanner mounting base and the probe carrier and the adjusting piezoelectric tube are separated. Then, the scanning tube is used to move the probe carrier to perform the required scanning work. The scanning tube is a piezoelectric ceramic tube that can be controlled to translate and extend. The adjusting piezoelectric tube is provided with a magnetically attracted guide on the side adjacent to the electromagnetic coil, and the guide is sleeved on the outside of the scanning tube; The end of the adjusting piezoelectric tube away from the electromagnetic coil is provided with an annular positioning pin mounting component, and the positioning pin mounting component is provided with multiple positioning pins; The probe carrier is provided with a laser through hole, a probe receiving groove and positioning holes. The probe receiving groove is arranged adjacent to the laser through hole, and a plurality of positioning holes are arranged around the laser through hole. The positions of the plurality of positioning holes match the positions of the plurality of positioning pins.

2. The atomic force microscope probe mounting device according to claim 1, characterized in that, The scanning tube includes a translation section and a telescopic section connected to each other. The translation section has four sets of translation piezoelectric elements around its periphery, and the telescopic section has a ring of telescopic piezoelectric elements around its periphery.

3. The atomic force microscope probe mounting device according to claim 1, characterized in that, The position adjustment mechanism further includes a mounting sleeve, which is fitted over the scanning tube. The mounting sleeve is fitted with the electromagnetic coil, the guide, and the adjusting piezoelectric tube, and the port of the mounting sleeve is provided with a flange to limit the movement of the guide.

4. The atomic force microscope probe mounting device according to claim 3, characterized in that, A spring is compressed between the electromagnetic coil and the guide, and the two ends of the spring are respectively connected and fixed to the electromagnetic coil and the guide.

5. The atomic force microscope probe mounting device according to claim 1, characterized in that, The adjustable piezoelectric tube is surrounded by four sets of translational adjustment piezoelectric elements.

6. The atomic force microscope probe mounting device according to claim 1, characterized in that, The positioning pin includes a support section, a positioning section, and a guide section connected in sequence. The support section is connected to the positioning pin mounting component, and the radial dimension of the support section is larger than the radial dimension of the positioning section; The radial dimension of the positioning section is consistent with the diameter of the positioning hole; The end of the guide section is a frustum structure.

7. The atomic force microscope probe mounting device according to claim 1, characterized in that, The atomic force microscope probe mounting device further includes a bidirectional moving platform and a lifting mechanism; the bidirectional moving platform is located below the scanner, and the bidirectional moving platform is equipped with the supply mechanism, which is used to control the supply mechanism to perform bidirectional translation; the lifting mechanism is connected to the scanner and is used to control the scanner to perform lifting and moving.

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