Silk screen direct write photolithography machine suction cup and direct write photolithography machine

Abstract

The application discloses a screen printing plate direct writing photoetching machine suction cup and a direct writing photoetching machine. The screen printing plate direct writing photoetching machine suction cup comprises a suction cup main body, a plurality of suction ports are arranged on the suction cup main body, a guide assembly, the guide assembly comprises two first guide plates and a second guide plate, the second guide plate extends along a second direction and forms a first containing space with the two first guide plates, at least two guide rails, a first rolling element is arranged above any guide rail, the guide rail is selectively communicated with a gas conveying device, and the first rolling element is lifted or lowered. When the first rolling element is lifted, the screen printing plate is abutted with the first rolling element and can move along the second direction. When the first rolling element is lowered, the suction port can be communicated with the screen printing plate and a vacuumizing device. When the first rolling element is lifted, the screen printing plate can be fed and discharged along a first direction. When the first rolling element is lowered, the suction port can vacuumize the screen printing plate. The first guide plate and the second guide plate ensure the positioning accuracy of screen printing plate feeding.

Description

Technical Field

[0001] This invention relates to the field of screen printing technology, and in particular to a screen printing plate direct-write lithography machine suction cup and a direct-write lithography machine. Background Technology

[0002] Screen printing stencil exposure is a crucial step in the screen printing stencil manufacturing process. In this step, photosensitive emulsion is applied to the stencil and then cured by exposure. The purpose of this process is to create a pattern on the stencil using the photosensitive emulsion, facilitating subsequent printing.

[0003] A direct-write screen printing lithography machine is a type of lithography machine that uses a laser beam to directly etch a template or photographic film. It eliminates the need for a film handling step during exposure, saving time and costs associated with film loading and unloading, and reducing deviations caused by film expansion and contraction. Furthermore, it offers high image resolution, making it suitable for creating fine conductive lines. Direct-write screen printing lithography machines improve production yield; their basic principle is to achieve precise positioning and fixation of the screen printing plate through photolithography technology and the core component, the stage, within the exposure machine.

[0004] In related technologies, exposure machines typically use mechanical clamping or screw fixing to secure screen printing plates. This method is prone to errors during use, affecting printing quality. Furthermore, the positioning accuracy of screen printing plates is not high, requiring frequent adjustments when changing to different plate specifications, resulting in low operational efficiency. Summary of the Invention

[0005] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a suction cup for a screen printing direct-write lithography machine. When the first rolling element rises, the screen can be fed and unloaded along a first direction. When the first rolling element descends, the suction port can vacuum-adsorb the screen. The first guide plate and the second guide plate ensure the positioning accuracy of the screen feeding.

[0006] This invention also proposes a direct-write lithography machine.

[0007] A chuck for a screen printing direct-write lithography machine according to an embodiment of the present invention includes: a chuck body having a plurality of suction ports, the plurality of suction ports being selectively connected to a vacuum pumping device; a guide assembly including: two first guide plates and a second guide plate, the two first guide plates extending along a first direction and being disposed opposite to each other, the second guide plate extending along a second direction and forming a first accommodating space with the two first guide plates; at least two guide rails connected to the chuck body and spaced apart along the second direction, a first rolling element disposed above any one of the guide rails, the guide rail being selectively connected to a gas supply device, the first rolling element rising or falling; when the first rolling element rises, the screen abuts against the first rolling element and can move along the first direction; when the first rolling element falls, the suction ports can connect the screen and the vacuum pumping device.

[0008] According to an embodiment of the present invention, the chuck of the screen printing direct-write lithography machine allows the screen to be fed and unfed along a first direction when the first rolling element rises, and the screen can be vacuum-adsorbed at the suction port when the first rolling element falls; the first guide plate and the second guide plate ensure the positioning accuracy of the screen feeding.

[0009] According to some embodiments of the present invention, a second rolling element is provided on the first guide plate, and a third rolling element is provided on the second guide plate. When the screen moves along the first direction, it rolls in cooperation with the second rolling element, and when the screen is connected to the vacuum device, it abuts against the third rolling element.

[0010] According to some embodiments of the present invention, the chuck of the screen printing direct-write lithography machine further includes: a solenoid valve, the solenoid valve being used to connect or disconnect the guide rail and the gas supply device to cause the first rolling element to rise or fall.

[0011] According to some embodiments of the present invention, the chuck of the screen printing direct-write lithography machine further includes: an optical fiber sensor; the chuck body is provided with a through hole extending along the height direction; the optical fiber sensor is disposed in the through hole; the optical fiber sensor is electrically connected to the solenoid valve; when the screen moves to abut against the second guide plate, the optical fiber sensor is triggered, and the solenoid valve disconnects the guide rail and the gas supply device.

[0012] According to some embodiments of the present invention, the upper part of the suction cup body is provided with a plurality of adsorption elements, which are respectively disposed at a plurality of adsorption ports and connected to the screen and the vacuum device.

[0013] According to some embodiments of the present invention, the suction cup body is provided with a plurality of airflow channels, and the plurality of airflow channels are respectively connected to a plurality of suction ports and the vacuum device.

[0014] According to some embodiments of the present invention, the chuck of the screen printing direct writing lithography machine further includes: a third guide plate, the third guide plate being disposed between two first guide plates, the third guide plate extending along a first direction, the third guide plate moving up and down and selectively forming a second receiving space with the first guide plate and the second guide plate.

[0015] According to some embodiments of the present invention, the chuck of the screen printing direct writing lithography machine further includes: a lifting assembly, the lifting assembly being located below the chuck body, the lifting assembly being convexly connected to the third guide plate, and driving the third guide plate to move up and down.

[0016] According to some embodiments of the present invention, the lifting assembly includes a driving member and a transmission member, the transmission member being tractively connected to the third guide plate, and the driving member driving the transmission member to move up and down, so as to move the third guide plate up and down.

[0017] According to an embodiment of the present invention, a direct-write lithography machine includes: a screen printing direct-write lithography machine chuck; a motion platform, wherein the screen printing direct-write lithography machine chuck is located on the motion platform and the motion platform is connected to the chuck body; and an exposure optical path module, wherein the exposure optical path module is located above the screen printing direct-write lithography machine chuck and is used to expose the screen printing plate.

[0018] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0020] Figure 1 This is a schematic diagram of the structure of a direct-write lithography machine according to an embodiment of the present invention;

[0021] Figure 2 This is a schematic diagram of the cooperation between the chuck and the screen in a direct-write lithography machine according to an embodiment of the present invention;

[0022] Figure 3 yes Figure 2 A partial schematic diagram;

[0023] Figure 4 This is a schematic diagram of the cooperation between the chuck and the second screen in a screen printing direct-write lithography machine according to an embodiment of the present invention;

[0024] Figure 5 This is a schematic diagram of one direction of the chuck of a screen printing direct-write lithography machine according to an embodiment of the present invention;

[0025] Figure 6 This is a schematic diagram of the suction cup of the screen printing direct-write lithography machine from another direction according to an embodiment of the present invention;

[0026] Figure 7 This is a top view of the chuck of a screen printing direct-write lithography machine according to an embodiment of the present invention;

[0027] Figure 8 This is a bottom view of the chuck of a screen printing direct-write lithography machine according to an embodiment of the present invention;

[0028] Figure 9 yes Figure 8 A partial schematic diagram;

[0029] Figure 10 This is a schematic diagram of the guide rail according to an embodiment of the present invention.

[0030] Figure label:

[0031] 100. Screen printing direct-write lithography machine suction cup;

[0032] 10. Suction cup body; 11. Suction port; 12. Air extraction port; 13. Suction component; 14. Through hole;

[0033] 20. Guide assembly; 21. First guide plate; 211. Second rolling element; 22. Second guide plate; 221. Third rolling element; 23. Third guide plate; 231. Fourth rolling element;

[0034] 30. Guide rail; 31. First rolling element;

[0035] 40. Light sensor;

[0036] 50. Lifting assembly;

[0037] 200, Motion Platform; 300, Exposure Optical Path Module; 400, Screen Printing Plate; 1000, Direct Write Lithography Machine. Detailed Implementation

[0038] The embodiments of the present invention are described in detail below. The embodiments described with reference to the accompanying drawings are exemplary. The embodiments of the present invention are described in detail below.

[0039] The following is for reference. Figures 1-10 The present invention describes a screen printing direct-write lithography machine chuck 100 according to an embodiment of the present invention, and also proposes a direct-write lithography machine 1000 including the above-described screen printing direct-write lithography machine chuck 100.

[0040] like Figures 2-4 As shown, the chuck 100 of the screen printing direct writing lithography machine includes: a chuck body 10, a guide assembly, and a guide rail 30.

[0041] The suction cup body 10 is provided with multiple suction ports 11, which selectively connect to a vacuum device. Specifically, the suction ports 11 open upwards towards the suction cup body 10, and the multiple suction ports 11 are spaced apart along a first direction. The screen plate 400 can selectively abut against the suction ports 11. When the screen plate 400 abuts against the suction port 11, the suction port 11 connects the screen plate 400 and the vacuum device to form a sealed cavity inside the suction cup body 10. When the vacuum device pumps air, a stable negative pressure environment is formed inside the suction cup body 10, thereby stably adsorbing the screen plate 400. When the vacuum device stops pumping air, the negative pressure environment inside the suction cup body 10 is released, releasing the adsorption of the screen plate 400.

[0042] The guiding assembly includes two first guide plates 21 and a second guide plate 22. The two first guide plates 21 extend along a first direction and are arranged opposite each other. The second guide plate 22 extends along a second direction and forms a first receiving space with the two first guide plates 21. Specifically, the first guide plates 21 extend along the first direction, are arranged opposite each other, and are located on both sides of the suction cup body 10, limiting the screen 400. The second guide plate 22 extends along the second direction, forming the first receiving space between the second guide plate 22 and the two first guide plates 21. The screen 400 moves along the first direction between the two first guide plates 21. When the screen 400 moves to contact the second guide plate 22, a vacuum device draws air, creating a stable negative pressure environment within the suction cup body 10, thereby stably adsorbing the screen 400.

[0043] In some embodiments, the four adsorption ports 11 can be respectively located at the four corners of the screen 400 when it comes into contact with the second guide plate 22, so as to ensure that the adsorption force on the screen 400 is uniform.

[0044] At least two guide rails 30 are connected to the suction cup body 10 and spaced apart along the second direction. A first rolling element 31 is disposed above any guide rail 30. The guide rail 30 is selectively connected to an air supply device, and the first rolling element 31 rises or falls. Specifically, an air float port is provided on the guide rail 30, and the first rolling element 31 is disposed in the air float port. The first rolling element 31 can move up and down within the air float port. The air float port can be connected to the air supply device. When the air supply device is connected to the air float port, the first rolling element 31 rises; when the air supply device is disconnected from the air float port, the first rolling element 31 falls. The first rolling element 31 can be a universal ball bearing, so that the screen 400 can move along the first direction on the first rolling element 31. When it moves to abut against the second guide plate 22, it reaches the exposure position and exposes the screen 400.

[0045] Before the operator loads the material, the air supply device is connected to the guide rail 30, and the first rolling element 31 rises so that its upper surface is higher than the suction port 11. The operator places the screen 400 on the first rolling element 31, and the screen 400 comes into contact with the first rolling element 31. Then, the operator pushes the screen 400 along the first direction. When the screen 400 comes into contact with the second guide plate 22, the first rolling element 31 descends, and the vacuum device evacuates the air, creating a stable negative pressure environment within the suction cup body 10, thus stably adsorbing the screen 400. After the screen 400 has been exposed, the vacuum device stops evacuating the air, releasing the negative pressure environment inside the suction cup body 10 and releasing the adsorption of the screen 400. The operator can then move the screen 400 along the first direction to unload it. The next screen 400 is placed, and the above steps are repeated.

[0046] Thus, when the first rolling element 31 rises, the screen 400 can be fed and unloaded along the first direction; when the first rolling element 31 falls, the suction port 11 can vacuum-adsorb the screen 400; the first guide plate 21 and the second guide plate 22 ensure the positioning accuracy of the screen 400 feeding.

[0047] like Figure 5 As shown, a second rolling element 211 is provided on the first guide plate 21, and a third rolling element 221 is provided on the second guide plate 22. When the screen 400 moves along the first direction, it rolls in cooperation with the second rolling element 211. When the screen 400 is connected to the vacuum device, it abuts against the third rolling element 221. Specifically, the second rolling element 211 is located on the side of the first guide plate 21 facing the other first guide plate 21. When the screen 400 moves along the first direction between the two first guide plates 21, the screen 400 abuts against the second rolling element 211. The second rolling element 211 can be a universal ball bearing. The second rolling element 211 and the screen 400 experience rolling friction to avoid damage to the screen 400.

[0048] In some embodiments, the chuck 100 of the screen printing direct-write lithography machine further includes a solenoid valve. The solenoid valve is used to connect or disconnect the guide rail 30 and the gas supply device to cause the first rolling element 31 to rise or fall. Specifically, the solenoid valve controls the connection and disconnection between the guide rail 30 and the gas supply device. When the solenoid valve connects the guide rail 30 and the gas supply device, the vacuum device and the chuck body 10 are disconnected. When the solenoid valve disconnects the guide rail 30 and the gas supply device, the vacuum device and the chuck body 10 are connected. When the screen 400 abuts against the suction port 11, the chuck body 10 adsorbs the screen 400, thereby performing operations such as exposure on the screen 400.

[0049] Before the operator loads the material, the solenoid valve connects the guide rail 30 and the air supply device, causing the first rolling element 31 to rise. The operator pushes the screen 400 to move along the first direction. When the screen 400 moves to contact the second guide plate 22, the solenoid valve disconnects the guide rail 30 and the air supply device, causing the first rolling element 31 to fall. The vacuum device connects to the suction port 11 and evacuates air, creating a stable negative pressure environment inside the suction cup body 10, thereby stably adsorbing the screen 400. After the screen 400 has been exposed, the vacuum device stops evacuating air, releasing the negative pressure environment inside the suction cup body 10. The solenoid valve connects the guide rail 30 and the air supply device, releasing the adsorption of the screen 400, allowing the operator to move the screen 400 along the first direction for unloading.

[0050] In some embodiments, a trigger button is provided on the suction cup body 10, and the trigger button is electrically connected to the solenoid valve. When the screen 400 is being fed, pressing the trigger button connects the solenoid valve to the guide rail 30 and the air supply device, causing the first rolling element 31 to rise, and the screen 400 can be fed in the first direction; after exposure is completed, pressing the trigger button disconnects the vacuum device and the suction port 11, and the solenoid valve connects the guide rail 30 and the air supply device, causing the first rolling element 31 to rise, and the screen 400 can be fed in the first direction.

[0051] Combination Figure 5 , Figure 8 and Figure 9 As shown, the chuck 100 of the screen printing direct-write lithography machine also includes: an optical fiber sensor. The chuck body 10 is provided with a through hole 14 extending along the height direction. The optical fiber sensor is disposed in the through hole 14 and is electrically connected to a solenoid valve. When the screen 400 moves to abut against the second guide plate 22, the optical fiber sensor is triggered, and the solenoid valve disconnects the guide rail 30 and the gas supply device. Specifically, the through hole 14 is located near the second guide plate 22, on the side of the second guide plate 22 facing the screen 400. The optical fiber sensor is located in the through hole 14. When the screen 400 moves along the first direction to abut against the second guide plate 22, the screen 400 covers the optical fiber sensor. The optical fiber sensor detects the signal and controls the solenoid valve to disconnect the guide rail 30 and the gas supply device, causing the first rolling element 31 to descend. The screen 400 abuts against the adsorption port 11. The vacuum device is connected to the adsorption port 11, thus forming a stable negative pressure environment in the chuck body 10, thereby stably adsorbing the screen 400.

[0052] like Figure 5As shown, the upper part of the suction cup body 10 is provided with multiple adsorption elements 13. The multiple adsorption elements 13 are respectively disposed at multiple adsorption ports 11 and are connected to the screen plate 400 and the vacuum device. Specifically, the multiple adsorption elements 13 are respectively disposed at multiple adsorption ports 11 and are connected to the periphery of the adsorption ports 11. When the screen plate 400 moves along the first direction to abut against the second guide plate 22, the first rolling element 31 descends, and the screen plate 400 abuts against the adsorption elements 13. At this time, the adsorption elements 13 are connected to the vacuum device, forming a stable negative pressure environment inside the suction cup body 10 to stably adsorb the screen plate 400.

[0053] The adsorption element 13 can be made of rubber and is generally funnel-shaped to stabilize the adsorption screen 400.

[0054] In some embodiments, a groove is provided on the periphery of the suction port 11. When the screen plate 400 abuts against the suction member 13, the suction member 13 can be pressed into the groove so that the screen plate 400 abuts against the upper surface of the suction cup body 10, ensuring that the suction cup body 10 tightly adsorbs the screen plate 400 without affecting the flatness of the screen plate 400.

[0055] In some embodiments, the suction cup body 10 is provided with multiple airflow channels, which are respectively connected to multiple adsorption ports 11 and a vacuum device. Specifically, the multiple airflow channels are separated from each other within the suction cup body 10, and are respectively connected to multiple adsorption ports 11. One end of each airflow channel is connected to the adsorption port 11, and the other end is connected to the vacuum device, so that a negative pressure environment is formed in the airflow channels when the vacuum device evacuates air, thereby allowing the adsorption port 11 to adsorb the screen plate 400.

[0056] In some embodiments, the side of the suction cup body 10 is also provided with an air extraction port 12, which is connected to a vacuum device and to the other end of an airflow channel. There can be multiple air extraction ports 12, each connected to the other end of a multiple airflow channel, and multiple suction ports 11 connected to one end of a multiple airflow channel. When the screen 400 comes into contact with the suction port 11, the vacuum device extracts air, creating a negative pressure environment in the airflow channel, thereby allowing the suction port 11 to adsorb the screen 400.

[0057] Combination Figures 2-3 , Figures 6-7As shown, the guiding assembly further includes a third guide plate 23, which is disposed between two first guide plates 21. The third guide plate 23 extends along a first direction and is movable up and down, selectively forming a second receiving space with the first guide plates 21 and the second guide plate 22. Specifically, the third guide plate 23 is located between two first guide plates 21 and also extends along the first direction. The third guide plate 23 is movable up and down relative to the suction cup body 10. When the third guide plate 23 moves down, the two first guide plates 21 and the second guide plate 22 form a first receiving space; when the third guide plate 23 moves up, the third guide plate 23 forms a second receiving space with one of the first guide plates 21 and the second guide plate 22. The size of the second receiving space in the second direction is smaller than the size of the first receiving space, that is, Figure 3 The screen size in the middle is 400. Figure 2 The screen 400 is of a certain size. The first and second accommodating spaces can be used to accommodate screens 400 of different sizes, expanding the applicability of the chuck 100 of the screen direct-write lithography machine.

[0058] At least one guide rail 30 is disposed adjacent to the third guide plate 23, and this guide rail 30 is disposed parallel to the guide rail 30 corresponding to one of the first guide plates 21, so that the screen 400 of the second accommodating space size slides on the two guide rails 30 along the first direction. The loading and unloading steps of the screen 400 are the same as those of the screen 400 of the first accommodating space size. The four suction ports 11 are respectively disposed at the four corners where the screen 400 abuts against the third guide plate 23.

[0059] like Figure 3 and Figure 9 As shown, the chuck 100 of the screen printing direct-write lithography machine also includes a lifting assembly 50, which is located below the chuck body 10. The lifting assembly 50 is connected to the third guide plate 23 and drives the third guide plate 23 to move up and down. That is, the lifting assembly 50 drives the third guide plate 23 to move up and down. The third guide plate 23 is provided with a fourth rolling element 231, which can be a universal ball bearing. A second receiving space is formed between the third guide plate 23 and one of the first guide plates 21 and the second guide plate 22. The screen 400 adapted to the second receiving space moves along the first direction between one of the first guide plates 21 and the third guide plate 23. The screen 400 abuts against the first rolling element 31 and the fourth rolling element 231 on both sides in the second direction. The third guide plate 23 and one of the first guide plates 21 limit the screen 400, thus limiting the screen 400 and preventing damage to the screen 400.

[0060] If a screen 400 that is compatible with the first receiving space is required, the lifting component 50 drives the third guide plate 23 to move downward so that the upper surface of the third guide plate 23 is lower than the upper surface of the suction cup body 10; if a screen 400 that is compatible with the second receiving space is required, the lifting component 50 drives the third guide plate 23 to move upward so that the fourth rolling element 231 on the third guide plate 23 is at the same height as the first rolling element 31.

[0061] Furthermore, the lifting assembly 50 includes a driving component and a transmission component. The transmission component is connected to the third guide plate 23. The driving component drives the transmission component to move up and down, thereby causing the third guide plate 23 to move up and down. Specifically, the driving component can be a cylinder. The driving component drives the transmission component to move up and down. The transmission component is connected to the third guide plate 23, and the third guide plate 23 moves as the transmission component moves up and down. If a screen 400 that fits the first accommodating space needs to be fed, the driving component drives the transmission component to move downward, so that the third guide plate 23 moves downward, making the upper surface of the third guide plate 23 lower than the upper surface of the suction cup body 10; if a screen 400 that fits the second accommodating space needs to be fed, the driving component drives the transmission component to move upward, so that the third guide plate 23 moves upward, so that the fourth rolling element 231 on the third guide plate 23 is at the same height as the first rolling element 31, so that the screen 400 can move along the first direction with the cooperation of the first rolling element 31 and the fourth rolling element 231. The first rolling element 31 and the fourth rolling element 231 have rolling friction with the screen 400, reducing damage to the screen 400.

[0062] like Figure 1 As shown, the direct-write lithography machine 1000 includes: a screen printing lithography chuck 100, a motion platform 200, and an exposure optical path module 300. The screen printing lithography chuck 100 is located on the motion platform 200, which is connected to the chuck body 10. The exposure optical path module 300 is located above the screen printing lithography chuck 100 and is used to expose the screen 400. The screen 400 is fixed by vacuum adsorption, which is compatible with various specifications of screen 400, greatly improving the versatility and adaptability of the direct-write lithography machine 1000. In addition, the screen printing lithography chuck 100 is also equipped with a guide component, which allows for manual assistance in loading and unloading, further improving the convenience of operation.

[0063] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0064] In the description of this specification, references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0065] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A chuck for a screen printing direct-write lithography machine, characterized in that, include: The suction cup body (10) is provided with a plurality of suction ports (11), and the plurality of suction ports (11) are selectively connected to a vacuum device; The guide assembly includes two first guide plates (21) and a second guide plate (22). The two first guide plates (21) extend along a first direction and are arranged opposite to each other. The second guide plate (22) extends along a second direction and forms a first receiving space with the two first guide plates (21). A second rolling element (211) is provided on the first guide plate (21), and a third rolling element (221) is provided on the second guide plate (22). When the screen (400) moves along the first direction, it rolls in cooperation with the second rolling element (211). When the screen (400) is connected to the vacuum device, it abuts against the third rolling element (221). At least two guide rails (30) are connected to the suction cup body (10) and spaced apart along the second direction. A first rolling element (31) is provided above any one of the guide rails (30). The guide rail (30) is selectively connected to the air supply device. The first rolling element (31) rises or falls. When the first rolling element (31) rises, the screen (400) abuts against the first rolling element (31) and can move along the first direction; When the first rolling element (31) descends, the adsorption port (11) can connect the screen (400) and the vacuum device.

2. The chuck for a direct-write lithography machine according to claim 1, characterized in that, Also includes: A solenoid valve is used to connect or disconnect the guide rail (30) and the gas delivery device to cause the first rolling element (31) to rise or fall.

3. The chuck for a direct-write lithography machine according to claim 2, characterized in that, Also includes: The fiber optic sensor is provided in the suction cup body (10) with a through hole (14) extending along the height direction. The fiber optic sensor is disposed in the through hole (14) and is electrically connected to the solenoid valve. When the screen (400) moves to contact the second guide plate (22), the fiber optic sensor is triggered, and the solenoid valve disconnects the guide rail (30) and the gas delivery device.

4. The chuck for a direct-write lithography machine according to claim 1, characterized in that, The upper part of the suction cup body (10) is provided with a plurality of adsorption elements (13), and the plurality of adsorption elements (13) are respectively disposed at a plurality of adsorption ports (11) and connected to the screen (400) and the vacuum device.

5. The chuck for a direct-write lithography machine according to claim 1, characterized in that, The suction cup body (10) is provided with multiple airflow channels, and the multiple airflow channels are respectively connected to multiple suction ports (11) and the vacuum device.

6. The chuck for a direct-write lithography machine according to claim 1, characterized in that, The guide assembly further includes a third guide plate (23), which is disposed between two first guide plates (21), the third guide plate (23) extends along a first direction, and the third guide plate (23) moves up and down and selectively forms the second receiving space with the first guide plate (21) and the second guide plate (22).

7. The chuck for a direct-write lithography machine according to claim 6, characterized in that, Also includes: The lifting assembly (50) is located below the suction cup body (10). The lifting assembly (50) is connected to the third guide plate (23) and drives the third guide plate (23) to move up and down.

8. The chuck for a direct-write lithography machine according to claim 7, characterized in that, The lifting assembly (50) includes a driving component and a transmission component. The transmission component is connected to the third guide plate (23) in a transmission manner. The driving component drives the transmission component to move up and down, so that the third guide plate (23) moves up and down.

9. A direct-write lithography machine, characterized in that, include: The chuck (100) of the screen printing direct writing lithography machine according to any one of claims 1-8. Motion platform (200), the screen printing direct writing lithography machine chuck (100) is located on the motion platform (200), and the motion platform (200) is connected to the chuck body (10); Exposure optical path module (300), which is located above the chuck (100) of the screen printing direct writing lithography machine, is used to expose the screen (400).

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