Silicon carbide quartz composite boat holder

Abstract

The application provides a silicon carbide-quartz composite boat holder, which comprises a boat holder body and a plurality of boat feet, the material of the boat holder body is silicon carbide, the material of the boat feet is quartz, the bottom of the boat holder body is provided with a plurality of supports, the number of the boat feet is the same as that of the supports, assembly gaps are arranged on the supports, the boat feet are arranged at the corresponding positions of the assembly gaps and are fixedly connected with the supports. The application designs a boat holder made of silicon carbide / quartz composite material, the boat holder body is made of silicon carbide material, the material has good thermal stability and long service life; the boat feet of the boat holder in contact with the quartz furnace tube are made of quartz material, the quartz boat feet are in contact with the quartz furnace tube made of the same material, which can effectively prevent the boat feet from damaging the furnace tube, thereby avoiding the problem of stress concentration at the damaged position and ensuring the service life of the quartz furnace tube.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing equipment technology, and more specifically, to a silicon carbide quartz composite boat support. Background Technology

[0002] Silicon boats and boat supports are commonly used equipment in photovoltaic semiconductor processing. The silicon boat is used to carry the solar cells, and the boat support is used to support the silicon boat. Currently, the industry generally uses silicon boats and boat supports made of quartz material. Due to its manufacturing process and the characteristics of quartz material, its service life is relatively short, generally 3-6 months.

[0003] To reduce operating costs and production losses caused by maintenance and repair downtime, some have proposed replacing quartz with silicon carbide. Silicon carbide boats and support structures are stable, the material has good thermal stability, does not deform under high temperatures, and has an extremely long service life, effectively solving the problem of wear and tear on load-bearing components under high loads on photovoltaic cells.

[0004] Due to its significant cost advantage, silicon carbide carriers have broad application prospects in the photovoltaic field. However, due to the high hardness of silicon carbide material, the contact area between the silicon carbide carrier and the quartz furnace tube will inevitably damage the quartz furnace tube. After the inner wall of the quartz furnace tube is scratched by the silicon carbide carrier, stress concentration will occur at the damaged area, which will damage the entire furnace tube and reduce its service life. Summary of the Invention

[0005] The problem to be solved by this invention is how to avoid damage to the quartz furnace tube by the silicon carbide boat support and extend the service life of the quartz furnace tube and the silicon carbide boat support as a whole.

[0006] To address the aforementioned problems, this invention provides a silicon carbide-quartz composite boat support, comprising a boat support body and multiple boat feet. The boat support body is made of silicon carbide, and the boat feet are made of quartz. The bottom of the boat support body is provided with multiple supports, and the number of boat feet is the same as the number of supports. Each support is provided with an assembly notch, and the boat feet are positioned at the corresponding positions of the assembly notches and are fixedly connected to the supports.

[0007] This invention designs a boat support made of silicon carbide / quartz composite material. The main body of the boat support is made of silicon carbide, which has good thermal stability and long service life. The boat feet that contact the quartz furnace tube are made of quartz material. The fact that the quartz boat feet and the quartz furnace tube are made of the same material can effectively prevent the boat feet from damaging the furnace tube, thereby avoiding the problem of stress concentration at the damaged area and ensuring the service life of the quartz furnace tube.

[0008] Furthermore, the thickness of the boat foot is 10-30 mm greater than the thickness of the support. Slightly increasing the thickness of the quartz boat foot helps improve stability and reduce boat foot sway.

[0009] Furthermore, a flexible gasket is provided at the contact point between the boat foot and the support. The flexible gasket helps prevent chipping or breakage of the quartz component due to stress concentration in certain areas.

[0010] Furthermore, the edge surface of the boat foot away from the assembly notch is an arc-shaped surface. The arc-shaped surface structure at the contact area between the boat foot and the quartz furnace tube increases the contact area and reduces the risk of damage to the furnace tube.

[0011] Furthermore, the hull foot is welded to the support to ensure a stable connection between the hull foot and the support.

[0012] Furthermore, at least one side edge of the boat foot has two opposite recesses forming a clamping portion. The assembly notch has two opposing clamping plates, forming a clamping groove between them. The clamping portion enters the clamping groove, and the clamping plates abut against the sides of the clamping portion. The boat foot is welded to the edge of the clamping plates. This structure uses double-sided welding to fix the quartz boat foot to the silicon carbide support, ensuring a reliable connection and a secure installation of the boat foot.

[0013] Furthermore, the clamping plate is L-shaped, the clamping groove is L-shaped, and the shape of the clamping part matches the shape of the clamping groove. The L-shaped structure of the clamping groove and the clamping part allows the two sides of the boat foot to enter the clamping groove, which is easy to install and position, and provides good connection stability.

[0014] Furthermore, a connecting pin is provided at the connection between the boat foot and the support. The connecting pin is made of quartz and includes a pin head and a pin portion. The support has a first connecting notch connected to the assembly notch, and the boat foot has a second connecting notch opposite to the first connecting notch. The first and second connecting notches form a connecting hole. The pin portion is inserted into the connecting hole, the pin head abuts against one side of the support, and the pin portion is welded to the edge of the connecting hole. This structure uses a connecting pin welding method to fix the quartz boat foot to the silicon carbide support, ensuring a reliable connection and a secure boat foot installation.

[0015] Furthermore, the boat feet are detachably connected to the support. This allows the quartz boat feet to be removed and replaced when damaged, making the entire boat support more durable.

[0016] Furthermore, a first positioning pin is provided at the connection between the boat foot and the support. The assembly notch has an arc-shaped splicing groove. The boat foot has a splicing part corresponding to the shape of the splicing groove. A first positioning hole is provided at the splicing groove. A positioning groove is provided at the part of the splicing part opposite to the first positioning hole. One end of the first positioning pin enters the first positioning hole, and the other end enters the positioning groove. This structure uses the splicing part and positioning pin to fix the quartz boat foot to the silicon carbide support, which is convenient for disassembly and assembly, accurate for assembly and positioning, and reliable for connection.

[0017] Furthermore, the arc of the splicing groove is greater than 180°. This makes it difficult for the splicing part to detach from the splicing groove, improving the reliability of the connection.

[0018] Furthermore, a second positioning pin is provided at the connection between the boat foot and the support, and a third positioning hole is provided on the upper edge of the boat foot. A second positioning hole is provided at the position corresponding to the third positioning hole in the assembly notch. One end of the second positioning pin enters the second positioning hole, and the other two ends enter the third positioning hole. This structure uses two positioning pins for positioning, which can reduce the swaying of the quartz boat foot. Attached Figure Description

[0019] Figure 1 This is a structural diagram of the boat support body in one embodiment of the present invention.

[0020] Figure 2 This is an assembly structure diagram of the support and the boat foot in one embodiment of the present invention.

[0021] Figure 3 This is a structural diagram of the pod in one embodiment of the present invention.

[0022] Figure 4 This is a structural diagram of the support assembly notch portion in one embodiment of the present invention.

[0023] Figure 5 This is a structural diagram of the pod in another embodiment of the present invention.

[0024] Figure 6 This is a structural diagram of the pod in another embodiment of the present invention.

[0025] Figure 7 This is a structural diagram of the clamping plate in another embodiment of the present invention.

[0026] Figure 8 This is a structural diagram of the pod in another embodiment of the present invention.

[0027] Figure 9 This is a structural diagram of the connecting pin in another embodiment of the present invention.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1-Boat support body, 11-End plate, 12-Side plate, 13-Support, 14-Assembly notch, 15-Splicing groove, 16-First positioning hole, 17-Second positioning hole, 18-Clamping plate, 2-Boat foot, 21-Arc-shaped surface, 22-Splicing part, 23-Positioning groove, 24-Third positioning hole, 25-Clamping part, 26-Second connecting notch, 3-Connecting pin, 31-Pin head, 32-Pin part. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. The components of the embodiments of the present invention described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0031] It should be noted that similar symbols and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0032] In the description of this invention, it should be noted that the terms "upper," "lower," "left," "right," "inner," "outer," "front," and "rear," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the product of this invention is usually placed during use. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0033] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "setting," "connection," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0034] The preferred embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the preferred embodiments described herein are for illustration and explanation only and are not intended to limit the present invention.

[0035] Combination Figure 1 and Figure 2As shown, a specific embodiment of the present invention provides a silicon carbide quartz composite boat support, including a boat support body 1 and four boat feet 2. The boat support body 1 includes two end plates 11 and two side plates 12. The two end plates 11 are arranged opposite each other, and the two side plates 12 are also arranged opposite each other. Each side of each end plate 11 is connected to one side of a side plate 12. The boat support body 1 is an integrally formed structure, and its material is silicon carbide. The material of the boat support body 1 has good thermal stability and a long service life. In other embodiments, the boat support body 1 can also be an assembled structure. Two supports 13 are provided on both sides of the bottom of the end plates 11. The supports 13 are provided with assembly notches 14. The positions of the assembly notches 14 correspond to the positions where the boat support and the quartz furnace tube make contact. A boat foot 2 is installed at each assembly notch 14 position, and the boat foot 2 is fixedly connected to the support 13. The boat foot 2 is made of quartz. Since the quartz boat foot 2 is in contact with the quartz furnace tube, it can effectively prevent the boat support from damaging the furnace tube, thereby avoiding the problem of stress concentration at the damaged part. This can extend the service life of the quartz furnace tube and the silicon carbide boat support as a whole.

[0036] Traditional quartz joining methods involve oxyhydrogen welding, where high temperatures melt the quartz into a single unit. However, due to the unique molecular structure of silicon carbide, it lacks a liquid intermediate state and cannot form a stable connection with quartz. To connect the silicon carbide boat support body 1 and the quartz boat feet 2, a specific boat foot 2 structure needs to be designed through external processing. The following embodiments provide various structures for the quartz boat feet 2 and their corresponding supports 13.

[0037] Combination Figures 1 to 4 As shown, in this embodiment, the boat foot 2 and the support 13 are detachably connected, and the quartz boat foot 2 can be disassembled and replaced when damaged. Specifically, the assembly notch 14 of the support 13 has an arc-shaped splicing groove 15, and the boat foot 2 is provided with a splicing part 22. The shape of the splicing part 22 corresponds to the splicing groove 15 and is fan-shaped. The edge surface of the boat foot 2 away from the assembly notch 14 is an arc-shaped surface 21, that is, the contact part between the boat foot 2 and the quartz furnace tube adopts an arc-shaped surface 21 structure, which can increase the contact area and reduce the risk of furnace tube damage. When the boat foot 2 is installed, the edge of the splicing part 22 abuts against the groove wall of the splicing groove 15, and the other two straight edges of the boat foot 2 abut against the edge of the assembly notch 14, and the boat foot 2 and the support 13 are fixedly spliced ​​together.

[0038] Preferably, the curvature of the splicing groove 15 and the splicing part 22 is greater than 180°. In this embodiment, the curvature of both is 270°, so that after the boat foot 2 is installed, the splicing part 22 is difficult to detach from the splicing groove 15, thus improving the connection reliability.

[0039] Combination Figure 3 and Figure 4As shown, the splicing groove 15 of the support 13 is provided with a first positioning hole 16, and the splicing part 22 is provided with a positioning groove 23 on the side facing the splicing groove 15; the upper edge of the assembly notch 14 is provided with a second positioning hole 17, and the upper edge of the boat foot 2 is provided with a third positioning hole 24, with the second positioning hole 17 and the third positioning hole 24 corresponding to each other. A first positioning pin (not shown in the figure) is provided between the first positioning hole 16 and the positioning groove 23, with one end of the first positioning pin entering the first positioning hole 16 and the other end entering the positioning groove 23, forming a positioning connection. A second positioning pin (not shown in the figure) is provided between the second positioning hole 17 and the third positioning hole 24, with one end of the second positioning pin entering the second positioning hole 17 and the other end entering the third positioning hole 24, also forming a positioning connection. This connection structure uses two positioning pins to cooperate for positioning, ensuring a reliable connection and preventing the quartz boat foot 2 from swinging.

[0040] Preferably, the diameter of the first positioning pin is smaller than that of the first positioning hole 16, and the first positioning pin can slide after entering the first positioning hole 16; the diameter of the second positioning pin is smaller than that of the second positioning hole 17, and the second positioning pin can slide after entering the second positioning hole 17. During assembly, the boat support body 1 is first inverted, the first positioning pin is placed in the first positioning hole 16, and the second positioning pin is placed in the second positioning hole 17. After the boat foot 2 is installed in place, the boat support body 1 is flipped up and down, one end of the first positioning pin automatically slides into the positioning groove 23, and one end of the second positioning pin automatically slides into the third positioning hole 24, thus completing the assembly of the boat foot 2. This assembly method is simple to operate, has little assembly interference, and facilitates the disassembly and assembly of the boat foot 2.

[0041] Preferably, the third positioning hole 24 is an oblong hole, which facilitates the automatic sliding of one end of the second positioning pin into the third positioning hole 24, thus avoiding assembly misalignment.

[0042] Combination Figure 5 As shown, this embodiment provides a different structure for the boat foot 2, which differs from the above embodiment in that the boat foot 2 is connected to the support 13 via a positioning pin. Specifically, the assembly notch 14 of the support 13 has an arc-shaped splicing groove 15, and the boat foot 2 is provided with a splicing part 22. The shape of the splicing part 22 corresponds to the splicing groove 15, and the edge surface of the boat foot 2 away from the assembly notch 14 is an arc-shaped surface 21. The splicing groove 15 is provided with a first positioning hole 16, and the splicing part 22 facing the splicing groove 15 is provided with a positioning groove 23. A first positioning pin is provided between the first positioning hole 16 and the positioning groove 23. One end of the first positioning pin enters the first positioning hole 16, and the other end enters the positioning groove 23, forming a positioning connection. This structure uses the splicing part 22 and a positioning pin to fix the quartz boat foot 2 to the silicon carbide support 13, requiring fewer connecting parts and making disassembly and assembly convenient.

[0043] It should be noted that, in addition to the above-mentioned connection structure, the boat foot 2 and the support 13 can also adopt other detachable connection structures, which will not be described in detail here.

[0044] Combination Figure 6 and Figure 7 As shown, in this embodiment, the boat foot 2 is welded to the support 13, making the connection between the boat foot 2 and the support 13 more stable. Specifically, the edge surface of the boat foot 2 away from the assembly notch 14 is an arc-shaped surface 21. The two sides of the boat foot 2 and the assembly notch 14 are recessed to form a clamping part 25. The assembly notch 14 is provided with two opposing clamping plates 18, and a clamping groove is formed between the two clamping plates 18, into which the clamping part 25 can enter.

[0045] In this embodiment, the clamping plate 18 is L-shaped, and the clamping groove is also L-shaped. The two sides of the boat foot 2, aligned with the edge of the assembly notch 14, are recessed to form a clamping portion 25, which is L-shaped and matches the clamping groove. During installation, the clamping portion 25 is inserted into the clamping groove, the sidewalls of the clamping plate 18 abut against the two sides of the clamping portion 25, and then the boat foot 2 is welded to the edge of the clamping plate 18. This double-sided welding method secures the quartz boat foot 2 to the silicon carbide support 13, ensuring a firm installation.

[0046] Combination Figure 8 and Figure 9 As shown, this embodiment provides another connection structure between the boat foot 2 and the support 13, with the two types connected by welding using connecting pins 3. Specifically, the support 13 has a first connecting notch (not shown in the figure) connected to the assembly notch 14, and the boat foot 2 has a second connecting notch 26 at the part opposite to the first connecting notch. The edge surface of the boat foot 2 away from the assembly notch 14 is an arc-shaped surface 21. When the boat foot 2 is installed, the first connecting notch and the second connecting notch 26 combine to form a connecting hole for the connecting pin 3 to be inserted.

[0047] The connecting pin 3 is made of quartz, the same material as the boat foot 2. The connecting pin 3 includes a pin head 31 and a pin portion 32, with the diameter of the pin head 31 being larger than that of the pin portion 32. When installing the boat foot 2, first position the boat foot 2 at the assembly notch 14, then insert the pin portion 32 into the connecting hole formed by the first connecting notch and the second connecting notch 26, so that the pin head 31 abuts against one side of the support 13. Then, weld the pin portion 32 to the edge of the connecting hole, thereby fixing the quartz boat foot 2 onto the silicon carbide support 13.

[0048] It should be noted that, in addition to the above-mentioned connection structure, the boat foot 2 and the support 13 can also adopt other welded connection structures, which will not be described in detail here.

[0049] In a preferred embodiment, the thickness of the boat foot 2 (with the thickness direction along the length of the boat support body 1) is slightly greater than the thickness of the support 13, with typical differences including 10mm, 15mm, 20mm, 25mm, 30mm, etc. Appropriately increasing the thickness of the quartz boat foot 2 helps to improve stability and reduce the swaying of the boat foot 2.

[0050] In a preferred embodiment, a flexible gasket is provided at the contact area between the boat foot 2 and the support 13 to prevent chipping or breakage of the quartz component due to stress concentration in certain areas. The flexible gasket can be provided on the boat foot 2 or on the support 13, and the material of the flexible gasket is preferably a high-temperature quartz braided material.

[0051] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A silicon carbide quartz composite boat support, characterized in that, The device includes a boat support body (1) and multiple boat feet (2). The boat support body (1) is made of silicon carbide, and the boat feet (2) are made of quartz. The bottom of the boat support body (1) is provided with multiple supports (13). The number of boat feet (2) is the same as the number of supports (13). The supports (13) are provided with assembly notches (14). The boat feet (2) are located at the corresponding positions of the assembly notches (14) and are welded to the supports (13). The boat foot (2) has a clamping part (25) formed by recesses on opposite sides of at least one edge. The assembly notch (14) is provided with two opposing clamping plates (18). A clamping groove is formed between the two clamping plates (18). The clamping part (25) enters the clamping groove. The clamping plate (18) abuts against the side of the clamping part (25). The boat foot (2) is welded to the edge of the clamping plate (18). The clamping plate (18) is L-shaped. The clamping groove is L-shaped. The shape of the clamping part (25) matches the shape of the clamping groove. Alternatively, the connection between the boat foot (2) and the support (13) is provided with a connecting pin (3). The connecting pin (3) is made of quartz and includes a pin head (31) and a pin part (32). The support (13) is provided with a first connecting notch connected to the assembly notch (14). The boat foot (2) is provided with a second connecting notch (26) opposite to the first connecting notch. The first connecting notch and the second connecting notch (26) form a connecting hole. The pin part (32) is inserted into the connecting hole. The pin head (31) abuts against one side of the support (13). The pin part (32) is welded to the edge of the connecting hole.

2. The silicon carbide quartz composite boat support according to claim 1, characterized in that, The thickness of the boat foot (2) is 10-30 mm greater than the thickness of the support (13).

3. The silicon carbide quartz composite boat support according to claim 1, characterized in that, The contact area between the boat foot (2) and the support (13) is provided with a flexible pad.

4. The silicon carbide quartz composite boat support according to claim 1, characterized in that, The edge surface of the boat foot (2) away from the assembly notch (14) is an arc-shaped surface (21).

5. A silicon carbide quartz composite boat support, characterized in that, The device includes a boat support body (1) and multiple boat feet (2). The boat support body (1) is made of silicon carbide, and the boat feet (2) are made of quartz. The bottom of the boat support body (1) is provided with multiple supports (13). The number of boat feet (2) is the same as the number of supports (13). The supports (13) are provided with assembly notches (14). The boat feet (2) are positioned at the corresponding positions of the assembly notches (14) and are connected to the supports (13). The connection is detachable. The connection between the boat foot (2) and the support (13) is provided with a first positioning pin. The assembly notch (14) has an arc-shaped splicing groove (15). The arc of the splicing groove (15) is greater than 180°. The boat foot (2) is provided with a splicing part (22) corresponding to the shape of the splicing groove (15). The splicing groove (15) is provided with a first positioning hole (16). The part of the splicing part (22) opposite to the first positioning hole (16) is provided with a positioning groove (23). One end of the first positioning pin enters the first positioning hole (16) and the other end enters the positioning groove (23).

6. The silicon carbide quartz composite boat support according to claim 5, characterized in that, The connection between the boat foot (2) and the support (13) is provided with a second positioning pin. The upper edge of the boat foot (2) is provided with a third positioning hole (24). The assembly notch (14) is provided with a second positioning hole (17) at the corresponding position of the third positioning hole (24). One end of the second positioning pin enters the second positioning hole (17), and the other end enters the third positioning hole (24).

7. The silicon carbide quartz composite boat support according to claim 5, characterized in that, The thickness of the boat foot (2) is 10-30 mm greater than the thickness of the support (13).

8. The silicon carbide quartz composite boat support according to claim 5, characterized in that, The contact area between the boat foot (2) and the support (13) is provided with a flexible pad.

9. The silicon carbide quartz composite boat support according to claim 5, characterized in that, The edge surface of the boat foot (2) away from the assembly notch (14) is an arc-shaped surface (21).

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