一种非对称PP中空纤维脱气膜及其制备方法和应用

By designing an external dense region and an external degassing region on the outer surface of an asymmetric PP hollow fiber degassing membrane, along with the distribution of external degassing pores and a non-directional tortuous pathway, the problem of low gas removal efficiency in ultrapure water is solved, achieving a membrane material that combines high-efficiency degassing and robustness.

CN117717914BActive Publication Date: 2026-07-17HANGZHOU COBETTER SEMICONDUCTOR SEPARATION MEMBRANE CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
HANGZHOU COBETTER SEMICONDUCTOR SEPARATION MEMBRANE CO LTD
Filing Date
2024-01-02
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing hollow fiber degassing membranes are difficult to effectively remove dissolved oxygen and other gases in ultrapure water applications, which affects the performance of ultrapure water in semiconductor applications. Furthermore, traditional preparation methods may leave additives that affect purity.

Method used

An asymmetric PP hollow fiber degassing membrane is designed, with an outer dense region and an outer degassing region on the outer surface. The outer degassing region contains external degassing pores with a pore size of 10-90 nm and a pore density greater than 10 pores/1 μm². Combined with a non-directional tortuous path and an appropriate thickness, it achieves a highly efficient degassing effect.

Benefits of technology

It achieves efficient removal of dissolved oxygen and other gases from ultrapure water, maintains the membrane's tolerance and mechanical strength, is suitable for long-term use, and meets the needs of semiconductor applications.

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Abstract

本发明涉及一种非对称PP中空纤维脱气膜及其制备方法和应用,包括主体,所述主体的一侧为朝向内腔的内表面,所述主体的另一侧为外表面,所述主体内形成有非定向曲折通路,所述脱气膜的厚度为30‑100μm,所述脱气膜的孔隙率大于25%;所述外表面的表面能为25‑35mN / m;所述外表面的孔洞面积率不大于10%,所述外表面包括外致密区和外脱气区,所述外致密区的孔洞面积率小于1%,所述外脱气区内具有若干个外脱气孔,所述外脱气孔的SEM平均孔径为10‑90nm,所述外脱气区的孔密度大于10个 / 1μm2。本发明的脱气膜在具有极高的脱气速率和脱气效率的同时,还具有较好的长效耐受性,能够尽可能脱除超纯水中的溶解氧等气体,特别适合应用于超纯水领域的脱气。
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