A welding device for dimensional positioning of quartz boat components.

Abstract

This invention discloses a welding device for dimensional positioning of quartz boat components, comprising a positioning base; wherein the positioning base includes an arcuate support portion arranged along the central axis; wherein the positioning base includes stepped positioning portions symmetrically arranged on both sides of the central axis; and a fine-tuning support is installed on the stepped positioning portion, the fine-tuning support being a replaceable component of several specifications. The welding fixture, composed of the arcuate support portion and the stepped positioning portion, can serve as the skeleton of the quartz boat, positioning and supporting it according to the design dimensions before welding the quartz sheets. Furthermore, it can be further modified with the fine-tuning support, thus adapting to the welding of quartz boats with different specifications. This eliminates the technical shortcomings of operators relying solely on drawing dimensions for welding, lacking a reference point, thereby improving the convenience and quality of the welding work.

Description

Technical Field

[0001] This invention relates to the field of quartz product fixture technology, and in particular to a welding device for dimensional positioning of quartz boat components. Background Technology

[0002] Quartz boats are high-temperature resistant quartz glass products with excellent chemical stability, high-temperature corrosion resistance, and thermal stability, and are widely used in the semiconductor industry. In chip manufacturing, quartz boats are used in high-temperature heat treatment processes such as combustion chemical evaporation, gas phase transport, deposition, diffusion, etching, and annealing.

[0003] In semiconductor manufacturing, quartz boats are used as carriers and protectors of chips. During high-temperature heat treatment processes, quartz boats can withstand thermal expansion and mechanical stress under high-temperature environments without releasing impurities or gases, ensuring the purity and quality of the chips. Furthermore, quartz boats possess excellent chemical stability, resisting the corrosive effects of various chemicals and protecting the chips from chemical contamination.

[0004] With the development of the semiconductor and solar energy industries, the application of quartz boats is becoming increasingly widespread. As application scenarios become more complex and diverse, the precision requirements for quartz boats are also increasing. Current methods for positioning the various components of quartz boats are rather crude, simply using graphite blocks to assemble the required dimensions before welding. For products with strict dimensional requirements, this necessitates repeated repairs, and it cannot guarantee that all related dimensions between components will meet the standards. Furthermore, welding efficiency is low, rework rates are high, and scrap rates are high, failing to meet the requirements of mass production.

[0005] For example, a "quartz boat forming and welding equipment" disclosed in Chinese patent literature, with publication number "CN217529828U", includes an operating table. The upper end surface of the operating table is provided with a clamping component for clamping the quartz boat assembly. The clamping component includes a mounting plate and a limiting plate. The lower end surface of the mounting plate is fixedly connected to the upper end surface of the operating table. The upper end surface of the operating table is provided with a sliding groove for sliding the limiting plate. Support blocks for supporting the quartz boat assembly are fixedly installed on the sides of the mounting plate and the limiting plate that are close to each other.

[0006] The above solution, by having one side of the support block fit against the side wall of the transmission rod, achieves the purpose of fixing the pressure block under the action of the convex force, thus facilitating the fixing of the quartz glass assembly. This replaces the existing technology of fixing the quartz glass assembly by adjusting the clamp with a threaded rod, making the fixing of the quartz glass assembly more convenient and improving the efficiency of welding the quartz glass assembly. However, it still cannot accurately position the various components of the quartz boat, so the various dimensions between the components of the boat cannot be guaranteed. The dimensions between the components can only be adjusted manually, and dimensional deviations may still exist after welding, causing the product to be scrapped. Summary of the Invention

[0007] To address the problems of inaccurate positioning of individual components and low adjustment efficiency leading to high scrap rates during the welding of quartz glass assemblies in existing technologies, this invention provides a welding device for positioning the dimensions of quartz boat components. The device utilizes an arc-shaped support and a stepped positioning section to form a welding fixture, which serves as the skeleton of the quartz boat, positioning and supporting the quartz sheets according to the design dimensions before welding. Furthermore, it can be further adjusted with fine-tuning supports, thus adapting to the welding of quartz boats with different specifications. This eliminates the technical shortcomings of operators relying solely on drawing dimensions to assemble quartz sheets for welding, lacking a benchmark, thereby improving the convenience and quality of the welding process.

[0008] To achieve the above objectives, the present invention adopts the following technical solution: A welding device for positioning the dimensions of quartz boat components, comprising a positioning base; The positioning base includes an arcuate support portion arranged along the central axis; The positioning base includes stepped positioning parts symmetrically arranged on both sides of the central axis; The stepped positioning part is equipped with a fine-tuning support, which is a replaceable part with several specifications.

[0009] Generally, the quartz shell of a quartz boat includes a substrate and an arc-shaped portion disposed on the substrate. In this solution, the arc-shaped support portion is disposed on the central axis of the positioning base and is mainly used to effectively support the arc panel. The stepped positioning portion and the fine-tuning support are used to cooperate with the arc-shaped support portion to fit and support the arc-shaped portion of the quartz boat in the width direction. The fine-tuning support and the arc-shaped support portion together constitute the inner support "skeleton" of the arc-shaped portion of the quartz boat. The stepped positioning portion is selected according to the width of the corresponding quartz boat substrate to achieve the purpose of fitting the interior of the quartz boat. It becomes a support fixture formed by welding quartz sheets into a whole. The positioning base structure is simple and has good practical application effect.

[0010] Preferably, the arcuate support includes a central support plate detachably connected to the positioning base, and the top of the central support plate is provided with an arcuate surface. An arcuate panel is fitted onto the arcuate surface, and the arcuate panel extends to both sides along the arcuate surface. The arcuate curvature of the top arcuate surface of the arcuate support is adapted to the arcuate part of this batch of quartz boats. The arcuate panel can provide balanced support for the quartz sheets that make up the arcuate part of the quartz boat, ensuring that the arcuate part of the quartz boat remains stable during the welding process.

[0011] Preferably, the stepped positioning part includes several layers of positioning block groups with increasing width from top to bottom. The positioning block group includes a left positioning block and a right positioning block symmetrically arranged along the central axis of the positioning base. The distance between the left positioning block and the right positioning block is adjustable.

[0012] Preferably, adjacent positioning block groups are slidably connected; adjacent positioning block groups can be relatively fixed.

[0013] The stepped positioning section can match the needs of different quartz boat batches by adjusting the distance between the left and right positioning blocks, thereby improving the versatility of the positioning base. This allows operators to adjust the distance between the left and right positioning blocks in each layer of positioning block group according to the size requirements of different batches of quartz boats, thus improving the accuracy of the welding fixture. The upper positioning block can move on the lower positioning block and be fixed in the target position. Specifically, the upper and lower positioning blocks can be relatively fixed by damping sliding or external fixing plugs.

[0014] Furthermore, the adjacent positioning block group includes mutually perpendicular positioning surface groups on its sides, each positioning surface group comprising a side elevation and a horizontal plane. The positioning surface group is composed of mutually perpendicular side elevations and a horizontal plane. The side elevation is the outer portion of the left / right positioning block, while the horizontal plane is the excess portion of the top surface of the lower positioning block group exposed when the width of the upper positioning block group is smaller than the width of the lower positioning block group. The positioning surface group provides stable and close-fitting support for the fine-tuning support, thereby achieving an internal support "skeleton" that matches the arc-shaped part of the quartz boat.

[0015] Preferably, each positioning surface group is arranged collinearly with the central axis of the positioning base, and the fine-tuning support is a strip-shaped member, which is abutted on the positioning surface group on both sides of the central axis.

[0016] Preferably, the fine-tuning support includes, but is not limited to, cylinders, prisms, and irregularly shaped columns.

[0017] By selecting fine-tuning supports with different cross-sectional shapes and sizes, operators can ensure that the outer contour of the fine-tuning supports precisely matches the curved part of the batch of quartz boats. Since the spacing adjustment between the left and right positioning blocks in the stepped positioning part can only match the width and approximate curvature of the curved part of the quartz boat, it cannot guarantee a precise fit. Therefore, the selection of fine-tuning supports can compensate for the "coarse adjustment" of the positioning block group and achieve precise adjustment, ensuring that the quartz sheets can be stably and accurately positioned and supported during welding.

[0018] Preferably, the positioning base includes several spaced-apart arc-shaped support parts and stepped positioning parts; adjacent arc-shaped support parts and stepped positioning parts are detachably connected. Both the arc-shaped support parts and the stepped positioning parts are sheet-like structures, and are alternately stacked along the length of the quartz boat. Adjacent sheets can be stably connected by means of inserting clips, snap-fitting, or magnetic connection, and can be disassembled at any time, ensuring that the overall length of the positioning base conforms to the design dimensions of the quartz boat, further improving the versatility of the positioning base.

[0019] Therefore, the present invention has the following beneficial effects: (1) The welding fixture is composed of an arc-shaped support part and a stepped positioning part, which can be used as the skeleton of the quartz boat to position and support the quartz pieces according to the design dimensions before welding. It can also be further modified with the fine-tuning support, thereby adapting to the welding work of quartz boats with different specifications. This eliminates the technical defect of operators only relying on the dimensions of the drawings to connect the quartz pieces for welding without a reference, thereby improving the convenience and quality of the welding work; (2) The quartz pieces that make up the arc-shaped part of the quartz boat are supported by the center of gravity of the support plate set on the axis of the positioning base, ensuring that the arc-shaped part of the quartz boat remains stable during the welding process; (3) The adjustable positioning block group and the replaceable fine-tuning support are combined to form a close-fitting support for the quartz pieces that make up the arc-shaped part of the quartz boat, ensuring that the entire arc-shaped part meets the size design. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of the present invention.

[0021] Figure 2 This is the front view of the present invention.

[0022] Figure 3 for Figure 1 A schematic diagram of the structure of the positioning matrix.

[0023] Figure 4 for Figure 3 Side section view of the positioning substrate.

[0024] In the figure: 100, positioning base; 200, arc-shaped part; 201, arc top; 1, arc support part; 11, central support plate; 12, arc panel; 2, stepped positioning part; 3, fine-tuning support; 4, positioning block group; 41, left positioning block; 42, right positioning block; 5, positioning surface group; 51, side elevation; 52, horizontal surface. Detailed Implementation

[0025] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout.

[0026] Example 1 like Figure 1 , 4 As shown, a welding device for dimensional positioning of quartz boat components includes a positioning base 100; wherein the positioning base includes an arcuate support portion 1 arranged along the central axis; wherein the positioning base includes stepped positioning portions 2 symmetrically arranged on both sides of the central axis; a fine-tuning support 3 is installed on the stepped positioning portion, the fine-tuning support being a replaceable component of several specifications. The arcuate support portion includes a central support plate 11 detachably connected to the positioning base, the top of the central support plate having an arcuate surface. Upper and lower adjacent positioning block groups 4 are slidably connected; upper and lower adjacent positioning block groups 4 can be relatively fixed. The sides of the adjacent positioning block groups 4 include mutually perpendicular positioning surface groups 5, the positioning surface groups 5 including a side vertical surface 51 and a horizontal surface 52. The positioning surface group 5 is composed of a side elevation 51 and a horizontal surface 52 that are perpendicular to each other. The side elevation 51 is the outer part of the left positioning block 41 / right positioning block 42, while the horizontal surface 52 is the excess part of the top surface of the lower positioning block group 4 that is exposed when the width of the upper positioning block group 4 is smaller than the width of the lower positioning block group 4.

[0027] like Figure 2 , 3 As shown, generally speaking, the quartz shell of a quartz boat includes a base plate and an arcuate portion 200 disposed on the base plate. Figure 2 (The dashed line in the middle represents the outline of the arc-shaped part). In this solution, the arc support part is set on the central axis of the positioning base to effectively support the arc top 201 of the arc-shaped part 200. The stepped positioning part and the fine-tuning support are used to cooperate with the arc support part to fit and support the arc-shaped side of the quartz boat in the width direction. The fine-tuning support and the arc support part together constitute the inner support "skeleton" of the arc-shaped part of the quartz boat. The stepped positioning part is selected according to the width of the corresponding quartz boat substrate to achieve the purpose of fitting the inside of the quartz boat. It becomes a support fixture formed by welding quartz sheets into a whole. The positioning base structure is simple and has good practical application effect.

[0028] The arc-shaped surface at the top of the arc support is adapted to the arc-shaped portion 200 of this batch of quartz boats. The arc-shaped panel 12, located on the central support plate along the axis of the positioning base, provides balanced support for the quartz sheets forming the arc-shaped portion of the quartz boat, ensuring stability during welding. The stepped positioning section comprises several layers of positioning block groups 4 with increasing width from top to bottom. Each positioning block group 4 includes a left positioning block 41 and a right positioning block 42 symmetrically arranged along the central axis of the positioning base. The distance between the left positioning block 41 and the right positioning block 42 is adjustable. The stepped positioning section can match the needs of different quartz boat batches by adjusting the distance between the left positioning block 41 and the right positioning block 42, thereby improving the versatility of the positioning base. This allows operators to adjust the distance between the left positioning block 41 and the right positioning block 42 in each layer of positioning block group 4 according to the size requirements of different batches of quartz boats, thus improving the accuracy of the welding fixture. The upper positioning block can move on the lower positioning block. Once adjusted to the target position, it can be fixed. Specifically, the upper and lower positioning blocks can be relatively fixed by damped sliding or by external fixing plugs. In this embodiment, the top surface of the lower positioning block is provided with a track, and the upper positioning block can slide within the track. After reaching the target size, it is locked by welding or screws.

[0029] The positioning surface group 5 provides stable and close support for the fine-tuning support 3, thereby achieving an internal support "skeleton" that matches the arc-shaped part of the quartz boat.

[0030] Each positioning surface group 5 is arranged collinearly with the central axis of the positioning base. The fine-tuning support is a strip-shaped component, which is abutted against the positioning surface group 5 on both sides of the central axis. In this embodiment, the fine-tuning support is preferably a cylinder, selected according to the inner contour of the quartz boat. By selecting fine-tuning supports with different cross-sectional shapes and sizes, the operator can ensure that the outer contour of the fine-tuning support is precisely fitted with the arc-shaped part of the batch of quartz boats. Since the spacing adjustment between the left positioning block 41 and the right positioning block 42 in the stepped positioning part can only match the width and approximate curvature of the arc-shaped part of the quartz boat, but cannot guarantee a precise fit, the selection of the fine-tuning support can compensate for the "coarse adjustment" of the positioning block group 4 and achieve precise adjustment, ensuring that the quartz sheet can be stably and accurately positioned and supported during welding.

[0031] In this embodiment, the positioning base includes four layers of positioning block groups 4 and three layers of positioning surface groups 5 formed between the four layers of positioning block groups 4. Each layer of positioning surface group 5 is provided with a rod-shaped fine-tuning support. The positioning base includes four arc-shaped support parts and three stepped positioning parts arranged at intervals. Each arc-shaped support part is provided with an arc panel 12 at its top. The arc panel is formed circumferentially with the arc surface of the central support plate as the arc reference, so as to achieve effective fitting and support of the arc part of the quartz boat. After placing each component, it is confirmed again that the distance between the selected left positioning block 41 and right positioning block 42 meets the size of the batch of quartz boats, and that the cross-sectional shape and diameter of the selected fine-tuning support meet the precise size of the quartz boat. Then, the fine-tuning support 3 is welded to the positioning surface group 5 of the positioning block group 4, and the arc panel 12 is welded to the fine-tuning support to ensure that the position of each component is relatively fixed, forming a welding fixture that meets the size of the batch of quartz boats. When welding quartz sheets, operators can do so by stably attaching the quartz sheets to the "inner skeleton" formed by the curved surface and the outer contour of the fine-tuning support.

[0032] Example 2 In this embodiment, based on Embodiment 1, adjacent curved support parts 1 and stepped positioning parts 2 are detachably connected. Both the curved support parts and the stepped positioning parts are sheet-like structures, and are alternately stacked along the length of the quartz boat. Adjacent sheets can be stably connected using methods such as snap-fit ​​connections, fastening connections, or magnetic connections. They can be disassembled at any time before the dimensions are determined, and then welded and fixed after determination. This ensures that the overall length of the selected positioning base conforms to the design dimensions of the quartz boat, allowing for greater freedom and rationality in use, further improving the versatility of the positioning base.

[0033] In addition to the above embodiments, within the scope disclosed in the claims and specification of this invention, the technical features of this invention can be reselected and combined to form new embodiments. These can be achieved by those skilled in the art without creative effort. Therefore, these embodiments not described in detail in this invention should also be regarded as specific embodiments of this invention and within the protection scope of this invention.

Claims

1. A welding device for dimensional positioning of quartz boat components, characterized in that, Includes a positioning substrate; The positioning base includes an arcuate support part arranged along the central axis; the arcuate support part includes a central support plate detachably connected to the positioning base, which provides center-of-gravity balance support for the quartz pieces that make up the arcuate part of the quartz boat through the central support plate arranged along the central axis of the positioning base. The positioning base includes stepped positioning sections symmetrically arranged on both sides of the central axis; the stepped positioning sections include several layers of positioning block groups with increasing width from top to bottom; the positioning block group includes a left positioning block and a right positioning block symmetrically arranged along the central axis of the positioning base; the distance between the left positioning block and the right positioning block is adjustable; the adjustment of the distance between the left positioning block and the right positioning block is used to match the needs of different specifications of quartz boat batches. The stepped positioning part is equipped with a fine-tuning support, which is a replaceable part including several specifications. The adjustable positioning block assembly, together with the replaceable fine-tuning support, forms a fitted support for the quartz plates that make up the curved part of the quartz boat.

2. The welding device for dimensional positioning of quartz boat components according to claim 1, characterized in that, The top of the central support plate is provided with an arc-shaped surface.

3. The welding device for dimensional positioning of quartz boat components according to claim 1, characterized in that, The upper and lower adjacent positioning block groups are slidably connected; the upper and lower adjacent positioning block groups can be relatively fixed.

4. The welding device for dimensional positioning of quartz boat components according to claim 3, characterized in that, The upper and lower adjacent positioning block groups have mutually perpendicular positioning surface groups on their sides, and the positioning surface groups include side elevations and horizontal surfaces.

5. A welding device for dimensional positioning of quartz boat components according to claim 4, characterized in that, Each positioning surface group is arranged collinearly with the central axis of the positioning base. The fine-tuning support is a strip-shaped component, which is abutted on the positioning surface group on both sides of the central axis.

6. The welding device for dimensional positioning of quartz boat components according to claim 5, characterized in that, The fine-tuning support includes any one of a cylinder, a prism, or an irregularly shaped column.

7. A welding device for dimensional positioning of quartz boat components according to claim 2, characterized in that, An arc panel is attached to the arc surface, and the arc panel extends to both sides along the arc surface.

8. A welding device for dimensional positioning of quartz boat components according to any one of claims 1-7, characterized in that, The positioning base includes several arc-shaped support parts and stepped positioning parts arranged at intervals; adjacent arc-shaped support parts and stepped positioning parts are detachably connected.

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