Quartz tube cleaning device, atomizing spray head and atomizing method thereof

Abstract

The present disclosure relates to a quartz tube cleaning device, an atomizing spray head and an atomizing method thereof. The atomizing spray head comprises a body, a first switch assembly and a second switch assembly. The body is provided with a mixing chamber, a liquid inlet, an air inlet and an atomizing exhaust hole, and the liquid inlet, the air inlet and the atomizing exhaust hole are respectively communicated with the mixing chamber. The first switch assembly is arranged on the body and used for controlling the opening or closing of the liquid inlet. The second switch assembly is arranged on the body and used for controlling the opening or closing of the atomizing exhaust hole. When the air pressure inside the mixing chamber reaches a certain degree, the second switch assembly is opened, the mixture of the gas and the cleaning liquid inside the mixing chamber is discharged outward through the atomizing exhaust hole, and the atomizing gas is formed in the process of passing through the atomizing exhaust hole. The atomizing gas discharged outward has a good cleaning effect on the quartz tube and a high cleaning efficiency, and the cleaning liquid can be saved. In addition, the product structure of the atomizing spray head is relatively simple, and the cost is low.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and in particular to a quartz tube cleaning apparatus, an atomizing spray head, and an atomization method thereof. Background Technology

[0002] Quartz tubes are commonly used components in semiconductor furnace equipment and are an important part of the process chamber. They are widely used consumables in semiconductor device manufacturing equipment (such as chemical vapor deposition (CVD), physical vapor deposition (PVD), diffusion equipment (Diff), or film deposition equipment (T / F). During the process, byproducts adhere to the surface of the quartz tube, typically monocrystalline silicon, polycrystalline silicon, and silicon nitride. Quartz tubes are expensive, so they need to be thoroughly cleaned and reused to reduce the manufacturing cost of semiconductor devices. However, traditional quartz tube cleaning equipment usually uses nozzles to spray deionized water, nitrogen, or isopropanol (IPA) vapor to clean and / or dry the quartz tube. However, while ensuring cleaning effectiveness, this method is time-consuming, has low cleaning efficiency, and consumes large amounts of cleaning fluid, resulting in high costs. Summary of the Invention

[0003] Therefore, it is necessary to overcome the shortcomings of the existing technology and provide a quartz tube cleaning device, an atomizing spray head and its atomization method, which can improve the cleaning effect and cleaning efficiency, while having a simple structure and low cost.

[0004] The technical solution is as follows: an atomizing spray head, the atomizing spray head comprising: The main body is provided with a mixing chamber, a liquid inlet, an air inlet, and an atomizing exhaust port. The liquid inlet, the air inlet, and the atomizing exhaust port are respectively connected to the mixing chamber. A first switch assembly, disposed on the body, is used to control the liquid inlet to open or close; The second switch assembly is disposed on the body and is used to control the opening or closing of the atomizing exhaust port; The liquid inlet and the atomizing exhaust port are in different working states.

[0005] In one embodiment, the first switch assembly includes a first plug and a first elastic member; the first plug is connected to the body via the first elastic member, and the first plug is movably disposed inside the mixing chamber for opening or closing the inlet.

[0006] In one embodiment, the mixing chamber includes a main chamber and a first movable channel. One end of the first movable channel is connected to the main chamber, and the other end of the first movable channel is connected to the liquid inlet. A first switch assembly is disposed in the first movable channel. The inner diameter of the first movable channel is smaller than the inner diameter of the main chamber, and the inner diameter of the first movable channel is larger than the diameter of the liquid inlet. A first sealing member is movably disposed inside the first movable channel for abutting against the wall of the liquid inlet to close the liquid inlet, and for separating from the liquid inlet to open the liquid inlet.

[0007] In one embodiment, the body further includes a liquid inlet channel communicating with the mixing chamber, and the liquid inlet is formed at one end of the liquid inlet channel near the mixing chamber.

[0008] In one embodiment, the second switch assembly includes a second blocking member and a second elastic member; the second blocking member is connected to the body through the second elastic member, and the second blocking member is movably disposed inside the mixing chamber for opening or closing the atomizing exhaust port.

[0009] In one embodiment, the mixing chamber includes a main chamber and a second movable channel; one end of the second movable channel is connected to the main chamber, and the other end of the second movable channel is connected to the atomizing exhaust port; the inner diameter of the second movable channel is smaller than the inner diameter of the main chamber, and the inner diameter of the second movable channel is larger than the inner diameter of the atomizing exhaust port. The second switch assembly is disposed in the second active channel, the second active channel having a sealing section, the second sealing member being used to abut against the sealing section to close the atomizing exhaust port, and to separate from the sealing section to open the atomizing exhaust port.

[0010] In one embodiment, the inner diameter of the sealing section tends to decrease in the direction away from the atomizing exhaust port.

[0011] In one embodiment, a transition section is provided at one end of the second active channel away from the main chamber, the transition section being connected to the atomizing exhaust port, and the inner diameter of the transition section decreasing in the direction toward the atomizing exhaust port.

[0012] In one embodiment, the elastic modulus of the second elastic element is greater than that of the first elastic element.

[0013] In one embodiment, a one-way valve is provided at the air inlet, which is used to allow gas from the air inlet to flow into the mixing chamber in one direction.

[0014] A quartz tube cleaning device includes at least one atomizing spray head, and further includes a support, a cleaning liquid supply mechanism, and a gas supply mechanism; the support is used to place the quartz tube to be cleaned, the liquid inlet is connected to the cleaning liquid supply mechanism, the air inlet is connected to the gas supply mechanism, and the atomizing exhaust hole of the atomizing spray head faces the outer wall or inner wall of the quartz tube.

[0015] In one embodiment, there are multiple atomizing spray heads, including at least one first atomizing spray head disposed above the quartz tube, at least one second atomizing spray head disposed below the quartz tube and extending into the interior of the quartz tube, and at least one third atomizing spray head disposed on the side of the quartz tube.

[0016] In one embodiment, the cleaning fluid supply mechanism includes a first supply mechanism for supplying deionized water and a second supply mechanism for supplying cleaning acid; There are two first atomizing spray heads, one of which has its liquid inlet connected to the first supply mechanism, and the other has its liquid inlet connected to the second supply mechanism. There are two second atomizing spray heads, one of which has its liquid inlet connected to the first supply mechanism, and the other has its liquid inlet connected to the second supply mechanism. There are multiple third atomizing spray heads, some of which have their liquid inlets connected to the first supply mechanism and are arranged at intervals along the vertical direction; the other part of the third atomizing spray heads have their liquid inlets connected to the second supply mechanism and are arranged at intervals along the vertical direction.

[0017] In one embodiment, the liquid inlet of one of the first atomizing spray heads, the liquid inlet of one of the second atomizing spray heads, and a portion of the liquid inlets of the third atomizing spray heads are each connected to the first supplying mechanism via a first liquid inlet pipe; the liquid inlet of another first atomizing spray head, the liquid inlet of another second atomizing spray head, and another portion of the liquid inlets of the third atomizing spray head are each connected to the second supplying mechanism via a second liquid inlet pipe; a first flow regulating valve is provided on the first liquid inlet pipe, and a second flow regulating valve is provided on the second liquid inlet pipe.

[0018] In one embodiment, the quartz tube cleaning device further includes a first mounting base; the first atomizing spray head is disposed on the first mounting base; the first mounting base is provided with a first lifting mechanism for driving the first atomizing spray head to rise and fall, and / or a first rotating mechanism for driving the first atomizing spray head to rotate.

[0019] In one embodiment, the quartz tube cleaning device further includes a second mounting base; the second atomizing spray head is disposed on the second mounting base; the second mounting base is provided with a second lifting mechanism for driving the second atomizing spray head to rise and fall, and / or a second rotating mechanism for driving the second atomizing spray head to rotate.

[0020] In one embodiment, the support portion is provided with a third lifting mechanism for driving the quartz tube to rise and fall, and / or a third rotating mechanism for driving the quartz tube to rotate.

[0021] A method for atomizing the aforementioned atomizing spray head, the method comprising the following steps: Cleaning fluid is introduced into the mixing chamber through the liquid inlet, and gas is introduced into the mixing chamber through the air inlet; before the cleaning fluid is introduced, the liquid inlet is in the open state and the atomizing exhaust port is in the closed state. After the cleaning fluid and the gas are continuously introduced into the mixing chamber, the pressure in the mixing chamber causes the inlet to be closed and the atomizing exhaust port to be open, so that the cleaning fluid and gas in the mixing chamber can be discharged from the atomizing exhaust port.

[0022] The aforementioned quartz tube cleaning device, atomizing spray head, and atomization method, in operation, first open the first switch assembly and close the second switch assembly, allowing the cleaning liquid to enter the mixing chamber through the liquid inlet and the gas to enter the mixing chamber through the air inlet to mix with the cleaning liquid. At this time, since the second switch assembly is in the closed state, the cleaning liquid and gas are prevented from escaping. After a preset amount of cleaning liquid enters the mixing chamber, gas continues to be introduced into the mixing chamber through the air inlet. When the gas pressure inside the mixing chamber reaches a certain level, the first switch assembly closes and the second switch assembly opens, allowing the mixture of gas and cleaning liquid inside the mixing chamber to be discharged outwards through the atomizing exhaust port. During this process, atomized gas is formed, and the discharged atomized gas provides a good cleaning effect on the quartz tube, resulting in high cleaning efficiency. It also saves cleaning liquid, and the atomizing spray head has a simple structure and low cost. This application ensures a good spraying effect by setting different working states for the liquid inlet and the atomizing spray head. Attached Figure Description

[0023] The accompanying drawings, which form part of this application, are used to provide a further understanding of this disclosure. The illustrative embodiments of this disclosure and their descriptions are used to explain this disclosure and do not constitute an undue limitation of this disclosure.

[0024] To more clearly illustrate the technical solutions in the embodiments of this disclosure, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0025] Figure 1 This is a schematic diagram of the structure of an atomizing spray head in one of the working states according to an embodiment of the present disclosure; Figure 2 This is a schematic diagram of the structure of an atomizing spray head in another working state according to an embodiment of the present disclosure; Figure 3 This is a schematic diagram of the structure of a quartz tube cleaning device according to an embodiment of the present disclosure; Figure 4 This is a schematic diagram of the structure of a quartz tube cleaning device according to another embodiment of the present disclosure; Figure 5 This is a schematic diagram of the structure of a first atomizing spray head according to an embodiment of the present disclosure; Figure 6 This is a schematic diagram of the structure of a second atomizing spray head according to an embodiment of the present disclosure; Figure 7 This is a schematic diagram of the working state of the second atomizing spray head extending into the quartz tube according to an embodiment of the present disclosure.

[0026] 10. Atomizing spray head; 10a. First atomizing spray head; 10b. Second atomizing spray head; 10c. Third atomizing spray head; 11. Body; 111. Mixing chamber; 1111. Main chamber; 1112. First movable channel; 1113. Second movable channel; 11131. Sealing section; 11132. Transition section; 112. Liquid inlet; 113. Air inlet; 114. Atomizing exhaust port; 115. Liquid inlet channel ; 116, one-way valve; 12, first switch assembly; 121, first sealing element; 122, first elastic element; 13, second switch assembly; 131, second sealing element; 132, second elastic element; 20, bearing part; 30, quartz tube; 40, first mounting base; 50, second mounting base; 60, cleaning chamber; 70, control device; 80, working indicator light; 91, first liquid inlet pipe; 92, second liquid inlet pipe; 93, air inlet pipe. Detailed Implementation

[0027] To make the above-described objects, features, and advantages of this disclosure more apparent and understandable, specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this disclosure. However, this disclosure can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this disclosure. Therefore, this disclosure is not limited to the specific embodiments disclosed below.

[0028] As described in the background section, existing quartz tube cleaning devices suffer from the problem that cleaning efficiency and cleaning effect cannot be guaranteed simultaneously, and they also require a large amount of cleaning fluid, resulting in high costs. The inventors have discovered that the reason for this problem is that quartz tube cleaning devices typically use nozzles to directly spray cleaning fluid, cleaning gas, or drying gas onto the surface of the quartz tube for cleaning and / or drying, without atomizing the cleaning fluid. Of course, there are attempts to add atomizers to quartz tube cleaning devices to atomize the cleaning fluid before spraying it outwards, but the structure of atomizers is relatively complex, resulting in high costs.

[0029] For the reasons mentioned above, this invention provides a quartz tube cleaning device, an atomizing spray head, and an atomization method thereof, which can improve the cleaning effect and efficiency, while having a simple structure and low cost.

[0030] See Figure 1 or Figure 2 Figure 1 shows a schematic diagram of the structure of the atomizing spray head 10 in one of its working states (not in operation) according to an embodiment of the present disclosure. Figure 2 This diagram illustrates the structure of an atomizing spray head in another working state (during operation) according to an embodiment of the present disclosure. An embodiment of the present disclosure provides an atomizing spray head 10, which includes a body 11, a first switch assembly 12, and a second switch assembly 13. The body 11 has a mixing chamber 111, a liquid inlet 112, an air inlet 113, and an atomizing exhaust port 114. The liquid inlet 112, air inlet 113, and atomizing exhaust port 114 are respectively connected to the mixing chamber 111. The first switch assembly 12 is disposed on the body 11 and is used to control the opening or closing of the liquid inlet 112. The second switch assembly 13 is disposed on the body 11 and is used to control the opening or closing of the atomizing exhaust port 114. The liquid inlet 112 and the atomizing exhaust port 114 are in different working states.

[0031] When the aforementioned atomizing spray head 10 is in operation, the first switch assembly 12 is first turned on and the second switch assembly 13 is turned off, allowing the cleaning fluid to enter the mixing chamber 111 through the liquid inlet 112 and the gas to enter the mixing chamber 111 through the air inlet 113 to mix with the cleaning fluid. At this time, since the second switch assembly 13 is in the closed state, the cleaning fluid and gas are prevented from being discharged outward. After a preset amount of cleaning fluid has entered the mixing chamber 111, gas continues to be introduced into the mixing chamber 111 through the air inlet 113. When the gas pressure inside the mixing chamber 111 reaches a certain level, the first switch assembly 12 is turned off, that is, the liquid inlet 112 is closed. The second switch assembly 13 opens, which means it opens the atomizing exhaust port 114. The mixture of gas and cleaning fluid inside the mixing chamber 111 is discharged outward through the atomizing exhaust port 114, forming atomized gas during the process. The discharged atomized gas has a good cleaning effect on the quartz tube 30, with high cleaning efficiency, while saving cleaning fluid. Furthermore, the atomizing spray head 10 has a simple structure and low cost. In this embodiment, the liquid inlet 112 and the atomizing exhaust port 114 are in different working states. When the first switch assembly 12 opens the liquid inlet 112, the second switch assembly 13 closes the atomizing exhaust port 114; when the first switch assembly 12 closes the liquid inlet 112, the second switch assembly 13 opens the atomizing exhaust port 114. By setting the liquid inlet 112 and the atomizing exhaust port 114 to be in different working states, the mixing chamber 111 can be kept well-sealed, ensuring the atomizing spray effect.

[0032] Optionally, to ensure that the mixture of cleaning fluid and gas forms atomized gas as it flows through the atomizing exhaust port 114, on the one hand, it is necessary to ensure that the gas pressure inside the mixing chamber 111 is sufficiently high; the specific size can be flexibly adjusted and set according to actual needs and is not limited here. On the other hand, it is also necessary to ensure that the inner diameter of the atomizing exhaust port 114 is sufficiently small. The inner diameter of the atomizing exhaust port 114 is as follows: Figure 1 The D1 shown includes, but is not limited to, settings of 0.1cm-0.4cm. Research has found that setting it within this range ensures good atomization, while preventing the inner diameter of the atomizing exhaust port 114 from being too small and affecting the exhaust volume, thus ensuring a sufficiently large atomizing exhaust volume to guarantee a good cleaning effect. Optionally, D1 can be specifically set to values ​​such as 0.25cm, 0.28cm, 0.31cm, 0.33cm, 0.35cm, etc.

[0033] Please see Figure 1 and Figure 2In one embodiment, the first switching assembly 12 includes a first sealing member 121 and a first elastic member 122. The first sealing member 121 is connected to the body 11 via the first elastic member 122, specifically, for example, to the wall of the mixing chamber 111. The first sealing member 121 is movably disposed inside the mixing chamber 111 for opening or closing the inlet 112.

[0034] Specifically, please refer to Figure 2 When the first sealing element 121 moves to the position of closing the inlet 112, the first elastic element 122 is in a stretched state. (See also...) Figure 1 When the first sealing member 121 moves to the position where the inlet 112 is open, the first elastic member 122 is in its natural state. Thus, when the gas-liquid mixture inside the mixing chamber 111 is discharged and depressurized through the atomizing exhaust port 114, the first elastic member 122 is in its natural state, and the first sealing member 121 opens the inlet 112. Conversely, when the pressure inside the mixing chamber 111 exceeds a preset pressure, the first sealing member 121 will seal the inlet 112, and the first elastic member 122 will be stretched accordingly. In this way, the first switching assembly 12 can automatically control the opening or closing of the inlet 112 based on the pressure changes inside the mixing chamber 111.

[0035] Please see Figure 1 and Figure 2 In one embodiment, the mixing chamber 111 includes a main chamber 1111 and a first movable channel 1112. One end of the first movable channel 1112 is connected to the main chamber 1111, and the other end is connected to the inlet 112. A first switch assembly 12 is disposed in the first movable channel 1112. The inner diameter of the first movable channel 1112 is smaller than the inner diameter of the main chamber 1111, and the inner diameter of the first movable channel 1112 is larger than the diameter of the inlet 112. A first sealing member 121 is movably disposed inside the first movable channel 1112 for abutting against the wall of the inlet 112 to close the inlet 112, and for separating from the inlet 112 to open the inlet 112. Thus, during the opening and closing process, the first sealing member 121 moves within the dedicated first active channel 1112. The first active channel 1112 provides a certain degree of limitation for the first sealing member 121, preventing it from moving to other positions in the mixing chamber 111. This results in better stability of the closing and opening actions and improves the reliability of the first switch assembly 12.

[0036] Please see Figure 1 and Figure 2In one embodiment, the second switching assembly 13 includes a second sealing member 131 and a second elastic member 132. The second sealing member 131 is connected to the wall of the mixing chamber 111 through the second elastic member 132. The second sealing member 131 is movably disposed inside the mixing chamber 111 and is used to open or close the atomizing exhaust port 114.

[0037] Specifically, please refer to Figure 1 When the second sealing member 131 moves to the position of closing the atomizing exhaust port 114, the second elastic member 132 is in its natural state; please refer to Figure 2 When the second sealing member 131 moves to the position where the atomizing exhaust port 114 is open, the second elastic member 132 is in a stretched state. Thus, when the gas-liquid mixture inside the mixing chamber 111 is discharged and depressurized through the atomizing exhaust port 114, the second elastic member 132 is in its natural state, and the second sealing member 131 closes the atomizing exhaust port 114. Conversely, when the pressure inside the mixing chamber 111 exceeds a preset pressure, the second elastic member 132 is stretched, and the second sealing member 131 opens the atomizing exhaust port 114. In this way, the second switching assembly 13 can automatically control the opening or closing of the atomizing exhaust port 114 according to the pressure changes inside the mixing chamber 111.

[0038] It should be noted that the first sealing element 121 can directly or indirectly seal the liquid inlet 112, as long as it can prevent the cleaning fluid from entering the mixing chamber 111 through the liquid inlet 112 when sealing the liquid inlet 112.

[0039] In addition, it should be noted that the second sealing element 131 can directly seal the atomizing exhaust port 114 or indirectly seal the atomizing exhaust port 114, as long as it can prevent the gas-liquid mixture inside the mixing chamber 111 from being discharged outward through the atomizing exhaust port 114 when sealing the atomizing exhaust port 114.

[0040] Please see Figure 1 and Figure 2In one embodiment, the mixing chamber 111 includes a main chamber 1111 and a second active channel 1113. One end of the second active channel 1113 is connected to the main chamber 1111, and the other end is connected to the atomizing exhaust port 114. The inner diameter of the second active channel 1113 is smaller than the inner diameter of the main chamber 1111, and the inner diameter of the second active channel 1113 is larger than the inner diameter of the atomizing exhaust port 114. A second switching assembly 13 is disposed in the second active channel 1113. The second active channel 1113 has a sealing section 11131. A second sealing member 131 is used to abut against the sealing section 11131 to close the atomizing exhaust port 114, and to separate from the sealing section 11131 to open the atomizing exhaust port 114. Thus, during the opening and closing process, the second sealing member 131 moves within the dedicated second active channel 1113. The second active channel 1113 provides a certain degree of limitation for the second sealing member 131, preventing it from moving to other positions in the mixing chamber 111. This results in better stability of the closing and opening actions and improves the reliability of the second switch assembly 13.

[0041] Please see Figure 1 and Figure 2 In one embodiment, the body 11 further includes a liquid inlet channel 115 communicating with the mixing chamber 111, with a liquid inlet 112 formed at one end of the liquid inlet channel 115 near the mixing chamber 111. Thus, by providing the liquid inlet channel 115 to guide the cleaning fluid into the mixing chamber 111, it is beneficial to ensure a stable flow of the cleaning fluid into the mixing chamber 111. Furthermore, the liquid inlet channel 115 also facilitates connection of the atomizing spray head 10 to an external liquid inlet pipe.

[0042] It should be noted that the liquid inlet channel 115, the first movable channel 1112, the main chamber 1111, the second movable channel 1113, and the atomizing exhaust port 114 can all be flexibly designed into various shapes according to actual needs. They can be regular or irregular shapes, and no limitation is made here. In order to reduce the resistance generated by the liquid during the flow of liquid in the channel and / or the main chamber 1111, the liquid inlet channel 115, the first movable channel 1112, the main chamber 1111, the second movable channel 1113, and the atomizing exhaust port 114 are all independently set as straight channels. The cross-section of the straight channel is not limited to regular and irregular shapes such as circles, ellipses, or polygons. Among them, polygons include, but are not limited to, triangles, quadrilaterals, pentagons, hexagons, etc.

[0043] Please see Figure 1 and Figure 2 In one embodiment, the inner diameter of the liquid inlet channel 115 (e.g.) Figure 1D2 as shown is smaller than the inner diameter of the first active channel 1112 (e.g., Figure 1 As shown in D3), the inner diameter of the first active channel 1112 (as shown in D3). Figure 1 D3 (as shown) is larger than the outer diameter of the first sealing element 121 (e.g. Figure 1 As shown in D4), the inner diameter of the first active channel 1112 (as shown in D4). Figure 1 D3 as shown is smaller than the inner diameter of the main chamber 1111 (e.g.) Figure 1 D5 as shown); second active channel 1113 (as shown) Figure 1 The inner diameter of D6 shown is smaller than the inner diameter of the main chamber 1111 (e.g., Figure 1 As shown in D5), the inner diameter of the second active channel 1113 (as shown in D5). Figure 1 The diameter of D6 shown is larger than the inner diameter of the atomizing exhaust port 114 (e.g., D6). Figure 1 As shown in D1). The inner diameter of the second active channel 1113 (as shown in D1). Figure 1 The diameter of D6 shown is also larger than the outer diameter of the second sealing element 131.

[0044] In one specific embodiment, the inner diameter D2 of the liquid inlet channel 115 is, for example, 0.6cm-0.67cm, specifically, 0.635cm; the inner diameter D3 of the first movable channel 1112 is, for example, 1.5cm-2cm; the outer diameter D4 of the first sealing member 121 is, for example, 0.7cm-0.8cm; the inner diameter D5 of the main chamber 1111 is, for example, 2.5cm-3cm; and the inner diameter D6 of the second movable channel 1113 is, for example, 1.5cm-2cm.

[0045] In addition, the length of the main chamber 1111 is L1, which is 3cm-3.5cm. The length of the first movable channel 1112 is L2, which is 2cm-3cm. The length of the second movable channel 1113 is L3, which is 2cm-3cm.

[0046] In one embodiment, the body 11 is specifically made of a corrosion-resistant material, such as Teflon material or other materials. Furthermore, the first sealing element 121 and the second sealing element 131 are each independently made of a corrosion-resistant material, such as polyvinylidene fluoride (PVDF) material or other materials.

[0047] In one embodiment, the elastic modulus of the second elastic element 132 is greater than that of the first elastic element 122. Specifically, the elastic modulus of the second elastic element 132 is, for example, 4.8 kg to 5.5 kg, and the elastic modulus of the first elastic element 122 is, for example, 4.5 kg to 4.8 kg. This ensures that when the first sealing element 121 seals the liquid inlet 112, the second sealing element 131 simultaneously seals the atomizing exhaust port 114. Only when the pressure inside the mixing chamber 111 reaches a certain level and exceeds a preset pressure value, the gas-liquid mixture inside the mixing chamber 111 pushes the second sealing element 131 to move, thereby opening the atomizing exhaust port 114 and discharging the atomized gas outward through the atomizing exhaust port 114.

[0048] Please see Figure 1 In one embodiment, the length of the first elastic member 122 is greater than the length of the second elastic member 132. Since the lengths of the first active channel 1112 and the second active channel 1113 are basically the same, and in order to enable the second elastic member 132 to control the opening and closing of the atomizing exhaust port 114, the length of the second elastic member 132 is set to be shorter than that of the first elastic member 122.

[0049] In one specific embodiment, during the process of adding the cleaning fluid into the mixing chamber 111 through the inlet 112, the cleaning fluid is specifically injected at a pressure of 5 kg / cm². 2 The gas is introduced into the main chamber 1111 at a rate of approximately 60 L / min to 80 L / min. Furthermore, during the process of adding gas into the mixing chamber 111 through the inlet 113, the gas is specifically introduced at a pressure of 5 kg / cm³. 2 The gas is introduced into the main chamber 1111 at a rate of 50L / min-70L / min. In some embodiments, the gas flow rate can be less than the cleaning fluid flow rate, so that more cleaning fluid can enter the mixing chamber 111, resulting in more liquid being sprayed and a higher cleaning effect.

[0050] Please see Figure 1 In one embodiment, the inner diameter of the sealing section 11131 decreases in the direction away from the atomizing exhaust port 114. Specifically, the sealing section 11131 includes, but is not limited to, a tapered channel. The axial cross-section of the tapered channel includes, but is not limited to, a circle, an ellipse, a polygon, etc. Among them, the polygon includes, but is not limited to, a triangle, a quadrilateral, a pentagon, a hexagon, etc. Thus, when the second sealing member 131 is in the second closed state, under the pulling force of the second elastic member 132, the second sealing member 131 and the inner wall of the sealing section 11131 abut against each other and seal well, thereby achieving the isolation of the mixing chamber 111 from the atomizing exhaust port 114, that is, ensuring that the atomizing exhaust port 114 is in the closed state.

[0051] Please see Figure 1 Specifically, one end of the first elastic member 122 is connected to the first sealing member 121, and the other end of the first elastic member 122 is connected to the inner wall of the mixing chamber 111. Among them, the end of the first elastic member 122 connected to the first sealing member 121 is further away from the center of the mixing chamber 111 than the other end.

[0052] Please see Figure 1 Specifically, one end of the second elastic member 132 is connected to the second sealing member 131, and the other end of the second elastic member 132 is connected to the inner wall of the mixing chamber 111. Among them, the end of the second elastic member 132 connected to the second sealing member 131 is further away from the center of the mixing chamber 111 than the other end.

[0053] In one embodiment, the first elastic element 122 is a spring, an elastic rod, or an elastic block; the second elastic element 132 is a spring, an elastic rod, or an elastic block; the first sealing element 121 is a sphere, an ellipsoid, or a cube; and the second sealing element 131 is a sphere, an ellipsoid, or a cube.

[0054] Please see Figure 1 In one embodiment, a transition section 11132 is provided at one end of the second active channel 1113, which is away from the main chamber 1111. The transition section 11132 is connected to the atomizing exhaust port 114, and the inner diameter of the transition section 11132 decreases in the direction toward the atomizing exhaust port 114. In this way, the mixed gas and liquid are gradually compressed through the transition section 11132 of the second active channel 1113, which can further gradually increase the gas pressure and smoothly enter the interior of the atomizing exhaust port 114. This results in a better atomization effect inside the atomizing exhaust port 114, and the resulting atomized gas is ejected outward.

[0055] Please see Figure 1 and Figure 5 In one embodiment, a one-way valve 116 is provided at the air inlet 113. The one-way valve 116 is used to allow gas to flow unidirectionally into the mixing chamber 111 through the air inlet 113. Thus, by providing the one-way valve 116 at the air inlet 113, gas and / or liquid inside the mixing chamber 111 can be prevented from flowing out of the mixing chamber 111 through the air inlet 113. Furthermore, by adding gas into the mixing chamber 111 through the air inlet 113, the gas pressure inside the mixing chamber 111 can be gradually increased. Specifically, an air inlet pipe 93 is provided at the air inlet 113, and the air inlet pipe 93 is connected to the gas supply mechanism.

[0056] Please see Figure 1 and Figure 3 , Figure 3A schematic diagram of a quartz tube cleaning apparatus according to an embodiment of the present disclosure is shown. In one embodiment, a quartz tube cleaning apparatus includes at least one atomizing spray head 10 according to any of the above embodiments, and further includes a support portion 20, a cleaning liquid supply mechanism (not shown) and a gas supply mechanism (not shown). The support portion 20 is used to place the quartz tube 30 to be cleaned, the liquid inlet 112 is connected to the cleaning liquid supply mechanism, the air inlet 113 is connected to the gas supply mechanism, and the atomizing exhaust port 114 of the atomizing spray head 10 faces the outer wall or inner wall of the quartz tube 30.

[0057] In operation, the aforementioned quartz tube cleaning device first opens the first switch assembly 12 and closes the second switch assembly 13, allowing the cleaning fluid to enter the mixing chamber 111 through the inlet 112 and the gas to enter the mixing chamber 111 through the inlet 113 to mix with the cleaning fluid. Since the second switch assembly 13 is closed, the cleaning fluid and gas are prevented from escaping. After a preset amount of cleaning fluid has entered the mixing chamber 111, gas continues to be introduced into the mixing chamber through the inlet 113. Inside chamber 111; when the air pressure inside the mixing chamber 111 reaches a certain level, the first switch assembly 12 is closed and the second switch assembly 13 is opened. The mixture of gas and cleaning fluid inside the mixing chamber 111 is discharged outward through the atomizing exhaust port 114, and atomized gas is formed in the process of passing through the atomizing exhaust port 114. The atomized gas discharged outward has a good cleaning effect on the quartz tube 30, with high cleaning efficiency, while saving cleaning fluid. Moreover, the product structure of the atomizing spray head 10 is relatively simple and the cost is low.

[0058] It should be noted that the cleaning solutions provided by the cleaning solution providers include, but are not limited to, deionized water, cleaning acids, etc. The specific solutions can be flexibly selected and adjusted according to actual needs, and no restrictions are imposed here.

[0059] The cleaning acids include, but are not limited to, hydrofluoric acid, hydrochloric acid, sulfuric acid, phosphoric acid, nitric acid, chromic acid, and mixed acids.

[0060] In addition, the gases provided by the gas supply organization include, but are not limited to, nitrogen, isopropanol (IPA) vapor, or inert gases.

[0061] Please see Figure 1 and Figure 3In one embodiment, there are multiple atomizing spray heads 10, including at least one first atomizing spray head 10a disposed above the quartz tube 30, at least one second atomizing spray head 10b disposed below the quartz tube 30 and extending into the interior of the quartz tube 30, and at least one third atomizing spray head 10c disposed on the side of the quartz tube 30. Thus, the atomized gas generated by the first atomizing spray head 10a is sprayed onto the top of the quartz tube 30 to clean the top of the quartz tube 30; the atomized gas generated by the second atomizing spray head 10b is sprayed onto the inner wall of the quartz tube 30 to clean the inner wall of the quartz tube 30; and the atomized gas generated by the third atomizing spray head 10c is sprayed onto the outer wall of the quartz tube 30 to clean the outer wall of the quartz tube 30. This achieves all-around cleaning of the quartz tube 30, ensuring good cleaning effect and high cleaning efficiency.

[0062] It should be noted that the atomizing spray heads 10, including but not limited to the first atomizing spray head 10a, the second atomizing spray head 10b, and the third atomizing spray head 10c, can be flexibly adjusted and set according to actual needs, and are not limited here. While increasing the number of atomizing spray heads 10 will help ensure the cleaning effect on the quartz tube 30, it will also complicate the structure of the quartz tube cleaning device, increasing the cost. Therefore, how to rationally arrange the positions of the atomizing spray heads 10, and how to minimize the number of atomizing spray heads 10 while ensuring the cleaning effect on the quartz tube 30, will be one of the key points of this disclosed device.

[0063] Please see Figure 1 and Figure 3 In one embodiment, the cleaning fluid supply mechanism includes a first supply mechanism for supplying deionized water and a second supply mechanism for supplying cleaning acid.

[0064] The first atomizing spray head 10a includes, but is not limited to, two. The inlet 112 of one first atomizing spray head 10a is connected to the first supply mechanism, and the inlet 112 of the other first atomizing spray head 10a is connected to the second supply mechanism. Thus, deionized water supplied by the first supply mechanism enters one of the first atomizing spray heads 10a and mixes with gas to generate atomized gas, which cleans the top of the quartz tube 30. Similarly, cleaning acid supplied by the second supply mechanism enters the other first atomizing spray head 10a and mixes with gas to generate atomized gas, which also cleans the top of the quartz tube 30, thereby achieving a good cleaning effect on the top of the quartz tube 30.

[0065] Furthermore, the second atomizing spray head 10b includes, but is not limited to, two. The inlet 112 of one second atomizing spray head 10b is connected to the first supply mechanism, and the inlet 112 of the other second atomizing spray head 10b is connected to the second supply mechanism. Thus, the deionized water supplied by the first supply mechanism enters one of the second atomizing spray heads 10b and mixes with the gas to generate atomized gas that cleans the inner wall of the quartz tube 30. Similarly, the cleaning acid supplied by the second supply mechanism enters the other second atomizing spray head 10b and mixes with the gas to generate atomized gas that cleans the inner wall of the quartz tube 30, thereby achieving a better cleaning effect on the inner wall of the quartz tube 30.

[0066] In addition, there are multiple third atomizing spray heads 10c, some of which have their liquid inlets 112 connected to the first supply mechanism and are arranged at intervals along the vertical direction; the other part of the third atomizing spray heads 10c have their liquid inlets 112 connected to the second supply mechanism and are arranged at intervals along the vertical direction.

[0067] Specifically, one part of the third atomizing spray head 10c is located on one side of the quartz tube 30, and can use the atomized gas generated by mixing the deionized water provided by the first providing mechanism with the gas to clean one side wall of the quartz tube 30. The other part of the third atomizing spray head 10c is located on the other side of the quartz tube 30, and can use the atomized gas generated by mixing the cleaning acid provided by the second providing mechanism with the gas to clean one side wall of the quartz tube 30, thereby achieving a better cleaning effect on the outer wall of the quartz tube 30.

[0068] Please see Figure 1 and Figure 3In one embodiment, the liquid inlet 112 of one first atomizing spray head 10a, the liquid inlet 112 of one second atomizing spray head 10b, and the liquid inlet 112 of a portion of the third atomizing spray head 10c are each connected to the first supplying mechanism via a first inlet pipe 91. The liquid inlet 112 of another first atomizing spray head 10a, the liquid inlet 112 of another second atomizing spray head 10b, and the liquid inlet 112 of another portion of the third atomizing spray head 10c are each connected to the second supplying mechanism via a second inlet pipe 92. A first flow regulating valve (not shown in the figure) is provided on the first inlet pipe 91, and a second flow regulating valve (not shown in the figure) is provided on the second inlet pipe 92. Thus, the first supplying mechanism delivers deionized water through the first inlet pipe 91 to one of the first atomizing spray heads 10a, one of the second atomizing spray heads 10b, and a portion of the third atomizing spray heads 10c, and the flow rate of deionized water delivered through the first flow regulating valve can be flexibly adjusted in real time according to actual needs. Similarly, the second supplying mechanism delivers cleaning acid through the second inlet pipe 92 to another of the first atomizing spray heads 10a, another of the second atomizing spray heads 10b, and another portion of the third atomizing spray heads 10c, and the flow rate of deionized water delivered through the second flow regulating valve can be flexibly adjusted in real time according to actual needs. Furthermore, deionized water and cleaning acid are delivered to different atomizing spray heads 10, where they mix with gas to produce atomized gas, which is then discharged. This avoids the undesirable phenomenon of cross-contamination caused by introducing deionized water and cleaning acid into the same atomizing spray head 10.

[0069] In one embodiment, the liquid inlets 112 of a portion of the third atomizing spray heads 10c are connected in parallel to the same first liquid inlet pipe 91, and are connected to the first supply mechanism through the same first liquid inlet pipe 91. That is, a plurality of first pairs of interfaces are provided along the length of the first liquid inlet pipe 91, and the plurality of first pairs of interfaces are connected to the liquid inlets 112 of a portion of the third atomizing spray heads 10c in a one-to-one correspondence, which simplifies the pipeline structure. Of course, the liquid inlets 112 of a portion of the third atomizing spray heads 10c can also be each connected to the first supply mechanism through a first liquid inlet pipe 91.

[0070] Similarly, the inlet 112 of another part of the third atomizing spray head 10c can be connected in parallel to the same second inlet pipe 92, and connected to the second supply mechanism through the same second inlet pipe 92. That is, a plurality of second pairs of interfaces are provided along the length of the second inlet pipe 92, and the plurality of second pairs of interfaces are connected to the inlet 112 of the other part of the third atomizing spray head 10c in a one-to-one correspondence, which simplifies the pipeline structure. Of course, the inlet 112 of the other part of the third atomizing spray head 10c can also be connected to the second supply mechanism separately through a second inlet pipe 92.

[0071] Please see Figure 1 , Figure 3 and Figure 5 , Figure 4 A schematic diagram of the structure of a first atomizing spray head 10a according to an embodiment of the present disclosure is shown. In one embodiment, the quartz tube cleaning device further includes a first mounting base 40. The first atomizing spray head 10a is disposed on the first mounting base 40. The first mounting base 40 is provided with a first lifting mechanism (not shown in the figure) for driving the first atomizing spray head 10a to rise and fall.

[0072] Alternatively, the first mounting base 40 may be provided with a first rotating mechanism (not shown in the figure) for driving the first atomizing spray head 10a to rotate.

[0073] In another embodiment, the first mounting base 40 is provided with a first lifting mechanism for driving the first atomizing spray head 10a to rise and fall, and a first rotating mechanism for driving the first atomizing spray head 10a to rotate. Thus, when the first lifting mechanism drives the first atomizing spray head 10a to rise and fall, the distance between the first atomizing spray head 10a and the top of the quartz tube 30 can be adjusted, thereby improving the cleaning effect. Furthermore, when the first rotating mechanism drives the first atomizing spray head 10a to rotate, it facilitates cleaning of all parts of the top of the quartz tube 30, ensuring a better cleaning effect.

[0074] The first rotating mechanism can drive the first atomizing spray head 10a to rotate clockwise or counterclockwise. The specific rotation angle can be 90°, 180°, 360°, 720° or other angles, which can be flexibly adjusted and set according to actual needs.

[0075] Please see Figure 1 , Figure 3 , Figure 6 and Figure 7 , Figure 6 A schematic diagram of the structure of the second atomizing spray head 10b according to an embodiment of the present disclosure is shown. Figure 7A schematic diagram of the second atomizing spray head 10b extending into the quartz tube 30 according to an embodiment of the present disclosure is shown. In one embodiment, the quartz tube cleaning device further includes a second mounting base 50. The second atomizing spray head 10b is disposed on the second mounting base 50. The second mounting base 50 is provided with a second lifting mechanism for driving the second atomizing spray head 10b to rise and fall.

[0076] Alternatively, the second mounting base 50 may be provided with a second rotating mechanism for driving the second atomizing spray head 10b to rotate.

[0077] In another embodiment, the second mounting base 50 is provided with a second lifting mechanism for driving the second atomizing spray head 10b to rise and fall, and a second rotating mechanism for driving the second atomizing spray head 10b to rotate. Thus, when the second lifting mechanism drives the second atomizing spray head 10b to rise and fall, it can adjust the height position of the second atomizing spray head 10b, thereby improving the cleaning effect; when the second rotating mechanism drives the second atomizing spray head 10b to rotate, it facilitates cleaning of all parts of the inner wall of the quartz tube 30, ensuring a better cleaning effect.

[0078] Similarly, the second rotating mechanism can drive the second atomizing spray head 10b to rotate clockwise or counterclockwise. The specific rotation angle can be 90°, 180°, 360°, 720° or other angles, which can be flexibly adjusted and set according to actual needs.

[0079] Please see Figure 1 and Figure 2 In one embodiment, the support portion 20 is provided with a third lifting mechanism for driving the quartz tube 30 to rise and fall.

[0080] Alternatively, the support portion 20 may be provided with a third rotating mechanism for driving the quartz tube 30 to rotate.

[0081] In another embodiment, the support portion 20 is provided with a third lifting mechanism for driving the quartz tube 30 to rise and fall, and a third rotating mechanism for driving the quartz tube 30 to rotate. Thus, when the third lifting mechanism drives the adaptation tube to rise and fall, the height position of the quartz tube 30 can be adjusted, thereby improving the cleaning effect; when the third rotating mechanism drives the quartz tube 30 to rotate, each part of the outer wall of the quartz tube 30 can be cleaned by the first atomizing spray head 10a and the second atomizing spray head 10b respectively, ensuring a good cleaning effect on the outer surface of the quartz tube 30.

[0082] Similarly, the third rotating mechanism can drive the quartz tube 30 to rotate clockwise or counterclockwise. The specific rotation angle can be 90°, 180°, 360°, 720° or other angles, which can be flexibly adjusted and set according to actual needs.

[0083] Of course, as some alternative solutions, the third atomizing spray head 10c can also be raised or lowered or rotated around the quartz tube 30 to improve the cleaning effect on the outer wall of the quartz tube 30.

[0084] Please see Figure 4 In one embodiment, the quartz tube cleaning apparatus further includes a cleaning chamber 60. The atomizing spray head 10 and the support portion 20 are both located within the cleaning chamber 60. The quartz tube cleaning apparatus also includes a control device 70 disposed outside the cleaning chamber 60, and a working indicator light 80. The control device 70 is electrically connected to the cleaning fluid supply mechanism, the gas supply mechanism, and the working indicator light 80. The control device 70 includes, but is not limited to, a control panel, a control operation board, etc. Thus, the control device 70 can, for example, set the process parameters of the cleaning fluid supply mechanism and the gas supply mechanism, and can control the operation and shutdown of the cleaning fluid supply mechanism and the gas supply mechanism. Furthermore, the working indicator light 80 displays the working status of the quartz tube cleaning apparatus in real time.

[0085] Please see Figure 1 and Figure 2 In one embodiment, an atomization method for the atomizing spray head 10 of any of the above embodiments includes the following steps: Cleaning fluid is introduced into the mixing chamber 111 through the liquid inlet 112, and gas is introduced into the mixing chamber 111 through the air inlet 113; before the cleaning fluid is introduced, the liquid inlet 112 is in the open state and the atomizing exhaust port 114 is in the closed state. After continuously introducing cleaning fluid and gas into the mixing chamber 111, the pressure inside the mixing chamber 111 causes the inlet 112 to be closed and the atomizing exhaust port 114 to be open, so that the cleaning fluid and gas in the mixing chamber 111 can be discharged from the atomizing exhaust port 114.

[0086] Specifically, it includes the following steps: Step S10: Open the first switch assembly 12 and close the second switch assembly 13, so that the cleaning fluid enters the mixing chamber 111 through the liquid inlet 112 and the gas enters the mixing chamber 111 through the air inlet 113 to mix with the cleaning fluid.

[0087] At this time, since the second switch assembly 13 is in the closed state, the cleaning fluid and gas can be prevented from being discharged outward.

[0088] Step S20: After a preset amount of cleaning fluid enters the mixing chamber 111, the first switch assembly 12 is closed, and gas continues to be introduced into the mixing chamber 111 through the air inlet 113. Step S30: When the air pressure inside the mixing chamber 111 reaches the preset pressure, the second switch assembly 13 is opened, and the mixture of gas and cleaning liquid inside the mixing chamber 111 is discharged outward through the atomizing exhaust port 114, and atomized gas is formed in the process of passing through the atomizing exhaust port 114.

[0089] The atomization method of the atomizing spray head 10 described above has a good cleaning effect on the quartz tube 30, high cleaning efficiency, and can save cleaning fluid and reduce costs.

[0090] In one embodiment, the atomization method of the atomizing spray head 10 further includes: step S40, cyclically performing steps S10 to S30.

[0091] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0092] The embodiments described above are merely illustrative of several implementations of this disclosure, and while the descriptions are specific and detailed, they should not be construed as limiting the scope of the disclosed patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this disclosure, and these all fall within the protection scope of this disclosure. Therefore, the protection scope of this patent should be determined by the appended claims.

[0093] In the description of this disclosure, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this disclosure.

[0094] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this disclosure, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0095] In this disclosure, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0096] In this disclosure, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0097] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

Claims

1. An atomizing spray head, characterized in that, The atomizing spray head includes: The main body is provided with a mixing chamber, a liquid inlet, an air inlet, and an atomizing exhaust port. The liquid inlet, the air inlet, and the atomizing exhaust port are respectively connected to the mixing chamber. A first switch assembly, disposed on the body, is used to control the liquid inlet to open or close; The second switch assembly is disposed on the body and is used to control the opening or closing of the atomizing exhaust port; The liquid inlet and the atomizing exhaust port are in different working states; When the pressure in the mixing chamber is greater than the preset pressure, the first switch assembly closes the liquid inlet under pressure, and the second switch assembly opens the atomizing exhaust port under pressure. When the pressure in the mixing chamber is less than the preset pressure, the first switch assembly resets and opens the liquid inlet, and the second switch assembly closes the atomizing exhaust port under pressure.

2. The atomizing spray head according to claim 1, characterized in that, The first switch assembly includes a first sealing element and a first elastic element; the first sealing element is connected to the body through the first elastic element, and the first sealing element is movably disposed inside the mixing chamber for opening or closing the liquid inlet.

3. The atomizing spray head according to claim 2, characterized in that, The mixing chamber includes a main chamber and a first movable channel. One end of the first movable channel is connected to the main chamber, and the other end of the first movable channel is connected to the liquid inlet. The first switch assembly is disposed in the first movable channel. The inner diameter of the first movable channel is smaller than the inner diameter of the main chamber and larger than the diameter of the liquid inlet. The first sealing member is movably disposed inside the first movable channel for abutting against the wall of the liquid inlet to close the liquid inlet and separating from the liquid inlet to open the liquid inlet.

4. The atomizing spray head according to claim 3, characterized in that, The main body is also provided with a liquid inlet channel communicating with the mixing chamber, and the liquid inlet is formed at one end of the liquid inlet channel near the mixing chamber.

5. The atomizing spray head according to claim 2, characterized in that, The second switch assembly includes a second sealing member and a second elastic member; the second sealing member is connected to the body through the second elastic member, and the second sealing member is movably disposed inside the mixing chamber for opening or closing the atomizing exhaust port.

6. The atomizing spray head according to claim 5, characterized in that, The mixing chamber includes a main chamber and a second movable channel; one end of the second movable channel is connected to the main chamber, and the other end of the second movable channel is connected to the atomizing exhaust port; the inner diameter of the second movable channel is smaller than the inner diameter of the main chamber, and the inner diameter of the second movable channel is larger than the inner diameter of the atomizing exhaust port. The second switch assembly is disposed in the second active channel, the second active channel having a sealing section, the second sealing member being used to abut against the sealing section to close the atomizing exhaust port, and to separate from the sealing section to open the atomizing exhaust port.

7. The atomizing spray head according to claim 6, characterized in that, The inner diameter of the sealing section tends to decrease in the direction away from the atomizing exhaust port.

8. The atomizing spray head according to claim 6, characterized in that, A transition section is provided at one end of the second active channel away from the main chamber. The transition section is connected to the atomizing exhaust port, and the inner diameter of the transition section decreases in the direction toward the atomizing exhaust port.

9. The atomizing spray head according to claim 5, characterized in that, The elastic modulus of the second elastic element is greater than that of the first elastic element.

10. The atomizing spray head according to any one of claims 1 to 9, characterized in that, A one-way valve is provided at the air inlet, which is used to allow the gas from the air inlet to flow into the mixing chamber in one direction.

11. A quartz tube cleaning device, characterized in that, The quartz tube cleaning device includes at least one atomizing spray head as described in any one of claims 1 to 10, and further includes a support portion, a cleaning liquid supply mechanism, and a gas supply mechanism; the support portion is used to place the quartz tube to be cleaned, the liquid inlet is connected to the cleaning liquid supply mechanism, the air inlet is connected to the gas supply mechanism, and the atomizing exhaust hole of the atomizing spray head faces the outer wall or inner wall of the quartz tube.

12. The quartz tube cleaning device according to claim 11, characterized in that, The atomizing spray head is a plurality of such atomizing spray heads, including at least one first atomizing spray head disposed above the quartz tube, at least one second atomizing spray head disposed below the quartz tube and extending into the interior of the quartz tube, and at least one third atomizing spray head disposed on the side of the quartz tube.

13. The quartz tube cleaning device according to claim 12, characterized in that, The cleaning fluid supply mechanism includes a first supply mechanism for supplying deionized water and a second supply mechanism for supplying cleaning acid; There are two first atomizing spray heads, one of which has its liquid inlet connected to the first supply mechanism, and the other has its liquid inlet connected to the second supply mechanism. There are two second atomizing spray heads, one of which has its liquid inlet connected to the first supply mechanism, and the other has its liquid inlet connected to the second supply mechanism. There are multiple third atomizing spray heads, some of which have their liquid inlets connected to the first supply mechanism and are arranged at intervals along the vertical direction; the other part of the third atomizing spray heads have their liquid inlets connected to the second supply mechanism and are arranged at intervals along the vertical direction.

14. The quartz tube cleaning device according to claim 13, characterized in that, The liquid inlet of one of the first atomizing spray heads, the liquid inlet of one of the second atomizing spray heads, and a portion of the liquid inlets of the third atomizing spray heads are each connected to the first supply mechanism via a first liquid inlet pipe; the liquid inlet of another first atomizing spray head, another liquid inlet of the second atomizing spray head, and another portion of the liquid inlets of the third atomizing spray heads are each connected to the second supply mechanism via a second liquid inlet pipe; a first flow regulating valve is provided on the first liquid inlet pipe, and a second flow regulating valve is provided on the second liquid inlet pipe.

15. The quartz tube cleaning device according to claim 12, characterized in that, The quartz tube cleaning device further includes a first mounting base; the first atomizing spray head is disposed on the first mounting base; the first mounting base is provided with a first lifting mechanism for driving the first atomizing spray head to rise and fall, and / or a first rotating mechanism for driving the first atomizing spray head to rotate.

16. The quartz tube cleaning device according to claim 12, characterized in that, The quartz tube cleaning device further includes a second mounting base; the second atomizing spray head is disposed on the second mounting base; the second mounting base is provided with a second lifting mechanism for driving the second atomizing spray head to rise and fall, and / or a second rotating mechanism for driving the second atomizing spray head to rotate.

17. The quartz tube cleaning apparatus according to claim 11, characterized in that, The supporting part is provided with a third lifting mechanism for driving the quartz tube to rise and fall, and / or a third rotating mechanism for driving the quartz tube to rotate.

18. A method for atomizing a spray head as described in any one of claims 1 to 10, characterized in that, The atomization method of the atomizing spray head includes the following steps: Cleaning fluid is introduced into the mixing chamber through the liquid inlet, and gas is introduced into the mixing chamber through the air inlet; before the cleaning fluid is introduced, the liquid inlet is in the open state and the atomizing exhaust port is in the closed state. After the cleaning fluid and the gas are continuously introduced into the mixing chamber, the pressure in the mixing chamber causes the inlet to be closed and the atomizing exhaust port to be open, so that the cleaning fluid and gas in the mixing chamber can be discharged from the atomizing exhaust port.

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